JP2011183477A - Multi-wire electric discharge machining device and method for manufacturing silicon carbide plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently cut a plurality of thin plates out of a workpiece by a multi-wire electric discharge machining device. <P>SOLUTION: The multi-wire electric discharge machining device includes wire 15 wound plural times at an interval in a longitudinal direction of a plurality of guide rollers 24A-24D arranged at an interval and constituting a plurality of cutting wire parts 26 arranged at a predetermined interval pitch P in the longitudinal direction of the guide rollers 24A, 24D between the guide rollers 24A and 24D and a feed mechanism 27 for feeding the workpiece 28 toward the cutting wire parts 26, and includes a workpiece presser 50 pressed to the workpiece 28 from a tip end side in a workpiece feeding direction toward an opposite side to the workpiece feeding direction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a structure of a multi-wire electric discharge machining apparatus and a method for manufacturing a silicon carbide plate by the multi-wire electric discharge machining apparatus.

  Conventionally, a wire saw using abrasive grains is known as a cutting means in the case of cutting a wafer from a cylindrical ingot such as silicon. In this wire saw, a cutting wire wound between a plurality of guide rollers is driven at a high speed in the longitudinal direction, and the workpiece is cut and fed to the wire, thereby simultaneously cutting a large number of thin pieces from the workpiece. is there.

  However, in such a wire saw, it is necessary to simultaneously supply a processing liquid (slurry) mixed with processing abrasive grains to a plurality of cutting wire portions formed between guide rollers, and handling thereof is not easy. . Moreover, in order to suppress the disconnection due to the direct contact of the wire with the workpiece, it is necessary to use a relatively thick wire, and there is a problem that a cutting work cost increases. Furthermore, the conventional wire saw sometimes takes a long time to cut out a wafer from an ingot, and the need for shortening the processing time is increasing.

  On the other hand, in recent years, silicon carbide (silicon carbide, SiC) has attracted attention as a semiconductor material. However, since this silicon carbide (silicon carbide, SiC) is a hard material, the conventional wire saw has a problem that it takes more time to cut the silicon ingot.

  Therefore, development of an electric discharge type wire saw in which a voltage is intermittently applied between a silicon carbide ingot and a cutting wire, and the ingot is cut by the principle of electric discharge machining by each cutting wire portion (for example, Patent Documents). 1). In the conventional discharge wire saw described in Patent Document 1, a wire is wound around a guide roller a plurality of times to form a plurality of cutting wire portions, and a voltage is applied between these cutting wire portions and the workpiece. However, it is a multi-wire electric discharge machining apparatus that simultaneously cuts the workpiece at a plurality of locations by cutting and feeding the workpiece to the cutting wire portion.

JP 2000-107941 A

  By the way, in wire electric discharge machining, a direct discharge is generated between a wire to be an electrode in a liquid and a workpiece, and cutting or the like is performed by a thermal action (evaporation, melting) and a mechanical action (discharge impact pressure) associated with the discharge. Processing is performed. When a discharge occurs between the wire and the workpiece in the liquid, the workpiece is heated by the collision energy of electrons or cations, and the workpiece is evaporated and melted. Moreover, the liquid between a wire and a workpiece | work vaporizes and expands rapidly by this heating. Then, the melted portion of the workpiece is scattered and removed by the impact pressure generated by the vaporization and expansion of the liquid, and the workpiece is processed. In this way, the wire electric discharge machining continuously processes the workpiece by repeatedly performing melting of the workpiece by heating and removal of the melted portion by shock pressure.

  On the other hand, when a large number of thin plates are simultaneously cut out from a silicon carbide ingot, as shown in FIG. 8, the ingot 28 is moved in the feeding direction while generating a discharge between the plurality of cutting wire portions 26 and the ingot 28. Then, a slit 28 s is formed in the ingot 28, and the silicon carbide thin plate 28 a is cut out from the ingot 28. In this case, every time a discharge is generated between the cutting wire portion 26 and the ingot 28, a working fluid such as water filling the space is vaporized and expanded to generate bubbles 200, and shock pressure is generated in the slit 28s. To do. Due to this pressure, a force directed in a direction perpendicular to the slit 28s is applied to the cut thin plate 28a as shown by an arrow in FIG. In wire electric discharge machining, since the work and the wire are intermittently energized to cause intermittent discharge, the thin plate 28a is bent so that the thin plate 28a is bent left and right as indicated by the dotted line and the alternate long and short dash line at each discharge. Stress is applied. Since this bending stress increases as the length of the slit 28s increases, when the length of the slit 28s increases to some extent, a crack 28d is generated near the base of the thin plate 28a due to repeated bending stress. There was a problem that the thin plate 28a was broken starting from the crack 28d.

