JP2012015077A - Manufacturing method and manufacturing device of organic el element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method and manufacturing device of an organic electroluminescent (EL) element capable of eliminating defects caused by the scattering of functional liquid to a substrate.SOLUTION: The manufacturing method of an organic EL element using a nozzle apply method includes: a step for a nozzle 1, for discharging functional liquid including a functional material for an organic EL element, to reciprocate above a substrate 2 and the off-substrate 2; a step to perform pitch feeding to the substrate in synchronization with the reciprocating motion; and a step to form a pattern of the functional material by discharging the functional material liquid onto the substrate from the nozzle. In the method, gas is sent from the top to the bottom of the nozzle on the substrate and off the substrate.

Description

  The present invention relates to a method and apparatus for manufacturing an organic EL element, and more particularly to a method and apparatus for manufacturing an organic EL element that can eliminate defects caused by scattering of a functional liquid onto a substrate.

  Since organic molecules themselves emit light from organic EL elements, image display devices using organic EL elements have recently attracted attention due to their features such as simple structure and high contrast. Therefore, research and development related to organic EL elements have been actively conducted for various uses such as displays and lighting of televisions and mobile devices.

  As a method of patterning an organic EL material that is a constituent material of an organic EL element, a method of vacuum-depositing a luminescent material through a shadow mask, an inkjet, nozzle coating, dispenser, gravure printing, a luminescent material dissolved in an organic solvent, There are a method of applying to a predetermined site by screen printing, letterpress printing, etc., a method of destroying unnecessary portions by ultraviolet irradiation, and the like. Among these, the discharge coating method (nozzle coating, ink jet, etc.) has high utilization efficiency of materials and is advantageous in terms of manufacturing cost. Therefore, various studies have been made for practical use. In particular, the nozzle coating method has recently been actively studied because of its simpler device mechanism and wider range of applicable ink physical properties than inkjet.

  In the nozzle coating method, a functional liquid having a functional material is sent to the nozzle at a constant speed using a constant flow pump, and the nozzle is reciprocated while the liquid is continuously discharged from the nozzle to move the substrate. This is a method of forming a pattern of a functional material by pitch feeding.

  In the nozzle coating method, the functional liquid is in a liquid column state at the moment when it is ejected from the nozzle, but after a certain distance from the nozzle ejection hole (about 1 mm depending on conditions), it becomes free. A stable droplet state is obtained by the surface tension. The substrate is applied at a distance that is in the liquid column state, but there is no substrate to which the functional liquid is applied in the area where there is no substrate, that is, in the end of the reciprocating movement of the nozzle or the nozzle acceleration / deceleration area. Therefore, the discharged functional liquid becomes droplets. There is a problem in that the droplets are swept up by the wind of a nozzle that reciprocates at high speed, and are applied to the substrate, causing defects.

  To solve the above problems, there is a technique for receiving a droplet by providing a slit groove (Patent Document 1), an inclined portion (Patent Document 2), and a coating member (Patent Document 3) in an area where there is no substrate. But it was not enough to prevent defects.

JP 2006-231192 A JP 2008-289960 A JP 2008-284456 A

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an organic EL element manufacturing method and a manufacturing apparatus that can eliminate defects caused by scattering of a functional liquid onto a substrate.

  The present invention includes a step in which a nozzle for discharging a functional liquid having a functional material for an organic EL element reciprocates between the substrate and the outside of the substrate, a step of pitch-feeding the substrate in synchronization with the reciprocation, A step of discharging a functional material solution from a nozzle onto a substrate to form a pattern of the functional material, and a method for manufacturing an organic EL element by a nozzle coating method, wherein the substrate An object of the present invention is to provide a method for producing an organic EL element, characterized in that gas is blown outside the substrate.

  According to such a configuration, it is possible to eliminate the problem that the droplet of the functional material solution is swept up by the wind of a nozzle that reciprocates at high speed and is applied to the substrate, causing a defect. it can.

  Moreover, this invention provides the manufacturing method of the organic EL element characterized by ventilating the gas which passed the filter.

  According to such a structure, it can eliminate that the dust and dust which are contained in the gas which blows adheres to a board | substrate, and can eliminate the defect of an organic EL element.

