JP2012015824A5 - - Google Patents

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Publication number
JP2012015824A5
JP2012015824A5 JP2010150688A JP2010150688A JP2012015824A5 JP 2012015824 A5 JP2012015824 A5 JP 2012015824A5 JP 2010150688 A JP2010150688 A JP 2010150688A JP 2010150688 A JP2010150688 A JP 2010150688A JP 2012015824 A5 JP2012015824 A5 JP 2012015824A5
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JP
Japan
Prior art keywords
crystal
thickness
electrodes
excitation
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010150688A
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English (en)
Japanese (ja)
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JP2012015824A (ja
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Publication date
Application filed filed Critical
Priority to JP2010150688A priority Critical patent/JP2012015824A/ja
Priority claimed from JP2010150688A external-priority patent/JP2012015824A/ja
Publication of JP2012015824A publication Critical patent/JP2012015824A/ja
Publication of JP2012015824A5 publication Critical patent/JP2012015824A5/ja
Pending legal-status Critical Current

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JP2010150688A 2010-07-01 2010-07-01 圧電振動デバイス及び圧電振動デバイスの製造方法 Pending JP2012015824A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010150688A JP2012015824A (ja) 2010-07-01 2010-07-01 圧電振動デバイス及び圧電振動デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010150688A JP2012015824A (ja) 2010-07-01 2010-07-01 圧電振動デバイス及び圧電振動デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2012015824A JP2012015824A (ja) 2012-01-19
JP2012015824A5 true JP2012015824A5 (enExample) 2013-07-11

Family

ID=45601719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010150688A Pending JP2012015824A (ja) 2010-07-01 2010-07-01 圧電振動デバイス及び圧電振動デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP2012015824A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6760430B1 (ja) * 2019-03-27 2020-09-23 株式会社大真空 水晶振動デバイス

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378425U (enExample) * 1986-11-07 1988-05-24
JPH025931U (enExample) * 1988-06-24 1990-01-16
JPH06252687A (ja) * 1993-02-24 1994-09-09 Sumitomo Metal Ind Ltd 圧電共振素子
JP4060972B2 (ja) * 1999-01-29 2008-03-12 セイコーインスツル株式会社 圧電振動子及びその製造方法
JP3937627B2 (ja) * 1999-02-02 2007-06-27 セイコーエプソン株式会社 水晶振動子及びその製造方法
JP3374778B2 (ja) * 1999-02-25 2003-02-10 株式会社村田製作所 チップ型電子部品
JP2001267875A (ja) * 2000-03-22 2001-09-28 Seiko Epson Corp 水晶振動子及びその製造方法
JP2006180385A (ja) * 2004-12-24 2006-07-06 Seiko Epson Corp 水晶振動子及びその製造方法

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