  The thin plate 28a breaks more frequently as the pitch P of the cutting wire portion 26 becomes smaller. For this reason, when trying to reduce the thickness t of the thin plate 28a cut out from the silicon carbide ingot 28 by the wire electric discharge machining apparatus according to the prior art described in Patent Document 1, the thin plate 28a breaks during the cutting by the electric discharge machining more complicatedly. There is a problem that the processing efficiency of the silicon carbide thin plate 28a is lowered.

  An object of this invention is to cut out a some thin plate efficiently from a workpiece | work with a multi-wire electric discharge machining apparatus.

  The multi-wire electric discharge machining apparatus of the present invention is a guide roller set including a plurality of guide rollers arranged at intervals, and is wound around the guide roller set a plurality of times at intervals in the longitudinal direction of each guide roller, A multi comprising a wire constituting a plurality of cutting wire portions arranged at a predetermined spacing pitch in the longitudinal direction of the guide roller between a pair of adjacent guide rollers, and a feed mechanism for feeding a work toward the cutting wire portion It is a wire electric discharge machining apparatus, and has a workpiece presser that is pressed against the workpiece from the tip side in the workpiece feeding direction toward the side opposite to the workpiece feeding direction.

  In the multi-wire electric discharge machining apparatus of the present invention, the work presser may preferably include an elastic contact member that partially enters a slit machined by the cutting wire portion when pressed against the work. It is also preferable that the contact member has a protrusion that enters the slit processed by the cutting wire portion.

  The multi-wire electric discharge machining apparatus of the present invention has a receiving arm attached to the feed mechanism and provided with an engagement pin, and a holding member that holds the work presser, and the holding member is engaged with the receiving arm. It has an engagement hole that presses the work press against the work by fitting into the pin.

  The silicon carbide plate manufacturing method of the present invention includes a guide roller set including a plurality of guide rollers arranged at intervals, and is wound around the guide roller set a plurality of times at intervals in the longitudinal direction of each guide roller. A wire constituting a plurality of cutting wire portions disposed at a predetermined spacing pitch in the longitudinal direction of the guide roller between a pair of adjacent guide rollers, and a feed mechanism for feeding an ingot of silicon carbide toward the cutting wire portion Using a multi-wire discharge device, the discharge from the ingot is performed between each cutting wire portion and the ingot while pressing the ingot holding member against the ingot from the tip side in the ingot feed direction toward the opposite side of the ingot feed direction. The board is cut out.

  The present invention has an effect that a plurality of thin plates can be efficiently cut out from a workpiece by a multi-wire electric discharge machining apparatus.

It is explanatory drawing which shows the structure of the multi-wire electric discharge machining apparatus in embodiment of this invention. It is explanatory drawing which shows the workpiece feeding mechanism of the multi-wire electric discharge machining apparatus in the embodiment of the present invention, and the front of a work holder. It is explanatory drawing which shows the workpiece feeding mechanism of the multi-wire electric discharge machining apparatus in the embodiment of the present invention, and the plane of work pressing. It is explanatory drawing which shows the mounting | wearing process of the workpiece | work presser of the multi-wire electric discharge machining apparatus in other embodiment of this invention. It is explanatory drawing which shows the mounting | wearing process of the workpiece | work presser of the multi-wire electric discharge machining apparatus in other embodiment of this invention. It is explanatory drawing which shows the mounting | wearing process of the workpiece | work presser of the multi-wire electric discharge machining apparatus in other embodiment of this invention. It is explanatory drawing which shows the mounting state of the other workpiece | work holder | retainer in the multi-wire electric discharge machining apparatus in embodiment of this invention. It is explanatory drawing which shows typically the state which processes a workpiece | work by the wire electrical discharge machining method. It is explanatory drawing which shows typically the state which processes a workpiece | work with the electric discharge machining method of a prior art.

