JP2011165992A - Manufacturing method of ceramic multilayer substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic multilayer substrate capable of solving a problem that a faulty break is generated due to the deformation of break patterns. <P>SOLUTION: Break patterns are formed on surfaces of unbaked ceramic sheets and stacked to obtain a ceramic stacked body, then the ceramic stacked body is baked to disperse break patterns and form cavities. A toner with a large particle diameter can be used, the collapse of break patterns can be suppressed at the time of lamenting and contact-bonding, and a cavity having a large aspect ratio can be formed by using electrophotography as a method for forming break patterns. Therefore, faulty breaks can be improved. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a ceramic multilayer substrate, and more particularly to a method for manufacturing a ceramic multilayer substrate in which a plurality of ceramic layers are laminated.

  Conventionally, in order to manufacture a ceramic multilayer substrate, a plurality of ceramic green sheets are prepared, a conductor pattern or the like is formed thereon, and laminated and pressure-bonded to obtain an unfired ceramic laminate. Then, after firing the ceramic laminate to obtain a fired ceramic laminate, the fired ceramic laminate is divided into sub-substrates, and a plurality of ceramic multilayer substrates are taken out.

  In Patent Document 1, as a method of dividing a fired ceramic laminate into ceramic multilayer substrates, a break pattern is formed on at least one ceramic green sheet using a material that disappears upon firing, and the break pattern disappears upon firing. A method is disclosed in which a void is formed inside the fired ceramic laminate, and the fired ceramic laminate is broken along this void to divide the ceramic multilayer substrate. The break pattern is in the form of a paste containing resin particles and carbon particles. This paste-like material is patterned on a ceramic green sheet using a screen printing method.

However, this method has a problem that the break pattern is deformed and a break failure occurs. 15A to 15C show respective steps of conventional break pattern formation, lamination, and break. FIG. 15A shows a state where the break pattern 101 is printed on the ceramic green sheet 100. As shown in FIG. 15B, when the ceramic green sheets 100 on which the break pattern 101 is printed are stacked, the break pattern 101 is crushed and flattened by pressure. The direction in which the break pattern 101 is crushed and expanded is a direction perpendicular to the direction in which the break pattern 101 is desired to be broken. When the ceramic laminate is fired, the break pattern 101 disappears and voids 103 are formed. However, when the fired ceramic laminate 102 is broken, the following problems may occur.
(1) Since the gap 103 in the direction to be broken is narrow (the groove is shallow), a large force is required for the break.
(2) When a large force is applied, a crack from an unintended location may occur, or a crack 104 that runs in the direction perpendicular to the break direction from the tip of the gap may occur as shown in FIG.

  FIG. 16 shows how the break pattern 101 is crushed by pressure. The break pattern is composed of paste containing resin particles and carbon particles, and the particles are stacked as shown in (a) at the time of screen printing, but they are broken and spread as shown in (b) when the ceramic green sheet 100 is laminated and pressed. End up. At that time, the smaller the particle diameter, the easier the particles to flow and the higher the degree of freedom of deformation of the pattern, resulting in a horizontally crushed shape. Therefore, when this ceramic laminate is fired, only a thin gap 103 can be formed inside the fired ceramic laminate 102 as shown in FIG.

  On the other hand, when the particle size of the particles constituting the break pattern 101 is large as shown in FIG. 17 (a), even when the ceramic green sheet 100 is broken during lamination / compression, the deformation condition is as shown in (b). It is small and can keep its original shape. Therefore, the gap 103 having a large aspect ratio can be formed inside the fired ceramic laminate 102 as shown in FIG.

  Considering the crushing at the time of lamination and pressure bonding as described above, it is desirable that the particles in the paste be as large as possible. However, if the particles are enlarged, the mesh of the screen plate is clogged and patterning defects occur. Therefore, the particle diameter in the paste is limited to the opening area of the screen plate, and the break pattern cannot be prevented from being crushed during lamination and pressure bonding.

  Some ceramic electronic components have a structure in which an electrode is drawn out to the side of the component like an LC filter. However, when the break pattern is formed by the screen printing method as in the prior art, it is difficult to form the side electrode as described below. FIG. 18 shows a method of forming the break pattern 101 and the electrode pattern 105 on the ceramic green sheet 100 by a screen printing method. (A) is a sheet section after printing, (b) is a section after firing, (c) Is the cross section after the break. In screen printing, since the electrode pattern and the break pattern cannot be formed so as to contact each other, it is necessary to overlap the two patterns. That is, the electrode pattern 105 is formed across the break pattern 101. For this reason, when breaking, since the electrodes are connected across the child boards adjacent to each other, the break cannot be made cleanly. Ceramic can cause a grain boundary fracture if there is a trigger, and can be easily broken. However, since the electrode 105 made of a metal material has ductility, it does not break easily even if a force is applied to break. If the break is forced, the electrode 105 may be extended and broken as shown in (c), or the electrode part may be broken.

In order to avoid the above problem, a structure in which a gap g is provided between the electrodes 105 as shown in FIG. 19 is conceivable. However, in consideration of variations in processing such as printing bleeding and printing position shift, In addition to the need to provide an overlapping portion (margin) m with the electrode pattern 105, the following problems occur.
(1) Generation of structural defects due to flat cavities The break pattern 101 is thin, wide, and flat with a small aspect ratio, as if a wedge is driven between the electrode 105 and the ceramic sheet 100. . Therefore, when a stress is generated between the electrode 105 and the ceramic 102 due to the difference in shrinkage behavior during firing, a crack is generated from the tip of the gap 103. The same thing happens when a substrate breaks. When the substrate is bent for a break, a force in the direction of splitting between the electrode 105 and the ceramic 102 is generated at the tip of the gap 103, and a structural defect such as a crack 106 is generated along the interface between the electrode and the ceramic. End up.
(2) Reliability of connection with side electrodes Due to the gap g between the electrodes, as shown in FIG. 19B, depending on the break location, one electrode 105 may be located at a position deeper than the end face by the gap. There is. Since the gap 103 is thinner than the gap and longer than the opening, even if the conductive paste is applied as a side electrode after the break, the conductive paste cannot be connected to the electrode 105 and an open defect occurs. there is a possibility.
For the reasons described above, when forming a break pattern by a screen printing method as in the prior art, it is difficult to form an electrode that is drawn out to the side surface.

WO2008 / 018227

  An object of the present invention is to provide a method for producing a ceramic multilayer substrate that can suppress break pattern deformation during lamination and improve break defects.

