JP2011179936A5 - - Google Patents
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- JP2011179936A5 JP2011179936A5 JP2010043696A JP2010043696A JP2011179936A5 JP 2011179936 A5 JP2011179936 A5 JP 2011179936A5 JP 2010043696 A JP2010043696 A JP 2010043696A JP 2010043696 A JP2010043696 A JP 2010043696A JP 2011179936 A5 JP2011179936 A5 JP 2011179936A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- inspection
- cumulative
- rays
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010043696A JP2011179936A (ja) | 2010-03-01 | 2010-03-01 | X線検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010043696A JP2011179936A (ja) | 2010-03-01 | 2010-03-01 | X線検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011179936A JP2011179936A (ja) | 2011-09-15 |
JP2011179936A5 true JP2011179936A5 (de) | 2012-08-02 |
Family
ID=44691594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010043696A Pending JP2011179936A (ja) | 2010-03-01 | 2010-03-01 | X線検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2011179936A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102128722B1 (ko) * | 2012-08-21 | 2020-07-02 | 세메스 주식회사 | 기판 처리 장치의 검사 방법 |
JP6491873B2 (ja) * | 2014-12-19 | 2019-03-27 | 株式会社マーストーケンソリューション | X線検査装置 |
JP6468270B2 (ja) * | 2016-10-13 | 2019-02-13 | オムロン株式会社 | 被曝量管理装置及び被曝量管理方法 |
JP6686939B2 (ja) * | 2017-03-06 | 2020-04-22 | 株式会社島津製作所 | X線検査装置 |
JP7542327B2 (ja) * | 2020-04-02 | 2024-08-30 | 株式会社サキコーポレーション | 検査装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002350367A (ja) * | 2001-05-29 | 2002-12-04 | Matsushita Electric Ind Co Ltd | X線照射線量値を管理できるx線撮像装置 |
JP2009025207A (ja) * | 2007-07-20 | 2009-02-05 | I-Bit Co Ltd | 透視検査装置 |
-
2010
- 2010-03-01 JP JP2010043696A patent/JP2011179936A/ja active Pending
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