  As shown in FIG. 1, the multi-wire electric discharge machining apparatus 100 of the present embodiment has pulleys 11 and 12 that change the direction of the wire 15 and a wire 15 wound around a plurality of times, and is rotationally driven by a drive mechanism (not shown). Guide rollers 24 </ b> A to 24 </ b> D, a power source 29, a power supply block 41 that supplies pulse power for electric discharge machining to the wire 15, a work feed unit 27 that moves the work 28 in the XY directions, a work presser 50, and a control unit 80. And.

  After the wire 15 is fed out from a feeding bobbin (not shown), the direction is changed by the pulley 11 and is wound around the axial direction of each guide roller 24A to 24D a plurality of times at intervals of the pitch P. Then, the direction of the wire 15 exiting the guide roller 24D is changed by the pulley 12, and is then wound around a winding bobbin (not shown). The guide rollers 24 </ b> A and 24 </ b> B are a pair of adjacent guide rollers. The workpiece feeding unit 27 drives the workpiece 28 in the X direction, which is the longitudinal direction of the guide rollers 24A, 24B, by the stepping motor 25F, and the cutting wire portion 26 in the direction perpendicular to the longitudinal direction of the guide rollers 24A, 24B by the stepping motor 25E. The workpiece is configured to be driven in the Y direction, which is a direction in which the contact is made.

  The stepping motors 25E and 25F and the power source 29 are connected to the control unit 80 and are configured to operate according to commands from the control unit 80. The stepping motors 25E and 25F can detect the rotation angle of the internal rotor, and can detect the position of the workpiece 28 in the XY directions from the rotation angle of the rotor.

  As shown in FIGS. 2 and 3, the workpiece feeding unit 27 is slidably mounted in the Y direction on the X direction table 27b and the X direction table 27b attached to the upper surface of the fixed base 27a so as to be slidable in the X direction. And a Y-direction table 27c attached freely. A ball screw 27f is rotatably attached to the base 27a so that its position in the X direction does not move, and one end thereof is connected to a shaft of a stepping motor 25F fixed to the base 27a. A nut 27g into which the ball screw 27f is screwed is fixed to the X direction table 27b. When the stepping motor 25F rotates, the X direction table 27b moves in the X direction by the rotation of the ball screw 27f. In addition, two lugs 27d are attached to the upper surface of the X-direction table 27b, and female screws are provided on the lugs 27d. A ball screw 27e is rotatably attached to the Y-direction table 27c so that the position in the Y-direction does not move, and one end thereof is connected to a shaft of a stepping motor 25E fixed to the Y-direction table 27c. ing. The ball screw 27e is screwed into a female screw provided on the lug 27d. When the stepping motor 25E rotates, the Y-direction table 27c moves in the Y direction by the rotation of the ball screw 27e. The Y-direction table 27c is attached to the upper surface of the X-direction table 27b, and moves in the X-direction as the X-direction table 27b moves, so that it can be moved in the XY directions.

  An arm 27h extending downward (Z direction) from the Y direction table is attached to an end portion on the Y direction side of the Y direction table 27c. The arm 27h is L-shaped with the tip bent in the Y direction, and is configured such that the workpiece 28 is fixed to the tip. The work 28 is, for example, an ingot of silicon carbide (silicon carbide). The silicon carbide ingot is cylindrical and partly flat, and an attachment member 28b made of, for example, copper or the like is attached to the flat portion by adhesion or the like. The attachment member 28b is fixed to the tip of the arm 27h with a bolt or the like, and the workpiece 28 moves in the XY direction by the movement of the X and Y direction tables 27b and 27c.

  As shown in FIG. 1, a metal receiving arm 71 to which a work presser 50 is attached is attached to both sides of the lower end of the arm 27h. The receiving arm 71 is a flat plate extending in the Y direction beyond the cutting wire portion 26 outside the cutting wire portion 26 in the X direction, and a metal engaging pin 72 is provided at the tip thereof. The engaging pin 72 has a conical upper end and a cylindrical lower end.

