JP2011253841A5 - - Google Patents

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Publication number
JP2011253841A5
JP2011253841A5 JP2010124685A JP2010124685A JP2011253841A5 JP 2011253841 A5 JP2011253841 A5 JP 2011253841A5 JP 2010124685 A JP2010124685 A JP 2010124685A JP 2010124685 A JP2010124685 A JP 2010124685A JP 2011253841 A5 JP2011253841 A5 JP 2011253841A5
Authority
JP
Japan
Prior art keywords
support member
wafer holder
suction hole
enlarged diameter
diameter portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010124685A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011253841A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010124685A priority Critical patent/JP2011253841A/ja
Priority claimed from JP2010124685A external-priority patent/JP2011253841A/ja
Publication of JP2011253841A publication Critical patent/JP2011253841A/ja
Publication of JP2011253841A5 publication Critical patent/JP2011253841A5/ja
Pending legal-status Critical Current

Links

JP2010124685A 2010-05-31 2010-05-31 ウェーハ保持具 Pending JP2011253841A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010124685A JP2011253841A (ja) 2010-05-31 2010-05-31 ウェーハ保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010124685A JP2011253841A (ja) 2010-05-31 2010-05-31 ウェーハ保持具

Publications (2)

Publication Number Publication Date
JP2011253841A JP2011253841A (ja) 2011-12-15
JP2011253841A5 true JP2011253841A5 (enExample) 2013-06-06

Family

ID=45417571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010124685A Pending JP2011253841A (ja) 2010-05-31 2010-05-31 ウェーハ保持具

Country Status (1)

Country Link
JP (1) JP2011253841A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6881284B2 (ja) * 2017-12-27 2021-06-02 株式会社Sumco 吸着チャック
JP7708581B2 (ja) * 2021-05-06 2025-07-15 株式会社ディスコ 吸引保持テーブル及び加工装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63208459A (ja) * 1987-02-25 1988-08-29 Shiyouda Tekko Kk 吸着テ−ブル
JPH06244093A (ja) * 1993-02-17 1994-09-02 Hitachi Ltd 基板保持方法ならびにそれを用いた薄膜多層基板の製造方法および装置
JP2782493B2 (ja) * 1993-06-02 1998-07-30 澁谷工業株式会社 基板固定装置
JP3341990B2 (ja) * 1998-10-27 2002-11-05 株式会社東京精密 被加工材のチャックテーブル
JP4402763B2 (ja) * 1999-05-13 2010-01-20 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 エピタキシャルウェーハ製造装置
US6196532B1 (en) * 1999-08-27 2001-03-06 Applied Materials, Inc. 3 point vacuum chuck with non-resilient support members
JP2006054286A (ja) * 2004-08-11 2006-02-23 Seiko Epson Corp 真空チャック治具及び真空チャック方法並びに液滴吐出ヘッドの製造方法
SG121019A1 (en) * 2004-09-27 2006-04-26 Rokko Systems Pte Ltd A conversion kit
KR101059914B1 (ko) * 2006-01-10 2011-08-29 한미반도체 주식회사 반도체 제조공정용 테이블
JP2007276065A (ja) * 2006-04-07 2007-10-25 Dainippon Printing Co Ltd 基板吸着保持装置及び配線基板ユニットの製造装置
JP2009252848A (ja) * 2008-04-02 2009-10-29 Nikon Corp 露光装置及び露光方法、並びにデバイス製造方法
JP5144434B2 (ja) * 2008-08-28 2013-02-13 リンテック株式会社 支持装置
JP5164785B2 (ja) * 2008-10-23 2013-03-21 リンテック株式会社 支持装置

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