JP2011524468A - プラズマを用いる形式の化学反応によって、基板上に層を析出する方法および装置 - Google Patents
プラズマを用いる形式の化学反応によって、基板上に層を析出する方法および装置 Download PDFInfo
- Publication number
- JP2011524468A JP2011524468A JP2011513893A JP2011513893A JP2011524468A JP 2011524468 A JP2011524468 A JP 2011524468A JP 2011513893 A JP2011513893 A JP 2011513893A JP 2011513893 A JP2011513893 A JP 2011513893A JP 2011524468 A JP2011524468 A JP 2011524468A
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- layer
- inlet
- plasma
- gas discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
- C23C14/0078—Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本発明は、真空チャンバ(11)内の化学反応を用いて、プラズマを用いて基板(12)上に層を析出する方法に関する。ここで、化学反応の少なくとも1つの基礎材料は、入口(13)を通じて真空チャンバ(11)内に供給され、入口(13)は、少なくとも入口開口部(18)の領域において、ガス放電の電極として接続されている。
Description
従って本発明の技術的な課題は、従来技術の欠点を克服することができる、プラズマを用いる形式の化学反応によって、層を析出する方法および装置を提供することである。殊にこの方法および装置は、化学反応に必要な基礎物質の多くの部分が化学反応によって変換され、層材料として析出されることを可能にする。さらに、この装置および方法は、柔軟なプラスチック基板上の光学機能を有する層系に対する層の析出に適しているべきである。
Claims (19)
- 真空チャンバ(11)内の化学反応を用いて、プラズマを用いて基板(12)上に層を析出する方法であって、
前記化学反応の少なくとも1つの基礎材料を、入口(13)を通じて前記真空チャンバ(11)内に供給する方法において、
当該入口(13)を、少なくとも入口開口部(18)の領域において、ガス放電の電極として接続する、
ことを特徴とする、真空チャンバ内の化学反応を用いて、プラズマを用いて基板上に層を析出する方法。 - 前記基礎材料の供給方向を、コーティングされるべき基板表面に対して垂直に配向する、または垂直に対して±20°の範囲の角度偏差で配向する、請求項1記載の方法。
- 前記入口を、ガス放電のアノードとして接続する、請求項1または2記載の方法。
- マグネトロン(13)を、プラズマを生成するために使用する、請求項1から3までのいずれか1項記載の方法。
- 前記マグネトロンをガス放電のカソードとして接続し、前記入口をガス放電のアノードとして接続する、請求項4記載の方法。
- 前記マグネトロンを、DC電流供給によって、またはパルス状のDC電流供給によって作動させる、請求項5記載の方法。
- 前記マグネトロン(15)および前記入口(13)を、ガス放電のカソードおよび属するアノードとして交互に作動させ、ここで前記マグネトロン(15)を、パルスパケット電流供給部(17)によって給電する、請求項4記載の方法。
- 前記化学反応のための前記基礎材料の他に、別の気体を前記入口(13)を通じて、前記真空チャンバ(11)内に供給する、請求項1から7までのいずれか1項記載の方法。
- 付加的に水素成分を有しているシリコン含有層を析出する、請求項1から8までのいずれか1項記載の方法。
- 前記層をバリヤ層系の平滑層として析出し、ここでは透明なセラミック層と平滑層が交互に析出されている、請求項1から9までのいずれか1項記載の方法。
- 硫黄またはセレニウムを含有している基礎材料を使用する、請求項1から10までのいずれか1項記載の方法。
- 前記層を層系の構成部分として析出し、ここで、当該層系の少なくとも1つの別の層はマグネトロンスパッタリングによって析出される、請求項1から11までのいずれか1項記載の方法。
- 前記マグネトロン(15)を電気的にパルスパケット電流供給部(17)と結合し、前記マグネトロンがカソードとして接続されている場合には、当該電流供給部から、1つのパケットにおいて最大で50個のパルスが送出され、前記入口がカソードとして接続されている場合には、当該電流供給部から、1つのパケットにおいて最大で10個のパルスが送出される、請求項1から12までのいずれか1項記載の方法。
- 真空チャンバ(11)内の化学反応を用いて、プラズマを用いて基板(12)上に層を析出する装置であって、
プラズマ(14)を生成する装置と、
少なくとも1つの入口(13)とを有しており、当該入口を通って前記化学反応の基礎材料が前記真空チャンバ(11)内に供給される装置において、
前記入口(13)は、少なくとも入口開口部(18)の領域において、ガス放電の電極として接続されている、
ことを特徴とする、真空チャンバ内の化学反応を用いて、プラズマを用いて基板上に層を析出する装置。 - 前記基礎材料の供給方向は、コーティングされるべき基板表面に対して垂直に配向されている、または垂直に対して±20°の範囲の角度偏差で配向されている、請求項14記載の装置。
- 前記プラズマを生成する装置は、少なくとも1つのマグネトロン(15)を含んでいる、請求項14または15記載の装置。
- 前記マグネトロンはガス放電のカソードとして接続されており、前記入口はガス放電のアノードとして接続されている、請求項16記載の装置。
- 前記マグネトロンは、DC電流供給部またはパルス状DC電流供給と電気的に結合されている、請求項17記載の装置。
- 前記マグネトロン(15)および前記入口(13)は、ガス放電のカソードとして、および属するアノードとして交互に接続される、請求項16記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008028542A DE102008028542B4 (de) | 2008-06-16 | 2008-06-16 | Verfahren und Vorrichtung zum Abscheiden einer Schicht auf einem Substrat mittels einer plasmagestützten chemischen Reaktion |
DE102008028542.0 | 2008-06-16 | ||