  The present invention also provides a method for producing an organic EL element, wherein the gas is inert to the functional material.

  According to such a configuration, it is possible to eliminate the problem that the droplet of the functional material solution is swept up by the wind of a nozzle that reciprocates at high speed, and is applied to the substrate, causing a defect. . Furthermore, even when using a functional material solution in which it is not preferable to blow gas due to instability of the structure, it is possible to blow air.

  The present invention also provides a method for producing an organic EL element, characterized in that a droplet absorbing member is provided below the movement range of the nozzle outside the substrate.

  According to such a configuration, the adsorption member adsorbs the functional liquid, thereby preventing the functional liquid from being formed into droplets and suppressing the scattering of the functional liquid onto the substrate. As a result, it is possible to solve the problem that the droplet of the functional material solution is swept up by the wind of a nozzle that reciprocates at high speed, and is applied to the substrate, causing defects.

  Moreover, this invention provides the manufacturing method of the organic EL element characterized by providing the part which inhales the blown gas.

  According to such a configuration, the portion that sucks in the blown gas absorbs the functional liquid, thereby preventing the functional liquid from forming droplets and suppressing the scattering of the functional liquid onto the substrate. As a result, it is possible to solve the problem that the droplet of the functional material solution is swept up by the wind of a nozzle that reciprocates at high speed, and is applied to the substrate, causing defects. Moreover, it is possible to create an arbitrary air flow by installing a portion to be sucked in an arbitrary position. As a result, it is possible to finely adjust the amount of blown air that strikes the substrate and the amount of blown air.

  The present invention is also an apparatus for discharging the functional liquid onto a substrate, the nozzle discharging the functional liquid while reciprocating between the substrate and the outside of the substrate, a stage for supporting the substrate, and an upper side of the nozzle. A blower unit that blows gas to prevent the functional liquid from scattering to the substrate downward and out of the substrate, and a constant flow pump that transports a certain amount of the functional liquid to the nozzle per hour. The manufacturing apparatus of the organic EL element characterized by these is provided.

  According to such a configuration, the nozzle that discharges the functional liquid having the functional material for the organic EL element reciprocates between the substrate and the outside of the substrate, and the substrate is pitched in synchronization with the reciprocation. A method of forming a functional material pattern by discharging a functional material solution from a nozzle onto a substrate, and a method of manufacturing an organic EL element by a nozzle coating method. Thus, the organic EL element can be manufactured by the organic EL element manufacturing method characterized in that gas is blown outside the substrate and the substrate, so that the droplets of the functional material solution reciprocate at high speed. It is lifted by the wind of the moving nozzle, and defects caused by scattering of the functional liquid onto the substrate can be eliminated.

  In the method and apparatus for manufacturing an organic EL element according to the present invention, it is possible to eliminate defects due to scattering of the functional liquid onto the substrate by blowing gas from above the nozzle.

It is process drawing which shows an example of the manufacturing method of the semiconductor element of this invention.
It is a schematic diagram which shows an example of the nozzle coating method of this invention. It is a conceptual diagram which shows an example of the ventilation of this invention. It is a schematic diagram which shows an example of the manufacturing apparatus and manufacturing method of the organic EL element which has the absorption member of this invention. It is a schematic diagram which shows an example of the manufacturing method and manufacturing apparatus of the organic EL element which has an air intake unit in the apparatus of this invention.

[First embodiment]
Hereinafter, drawings according to the present invention will be described. FIG. 1 is a schematic view showing an example of the nozzle coating method of the present invention. The substrate 2 is set on a base composed of a Yθ stage 8 provided with a substrate fixing stage 7. The functional liquid is discharged from the nozzle 1 to the substrate 2 and applied to the substrate 2 to form a pattern of functional material. The nozzle 1 moves in and out of the substrate 2 as shown. The nozzle 1 accelerates outside the substrate 2 and moves at a constant speed inside the substrate 2. FIG. 2 is a conceptual diagram showing an example of air blowing according to the present invention. As shown in the figure, the air is blown outside the substrate 2 and the substrate 2 from the upper side of the nozzle 1 to the lower side using the blower unit 4.

