JP2011516736A - Mask support, mask assembly, and assembly comprising mask support and mask - Google Patents

Abstract

  The mask support 10 includes a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a member formed entirely of a flexible material. It includes a lever or arm portion 37 having a first fastening projection 38 that extends at an angle of approximately 90 ° from the free end of the arm portion 37. The mask assembly 40 includes a thin layer mask 41, for example made of a thin metal foil, and a connecting element 42. The connection element 42 includes a fastening portion 43 for fastening with the fastening protrusion 38 of the elastic element 30. The mask 41 is not only easily removed from the mask support 10, but may be attached / stretched to the mask support 10.

Description

Field of Invention

  The present invention relates to a mask support that supports a mask, in particular a thin layer mask used in an OLED coating apparatus, and includes a frame element and an elastic element. Furthermore, the present invention relates to a mask support for supporting a mask, particularly for use in an OLED coating apparatus, for supporting a thin layer mask and comprising a plurality of elastic elements, Both the first elastic element and the second elastic element include a lever or an arm portion, and first fastening means disposed on the first elastic element and the second elastic element, respectively, and the first fastening means is the mask. Fastened with corresponding second fastening means provided on the mask assembly for transporting, the elastic element configured to secure the mask to the frame and to stretch the mask supported within the frame element Is done. The present invention further relates to a mask assembly provided for attaching a mask to a mask support, said mask support comprising at least a mask and said means for attaching said mask to said mask support. And connecting means for connecting. The present invention further relates to an assembly comprising the mask support and the mask assembly.

Conventional technology

  In the manufacture of OLED devices, such as OLED displays, shadow masks are utilized to produce a coating having a patterned structure on a substrate. This mask is usually a mask foil made of a thin metal sheet. In order to provide reliable mask foil support and adjustment, the mask foil is fixedly connected to the frame element, for example by soldering. As an alternative, the mask may be removably attached to the frame element, for example by screwing.

  It is known that the production and use of shadow masks in the OLED process is a significant cost source. When the mask foil is connected in a fixed state to the mask frame, the number of masks required for each pattern and for continuous production becomes enormous. Furthermore, the reuse of a mask frame having a mask foil soldered thereto is limited due to the fact that changing the mask foil requires removing material from the mask frame. It is impossible to reuse the mask foil.

  On the other hand, replacement of the mask foil fixed to the frame by screw connection is very complicated and takes time.

  EP 1437926 A1 discloses a metal mask fixed by means of a fixed mask clamp and a movable mask clamp. The fixed mask clamp is fixed to the base plate, and the movable mask clamp is fixed to the slider by bolts. A coil spring is disposed between the base plate and the slider for stretching the mask.

  US 5,534,969 discloses a mask support having a frame and a pull bar for pulling a mask stretched by an elastic spring. The pull bar has a hook member attached thereto that fastens with a respective slot provided in the mask.

Object of the invention

  It is an object of the present invention to provide an improved mask assembly that is easy to handle and replace for use in the production of OLED devices, particularly for the production of optical devices and displays. Adjustments may be made to provide the required pulling force on the mask.

Technical solution

  This object is solved by providing a mask support according to claim 1 or 5, a mask assembly according to claim 11 or 25, an assembly according to claim 28 and a method according to claim 30.

  A mask support for supporting a mask, particularly for supporting a thin layer mask utilized in an OLED coating apparatus, includes a frame element and an elastic element, the elastic element attaching the mask to the frame element, Means for pulling said mask supported within a frame element.

  According to an aspect of the present invention, the elastic element includes a lever or an arm portion rotatably attached to the frame element, an attachment end for attaching the elastic element to the frame element, the lever portion, and the Includes a bend disposed between the mounting ends.

  The means for attaching the mask may include first fastening means, which are arranged on the elastic element for fastening to the corresponding second fastening means provided on the mask assembly for carrying the mask. ing.

  In particular, the first fastening means includes a protrusion extending at an angle from the lever or arm portion.

  In particular, the fastening means is rotatably attached to the frame element. The fastening means is rotatably arranged on the frame element so as to rotate or pivot about at least one rotational axis. In particular, the fastening means may be arranged to be able to rotate around more than one axis and / or to be able to translate. This depends on the configuration of the elastic element.

