JP2011503574A - 表面形状プロファイルを測定するための方法および装置 - Google Patents

表面形状プロファイルを測定するための方法および装置 Download PDF

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Publication number
JP2011503574A
JP2011503574A JP2010533096A JP2010533096A JP2011503574A JP 2011503574 A JP2011503574 A JP 2011503574A JP 2010533096 A JP2010533096 A JP 2010533096A JP 2010533096 A JP2010533096 A JP 2010533096A JP 2011503574 A JP2011503574 A JP 2011503574A
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JP
Japan
Prior art keywords
sheet material
light beam
light source
positions
shape profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
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JP2010533096A
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English (en)
Japanese (ja)
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JP2011503574A5 (enrdf_load_stackoverflow
Inventor
チェン，シン
リュー，アンピン
ジョウ，ナイイェ
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Corning Inc
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Corning Inc
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Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of JP2011503574A publication Critical patent/JP2011503574A/ja
Publication of JP2011503574A5 publication Critical patent/JP2011503574A5/ja
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010533096A 2007-11-09 2008-11-06 表面形状プロファイルを測定するための方法および装置 Abandoned JP2011503574A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/983,464 US8402785B2 (en) 2007-11-09 2007-11-09 Method and apparatus for measuring surface shape profile
PCT/US2008/012527 WO2009061438A1 (en) 2007-11-09 2008-11-06 Method and apparatus for measuring surface shape profile

Publications (2)

Publication Number Publication Date
JP2011503574A true JP2011503574A (ja) 2011-01-27
JP2011503574A5 JP2011503574A5 (enrdf_load_stackoverflow) 2012-08-23

Family

ID=40258254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010533096A Abandoned JP2011503574A (ja) 2007-11-09 2008-11-06 表面形状プロファイルを測定するための方法および装置

Country Status (6)

Country Link
US (1) US8402785B2 (enrdf_load_stackoverflow)
JP (1) JP2011503574A (enrdf_load_stackoverflow)
KR (1) KR20100103500A (enrdf_load_stackoverflow)
CN (1) CN101932903A (enrdf_load_stackoverflow)
TW (1) TW200936983A (enrdf_load_stackoverflow)
WO (1) WO2009061438A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016098137A (ja) * 2014-11-20 2016-05-30 日本電気硝子株式会社 ガラスリボンの形状監視方法、ガラス物品の製造方法、及びガラス物品の製造装置
JP2020019706A (ja) * 2013-11-25 2020-02-06 コーニング インコーポレイテッド 実質的に柱面を成す鏡面反射面の形状を決定するための方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5646861B2 (ja) * 2010-02-26 2014-12-24 株式会社ニコン 計測装置および計測方法
US9546962B2 (en) 2014-02-12 2017-01-17 Kla-Tencor Corporation Multi-spot scanning collection optics
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
CN106198397B (zh) * 2016-08-16 2020-01-03 京东方科技集团股份有限公司 一种光电检测装置、方法和光刻胶涂覆设备
US10446423B2 (en) * 2016-11-19 2019-10-15 Applied Materials, Inc. Next generation warpage measurement system
CN106524954A (zh) * 2016-12-21 2017-03-22 南通沃特光电科技有限公司 一种转子叠片的平整度检测方法
CN106524953A (zh) * 2017-01-04 2017-03-22 南通沃特光电科技有限公司 一种定子叠片的平整度检测方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3338696A (en) 1964-05-06 1967-08-29 Corning Glass Works Sheet forming apparatus
BE757057A (fr) 1969-10-06 1971-04-05 Corning Glass Works Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree
US4853777A (en) * 1987-07-07 1989-08-01 Ashland Oil, Inc. Method for evaluating smooth surfaces
US5523889A (en) * 1994-05-16 1996-06-04 National Research Council Of Canada Beam expanding lens
US5757496A (en) 1997-03-07 1998-05-26 Mitutoyo Corporation Method of surface roughness measurement using a fiber-optic probe
JP4667599B2 (ja) * 1998-10-16 2011-04-13 エイド・コーポレイション 基板の表面地形を写像するための方法および装置
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
US6211488B1 (en) 1998-12-01 2001-04-03 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a laser initiated scribe
TW434399B (en) 2000-06-08 2001-05-16 Ind Tech Res Inst Multi-range fiber-optic reflective displacement micrometer
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
EP1759167A2 (en) 2004-05-10 2007-03-07 Koninklijke Philips Electronics N.V. Device and method for optical precision measurement
US7231786B2 (en) 2004-07-29 2007-06-19 Corning Incorporated Process and device for manufacturing glass sheet
US20070039990A1 (en) 2005-05-06 2007-02-22 Kemmerer Marvin W Impact induced crack propagation in a brittle material
US20060261118A1 (en) 2005-05-17 2006-11-23 Cox Judy K Method and apparatus for separating a pane of brittle material from a moving ribbon of the material
DE102006013584B4 (de) 2006-03-22 2014-07-10 Benteler Automobiltechnik Gmbh Vorrichtung zum Vermessen von Bauteilen
WO2008028246A1 (en) 2006-09-07 2008-03-13 Bluescope Steel Limited Monitoring of profiled sheets

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020019706A (ja) * 2013-11-25 2020-02-06 コーニング インコーポレイテッド 実質的に柱面を成す鏡面反射面の形状を決定するための方法
JP2016098137A (ja) * 2014-11-20 2016-05-30 日本電気硝子株式会社 ガラスリボンの形状監視方法、ガラス物品の製造方法、及びガラス物品の製造装置

Also Published As

Publication number Publication date
KR20100103500A (ko) 2010-09-27
WO2009061438A1 (en) 2009-05-14
TW200936983A (en) 2009-09-01
US20090120134A1 (en) 2009-05-14
CN101932903A (zh) 2010-12-29
US8402785B2 (en) 2013-03-26

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