  On the opposite side of the cutting wire portion 26 from the work 28, a work presser 50 is disposed. The work holder 50 includes a metal base 51 such as aluminum, a metal substrate 52 attached to the upper surface of the base 51, and a contact member 53 attached to the workpiece 28 side of the substrate 52. As shown in FIG. 2A, the base 51 is provided with a hole 55 along the outer shape of the engagement pin 72 of the receiving arm 71. The upper surface side of the base 51 of the hole 55 is a tapered hole corresponding to the conical shape of the tip of the engagement pin 72, and the lower surface side of the base 51 of the hole 55 is a cylindrical hole corresponding to the cylindrical portion of the engagement pin 72. It has become. As shown in FIG. 3, the base 51 has holes of engagement pins 72 provided at the tips of receiving arms 71 extending in the Y direction from the both sides of the cutting wire portion 26 in the X direction and beyond the cutting wire portion 26. The length 55 is fitted. Therefore, the length of the base 51 of the work presser 50 in the X direction is longer than the width of the cutting wire portion 26 in the X direction. The receiving arm 71 may be attached to the arm 27h separately on the left and right sides, or may be attached to the arm 27h as a U-shaped planar shape in which the left and right receiving arms 71 are integrated.

  As shown in FIG. 3A, the contact member 53 attached to the work 28 side of the substrate 52 of the work presser 50 has a mountain-shaped rib shape that enters the inside of the slit 28s processed into the work 28 by the cutting wire portion 26. A protrusion 54 extending in the vertical direction is provided in the direction in which the slit 28s extends. The contact member 53 may be manufactured by molding a plurality of rib-shaped protrusions 54 by molding a resin, or by molding rubber or the like. The surface of the contact member 53 opposite to the work 28 is a flat surface and is fixed to the surface of the substrate 52 with an adhesive or the like.

  A process of manufacturing a silicon carbide thin plate 28a by cutting an ingot of silicon carbide (silicon carbide), which is the workpiece 28, by the multi-wire electric discharge machining apparatus 100 configured as described above will be described. A wire feed motor (not shown) is driven to feed the wire 15, and a pulse power supply is supplied from the power supply 29 between each cutting wire portion 26 and the work 28, and the stepping motor 25 E of the work feed unit 27 is rotated to rotate in the Y direction. When the table 27 c and the arm 27 h are sent in the Y direction toward the cutting wire portion 26, the work 28 approaches the cutting wire portion 26. Then, a discharge is generated between the cutting wire portion 26 and the workpiece 28, and the slit 28s starts to be processed in the workpiece 28 as shown in FIG. When the length of the slit 28s reaches a predetermined length, the stepping motor 25E of the work feeding unit 27 is stopped and the feeding of the work 28 is stopped. Then, as shown in FIG. 2, the hole 55 of the work presser 50 is received and aligned with the engagement pin 72 of the arm 71. When the hole of the work retainer 50 is aligned with the engagement pin 72, the work retainer 50 moves downward by its own weight until the lower surface of the base 51 contacts the upper surface of the receiving arm 71. At that time, the tapered portion of the hole 55 and the conical portion of the engaging pin 72 are engaged, and the protrusion 54 of the contact member 53 of the work presser 50 enters the slit 28s. When the hole of the work holder 50 and the engagement pin 72 are further engaged, as shown in FIG. 3A, the inclined side surface of the mountain-shaped protrusion 54 that has entered the slit 28s is the slit 28s. While being pressed against the inner surface, the protrusion 54 is pressed against the workpiece 28 in the direction opposite to the feeding direction of the workpiece 28. Then, the protrusion 54 suppresses the X-direction lateral vibration of the tip portion of the work 28.

  When the work holder 50 is attached in this way, pulse power is again supplied between the cutting wire portion 26 and the work 28, and the work 28 is moved to the Y while generating a discharge between the cutting wire portion 26 and the work 28. The slit 28s is processed in the direction. At this time, the workpiece presser 50 is fed together with the workpiece 28 in the Y direction, and the electric discharge machining of the slit 28 s is performed in a state where the tip of the workpiece 28 is pressed in the direction opposite to the feed direction by the workpiece presser 50. For this reason, even when the length of the slit 28s is increased, the tip of the work 28 is pressed by the work presser 50, and the vibration in the left-right direction (X direction) of the thin plate 28a is pressed. Breaking is suppressed. Then, when the workpiece 28 is sent until the cutting wire portion 26 comes to the attachment member 28b, the electric discharge machining is stopped, the workpiece 28 and the attachment member 28b are removed from the arm 27h, and the workpiece 28 is removed from the attachment member 28b. 28a can be taken out. Thus, when the multi-wire electric discharge machining apparatus 100 of the present embodiment is used, the thin plate 28a can be efficiently cut out from the work 28. That is, the multi-wire electric discharge machining apparatus 100 of the present embodiment can efficiently cut the silicon carbide thin plate 28a from the silicon carbide ingot.