  According to another aspect of the invention, the means for attaching the mask includes first fastening means disposed on the elastic element, which is provided in the mask assembly for carrying the mask. The first fastening means is configured to be able to rotate around more than one axis of rotation and / or to translate relative to the frame element.

  A mask support for supporting a mask, particularly for supporting a thin layer mask utilized in an OLED coating apparatus, includes a frame element and a plurality of elastic elements. Of the plurality of elastic elements, both the first elastic element and the second elastic element include first fastening means disposed on the first elastic element and the second elastic element, respectively, which is in the mask assembly for carrying the mask. Fastening to the corresponding second fastening means provided, the elastic element secures the mask to the frame element and the mask supported within the frame element by pushing the end of the mask (41) away from the frame element. Configured to stretch. The first elastic element and the second elastic element are arranged adjacent to each other along a substantially straight edge of the frame element.

  The mask is attached to the frame element by an elastic element such as a pin or a spring, and is thereby fastened to a corresponding connecting means (for example, a clamp) provided on the mask foil. The elastic element is also a tensioning device, which is fastened with the connecting means of the mask when tension is applied and is released from the mask when the elastic element is compressed.

  The means for attaching (fixing) the mask to the frame element supports the mask to the frame element and simultaneously stretches the mask. Thus, as soon as the mask is secured to the mask attachment means, the mask is stretched simultaneously. Furthermore, the attachment / detachment of the mask to / from the mask support is very easy due to the fact that not only the tension is released and the mask is removed from the mask support, but also the fixing and stretching are performed in one step.

  The present invention is particularly convenient for the production of OLED displays. According to the invention, the mask can be placed in a stable position and stretched by providing an elastic element on each side of the rectangular frame element. The present invention allows easy handling and replacement of structured mask foils, thus reducing the number of masks and mask frames required in the production process. Furthermore, the mask frame life cycle is extended by the fact that the removal of the mask is performed in a gradual procedure, allowing reuse of the mask and mask frame.

  When producing a mask in a conventional process, the metal foil is positioned on a clamp fixture for processing, for example to provide a certain structure on the mask. Clamp fixtures are provided specifically for processing masks, and the inventive mask support in the present invention may be used not only to use the mask in a coating process, but also to produce a mask. Thus, the number of process steps can be reduced, particularly after the mask is produced, by removing the mask from the clamp fixture and attaching the mask to another frame for the coating process.

  According to the invention, a plurality of elastic elements may be used on each side of the (usually rectangular) frame element. At least first and second elastic elements are provided on the side of the frame element. Therefore, it is easy to change the properties of the elastic elements along the sides of the frame elements by changing the properties of the elastic elements arranged along the sides of the frame elements. Since the tension changes by changing the properties of the elastic elements, the shape and position of the various mask layouts can be optimized in that the mask is placed on a flat surface so as not to wrinkle.

  The mask is attached to the frame element by a plurality of elastic elements, such as pins or springs, and fastened to corresponding connection means (eg clamps) provided on the mask foil. The clamp may be provided by bending the end of the mask assembly to form an acute angle between the mask plane and the curved side. The elastic element is also a tensioning device that fastens with the connection means of the mask when tension is applied and is released from the mask when the elastic element is compressed.

  The properties of the elastic element may be changed by different methods as described below.

  The resilient element is preferably configured to removably attach the mask to the frame element.

  In particular, both the first elastic element and the second elastic element include a lever or an arm part, and the first fastening means of the first elastic element and the first fastening means of the second elastic element are the lever or arm part. It includes a protrusion that extends at an angle.

  Both the first elastic element and the second elastic element include a curved portion disposed between the lever portion and an attachment portion for attaching the first elastic element and the second elastic element to the frame element, respectively. Is desirable. By providing a bend, the spring stiffness and / or the deflection / length of the spring may be increased without requiring significantly more structural space. Thus, the height and / or lateral elongation of the mask support is independent of the required spring stiffness and / or spring deflection.

  In particular, the first elastic element and the second elastic element have different structures. The structure or geometry may be varied to generate different properties, particularly different tensions along the sides of the mask assembly.

