JP4363487B2 - Chargeable powder for circuit formation and multilayer wiring board using the same - Google Patents

Chargeable powder for circuit formation and multilayer wiring board using the same Download PDF

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JP4363487B2
JP4363487B2 JP2008025396A JP2008025396A JP4363487B2 JP 4363487 B2 JP4363487 B2 JP 4363487B2 JP 2008025396 A JP2008025396 A JP 2008025396A JP 2008025396 A JP2008025396 A JP 2008025396A JP 4363487 B2 JP4363487 B2 JP 4363487B2
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powder
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明彦 鎌田
功 加藤
範夫 酒井
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Murata Manufacturing Co Ltd
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Description

本発明は、回路形成用荷電性粉末及びそれを用いた多層配線基板に関し、特に多層配線基板の回路パターンを形成するにあたって電子写真法により印刷を行なうために使用する回路形成用荷電性粉末(トナー)及びそれを用いた多層配線基板に関する。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chargeable powder for forming a circuit and a multilayer wiring board using the same, and more particularly to a chargeable powder for forming a circuit (toner) used for printing by electrophotography when forming a circuit pattern of the multilayered wiring board. And a multilayer wiring board using the same.

従来、多層配線基板を構成する誘電体層に回路パターンを印刷する方法には、金属粉と接着剤などを混合したものを溶剤で粘度を調整してペーストを作り、これを用いてスクリーン印刷法で誘電体層上に所定の回路パターンを形成する方法があった。しかしながら、この方法の場合には、回路パターンに対応した専用マスクを用いたスクリーン印刷法を用いているため、回路パターン毎にマスクが必要であり、このマスクの作成は、原画作成から始まり写真縮小による露光用原板作成、マスク材への感光剤塗布、露光、エッチングといった多くの工程と時間とを必要とするという問題があった。   Conventionally, a method of printing a circuit pattern on a dielectric layer constituting a multilayer wiring board is to make a paste by adjusting the viscosity with a solvent of a mixture of metal powder and adhesive, and then using this to screen printing There is a method of forming a predetermined circuit pattern on the dielectric layer. However, in this method, since a screen printing method using a dedicated mask corresponding to the circuit pattern is used, a mask is required for each circuit pattern. There is a problem that many processes and time are required, such as the production of an exposure master plate by the above method, the application of a photosensitive agent to a mask material, exposure and etching.

この問題点を解決するために、特許文献1において、通常の電子写真法のように、静電力を利用して回路形成用荷電性粉末を誘電体層上に所望の回路パターンとして形成する製造方法が提案されている。また、特許文献2には、この製造方法に使用される回路形成用荷電性粉末が提案されている。図10に、従来の回路形成用荷電性粉末の断面図を示す。回路形成用荷電性粉末100は、芯物質となる導電性金属粉末101、例えば平均粒径が7.5μmの球状の銀粒子と、導電性金属粉末101の周囲に形成された外壁となる熱溶融性樹脂102、例えば平均粒径が0.4μmのポリメチルメタクリレート樹脂とを備え、熱溶融性樹脂102の表面に荷電制御剤103、例えば平均粒径が0.6μmのアゾ系含金属染料の粉末が固着した構造をなす。そして、回路形成用荷電性粉末100の製造方法としては、まず、導電性金属粉末101と熱溶融性樹脂102の微粒子とを混合し、導電性金属粉末101に熱溶融性樹脂102の微粒子を静電力により付着させる。次いで、これに機械的衝撃力を加え、これによって生じる熱によって熱溶融性樹脂102の微粒子を変形させ、導電性金属粉末101に熱溶融性樹脂102の外壁を形成する。次いで、これを、荷電制御剤103の微粒子と混合し、熱溶融性樹脂102からなる外壁に荷電制御剤103の微粒子を静電力により付着させた後、機械的衝撃力により荷電制御剤の微粒子を熱溶融性樹脂102からなる外壁に固着させるものである。
特開平2−257696号公報 特開平4−237062号公報
In order to solve this problem, in Patent Document 1, a manufacturing method for forming a charged powder for circuit formation as a desired circuit pattern on a dielectric layer using electrostatic force as in normal electrophotography Has been proposed. Patent Document 2 proposes a charged powder for circuit formation used in this manufacturing method. FIG. 10 shows a cross-sectional view of a conventional chargeable powder for circuit formation. The conductive powder 100 for circuit formation is a conductive metal powder 101 serving as a core substance, for example, spherical silver particles having an average particle diameter of 7.5 μm, and thermal melting serving as an outer wall formed around the conductive metal powder 101. A charge control agent 103, for example, an azo metal-containing dye powder having an average particle diameter of 0.6 μm, on the surface of the heat-meltable resin 102, for example, a polymethylmethacrylate resin having an average particle diameter of 0.4 μm. Has a fixed structure. Then, as a method for producing the chargeable powder 100 for circuit formation, first, the conductive metal powder 101 and the fine particles of the heat-meltable resin 102 are mixed, and the fine particles of the heat-meltable resin 102 are statically mixed with the conductive metal powder 101. It is attached by electric power. Next, a mechanical impact force is applied thereto, the fine particles of the heat-meltable resin 102 are deformed by the heat generated thereby, and the outer wall of the heat-meltable resin 102 is formed on the conductive metal powder 101. Next, this is mixed with the fine particles of the charge control agent 103, and the fine particles of the charge control agent 103 are adhered to the outer wall made of the heat-meltable resin 102 by electrostatic force. It is fixed to the outer wall made of the heat-meltable resin 102.
JP-A-2-257696 Japanese Patent Laid-Open No. 4-237062

しかしながら、従来の回路形成用荷電性粉末においては、平均粒径が所望の一定値になるように、導電性金属粉末がほぼ一定の粒径しか有していない。したがって、その回路形成用荷電性粉末を用いて回路パターンを形成する際、回路パターンにおいて導電性金属粉末の充填が粗になるため、回路パターンのシート抵抗が高く、回路パターンの損失が大きくなり、高周波領域を対象とした多層配線基板には使用することができないという問題があった。   However, in the conventional charged powder for circuit formation, the conductive metal powder has a substantially constant particle size so that the average particle size becomes a desired constant value. Therefore, when the circuit pattern is formed using the chargeable powder for circuit formation, since the filling of the conductive metal powder becomes rough in the circuit pattern, the sheet resistance of the circuit pattern is high, and the loss of the circuit pattern is increased. There has been a problem that it cannot be used for a multilayer wiring board intended for a high frequency region.

本発明は、このような問題点を解消するためになされたものであり、回路パターンにおいて導電性金属粉末の充填を密にすることができる回路形成用荷電性粉末及びそれを用いた多層配線基板を提供することを目的とする。   The present invention has been made to solve such problems, and is capable of densely filling a conductive metal powder in a circuit pattern, and a multilayer wiring board using the same. The purpose is to provide.

