JPWO2013073225A1 - Wire electrical discharge machining apparatus and semiconductor wafer manufacturing method - Google Patents

Abstract

  In simultaneous cutting of a workpiece by wire electric discharge machining using parallel wire parts, the position where the energization path in the work piece is cut cannot be controlled, and the wire breakage caused by the interruption of the energization path In order to solve the problem that is not sufficient as a structure for avoiding the problem, the wire electric discharge machining apparatus of the present invention is a wire electric discharge machining apparatus that performs electric discharge machining while raising or lowering the workpiece by the parallel wire portion in the electric discharge machining region. Thus, the diameter of the wire guide groove around the rotation axis of the first and second vibration damping guide rollers is changed depending on the position in the rotation axis direction.

Description

  The present invention relates to a wire electric discharge machining apparatus and a semiconductor wafer manufacturing method.

  Conventionally, when a thin plate-shaped wafer is produced from a columnar workpiece by cutting using wire electric discharge machining, in order to simultaneously process using a number of wires and improve the productivity of the cutting process, A method has been proposed in which a single wire is repeatedly wound between a plurality of guide rollers. This type of wire electric discharge machining apparatus forms a cutting wire portion in which the wires are arranged in parallel at a constant pitch, brings the cutting wire portion close to the workpiece, and uses each of the cutting wire portions by using a power supply. By supplying power individually, electric discharge is generated simultaneously between each cutting wire portion and the workpiece, and cutting is performed in parallel at a plurality of locations (for example, see Patent Document 1).

  In addition, in a wire electric discharge machining apparatus that repeatedly winds a single wire between a plurality of guide rollers, it has been known to provide a push rod that suppresses vibrations of the power supply and the cutting wire portion (see, for example, Patent Document 2). .

  Furthermore, Patent Document 4 discloses a technique regarding a guide roller in which a groove of a wire cut processing apparatus is formed and a power supply for supplying power to a plurality of wires.

JP 2000-94221 A JP 2010-5735 A Japanese Utility Model Publication No. 54-17291 Japanese Patent Laid-Open No. 51-145988 JP 2010-110865 A JP 2000-5999 A JP-A-4-135157 JP-A-1-193165 JP 2008-1000029 A

  However, according to the above conventional technique, for example, when a plurality of thin plates are simultaneously cut out from a workpiece by a wire electric discharge machining apparatus in which a plurality of wires are arranged in parallel as in Patent Document 1, a thin plate is removed from a workpiece. Wire breakage is likely to occur near the end of cutting. If the wire breaks in the middle of electric discharge machining, after repairing the wire breakage, the wire electric discharge machining will be resumed from that breakage position, but the electric discharge machining state immediately after resuming the machining will be in the same state as before the wire breakage. Difficult to do. Therefore, a wire breakage occurs in the middle of electric discharge machining, and then the processing amount of the semiconductor wafer cut out from the workpiece (ingot) by restarting the machining is larger than that of the unbroken portion. Therefore, there has been a problem that the wafer thickness near the broken wire portion becomes thin.

  Further, in a state where the wafer is cut from the workpiece after a short time by wire electric discharge machining, a slight uncut portion of the workpiece may be cleaved and separated into wafers. In such a cleaved portion or the above-described wire cut portion, the thickness and shape of the cut wafer are different for each separated wafer, and there is a problem that the processing load increases in the wafer processing step after the wafer is cut.

  The cause of the occurrence of the wire breakage is formed by electric discharge machining at the cutting wire portion, although an ingot as a workpiece is simultaneously cut into a plurality of wafers by a cutting wire portion in which a plurality of wires are arranged in parallel. This is because the wafer that is being separated from the ingot by each processing groove (slit) causes a slight time difference until it is completely separated from the ingot. That is, just before the wafer is cut out from the ingot, the wafers are slightly connected to each other, and since the ingot is still an integral part, it is in an electrically conductive state.

  Therefore, a current path for returning to the machining power source through the ingot is secured for the discharge current generated by the electric discharge machining performed at the tip (bottom) portion of the machining groove for cutting the wafer. However, for example, one of the plurality of wafers being processed by wire electric discharge machining is cut first, the ingot is cut in part, and the path of the discharge current configured through the ingot that was a lump until then If it is also disconnected, the current is divided as described above, and the discharge current does not flow to the ingot on the side where the power supply line to the machining power supply side is not connected. For wires that are no longer supplied with processing energy, the processing capability is reduced, short-circuited, and disconnected.

  As described above, in the method of simultaneously cutting a workpiece by a plurality of wire electric discharge machining, the machining energy supplied to each wire from the machining power source via the power supply line and the electric power supply flows into the workpiece by the arc discharge. An electric current is generated, and the workpiece is melted and removed by the thermal energy, and the processing proceeds. However, in order for the discharge current to flow to the workpiece, a path is required for the supplied discharge current to return to the machining power source again, and the discharge current passes through the feeder line connected to the workpiece. Composed by returning to However, when the feeder connected to the workpiece is connected to one side of the workpiece, the workpiece is first cut with a wire located at the center of the cutting wire portion. The ingot on the side far from the connection position of the power supply line to the workpiece is divided, the path of the discharge current supplied from the machining power supply is cut off, and the electric discharge machining is not performed on the divided ingot The wire is short-circuited with the workpiece and disconnected.

  In addition, when an ingot to be machined is inserted into a portion of a metal block that has been cut into an ingot cross-sectional shape and the entire metal block is cut and processed, the portion cut out from the metal block portion is cut into the ingot even when sliced into the wafer thickness. Since it surrounds, it is expected to be fed from the metal block. However, since the gap due to poor fitting accuracy with the ingot or the contact portion between the ingot and the metal block is a point contact, the above-described wire breakage occurs when a sufficient power supply path is not secured.

  On the other hand, for the ingot cleaving, when the remaining amount until the completion of cutting becomes small, the external force such as the machining fluid flow supplied between the electrodes and the slight load balance of the workpiece on the wafer part separated from the workpiece. Due to the change, stress concentration occurs on an unprocessed portion of the workpiece slightly remaining at the tip of the processing groove, that is, a slight connection portion between the wafers, and the portion easily breaks at that portion. Even with such cleaving, a state similar to the state in which the cutting process is preceded by some of the wires as described above is performed, and in the workpiece thus divided, the path of the discharge current supplied from the machining power source is cut off, A power failure situation occurs.

  Thus, when the energization path for the discharge current flows is interrupted, the discharge current stops flowing, and the electric discharge machining is interrupted. When the relative feed of the workpiece to the wire is continued despite the state where the continuity of electric discharge machining has become unstable, the wire whose power path is cut off comes into contact with the workpiece, and the workpiece is machined. The wire will eventually break while rubbing the surface. In addition, the wafer cut out by cleaving has a non-uniform plate thickness at the end of cutting, which increases the processing load in the grinding process for making the wafer thickness uniform.

  Wire breakage and wafer breakage caused by cutting the current path from the machining power source described above to the machining power source connected to the power supply line via the feeder line, power supply, wire, and workpiece are discharged. It is unique to machining, and is not mentioned in any of the methods for simultaneous machining of ingots by wire electric discharge machining shown in Patent Documents 1 to 3. In any of the methods disclosed in Patent Documents 1 to 3, the position at which the workpiece is cut the earliest due to the plurality of slits formed in the workpiece by the electric discharge machining of a plurality of wires varies depending on the machining. It is definite. Therefore, it is impossible to control the position where the energization path in the work piece is interrupted by the above-described ingot division, and it is not sufficient as a structure for avoiding the wire disconnection caused by the disconnection of the energization path.

  Furthermore, as a slicing method other than the electric discharge type wire saw, a method of cutting a workpiece while grinding and polishing it with abrasive grains deposited on the surface of the traveling wire or abrasive grains drawn between the traveling wire and the processing surface This wire saw is irrelevant to the above-described short-circuit due to poor current supply of the machining current. On the other hand, the wire saw is a contact process in which the cutting wire is pressed against the work piece. Therefore, a very large reaction force that does not pose a problem in a non-contact electric discharge type wire saw is present in the cutting wire and the work piece. Act on. Due to this processing reaction force, the cutting wire is particularly easily bent due to the elastic body, the cutting wire stretched between the main rollers is loosened, and the processing accuracy is affected, and further, the cutting wire is easily disconnected. In contrast, the diameter of the main roller or the depth of the wire guide groove is rotated to prevent loosening of the cutting wire stretched between the main rollers or to prevent fluctuations in the tension of the cutting wire wound around the main roller. Some are different in the axial direction.

  For example, in a wire saw that presses and cuts the wire of Patent Document 4 against the workpiece, when the workpiece has a different cutting thickness for each cutting wire, the thinner the cutting thickness, the faster the cutting speed and the bending of the wire. However, since the processing is continued, the cutting completion time becomes non-uniform depending on the cutting thickness. By changing the diameter of the guide pulley according to the cutting thickness of the workpiece, the processing speed is made uniform by making a difference in the pressing force to the workpiece in each cutting wire.

  In the wire saw described in Patent Document 5, the main roller diameter is gradually increased from the wire supply side to the discharge side, or the wire guide groove depth of the main roller is increased from the wire supply side to the discharge side. A technique for gradually decreasing the depth is disclosed. By adopting such a form, the circumferential length of the wire applied to the main roller is gradually increased, and the wire due to the difference in wire elongation generated from the supply side to the discharge side of each cutting wire stretched between the main rollers The waviness of the cut surface of the workpiece is improved by uniforming the slack of the workpiece.

  In addition, the main roller described in Patent Document 6 describes that only the diameter of the groove for guiding several wires at both ends is smaller than the central portion of the main roller and has a step shape. The guide wire prevents the guide roller from being deeply damaged by the wire being bitten into the main roller due to fluctuations in the tension of the traveling wire. Similarly, the main roller described in Patent Document 7 has no change in the shaft diameter of the central portion of the main roller around which the cutting wire is wound, but the shaft end at both ends of the main roller where the cutting wire is not wound. The wire tension is adjusted according to a region where the diameter of the main roller before and after the wire winding width gradually changes.

  In the wire saw described in Patent Document 8, the tension of the wire wound around the main roller is only controlled to be constant on the inlet side and the outlet side in the wire saw, and the center of the main roller Since the wire wound around the part is slack, the depth of the wire guide groove is deeper at the center of the main roller than at both ends, and the frictional force with the wire is increased at the center of the main roller. The wire is prevented from loosening.

  Further, Patent Document 9 relates to a wire saw having a structure in which a main roller is cantilevered. When a wire is wound around the main roller a plurality of times, the main roller is inclined due to the tension and a free end without a support portion. The side is greatly displaced. By changing the depth of each wire guide groove according to the inclination angle of the main roller, each cutting wire faces the workpiece surface at an equal distance even when the main roller is inclined.