  In order to achieve the above object, the present invention provides a first step of laminating a plurality of ceramic sheets to obtain an unfired ceramic laminate, and firing the unfired ceramic laminate to form a fired ceramic laminate. A ceramic multilayer substrate manufacturing method including: a second step of obtaining; and a third step of breaking the fired ceramic laminate to take out a plurality of ceramic multilayer substrates, before the first step, At least one ceramic sheet of the plurality of ceramic sheets is subjected to a step of forming a break pattern by electrophotography using toner that disappears upon firing, and the break pattern of the toner is crushed during lamination in the first step Is formed of particles having a particle diameter capable of suppressing the breakage, and during the firing in the second step, the break The production of a ceramic multilayer substrate characterized in that a turn disappears to form a void in the fired ceramic laminate, and the fired ceramic laminate is broken along the void in the third step. Provide a method. In addition, the particle diameter here is defined by the volume average particle diameter which becomes 50% on the basis of volume distribution.

  In the present invention, a break pattern is formed on the surface of the unfired ceramic sheet, and after laminating it to obtain a ceramic laminate, the ceramic laminate is fired to eliminate the break pattern and form voids. Although it is the same as the prior art, it is characterized in that electrophotography is used as a break pattern forming method. In electrophotography, a patterned charge image (electrostatic latent image) is formed on the surface of a photoconductor, and a break pattern forming toner is electrostatically attached to the electrostatic latent image to form a break pattern. The toner image is transferred onto a ceramic sheet and then fixed.

  As described at the beginning, when a break pattern is formed by the screen printing method, the particle size in the paste is limited to the opening area of the screen plate, and the break pattern cannot be prevented from being crushed during lamination and pressure bonding. Generally, the particle diameter in screen printing is about 1 to 3 μm. On the other hand, in the present invention, since the break pattern is formed by electrophotography, it is possible to use larger particles compared to the screen printing method. Even when the particle diameter of the toner, which is a pattern material, is increased to about 30 μm, a pattern can be formed without any problem in printability. For this reason, it is possible to prevent pattern collapse during stacking and pressure bonding, which is a problem of the prior art. When the toner is lost by firing, voids with a large aspect ratio can be formed inside the fired ceramic laminate, so the ceramic laminate undergoes intergranular fracture starting from the voids at the time of break, and performs special processes such as cutting. Even if it is not performed, it can be easily broken without generating cracks or structural defects. There is also a method of simply bending and breaking the fired ceramic laminate, but forming a groove that overlaps the gap on the surface of the fired ceramic laminate and breaking along the groove, laser, etc. There is also a method of cutting using.

  It is desirable that t / 5 ≦ d <t, where d is the particle diameter of the break pattern toner and t is the thickness of the ceramic sheet. When d <t / 5, it is difficult to form a void having a large aspect ratio. On the other hand, when t ≦ d, the ceramic laminate is cracked during firing.

  The toner made of the disappearing material used in the present invention preferably contains particles having a particle size of 3 to 30 μm. Thus, since the toner having a particle size larger than the particle size that can be used in screen printing can be used, it is possible to suppress the collapse of the pattern at the time of lamination and pressure bonding.

  As the toner made of the disappearing material, a toner containing resin particles or carbon particles can be used. As the resin material, it is desirable to use at least one kind of resin among resins that disappear when burned or resins that decompose into monomers at a high temperature. These resins may be used alone or in combination.

  The ceramic sheet contains a glass component, and the toner made of the disappearing material is preferably one that disappears at a temperature lower than the temperature at which the glass component contained in the ceramic sheet flows. If the toner disappears at a temperature lower than the temperature at which the glass in the ceramic flows, such as resin, the glass does not hinder the escape of the gas that occurs at the time of disappearance, so structural defects caused by the gas occur. Hateful.

  The ceramic sheet contains a glass component, and the toner made of the disappearing material may disappear at a temperature higher than the temperature at which the glass component contained in the ceramic sheet flows. For example, when the toner disappears at a temperature higher than the temperature at which the glass in the ceramic flows, such as carbon particles, it is possible to prevent the break gap from being narrowed due to the flow and penetration of the glass.

  On the ceramic sheet, an electrode pattern is formed in addition to the break pattern, but when both patterns are formed by screen printing, it is not possible to accurately align the electrode pattern and the break pattern so that they touch the boundary. Have difficulty. Therefore, it is necessary to overlap two patterns, and various problems due to the overlap occur (see FIGS. 18 and 19). On the other hand, when the break pattern is formed by electrophotography, the electrode pattern and the break pattern can be formed in contact with each other.

  For example, after the electrode pattern is formed on the ceramic sheet, the break pattern can be formed in accordance with the position of the electrode pattern. That is, by measuring the positional deviation of the electrode pattern in advance and feeding back the deviation amount to the electronic data of the break pattern, the deviation between the electrode pattern and the break pattern can be reduced as compared with the screen printing method. In the present invention, after the electrode pattern is formed by screen printing, the break pattern may be formed by electrophotography, or both the electrode pattern and the break pattern may be formed by electrophotography.

  When both the electrode pattern and the break pattern are formed by electrophotography, the electrode pattern can be formed on the ceramic sheet simultaneously with the break pattern. In that case, a break pattern is first developed on the photoconductor, the photoconductor on which the break pattern is developed is charged again, and the photoconductor is exposed in an electrode pattern. At this time, since light does not reach the region where the break pattern is formed, no charge is generated and the surface potential is maintained. When the electrode pattern is developed thereon, the electrode pattern is developed on the exposed photoconductor, but is not developed on the break pattern. Therefore, even when the electrode pattern and the break pattern intersect, the electrode pattern can be developed adjacent to the break pattern without a gap. If the break pattern and the electrode pattern developed on the photosensitive member are transferred onto the ceramic sheet, the break pattern and the electrode pattern can be formed on the ceramic sheet in contact with the boundary. In this case, the lead electrode exposed on the side surface of the broken ceramic multilayer substrate can be easily formed, and it becomes easy to form the side electrode electrically connected to the lead electrode.

  In the first step, the ceramic sheet can be formed by electrophotography. In this case, in addition to the break pattern and the electrode pattern, the ceramic sheet can be formed by electrophotography, so that the remaining allowance of the ceramic portion can be adjusted and the breakability can be adjusted. That is, by reducing the thickness of the ceramic sheet portion facing the break pattern and the electrode pattern and increasing the thickness of the ceramic sheet portion not facing the pattern, the break pattern and the electrode pattern are deformed when the ceramic sheets are stacked and pressed. Can be suppressed. Further, since a ceramic sheet having no step can be formed on the surface, there is an advantage that the flatness of the substrate is improved.