上述する問題点を解決するため本発明の回路形成用荷電性粉末は、電子写真法によって被印刷物上に回路パターンを印刷する際に使用される回路形成用荷電性粉末であって、第1導電性金属粉末、該第1導電性金属粉末の周囲に形成された熱溶融性樹脂からなる第1樹脂層、及び該第1樹脂層の表面に固着した荷電制御剤で構成される荷電性粉末と、前記第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末、該第2導電性金属粉末の周囲に形成された熱溶融性樹脂からなる第1樹脂層、及び該第1樹脂層の表面に固着した荷電制御剤で構成される第2荷電性粉末と、を備え、前記第1荷電性粉末と前記第2荷電性粉末との帯電特性が略同一となるようにそれぞれ調整し、前記第1荷電性粉末と前記第2荷電性粉末とを所望の割合で混合してなることを特徴とする。 In order to solve the above-mentioned problems, the charged powder for circuit formation of the present invention is a charged powder for circuit formation used for printing a circuit pattern on a substrate by electrophotography, and has a first conductive property. A chargeable powder composed of a conductive metal powder, a first resin layer made of a heat-meltable resin formed around the first conductive metal powder, and a charge control agent fixed to the surface of the first resin layer; A second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, a first resin layer made of a hot-melt resin formed around the second conductive metal powder, and the first resin e Bei a second charged powder composed of the charge control agent is adhered to the surface of the layer, a, respectively, as the charging characteristics are substantially the same adjustment with the second charged powder to the first chargeable powder The first chargeable powder and the second chargeable powder at a desired ratio. Combined, characterized by comprising.

また、電子写真法によって被印刷物上に回路パターンを印刷する際に使用される回路形成用荷電性粉末であって、第1導電性金属粉末、及び該第1導電性金属粉末の周囲に形成された熱溶融性樹脂と荷電制御剤とからなる第2樹脂層で構成される第1荷電性粉末と、前記第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末、及び該第2導電性金属粉末の周囲に形成された熱溶融性樹脂と荷電制御剤とからなる第2樹脂層で構成される第2荷電性粉末とを備え、前記第1荷電性粉末と前記第2荷電性粉末との帯電特性が略同一となるようにそれぞれ調整し、前記第1荷電性粉末と前記第2荷電性粉末とを所望の割合で混合してなることを特徴とする。 A charged powder for circuit formation used when a circuit pattern is printed on a substrate by electrophotography, and is formed around the first conductive metal powder and the first conductive metal powder. A first chargeable powder composed of a second resin layer comprising a heat-meltable resin and a charge control agent, a second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, and the first e Bei a second charged powder composed of the second resin layer formed of a second conductive metal powder hot-melt resin formed around the charge control agent, wherein the first charged powder and the second The charging characteristics of the chargeable powder are adjusted so as to be substantially the same, and the first chargeable powder and the second chargeable powder are mixed at a desired ratio .

また、前記第1荷電性粉末および/または前記第2荷電性粉末が接着強化剤を備えることを特徴とする。   Further, the first chargeable powder and / or the second chargeable powder includes an adhesion reinforcing agent.

本発明の多層配線基板は、電子写真法によってセラミックグリーンシート上に回路パターンを印刷し、前記回路パターンが印刷された前記セラミックグリーンシートを積層して形成することを特徴とする。   The multilayer wiring board of the present invention is characterized in that a circuit pattern is printed on a ceramic green sheet by electrophotography, and the ceramic green sheet on which the circuit pattern is printed is laminated.

本発明の回路形成用荷電性粉末によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含むため、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間に、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填を密にすることができる。   According to the charged powder for circuit formation of the present invention, since the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder are included, the circuit pattern is formed on the substrate. When the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder enters the gap formed between the first conductive metal powders, the conductive metal powder in the circuit pattern is closely packed. Can be.

本発明の多層配線基板によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含む回路形成用荷電性粉末を使用して、電子写真法によって回路パターンをセラミックグリーンシートに印刷し、その後、それらのセラミックグリーンシートを通常の製造方法により積層して形成するため、焼成後、多層配線基板を構成する回路パターンにおける導電性金属粉末の充填を密にすることができる。   According to the multilayer wiring board of the present invention, using the charged powder for circuit formation including the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, A conductive metal powder in a circuit pattern constituting a multilayer wiring board after firing because a circuit pattern is printed on a ceramic green sheet by electrophotography, and then the ceramic green sheets are laminated and formed by a normal manufacturing method. The packing of can be made dense.

以下、図面を参照して本発明の実施例を説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図2に、本発明に係る回路形成用荷電性粉末の第1の実施例の断面図を示す。回路形成用荷電性粉末20は、第1導電性金属粉末11、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される第1荷電性粉末21と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末12、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される第2荷電性粉末22とを備える。   FIG. 2 shows a cross-sectional view of the first embodiment of the charged powder for circuit formation according to the present invention. The chargeable powder 20 for circuit formation includes a first chargeable powder 21 composed of a first conductive metal powder 11, a charge control agent 13, an adhesion strengthening agent 14 and a heat-meltable resin 15, and a first conductive metal powder. A second conductive metal powder 12 having a smaller average particle size, a charge control agent 13, an adhesion reinforcing agent 14, and a second chargeable powder 22 composed of a hot-melt resin 15.

そして、第1荷電性粉末21は、第1導電性金属粉末11の周囲に、接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23が形成され、その第1樹脂層23の表面に荷電制御剤13が固着される構造をなす。また、第2荷電性粉末22は、第2導電性金属粉末12の周囲に、接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23が形成され、その第1樹脂層23の表面に荷電制御剤13が固着される構造をなす。   In the first chargeable powder 21, a first resin layer 23 composed of the adhesion reinforcing agent 14 and the heat-meltable resin 15 is formed around the first conductive metal powder 11, and the surface of the first resin layer 23. The charge control agent 13 is fixed to the structure. Further, the second chargeable powder 22 is formed with a first resin layer 23 made of the adhesion reinforcing agent 14 and the heat-meltable resin 15 around the second conductive metal powder 12, and the surface of the first resin layer 23. The charge control agent 13 is fixed to the structure.

ここで、回路形成用荷電性粉末20の具体的な製造方法を説明する。第1荷電性粉末21においては、まず、第1導電性金属粉末11である平均粒径が5.0μmの球状の銅粒子と、接着強化剤14であるシリカ及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対18で混合、微粉砕した粒子とを重量比80対19で混合し、第1導電性金属粉末11に接着強化剤14及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 20 for circuit formation is demonstrated. In the first chargeable powder 21, first, spherical copper particles having an average particle diameter of 5.0 μm that is the first conductive metal powder 11, silica that is the adhesion reinforcing agent 14, and styrene that is the hot-melt resin 15. The acrylic copolymer is mixed at a weight ratio of 1:18 and finely pulverized particles are mixed at a weight ratio of 80:19, and the first conductive metal powder 11 is composed of the adhesion reinforcing agent 14 and the hot-melt resin 15. The particles are attached by electrostatic force.