  According to a preferred embodiment of the present invention, the curved portion of the first elastic element and the curved portion of the second elastic element include different numbers of curves. By changing the number of curves, e.g. by changing the number of bends along the length of the elastic element between the mounting end and the first fastening means, the spring stiffness and / or the spring deflection / the total length of the spring is clearly defined Can be adjusted.

  The elastic element may be formed of a material that is entirely flexible. At least the flexible element may have a flexible portion.

  Desirably, the elastic elements are arranged at least along the ends of the frame elements. In particular, the two opposite sides of the frame element may have elastic elements attached thereto. The elastic element exerts a force to stretch the mask in the opposite direction.

  The first fastening means of the first elastic element and the first fastening means of the second elastic element are arranged so that the elastic element is at least from a first position where the elastic element is in a released state in order to fix the mask to the frame element and extend the mask. Desirably, the frame element is movable to a second position in the compressed state.

  The first fastening means of the first elastic element and the first fastening means of the second elastic element are rotatably arranged on the frame element. The fastening means is rotatably arranged on the frame element so as to rotate or pivot about at least one rotational axis. In particular, the fastening means may be arranged to be able to rotate around more than one axis and / or to be able to translate. This is due to the configuration of the elastic element.

  The elastic element may be formed of a material that is entirely flexible. At least the flexible element may have a flexible portion.

  It is desirable that both the first elastic element and the second elastic element are arranged along at least the end of the frame element. In particular, the two opposite sides of the frame element may have at least two elastic elements attached thereto. The elastic element exerts a force to stretch the mask in the opposite direction.

  The first elastic element and the second elastic element may be formed to exert different tensile forces on the mask assembly.

  According to a preferred embodiment of the invention, at least a part of the first elastic element and a part of the second elastic element are made of different materials. Because different materials have different spring stiffnesses, the tension along the edge of the mask assembly can be varied.

  According to another preferred embodiment of the present invention, at least a part of the first elastic element and a part of the second elastic element have different thicknesses.

  According to the present invention, a mask assembly as described above provided for attaching a mask to a mask support includes at least a mask and connecting means, the connecting means attaching the mask to the frame element and within the frame element. The mask is connected to means for stretching the supported mask. The connecting means includes at least second fastening means for mutual fastening with the first fastening means of the mask support.

  The mask may be a thin layer shadow mask, in particular a shadow mask made from a metal sheet. The thin layer mask is a shadow mask made of a thin metal mask sheet and has a number of holes so that the coating particles can pass through the mask and form a material pattern on the substrate. If a mask is used, the holes will become dirty after several coating cycles. The present invention provides for easy mask handling and replacement of the mask from the mask support and quick attachment of the mask to the mask support.

  According to a preferred embodiment of the present invention, the second fastening means comprises a clamp, for example a clamp formed by bending at least one end of the mask assembly or mask relative to the mask surface, whereby the first and / or second An acute angle is formed with respect to the fastening of the first fastening means of the two elastic elements.

  The object of the invention is also achieved by an assembly comprising a mask support as described above and a mask assembly as described above.

  In particular, the mask is attached (removably) to the mask support by a flexible force acting by compression of the elastic element of the mask support, and the first fastening means of the elastic element is fastened with the second fastening means of the mask assembly. Thereby supporting and stretching the mask attached to the mask support.

  A method for connecting a mask assembly according to the present invention to a mask support according to the present invention comprises a combination of two or more of the following steps: a) inserting a mask support comprising a frame element and an elastic element in a tensioning device. B) placing a mask assembly comprising a mask and connecting means on top of the mask support; and c) compressing the elastic element by starting the tensioning device. Thereafter, according to step d), the connecting means of the mask assembly fasten the elastic element of the mask support as soon as the elastic element is released by starting the tensioning device. When releasing the elastic elements, they move in engagement with the connecting means of the mask assembly, thus connecting the mask foil with the frame element. At the same time, the elastic force of the elastic element maintains the mask foil in a tensioned state.

  The method may further comprise step e) removing the assembly comprising the mask assembly and the mask support from the tensioning device.

  Further features and features of the present invention will become apparent from the following description of the preferred embodiment, taken in conjunction with the accompanying drawings. Each figure shows the following:

It is a figure which shows the mask removed from a part of mask support body and mask support body which concern on this invention. It is a figure which shows the mask support body based on this invention, and the mask attached there. It is a perspective view of one embodiment of a mask support according to the present invention. It is a top view of one embodiment of a mask support according to the present invention.