PCT/EP2009/003479 WO2010003476A1 (de) | 2008-06-16 | 2009-05-15 | Beschichtungsverfahren und vorrichtung mittels einer plasmagestützen chemischen reaktion |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011524468A true JP2011524468A (ja) | 2011-09-01 |
JP5726073B2 JP5726073B2 (ja) | 2015-05-27 |
Family
ID=41317854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011513893A Active JP5726073B2 (ja) | 2008-06-16 | 2009-05-15 | プラズマを用いる形式の化学反応によって、基板上に層を析出する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20110091662A1 (ja) |
EP (1) | EP2294239A1 (ja) |
JP (1) | JP5726073B2 (ja) |
DE (1) | DE102008028542B4 (ja) |
TW (1) | TWI401336B (ja) |
WO (1) | WO2010003476A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014142023A1 (ja) | 2013-03-15 | 2014-09-18 | 東レ株式会社 | プラズマcvd装置およびプラズマcvd方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010015149A1 (de) * | 2010-04-16 | 2011-10-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Beschichten eines Substrates innerhalb einer Vakuumkammer mittels plasmaunterstützter chemischer Dampfabscheidung |
DE102010055659A1 (de) * | 2010-12-22 | 2012-06-28 | Technische Universität Dresden | Verfahren zum Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens |
EP2811508B1 (en) * | 2013-06-07 | 2019-04-24 | Soleras Advanced Coatings bvba | Gas configuration for magnetron deposition systems |
EP2811509A1 (en) * | 2013-06-07 | 2014-12-10 | Soleras Advanced Coatings bvba | Electronic configuration for magnetron sputter deposition systems |
DE102015122024A1 (de) * | 2015-12-16 | 2017-06-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Schichtverbundes bestehend aus einer Kunststofffolie und einer darauf abgeschiedenen Schicht |
JP6914280B2 (ja) | 2016-06-10 | 2021-08-04 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウFraunhofer−Gesellschaft zur Foerderung der angewandten Forschung e.V. | 保護フィルムを備えたフレキシブル基材を被覆する方法 |
RU2658623C1 (ru) * | 2017-09-11 | 2018-06-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВО "МГТУ "СТАНКИН") | Устройство для синтеза покрытий на диэлектрических изделиях |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915982A (ja) * | 1982-07-19 | 1984-01-27 | 松下電器産業株式会社 | グラフイツク表示装置 |
JPS5915982B2 (ja) * | 1977-08-24 | 1984-04-12 | 日電アネルバ株式会社 | 放電化学反応装置 |
JP2003155572A (ja) * | 2001-11-16 | 2003-05-30 | Toppan Printing Co Ltd | 真空成膜装置 |
WO2006126598A1 (ja) * | 2005-05-27 | 2006-11-30 | Showa Shell Sekiyu K.K. | Cis系薄膜太陽電池の高抵抗バッファ層・窓層(透明導電膜)連続製膜方法及びその連続製膜方法を実施するための連続製膜装置 |
JP2007201069A (ja) * | 2006-01-25 | 2007-08-09 | Teijin Ltd | 太陽電池形成用ポリイミドフィルム |
JP2007522343A (ja) * | 2004-02-02 | 2007-08-09 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | ウルトラバリア膜の製造方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6362879A (ja) * | 1986-09-02 | 1988-03-19 | Anelva Corp | 真空化学反応装置 |
JPH07105037B2 (ja) * | 1987-05-12 | 1995-11-13 | 松下電器産業株式会社 | 金属磁性媒体の保護膜形成方法及びその装置 |
WO1989008605A1 (en) * | 1988-03-16 | 1989-09-21 | Kabushiki Kaisha Toshiba | Process for producing thin-film oxide superconductor |
JPH01245428A (ja) * | 1988-03-28 | 1989-09-29 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