次いで、第1導電性金属粉末11に接着強化剤14及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物を得る。   Next, a process in which a mechanical impact force is applied to the first conductive metal powder 11 to which particles composed of the adhesion strengthening agent 14 and the heat-meltable resin 15 are attached is performed around the first conductive metal powder 11. To obtain an intermediate formed with the first resin layer 23 composed of the adhesion reinforcing agent 14 and the heat-meltable resin 15.

次いで、第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、中間物の表面に荷電制御剤13を固着した平均粒径が11.2μmの第1荷電性粉末21、すなわち第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成し、その表面に荷電制御剤13を固着した第1荷電性粉末21を得る。   Next, a weight ratio of the intermediate in which the first resin layer 23 made of the adhesion reinforcing agent 14 and the heat-meltable resin 15 is formed around the first conductive metal powder 11 and the azo metal dye that is the charge control agent 13. After mixing at 99: 1, a process of applying mechanical impact force is performed, and the first chargeable powder 21 having an average particle diameter of 11.2 μm in which the charge control agent 13 is fixed to the surface of the intermediate, that is, the first conductive A first resin layer 23 made of an adhesion reinforcing agent 14 and a heat-meltable resin 15 is formed around the metal powder 11, and a first chargeable powder 21 having the charge control agent 13 fixed on the surface thereof is obtained.

一方、第2荷電性粉末22においては、まず、第2導電性金属粉末12である平均粒径が3.0μmの球状の銅粒子と、接着強化剤14であるシリカ及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対28で混合、微粉砕した粒子とを重量比70対29で混合し、第2導電性金属粉末12に接着強化剤14及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   On the other hand, in the second chargeable powder 22, first, spherical copper particles having an average particle diameter of 3.0 μm as the second conductive metal powder 12, silica and the hot-melt resin 15 as the adhesion reinforcing agent 14. A certain styrene acrylic copolymer is mixed at a weight ratio of 1:28 and finely pulverized particles are mixed at a weight ratio of 70:29, and the second conductive metal powder 12 is composed of an adhesion reinforcing agent 14 and a hot-melt resin 15. The particles to be adhered are attached by electrostatic force.

次いで、第2導電性金属粉末12に接着強化剤14及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第2導電性金属粉末12の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物を得る。   Next, a process in which a mechanical impact force is applied to the second conductive metal powder 12 to which particles composed of the adhesion strengthening agent 14 and the heat-meltable resin 15 are adhered is performed around the second conductive metal powder 12. To obtain an intermediate formed with the first resin layer 23 composed of the adhesion reinforcing agent 14 and the heat-meltable resin 15.

次いで、第2導電性金属粉末12の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、中間物の表面に荷電制御剤13を固着した平均粒径が5.6μmの第2荷電性粉末22、すなわち第2導電性金属粉末12の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成し、その表面に荷電制御剤13を固着した第2荷電性粉末22を得る。   Next, a weight ratio of the intermediate in which the first resin layer 23 made of the adhesion reinforcing agent 14 and the heat-meltable resin 15 is formed around the second conductive metal powder 12 and the azo metal dye that is the charge control agent 13. After mixing at 99: 1, a mechanical impact force is applied, and the charge control agent 13 is fixed on the surface of the intermediate, and the second charged powder 22 having an average particle size of 5.6 μm, that is, second conductive A first resin layer 23 made of an adhesion reinforcing agent 14 and a heat-meltable resin 15 is formed around the metal powder 12, and a second chargeable powder 22 having a charge control agent 13 fixed on the surface thereof is obtained.

この際、第1及び第2荷電性粉末21,22の帯電特性である比電荷がともに−15μC/gとなるように、第1荷電性粉末21を構成する第1導電性金属粉末11、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15の成分比率と、第2荷電性粉末22を構成する第2導電性金属粉末12、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15の成分比率とをそれぞれ調整し、混合することにより回路形成用荷電性粉末20を得る。   At this time, the first conductive metal powder 11 constituting the first chargeable powder 21 is charged so that the specific charge, which is the charge characteristic of the first and second chargeable powders 21 and 22, is -15 μC / g. The component ratio of the control agent 13, the adhesion reinforcing agent 14 and the hot melt resin 15, the second conductive metal powder 12 constituting the second chargeable powder 22, the charge control agent 13, the adhesion strengthening agent 14 and the hot melt resin The component ratio of 15 is adjusted and mixed to obtain the charged powder 20 for circuit formation.

なお、第1及び第2荷電性粉末21,22の比電荷は、その比電荷を測定しながら、第1導電性金属粉末11、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15の成分比率と、第2導電性金属粉末12、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15とを調整することにより、所望の値にすることが可能である。   The specific charges of the first and second chargeable powders 21 and 22 are the same as those of the first conductive metal powder 11, the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 while measuring the specific charge. By adjusting the component ratio and the second conductive metal powder 12, the charge control agent 13, the adhesion reinforcing agent 14, and the hot-melt resin 15, it is possible to obtain a desired value.

上述の第1の実施例の回路形成用荷電性粉末によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含むため、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間に、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填を密にすることができる。したがって、回路パターンのシート抵抗を減少させることができるとともに、回路パターンの損失を小さくすることができる。   According to the above-described charged powder for circuit formation of the first embodiment, since it includes the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, When the circuit pattern is formed on the printed matter, the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder enters a gap formed between the first conductive metal powders. The powder filling can be made dense. Therefore, the sheet resistance of the circuit pattern can be reduced and the loss of the circuit pattern can be reduced.

また、第1導電性金属粉末を含む第1荷電性粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末を含む第2荷電性粉末とからなるため、第1荷電性粉末と第2荷電性粉末との割合を所望の値にすることにより、第1導電性金属粉末と第2導電性金属粉末との割合を所望の値にすることができる。したがって、第1導電性金属粉末間にできる隙間にできるだけ多くの第2導電性金属粉末が入り込むように、回路形成用荷電性粉末を設計する段階で第1導電性金属粉末と第2導電性金属粉末との割合を最適にすることができる。   In addition, since the first chargeable powder containing the first conductive metal powder and the second chargeable powder containing the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, the first charge By setting the ratio between the conductive powder and the second charged powder to a desired value, the ratio between the first conductive metal powder and the second conductive metal powder can be set to a desired value. Therefore, the first conductive metal powder and the second conductive metal are designed at the stage of designing the charged powder for circuit formation so that as much second conductive metal powder as possible can enter the gap formed between the first conductive metal powders. The ratio with the powder can be optimized.

また、回路形成用荷電性粉末が、第1導電性金属粉末を含む第1荷電性粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末を含む第2荷電性粉末とからなるため、第1及び第2荷電性粉末を混合するだけで、回路形成用荷電性粉末の中に、平均粒径の異なる第1及び第2導電性金属粉末を含むことができるため、回路形成用荷電性粉末の製造工程が簡略化され、低コスト化が実現する。   The circuit-forming chargeable powder includes a first chargeable powder containing the first conductive metal powder and a second chargeable powder containing a second conductive metal powder having an average particle size smaller than that of the first conductive metal powder. Therefore, by simply mixing the first and second charged powders, the first and second conductive metal powders having different average particle diameters can be contained in the charged powder for circuit formation. The manufacturing process of the charged powder for circuit formation is simplified, and the cost is reduced.