Detailed Description of Embodiments

  FIG. 1 shows a part of a mask support 10 including a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20.

  The frame element 20 includes a first frame portion 21 and a second frame portion 22 and may have a rectangular or square shape.

  The elastic element 30 is a part formed entirely of a flexible material. It includes a mounting end 31 extending along the end of the frame element 20 into a recess 23 provided between the first frame portion 21 and the second frame portion 22 of the frame element 20. The attachment end 31 is clamped between the first frame portion 21 and the second frame portion 22. One or more elastic elements 30 may be arranged along the ends of the frame element 20 so that the elastic elements can secure and stretch the mask attached to the mask support 10 in each direction. .

  Further, the elastic element 30 includes a curved portion 32 connected to the attachment end 31. The curved portion 32 has a first curve 33 of approximately 90 °, a second curve 34 of approximately 180 °, a third curve 35 of approximately 180 °, and a fourth curve having an angle between 90 ° and 180 °. Contains.

  The lever or arm portion 37 is connected to the curved portion 32. The lever or arm 37 extends away from the frame element 20. It includes a first fastening projection 38 extending at an angle of approximately 90 ° from the free end of the arm portion 37 to form a fastening recess 39 between the arm portion 37 and the first fastening projection 38. The recess 39 is disposed on the opposite side of the arm element 37 from the frame element 20.

  At least a part of the elastic element 30, in particular the curved part 32, is flexible and / or elastic so that the arm part 37 and the first fastening part 38 can pivot with respect to the frame element 20 and the mounting end 31. Made of material with The arm part 37 may pivot about at least one axis, in particular around a plurality of pivot axes. Due to the fact that the bend 32 includes a number of curves 33, 34, 35, 36, the arm portion 37 may pivot, for example, about the axis of the apex of the curve. Further, the arm portion 37 may perform the translational motion by compressing or extending the curved portion 32 in the direction indicated by the arrow x, for example.

  In the embodiment shown in FIG. 1, the elastic element 30 is in an unloaded state. In this state, the arm portion 37 extends at a predetermined angle with respect to the frame element 20. When compressing in the direction indicated by arrow C, the elastic element 30 behaves like a spring or pin and generates a reaction force as shown by arrow F.

  As shown in FIG. 1, the mask assembly 40 includes a thin layer mask 41, such as that manufactured from a thin metal foil, and a connecting element 42. The connection element 42 includes a fastening portion 43 that is fastened by a fastening protrusion 38 of the elastic element 30. In FIG. 1, the mask 40 is disengaged from the mask support 10 and the elastic element 30. The mask 40 is released from the mask support 10. In this way, the mask 40 and the elastic element 30 are removed from each other.

  The connecting element 42 may be replaced by bending the end of the mask 41 to form an acute angle between the bent tab and the surface of the mask 41. The recess defined between the bent tab and the surface of the mask 41 corresponds to the fastening part 43 of the connecting element 42. The advantage of bending the tab at the end of the mask 41 is that the fastening portions 43 are perfectly aligned. First, it is very easy to bend the tab parallel or perpendicular to the edge of the mask 41. Secondly, the length of each bent tab portion along the edge of the mask 41 may be adjusted by forming a gap between the bent tab portions using, for example, a laser.

  In the embodiment shown in FIG. 1, the elastic element 30 comprises a plurality of separate elastic elements 30a, 30b, 30c, 30d,. . . May be included. Elastic elements 30a, 30b, 30c, 30d,. . . There is a partition, for example a small gap. Thus, the elastic elements 30a, 30b, 30c, 30d,. . . May be stretched or loaded independently.

  Further, the elastic elements 30a, 30b, 30c, 30d,. . . May have different structures. The structure or geometry may be varied to generate different properties, particularly different tensions along the sides of the mask assembly 42. Elastic elements 30a, 30b, 30c, 30d,. . . Each may be formed of a material that is entirely flexible. For example, the elastic elements 30a, 30b, 30c, 30d,. . . Alternatively, the elastic elements 30a, 30b, 30c, 30d,. . . May be formed to exert different tensile forces on the mask assembly 42. Further, the elastic elements 30a, 30b, 30c, 30d,. . . Alternatively, the elastic elements 30a, 30b, 30c, 30d,. . . May be made of different materials or have different thicknesses. Accordingly, the spring stiffness and tension along the edge of the mask assembly 42 may be varied.