  As described above, according to the method for manufacturing a ceramic multilayer substrate according to the present invention, since the break pattern is formed by electrophotography, particles having a large particle diameter can be used as the toner made of the disappearing material. The collapse of the pattern at the time can be suppressed. Therefore, when the toner is lost by firing, voids having a large aspect ratio can be formed inside the fired ceramic laminate, and the ceramic multilayer substrate can be easily broken without generating cracks or structural defects.

It is sectional drawing which shows the manufacturing process of the ceramic green sheet which concerns on 1st Embodiment of this invention. It is a top view of the ceramic green sheet shown in FIG. It is sectional drawing of the baked ceramic laminated body which laminated | stacked and baked the ceramic green sheet shown in FIG. It is sectional drawing of the example of the toner for a break pattern. It is sectional drawing of the other example of the sintered ceramic laminated body. It is sectional drawing which shows the manufacturing process of the ceramic green sheet which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows some examples of conductive toner. It is sectional drawing which shows the manufacturing process of the ceramic multilayer substrate which forms a break pattern and an electrode pattern by an electrophotographic method. It is sectional drawing which shows the example of the ceramic sheet which concerns on 3rd Embodiment of this invention. It is a figure which shows the manufacturing process of the ceramic sheet shown in FIG. It is sectional drawing which shows the example of a ceramic toner. 1 is a schematic configuration diagram of an electrophotographic printing apparatus suitable for Example 1. FIG. 6 is a schematic configuration diagram of an electrophotographic printing apparatus suitable for Example 2. FIG. 6 is a schematic configuration diagram of an electrophotographic printing apparatus suitable for Example 3. FIG. It is process drawing which shows an example of the manufacturing method of the ceramic multilayer substrate in which the break pattern in the prior art was formed. It is process drawing which shows the manufacturing method of the ceramic multilayer substrate which formed the break pattern using the particle | grains with a small particle diameter. It is process drawing which shows the manufacturing method of the ceramic multilayer substrate which formed the break pattern using the particle | grains with a large particle diameter. It is a figure which shows an example of the method of forming the break pattern and electrode pattern in a prior art by the screen printing method. It is a figure which shows the other example of the method of forming the break pattern and electrode pattern in a prior art by the screen printing method.

-First embodiment-
1 to 3 show a first embodiment of a method for producing a ceramic multilayer substrate according to the present invention. First, an outline of a method for manufacturing a ceramic multilayer substrate will be described. 1 and 2 show one of ceramic green sheets to be prepared.

  FIG. 1 shows a manufacturing process of a ceramic green sheet. Although FIG. 1 shows a ceramic green sheet portion corresponding to one ceramic multilayer substrate, actually, as shown in FIG. 2, a plurality of electrode patterns 2 are formed in a matrix on one ceramic green sheet 1. It is regularly formed. A portion where one electrode pattern 2 is formed corresponds to one ceramic multilayer substrate. As the ceramic green sheet 1, a low-temperature fired ceramic material (LTCC) can be used. In this case, it is preferable because it can be fired simultaneously with a conductive paste material such as Au, Ag, or Cu.

  First, as shown in FIG. 1A, a ceramic green sheet 1 having via conductors 3 formed at appropriate positions is prepared. The via conductor 3 can be formed by forming a through hole in the ceramic green sheet 1 by laser processing or the like and filling the hole with a conductive paste as is well known.

  Next, as shown in FIG. 1B, the conductive paste is screen-printed on the ceramic green sheet 1 on which the via conductors 3 are formed, so that the internal electrodes, the internal wirings, and the internal layer elements of the ceramic multilayer substrate are formed. Pattern 2 is formed. Of the electrode pattern 2, the land portion 2a is formed on the via conductor 3 and connected thereto. In addition to the screen printing method, known wiring pattern forming methods such as inkjet printing, thermal transfer printing, gravure printing, and direct drawing printing can be used. In addition, it is preferable that the amount of deviation from the reference position of the formed electrode pattern 2 is measured by a length measuring device and obtained as electronic data.

  FIG. 1C shows a state in which the break pattern 4 is formed by electrophotography on the ceramic green sheet 1 on which the electrode pattern 2 is formed. At this time, the break pattern 4 can be formed at an accurate position by correcting the electronic data (bitmap) of the break pattern 4 by the amount of deviation obtained previously.

  As shown in FIG. 2, the break pattern 4 is formed in a lattice shape so as to partition the electrode patterns 2. The break pattern 4 is composed of a toner composed of resin particles and / or carbon particles that disappear upon firing, and the particles have a particle diameter of, for example, 3 to 30 μm. The break pattern 4 corresponds to a boundary (break line) of the ceramic multilayer substrate which is a child substrate, and a region outside the break pattern 4 is a margin. The resin material constituting the toner is at least one selected from an acrylic resin, a styrene acrylic resin, a polyolefin resin, a polyester resin, a butyral resin that burns and disappears, or a resin that decomposes into a monomer at a high temperature. It is desirable to use a kind of resin. These resins may be used alone or in combination. The material constituting the toner is not limited to resin, but may be carbon that disappears upon firing.

  FIG. 4 shows an example of the structure of the break pattern forming toner. (A) is a resin toner 40, which is particulated by a resin material 41 containing a charge control agent 42, and (b) is a carbon toner 43, in which carbon particles 44 are solidified with a resin material 45 to form particles. Is. The particle diameters of the toners 40 and 43 are set to a particle diameter that can prevent the break pattern from being crushed when the ceramic green sheets are laminated and pressed, for example, 3 to 30 μm. The standard of the particle diameter which can suppress that a break pattern is crushed at the time of lamination | stacking and pressure bonding is 1/5 or more of sheet thickness. The general thickness of the ceramic green sheet is 15 to 150 μm, and if the toner particle diameter is 3 to 30 μm, the break pattern can be prevented from being crushed during lamination and pressure bonding. In order to prevent the ceramic laminate from cracking during firing, it is necessary to make the particle diameter d of the break pattern toner smaller than the thickness t of the ceramic sheet, so that the range of t / 5 ≦ d <t is eventually obtained. Is good. The components and structure of the break pattern forming toner are not limited to these.