さらに、第1及び第2荷電性粉末の表面に荷電制御剤が固着しているため、均一な帯電性を有する回路形成用荷電性粉末を得ることができる。したがって、この回路形成用荷電性粉末を用いることにより、帯電性の制御が容易に行なえ、印刷性が向上し、狭ピッチの回路パターンの形成に対応可能となり、さらに低いシート抵抗を有する回路パターンの形成が可能となる。   Furthermore, since the charge control agent is fixed to the surfaces of the first and second chargeable powders, a chargeable powder for circuit formation having uniform chargeability can be obtained. Therefore, by using this chargeable powder for circuit formation, the chargeability can be easily controlled, the printability is improved, and it is possible to cope with the formation of a circuit pattern with a narrow pitch. Formation is possible.

また、第1荷電性粉末を構成する第1導電性金属粉末、荷電制御剤、接着強化剤及び熱溶融性樹脂の成分比率と、第2荷電性粉末を構成する第2導電性金属粉末、荷電制御剤、接着強化剤及び熱溶融性樹脂の成分比率とを選択することにより、第1荷電性粉末の比電荷と第2荷電性粉末の比電荷とをほぼ同一にしているため、感光体に形成される一定の電界で、第1及び第2荷電性粉末が選択されることなく感光体に引き寄せられる。したがって、ほぼすべての第1及び第2荷電性粉末を回路パターンの印刷に用いることができるため、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間により多くの第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填をより密にすることができ、回路パターンの比抵抗をさらに減少させることができる。   Moreover, the component ratio of the 1st electroconductive metal powder which comprises 1st electroconductive powder, a charge control agent, an adhesion strengthening agent, and a thermomeltable resin, 2nd electroconductive metal powder which comprises 2nd electroconductive powder, charge Since the specific charge of the first chargeable powder and the specific charge of the second chargeable powder are made substantially the same by selecting the component ratio of the control agent, the adhesion enhancer and the heat-meltable resin, With the constant electric field formed, the first and second chargeable powders are attracted to the photoreceptor without being selected. Therefore, since almost all of the first and second charged powders can be used for printing the circuit pattern, more gaps are formed between the first conductive metal powders when forming the circuit pattern on the substrate. The second conductive metal powder can enter, the filling of the conductive metal powder in the circuit pattern can be made denser, and the specific resistance of the circuit pattern can be further reduced.

第1の実施例の回路形成用荷電性粉末20(図2)の具体的な別の製造方法を説明する。第1荷電性粉末21においては、まず、第1導電性金属粉末11である平均粒径が12.0μmの球状の銅粒子と、接着強化剤14であるシリカ及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対13で混合、微粉砕した粒子とを重量比85対14で混合し、第1導電性金属粉末11に接着強化剤14及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   A description will be given of another specific method for manufacturing the circuit-forming chargeable powder 20 (FIG. 2) of the first embodiment. In the first chargeable powder 21, first, spherical copper particles having an average particle diameter of 12.0 μm that is the first conductive metal powder 11, silica that is the adhesion reinforcing agent 14, and styrene that is the hot-melt resin 15. The acrylic copolymer is mixed at a weight ratio of 1:13 and finely pulverized particles are mixed at a weight ratio of 85:14, and the first conductive metal powder 11 is composed of the adhesion reinforcing agent 14 and the heat-meltable resin 15. The particles are attached by electrostatic force.

次いで、第1導電性金属粉末11に接着強化剤14及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物を得る。   Next, a process in which a mechanical impact force is applied to the first conductive metal powder 11 to which particles composed of the adhesion strengthening agent 14 and the heat-meltable resin 15 are attached is performed around the first conductive metal powder 11. To obtain an intermediate formed with the first resin layer 23 composed of the adhesion reinforcing agent 14 and the heat-meltable resin 15.

次いで、第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、中間物の表面に荷電制御剤13を固着した平均粒径が15.2μmの第1荷電性粉末21、すなわち第1導電性金属粉末11の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成し、その表面に荷電制御剤13を固着した第1荷電性粉末21を得る。   Next, a weight ratio of the intermediate in which the first resin layer 23 made of the adhesion reinforcing agent 14 and the heat-meltable resin 15 is formed around the first conductive metal powder 11 and the azo metal dye that is the charge control agent 13. After mixing with 99: 1, a process of applying a mechanical impact force is performed, and the first chargeable powder 21 having an average particle diameter of 15.2 μm in which the charge control agent 13 is fixed to the surface of the intermediate, that is, the first conductivity A first resin layer 23 made of an adhesion reinforcing agent 14 and a heat-meltable resin 15 is formed around the metal powder 11, and a first chargeable powder 21 having a charge control agent 13 fixed on the surface thereof is obtained.

一方、第2荷電性粉末22においては、まず、第2導電性金属粉末12である平均粒径が5.0μmの球状の銅粒子と、接着強化剤14であるシリカ及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対22で混合、微粉砕した粒子とを重量比76対23で混合し、第2導電性金属粉末12に接着強化剤14及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   On the other hand, in the second chargeable powder 22, first, spherical copper particles having an average particle diameter of 5.0 μm as the second conductive metal powder 12, silica and the heat-meltable resin 15 as the adhesion reinforcing agent 14. A certain styrene acrylic copolymer is mixed at a weight ratio of 1:22 and finely pulverized particles are mixed at a weight ratio of 76:23, and the second conductive metal powder 12 is composed of the adhesion reinforcing agent 14 and the hot-melt resin 15. The particles to be adhered are attached by electrostatic force.

次いで、第2導電性金属粉末12に接着強化剤14及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第2導電性金属粉末15の周囲に熱溶融性樹脂12からなる第1樹脂層23を形成した中間物を得る。   Next, a process in which mechanical impact force is applied to the second conductive metal powder 12 to which particles composed of the adhesion strengthening agent 14 and the heat-meltable resin 15 are adhered is performed around the second conductive metal powder 15. An intermediate having the first resin layer 23 made of the heat-meltable resin 12 formed thereon is obtained.

次いで、第2導電性金属粉末12の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成した中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、中間物の表面に荷電制御剤13を固着した平均粒径が11.2μmの第2荷電性粉末22、すなわち第2導電性金属粉末12の周囲に接着強化剤14及び熱溶融性樹脂15からなる第1樹脂層23を形成し、その表面に荷電制御剤13を固着した第2荷電性粉末22を得る。   Next, a weight ratio of the intermediate in which the first resin layer 23 made of the adhesion reinforcing agent 14 and the heat-meltable resin 15 is formed around the second conductive metal powder 12 and the azo metal dye that is the charge control agent 13. After mixing at 99: 1, a process of applying a mechanical impact force is performed, and the second chargeable powder 22 having an average particle diameter of 11.2 μm in which the charge control agent 13 is fixed on the surface of the intermediate, that is, the second conductive A first resin layer 23 made of an adhesion reinforcing agent 14 and a heat-meltable resin 15 is formed around the metal powder 12 to obtain a second chargeable powder 22 having the charge control agent 13 fixed on the surface thereof.