  As described above, regarding the outer shape of the wire saw type main roller and the depth of the wire guide groove formed on the surface thereof, a wire saw processed by applying a very large tension to the cutting wire portion stretched between the main rollers. It is unique to the method. With a discharge type wire saw that does not act on the machining reaction force, it does not matter that it is described in the above-mentioned patent document, and even if the contents described there are applied to a discharge type wire saw, it is close to completion of cutting. It does not prevent wire breakage or wafer breakage that occurs.

  The present invention has been made in view of the above-described problems, and in the cutting wire portion in which a plurality of wires are arranged in parallel at a constant interval, the above-described processing direction has been described as in the conventional method. The plurality of wires are arranged in parallel at regular intervals in the processing direction without arranging the plurality of wires in a horizontal row in the horizontal direction. Thus, the wafer electrical discharge machining apparatus which can always complete the wafer cutting in order from the specific wire in the workpiece and can cut the wafer from the ingot which is the workpiece with high accuracy and stably, and An object of the present invention is to obtain a semiconductor wafer manufacturing method.

  In order to solve the above-described problems and achieve the object, the present invention includes first and second main guide rollers installed in parallel across an electric discharge machining area, the electric discharge machining area, and the first main guide roller. A first vibration-damping guide roller that is installed between the first and second guide guide rollers, and is formed by concentrically separating a plurality of wire guide grooves for guiding the wire about the rotation axis, and the electric discharge machining region and the second main guide roller A plurality of wire guide grooves for guiding the wire and formed concentrically with a rotation axis as a center, and a second vibration guide guide roller, And the second main guide roller, and the first and second vibration damping guide rollers are wound a plurality of times while being spaced apart at a constant pitch, and the parallel wire portion is formed in the electric discharge machining region. A wire electric discharge machining apparatus for performing electric discharge machining while raising the workpiece from below the parallel wire portion or lowering the workpiece from above the parallel wire portion, wherein the first and second vibration damping guide rollers The diameter of the wire guide groove around the rotation axis of the wire changes depending on the position in the rotation axis direction.

  According to the present invention, the plurality of machining grooves formed in the workpiece by the electric discharge machining of the cutting wire portion are machined so as to have a stepwise difference in the machining groove depth. The wafer is cut and processed in order from the position. Thereby, the path of the discharge current by electric discharge machining is not cut off by cutting the workpiece, and stable wire electric discharge machining can be realized and the wafer processing accuracy can be improved. .

FIG. 1 is a side view showing a configuration of a wire electric discharge machining apparatus according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view showing the positional relationship between the wire being processed and the workpiece in Embodiment 1 of the present invention. FIG. 3 is an external view showing the structure of the vibration damping guide roller according to Embodiment 1 of the present invention. FIG. 4 is a cross-sectional view showing the structure of the vibration damping guide roller according to Embodiment 1 of the present invention. FIG. 5-1 is a perspective view illustrating a configuration of a nozzle according to Embodiment 1 of the present invention. FIG. 5-2 is a perspective view of the configuration of the nozzle according to the first embodiment of the present invention viewed from another direction. FIG. 6 is a perspective view showing the configuration of the wire electric discharge machining apparatus according to Embodiment 1 of the present invention. FIG. 7 is a perspective view showing a processed state of the workpiece in Embodiment 1 of the present invention. FIG. 8 is an outline view showing a structure of a modification of the vibration damping guide roller of the wire electric discharge machining apparatus according to Embodiment 1 of the present invention. FIG. 9 is an outline view showing the structure of the vibration damping guide roller of the wire electric discharge machining apparatus according to Embodiment 2 of the present invention. FIG. 10 is an external view showing the structure of the vibration damping guide roller of the wire electric discharge machining apparatus according to Embodiment 3 of the present invention. FIG. 11 is an external view showing the structure of the vibration damping guide roller of the wire electric discharge machining apparatus according to Embodiment 4 of the present invention. FIG. 12 is a perspective view showing a configuration of a wire electric discharge machining apparatus according to Embodiment 5 of the present invention.

  Embodiments of a wire electric discharge machining apparatus and a semiconductor wafer manufacturing method according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a side view showing the configuration of the main part of wire electric discharge machining apparatus 100 according to Embodiment 1 of the present invention. The main guide rollers 1a to 1d are main guide rollers constituting a wire traveling system. In the wire electric discharge machining apparatus 100, four main guide rollers 1a to 1d having the same diameter are arranged in parallel with each other at intervals. Yes. One wire 3 fed out from the wire bobbin 2 is sequentially wound around the four main guide rollers 1a to 1d while being spaced apart at a constant pitch. The wire 3 travels as the main guide rollers 1a to 1d rotate, and finally reaches the wire winding bobbin 4.

  The main guide rollers 1c and 1d are installed at positions sandwiching the workpiece 5, and the wire 3 is stretched between the main guide rollers 1c and 1d with a constant tension, so that the shafts of the main guide rollers 1c and 1d are mutually connected. A plurality of parallel wire portions PS separated in the direction are configured. In the following embodiments, the parallel wire portion PS indicates a portion from the main guide roller 1c until it is wound around the main guide roller 1d. In the parallel wire portion PS, a linearly stretched region including a portion facing the workpiece 5 is a cutting wire portion CL. A region where the cutting wire portion CL faces the workpiece 5 is an electric discharge machining region. FIG. 1 shows a state in which cutting of the workpiece 5 has started and the cutting wire portion CL has advanced into the workpiece 5.

  The power supply units 6a and 6b arranged in contact with the parallel wire part PS are electrodes that individually supply voltage pulses to the cutting wire part CL, and two are provided in FIG. Further, vibration suppression guide rollers 7a and 7b are arranged on the parallel wire portion PS between the electric power supply units 6a and 6b, and the state where the wire 3 is always hung is maintained to guide the wire 3. That is, the vibration suppression guide rollers 7a and 7b are guide rollers having a smaller diameter than the main guide rollers 1c and 1d, which are provided between the pair of main guide rollers 1c and 1d and are in contact with the parallel wire portion PS. Then, a plurality of cutting wire portions CL in which the wire 3 is supported and the wire 3 is linearly extended are formed. As will be described later, in the cutting wire portion CL between the vibration suppression guide rollers 7a and 7b, the wire vibration is suppressed and the traveling position is almost stationary.

  Further, the nozzles 8a and 8b are arranged in the region of the cutting wire portion CL, and the working liquid is directed from the nozzles 8a and 8b arranged opposite to each other toward the cutting portion of the workpiece 5 along the cutting wire portion CL. Erupt. The cutting wire portion CL penetrates the nozzles 8a and 8b, but does not contact the inner surfaces of the nozzles 8a and 8b. The stage 9 is a table that raises and lowers the workpiece 5 and the arrow drawn from the stage 9 indicates the ascending direction of the stage 9.

  For each of the main guide rollers 1a to 1d, the wire 3 is wound around a part of the outer periphery of the roller (about ¼ turn), and wraps around the entire four main guide rollers 1a to 1d. The main guide rollers 1a to 1d constitute a path from the wire bobbin 2 to the wire take-up bobbin 4 so as to secure a space for the workpiece 5 to pass through the cutting wire portion CL and not interfere with other wires. It is configured. The main guide rollers 1c and 1d are driving guide rollers, and the main guide rollers 1a and 1b disposed above the main guide rollers 1c and 1d are driven guide rollers.

  The driven guide roller is driven to rotate with its shaft connected to the motor, while the driven guide roller does not generate a driving force and rotates as the wire travels. The vibration suppression guide rollers 7a and 7b are driven guide rollers arranged so as to be wound around the wire 3 in contact with the parallel wire portion PS, and rotate by being driven as the wire 3 travels. In FIG. 1, the arrows drawn around the axes of the main guide rollers 1 a to 1 d indicate the rotation direction of each main guide roller, and the arrows drawn along the wires 3 indicate the traveling direction of the wires 3.

  FIG. 6 is a perspective view of the wire electric discharge machining apparatus 100 according to the first embodiment shown in FIG. 1 as viewed obliquely with respect to the rotation shafts of the main guide rollers 1a to 1d. The arrangement relationship with the part CL is shown. In each guide roller, a groove around which the wire 3 is wound is simply indicated by a solid line. In this perspective view, a three-dimensional winding state of the wire 3 and the power supply units 6a and 6b in the wire electric discharge machining apparatus 100 are shown.

  The main guide rollers 1a to 1d are rollers in which, for example, urethane rubber is wound around a cylindrical core metal, and both ends of the core metal are supported by bearings and are rotatable. Since urethane rubber has a high coefficient of friction with the wire, it is suitable for preventing the wire 3 from slipping on the main guide rollers 1a to 1d. A plurality of grooves are formed at the same interval as the wire winding pitch on the surface of the main guide rollers 1a to 1d with which the wire 3 comes into contact, and the wire 3 is wound around each groove. At this time, the distance (winding pitch) between the cutting wire portions CL arranged in parallel at equal intervals is constant, and in the case of a semiconductor wafer, it is, for example, about 0.1 mm to 0.8 mm. In the drive type main guide roller, a force for pulling the wire 3 can be obtained, and in the driven type main guide roller, a rotational force for rotating the roller can be obtained.

  These main guide rollers 1a to 1d, vibration-damping guide rollers 7a and 7b, and the workpiece 5 are immersed in the processing liquid, and each cutting wire portion CL faces the workpiece 5 in the processing liquid. Cut at the same time.

  The vibration control guide rollers 7a and 7b will be described. The vibration suppression guide rollers 7a and 7b are driven guide rollers having higher shape accuracy, rotation accuracy, and mounting accuracy than the main guide rollers 1a to 1d, and two vibration suppression guide rollers 7a and 7b are used at positions where the workpiece 5 is sandwiched. The damping guide rollers 7a and 7b are pushed into the extended parallel wire part PS so that the wire 3 is hooked on a part of the outer periphery. As a result, the wire 3 between the vibration suppression guide rollers 7a and 7b is stretched linearly, and the traveling direction of the wire 3 is bent, so that the wire 3 is always hooked while the wire 3 is traveling. State is maintained.

  As described above, the wire 3 that has been vibrated before being applied to the vibration suppression guide roller 7b is reliably applied to the vibration suppression guide roller 7b, so that the vibration of the wire 3 traveling while vibrating is blocked. Similarly, vibration applied to the wire 3 fed from the vibration suppression guide roller 7a is blocked by the vibration suppression guide roller 7a. As a result, the two vibration suppression guide rollers 7a and 7b are rotated by the frictional force with the wire 3 as the wire travels, creating a state where there is almost no wire vibration in the linear region between the vibration suppression guide rollers. That is, the vibration guide rollers 7a and 7b suppress vibration propagation from the main guide rollers 1a to 1d to the cutting wire portion CL and accurately guide the wire 3 so that the microscopic traveling position is constant. Is possible.