  By laminating a plurality of ceramic green sheets 1 shown in FIG. 1C, an unfired ceramic laminate 10 shown in FIG. 3A is obtained. The ceramic green sheets 1 are laminated so that the electrode pattern 2 and the break pattern 4 are sandwiched between the ceramic green sheets 1 at the time of lamination. At that time, the ceramic green sheets 1 are aligned and laminated so that the break patterns 4 of each layer are arranged in the thickness direction of the ceramic green sheets 1 and the via conductors 3 can connect between the predetermined electrodes 2. Since the particle diameter of the toner constituting the break pattern 4 is large, the break pattern 4 is less crushed during lamination. By firing the unfired ceramic laminate 10, the fired ceramic laminate 11 shown in FIG. 3B can be obtained. Since the break pattern 4 disappears during firing, voids 12 are formed inside the fired ceramic laminate 11. Since the break pattern 4 is less crushed during lamination, the gap 12 has a large aspect ratio. Therefore, when a break load is applied to the fired ceramic laminate 11 along the break line 13, the ceramic layer easily breaks grain boundaries and can be broken cleanly without causing cracks or structural defects. It is.

  FIG. 5 shows another example of an unfired ceramic laminate 10 ′ formed by the same method as in the first embodiment. In this example, the break pattern 4 is formed on every other layer of the ceramic green sheet 1. Of these, the break pattern 4 is formed on the uppermost ceramic green sheet 1 to provide a break mark. Thus, the break pattern 4 can be formed in an arbitrary layer in consideration of the breakability of the fired ceramic laminate.

-Second Embodiment-
FIG. 6 shows an example of a method for forming a ceramic green sheet in which both an electrode pattern and a break pattern are formed by electrophotography. First, as shown in (a), a ceramic green sheet 20 on which via conductors 21 are formed in advance is prepared. Next, as shown in (b), the break pattern 22 is formed on the ceramic green sheet 20 by electrophotography using the same break pattern forming toner as described above. Next, an electrode pattern 23 is formed on the ceramic green sheet 20 by electrophotography using a conductive toner. At this time, a part of the electrode pattern 23 is formed on the via conductor 21. A plurality of ceramic green sheets 20 having the electrode pattern 23 and the break pattern 22 thus formed are laminated to obtain an unfired ceramic laminate, and then fired to obtain a fired ceramic laminate. Also in this case, by using a toner having a large particle size as the break pattern 22, voids having a large aspect ratio can be formed, and the breakability of the fired ceramic laminate is improved. The electrode pattern 23 and the break pattern 22 may be formed in the order of the electrode pattern 23 or may be formed on the ceramic green sheet 20 at the same time.

  There are several types of conductive toner as shown in FIG. 7A shows a toner 50 in which the periphery of a spherical conductive material 50a is covered with an inorganic material 50b such as glass, and the periphery thereof is covered with a resin material 50d containing a charge control agent 50c. FIG. The toner 51, in which the periphery of the material 51a is coated with the resin material 51c containing the charge control agent 51b, (c) has the inorganic material 52b attached to the periphery of the conductive material 52a, and the resin material 52d containing the charge control agent 52c around the periphery. (D) is a toner 53 in which a powdery conductive material 53a is hardened with a resin material 53c together with an inorganic material 53b. Note that the structure of the conductive toner is not limited to these.

  FIG. 8 shows an example of a method for simultaneously forming an electrode pattern and a break pattern on a ceramic green sheet by electrophotography. In particular, this method is suitable when the electrode pattern and the break pattern are in contact with each other, that is, when the side electrode is formed on the side surface of the ceramic multilayer substrate.

  First, as shown in FIG. 8A, the break pattern 22 is developed on the photosensitive member 24 with toner that disappears upon firing. Specifically, the photosensitive member 24 is charged, exposed to a break pattern shape to form an electrostatic latent image, and then the break pattern toner is developed on the latent image.

  Next, as shown in FIG. 8B, the photosensitive member 24 on which the break pattern 22 is formed is charged again. At this time, the break pattern 22 is also charged.

  Next, as shown in FIG. 8C, the charged photoconductor 24 is exposed to an electrode pattern shape. At this time, since the light does not reach the charge generation layer in the photoconductor 24 at the portion where the break pattern 22 is formed, no charge is generated. Therefore, even after the exposure is completed, the break pattern 22 is kept charged as shown in FIG.

  Next, as shown in FIG. 8E, the electrode pattern 23 is developed with conductive toner on the exposed photoconductor 24. The electrode pattern 23 is developed without any problem on the photoconductor 24, but the break pattern 22 is not developed because the surface potential is maintained. That is, in the place where the electrode pattern 23 and the break pattern 22 cross each other, the development is performed in a state in which the both are not overlapped with each other. The electrode pattern 23 can be developed thinner than the break pattern 22 by adjusting the development bias.

  Next, as shown in FIG. 8F, the electrode pattern 23 and the break pattern 22 on the photoconductor 24 are transferred to the ceramic green sheet 20. As a result, as shown in FIG. 8F-2, the break pattern 22 and the electrode pattern 23 are formed on the ceramic green sheet 20 in contact with each other without a gap.

  Next, as shown in FIG. 8G, the ceramic green sheets 20 are stacked and fired. A void 26 having a large aspect ratio is formed in the fired ceramic laminate 25 by a break pattern.

  FIG. 8H shows a state in which the fired ceramic laminate 25 is broken along the gap 26 to form a child substrate 27. At the time of the break, since the electrode pattern 23 does not exist on the gap, there is no defect that the electrode 23 extends and breaks or the electrode part is removed. Since the electrode pattern (leading electrode) 23 is exposed on the break surface of the child substrate 27, the side electrode 28 that is reliably connected to the electrode pattern 23 can be formed by applying a conductive paste thereto.

-Third embodiment-
9A and 9B show two examples of a ceramic sheet in which not only an electrode pattern and a break pattern but also a ceramic layer is formed by electrophotography. A ceramic sheet 30 </ b> A in FIG. 9A is obtained by forming an electrode pattern 32 on a ceramic layer 31 and forming a break pattern 33 so as to penetrate the ceramic layer 31. In particular, by forming the ceramic layer 31 so as not to overlap the break pattern 33, the break pattern 33 penetrating in the thickness direction of the ceramic layer 31 can be formed. In this case, since there is no step due to the electrode pattern 32 or the break pattern 33 on the surface of the ceramic sheet 30A, the laminating property and the flatness of the substrate are improved, and there is no pattern collapse at the time of laminating, and a beautiful pattern can be formed. . Moreover, since the space | gap formed by the break pattern 33 turns into a space | gap deep in the thickness direction of a ceramic laminated body, breakability improves more.

