JP2011501037A - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

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Publication number
JP2011501037A
JP2011501037A JP2010530493A JP2010530493A JP2011501037A JP 2011501037 A JP2011501037 A JP 2011501037A JP 2010530493 A JP2010530493 A JP 2010530493A JP 2010530493 A JP2010530493 A JP 2010530493A JP 2011501037 A JP2011501037 A JP 2011501037A
Authority
JP
Japan
Prior art keywords
annular disk
pump
disk group
pump housing
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010530493A
Other languages
English (en)
Japanese (ja)
Inventor
エングランダー，ハインリッヒ
Original Assignee
オーリコン レイボルド バキューム ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オーリコン レイボルド バキューム ゲーエムベーハー filed Critical オーリコン レイボルド バキューム ゲーエムベーハー
Publication of JP2011501037A publication Critical patent/JP2011501037A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2010530493A 2007-10-31 2008-10-30 ターボ分子ポンプ Pending JP2011501037A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710051988 DE102007051988A1 (de) 2007-10-31 2007-10-31 Turbomolekularpumpe
PCT/EP2008/064747 WO2009056606A1 (de) 2007-10-31 2008-10-30 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
JP2011501037A true JP2011501037A (ja) 2011-01-06

Family

ID=40199138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010530493A Pending JP2011501037A (ja) 2007-10-31 2008-10-30 ターボ分子ポンプ

Country Status (6)

Country Link
EP (1) EP2205874A1 (de)
JP (1) JP2011501037A (de)
CN (1) CN101842597A (de)
DE (1) DE102007051988A1 (de)
TW (1) TW200925429A (de)
WO (1) WO2009056606A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN103398013B (zh) * 2013-08-12 2016-08-24 北京中科科仪股份有限公司 涡轮分子泵
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
TWI696754B (zh) * 2019-03-15 2020-06-21 承輝先進股份有限公司 具有改良型蓋子之轉子裝置
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
CN114526864B (zh) * 2021-12-27 2023-04-11 苏州中科科仪技术发展有限公司 一种动平衡调试泵壳及具有其的调试装置与方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001082379A (ja) * 1999-02-19 2001-03-27 Ebara Corp ターボ分子ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
KR100724048B1 (ko) 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001082379A (ja) * 1999-02-19 2001-03-27 Ebara Corp ターボ分子ポンプ

Also Published As

Publication number Publication date
DE102007051988A1 (de) 2009-05-07
CN101842597A (zh) 2010-09-22
TW200925429A (en) 2009-06-16
WO2009056606A1 (de) 2009-05-07
EP2205874A1 (de) 2010-07-14

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