  In the manufacturing method according to the first embodiment, as shown in FIG. 1, a nozzle 1 that discharges a functional liquid having a functional material for an organic EL element reciprocates between the substrate 2 and the outside of the substrate 2, As shown in FIG. 2, the substrate 2 is pitch-synchronized with the reciprocating movement, and the functional material solution is discharged from the nozzle 1 onto the substrate 2 to form a functional material pattern. Using the blower unit 4, gas is blown outside the substrate 2 and the substrate 2 from the upper side to the lower side of the nozzle 1.

  According to the manufacturing method according to the first embodiment, the liquid droplets ejected toward the liquid cradle and the liquid droplets accumulated on the liquid cradle rise to the wind of the nozzle 1 reciprocating at high speed. In other words, the problem of coating the substrate 2 and causing defects can be solved.

(substrate)
The substrate 2 is not particularly limited, such as glass, a resin film, or a metal foil, but wiring, switching elements (TFT), an anode, an insulating film, and a liquid repellent partition are formed as necessary. Further, the size of the substrate 2 is not particularly limited. The stage that supports the substrate 2 is preferably a Yθ stage 8 mainly including a substrate fixing stage 7. The substrate fixing stage 7 has a function of fixing the substrate 2 with a vacuum, a fixture or the like. In order to increase the flatness of the substrate, it is preferable to adsorb while sucking with a pump through a porous surface plate. The Yθ stage 8 has a function of accurately performing pattern position alignment when a pattern of a functional material is applied to the substrate 2. With respect to movement in the Y direction, it is necessary to accurately perform pitch feed at the time of coating, and precision of operation resolution is required. Specifically, the moving resolution is preferably 1 μm or less. Regarding the rotation in the θ direction, it is desirable that the angle can be adjusted as finely as possible, and it is preferable that the rotation resolution is at least 0.1 degrees or less. Further, if the size of the substrate fixing stage is too large, it will cause the stage to become dirty, and if it is too small, it will cause the substrate to bend. Further, pitch feed and stage movement or rotation are controlled by an internal or external motor.

(Liquid repellent partition)
The liquid repellent partition material is used as an auxiliary to accurately place the functional liquid applied by nozzle application at a predetermined position, and is subjected to plasma treatment with a fluorine-based gas after forming a photoresist pattern. A photo resist that contains a liquid repellent component such as a fluorine-based material, or a liquid repellent material formed on the entire surface and patterned using photocatalytic lithography is preferable.

(nozzle)
The nozzle 1 has a mechanism that always discharges a constant amount of functional liquid during application by extruding the functional liquid from the constant flow pump 5. The constant flow pump 5 is not particularly limited, and any constant flow pump 5 may be used as long as a constant amount of functional liquid can be sent to the nozzle 1 without pulsation. A syringe pump or a pressure pump is preferable.

(Organic EL device)
An organic EL element has a structure in which an organic light emitting material is sandwiched between a pair of electrodes, and electrons are injected from one electrode and holes are injected from the other electrode. The structure of the structure is not particularly limited and may be any structure. For example, an anode, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and a cathode The structure laminated | stacked in this order can be mentioned. Each layer may be a single layer or two or more layers, or a mixed layer of a plurality of materials.

  The functional liquid is a solution containing a functional material that is a material related to electron transfer and light emission. Examples of the functional material used for the functional liquid include a hole injection layer material, a hole transport layer material, a light emitting layer material, an electron transport layer material, and an electron injection layer material. Examples of the solvent used for the functional liquid include water and various organic solvents. The organic solvent is not particularly limited as long as the following various functional materials are suitably dissolved, but in consideration of the control of drying after coating and the influence of alteration and decomposition of the functional materials. Select. Specifically, alkylated aromatics, halogenated aromatics, aromatic ethers, aromatic esters, aliphatic esters, aliphatic ketones and other solvents, or mixed solvents thereof are suitable. It is.

  As the hole injection layer material used for the functional liquid, polythiophene derivatives, polyaniline derivatives, arylamine derivatives, metal oxides, metal nanoparticles, metal complexes, and the like are suitable.

  The hole transport layer material used for the functional liquid is preferably an arylamine derivative.