この場合には、第1及び第2導電性金属粉末の平均粒径を大きくしているため、この回路形成用荷電性粉末20を用いて、電子写真法で形成した回路パターンの膜厚は3.2μmとなり、回路パターンのシート抵抗をさらに減少させることが可能となる。すなわち、第1及び第2導電性金属粉末の平均粒径を大きくすることにより、回路パターンの膜厚を厚くすることができ、それにともない、回路パターンのシート抵抗をさらに減少させることが可能となる。   In this case, since the average particle size of the first and second conductive metal powders is increased, the film thickness of the circuit pattern formed by electrophotography using this charged powder 20 for circuit formation is 3 The sheet resistance of the circuit pattern can be further reduced. That is, by increasing the average particle size of the first and second conductive metal powders, the film thickness of the circuit pattern can be increased, and accordingly, the sheet resistance of the circuit pattern can be further reduced. .

図3に、本発明に係る回路形成用荷電性粉末の第2の実施例の断面図を示す。
回路形成用荷電性粉末30は、第1の実施例の回路形成用荷電性粉末20と同様に、第1導電性金属粉末11、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される第1荷電性粉末31と、第2導電性金属粉末12、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される第2荷電性粉末32とを備える。
FIG. 3 shows a cross-sectional view of a second embodiment of the charged powder for circuit formation according to the present invention.
Similarly to the circuit-forming chargeable powder 20 of the first embodiment, the circuit-forming chargeable powder 30 is composed of the first conductive metal powder 11, the charge control agent 13, the adhesion reinforcing agent 14, and the hot-melt resin 15. A first chargeable powder 31 configured, and a second chargeable powder 32 formed of the second conductive metal powder 12, the charge control agent 13, the adhesion reinforcing agent 14, and the hot-melt resin 15 are provided.

そして、第1荷電性粉末31は、第1導電性金属粉末11の周囲に、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15からなる第2樹脂層33が形成される構造をなす。また、第2荷電性粉末32は、第2導電性金属粉末12の周囲に、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15からなる第2樹脂層33が形成される構造をなす。   The first chargeable powder 31 has a structure in which a second resin layer 33 composed of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 is formed around the first conductive metal powder 11. . The second chargeable powder 32 has a structure in which a second resin layer 33 made of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 is formed around the second conductive metal powder 12. .

ここで、回路形成用荷電性粉末30の具体的な製造方法を説明する。第1荷電性粉末31については、まず、第1導電性金属粉末11である平均粒径が5.0μmの球状の銅粒子と、荷電制御剤13であるアゾ系金属染料、接着強化剤14であるシリカ、及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対1対18で混合、微粉砕した粒子とを重量比80対20で混合し、第1導電性金属粉末11に荷電制御剤13、接着強化剤14、及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 30 for circuit formation is demonstrated. For the first chargeable powder 31, first, spherical copper particles having an average particle diameter of 5.0 μm as the first conductive metal powder 11, an azo metal dye as the charge control agent 13, and an adhesion reinforcing agent 14. A certain silica and a styrene acrylic copolymer which is a heat-meltable resin 15 are mixed at a weight ratio of 1: 1: 18, and finely pulverized particles are mixed at a weight ratio of 80:20 to form the first conductive metal powder 11. Particles composed of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 are attached by electrostatic force.

次いで、第1導電性金属粉末11に荷電制御剤13、接着強化剤14、及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に荷電制御剤13、接着強化剤14、及び熱溶融性樹脂15からなる第2樹脂層33を形成した平均粒径が11.2μmの第1荷電性粉末31を得る。   Next, a process in which mechanical impact force is applied to the first conductive metal powder 11 to which particles composed of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 are attached is performed. The 1st chargeable powder 31 with an average particle diameter of 11.2 micrometers in which the 2nd resin layer 33 which consists of the charge control agent 13, the adhesion strengthening agent 14, and the thermomeltable resin 15 was formed in the circumference | surroundings of the conductive metal powder 11 is obtained.

一方、第2荷電性粉末32については、まず、第2導電性金属粉末12である平均粒径が3.0μmの球状の銅粒子と、荷電制御剤13であるアゾ系金属染料、接着強化剤14であるシリカ、及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対1対22で混合、微粉砕した粒子とを重量比76対24で混合し、第2導電性金属粉末12に荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   On the other hand, for the second chargeable powder 32, first, spherical copper particles having an average particle diameter of 3.0 μm as the second conductive metal powder 12, an azo metal dye as the charge control agent 13, and an adhesion reinforcing agent. 14 and a styrene acrylic copolymer as a heat-meltable resin 15 are mixed at a weight ratio of 1: 1: 22, and finely pulverized particles are mixed at a weight ratio of 76:24 to obtain a second conductive metal powder. The particles composed of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 are attached to 12 by electrostatic force.

次いで、第2導電性金属粉末12に荷電制御剤13、接着強化剤14及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第2導電性金属粉末12の周囲に荷電制御剤13、接着強化剤14及び熱溶融性樹脂15からなる第2樹脂層33を形成した平均粒径が5.6μmの第2荷電性粉末32を得る。   Next, a process in which a mechanical impact force is applied to the second conductive metal powder 12 to which particles composed of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 are attached is performed. A second chargeable powder 32 having an average particle size of 5.6 μm is obtained in which the second resin layer 33 made of the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 is formed around the metal powder 12.

この際、第1の実施例の回路形成用荷電性粉末20と同様に、第1及び第2荷電性粉末31,32の帯電特性である比電荷がともに−15μC/gとなるように、第1荷電性粉末31を構成する第1導電性金属粉末11、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15の成分比率と、第2荷電性粉末32を構成する第2導電性金属粉末12、荷電制御剤13、接着強化剤14及び熱溶融性樹脂15の成分比率とをそれぞれ調整し、混合することにより回路形成用荷電性粉末30を得る。   At this time, in the same manner as the circuit-forming chargeable powder 20 of the first embodiment, the first and second chargeable powders 31 and 32 are charged so that the specific charge, which is the charge characteristic, becomes -15 μC / g. Component ratios of the first conductive metal powder 11, the charge control agent 13, the adhesion reinforcing agent 14, and the heat-meltable resin 15 constituting the one chargeable powder 31, and the second conductive metal constituting the second chargeable powder 32. The powder 12, the charge control agent 13, the adhesion reinforcing agent 14, and the component ratio of the heat-meltable resin 15 are adjusted and mixed to obtain a chargeable powder 30 for circuit formation.

上述の第2実施例の回路形成用荷電性粉末によれば、第1導電性金属粉末の周囲に荷電制御剤、接着強化剤及び熱溶融性樹脂からなる第2樹脂層を形成しているため、別の工程により荷電制御剤を第1及び第2荷電性粉末の外周部に固着する必要がなくなり、回路形成用荷電性粉末の製造工程が簡略化できる。したがって、回路形成用荷電性粉末の低コスト化が実現できる。   According to the charged powder for circuit formation of the second embodiment described above, the second resin layer made of the charge control agent, the adhesion reinforcing agent and the heat-meltable resin is formed around the first conductive metal powder. Thus, it is not necessary to fix the charge control agent to the outer peripheral portions of the first and second chargeable powders by another process, and the manufacturing process of the circuit forming chargeable powder can be simplified. Therefore, cost reduction of the chargeable powder for circuit formation is realizable.

