JP2011184561A5 - - Google Patents
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- JP2011184561A5 JP2011184561A5 JP2010051159A JP2010051159A JP2011184561A5 JP 2011184561 A5 JP2011184561 A5 JP 2011184561A5 JP 2010051159 A JP2010051159 A JP 2010051159A JP 2010051159 A JP2010051159 A JP 2010051159A JP 2011184561 A5 JP2011184561 A5 JP 2011184561A5
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- carbon atoms
- alkali metal
- formula
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010051159A JP5508904B2 (ja) | 2010-03-08 | 2010-03-08 | 水溶性シリコン加工液 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010051159A JP5508904B2 (ja) | 2010-03-08 | 2010-03-08 | 水溶性シリコン加工液 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011184561A JP2011184561A (ja) | 2011-09-22 |
| JP2011184561A5 true JP2011184561A5 (enExample) | 2013-03-14 |
| JP5508904B2 JP5508904B2 (ja) | 2014-06-04 |
Family
ID=44791222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010051159A Active JP5508904B2 (ja) | 2010-03-08 | 2010-03-08 | 水溶性シリコン加工液 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5508904B2 (enExample) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3121187B2 (ja) * | 1993-10-18 | 2000-12-25 | ユシロ化学工業株式会社 | マグネシウム合金用水溶性加工油剤 |
| JP3949200B2 (ja) * | 1996-08-12 | 2007-07-25 | エヌ・エス ルブリカンツ株式会社 | ワイヤソーによる切断加工のための切削油、切削油組成物およびそれを用いた物品の切断方法 |
| JPH1053789A (ja) * | 1996-08-12 | 1998-02-24 | Nippei Toyama Corp | ワイヤー切断加工機用水性加工液組成物 |
| JP4497767B2 (ja) * | 2001-09-06 | 2010-07-07 | ユシロ化学工業株式会社 | 固定砥粒ワイヤソー用水溶性加工液組成物 |
| US8580656B2 (en) * | 2008-07-14 | 2013-11-12 | Air Products And Chemicals, Inc. | Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor |
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2010
- 2010-03-08 JP JP2010051159A patent/JP5508904B2/ja active Active