  The ceramic sheet 30 </ b> B in FIG. 9B is an example in which the break pattern 33 is formed to stop at the middle in the thickness direction of the ceramic layer 31. In this case, a thick part 32 a is formed in a part of the electrode pattern 32, and the thick part 32 a penetrates the ceramic layer 31. That is, by forming the ceramic layer 31 so as not to overlap the thick portion 32a, the via conductor 32a penetrating in the thickness direction can be obtained. Also in this case, as with (a), the laminating property and the flatness of the substrate are improved, and the breaking property is improved.

  FIG. 10 shows an outline of an example of a method for manufacturing a ceramic sheet in which the electrode pattern 32, the break pattern 33, and the ceramic layer 31 are formed by electrophotography. First, as shown in FIG. 10A, the break pattern 33 is formed on the transfer body 34 using the break pattern toner. Next, as shown in FIG. 10B, an electrode pattern 32 is formed on the transfer body 34 using conductive toner. At this time, the break pattern 33 may be formed thick, or a part 32a of the electrode pattern 32 may be formed thick. Either the break pattern 33 or the electrode pattern 32 may be formed first. As the transfer body 34, a heat-resistant resin film such as a PET film may be used, or a metal thin plate may be used.

  Next, as shown in FIG. 10C, the ceramic layer 31 is formed on the transfer body 34 on which the electrode pattern 32 and the break pattern 33 are formed using a ceramic toner. At this time, by setting the pattern shape and thickness of the ceramic layer 31, it is possible to obtain a flat ceramic sheet 30 having no step due to the electrode pattern 32 and the break pattern 33. On the transfer body 34, the electrode pattern 32, the break pattern 33, and the ceramic layer 31 are laminated | stacked by the method similar to the above, and an unbaked ceramic laminated body can be obtained by peeling from the transfer body 34. If this ceramic laminate is fired, a fired ceramic laminate is obtained. Since the electrode pattern 32 and the break pattern 33 do not collapse at the time of lamination, a beautiful pattern can be formed, and the aspect ratio of the void formed by firing is increased, so that the breakability is improved.

  As the ceramic toner, ceramic powder 60a and glass powder 60b, which are solidified with a resin material 60c as shown in FIG. 11 (a), may be formed into particles, or ceramic powder 61a as shown in FIG. 11 (b). Alternatively, the resin material 61b may be used to form particles 61. In addition, the composition and structure are arbitrary as long as the toner can be used in electrophotography.

  In the third embodiment, the order of forming the break pattern 33, the electrode pattern 32, and the ceramic layer 31 is not limited to the order described above, and can be arbitrarily changed. That is, the ceramic layer 31 can be formed first, and then the break pattern 33 and the electrode pattern 32 can be formed. In addition, although an example in which the break pattern 33, the electrode pattern 32, and the ceramic layer 31 are sequentially formed and stacked on the transfer body 34 is shown, the present invention is not limited to this. For example, the break pattern, electrode pattern, ceramic The layers may be stacked and transferred to the transfer body integrally, or each pattern may be stacked on the stacked body.

Example 1
Next, a specific manufacturing method corresponding to the first embodiment will be described below.

[Production of ceramic green sheets]
(1) As a ceramic material, a material (BAS material) composed mainly of Ba, Al, and Si is used, and each material is prepared and mixed so as to have a predetermined composition, and calcined at 800-1000 ° C.
(2) The calcined powder obtained in (1) is pulverized with a zirconia ball mill for 12 hours to obtain a ceramic powder.
(3) An organic solvent such as toluene and echinene is added to and mixed with the ceramic powder obtained in (2). Furthermore, a binder and a plasticizer are added and mixed to obtain a slurry.
(4) The obtained slurry is molded by a doctor blade method to obtain a 40 μm thick green sheet.

The ceramic material is not limited to the above material and may be any insulating material. For example, other materials such as forsterite added with glass or CaZrO ₃ added with glass may be used.

[Preparation of electrode forming paste]
(1) A solvent is added to a binder resin composed of 80% by weight of Cu powder having a volume average particle diameter of 2um and ethyl cellulose.
(2) The sample obtained in (1) was stirred and mixed with three rolls to obtain an electrode forming paste.

  The conductive material of the electrode forming paste is preferably at least one metal selected from a transition metal group such as Cu, Ni, Co, Ag, Pd, Rh, Ru, Au, Pt, and Ir. These metals may be used alone or as an alloy. Further, oxides of these metals may be used.

[Preparation of Break Pattern Toner]
(1) Acrylic beads (volume average particle diameter: 20 μm, 5 μm) and an external additive are mixed, and the external additive is uniformly attached to the surface of the acrylic beads with a surface treatment machine.
(2) The acrylic bead toner obtained by the operation of (1) and a carrier were mixed to obtain a developer.

  The resin material constituting the break pattern forming toner is selected from among resins such as acrylics, styrene acrylics, polyolefins, polyesters, butyrals, etc. that burn and disappear, or resins that decompose into monomers at high temperatures. It is desirable to use at least one kind of resin. These resins may be used alone or in combination. The volume average particle diameter of resin beads constituting the toner (approximately the same as the volume average particle diameter of the toner) is preferably in the range of 3 μm to 30 μm. When it is 30 μm or more, the toner particle diameter becomes large, and it becomes difficult to form a fine break pattern. If the thickness is 3 μm or less, the toner easily aggregates during the external addition process, and it is difficult to form a toner with good chargeability. Here, resin beads are used, but what constitutes the toner is not limited to resin, and may be carbon that disappears upon firing. If the toner constituent material disappears at a temperature lower than the temperature at which the glass in the ceramic flows, such as a resin, the glass does not hinder the escape of gas that occurs at the time of disappearance, so the structural defect caused by the gas Is unlikely to occur. When the toner constituting material disappears at a temperature higher than the temperature at which the glass in the ceramic flows, such as carbon, it is possible to prevent the break gap from being narrowed due to the flow and penetration of the glass.

[Electrode pattern formation by screen printing]
An inner layer electrode pattern is formed by screen printing on the sheet surface of the ceramic green sheet on which filled vias are formed. Here, the electrode pattern is formed by screen printing, but other known wiring pattern forming methods such as ink jet printing, thermal transfer printing, gravure printing, and direct drawing printing can be suitably used.