実際に、第1・第2の実施例の回路形成用荷電性粉末20,30を用いて、電子写真法で形成した回路パターンの膜厚は2.3〜2.8μm、シート抵抗は4.5〜5.5mΩ/□となり、回路パターンのシート抵抗は、従来の回路形成用荷電性粉末100(図10)の場合に比べ約2分の1となり、スクリーン印刷で得られた回路パターンのシート抵抗とほぼ等しい値になった。   Actually, the film thickness of the circuit pattern formed by electrophotography using the circuit forming charged powders 20 and 30 of the first and second embodiments is 2.3 to 2.8 μm, and the sheet resistance is 4. 5 to 5.5 mΩ / □, and the sheet resistance of the circuit pattern is about one-half that of the conventional charged powder for circuit formation 100 (FIG. 10), and the circuit pattern sheet obtained by screen printing. The value was almost equal to the resistance.

図8に、被印刷物上に回路パターンの形成する際に用いる電子写真システムの構成図を示す。被印刷物上の回路パターンの形成は、コロナ帯電器81により感光体82の表面を帯電する帯電工程、矢印Aの方向に回転する感光体82の表面にレーザ光83を照射して所望の潜像パターン(図示せず)を形成する露光工程、供給手段84により回路形成用荷電性粉末20,30(図2、図3)を感光体82の表面の潜像パターンに静電吸着させる現像工程、被印刷物85の背面から転写器86により、回路形成用荷電性粉末20,30と逆極性の電荷を与え、潜像パターン上に現像された回路形成用荷電性粉末20,30を被印刷物85上へ転写する転写工程、フラッシュランプ87の照射により被印刷物85上に転写された回路形成用荷電性粉末20,30を定着させる定着工程、回路形成用荷電性粉末20,30を構成する熱溶融性樹脂15を飛ばし、被印刷物85上に回路パターン(図示せず)を形成する焼成工程で構成される。   FIG. 8 shows a configuration diagram of an electrophotographic system used when forming a circuit pattern on a substrate. The circuit pattern is formed on the substrate by a charging process in which the surface of the photoconductor 82 is charged by the corona charger 81, and the surface of the photoconductor 82 rotating in the direction of arrow A is irradiated with a laser beam 83 to form a desired latent image. An exposure process for forming a pattern (not shown), a developing process for electrostatically adsorbing the chargeable powders 20 and 30 for circuit formation (FIGS. 2 and 3) to the latent image pattern on the surface of the photoreceptor 82 by the supply means 84; From the back surface of the substrate 85, the transfer device 86 gives a charge having a polarity opposite to that of the circuit-forming charged powders 20 and 30, and the circuit-forming charged powders 20 and 30 developed on the latent image pattern are applied to the substrate 85. A transfer step for transferring to the substrate, a fixing step for fixing the charged powders 20 and 30 for circuit formation transferred onto the substrate 85 by irradiation of the flash lamp 87, and a heat melting property for constituting the charged powders 20 and 30 for circuit formation. Skip fat 15, and a firing step of forming a circuit pattern (not shown) on the substrate 85.

なお、焼成工程の際に、焼成炉などの熱により、回路形成用荷電性粉末20,30を構成する熱溶融性樹脂15が飛ぶため、回路パターンは第1及び第2導電性金属粉末だけで形成され、第1導電性金属粉末間にできる隙間に、第2導電性金属粉末が入り込みことになる。   During the firing process, the heat-meltable resin 15 constituting the circuit-forming chargeable powders 20 and 30 flies by the heat of the firing furnace or the like, so the circuit pattern is composed only of the first and second conductive metal powders. The second conductive metal powder enters the gap formed between the first conductive metal powders.

図9に、本発明に係る多層配線基板の一実施例の断面図を示す。多層配線基板90は、第1〜第3のセラミックグリーンシート91a〜91cを備える。そして、第1及び第2のセラミックグリーンシート91a,91b上に、上述の第1・第2の実施例の回路形成用荷電性粉末20,30を使用して、図8の電子写真システムによって回路パターン92a,92bを印刷する。次いで、第1〜第3のセラミックグリーンシート91a〜91cを積層して圧力をかけ、一体成形した後焼成する。   FIG. 9 shows a cross-sectional view of one embodiment of a multilayer wiring board according to the present invention. The multilayer wiring board 90 includes first to third ceramic green sheets 91a to 91c. Then, on the first and second ceramic green sheets 91a and 91b, the circuit forming charged powders 20 and 30 of the first and second embodiments described above are used, and the circuit is produced by the electrophotographic system of FIG. The patterns 92a and 92b are printed. Next, the first to third ceramic green sheets 91a to 91c are stacked, pressure is applied, and they are integrally molded and then fired.

なお、第1及び第2のセラミックグリーンシート91a,91b上の回路パターン92a,92bは、ビアホール93により接続されるが、このビアホール93は既存の技術で形成される。例えば、導体描画装置を用いてビアホールごとに導体を圧入していく方法などがある。この場合には、回路パターン92a,92bを電子写真法で形成した後、ビアホール93を形成すると粉体が描画機のノズルを傷める可能性があるため、回路パターン92a,92bを形成する前にビアホール93を形成しておくことが好ましい。   The circuit patterns 92a and 92b on the first and second ceramic green sheets 91a and 91b are connected by a via hole 93. The via hole 93 is formed by an existing technique. For example, there is a method of press-fitting a conductor for each via hole using a conductor drawing device. In this case, if the via holes 93 are formed after the circuit patterns 92a and 92b are formed by electrophotography, the powder may damage the nozzle of the drawing machine. Therefore, the via holes are formed before the circuit patterns 92a and 92b are formed. 93 is preferably formed.

上述の多層配線基板によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含む回路形成用荷電性粉末を使用して、電子写真法によって回路パターンをセラミックグリーンシートに印刷し、その後、それらのセラミックグリーンシートを積層して多層配線基板を形成するため、焼成後、多層配線基板を構成する回路パターンにおける導電性金属粉末の充填を密にすることができる。   According to the multilayer wiring board described above, using the chargeable powder for circuit formation including the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, The circuit pattern is printed on the ceramic green sheet by photographic method, and then the ceramic green sheets are laminated to form a multilayer wiring board. After firing, filling the conductive metal powder in the circuit pattern constituting the multilayer wiring board Can be dense.

したがって、多層配線基板を構成する回路パターンのシート抵抗及び損失を小さくすることができるため、この回路パターンで構成される多層配線基板を高周波領域に使用することが可能となる。   Therefore, since the sheet resistance and loss of the circuit pattern constituting the multilayer wiring board can be reduced, the multilayer wiring board constituted by this circuit pattern can be used in the high frequency region.