  In the multi-wire electric discharge machining apparatus 100 according to the embodiment described above, the work holder 50 is described as being manually attached. Next, a configuration in which the workpiece holder 50 is automatically attached will be described. The parts described with reference to FIGS. 1 to 3 are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 4, the multi-wire electric discharge machining apparatus 110 according to the present embodiment includes a lever plate 61 that transfers and removes the work presser 50 to and from the upper surface of the receiving arm 71. The lever plate 61 is a metal flat plate and is connected to a base of a multi-wire electric discharge machining apparatus 110 (not shown) by a hinge 62 provided at the end opposite to the cutting wire portion 26. An engaging pin 63 similar to the engaging pin 72 provided on the receiving arm 71 is provided on the upper surface of the end of the lever plate 61 on the cutting wire portion 26 side. The work retainer 50 includes a base 59 that is longer in the feed direction (Y direction) than the embodiment described above. The base 59 is provided with a hole 55 that fits into an engagement pin 72 provided on the receiving arm 71 on the cutting wire portion 26 side, and an engagement provided on the lever plate 61 on the side opposite to the cutting wire portion 26. A second hole 56 that fits into the pin 63 is provided. The lever plate 61 is configured to rotate around the hinge 62 by a stepping motor (not shown), and the angular position can be changed by a command from the control unit 80.

  The operation of the multi-wire electric discharge machining apparatus 110 configured as described above will be described. As shown in FIG. 4, in the initial state, the second hole 56 of the work presser 50 is fitted into the engagement pin 63 of the lever plate 61, and the work presser 50 is held by the lever plate 61. Further, the lever plate 61 is positioned away from the cutting wire portion 26 so that the work pressing member 50 being held does not interfere with the cutting wire portion 26, and the lower surface of the base 59 of the work pressing member 50 is the upper surface of the receiving arm 71. It is in a state of being inclined so as to be above.

  When the control unit 80 outputs a machining start command, pulse power is energized between the cutting wire portion 26 and the work 28, and discharge is generated by sending the work 28 in the Y direction. The slits 28s shown in a) are processed. Then, as shown in FIG. 5, when the lever plate 61 is rotated clockwise, the center position of the hole 55 provided in the base 59 of the work retainer 50 is the center of the engagement pin 72 of the receiving arm 71. When the work 28 is sent to the presser mounting position, the control unit 80 outputs a command for mounting the work presser 50. In response to this command, the control unit 80 rotates a stepping motor (not shown) to rotate the lever plate 61 clockwise. Then, the hole 55 provided in the base 59 of the wire pressing member 50 is fitted into the engaging pin 72 of the receiving arm 71, and the work pressing member 50 is attached to the receiving arm 71. 3A, the protrusion 54 of the contact member 53 of the work presser 50 enters between the slits 28s and is pressed against the work 28 in the direction opposite to the feed direction, so that the tip of the work 28 is pressed. .

  When the work holding member 50 is mounted on the upper surface of the arm 71, the control unit 80 further rotates the lever plate 61 clockwise as shown in FIG. Then, the engaging pin 63 of the lever plate 61 comes out of the second hole 56 of the work presser 50, and the lever plate 61 is separated from the work presser 50.

  When the lever plate 61 is separated from the work presser 50, the control unit 80 is fed with the work 28 in the Y direction together with the work 28, and the tip of the work 28 is pressed by the work press 50 in the direction opposite to the feed direction. Thus, the electric discharge machining of the slit 28s is performed. And since the protrusion 54 fits into the slit 28s at the tip of the workpiece 28 and suppresses the vibration in the lateral direction (X direction) of the thin plate 28a formed between the slits 28s, the thin plate 28a is maintained even if the slit 28s becomes longer. However, the thin plate 28a can be efficiently cut out without breaking during the electric discharge machining.

  If the control part 80 sends the workpiece | work 28 to the Y direction until the cutting wire part 26 comes to the position of the attachment member 28b, it will stop electric discharge machining and will return the workpiece | work 28 to the previous mounting position. Then, the control unit 80 outputs a command to rotate the lever plate 61 counterclockwise. By this command, the lever plate 61 rotates counterclockwise, and the engagement pin 63 is engaged with the second hole 56 of the work retainer 50 to remove the work retainer 50 from the arm 71 upward. When the removal of the work retainer 50 is completed, the control unit 80 retracts the work 28 in a direction opposite to the feeding direction (minus Y direction) to a position where the cutting wire portion 26 and the work 28 do not interfere with each other. Thereafter, when the work 28 and the attachment member 28b are removed from the arm 27h and the work 28 is further removed from the attachment member 28b, the cut thin plate 28a can be taken out.