  FIG. 2 shows the mask support 10 of FIG. 1 with a mask assembly 40 attached to the mask support 10. In this state, the fastening portion 43 of the connection element 42 is fastened with the fastening protrusion 38 of the arm portion 37. The free end of the fastening part 43 extends into the fastening recess 39 of the elastic element 30.

  Thus, the thin layer mask 41 is secured to the mask support 10 and stretched by the force F generated by the compressed elastic element 30 to secure the mask assembly 40 to the mask support 10. Obviously, when attaching the mask assembly 40 to the mask support 10, the arm 37 must be compressed in order to connect the connecting element 42 of the mask assembly 40 to the elastic element 30 of the mask support 10. The lever or arm 37 extends above the level defined by the frame element 20 in order to keep the mask 41 stretched in a plane above the frame element 20.

  In this way, the mask assembly 40 is stretched at the same time it is attached to the elastic element 30. When the mask assembly 40 is released from the mask support 10, in order to compress and pivot the arm portion 37 so that the connecting element 42 can be removed from the elastic element 30 and the mask assembly 40 can be removed from the mask support 10. A force C (greater than F) must be applied to the arm portion 37.

  Obviously, not only removing the mask assembly 40 from the mask support 10 but also attaching / stretching the mask 41 can be very simple and easy.

  By providing a bend with one or more curves 33, 34, 35, the spring stiffness may be controlled over a wide range simply by determining the geometry of the elastic element 30. Further, the deflection or elongation E, E '(see FIGS. 1 and 2) of the elastic element 30 is very small and the spring stiffness is sufficient to stretch the mask 41. When stretching the mask 41, the elastic element 30 exerts a compressive shear force on the mask assembly 40 instead of a tensile traction force. Each end 42 of the mask assembly 40 is pushed away from the frame element 20 by each elastic element to grip and stretch the mask. Thus, the structural space required to provide the mask support 10 of the present invention is small. In particular, the height H of the structure is limited, and the longitudinal and lateral stretch of the frame element 20 corresponds to the longitudinal and lateral stretch of the mask assembly 40. Thus, the mask support 10 is extremely small.

  FIG. 3 shows a portion of an embodiment of a mask support 10 according to the present invention, which includes a frame element 20 and a plurality of elastic elements 30a, 30b, 30c, 30d, 30e, 30f, 30g, 30h. . The elastic elements 30 a, 30 b, 30 c, 30 d, and 30 e are arranged adjacent to each other along the first end 24 of the frame element 20. The elastic elements 30 f, 30 g, and 30 h are arranged adjacent to each other along the second end 25 of the frame element 20. The elastic elements 30 are arranged adjacent to each other along each end 24, 25, and a gap 30 ′ is arranged between the adjacent elastic elements 30.

  Elastic elements 30a,. . . 30h is the same as that shown in FIGS. Elastic elements 30a,. . . 30h because of the fact that it includes a bend 32, the elastic elements 30a,. . . , 30 h is substantially limited to the height of the frame element 20.

  Elastic elements 30a,. . . , 30h may be the same or different, that is, the configuration of one or more elastic elements 30 may be different from the configuration of the other elastic elements 30. For example, the number of curves, the geometric shape, the material, the thickness, or the width B formed in the curved portion 32 in at least two elastic elements 30 may be different. By controlling these parameters, a specific elastic element 30 may be formed to have a specific property, for example a specific spring force corresponding to the translational or rotational force of the lever part 37. By providing different elastic elements 30 along the edges of the frame element 20, the mask 41 may be stretched somewhat at different locations along the edges 42 of the mask assembly 40. In this way, the tensile forces may each be adapted for a specific mask design.

  FIG. 4 shows a plan view of the mask assembly 40, which comprises a mask 41 and a plurality of elastic elements 30a, 30b, 30c,. . . The connecting element 42 is held by the frame element 20 by the elastic force acting by the. Elastic elements 30a, 30b, 30c,. . . Are arranged next to each other along the end 24 of the frame element 20.