DE4107556C1 (ja) * | 1991-03-08 | 1992-05-14 | Deutsche Airbus Gmbh, 2000 Hamburg, De | |
JPH0525648A (ja) * | 1991-07-15 | 1993-02-02 | Matsushita Electric Ind Co Ltd | プラズマcvd成膜方法 |
US5334302A (en) * | 1991-11-15 | 1994-08-02 | Tokyo Electron Limited | Magnetron sputtering apparatus and sputtering gun for use in the same |
DE4210125C2 (de) * | 1992-03-27 | 1996-02-01 | Fraunhofer Ges Forschung | Vorrichtung zum Gasflußsputtern |
DE4223505C1 (de) * | 1992-07-17 | 1993-11-04 | Fraunhofer Ges Forschung | Einrichtung zum aufbringen elektrisch schlecht leitender oder isolierender schichten durch reaktives magnetronsputtern |
DE4425626A1 (de) * | 1994-07-20 | 1996-01-25 | Leybold Ag | Verfahren und Vorrichtung zur plasmainduzierten Beschichtung einzelner Formteile mit metallischen und polymeren Schichten |
DE19545050C2 (de) * | 1994-12-07 | 1999-10-21 | Inovap Vakuum Und Plasmatechni | Verfahren und Einrichtung zur Abscheidung von Funktionsschichten auf einem Substrat mittels plasmagestützter Schichtabscheidung |
DE19506513C2 (de) * | 1995-02-24 | 1996-12-05 | Fraunhofer Ges Forschung | Einrichtung zur reaktiven Beschichtung |
EP0815283B1 (de) * | 1995-03-14 | 2002-06-19 | Eidgenössische Materialprüfungs- und Forschungsanstalt EMPA | Abscheiden von diffusionssperrschichten in einer niederdruckplasmakammer |
US5654043A (en) * | 1996-10-10 | 1997-08-05 | Eaton Corporation | Pulsed plate plasma implantation system and method |
KR100469047B1 (ko) * | 1997-04-11 | 2005-01-31 | 동경 엘렉트론 주식회사 | 처리장치, 상부전극유니트와 그 사용방법 및 전극유니트와 그 제조방법 |
JP3892996B2 (ja) * | 1999-09-02 | 2007-03-14 | 東京エレクトロン株式会社 | マグネトロンプラズマ処理装置 |
DE19947932C1 (de) * | 1999-09-28 | 2001-04-26 | Fraunhofer Ges Forschung | Einrichtung zum Magnetronzerstäuben |
DE19951017A1 (de) * | 1999-10-22 | 2001-05-03 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur Plasmabehandlung von Oberflächen |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
JP4703828B2 (ja) * | 2000-09-07 | 2011-06-15 | 株式会社アルバック | スパッタリング装置及び薄膜製造方法 |
AT410656B (de) * | 2001-10-24 | 2003-06-25 | Fischer Adv Components Gmbh | Trag- bzw. führungsvorrichtung für flugzeugkomponenten |
WO2004027825A2 (en) * | 2002-09-19 | 2004-04-01 | Applied Process Technologies, Inc. | Beam plasma source |
US7411352B2 (en) * | 2002-09-19 | 2008-08-12 | Applied Process Technologies, Inc. | Dual plasma beam sources and method |
US7166199B2 (en) * | 2002-12-18 | 2007-01-23 | Cardinal Cg Company | Magnetron sputtering systems including anodic gas distribution systems |
JP3965479B2 (ja) * | 2003-07-28 | 2007-08-29 | 株式会社エフ・ティ・エスコーポレーション | 箱型対向ターゲット式スパッタ装置及び化合物薄膜の製造方法 |
DE10339030B4 (de) * | 2003-08-25 | 2005-11-03 | Man Technologie Ag | Tragstruktur für eine ein- und ausfahrbare Klappe und deren Verwendung |
DE102004046390A1 (de) * | 2004-09-24 | 2006-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Vakuumbeschichten mit einer photohalbleitenden Schicht und Anwendung des Verfahrens |
JP2006252843A (ja) * | 2005-03-09 | 2006-09-21 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンス素子及びその製造方法 |