なお、上記の第1・第2の実施例において、導電性金属粉末に銅を用いる場合について説明したが、金、銀、白金、ニッケル、パラジウム、タングステン及びモリブデンの単体、これらの酸化物、あるいはこれらの2種以上からなる合金を用いても同様の効果が得られる。   In the first and second embodiments described above, the case where copper is used as the conductive metal powder has been described. However, the simple substance of gold, silver, platinum, nickel, palladium, tungsten and molybdenum, their oxides, or The same effect can be obtained even when an alloy composed of two or more of these is used.

また、熱溶融性樹脂にスチレンアクリル共重合体を用いる場合について説明したが、熱溶融性樹脂は熱可塑性樹脂とも呼ばれ、ポリメチルメタクリレート樹脂、架橋アクリル樹脂、ポリスチレン樹脂、ポリエチレン樹脂、フッ素樹脂、フッ化ビニリデン樹脂及びベンゾグアナミン樹脂などの単体あるいはこれらの2種以上の混合物を用いても同様の効果が得られる。   Moreover, although the case where a styrene acrylic copolymer was used for a heat-meltable resin was described, the heat-meltable resin is also called a thermoplastic resin, and a polymethyl methacrylate resin, a cross-linked acrylic resin, a polystyrene resin, a polyethylene resin, a fluororesin, The same effect can be obtained by using a simple substance such as vinylidene fluoride resin and benzoguanamine resin or a mixture of two or more of these.

さらに、荷電制御剤にアゾ系含金属染料を用いる場合について説明したが、マイナス帯電用の荷電制御剤である塩素系パラフィン、塩素化ポリエステル、酸基過剰のポリエステル、銅フタロシニアニンのスルホニルアミンナフテン酸金属塩、脂肪酸の金属塩及び樹脂酸石鹸などの単体あるいはこれらの2種以上の混合物を用いても同様の効果が得られる。   Further, the case where an azo metal-containing dye is used as the charge control agent has been described. However, the chlorinated paraffin, the chlorinated polyester, the polyester having excess acid groups, and the sulfonylamine naphthene of copper phthalocyanine, which are charge control agents for negative charge, have been described. The same effect can be obtained by using a simple substance such as an acid metal salt, a metal salt of a fatty acid and a resin acid soap, or a mixture of two or more of these.

また、接着強化剤にガラスであるシリカを用いる場合について説明したが、ホウケイ酸ガラス、ソーダ石灰、鉛ガラス及びアルミノケイ酸塩ガラスなどの単体あるいはこれらの2種以上の混合物からなるガラス、あるいはアルミナ、フェライトなどからなるセラミックを用いても同様の効果が得られる。   Moreover, although the case where the silica which is glass is used for the adhesion reinforcing agent has been described, a glass composed of a simple substance such as borosilicate glass, soda lime, lead glass and aluminosilicate glass or a mixture of two or more of these, or alumina, The same effect can be obtained by using ceramics such as ferrite.

さらに、第1及び第2導電性金属粉末が複数の第1粉末を凝集してなる第2凝集粉末であっても同様の効果が得られる。   Furthermore, the same effect can be obtained even if the first and second conductive metal powders are second agglomerated powders obtained by aggregating a plurality of first powders.

また、上記の第2の実施例においては、第1及び第2荷電性粉末の外周部に荷電制御剤が固着される構造、すなわち荷電制御剤、接着強化剤及び熱溶融性樹脂からなる第2樹脂層の表面に荷電制御剤が固着される構造をなしていても同様の効果が得られる。   In the second embodiment, the structure in which the charge control agent is fixed to the outer peripheral portions of the first and second chargeable powders, that is, the second made of the charge control agent, the adhesion reinforcing agent, and the heat-meltable resin. The same effect can be obtained even if the charge control agent is fixed on the surface of the resin layer.

さらに、第1・第2の実施例に示したように回路形成用荷電性粉末の中に接着強化剤を含んでいることが好ましい。特に、回路形成用荷電性粉末の中に接着強化剤を含んでいる場合には、その接着強化剤が、回路パターンを形成したセラミックグリーンシートを焼成する際に、回路パターンを形成する導電性金属粉末と焼成されたセラミックシートとの接着を強化させる役目を担うことになる。
したがって、焼成後、焼成されたセラミックシートと回路パターンとの接着強度が向上するため、セラミックシートから回路パターンが剥がれるのを防止することができる。
<参考例>
図1に、本発明に係る回路形成用荷電性粉末の第1の参考例の断面図を示す。回路形成用荷電性粉末10は、第1導電性金属粉末11、第1導電性金属粉末11より平均粒径が小さい第2導電性金属粉末12、荷電制御剤13及び接着強化剤14を熱溶融性樹脂15中に均一分散させた構造をなす。
Further, as shown in the first and second embodiments, it is preferable that an adhesion reinforcing agent is included in the chargeable powder for circuit formation. In particular, when the adhesion reinforcing agent is included in the chargeable powder for circuit formation, the adhesion enhancing agent is a conductive metal that forms the circuit pattern when firing the ceramic green sheet on which the circuit pattern is formed. It will play a role in strengthening the adhesion between the powder and the fired ceramic sheet.
Therefore, since the adhesive strength between the fired ceramic sheet and the circuit pattern is improved after firing, it is possible to prevent the circuit pattern from being peeled off from the ceramic sheet.
<Reference example>
FIG. 1 shows a cross-sectional view of a first reference example of a charged powder for circuit formation according to the present invention. The circuit-forming chargeable powder 10 is obtained by thermally melting the first conductive metal powder 11, the second conductive metal powder 12 having an average particle size smaller than that of the first conductive metal powder 11, the charge control agent 13 and the adhesion reinforcing agent 14. The structure is uniformly dispersed in the conductive resin 15.

ここで、回路形成用荷電性粉末10の具体的な製造方法を説明する。まず、第1導電性金属粉末11である平均粒径が0.8μmの球状の銅粒子と、第2導電性金属粉末12である平均粒径が0.4μmの球状の銅粒子と、荷電制御剤13であるアゾ系金属染料と、接着強化剤14であるシリカと、熱溶融性樹脂15であるスチレンアクリル共重合体とを重量比30対50対1対1対18で混合した。   Here, the specific manufacturing method of the chargeable powder 10 for circuit formation is demonstrated. First, spherical copper particles having an average particle diameter of 0.8 μm as the first conductive metal powder 11, spherical copper particles having an average particle diameter of 0.4 μm as the second conductive metal powder 12, and charge control The azo metal dye which is the agent 13, the silica which is the adhesion reinforcing agent 14, and the styrene acrylic copolymer which is the hot-melt resin 15 were mixed in a weight ratio of 30: 50: 1: 1: 118.

次いで、この混合したものをニーダにより熱溶融混練し、カッターミルによる粗粉砕、及びジェットミルによる微粉砕を行なう。次いで、気流式分級により平均粒径8.0μmの回路形成用荷電性粉末10を得る。   Next, the mixture is heat-melted and kneaded with a kneader, and coarsely pulverized with a cutter mill and finely pulverized with a jet mill. Subsequently, the chargeable powder 10 for circuit formation with an average particle diameter of 8.0 micrometers is obtained by airflow classification.