  Although the vibration suppression guide rollers 7a and 7b may bend the traveling direction of the wire connected to the cutting wire portion CL, the vibration suppression guide rollers 7a and 7b do not have a function of ensuring a space for the workpiece 5 to pass through the cutting wire portion CL. . On the surface of the roller with which the wire 3 comes into contact, there are wire guiding grooves having the same interval as that of the cutting wire portion CL, and one wire is placed in each groove. The left and right arrows on the vibration damping guide rollers 7a and 7b in FIG. 1 indicate the movable directions of the vibration damping guide rollers 7a and 7b on the wire electric discharge machining apparatus 100.

  The outer shapes of the vibration suppression guide rollers 7a and 7b for guiding the plurality of wires 3 arranged in parallel are rotationally symmetric with respect to the rotation axis, and the diameters of the vibration suppression guide rollers 7a and 7b in the rotation axis direction. Is the maximum at the central portion in the rotation axis direction, and the diameters of the vibration suppression guide rollers 7a and 7b become smaller as the distance from the groove with the maximum diameter increases. That is, the diameter in the groove portion gradually decreases from the central portion in the rotation axis direction toward the end portions of the vibration suppression guide rollers 7a and 7b. That is, the vibration suppression guide rollers 7a and 7b have a shape in which the bottom surfaces of two cones having the same shape are bonded together. However, the change of the guide roller diameter with respect to the rotation axis direction is moderate, and the reduction ratio of the diameters of the vibration suppression guide rollers 7a and 7b is in the two adjacent wire guide grooves on which the two adjacent wires 3 are respectively hung. The difference in guide roller diameter is, for example, about twice the wire diameter used between adjacent wires.

  As shown in FIG. 6, the power supply units 6 a and 6 b are aggregates of the power supply K aligned at the same interval as the winding pitch of the wire 3, and the respective power supply K are insulated from each other. A machining current supplied from each of the power supply electrons K connected to the machining power supply unit 10 via a power supply line flows through each wire of the cutting wire portion CL. As the supply electron K, for example, one having a circular or arcuate cross section with a groove-shaped wire guide is used. The power supply K is rotatably installed so that the wire contact portion can be changed periodically by rotating.

  FIG. 2 is a cross-sectional view showing the positional relationship between the wire 3 of the cutting wire portion CL and the workpiece 5 being processed in the present embodiment, where the symbol d in the drawing is the length of the discharge gap, and the symbol DW is The wire diameter and symbol CW indicate the machining width. The nozzles 8a and 8b are machining fluid ejection devices for supplying machining fluid to the above-described discharge gap and flushing away machining waste, and are installed on both sides of the workpiece 5 along the cutting wire portion CL.

  FIG. 3 is an external view of the vibration damping guide roller 7a or 7b in the present embodiment. The diameters of the vibration damping guide rollers 7a and 7b are the maximum diameters in the middle portion of the rotation axis direction, and in the end directions of both shafts. The surfaces of the vibration suppression guide rollers 7a and 7b are tapered so as to gradually become smaller. A plurality of wire guide grooves GR, which are grooves for guiding the wire, are processed on the surface. Accordingly, the diameters of the wire guide groove of the vibration suppression guide roller 7a that directly holds the wire 3 stretched in the electric discharge machining region and the wire guide groove of the vibration suppression guide roller 7b are substantially the same.

  FIG. 4 is a cross-sectional view showing an example of the structure of the wire guiding groove formed on the surfaces of the vibration damping guide rollers 7a and 7b in the present embodiment. The part is shown enlarged. The cross-sectional shape of the wire guide groove GR is V-shaped. When the wire 3 is engaged with the wire guide groove GR, each wire 3 is supported at two points on the side surface of the V-shaped wire guide groove GR. As a result, vibration in the lateral direction (axial direction of the roller) with respect to the wire traveling direction is suppressed. When the wire 3 is wound around the vibration suppression guide rollers 7a and 7b, the wire 3 is relatively stationary with respect to the vibration suppression guide rollers 7a and 7b while rotating in contact with the vibration suppression guide rollers 7a and 7b. Therefore, the vibration of the cutting wire part CL is stopped. In the configuration of FIGS. 1 and 6, the actual hooking of the wire 3 on the surfaces of the vibration suppression guide rollers 7a and 7b is a state in which FIG. 4 is turned upside down.

  Further, by fitting the wire 3 into the wire guide groove GR having a V-shaped cross section, an effect of gripping the wire 3 is produced, and slipping on the vibration damping guide rollers 7a and 7b having a small length of the wire 3 is prevented. The driven rotation of the vibration suppression guide rollers 7a and 7b can be stabilized by being suppressed.

  Further, as described above, the diameter of each wire guide groove GR of the vibration damping guide rollers 7a and 7b is the largest among the grooves located at the center of the vibration damping guide rollers 7a and 7b, and the groove portion becomes farther away from the largest diameter groove. When the cutting wire portion CL is hung on each groove of the vibration suppression guide rollers 7a and 7b, the reference surface in the space through which all the wires 3 of the cutting wire portion CL pass is processed. It is not parallel to the object 5, but is slightly inclined and opposed. As a result, there is a difference in the distance from each wire 3 to the upper surface of the workpiece 5 according to the order of alignment of each wire 3 in the cutting wire portion CL according to the amount of inclination (taper) of the surfaces of the vibration suppression guide rollers 7a and 7b. Arise. In the case of the vibration suppression guide rollers 7a and 7b, the wire 3 hung in the groove located at the center is closest to the workpiece 5, and then the adjacent wires 3 are close to the workpiece 5. As described above, the wire 3 is placed in such a manner that the processing start distance to the workpiece 5 in each wire 3 is increased stepwise, that is, in a state in which each wire 3 and the surface of the workpiece 5 are gradually separated from each other. Can be paralleled. In this case, the depths of the plurality of wire guide grooves GR processed on the outer peripheral surfaces of the vibration suppression guide rollers 7a and 7b are all constant.

  Next, operation | movement of the wire electric discharge machining apparatus 100 in this Embodiment is described. In the wire electric discharge machining, the workpiece 5 is cut by generating an arc discharge in a minute discharge gap between the wire 3 and the workpiece 5 filled with a machining fluid such as deionized water. . Specifically, the surface of the workpiece 5 is heated by an arc to a high temperature, and the machining liquid present in the discharge gap is explosively vaporized to blow away the high temperature portion of the workpiece 5. The part blown off becomes machining waste and floats in the machining fluid. Since the cutting wire portion CL and the workpiece 5 are discharge electrodes, the length d of the discharge gap is also referred to as an inter-electrode distance.

  During processing, the wire 3 is continuously drawn out from the wire bobbin 2, travels by the rotation of the main guide rollers 1 a to 1 d, and is discharged to the wire take-up bobbin 4. By adjusting the respective rotational speeds of the wire bobbin 2 and the wire take-up bobbin 4, the tension during traveling of the wires 3 arranged in parallel is controlled. When the traveling state of the wire 3 is stable, the tension of the traveling wire 3 is kept constant.

  When performing electric discharge machining, after rotating the main guide rollers 1c and 1d and running the wire 3, the workpiece 5 is disposed facing the cutting wire portion CL with a predetermined inter-electrode distance. Then, a voltage pulse is applied to the cutting wire portion CL, and the stage 9 is raised in accordance with the cutting speed. With the distance between the electrodes kept constant, the cutting wire portion CL (parallel cutting portion) and the workpiece 5 are moved relative to each other to continue arc discharge, and the cutting wire portion CL of the workpiece 5 passes. A processing groove is formed corresponding to the route. Therefore, the thickness of the wafer to be cut out is a length obtained by subtracting the width of the processed groove (processed width CW) that becomes the cutting allowance of the workpiece 5 from the winding pitch. As can be understood from FIG. 2, the machining width CW is a value obtained by adding twice the inter-electrode distance d to the wire diameter DW. In order to reduce the processing width CW, it is desirable that the wire 3 has a smaller wire diameter, and a steel wire of about 0.1 mm is suitable for practical use, and a further thinned wire such as 0.07 mm is preferably used. Furthermore, in order to make the discharge start voltage appropriate, a coating such as brass may be applied to the surface of the steel wire.

  At this time, if some vibration is transmitted to the cutting wire portion CL, the cutting wire portion CL contacts the bottom surface of the processing groove in the processing groove of the workpiece 5 to cause a short circuit. Or, it is too far away from the machining surface to cause an open state where no electric discharge occurs, and the electric discharge machining becomes unstable due to the repeated occurrence of these. On the other hand, if the wire travel can be stabilized and the accuracy of the wire position can be increased, the pitch between the cutting wire portions CL can be reduced, and a thinner wafer can be cut out from the ingot-like workpiece 5. .

  In normal wire electric discharge machining, the distance of the discharge gap (distance between the electrodes) where the cutting wire portion CL faces the workpiece 5 is about 50 μm. When a semiconductor wafer is manufactured by cutting an ingot of a semiconductor crystal, the thickness of the wafer is often 0.5 mm or less, and reduction of the cutting allowance (processing width CW) is an important issue from the viewpoint of cost reduction. In order to reduce the cutting allowance, the distance between the electrodes is required to be 20 μm or less, preferably about 10 μm, along with the thinning of the wire 3, and a technique for suppressing the wire vibration amplitude to about 1 μm or less is required. It has become.

  Further, the simultaneous cutting process using a plurality of wires 3 arranged in parallel is usually performed in a state where the positions of the wires 3 are aligned in a horizontal row in the processing direction. That is, the processing proceeds so that the processing start time and the cutting completion time of each wire 3 are the same. However, strictly speaking, the wires 3 hardly complete the wafer cutting at the same time, and a slight time difference occurs. In particular, when the number of wires constituting the cutting wire portion CL is large, or when the cutting thickness of the workpiece 5 is large and the stretch distance of the wire 3 is long, the cutting of the workpiece 5 by each wire 3 is completed. Time difference is likely to occur. In the case of electric discharge machining using a plurality of wires 3, due to the time difference at the time of completion of the cutting, there is a possibility that power feeding failure may occur for a specific wire 3 depending on the cutting position of the workpiece 5. The technology to control is needed.

  The present embodiment is intended to meet the high demands related to the above-described wire vibration control and the cutting order control of the workpiece 5, and as described above, a highly accurate vibration control guide roller. 7a and 7b effectively suppress the wire vibration caused by the main guide rollers 1a to 1d, and further adjust the parallel positions of the plurality of wires 3 in the processing direction so that the cutting processing of each wire 3 is performed. A time difference until the end time is generated.

  As a result of the experiment, the inventors have found that in the discharge gap, the cutting wire portions CL are arranged in parallel by the vibration damping guide rollers 7a and 7b having the wire guide groove GR having the shape shown in FIGS. 3 and 4 described above. It has been found that the amplitude of the wire vibration is suppressed to 1 μm or less and that a plurality of wafers are processed in sequence.

  In the present embodiment, the power supply units 6a and 6b are installed on the outer side between the vibration suppression guide rollers 7a and 7b with the workpiece 5 interposed therebetween, and each power supply K applies a voltage to the cutting wire portion CL. Can do. The wire 3 is wound along the power supply surface of the power supply K, contacts the power supply K while traveling, forms a sliding contact, and supplies power to the cutting wire portion CL. When the cutting wire part CL is lifted from the supply electron K during processing, an arc discharge occurs between the two and the supply electron K is seriously damaged. Therefore, the sliding contact must be reliably maintained.

