JP2011199661A5 - - Google Patents

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Publication number
JP2011199661A5
JP2011199661A5 JP2010065016A JP2010065016A JP2011199661A5 JP 2011199661 A5 JP2011199661 A5 JP 2011199661A5 JP 2010065016 A JP2010065016 A JP 2010065016A JP 2010065016 A JP2010065016 A JP 2010065016A JP 2011199661 A5 JP2011199661 A5 JP 2011199661A5
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JP
Japan
Prior art keywords
vibrating
base
viewed
pair
electrode
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JP2010065016A
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English (en)
Japanese (ja)
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JP2011199661A (ja
JP5531699B2 (ja
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Priority to JP2010065016A priority Critical patent/JP5531699B2/ja
Priority claimed from JP2010065016A external-priority patent/JP5531699B2/ja
Publication of JP2011199661A publication Critical patent/JP2011199661A/ja
Publication of JP2011199661A5 publication Critical patent/JP2011199661A5/ja
Application granted granted Critical
Publication of JP5531699B2 publication Critical patent/JP5531699B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010065016A 2010-03-19 2010-03-19 振動デバイス Expired - Fee Related JP5531699B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010065016A JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010065016A JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Publications (3)

Publication Number Publication Date
JP2011199661A JP2011199661A (ja) 2011-10-06
JP2011199661A5 true JP2011199661A5 (ru) 2013-05-02
JP5531699B2 JP5531699B2 (ja) 2014-06-25

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ID=44877288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010065016A Expired - Fee Related JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Country Status (1)

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JP (1) JP5531699B2 (ru)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
CN102629861A (zh) 2011-02-02 2012-08-08 精工爱普生株式会社 振动片、振子、振荡器以及电子设备
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
CN109580030B (zh) * 2019-01-10 2020-08-11 哈尔滨华凡传感技术有限公司 一种具有多枚箭形振臂的高精度谐振式石英温度传感器
WO2020202961A1 (ja) * 2019-03-29 2020-10-08 株式会社村田製作所 音叉型圧電振動子及びその製造方法
CN114704589B (zh) * 2022-04-21 2023-03-24 山东大学 一种局域共振型声子晶体减振装置及设备

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