[Break pattern formation by electrophotography]
(1) The position shift amount of the electrode pattern formed by screen printing is measured with a length measuring machine.
(2) The electronic data (bitmap) of the break pattern is corrected by the amount of deviation obtained in (1). The electronic data can be corrected by adjusting the center position, adjusting the magnification, adjusting the local expansion / contraction, adjusting the rotation of the image, and the like.
(3) The photosensitive member is uniformly charged. The photoconductor can use either positive charging or negative charging.
(4) The charged photoconductor is irradiated with light in a break pattern pattern by an LED to form a latent image. The break pattern was formed in a lattice shape so as to partition a plurality of sub-substrates. The line width was 50 μm. The exposure is not limited to the LED, and a known method such as a laser can be used.
(5) A development bias is applied to develop the break pattern forming toner on the photoreceptor. It is possible to adjust the thickness of the break pattern by changing the developing bias. When the developing bias (absolute value) is increased, the film thickness increases.
(6) The photoconductor on which the break pattern is developed and the ceramic green sheet are stacked, and the toner is transferred to the ceramic green sheet. The film thickness of the break pattern can also be adjusted by changing the toner density of the developer and adjusting the toner charge amount. When the toner density is increased and the toner charge amount is decreased, the break pattern becomes thicker.
(7) The ceramic green sheet on which the break pattern was transferred was placed in an oven to fix the toner, thereby obtaining a ceramic green sheet on which the break pattern was formed. The toner fixing method is not limited to an oven, and known techniques such as heat roll fixing, flash fixing, solvent fixing, and pressure fixing can be used.

  The electrophotographic method is not limited to the above, and the following method may be used. For example, not only the two-component development method but also a one-component development method can be performed. In the case of a one-component system, since no carrier is required, there is no concern that the carrier adheres to the green sheet and causes structural defects or reduced reliability. Further, since there is no need to adjust the toner density, the printing machine can be simplified and the size can be reduced. In addition to the direct transfer method from the photoconductor, the transfer from the photoconductor to the green sheet may be performed via an intermediate transfer body. There are several types of green sheets for each thickness and binder, and each has a different resistance. For this reason, when the pattern is transferred from the photosensitive member by electrostatic force, the transfer efficiency may change, and transfer failure may occur. In order to avoid this, there is a method in which the photosensitive member is temporarily transferred to the intermediate transfer member by electrostatic force and then transferred from the intermediate transfer member to the green sheet by a hot roll or the like. As the intermediate transfer member, an endless belt, a drum, a strip film, or the like can be used. Although the reverse development method is used in Example 1, printing may be performed using the normal development method. When the break pattern is exposed at the end of the ceramic substrate, the gas generated when the pattern disappears is easy to escape, and structural defects due to the gas are less likely to occur.

[Sheet Lamination to Firing]
(1) Perform electrode pattern formation and break pattern formation for necessary layers.
(2) All layers are laminated and pressed to obtain an unfired ceramic laminate.
(3) An unfired ceramic laminate is fired to form electrodes and to form voids by a break pattern.
(4) Plating is applied to a predetermined portion of the surface.
(5) Mount IC and SMD.
(6) The substrate is divided into child boards by breaking along the gap.

  The shrinkage suppression layer may be attached to the top and bottom of the laminated substrate or may be put in the inner layer. Since the shrinkage suppression layer suppresses shrinkage in the xy direction (plane direction), the shrinkage amount in the thickness direction increases. Therefore, there is an effect of improving the breakability by narrowing the gap in the thickness direction of the gap formed in the sintered ceramic substrate.

  Table 1 shows the results of the break test in the conventional method and the present invention. The gap from the substrate edge of the inner layer electrode was designed in the range of 40 to 150 μm. The fired substrate (t = 0.6 mm) was broken, and the electrode exposure from the substrate end face and the crack from the substrate end face were compared. In the screen printing method, the exposure of the electrode occurred with considerable frequency due to the positional deviation between the inner layer electrode and the break pattern. Further, cracks were confirmed in the case where the gap between the inner layer electrode and the substrate end surface was small. On the other hand, the electrode exposure was not confirmed in the electrophotographic method, and the design value was 40 μm and the gap was smaller than the actual use region, and only a few cracks were observed.

The effect of Example 1 is as follows.
(1) Since the break pattern can be printed according to the position of the inner layer electrode pattern, the printing position shift can be eliminated.
(2) In the present invention, the particle diameter of the resin contained in the pattern can be increased to about 30 μm. Therefore, it is possible to prevent breakage of the break pattern at the time of pressing, which has been a problem in the prior art (screen printing method), and it is possible to form a cavity with a thickness that is not flat. As a result, the break defect as in the prior art does not occur.

-Example 2-
In Example 2, the method of forming the electrode pattern is different from Example 1, but the other methods are the same. In Example 1, the electrode pattern was formed by screen printing, whereas in Example 2, it was formed by electrophotography. The ceramic green sheet and break pattern toner are the same as those in the first embodiment.

[Preparation of conductive toner for electrode formation]
(1) Copper powder (volume average particle diameter 5.5 μm) and resin are mixed, and the surface of the copper powder is coated with a resin using a surface treatment machine.
(2) The sample of (1) is classified to remove fine powder and coarse powder.
(3) The capsule copper powder obtained by the operation of (2) and the external additive are mixed, and the external additive is uniformly adhered to the surface of the capsule copper powder by a surface treatment machine.
(4) The capsule copper powder obtained by the operation of (3) and a carrier were mixed to obtain a developer.

  The conductive material constituting the conductive toner is preferably at least one metal selected from a group of transition metals such as Cu, Ni, Co, Ag, Pd, Rh, Ru, Au, Pt, and Ir. These metals may be used alone or as an alloy. Further, oxides of these metals may be used. The volume average particle diameter of the conductive material constituting the toner is preferably in the range of 0.1 μm to 10 μm, and more preferably in the range of 0.5 μm to 7 μm. When the thickness is 7 μm or more, the toner particle diameter is increased and the front and back surface roughness of the electrode is increased, so that the high frequency characteristics are deteriorated. When the thickness is 0.5 μm or less, aggregation easily occurs during resin coating, so that it is difficult to form a toner with good chargeability. The volume average particle diameter of the toner is 0.75 to 15 μm, and the more preferable volume average particle diameter is 1 to 10 μm. When the thickness is 10 μm or more, the front and back surface roughness of the electrode increases, and the high frequency characteristics deteriorate. If the thickness is 1 μm or less, the toner tends to aggregate during the external addition process, and it is difficult to form a toner with good chargeability. The content of the conductive material is 10 to 95 wt%, and the more preferable content is 30 to 70 wt%. When the content is 95 wt% or more, the resin in the toner is reduced, the conductive material is exposed on the surface, and the chargeability is deteriorated. On the other hand, if it is 10 wt% or less, the resistance of the electrode pattern after firing becomes high.

The method for producing the electrode forming toner is not limited to the mechanical coating method, and a known method such as a kneading and pulverizing method, a wet polymerization method, or a wet inversion emulsification method can be employed. A powder having a metal surface coated with an inorganic material such as Al ₂ O ₃ , ZrO ₂ , or SiO ₂ can also be used as a raw material. Even when the resin coating of the toner is insufficient due to the insulating property, good chargeability can be maintained. A charge control agent may be added to the toner. Examples of positive charge control substances include nigrosine bases and derivatives thereof, quaternary ammonium salts, naphthenic acid or higher fatty acid salts, alkoxylated amines, alkylamides, triphenylmethane dyes, and these positive polarity substances in the side chain. Oligomer or polymer, quaternary pyridinium, metal salts of higher fatty acids can be used. As the negative charge control substance, for example, a metal-containing (Cr or Fe) azo complex dye, salicylic acid or its derivative chromium-zinc-aluminum-boron complex can be used. An inorganic material such as glass or ceramic may be added to the toner. By firing, the bonding strength with the ceramic is improved and the occurrence of structural defects can be prevented. As a toner coating resin, it has good charging characteristics such as acrylic, styrene allyl, polyolefin, polyester, polypropylene, butyral, etc., and disappears due to combustion, decomposition, melting, vaporization, etc. during firing. What exposes the true surface of electroconductive powder is preferable.

[Break pattern formation by electrophotography]
(1) The photoreceptor is charged uniformly.
(2) The photosensitive member charged by the exposure apparatus is irradiated with light in a break pattern to form a latent image.
(3) A development bias is applied to develop the break pattern toner on the photoreceptor.

[Electrode pattern formation by electrophotography]
(1) The photosensitive member on which the break pattern is formed is uniformly charged.
(2) A latent image is formed by irradiating a photosensitive member charged by an exposure apparatus with light in an electrode pattern. The extraction electrode portion irradiates light so as to overlap the break pattern.
(3) A developing bias is applied to develop the toner on the photoreceptor. The development bias value is made smaller than the bias value on which the break pattern is printed (absolute value). By doing so, the electrode pattern is not printed on the break pattern.
(4) The photoconductor on which the break pattern and the electrode pattern are developed and the ceramic green sheet on which the via is formed are stacked, and the toner is transferred to the ceramic green sheet.
(5) The ceramic green sheet on which the break pattern and the electrode pattern were transferred was placed in an oven to fix the toner, thereby obtaining a ceramic green sheet on which the break pattern and the electrode pattern were formed. The toner fixing method is not limited to an oven, and known techniques such as hot roll fixing, flash fixing, and solvent fixing can be used.
This time, the break pattern and the electrode pattern are overlapped on the photosensitive member, but may be overlapped on the intermediate transfer member or the ceramic green sheet particularly when there is no extraction electrode.

[Sheet Lamination-Firing-Side Electrode Application]
(1) Via formation, electrode pattern formation, and break pattern formation are performed on necessary layers.
(2) All layers are laminated and pressed to obtain an unfired ceramic laminate.
(3) By firing this ceramic laminate, the electrode pattern is baked, and voids are formed inside the fired ceramic laminate by the break pattern.
(4) The fired ceramic laminate is broken along the gap to divide the substrate.
(5) A side electrode is formed with a conductive paste on the side surface of the broken child substrate, if necessary.

  In the second embodiment, in addition to the same effects as in the first embodiment, the lead electrode exposed on the break surface can be formed. Therefore, when the conductive paste is applied as the side electrode, the conductive paste is securely connected to the lead electrode. This is effective in preventing open defects.

-Example 3-
The method for forming the ceramic layer is different from those of Examples 1 and 2. In Examples 1 and 2, the ceramic sheet is a ceramic green sheet formed from a slurry, whereas in Example 3, the ceramic sheet is a ceramic sheet printed by electrophotography.

[Production of ceramic toner]
(1) The ceramic powder and the polyester resin are kneaded using a mixer, and the ceramic powder is dispersed in the polyester.
(2) The sample of (1) is roughly pulverized by a pulverizer.
(3) The sample obtained in (2) is finely pulverized by a lab jet mill and finished to a desired particle size.
(4) The sample obtained in (3) is classified into coarse powder and fine powder by an airflow classifier.
(5) The sample obtained in (3) and the external additive are mixed, and the external additive is uniformly attached to the surface of the sample with a surface treatment machine.

[Break pattern formation by electrophotography]
(1) The photoreceptor is charged uniformly.
(2) A latent image is formed by irradiating the photosensitive member charged by the exposure apparatus with light in a break pattern.
(3) A developing bias is applied to develop the toner on the photoreceptor.

[Electrode pattern formation by electrophotography]
(1) The photosensitive member on which the break pattern is formed is uniformly charged.
(2) A latent image is formed by irradiating a photosensitive member charged by an exposure apparatus with light in an electrode pattern. The extraction electrode portion irradiates light so as to overlap the break pattern.
(3) A developing bias is applied to develop the toner on the photoreceptor.

[Ceramic layer formation by electrophotography]
(1) The photoreceptor on which the break pattern and the electrode pattern are formed is uniformly charged.
(2) A latent image is formed by irradiating the photosensitive member charged by the exposure apparatus with light in a ceramic layer pattern.
(3) A development bias is applied to develop the ceramic toner on the photoreceptor.
(4) The photoreceptor on which the break pattern, the electrode pattern, and the ceramic layer pattern are developed is superimposed on the transfer substrate, and the toner is transferred to the transfer substrate.
(5) A flash lamp is applied to the substrate onto which the break pattern, electrode pattern, and ceramic layer pattern have been transferred to fix the toner.
In this example, the break pattern, the electrode pattern, and the ceramic layer are stacked on the photosensitive member, but may be stacked on the intermediate transfer member or the laminate.