  In order to adjust the amount of pressing the power supply units 6a and 6b, a mechanism (not shown) for moving the power supply units 6a and 6b in the direction perpendicular to the wire 3 is provided. The contact length between the wire 3 and the power supply K is the sliding length, and the sliding length can be managed by the pressing amount of the power supply units 6a and 6b against the parallel wire portion PS. That is, when the pressing amount is small, the sliding length is small, and when the pressing amount is large, the sliding length is large. The pressing amount may be defined by a pushing distance with respect to the wire 3 or may be defined by a pressing force. The contact resistance can be adjusted by adjusting the sliding length, and the discharge current value per voltage pulse can be finely adjusted. Therefore, even when consumable parts such as the wire 3 and the power supply units 6a and 6b are replaced, it is easy to reproduce the processing state before replacement, and reproducibility for each processing batch can be ensured.

  In wire electric discharge machining, there is a phenomenon in which machining scraps of the workpiece 5 adhere to the surface of the wire 3 with electric discharge in liquid. Therefore, in the method in which the wire 3 is wound many times between the guide rollers, the wire 3 is repeatedly used for electric discharge machining, and the surface of the wire 3 is gradually scraped and the attached film becomes thick. As a result, the surface of the wire 3 changes from an initial smooth metal surface such as brass or molybdenum to a state having fine irregularities. Since the wire 3 to which the processing scraps are attached has properties like a wire saw, when the wire 3 is wound around a fixed member such as a die guide and slides, the member is worn and a groove into which the wire 3 is fitted is formed. Is done. If the groove is generated, the tension of the wire 3 is reduced and the vibration is increased. Therefore, for example, there is a limit in giving a vibration damping action by pressing the supply electron K against the wire 3.

  On the other hand, since the vibration suppression guide rollers 7a and 7b rotate together with the wire 3, even when the saw wire 3 is guided, the wear is very small, and the vibration suppression effect is obtained even if long-time electric discharge machining is performed. There is no decline.

  FIGS. 5A and 5B are perspective views showing the appearance of the nozzles 8a and 8b in the present embodiment as viewed from different directions. A nozzle component plate 92 and an escape port component plate 94 are fitted into a nozzle body 91 having a through hole, and a nozzle port 93 that faces the workpiece 5 is formed in the nozzle component plate 92. Moreover, the parallel wire part PS which continues from the some cutting wire part CL is passed through the jet nozzle 93. The escape opening configuration plate 94 has an escape opening 95 through which the cutting wire portion CL passes through the nozzle body 91 in a non-contact manner. The escape port 95 is located on the opposite side of the jet port 93 and the parallel wire portion PS is passed through like the jet port 93. The escape port 95 is narrower than the jet port 93 because the amount of machining fluid flowing out from the escape port 95 is reduced and the amount of machining fluid flowing out from the jet port 93 is increased.

  The machining fluid is supplied to the nozzle body 91 at a constant flow rate from a supply pipe (not shown), and is ejected from the ejection port 93 and the escape port 95. Therefore, the machining fluid is ejected from the ejection port 93 along the cutting wire portion CL, and a part of the machining fluid flows out from the escape port 95. Since the cutting wire part CL and the flow of the machining liquid are parallel, the cutting wire part CL is not bent by the machining liquid flow, and the flow rate of the machining liquid does not fluctuate and vibrate.

  The installation interval between the nozzles 8 a and 8 b and the workpiece 5 is several tens μm to several hundreds μm from the end surface of the workpiece 5. The machining fluid is continuously supplied to the supply pipe from an external machining fluid supply device (not shown).

  In the wire electric discharge machining, for example, the wire 3 travels at a speed of about 40 to 200 m / min. Therefore, when the wire 3 comes into contact with the inner wall surface of the nozzle, the inner wall surface is scraped off, and the wire 3 is caught, causing wire breakage. Therefore, it is necessary to always maintain the distance between the wire periphery and the nozzle inner wall surface, in particular, the escape port 95 even during wire travel. That is, the nozzles 8a and 8b do not have a die-shaped guide inside, and run without the wire 3 being in contact therewith. Therefore, the positions of the vibration damping guide rollers 7a and 7b that determine the feeding position of the cutting wire portion CL are carefully adjusted so that the cutting wire portion CL does not contact the inner wall surface of the nozzle.

  The nozzles 8a and 8b are arranged so that the jet outlets 93 face each other along the cutting wire portion CL, and form a machining liquid flow in a direction in which they collide with each other toward the discharge gap. By supplying the machining fluid from both sides of the machining groove of the workpiece 5 with the nozzles 8a and 8b, it is possible to remove the machining waste from the discharge gap and supply a new machining fluid to the long machining groove.

  The diameter of the semiconductor ingot is, for example, 2 inches (about 50 mm) or more, and in many cases, it is 4 inches (about 100 mm) or more. For this reason, when the semiconductor wafer is cut by wire electric discharge machining, it is desirable to immerse the entire workpiece 5 in the machining liquid so that the machining liquid is surely filled in the discharge gap. Accordingly, the nozzles 8 a and 8 b are also immersed in the machining liquid together with the workpiece 5. By immersing the workpiece 5, the nozzles 8a and 8b, the peripheral guide rollers, and the like in the machining liquid, the entire machining groove is filled with the machining liquid, so that the machining waste flows above the machining groove and flows from the discharge gap. Processing waste can be efficiently discharged.

  Next, the relationship among the vibration suppression guide rollers 7a and 7b, the power supply units 6a and 6b, and the nozzles 8a and 8b with respect to the wire 3 wound around the main guide rollers 1a to 1d will be described with reference to FIG.

  The nozzles 8a and 8b are disposed in a symmetric position with the workpiece 5 in between and close to the workpiece 5, and between the nozzle 8a or 8b and the driven main guide roller 1d or 1c, the vibration damping guide. Rollers 7a or 7b are arranged. That is, the vibration suppression guide roller 7a is installed between the main guide roller 1d and the nozzle 8a, and the vibration suppression guide roller 7b is installed between the main guide roller 1c and the nozzle 8b. Furthermore, the arrangement of the power supply units 6a and 6b with respect to the wire 3 is arranged between the main guide rollers 1d and 1c and on the opposite sides of the vibration control guide rollers 7a and 7b with the cutting wire portion CL interposed therebetween. Yes.

  According to this roller arrangement, the vibration of the wire 3 can be blocked by the two vibration suppression guide rollers 7a and 7b, and the position of the cutting wire portion CL with respect to the nozzles 8a and 8b can be kept constant. Assuming that an arrangement without the vibration suppression guide rollers 7a and 7b is used, when the pressing amount of the power supply units 6a and 6b is changed in order to control the contact resistance of the power supply K, the escape openings of the nozzles 8a and 8b. The positional relationship of the cutting wire portion CL with respect to 95 changes. Therefore, it becomes necessary to move the nozzles 8a and 8b in the same direction according to the power supply units 6a and 6b, and the mechanism becomes complicated. In other words, by using the vibration suppression guide rollers 7a and 7b, the wire 3 of the cutting wire portion CL is made to the escape port 95 and the jet port 93 of the nozzles 8a and 8b, respectively, regardless of the pressing amount of the power supply units 6a and 6b. Can be sent horizontally. Further, even if the power supply K is scraped off by the wire 3 and the sliding position is changed, the positional relationship of the cutting wire portion CL with respect to the nozzles 8a and 8b can be stably maintained.

  The power supply unit 6a or 6b is pushed between the main guide roller 1d or 1c and the vibration suppression guide roller 7a or 7b from the opposite side of the wire 3 connected to the cutting wire portion CL. Therefore, the wire 3 is bent in a mountain shape with the power supply units 6a and 6b as apexes, and the contact state of the power supply K becomes stable. Further, when this state is maintained, the winding length of the vibration suppression guide rollers 7a and 7b and the main guide rollers 1c and 1d is increased, and the wire wound around the guide roller is increased by increasing the frictional resistance. 3 becomes difficult to slip. As a result, the traveling of the wire conveyed by the rotational driving force is stabilized, and the wound wire 3 is difficult to come off, so that the power feeding to the wire 3 traveling at a high speed and the winding stability are significantly improved. As a result, even when the wire electric discharge machining apparatus 100 performs continuous operation for a long time, troubles due to wire traveling do not occur, and a large-diameter ingot can be cut.

  Further, by providing a vibration-damping guide roller 7a or 7b between the nozzle 8a or 8b and the power supply unit 6a or 6b along the extending direction of the cutting wire portion CL, the power supply is made from the relief port 95 of the nozzles 8a and 8b. There is an advantage that the machining fluid flow ejected in the direction of the units 6a and 6b does not collide with the power supply units 6a and 6b. This is because, as described above, since the power supply units 6a and 6b are pushed upward with respect to the wire 3, the sliding portions of the power supply units 6a and 6b are seen from the escape port 95 of the nozzle 8a or 8b. This is because the shape is hidden behind the vibration suppression guide rollers 7a and 7b. Since the machining fluid flow ejected from the escape port 95 at high speed does not reach the power supply units 6a and 6b, fluctuations in wire contact resistance at the sliding portion, which is a problem when the machining fluid flows collide, may occur. No, electrical discharge machining is stabilized.

  In the first embodiment, among the wires 3 that have passed through the nozzle 8a, the wire 3 of the cutting wire portion CL that is not supplied with power by the power supply unit 6b is formed between the vibration suppression guide roller 7a and the drive type main guide roller 1d. Power is supplied in contact with the electric power supply unit 6a installed therebetween. That is, the power supply units 6a and 6b feed power to the cutting wire portion CL every other line. The cutting wire portion CL that has passed through the power supply unit 6a is wound around the drive type main guide roller 1d, and then wound around the main guide rollers 1a and 1b, and is again wound around the drive type main guide roller 1c.

  While maintaining the state as described above, a voltage is applied to the workpiece 5 and each wire 3 of the cutting wire portion CL, and the two are brought relatively close to each other. In the case of the wire electric discharge machining apparatus 100 having the configuration shown in FIG. 6, when the stage 9 on which the workpiece 5 is placed rises in the Z-axis direction, first, it is positioned at the center of the vibration damping guide rollers 7 a and 7 b. Since the distance from the workpiece 5 is the shortest in the wire 3 hung in the groove to be cut, the electric discharge machining is first started in the wire 3. As a method for relatively moving the workpiece 5 and the cutting wire portion CL, the workpiece 5 can be lowered from above the cutting wire portion CL and processed. That is, in the wire electric discharge machining apparatus 100, for example, the stage 9 is placed by floating the workpiece 5 from the stage 9 so as to pass the wire 3 between the lower side of the workpiece 5 and the upper side of the stage 9. It is also possible to cut the workpiece 5 such as an ingot from the lower side by lowering it.