US7378002B2 (en) * | 2005-08-23 | 2008-05-27 | Applied Materials, Inc. | Aluminum sputtering while biasing wafer |
DE102007004760A1 (de) * | 2007-01-31 | 2008-08-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Beschichten von plattenförmigen oder bandförmigen metallischen Substraten |
-
2008
- 2008-06-16 DE DE102008028542A patent/DE102008028542B4/de not_active Expired - Fee Related
-
2009
- 2009-04-01 TW TW098110788A patent/TWI401336B/zh not_active IP Right Cessation
- 2009-05-15 WO PCT/EP2009/003479 patent/WO2010003476A1/de active Application Filing
- 2009-05-15 JP JP2011513893A patent/JP5726073B2/ja active Active
- 2009-05-15 US US12/997,388 patent/US20110091662A1/en not_active Abandoned
- 2009-05-15 EP EP09776618A patent/EP2294239A1/de not_active Ceased
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915982B2 (ja) * | 1977-08-24 | 1984-04-12 | 日電アネルバ株式会社 | 放電化学反応装置 |
JPS5915982A (ja) * | 1982-07-19 | 1984-01-27 | 松下電器産業株式会社 | グラフイツク表示装置 |
JP2003155572A (ja) * | 2001-11-16 | 2003-05-30 | Toppan Printing Co Ltd | 真空成膜装置 |
JP2007522343A (ja) * | 2004-02-02 | 2007-08-09 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | ウルトラバリア膜の製造方法 |
WO2006126598A1 (ja) * | 2005-05-27 | 2006-11-30 | Showa Shell Sekiyu K.K. | Cis系薄膜太陽電池の高抵抗バッファ層・窓層(透明導電膜)連続製膜方法及びその連続製膜方法を実施するための連続製膜装置 |
JP2007201069A (ja) * | 2006-01-25 | 2007-08-09 | Teijin Ltd | 太陽電池形成用ポリイミドフィルム |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014142023A1 (ja) | 2013-03-15 | 2014-09-18 | 東レ株式会社 | プラズマcvd装置およびプラズマcvd方法 |
KR20150130347A (ko) | 2013-03-15 | 2015-11-23 | 도레이 카부시키가이샤 | 플라즈마 cvd 장치 및 플라즈마 cvd 방법 |
JPWO2014142023A1 (ja) * | 2013-03-15 | 2017-02-16 | 東レ株式会社 | プラズマcvd装置およびプラズマcvd方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110091662A1 (en) | 2011-04-21 |
JP5726073B2 (ja) | 2015-05-27 |
DE102008028542B4 (de) | 2012-07-12 |
DE102008028542A1 (de) | 2009-12-17 |
TW201000669A (en) | 2010-01-01 |
WO2010003476A1 (de) | 2010-01-14 |
EP2294239A1 (de) | 2011-03-16 |
TWI401336B (zh) | 2013-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5726073B2 (ja) | プラズマを用いる形式の化学反応によって、基板上に層を析出する方法 | |
US11875976B2 (en) | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces | |
JP6513124B2 (ja) | プラズマ源、及びプラズマ強化化学蒸着を利用して薄膜被覆を堆積させる方法 | |
EP2211369A1 (en) | Arrangement for working substrates by means of plasma | |
Felmetsger et al. | Dual cathode DC–RF and MF–RF coupled S-Guns for reactive sputtering |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120127 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130530 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130610 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130910 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140707 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141006 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150302 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150331 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5726073 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |