JP2011512674A5 - - Google Patents

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Publication number
JP2011512674A5
JP2011512674A5 JP2010546828A JP2010546828A JP2011512674A5 JP 2011512674 A5 JP2011512674 A5 JP 2011512674A5 JP 2010546828 A JP2010546828 A JP 2010546828A JP 2010546828 A JP2010546828 A JP 2010546828A JP 2011512674 A5 JP2011512674 A5 JP 2011512674A5
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JP
Japan
Prior art keywords
substrate
energy
substrate support
breaker
electromagnetic energy
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JP2010546828A
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English (en)
Japanese (ja)
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JP2011512674A (ja
JP5451643B2 (ja
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Priority claimed from US12/032,475 external-priority patent/US7754518B2/en
Application filed filed Critical
Publication of JP2011512674A publication Critical patent/JP2011512674A/ja
Publication of JP2011512674A5 publication Critical patent/JP2011512674A5/ja
Application granted granted Critical
Publication of JP5451643B2 publication Critical patent/JP5451643B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010546828A 2008-02-15 2009-02-04 ミリ秒アニーリング（ｄｓａ）の縁部保護 Expired - Fee Related JP5451643B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/032,475 US7754518B2 (en) 2008-02-15 2008-02-15 Millisecond annealing (DSA) edge protection
US12/032,475 2008-02-15
PCT/US2009/033102 WO2009102600A1 (en) 2008-02-15 2009-02-04 Millisecond annealing (dsa) edge protection

Publications (3)

Publication Number Publication Date
JP2011512674A JP2011512674A (ja) 2011-04-21
JP2011512674A5 true JP2011512674A5 (cg-RX-API-DMAC10.html) 2012-03-22
JP5451643B2 JP5451643B2 (ja) 2014-03-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010546828A Expired - Fee Related JP5451643B2 (ja) 2008-02-15 2009-02-04 ミリ秒アニーリング（ｄｓａ）の縁部保護

Country Status (7)

Country Link
US (2) US7754518B2 (cg-RX-API-DMAC10.html)
EP (1) EP2248150A4 (cg-RX-API-DMAC10.html)
JP (1) JP5451643B2 (cg-RX-API-DMAC10.html)
KR (3) KR101850088B1 (cg-RX-API-DMAC10.html)
CN (2) CN101946302B (cg-RX-API-DMAC10.html)
TW (2) TWI545676B (cg-RX-API-DMAC10.html)
WO (1) WO2009102600A1 (cg-RX-API-DMAC10.html)

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CN118380375A (zh) 2017-11-21 2024-07-23 朗姆研究公司 底部边缘环和中部边缘环
CN110376847B (zh) * 2018-04-12 2021-01-01 上海微电子装备（集团）股份有限公司 一种基底边缘保护环单元、光刻设备及保护方法
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