  Next, the wire 3 located on both sides of the wire 3 hung in the groove located in the central portion of the vibration suppression guide rollers 7a and 7b has a distance sufficient to start discharge with respect to the outermost surface of the workpiece 5. Thus, electric discharge machining is started. Furthermore, next, the wire 3 positioned next to the two adjacent wires 3 described above is a distance at which the electric discharge machining can be started with respect to the outermost surface of the workpiece 5, and the electric discharge machining is started. The workpiece 5 is sequentially or stepwise from the wire 3 at the center of the guide rollers 7a and 7b to the wire 3 hung on the wire guide grooves GR arranged in parallel toward both ends of the vibration suppression guide rollers 7a and 7b. Approaching.

  As a result, electric discharge machining is started on the outermost surface of the workpiece 5 according to the order of the wires 3 approaching the workpiece 5 described above, and each machining groove has a difference in its machining depth. It will be formed in the state. Since the electric discharge machining speed is the same in any wire 3 of the cutting wire portion CL, the progress degree of the groove machining in each wire 3 progresses deeper as the wire 3 having the earlier machining start order described above. In particular, when processing an ingot having a uniform cutting thickness such that a semiconductor wafer is obtained by cutting, the thickness of the ingot, that is, the thickness of the workpiece 5 in the cutting direction is constant. The cutting will be completed. That is, the workpiece 5 is always cut first at the wire 3 hung on the wire guide groove GR located at the center of the vibration damping guide rollers 7a and 7b, and then hung on the wire guide grooves GR on both sides thereof. The cut wire 3 is cut. As described above, it is possible to cut out semiconductor wafers in a predetermined order using the wire electric discharge machining apparatus 100 according to the present embodiment.

  Therefore, the cutting process of the workpiece 5 is completed in order from the wire 3 hung on the groove where the diameter of the portion where the wire guide groove GR of the vibration suppression guide rollers 7a and 7b is formed is large. However, when the vibration damping guide rollers 7a and 7b having the shape shown in FIG. 3 are used, the feeder 20 connected to the workpiece 5 side in order to supply the current from the machining power supply unit 10 to the gap between them is a cutting wire. It is connected to a portion outside the region of the workpiece 5 to be simultaneously cut having a width of the portion CL (both sides on both sides of the wafer cutting portion) (FIG. 6). Thereby, when the workpiece 5 is divided by wire electric discharge machining, the current path returning to the machining power supply unit 10 via the inside of the workpiece 5 is not divided, and the wire 3 during electric discharge machining is not broken. Power supply is not interrupted, and electric discharge machining is stabilized.

  The time difference of completion of cutting in each wire 3 of the cutting wire portion CL is the difference in position at which adjacent wires 3 are aligned in the processing direction, that is, the wire guide groove GR in which each wire 3 of the vibration damping guide rollers 7a and 7b is hung. It depends on the difference in diameter. Therefore, when the difference in diameter between the adjacent wire guide grooves GR of the vibration suppression guide rollers 7a and 7b is extremely small, the disturbance generated during processing or the workpiece 5 is installed in a slightly inclined state. In some cases, the wire 3 hung on the wire guide groove GR having the smaller diameters of the vibration suppression guide rollers 7a and 7b may complete the cutting first.

  The greater the difference in diameter of the wire guide groove GR, the smaller the possibility that the wafer cutting order will be reversed. However, if the difference in diameter is excessively large, the surfaces of the vibration-damping guide rollers 7a and 7b will be excessively tapered. When the cutting wire portion CL is stretched between such vibration control guide rollers 7a and 7b, the tension applied to each wire 3, the amount of pressing of each wire 3, or The difference in peripheral speed between the wire guide grooves GR cannot be ignored, and may affect the processing characteristics. Therefore, the difference in the alignment position of the adjacent wires 3 in the processing direction may be about the wire diameter or at most twice the wire diameter. When a φ0.1 mm wire is used, the vibration guide is about 100 to 200 μm. The difference in diameter of the wire guide groove GR on which the respective wires 3 of the rollers 7a and 7b are hung is preferably about 200 to 400 μm.

  As a technique for simultaneously processing a plurality of locations on the workpiece 5 by the cutting wire portion CL, a method of directly pressing the cutting wire portion CL bonded to the surface with a hard substance such as diamond on the workpiece 5 or abrasive grains There is a method in which the turbid processing liquid is wound between the cutting wire portion CL and the processing surface of the workpiece 5 and the abrasive grains are pressed against the workpiece 5 for processing. Even in these processing methods, rollers for arranging the wires 3 in multiple stripes are used. However, when the shapes described above are adopted for these rollers, the peripheral speeds of the respective wire guide grooves on the roller surface are different. Precise machining is impossible due to tension fluctuation. As described above, since these processing methods are performed by grinding by pressing the wire 3 against the workpiece 5, the tension of each wire 3 in the cutting wire portion CL is slightly uneven. This is because the amount of processing by each wire 3 varies.

  However, machining of the workpiece 5 in the present embodiment is performed by electric discharge machining. That is, since it is non-contact processing in which an external force is not applied, such as the wire 3 being pressed against the workpiece 5, the processing in each wire 3 is not affected. In particular, if the parallel difference in the machining direction of the cutting wire portion CL is about the wire diameter or at most twice the wire diameter as described above, the circumference of each of the vibration guide guide rollers 7a and 7b in each wire guide groove GR is as follows. The influence of speed and tension is not affected by this processing method. In the situation where the cutting wire portion CL, which is conveyed in parallel with a difference in height in the cutting direction by the above-described vibration-damping guide rollers 7a and 7b, passes through the processing liquid ejection port 93 of the nozzles 8a and 8b, the processing liquid The cutting wire portion CL does not come into contact with the spout 93.

  FIG. 7 shows a state where the workpiece 5 is being cut, and the workpiece 5 is almost cut in a part of the region. Each power supply K of the power supply units 6 a and 6 b is connected to the machining power supply unit 10, and the machining power supply unit 10 is further connected to a control device (not shown) of the wire electric discharge machining apparatus 100.

  Returning to FIG. 6, since the main guide rollers 1 a to 1 d are installed to run the wire 3, it is advantageous from the viewpoint of ensuring the accuracy of roller rotation to use a mechanism system in which their axial positions are movable. is not. Therefore, it is fixedly arranged at an interval corresponding to the maximum width of the work piece 5 to be assumed.

  When paying attention to the diameter of each roller, the main guide rollers 1a to 1d need a sufficiently large diameter to secure the contact length of the wire 3 in order to prevent slipping during high-speed rotation. On the other hand, since the vibration suppression guide rollers 7a and 7b do not generate a driving force and are not related to wire feeding and wire winding, it is assumed that the wound wire 3 is slightly slipped on the roller. Is not a problem. Therefore, the diameters of the vibration suppression guide rollers 7a and 7b may be smaller than the diameters of the main guide rollers 1a to 1d.

  By reducing the diameters of the vibration control guide rollers 7a and 7b, the accuracy of the roller shape can be increased, so that vibrations caused by the vibration control guide rollers 7a and 7b themselves can be reduced. Further, since the distance between the power supply units 6a and 6b and the workpiece 5 can be shortened, low-frequency wire vibration can be prevented, the apparatus can be downsized, and the voltage drop in the cutting wire portion CL can be reduced. .

  Each cutting wire portion CL has an impedance due to the electrical resistance of the wire 3 between the adjacent cutting wire portions CL, and in order to maintain the independence of each cutting wire portion CL, other conduction paths are provided. It is not preferred that it be formed. Therefore, the wire contact portions of the main guide rollers 1a to 1d and the vibration suppression guide rollers 7a and 7b need to be made of an insulating material.

  The vibration suppression guide rollers 7a and 7b do not need to generate a driving force for transporting the wire 3, and may be made of a material having a small frictional resistance between the surface thereof and the wire 3. Therefore, insulating ceramics having high hardness can be used as the material of the vibration damping guide rollers 7a and 7b. By making the contact portions of the vibration damping guide rollers 7a and 7b with the wire 3 made of ceramics, there is no deformation of the groove due to the biting of the wire 3 that is likely to occur with the rubber guide roller, and a plurality of wires of the cutting wire portion CL. The parallel interval of 3 does not change. By stabilizing the shape of the grooves of the vibration suppression guide rollers 7a and 7b, it is possible to prevent the occurrence of wire vibration accompanying the groove deformation and to stabilize the position of the cutting wire portion CL with respect to the nozzle 8a or 8b.

  As a ceramic material to be used, for example, alumina, silicon nitride, boron nitride, aluminum nitride, or a composite ceramic or machinable ceramic thereof can be used.

  Wire electric discharge machining is particularly effective for a material having high hardness because the machining speed does not depend on the hardness of the workpiece 5. Examples of the workpiece 5 include metals such as tungsten and molybdenum serving as sputtering targets, ceramics such as polycrystalline silicon carbide (silicon carbide) used as various structural members, single crystal silicon serving as a wafer substrate for manufacturing semiconductor devices, and the like. Single crystal silicon carbide, semiconductor materials such as gallium nitride (GaN, gallium nitride), single crystal or polycrystalline silicon used as a solar cell wafer can be targeted. In particular, since silicon carbide has high hardness, the mechanical wire saw method has low productivity and low processing accuracy, and the embodiment of the present invention achieves both high productivity and high processing accuracy. However, a silicon carbide wafer can be produced.

  As a modification of the present embodiment, independent power feeding to each wire 3 is also possible by a method of pressing the power supply units 6a and 6b from above the cutting wire portion CL with respect to the positional relationship shown in FIG. However, in this case, the vibration suppression guide rollers 7a and 7b are installed in a state where the cutting wire portion CL is pushed up from below. In this state, the wire 3 is hung on the wire guide groove GR above the center of the rotation axis of the vibration suppression guide rollers 7a and 7b shown in FIG. That is, the wire 3 is hung on the wire guide groove GR of the vibration suppression guide rollers 7a and 7b in the same vertical relationship as actually shown in FIG.

  As a result, when electric discharge machining is performed by raising the workpiece 5 in the Z-axis direction, the wire 3 where electric discharge machining is started first is the end portions of both shafts of the vibration damping guide rollers 7a and 7b, that is, wire guides. The wire 3 is hung on the groove having the smallest diameter of the groove GR. Therefore, the electric discharge machining order in this case is sequentially started from the shaft end portions of the vibration damping guide rollers 7a and 7b toward the central portions of the vibration damping guide rollers 7a and 7b. Therefore, the completion of the cutting process is sequentially performed from the wire 3 hung on the wire guide groove GR at both shaft end portions of the vibration suppression guide rollers 7a and 7b. Further, in this case, the power supply line 20 that connects the workpiece 5 and the machining power supply unit 10 is a portion that is cut by the wire 3 that is hung on the wire guide groove GR in the center of the vibration damping guide rollers 7a and 7b. By attaching the wafer in the vicinity, that is, in the immediate vicinity of the wafer where the cutting process is finally completed, when the wafer is cut out from the workpiece 5, the energization path of the machining current is not divided until the end.

  In the present embodiment, an example in which one wire 3 is wound around four main guide rollers 1a to 1d is shown. However, for example, a configuration in which three main guide rollers are arranged is also possible. is there. In addition, the specific configuration is not particularly limited as long as the parallel wire portion PS is formed by repeatedly folding one wire 3 without being limited to the above embodiment.

  In this embodiment, simultaneous processing with a plurality of wires is performed. Strictly speaking, a plurality of wafers are not simultaneously cut, but the time difference at which each wire finishes cutting is at most the diameter of the wire used. It is a level that is caused by a difference of about 1 or 2 and is not problematic even when viewed as simultaneous cutting.

  As described above, according to the wire electric discharge machining apparatus 100 according to the present embodiment, the main guide rollers 1a to 1d are wound around the main guide rollers 1a to 1d while being spaced apart at a constant pitch, and the main guide rollers 1a to 1d are rotated. And a pair of vibration-damping guide rollers arranged so as to be in driven contact with the parallel wire portion PS, and a parallel wire portion PS arranged between the main guide rollers 1c and 1d. 7a and 7b and power supply units 6a and 6b for supplying power to the respective wires 3 of the parallel wire portion PS, and the wire 3 stretched between the vibration control guide rollers 7a and 7b is opposed to the workpiece 5. The cutting wire portion CL to be formed is formed.

  As a result, the wire vibration in the cutting wire portion CL is suppressed, and the workpiece 5 is not cut at an arbitrary position by determining the order of completion of wafer cutting of the workpiece 5, so that an unprocessed workpiece is processed. Since the power supply path of the machining power supply unit 10 to the workpiece 5 is secured until the cutting process is completed for all the wires 3, wire breakage near the completion of cutting due to power supply failure can be prevented, and high precision with uniform wafer thickness It becomes possible to perform wire electric discharge machining.

  Further, a pair of nozzles 8a and 8b disposed between the vibration damping guide rollers 7a and 7b are provided, and the nozzles 8a and 8b are connected to the workpiece liquid from the jet port 93 so as to face the workpiece 5 along the wire 3, respectively. The wire 3 passes through the nozzles 93 of the nozzles 8a and 8b and travels in a non-contact manner to the nozzles 8a and 8b. Will not occur. Furthermore, since the machining waste can be efficiently discharged from the discharge gap, there is an effect that the discharge is stabilized and the machining speed and machining accuracy of the electric discharge machining are improved.

  Further, by making the diameters of the vibration suppression guide rollers 7a and 7b smaller than the diameters of the main guide rollers 1a to 1d, it is possible to obtain a small wire electric discharge machining apparatus 100 that hardly causes wire vibration.

  Further, since the wire guide groove GR as shown in FIG. 4 having the V-shaped cross section in which the wires 3 are hooked one by one corresponding to the cutting wire portion CL is formed on the surfaces of the vibration suppression guide rollers 7a and 7b, The wire vibration in the direction is suppressed, and highly accurate electric discharge machining with stable machining groove width can be performed.

  Moreover, by using ceramics with high hardness as the material of the vibration suppression guide rollers 7a and 7b, it becomes possible to maintain stable wire travel over a long period of time, and the effect of suppressing wire vibration can be maintained. .

  Furthermore, the vibration control guide rollers 7a and 7b are portions in which only the roller part is substantially replaceable, and the wire guide groove GR processed into the vibration control guide rollers 7a and 7b is worn and cut by long-term use. Even when the V-shaped cross section on which the wire portions CL are applied one by one is gradually deformed, stable and highly accurate electric discharge machining can be performed by replacing the roller portions. Further, the roller portions of the vibration damping guide rollers 7a and 7b can be reused by regrooving by grinding and polishing the wire guide groove GR on the roller surface and newly reworking the wire guide groove GR. Although the diameters of the vibration-damping guide rollers 7a and 7b are reduced by the regrooving, the groove depth is about twice the diameter of the wire to be used. Therefore, the regrooving is about 500 μm at most. Therefore, if the vibration control guide rollers 7a and 7b have a diameter of 20 mm or more, the same vibration suppression effect can be exhibited by adjusting the amount of pressing to the wire 3.

  Further, the vibration damping guide rollers 7a and 7b can be formed by laminating the wire guide units 60 divided in units of each wire guide groove portion as shown in FIG. 8, in addition to being integrally molded as described above. . The wire guide unit 60 has a hole drilled through the support rod 61 at the center thereof, and each wire having a different diameter of the wire guide groove portion so as to form the outer shape of the vibration control guide rollers 7a and 7b to be formed. The support rod 61 can be passed through the hole of the guide unit 60 and can be laminated so as to be rotatable. In the vibration suppression guide rollers 7a and 7b having such a configuration, since each wire guide unit 60 is independent, the peripheral speed in each wire guide groove due to the diameter of the wire guide groove of each wire guide unit 60 being different. The difference is not a problem, and it is hung in the wire guide groove and does not cause a variation in tension with respect to each wire 3 constituting the cutting wire portion CL, so that the wire can be stably conveyed.

  Further, since the damping guide rollers 7a and 7b are arranged on the side opposite to the power supply K across the parallel wire portion PS, there is an effect that the wire traveling position is stabilized and the machining is stabilized. Further, since the machining fluid does not collide with the supply electron K, the wire vibration at the sliding portion due to the machining fluid flow does not occur, and the power supply to the wire 3 is not hindered.

  With the above-described configuration, in the wire electric discharge machining apparatus 100 according to the present embodiment, the vibration of the cutting wire portion CL is suppressed and the discharge gap is stably maintained, and stable electric discharge machining is performed even during long-time machining. There is an effect that a plurality of wafers having small thickness variations can be manufactured at a time.

  In addition, by using wire electric discharge machining apparatus 100 according to the present embodiment, workpiece 5 including a hard material such as silicon carbide can be cut into a thin plate with high productivity.

Embodiment 2. FIG.
The configuration and operation of the wire electric discharge machining apparatus according to Embodiment 2 of the present invention will be described below. Since the wire electric discharge machining apparatus according to the present embodiment has many configurations and operations similar to those of the first embodiment described above, description thereof will be omitted, and a vibration damping guide different from that of the first embodiment. The configuration and operation of the rollers 7a and 7b will be described.

  FIG. 9 is an outline of the vibration damping guide rollers 7a and 7b used in the wire electric discharge machining apparatus according to the second embodiment of the present invention. The damping guide rollers 7a and 7b have the thinnest shaft diameter at the central portion in the direction of the rotational axis, respectively, and a wire guide groove GR is machined in that portion, and further, the damping guide is guided from the wire guide groove GR. Wire guide grooves GR are machined at regular intervals in the direction of both shaft ends of each of the rollers 7a and 7b. The interval between the wire guide grooves GR at this time corresponds to the slice pitch when the wafer is cut out from the ingot that is the workpiece 5. Further, the groove depth of each of the plurality of grooves processed on the outer peripheral surfaces of the vibration suppression guide rollers 7a and 7b is constant.

  The damping guide rollers 7a and 7b are pressed against the cutting wire portion CL so that the wires 3 of the cutting wire portion CL are hooked on the wire guide grooves GR formed on the surfaces of the damping guide rollers 7a and 7b. For example, when the wire guide groove GR positioned below the surface of the vibration damping guide rollers 7a and 7b in FIG. 9 is pressed against the cutting wire portion CL, the wire 3 that starts the electric discharge machining first is the vibration damping guide rollers 7a and 7b. It is the wire 3 hung on the wire guide groove GR of each both ends. Thereafter, electric discharge machining is started in the order of the wire 3 hung from the wire 3 hung on the wire guide groove GR at both ends of the shaft toward the center portions of the vibration suppression guide rollers 7a and 7b. Therefore, the order in which the workpiece 5 is finished is also the discharge start order. In this case, the power supply line 20 that connects the machining power supply unit 10 and the workpiece 5 is connected in the vicinity where the workpiece 5 is cut by the wire 3 hung on the center portion of the vibration damping guide rollers 7a and 7b. That is, by attaching the power supply line 20 in the immediate vicinity of the wafer where the cutting process is finally completed, when the wafer is cut out from the workpiece 5, the energization path of the processing current is not divided until the end. .

  Alternatively, when the wires 3 of the cutting wire portion CL are hung on the wire guide grooves GR formed on the surfaces of the vibration suppression guide rollers 7a and 7b, the vibration suppression guide rollers 7a and 7b in FIG. Even if the wire guide groove GR positioned on the upper surface side of the rotation center axis of the guide rollers 7a and 7b is pressed against the cutting wire portion CL, the wires 3 of the cutting wire portion CL can be arranged in parallel at equal intervals in the processing direction. However, in this case, the wire for which electric discharge machining is started first is the wire 3 hung on the wire guide groove GR at the center of the vibration damping guide rollers 7a and 7b, and thereafter hung on the wire guide grooves GR on both adjacent sides. The electrical discharge machining is started in the order of the wires hung from the wire 3 directed toward the wire guide grooves GR at both shaft ends of the vibration suppression guide rollers 7a and 7b. The order in which the workpiece 5 is cut is also the discharge start order. In this case, the power supply line 20 that connects the machining power supply unit 10 and the workpiece 5 has a portion outside the region of the workpiece 5 to be cut simultaneously having the width of the cutting wire portion CL as shown in FIG. It is connected to both sides of the wafer cutting part. Thereby, when the workpiece 5 is divided by wire electric discharge machining, the current path returning to the machining power supply unit 10 via the inside of the workpiece 5 is not divided, and the wire 3 during electric discharge machining is not broken. Power supply is not interrupted, and electric discharge machining is stabilized.

  Further, the vibration-damping guide rollers 7a and 7b can be formed by laminating wire guide units divided in units of wire guide groove portions as in FIG. 8, in addition to being integrally molded as described above. In the vibration suppression guide rollers 7a and 7b having such a configuration, since each wire guide unit is independent, a difference in peripheral speed in each wire guide groove due to a difference in diameter of the wire guide groove of each wire guide unit. This is not a problem, and it is hung in the wire guide groove and does not cause a variation in tension with respect to each wire 3 constituting the cutting wire portion CL, so that the wire can be stably conveyed.

  By using the wire electric discharge machining apparatus having the configuration including the vibration damping guide rollers 7a and 7b, the workpiece 5 is not cut at an arbitrary position, and the workpiece 5 is not processed. Since a power supply path can be secured, wire disconnection due to power supply failure can be prevented immediately before the end of cutting, and a highly accurate wafer with a uniform thickness can be processed.

Embodiment 3 FIG.
The configuration and operation of the wire electric discharge machining apparatus according to Embodiment 3 of the present invention will be described below. Since the wire electric discharge machining apparatus according to the present embodiment has many configurations and operations similar to those of the first embodiment described above, description thereof will be omitted, and a vibration damping guide different from that of the first embodiment. The configuration and operation of the rollers 7a and 7b will be described.

  FIG. 10 shows the outer shape of the vibration damping guide rollers 7a and 7b used in the wire electric discharge machining apparatus according to Embodiment 3 of the present invention. The damping guide rollers 7a and 7b each have a substantially conical shape in which the shaft diameter is minimum at one end in the rotation axis direction and the shaft diameter is maximum at the other end, and the wire guide grooves GR are formed at regular intervals in the axial direction. Processed with a constant groove depth.

  The damping guide rollers 7a and 7b are pressed against the cutting wire portion CL so that the wires 3 constituting the cutting wire portion CL are hooked on the wire guide grooves GR formed on the surfaces of the damping guide rollers 7a and 7b. For example, when the wire guide groove GR located below the surface of the vibration damping guide rollers 7a and 7b in FIG. 10 is pressed against the cutting wire portion CL, the wire 3 that starts electric discharge machining first is the vibration damping guide rollers 7a and 7b. Is a wire hung on the wire guide groove GR having the largest diameter. Thereafter, electric discharge machining is started in the order of the wire 3 hung from the wire guide groove GR to the wire guide groove GR having a smaller diameter. That is, in the vibration suppression guide rollers 7a and 7b, the electric discharge machining is started in the order of the wires 3 hung from the larger shaft diameter toward the smaller shaft diameter. Therefore, the order in which the workpiece 5 is finished is also the order in which the discharge starts. In this case, the power supply line 20 that connects the machining power supply unit 10 and the workpiece 5 is connected to the end of the workpiece 5 positioned on the side where the shaft diameters of the vibration suppression guide rollers 7a and 7b are narrow. That is, by attaching the power supply line 20 in the immediate vicinity of the wafer where the cutting process is finally completed, when the wafer is cut out from the workpiece 5, the energization path of the processing current is not divided until the end. .

  Alternatively, when each wire 3 of the cutting wire portion CL is hung on the wire guide groove GR formed on the surfaces of the vibration suppression guide rollers 7a and 7b, the vibration suppression guide rollers 7a and 7b in FIG. Even if the wire guide groove GR positioned on the upper surface side from the rotation shaft center of the guide rollers 7a and 7b is pressed against the cutting wire portion CL, the wires of the cutting wire portion CL can be arranged in parallel at equal intervals in the processing direction. However, in this case, the wire for which electric discharge machining is first started is a wire hung on the wire guide groove GR having the smallest diameter of the vibration suppression guide rollers 7a and 7b, and thereafter, from the wire guide groove GR to the wire guide groove GR Electric discharge machining is started in the order of the wires 3 that are hung on the larger GR diameter. That is, in the vibration suppression guide rollers 7a and 7b, electric discharge machining is started in the order of the wires 3 hung from the smaller shaft diameter to the larger shaft diameter. Therefore, the order in which the workpiece 5 is finished is also the order in which the discharge starts. In this case, the power supply line 20 that connects the machining power supply unit 10 and the workpiece 5 is connected to the end of the workpiece 5 that is positioned on the side where the shaft diameters of the vibration suppression guide rollers 7a and 7b are large. Similarly to the above, by attaching the power supply line 20 in the immediate vicinity of the wafer where the cutting process is finally completed, when the wafer is cut out from the workpiece 5, the energization path of the processing current is not divided until the end. To do.

  Further, the vibration-damping guide rollers 7a and 7b can be formed by laminating wire guide units divided in units of wire guide groove portions as in FIG. 8, in addition to being integrally molded as described above. In the vibration suppression guide rollers 7a and 7b having such a configuration, since each wire guide unit is independent, a difference in peripheral speed in each wire guide groove due to a difference in diameter of the wire guide groove of each wire guide unit. This is not a problem, and it is hung in the wire guide groove and does not cause a variation in tension with respect to each wire 3 constituting the cutting wire portion CL, so that the wire can be stably conveyed.

  By using the wire electric discharge machining apparatus having the configuration including the vibration damping guide rollers 7a and 7b, the workpiece 5 is not cut at an arbitrary position, and the workpiece 5 is not processed. Since a power supply path can be secured, wire disconnection due to power supply failure can be prevented immediately before the end of cutting, and a highly accurate wafer with a uniform thickness can be processed.

Embodiment 4 FIG.
The configuration and operation of the wire electric discharge machining apparatus according to Embodiment 4 of the present invention will be described below. Since the wire electric discharge machining apparatus according to the present embodiment has many configurations and operations similar to those of the first embodiment described above, description thereof will be omitted, and a vibration damping guide different from that of the first embodiment. The configuration and operation of the rollers 7a and 7b will be described.

  FIG. 11 shows the outer shape of the vibration damping guide rollers 7a and 7b used in the wire electric discharge machining apparatus according to Embodiment 4 of the present invention. The damping guide rollers 7a and 7b each have a cylindrical shape with a constant shaft diameter at any position in the rotational axis direction, and wire guide grooves GR are machined at regular intervals in the axial direction. However, the depth of the wire guide groove GR is not constant, and the wire guide groove GR is processed so as to become deeper in order from the center in the direction of the rotation axis toward the ends of both axes.

  The depth of the wire guide groove GR formed on the surfaces of the vibration-damping guide rollers 7a and 7b is formed by adjusting the cutting amount when the groove is processed by the groove processing tool. Further, the processing may be performed so as to obtain a shape imitating the tapered shape of the surface of the vibration damping guide rollers 7a and 7b shown in the first, second, and third embodiments. Damping guide roller 7a having a wire guide groove GR whose groove depth is adjusted so as to have a taper corresponding to the damping guide rollers 7a and 7b shown in the first, second, and third embodiments. The method shown in the first, second, and third embodiments regarding the pressing direction of the vibration damping guide rollers 7a and 7b when using the 7b and the method of attaching the feeder 20 to the workpiece 5 according to the pressing direction. According to the above.

  By using the wire electric discharge machining apparatus having the configuration including the vibration damping guide rollers 7a and 7b, the workpiece 5 is not cut at an arbitrary position, and the workpiece 5 is not processed. Since a power supply path can be secured, wire disconnection due to power supply failure can be prevented immediately before the end of cutting, and a highly accurate wafer with a uniform thickness can be processed.

  In the first to fourth embodiments described above, it has been described that the two power supply units 6a and 6b are attached with the workpiece 5 interposed therebetween. However, even if one is provided, Needless to say, similar effects can be obtained.

Embodiment 5 FIG.
The configuration and operation of the wire electric discharge machining apparatus 200 according to Embodiment 5 of the present invention will be described below with reference to FIG. Since the wire electric discharge machining apparatus 200 according to the present embodiment has many configurations and operations similar to those of the first embodiment described above, description thereof will be omitted and the power supply different from that of the first embodiment. The configuration and operation of the units 6a to 6d and the vibration suppression guide rollers 7a and 7b will be described.

  As illustrated in FIG. 12, power supply units 6 a to 6 d that supply the machining power supply unit 10 to the wires 3 constituting the cutting wire portion CL are disposed on both sides of the workpiece 5. If the slice pitch for processing a plurality of wafers from the workpiece 5 is narrow, the dimensions including the power supply line 30 connected to each of the supply electrons K and the member that insulates the supply electrons K will be equal to or greater than the slice pitch. In some cases, the units 6a to 6d cannot be arranged in a line on one side as shown in FIG. In such a case, for example, as shown in FIG. 12, the supply electrons arranged in one row on one side are separated into two rows on one side, and the number of supply electrons K per row is reduced to increase the interval between the supply electrons K. By installing the power supply units 6a to 6d as the power supply trains in parallel, the thickness and slice pitch of the power supply line 30 and the insulating member can be ensured.

  In this case, the order in which the cutting wires are hung on the power supply units 6a to 6d is, for example, the supply electron K closest to the electronic supply unit 6a, the supply electron K closest to the electronic supply unit 6c, and the electronic supply unit 6b. The power supply K on the front side is multiplied by the power supply K on the front side of the power supply unit 6d, and then returned to the power supply unit 6a again and is applied to the second power supply K from the front side of the power supply unit 6a. Then, the processing power is supplied from the respective power supply K via the power supply line 30 to the wire 3 hung on each power supply K. The power supply line 30 is connected to the machining power supply unit 10.

  Each wire 3 applied to each power supply K as shown in FIG. 12 forms a machining groove by electric discharge machining on the workpiece 5 when a machining power is supplied from the machining power supply unit 10, and eventually the workpiece is processed. A wafer is processed from the object 5. At this time, a difference occurs in the forming speed of the processing groove by each wire 3. That is, in FIG. 12, the wire length from the power supply units 6 a to 6 d to the workpiece 5 has a difference corresponding to the installation interval between two power supply units installed on the same side of the workpiece 5.

  Specifically, the wire length between the power supply unit 6 a and the workpiece 5 is longer than the wire length between the power supply unit 6 b and the workpiece 5. The wire length between them is longer than the wire length between the power supply unit 6c and the workpiece 5. This difference becomes a difference in the resistance value of the cutting wire, and even if the same power supply voltage is applied, a slight difference occurs in the machining current, resulting in a difference in machining speed. Therefore, in the case of the arrangement of the power supply units 6a to 6d shown in FIG. 12, the formation speed of the machining groove on the workpiece 5 in the cutting wire portion CL is higher than that of the wire 3 in contact with the power supply units 6b and 6c. Is slightly faster than the wire 3 in contact with the power supply units 6a and 6d.

  Therefore, as the vibration suppression guide rollers 7a and 7b used in the wire electric discharge machining apparatus 200 according to the fifth embodiment of the present invention, a plurality of wire guide grooves having the same depth but the same thickness are not rotated. Even with a normal guide roller formed concentrically and at approximately equal intervals around the axis, the wafer between the cutting wires hung on the power supply units 6b and 6c is cut out most quickly, although there is a slight difference. Next, the wafer between the cutting wires hung on the power supply units 6a and 6c or the power supply units 6b and 6d is cut out, and the wafer between the cutting wires hung on the power supply units 6a and 6d is cut out latest. In this case, by securing a wiring path corresponding to the cut portion, the workpiece 5 is not cut at an arbitrary position, and a power feeding path is also secured for the unprocessed workpiece 5. Therefore, it is possible to prevent wire breakage due to power supply failure immediately before the end of cutting, and to process a highly accurate wafer with a uniform thickness.

  Further, in the vibration damping guide rollers 7a and 7b used in the wire electric discharge machining apparatus 200 according to Embodiment 5 of the present invention, the wire 3 is a wire guide groove on the lower surface of the vibration damping guide rollers 7a and 7b, and the cutting wire portion CL. When the wire 3 is hung to support the power supply units 6a and 6d, the wire guide groove of the wire 3 hung on the power supply units 6a and 6d is processed to be deeper than the wire guide groove of the wire 3 hung on the power supply units 6b and 6c. Keep it. That is, the depth of the wire guide grooves of the vibration-damping guide rollers 7a and 7b that support the wire 3 in contact with the power supply electron K is set between the power supply K and the electric discharge machining region (the workpiece 5 during electric discharge machining). Depending on the wire length of the wire 3. The difference in the depth of the groove is also affected by the input energy, but it may be about the wire diameter to about 1/4 of the wire diameter.