[Sheet Lamination-Firing-Side Electrode Application]
(1) Electrode pattern formation, break pattern formation, and ceramic layer pattern formation are performed for necessary layers. Each layer is sequentially transferred to a base material to form a laminate in which necessary layers are overlapped on the base material.
(2) All the layers are printed and laminated and pressure bonded.
(3) Firing is performed.
(4) Divide into sub-boards.
(5) A side electrode is formed with a conductive paste as necessary.
In the screen printing method, it is possible to prevent the break pattern from being crushed by printing the ceramic sheet after forming the electrode pattern or the break pattern, but it is actually difficult because of the displacement of printing. In this regard, in the electrophotographic method, the amount of displacement of the electrode pattern or break pattern is measured in advance, and the amount of displacement is fed back to the electronic data of the ceramic layer pattern, whereby the problem of displacement can be solved.

  In the third embodiment, in addition to the effects of the first and second embodiments, the remaining margin of the ceramic portion can be adjusted, so that the breakability can be adjusted. In addition, since there is no step on the surface of the ceramic layer at the pattern formation stage, the flatness of the substrate is improved, and the electrode pattern and break pattern are not crushed when the ceramic layer is laminated and crimped, so there is no pattern collapse and the accuracy is high. A high pattern can be formed.

  12 to 14 show some examples of the electrophotographic printing apparatus. FIG. 12 shows an example of an electrophotographic printing apparatus 70 suitable for the first embodiment, in which 71 is a photoreceptor, 72 is a charger, 73 is an exposure device, 74 is a break pattern toner developing device, 75 is a transfer device, and 76. Is a fixing device, and 77 is a cleaner. In this example, the break pattern can be directly transferred to the ceramic green sheet S or transfer substrate on which the electrode pattern has been printed, and heat-fixed.

  FIG. 13 shows an example of an electrophotographic printing apparatus 80 suitable for the second embodiment. In this example, a breaker pattern toner developer 84 and a conductive toner developer 85 are provided around the photosensitive member 81, following the charger 82 and the exposure device 83. 86 is a cleaner. A drum-type intermediate transfer member 87 is provided between the photoreceptor 81 and the ceramic green sheet S. A transfer roller 88 is disposed at a position facing the intermediate transfer body 87 with the ceramic green sheet S in between, and the toner on the ceramic green sheet S or the transfer substrate is fixed downstream of the intermediate transfer body 87. A flash fixing device 89 is provided. In the printing apparatus 80, first, a break pattern is developed on the photoconductor 81 with a break pattern toner, and then an electrode pattern is developed on the photoconductor 81 with a conductive toner. The break pattern and the electrode pattern are transferred to the intermediate transfer member 87. Then, the break pattern and the electrode pattern transferred onto the intermediate transfer member 87 are pressure-transferred together to the ceramic green sheet S or the transfer substrate, and are fixed by the fixing device 89.

  FIG. 14 shows an example of an electrophotographic printing apparatus 90 suitable for the third embodiment. This example is a tandem type electrophotographic printing apparatus that includes an endless belt type intermediate transfer member 91 and three sets of developing devices 92 to 94 disposed above the intermediate transfer member 91. The intermediate transfer member 91 includes a drive pulley 91a, a guide pulley 91b, and a transfer roller 91c, and an endless belt 91d is wound around them. A break pattern toner developing device 92, a conductive toner developing device 93, and a ceramic toner developing device 94 are arranged in this order on the belt 91d along the moving direction of the belt. Each of the developing devices 92 to 94 includes a photoreceptor, a charger, an exposure device, a developing device, and a cleaner. Further, transfer units 92a to 94a are provided at positions facing the respective photoreceptors with the belt 91d interposed therebetween. A support roller 96 is disposed at a position facing the transfer roller 91c with the belt 91d and the transfer substrate 95 interposed therebetween. The break pattern, the electrode pattern, and the ceramic layer transferred to the belt 91d by the developing devices 92 to 94 are transferred onto the transfer base 95 together by the transfer roller 91c and the support roller 96, and then transferred to the transfer base 95. Pressure fixing is performed by a fixing device (press device) 97 disposed on the downstream side in the moving direction. Then, the unbaked ceramic sheet in which the break pattern and the electrode pattern were formed can be obtained by peeling from the transfer substrate 95. Since the break toner used in Example 3 has no pattern collapse, a finer toner can be used. Specifically, a particle size of 0.5 to 30 μm is desirable.

DESCRIPTION OF SYMBOLS 1 Ceramic green sheet 2 Electrode pattern 3 Via conductor 4 Break pattern 10 Unbaked ceramic laminated body 11 Firing ceramic laminated body 12 Air gap 13 Break line

Claims (8)

A first step of laminating a plurality of ceramic sheets to obtain an unfired ceramic laminate;
A second step of firing the unfired ceramic laminate to obtain a fired ceramic laminate;
A third step of breaking the fired ceramic laminate and taking out a plurality of ceramic multilayer substrates, and a method for producing a ceramic multilayer substrate,
Before the first step, for at least one ceramic sheet of the plurality of ceramic sheets, performing a step of forming a break pattern by electrophotography using toner that disappears by firing,
The toner is composed of particles having a particle size capable of suppressing breakage of the break pattern during lamination in the first step,
During firing in the second step, the break pattern disappears to form voids in the fired ceramic laminate,
In the third step, the fired ceramic laminate is broken along the gap. When the particle diameter of the toner is d and the thickness of the ceramic sheet is t,
t / 5 ≦ d <t
The method for producing a ceramic multilayer substrate according to claim 1, wherein:   The method for producing a ceramic multilayer substrate according to claim 1, wherein the toner has a particle diameter of 3 to 30 μm. The ceramic sheet includes a glass component;
The method for producing a ceramic multilayer substrate according to claim 1, wherein the toner disappears at a temperature lower than a temperature at which a glass component contained in the ceramic sheet flows. The ceramic sheet includes a glass component;
The method for producing a ceramic multilayer substrate according to claim 1, wherein the toner disappears at a temperature higher than a temperature at which a glass component contained in the ceramic sheet flows.   The method for producing a ceramic multilayer substrate according to claim 1, further comprising a step of forming an electrode pattern on the ceramic sheet by electrophotography.   The method for manufacturing a ceramic multilayer substrate according to claim 6, wherein the break pattern and the electrode pattern are formed by electrophotography so that the break pattern and the electrode pattern are in contact with each other.   The method for producing a ceramic multilayer substrate according to claim 1, wherein the ceramic sheet is formed by electrophotography.

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