  The light emitting layer material used for the functional liquid is roughly classified into three types: a dye-based light-emitting material, a metal complex-based light-emitting material, and a polymer-based light-emitting material. For example, the dye-based luminescent materials include cyclopentamine derivatives, tetraphenylbutadiene derivatives, triphenylamine derivatives, oxadiazol derivatives, pyrazoloquinoline derivatives, distyrylbenzene derivatives, distyrylarylene derivatives, silole derivatives, thiophene ring compounds. Pyridine ring compounds, perinone derivatives, perylene derivatives, oligothiophene derivatives, trifumanylamine derivatives, oxadiazole dimers, pyrazoline dimers, and the like are suitable. In addition, as a metal complex light emitting material, aluminum quinolinol complex, benzoquinolinol beryllium complex, benzoxazole zinc complex, benzothiazole zinc complex, azomethyl zinc complex, porphyrin zinc complex, europium complex, or central metal, Al, Zn, A metal complex having a rare earth metal such as Be, Ir, Pt or the like or Tb, Eu, Dy or the like and having an oxadiazole, thiadiazole, phenylpyridine, phenylbenzimidazole, quinoline structure or the like as a ligand is suitable. . Examples of the polymer light-emitting material include polyparaphenylene vinylene derivatives, polythiophene derivatives, polyparaphenylene derivatives, polysilane derivatives, polyacetylene derivatives, polyfluorene derivatives, polyvinyl carbazole derivatives, and the like, or the above-described dye-based light-emitting materials and metal complexes. A material obtained by polymerizing a system light emitting material is suitable.

Electron transport layer materials used for the functional liquid are oxadiazole derivatives, triazole derivatives, bathocuproin, phenanthroline derivatives such as bathophenanthroline, quinolinol complexes such as tris (8-quinolinolato) aluminum complex (Alq ₃ ), nitro-substituted fluorenone derivatives, Anthraquinodimethane derivatives, diphenylquinone derivatives, thiopyran dioxide derivatives, naphthalene perylene derivatives, thiopyran dioxide derivatives, fluorenylidene methane derivatives, anthraquinodimethane derivatives, anthrone derivatives, and the like are suitable.

An electron injection layer material used in the functional fluid an alkali metal salt such as LiF and NaF, alkaline earth metal salts such as CaF _2, etc. quinolinol complexes such as 8-quinolinolato tritium complex (Liq) are preferred.

  Each functional fluid contains one or a combination of two or more components. Further, at least one or more layers may be formed by coating without forming all the layers by coating with a functional liquid, and the remaining layers may be formed by vacuum deposition or the like.

The anode is preferably made of a metal such as gold or platinum or a transparent / translucent conductive material such as ITO, ZnO, or SnO ₂ as a material. The material is formed into a thin film shape by vapor deposition or sputtering to improve transparency. Alternatively, the above-described nanoparticulate material may be dispersed in a solvent and formed by coating.

The cathode is preferably made of a metal, oxide such as sodium, magnesium, lithium, aluminum, silver, Al ₂ O ₃ or a mixture thereof as a material. The material is formed by vapor deposition or sputtering. Alternatively, the above-described nanoparticulate material may be dispersed in a solvent and formed by coating.

Since the organic EL element is easily deteriorated by water or oxygen, it is necessary to seal the organic EL element in order to block it from the outside air. The sealing method is that an inert gas is attached by attaching a deoxygenating dehydrating agent or the like to a glass recess provided with counterbore in an inert gas, and bonding the outer frame and the organic EL element substrate with an adhesive. And a method of forming a sealing layer having a barrier property of oxygen or water in a vacuum. A UV curable epoxy resin, a thermosetting epoxy resin, an acrylic resin, or the like is suitable for the adhesive at the time of bonding. The barrier sealing layer includes SiN, SiON, SiO, Al ₂ O _{3 and the} like, and a dense film is formed by sputtering or CVD. Before forming the sealing layer, it is preferable to form an insulating organic material as a protective film by vacuum deposition or the like in order to prevent damage to the organic EL element due to sputtering or CVD.

(Blower)
Using the air blowing unit 4, the air is blown out from the upper side of the nozzle 1 toward the lower side of the nozzle 1 toward the outside of the substrate 2. Since the functional liquid is suppressed by the gas flow and wind pressure generated by the air blowing, scattering of the functional liquid to the substrate 2 can be suppressed. By suppressing the scattering of the functional liquid, it is possible to prevent the defect of the substrate 2 due to the adhesion of the functional liquid to the substrate 2.