  Since the multi-wire electric discharge machining apparatus 110 according to the embodiment described above can automatically attach and detach the work holder 50 during electric discharge machining, in addition to the same effects as those of the previously described embodiment, labor saving of electric discharge machining. There is an effect that can be achieved. In the above embodiment, since the work feed speed is low, it is not necessary to stop the electric discharge machining or the work feed when attaching the work presser 50, and the electric discharge machining can be made more efficient. As in the case of manually attaching the work holder 50, the work holder 50 may be attached after the electric discharge machining or the workpiece feed is temporarily stopped.

  Next, another contact member 53 will be described with reference to FIG. The contact member 53 is made of a flexible material such as rubber, does not have the protrusion 54 as in the previous embodiment, and is pressed against the tip of the work 28 in the direction opposite to the feed direction. At that time, the portion 55 is deformed so as to enter between the slits 28s. The portion 57 that has entered the slit 28s and the portion that has not entered the slit 28s are integrated to suppress lateral vibration in the X direction of the workpiece 28. This embodiment has the same effect as the embodiment described above.

  11, 12 Pulley, 15 wire, 24A-24D Guide roller, 25E, 25F Stepping motor, 26 Cutting wire part, 27 Work feed unit, 27a Base, 27b X direction table, 27c Y direction table, 27d Lug, 27e, 27f Ball Screw, 27g Nut, 27h Arm, 28 Workpiece (Ingot), 28a Thin plate, 28b Mounting member, 28d Crack, 28s Slit, 29 Power supply, 41 Power supply block, 50 Workpiece holder, 51, 59 Base, 52 Substrate, 53 Contact member, 54 Projection, 55 hole, 56 2nd hole, 61 Lever plate, 62 Hinge, 63, 72 Engagement pin, 71 Receiving arm, 80 Control unit, 100, 110 Multi-wire electric discharge machine, 200 Air bubbles.

Claims (5)

A guide roller set including a plurality of guide rollers arranged at intervals; and
A plurality of cutting wire portions that are wound around the guide roller set a plurality of times at intervals in the longitudinal direction of each guide roller and arranged at a predetermined spacing pitch in the longitudinal direction of the guide roller between a pair of adjacent guide rollers. A wire to configure;
A multi-wire electric discharge machining apparatus comprising a feed mechanism for feeding a workpiece toward a cutting wire portion,
Having a workpiece presser that is pressed against the workpiece from the tip side in the workpiece feeding direction toward the side opposite to the workpiece feeding direction;
A multi-wire electric discharge machining apparatus. The multi-wire electric discharge machining apparatus according to claim 1,
The work presser includes an elastic contact member that partially enters the slit processed by the cutting wire part when pressed against the work,
A multi-wire electric discharge machining apparatus. The multi-wire electric discharge machining apparatus according to claim 2,
The contact member has a protrusion that enters a slit machined by the cutting wire portion;
A multi-wire electric discharge machining apparatus. The multi-wire electric discharge machining apparatus according to any one of claims 1 to 3,
A receiving arm attached to the feed mechanism and provided with an engagement pin;
A holding member for holding the work presser,
The holding member has an engagement hole that presses the work press against the work by fitting into the engagement pin of the receiving arm;
A multi-wire electric discharge machining apparatus. A guide roller set including a plurality of guide rollers arranged at intervals, and a plurality of guide roller sets wound around the guide roller set at intervals in the longitudinal direction of each guide roller, and the guide rollers between a pair of adjacent guide rollers Using a multi-wire discharge device comprising a wire constituting a plurality of cutting wire portions arranged at a predetermined spacing pitch in the longitudinal direction of the roller, and a feed mechanism for sending an ingot of silicon carbide toward the cutting wire portion,
A method of manufacturing a silicon carbide plate in which a plurality of plates are cut from an ingot by discharging between each cutting wire portion and the ingot while pressing an ingot holding member against the ingot from the tip side in the ingot feeding direction toward the opposite side of the ingot feeding direction .

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