  When the cutting wire portion CL is guided by the grooves on the upper side surfaces of the guide rollers 7a and 7b, the depth of the wire guiding groove is greater in the wire guiding groove of the cutting wire hung on the power supply units 6b and 6c. It is processed to be deeper than the wire guide groove of the cutting wire hung on the electronic units 6a and 6d.

  In the above description, the case where the wire guide groove depth is changed is described. However, the wire guide groove depth is constant, and the vibration control guide rollers 7a and 7b of the first to third embodiments are used. As shown, it goes without saying that the same effect can be obtained even if the diameter of the wire guide groove around the rotation axis of the vibration suppression guide rollers 7a and 7b is changed.

  By using the configuration of the wire electric discharge machining apparatus 200 as described above, the wafer between the cutting wires hung on the power supply units 6b and 6c is cut out most quickly, and then the power supply units 6a and 6c or the power supply unit 6b The wafer between the cutting wires hung on 6d is cut out, and the wafer between the cutting wires hung on the power supply units 6a and 6d is cut out latest. In this case, by securing a wiring path corresponding to the cut portion, the workpiece 5 is not cut at an arbitrary position, and a power feeding path is also secured for the unprocessed workpiece 5. Therefore, it is possible to prevent wire breakage due to power supply failure immediately before the end of cutting, and to process a highly accurate wafer with a uniform thickness.

  In the wire electric discharge machining apparatus according to the second to fifth embodiments described above, as in the first embodiment, a method of relatively moving the workpiece 5 and the cutting wire portion CL closer to execute the wire electric discharge machining. As well, it is possible not only to raise the workpiece 5 from below the cutting wire portion CL but also to lower the workpiece 5 from above the cutting wire portion CL.

  In the wire electric discharge machining apparatus according to the first to fifth embodiments, insulating ceramics can be used as the contact portions of the vibration damping guide rollers 7a and 7b with the wire 3. As a ceramic material to be used, for example, alumina, silicon nitride, boron nitride, aluminum nitride, or a composite ceramic or machinable ceramic thereof can be used. In addition, the workpiece 5 to be cut using the wire electric discharge machining apparatus according to the first to fifth embodiments is not limited. However, when the workpiece 5 is a semiconductor material, a plurality of semiconductor wafers are manufactured. It is possible. Examples of the work 5 include, for example, metals such as tungsten and molybdenum serving as sputtering targets, ceramics such as polycrystalline silicon carbide (silicon carbide) used as various structural members, and single crystal silicon serving as a wafer substrate for manufacturing semiconductor devices. And single crystal silicon carbide, semiconductor material (semiconductor crystal) such as gallium nitride (GaN, gallium nitride), single crystal or polycrystalline silicon used as a solar cell wafer, and the like. At this time, the order of cutting out the semiconductor wafers can be set in a predetermined order depending on the part of the workpiece 5 as described above. Thereby, the path of the discharge current by electric discharge machining is not cut by cutting the workpiece 5, and stable wire electric discharge machining can be realized, and the productivity and processing accuracy of the wafer can be improved. .

  Furthermore, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention in the implementation stage. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent requirements are deleted from all the constituent requirements shown in the above embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. In the case where a certain effect can be obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention. Furthermore, the constituent elements in different Embodiments 1 to 5 may be appropriately combined.

  As described above, the wire electric discharge machining apparatus and the semiconductor wafer manufacturing method according to the present invention are useful for wire electric discharge machining of semiconductor materials in general, and in particular, a method using a mechanical wire saw because of high hardness such as silicon carbide. Is suitable for processing materials with low productivity and low processing accuracy.

1a, 1b, 1c, 1d Main guide roller 2 Wire bobbin 3 Wire CL Cutting wire part PS Parallel wire part 4 Wire take-up bobbin 5 Work piece 6a, 6b, 6c, 6d Electric power supply unit 7a, 7b Damping guide roller K Supply Electronic GR Wire guide groove 8a, 8b Nozzle 9 Stage 10 Processing power supply unit 20, 30 Feed line 60 Wire guide unit 61 Support rod 91 Nozzle body 92 Jet outlet component plate 93 Jet port 94 Escape port component plate 95 Escape port 100, 200 Wire EDM machine

Claims (18)

First and second main guide rollers installed in parallel across the electric discharge machining area;
A first damping guide roller installed between the electric discharge machining region and the first main guide roller, wherein a plurality of wire guide grooves for guiding the wire are concentrically spaced from each other about the rotation axis; ,
A second vibration suppression guide roller installed between the electric discharge machining region and the second main guide roller, wherein a plurality of wire guide grooves for guiding the wire are concentrically spaced from each other about the rotation axis When,
With
A parallel wire portion is formed by winding the wire a plurality of times while separating the first and second main guide rollers and the first and second damping guide rollers at a constant pitch, and the parallel wires are formed in the electric discharge machining region. A wire electrical discharge machining device that raises a workpiece from below the parallel wire portion by a wire portion, or performs electrical discharge machining while lowering the workpiece from above the parallel wire portion,
The wire electrical discharge machining apparatus, wherein the diameter of the wire guide groove around the rotation axis of the first and second vibration damping guide rollers varies depending on the position in the rotation axis direction. The wire electric discharge machining apparatus according to claim 1, wherein the diameters of the wire guide grooves around the rotation axes of the first and second vibration damping guide rollers are different between the adjacent wire guide grooves. The diameters of the wire guide groove of the first vibration suppression guide roller and the wire guide groove of the second vibration suppression guide roller that directly hold the wire stretched in the electric discharge machining region are substantially the same. The wire electric discharge machining apparatus according to claim 2. The wire guide grooves of the first and second vibration damping guide rollers are spaced apart at equal intervals in the rotation axis direction, and the diameter of the wire guide groove around the rotation axis is maximum at the center of the rotation axis. The first and second vibration damping guide rollers decrease as they approach both ends of the rotation axis direction, and are minimized at both ends of the first and second vibration damping guide rollers. Wire electrical discharge machine. The wire guide grooves of the first and second vibration damping guide rollers are spaced apart at equal intervals in the direction of the rotation axis, and the diameter of the wire guide groove around the rotation axis is the smallest at the center of the rotation axis. The first and second vibration damping guide rollers increase as they approach both ends of the rotation axis direction, and become maximum at both ends of the first and second vibration damping guide rollers. Wire electrical discharge machine. The wire guide grooves of the first and second vibration suppression guide rollers are spaced apart at equal intervals in the rotation axis direction, and the diameter of the wire guide groove around the rotation axis is the first and second vibration suppression guide rollers. The wire electric discharge machining apparatus according to claim 3, wherein the wire electric discharge machining apparatus has a minimum at one end in each of the rotation axis directions, an increase as it approaches the other end, and a maximum at the other end. When the wires are arranged in parallel by the wire guide grooves on the lower surface side of the first and second vibration damping guide rollers, a power supply line from a machining power source is connected to the outside of the region to be cut of the workpiece,
When the wires are arranged in parallel by the wire guide grooves on the upper surface side of the first and second vibration damping guide rollers, a power supply line from the machining power source is connected to a substantially central portion of the cut region of the workpiece. The wire electric discharge machining apparatus according to claim 4, wherein: When the wires are arranged in parallel by the wire guide grooves on the upper surface side of the first and second vibration damping guide rollers, a power supply line from a machining power source is connected to the outside of the region to be cut of the workpiece,
When the wires are arranged in parallel by the wire guide grooves on the lower surfaces of the first and second vibration damping guide rollers, a power supply line from the machining power source is connected to a substantially central portion of the area to be cut of the workpiece. The wire electrical discharge machining apparatus according to claim 5. In the case where the wires are arranged in parallel by the wire guide grooves on the lower surface side of the first and second vibration damping guide rollers, the diameter of the wire guide grooves is the smallest side and outside the region where the workpiece is cut. Connect the power supply line from the machining power source to
When the wires are arranged in parallel by the wire guide grooves on the upper surface side of the first and second vibration damping guide rollers, the diameter of the wire guide groove is the largest side and outside the region where the workpiece is cut. The wire electric discharge machining apparatus according to claim 6, wherein a power supply line from a machining power source is connected to the wire electric discharge machining apparatus. 7. The wire electric discharge machining apparatus according to claim 4, wherein the wire guide groove has a constant depth from the surface of the first and second vibration damping guide rollers. 7. The wire electric discharge machining apparatus according to claim 4, wherein the depth of the wire guide groove from the roller surface of the first and second vibration damping guide rollers is changed in the direction of the rotation axis. The wire electric discharge machining according to any one of claims 1 to 10, wherein the first and second vibration-damping guide rollers are configured by a plurality of units that can be divided in units of the wire guide groove. apparatus. A first power supply unit that presses and contacts the wire stretched between the first main guide roller and the first vibration suppression guide roller to supply power;
A second power supply unit that presses and contacts the wire stretched between the second main guide roller and the second vibration suppression guide roller to supply power;
The wire electric discharge machining apparatus according to claim 1, further comprising: A plurality of first power supply members that press and contact the wire stretched between the first main guide roller and the first vibration suppression guide roller to supply power;
A plurality of second feed electrons that press and contact the wire stretched between the second main guide roller and the second vibration suppression guide roller to feed power;
Further comprising
The plurality of first supply electrons belong to any one of the plurality of first supply electron trains arranged in the rotation axis direction, and each first supply electron contacting the adjacent wire is in a different first supply electron train. Belongs to
The plurality of second supply electrons belong to one of the plurality of second supply electron columns arranged in the rotation axis direction, and each of the second supply electrons contacting the adjacent wires is in a different second supply electron column. Belongs to
The depth of the wire guide groove formed in the first and second vibration damping guide rollers is between the first and second feeders contacting the wire supported by the wire guide groove and the electric discharge machining region. The wire electrical discharge machining apparatus according to claim 1, wherein the wire electrical discharge machining apparatus is dependent on a wire length of the wire. The diameters of the wire guide grooves formed on the first and second vibration-damping guide rollers around the rotation axis are set such that the first and second feeders contacting the wire supported by the wire guide grooves and the electric discharge machining. The wire electric discharge machining apparatus according to claim 14, wherein the wire electric discharge machining apparatus depends on a wire length of the wire between the region. The wire electrical discharge machining apparatus according to any one of claims 1 to 15, wherein a contact portion of the first and second vibration damping guide rollers with the wire is formed of an insulating ceramic. A method for producing a semiconductor wafer, comprising: producing a plurality of semiconductor wafers from a semiconductor material that is the workpiece by using the wire electric discharge machining apparatus according to claim 1. The semiconductor wafer manufacturing method according to claim 17, wherein a plurality of the semiconductor wafers are cut out in a predetermined order.

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