  As the gas used for blowing, a functional material may be decomposed or deteriorated by oxygen or water, so a gas that is inert with respect to the functional material such as nitrogen gas or rare gas is suitable. Depending on the compatibility with the functional material, air or any gas may be used. Inert to the functional material means that the component of the functional material is not affected by chemical change or physical change.

  The direction in which the air is blown from the upper side of the nozzle 1 to the lower side of the nozzle 1 may be any direction, but normally it is preferably perpendicular to the substrate 2 in order to suppress the scattering of the functional liquid. When it is desired to adjust the air volume, the direction may be oblique to the substrate 2.

  The range of air blowing is preferably outside the substrate 2 and the substrate 2, but more preferably, most of the causes of defects are droplets floating in the area outside the substrate 2 or the property of being deteriorated by air blowing. Because there is a functional liquid to have, the functional liquid applied by blowing is partially dried, and it is possible to reduce costs such as equipment costs such as blower units and maintenance costs such as electricity bills, Only outside the substrate 2 is good.

  The gas used for blowing air is preferably a gas from which dust or dust is removed with an ULPA (Ultra Low Penetration Air) filter or a HEPA (High Efficiency Particulate Air) filter in order to prevent foreign matter from adhering to the substrate 2 and causing defects. is there. Further, since some functional materials are weak against moisture, a dried gas is preferable depending on the functional material. Moreover, in order to keep the progress of drying of the functional liquid uniform, there is no particular limitation as long as the temperature is always controlled at a constant temperature, but it is preferably about 20 to 30 degrees near room temperature, more preferably 21. Within the range of -25 degrees is preferable.

[Second embodiment]
Hereinafter, the present invention will be described based on the illustrated embodiments. FIG. 3 is a schematic diagram illustrating an example of a manufacturing apparatus and a manufacturing method of an organic EL element having an absorbing member. Instead of the liquid cradle in FIG. 2, an adsorption member 6 is installed.

  The manufacturing method according to the second embodiment is the same as that of the first embodiment except that the adsorption member 6 absorbs the liquid droplets collected outside the substrate 2.

  According to the manufacturing method according to the second embodiment, since the adsorption member 6 adsorbs the functional liquid by installing the adsorption member 6 near the substrate 2, the functional liquid is prevented from being formed into liquid droplets. Scattering to 2 can be suppressed. By suppressing the scattering of the functional liquid, it is possible to prevent the defect of the substrate 2 due to the adhesion of the functional liquid to the substrate 2.

(Adsorption member)
The adsorbing member 6 is preferably a non-woven fabric or woven fabric such as waste or clean wiper, a porous material such as sponge or ceramics, a film of these materials, paper such as dust-free paper or inkjet paper, or filter paper such as a membrane filter. Yes, one or a combination of two or more.

  The size of the adsorbing member 6 may be any size as long as the functional liquid can be prevented from forming droplets.

  In order to prevent the functional liquid from forming droplets, the suction member 6 is usually located only below the moving range of the nozzle 1, but more preferably, it is wider than the moving range of the nozzle 1. In addition, it is preferable to provide a mechanism for appropriately moving and collecting in consideration of a decrease in the adsorption performance of the adsorption member.

  When the blower unit 4 can sufficiently suppress the scattering of the functional liquid onto the substrate 2 by simply blowing air from above the nozzle 1 to below the nozzle 1, the suction member 6 is not installed. May be.

[Third embodiment]
Hereinafter, the present invention will be described based on the illustrated embodiments. FIG. 4 is a diagram illustrating an apparatus for manufacturing an organic EL element having an intake unit. An air intake unit is installed instead of the liquid cradle in FIG.

  The manufacturing method according to the third embodiment is the same as the first embodiment except that the adsorption unit absorbs the liquid droplets collected outside the substrate 2.

  According to the manufacturing method according to the third embodiment, the intake unit 12 sucks the functional liquid, thereby preventing the functional liquid from forming droplets and suppressing the scattering of the functional liquid onto the substrate 2. By suppressing the scattering of the functional liquid, it is possible to prevent the defect of the substrate 2 due to the adhesion of the functional liquid to the substrate 2.

