JP2011520264A5 - - Google Patents

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Publication number
JP2011520264A5
JP2011520264A5 JP2011507606A JP2011507606A JP2011520264A5 JP 2011520264 A5 JP2011520264 A5 JP 2011520264A5 JP 2011507606 A JP2011507606 A JP 2011507606A JP 2011507606 A JP2011507606 A JP 2011507606A JP 2011520264 A5 JP2011520264 A5 JP 2011520264A5
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Japan
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determining whether
reached
current
polishing
substrate
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JP2011507606A
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JP2011520264A (ja
JP5542802B2 (ja
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Priority claimed from PCT/US2009/042085 external-priority patent/WO2009134865A2/fr
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Publication of JP2011520264A5 publication Critical patent/JP2011520264A5/ja
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JP2011507606A 2008-05-02 2009-04-29 複数のスペクトルを使用する化学機械研磨での終点検出 Active JP5542802B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4996508P 2008-05-02 2008-05-02
US61/049,965 2008-05-02
PCT/US2009/042085 WO2009134865A2 (fr) 2008-05-02 2009-04-29 Détection de point d'extrémité dans un polissage chimico-mécanique à l'aide de multiples spectres

Publications (3)

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JP2011520264A JP2011520264A (ja) 2011-07-14
JP2011520264A5 true JP2011520264A5 (fr) 2012-06-21
JP5542802B2 JP5542802B2 (ja) 2014-07-09

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JP2011507606A Active JP5542802B2 (ja) 2008-05-02 2009-04-29 複数のスペクトルを使用する化学機械研磨での終点検出

Country Status (5)

Country Link
US (1) US20090275265A1 (fr)
JP (1) JP5542802B2 (fr)
KR (2) KR101619374B1 (fr)
CN (2) CN102017094B (fr)
WO (1) WO2009134865A2 (fr)

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