  It is clear from FIG. 4 that the longitudinal and lateral elongation of the frame element 20 substantially corresponds to the longitudinal and lateral elongation of the mask assembly 40. This is because the elastic elements 30a, 30b, 30c,. . . Provides the shear force that pushes the edge 42 of the mask 41 away from the frame element 20, that is, the elongation of the frame element 20 coincides with the surface of the mask assembly 40 or somewhat. small. Further, since the height H of the elastic element 30 and the frame element 20 is limited, the structure of the mask support 10 is very small.

Claims (31)

A mask support (10) for supporting a mask (41), in particular for supporting a thin layer mask (41) used in an OLED coating apparatus, comprising a frame element (20) and an elastic element (30),
The elastic element (30) includes means for attaching the mask (41) to the frame element (20) and extending the mask (41) supported within the frame element (20);
The elastic element (30) includes a lever or arm (37) rotatably attached to the frame element (20), and an attachment end (31) for attaching the elastic element (30) to the frame element (20). ) And a curved portion (32) disposed between the lever portion (37) and the attachment end portion (31).   The means for attaching the mask (41) includes first fastening means (38) disposed on the elastic element (30), the first fastening means (38) for carrying the mask (41). 2. A mask support according to claim 1, characterized in that it is fastened to corresponding second fastening means (43) provided in said mask assembly (40).   The mask support (10) according to claim 2, wherein the first fastening means (38) includes a protrusion extending at an angle from the lever or arm portion (37).   A mask support (10) according to claim 2 or 3, characterized in that the fastening means (38) are arranged rotatably on the frame element (20). A mask support (10) for supporting a mask (41), in particular for supporting a thin layer mask (41) used in an OLED coating apparatus, comprising a frame element (20) and an elastic element (30),
The elastic element (30) includes means for attaching the mask (41) to the frame element (20) and extending the mask (41) supported within the frame element (20);
The means for attaching the mask (41) includes first fastening means (38) disposed on the elastic element (30), which provides for the mask assembly (40) carrying the mask (41). For fastening to the corresponding second fastening means (43),
A mask characterized in that the first fastening means (38) is mounted for rotation about more than one axis of rotation and / or for translational movement relative to the frame element (20). Support (10).   The elastic element (30) includes a lever or arm portion (37), and the first fastening means (38) includes a protrusion extending at an angle from the lever or arm portion (37). Item 6. The mask support (10) according to Item 5.   The means for attaching the mask (41) is provided for removably attaching the mask (41) to the frame element (20). The mask support according to item.   The first fastening means (38) has a first state in which at least the elastic element (30) is in a released state in order to fix the mask (41) to the frame element (20) and extend the mask (41). 8. A mask support according to any one of claims 2 to 7, characterized in that it is movable relative to the frame element (20) from a position to a second position in which the elastic element is in a compressed state.   Mask support (10) according to any one of the preceding claims, characterized in that the elastic element (30) is formed entirely of a flexible material.   Mask support (10) according to any one of the preceding claims, characterized in that the elastic element (30) is arranged along at least the end of the frame element (20). A mask assembly (40) provided for attaching a mask (41) to a mask support (10) according to any one of the preceding claims,
The mask assembly (40) includes at least a mask (41) and connecting means (42), the connecting means (42) attaches the mask (41) to the frame element (20), and the frame element ( 20) A mask assembly (40), characterized in that said mask (41) is connected to said means for extending said mask (41) supported within. Supporting the mask (41), in particular supporting the thin layer mask (41) used in the OLED coating apparatus, the frame element (20) and a plurality of elastic elements (30a, 30b, 30c, 30d, ...). A mask support (10) comprising:
Of the plurality of elastic elements (30a, 30b, 30c, 30d, ...), both the first elastic element (30a) and the second elastic element (30b) are the first elastic element (30a) and the First fastening means (38) respectively disposed on the second elastic element (30b), which correspond to the corresponding second fastening means provided on the mask assembly (40) for carrying the mask (41). 43) for fastening,
The elastic elements (30a, 30b, 30c, 30d,...) Fix the mask (41) to the frame element (20) and push the end of the mask (41) away from the frame element. Formed to stretch the mask (41) supported in the frame element (20) by