  Moreover, since the gas blown by the blower unit is sucked by installing the intake unit 12, the flow of gas can be controlled.

(Intake unit)
The intake unit 12 includes an intake port 10, a pipe 11, and a pump / fan 9. The material of the intake unit 12 is preferably made of a material that is inert to the functional liquid, such as metal, plastic, or ceramic.

  The shape of the air intake unit 12 is preferably the shape as shown in FIG. 4 where the functional liquid is easily sucked, but can take various shapes in consideration of the shape of other devices such as the blower and the substrate fixing stage 7. . For example, the shape seen from the side may be a triangle, a rectangle, or a semicircle.

  The place where the intake unit is installed is preferably below the moving range of the nozzle 1 in order to prevent the functional liquid from becoming droplets, but more preferably it is wider than the moving range of the nozzle 1. Further, when there is a restriction on the installation location, it may be installed beside the movement range of the nozzle 1.

  In the case where scattering of the functional liquid to the substrate 2 can be sufficiently suppressed only by blowing air like a down flow from above the nozzle 1 to below the nozzle 1 by the blower unit 4, it is not necessary to install an intake unit. Also good.

[Example 1]
(Board preparation process)
On the substrate on which ITO was patterned as the first electrode, a photoresist DL1602 made by Toray Industries, Inc. was patterned as an insulating layer by photolithography to define pixels. Further, the same photoresist to which fluoroalkylsilane was added was applied, and a lyophobic stripe pattern in the nozzle application region was formed by photolithography. The substrate was washed with a cleaning solution, rinsed with pure water, and then dried.

(Hole injection layer forming process)
The HEPA filter fan installed above the nozzle operation area was operated, and air blowing was started downward toward the area outside the substrate. A functional liquid in which molybdenum hexacarbonyl was dissolved in ethyl benzoate was fed from the pump 9 and discharge was started from the nozzle. The substrate was placed on a Yθ stage and fixed by vacuum suction.
The positions of the cameras were adjusted so that the nozzles passed under the two alignment cameras and the application trajectory could be confirmed with the alignment cameras. The nozzle was moved in the X-axis direction at high speed, and the coating locus was drawn on the substrate.

  The position of each camera was slightly moved so that the line of the monitor line generator overlapped with the center of the application trajectory. Next, the Yθ stage was moved, and the position was adjusted so that the stripe pattern in the nozzle application area and the camera monitor line were parallel, and the monitor line was centered between the stripe partition walls.

  The nozzle and the substrate were operated, the hole injection layer was applied, and the material could be applied without defects due to the rising and scattering of droplets. The coated substrate was moved to a vacuum dryer and the solvent was dried by exhausting with a pump 9. Next, the substrate was placed on a 200 degree hot plate and baked for 1 hour.

(Hole transport layer forming process)
The functional liquid is poly [(9,9-dioctylfluorenyl-2,7-diyl) -co- (4,4 ′-(N- (4-sec-butylphenyl)) diphenylamine)] and 2-methyl. A hole transport layer was coated on the hole injection layer in exactly the same manner except that −9,10 bis (naphthalen-2-yl) anthracene was changed to a functional liquid dissolved in ethyl benzoate.

  Similarly, the coated substrate was transferred to a vacuum dryer, and the solvent was dried by reducing the pressure. Next, the substrate was moved into a glove box that was purged with nitrogen and maintained at oxygen and moisture concentrations of 1.0 ppm or less, and baked on a hot plate at 200 degrees for 1 hour. The substrate was taken out of the glove box.

(Light emitting layer forming step)
The functional liquid was changed to an ethyl benzoate solution containing 1-tert-butyl-perylene as a luminescent dopant and 2-methyl-9,10 bis (naphthalen-2-yl) anthracene as a host. The light emitting layer was applied on the hole transport layer by the same method. Similarly, the coated substrate was transferred to a vacuum dryer, and the solvent was dried by reducing the pressure. Next, the substrate was moved into a glove box that was purged with nitrogen and maintained at oxygen and moisture concentrations of 1.0 ppm or less, and baked on a hot plate at 110 degrees for 30 minutes.

