JP2011179936A5 - - Google Patents

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Publication number
JP2011179936A5
JP2011179936A5 JP2010043696A JP2010043696A JP2011179936A5 JP 2011179936 A5 JP2011179936 A5 JP 2011179936A5 JP 2010043696 A JP2010043696 A JP 2010043696A JP 2010043696 A JP2010043696 A JP 2010043696A JP 2011179936 A5 JP2011179936 A5 JP 2011179936A5
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JP
Japan
Prior art keywords
ray
inspection
cumulative
rays
inspection apparatus
Prior art date
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Pending
Application number
JP2010043696A
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English (en)
Japanese (ja)
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JP2011179936A (ja
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Publication date
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Priority to JP2010043696A priority Critical patent/JP2011179936A/ja
Priority claimed from JP2010043696A external-priority patent/JP2011179936A/ja
Publication of JP2011179936A publication Critical patent/JP2011179936A/ja
Publication of JP2011179936A5 publication Critical patent/JP2011179936A5/ja
Pending legal-status Critical Current

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JP2010043696A 2010-03-01 2010-03-01 Ｘ線検査装置 Pending JP2011179936A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010043696A JP2011179936A (ja) 2010-03-01 2010-03-01 Ｘ線検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010043696A JP2011179936A (ja) 2010-03-01 2010-03-01 Ｘ線検査装置

Publications (2)

Publication Number Publication Date
JP2011179936A JP2011179936A (ja) 2011-09-15
JP2011179936A5 true JP2011179936A5 (de) 2012-08-02

Family

ID=44691594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010043696A Pending JP2011179936A (ja) 2010-03-01 2010-03-01 Ｘ線検査装置

Country Status (1)

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JP (1) JP2011179936A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102128722B1 (ko) * 2012-08-21 2020-07-02 세메스 주식회사 기판 처리 장치의 검사 방법
JP6491873B2 (ja) * 2014-12-19 2019-03-27 株式会社マーストーケンソリューション Ｘ線検査装置
JP6468270B2 (ja) * 2016-10-13 2019-02-13 オムロン株式会社 被曝量管理装置及び被曝量管理方法
JP6686939B2 (ja) * 2017-03-06 2020-04-22 株式会社島津製作所 Ｘ線検査装置
JP7542327B2 (ja) * 2020-04-02 2024-08-30 株式会社サキコーポレーション 検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002350367A (ja) * 2001-05-29 2002-12-04 Matsushita Electric Ind Co Ltd Ｘ線照射線量値を管理できるｘ線撮像装置
JP2009025207A (ja) * 2007-07-20 2009-02-05 I-Bit Co Ltd 透視検査装置

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