The mask support (10), wherein the first elastic element (30a) and the second elastic element (30b) are disposed adjacent to each other along a substantially straight edge of the frame element (20). ).   13. The elastic element (30a, 30b, 30c, 30d, ...) is formed to removably attach the mask (41) to the frame element (20). Mask support.   Both the first elastic element (30a) and the second elastic element (30b) include a lever or an arm part (37), and the first fastening means (38) of the first elastic element (30a) and the 14. The mask support according to claim 12, wherein the first fastening means (38) of the second elastic element (30b) includes a protrusion extending at an angle from the lever or arm portion (37). .   Both the first elastic element (30a) and the second elastic element (30b) include a curved portion (32) disposed between the lever portion (37) and the attachment portion (31), and the attachment portion The mask support according to any one of claims 12 to 14, wherein (31) attaches the first elastic element (30a) and the second elastic element (30b) to the frame element (20), respectively. body.   The mask support (10) according to claim 15, wherein the first elastic element (30a) and the second elastic element (30b) have different structures.   The mask according to claim 16, wherein the curved portion (32) of the first elastic element (30a) and the curved portion (32) of the second elastic element (30b) include different numbers of curves. Support (10).   The first fastening means (38) of the first elastic element (30a) and the first fastening means (38) of the second elastic element (30b) attach the mask (41) to the frame element (20). In order to fix and stretch the mask (41), the frame elements (from the first position where at least each of the elastic elements (30) is in the released state to the second position where the elastic elements (30) are in the compressed state) The mask support according to any one of claims 12 to 17, which is movable with respect to 20).   The first fastening means (38) of the first elastic element (30a) and the first fastening means (38) of the second elastic element (30b) are rotatably arranged on the frame element (20). The mask support (10) according to any one of claims 12 to 18, characterized in that:   20. The first elastic element (30a) and the second elastic element (30b) are both made of a flexible material as a whole. A mask support (10) as described.   21. Any of the claims 12-20, characterized in that both the first elastic element (30a) and the second elastic element (30b) are arranged along at least the ends of the frame element (20). A mask support (10) according to claim 1.   The first elastic element (30a) and the second elastic element (30b) are formed to exert different tensile forces on the mask assembly (40). A mask support (10) according to claim 1.   The mask support according to any one of claims 12 to 22, wherein at least a part of the first elastic element (30a) and a part of the second elastic element (30b) are made of different materials. Body (10).   24. The mask support according to claim 12, wherein at least a part of the first elastic element (30a) and a part of the second elastic element (30b) have different thicknesses. 10). A mask assembly (40) provided for attaching a mask (41) to a mask support (10) according to any one of claims 1 to 10 or claims 12 to 23,
The connecting means (42) includes a second fastening means (43) for mutual fastening with at least the first fastening means (38) of the mask support (10). .   26. The second fastening means (43) includes a clamp formed by bending at least an end of the mask assembly (40) with respect to a surface of the mask (41). The mask assembly according to claim 1.   17. A mask assembly according to any one of claims 11, 25 and 16, characterized in that the mask (41) is a thin layer shadow mask, in particular a shadow mask made from a metal sheet.   28. An assembly comprising a mask support according to any one of claims 1 to 10 or 121 to 24 and a mask assembly according to any one of claims 11 or 25 to 27.   The mask (41) is attached to the mask support (10) by a flexible force generated by compression of the elastic elements (30a, 30b, 30c, 30d, ...) of the mask support (10). The first fastening means (38) of the elastic elements (30a, 30b, 30c, 30d,...) Support and stretch the mask (41) attached to the mask support (10). 29. Assembly according to claim 28, characterized in that it is fastened with the second fastening means (42) of the mask assembly (40) for making it happen. A method of connecting a mask assembly according to any one of claims 11 or 25 to 27 to a mask support according to any one of claims 1 to 10 or 12 to 24, comprising:
a) inserting the mask support comprising the frame element and the elastic element in a tensioning device;
b) placing the mask assembly including the mask and the connection means on top of the mask support;
c) compressing the elastic element by actuation of the tensioning device;
d) A method comprising releasing the elastic element by actuation of the tensioning device.   31. The method of claim 30, comprising: e) removing the assembly comprising the mask assembly and the mask support from the tensioning device.

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