(Vapor deposition / sealing process)
Next, the substrate was moved from the glove box to a vapor deposition machine, and Alq ₃ as an electron transport layer, lithium fluoride as an electron injection layer were vapor deposited over the entire display region, and Al as a second electrode was vapor deposited by mask vapor deposition. Move the substrate to GB, paste a dehydrated oxygen scavenger (Dynic moisture getter sheet) on the counterbore of the counterbore glass, and UV-curable epoxy resin adhesive on the frame (Worldlock, Kyoritsu Chemical Industry Co., Ltd.) Was applied and bonded to the substrate. A mask was applied so that the display area was not irradiated with UV light, and the UV curable resin was cured to seal the display area. By connecting to an electric circuit, a high-quality organic EL panel free from defects caused by flying up was obtained.

<Example 2>
The same as in Example 1 except that MicroSeal (Berkshire Co., Ltd.) was installed as a droplet absorbing member below the reciprocating region of the nozzle and below the region where the substrate was not placed, about 1 mm away from the nozzle. When an organic EL panel was manufactured, a high-quality light-emitting panel could be manufactured without defects due to the rising of the solution.

<Example 3>
An organic EL panel was produced in the same manner as in Example 2 except that the liquid droplet absorbing member in Example 2 was changed to urethane sponge. As a result, a high-quality light-emitting panel could be produced without defects caused by the rising of the solution. It was.

<Example 4>
An organic EL panel was produced in the same manner as in Example 2 except that the droplet absorbing member in Example 2 was changed to a membrane filter. As a result, a high-quality light-emitting panel could be produced without defects due to the rising of the solution. It was.

<Example 5>
An organic EL panel was produced in the same manner as in Example 2 except that the droplet absorbing member in Example 2 was replaced with a porous silica plate, and a high-quality light-emitting panel was produced without defects caused by the rising of the solution. I was able to.

<Example 6>
An organic EL panel was produced in the same manner as in Example 2 except that the liquid droplet absorbing member in Example 2 was changed to an air intake unit, and a high-quality light-emitting panel without defects due to the rising of the solution was produced. I was able to.

<Comparative example>
An organic EL panel was produced in exactly the same manner except that the HEPA filter fan was not operated in the hole injection layer forming step, the hole transport layer forming step, and the light emitting layer forming step of Example 1. As a result, a large number of defect sites were generated by the rising of the liquid droplets of the functional liquid.

DESCRIPTION OF SYMBOLS 1 ... Nozzle 2 ... Substrate 3 ... Nozzle unit 4 ... Blower unit 5 ... Constant flow pump 6 ... Adsorption member 7 ... Substrate fixed stage 8 ... Yθ stage 9 ... Pump / fan 10 ... Intake port 11 ... Piping 12 ... Intake unit

Claims (6)

A step in which a nozzle for discharging a functional liquid having a functional material for an organic EL element reciprocates between the substrate and the outside of the substrate;
A step of pitch-feeding the substrate in synchronization with the reciprocating movement;
Discharging a functional material solution from the nozzle onto a substrate to form a functional material pattern; and
In the manufacturing method by the nozzle coating method of the organic EL element consisting of
A method of manufacturing an organic EL element, wherein gas is blown outside the substrate from the upper side to the lower side of the nozzle.
The method of manufacturing an organic EL element according to claim 1, wherein the gas that has passed through the filter is blown.
3. The method of manufacturing an organic EL element according to claim 1, wherein the gas is inert to the functional material.
4. The method of manufacturing an organic EL element according to claim 1, wherein a droplet absorbing member is provided below the movement range of the nozzle outside the substrate.
5. The method of manufacturing an organic EL element according to claim 1, wherein a portion for sucking the blown gas is provided.
An apparatus for discharging the functional liquid onto a substrate,
A nozzle that discharges the functional liquid while reciprocating between the substrate and the outside of the substrate;
A stage that supports the substrate,
A blower unit that blows a gas to prevent the functional liquid from splashing on the substrate outside the substrate and from the top to the bottom of the nozzle, and
A constant flow pump for transporting a constant amount of the functional fluid per hour to the nozzle;
A device for manufacturing an organic EL element, comprising:

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