上述の第1の参考例の回路形成用荷電性粉末によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含むため、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間に、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填を密にすることができる。したがって、回路パターンのシート抵抗を減少させることができるとともに、回路パターンの損失を小さくすることができる。   According to the charged powder for circuit formation of the first reference example described above, the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder are included. When the circuit pattern is formed on the printed matter, the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder enters a gap formed between the first conductive metal powders. The powder filling can be made dense. Therefore, the sheet resistance of the circuit pattern can be reduced and the loss of the circuit pattern can be reduced.

図4に、本発明に係る回路形成用荷電性粉末の第2の参考例の断面図を示す。
回路形成用荷電性粉末40は、第1導電性金属粉末11の周囲に、第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41が形成され、第3樹脂層41の表面に荷電制御剤13が固着される構造をなす。
FIG. 4 shows a cross-sectional view of a second reference example of the charged powder for circuit formation according to the present invention.
In the circuit-forming chargeable powder 40, a third resin layer 41 composed of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around the first conductive metal powder 11. The charge control agent 13 is fixed on the surface.

ここで、回路形成用荷電性粉末40の具体的な製造方法を説明する。まず、第1導電性金属粉末11である平均粒径が3.0μmの球状の銅粒子と、第2導電性金属粉末12である平均粒径が0.5μmの球状の銅粒子及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比15対19で混合、微粉砕した粒子とを重量比65対34で混合し、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 40 for circuit formation is demonstrated. First, spherical copper particles having an average particle diameter of 3.0 μm as the first conductive metal powder 11, spherical copper particles having an average particle diameter of 0.5 μm as the second conductive metal powder 12, and heat melting properties. The styrene acrylic copolymer, which is the resin 15, is mixed at a weight ratio of 15:19 and finely pulverized particles are mixed at a weight ratio of 65:34, and the first conductive metal powder 11 and the second conductive metal powder 12 and the heat are mixed. The particles composed of the meltable resin 15 are adhered by electrostatic force.

次いで、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41を形成した中間物を得る。   Next, the first conductive metal powder 11 is subjected to a process of applying a mechanical impact force to the first conductive metal powder 11 to which particles composed of the second conductive metal powder 12 and the heat-meltable resin 15 are adhered. An intermediate in which a third resin layer 41 made of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around 11 is obtained.

次いで、第1導電性金属粉末11の周囲に第3樹脂層41を形成した中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、中間物の表面に荷電制御剤13を固着した回路形成用荷電性粉末40、すなわち第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41を形成し、その表面に荷電制御剤13を固着した回路形成用荷電性粉末40を得る。   Next, the intermediate in which the third resin layer 41 is formed around the first conductive metal powder 11 and the azo metal dye as the charge control agent 13 are mixed at a weight ratio of 99: 1, and then the mechanical impact force. And the second conductive metal powder 12 and the hot-melt resin 15 around the first conductive metal powder 11, that is, the charge powder 40 for circuit formation in which the charge control agent 13 is fixed to the surface of the intermediate. The third resin layer 41 is formed, and the chargeable powder 40 for circuit formation having the charge control agent 13 fixed on the surface thereof is obtained.

上述の第2の参考例の回路形成用荷電性粉末によれば、第1導電性金属粉末の周囲に第2導電性金属粉末及び熱溶融性樹脂からなる第3樹脂層が形成されるため、第1導電性金属粉末の周囲に多くの第2導電性金属粉末が配置されることとなる。したがって、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間により多くの第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填をより密にすることができる。   According to the charged powder for circuit formation of the second reference example described above, the third resin layer made of the second conductive metal powder and the heat-meltable resin is formed around the first conductive metal powder. Many second conductive metal powders are arranged around the first conductive metal powder. Therefore, when forming the circuit pattern on the substrate, more second conductive metal powder enters a gap formed between the first conductive metal powders, and the conductive metal powder is more densely filled in the circuit pattern. be able to.

その結果、回路パターンのシート抵抗及び損失をより小さくすることができるため、この回路パターンで構成される多層配線基板をより高周波領域に使用することが可能となる。   As a result, since the sheet resistance and loss of the circuit pattern can be further reduced, it becomes possible to use the multilayer wiring board constituted by this circuit pattern in a higher frequency region.

また、回路形成用荷電性粉末の表面に荷電制御剤が固着しているため、均一な帯電性を有する回路形成用荷電性粉末を得ることができる。したがって、この回路形成用荷電性粉末を用いることにより、帯電性の制御が容易に行なえ、印刷性が向上し、狭ピッチの回路パターンの形成に対応可能となり、さらに低いシート抵抗を有する回路パターンの形成が可能となる。   In addition, since the charge control agent is fixed on the surface of the circuit-forming chargeable powder, a circuit-forming chargeable powder having uniform chargeability can be obtained. Therefore, by using this chargeable powder for circuit formation, the chargeability can be easily controlled, the printability is improved, and it is possible to cope with the formation of a circuit pattern with a narrow pitch. Formation is possible.

図5に、本発明に係る回路形成用荷電性粉末の第3の参考例の断面図を示す。回路形成用荷電性粉末50は、第1導電性金属粉末11の周囲に、第2導電性金属粉末12及び熱溶融性樹脂15とからなる第3樹脂層41が形成され、第3樹脂層41の周囲に、熱溶融性樹脂15からなる第4樹脂層51が形成され、第4樹脂層51の表面に荷電制御剤13が固着される構造をなす。   FIG. 5 shows a cross-sectional view of a third reference example of the charged powder for circuit formation according to the present invention. In the circuit-forming chargeable powder 50, a third resin layer 41 composed of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around the first conductive metal powder 11, and the third resin layer 41 is formed. The fourth resin layer 51 made of the heat-meltable resin 15 is formed around the surface of the substrate, and the charge control agent 13 is fixed to the surface of the fourth resin layer 51.

ここで、回路形成用荷電性粉末50の具体的な製造方法を説明する。まず、第1導電性金属粉末11である平均粒径が3.0μmの球状の銅粒子と、第2導電性金属粉末12である平均粒径が0.5μmの球状の銅粒子及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比15対14で混合、微粉砕した粒子とを重量比65対29で混合し、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 50 for circuit formation is demonstrated. First, spherical copper particles having an average particle diameter of 3.0 μm as the first conductive metal powder 11, spherical copper particles having an average particle diameter of 0.5 μm as the second conductive metal powder 12, and heat melting properties. The styrene acrylic copolymer as the resin 15 is mixed at a weight ratio of 15:14 and finely pulverized particles are mixed at a weight ratio of 65:29, and the first conductive metal powder 11 and the second conductive metal powder 12 and the heat are mixed. The particles composed of the meltable resin 15 are adhered by electrostatic force.

次いで、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41を形成した第1中間物を得る。   Next, the first conductive metal powder 11 is subjected to a process of applying a mechanical impact force to the first conductive metal powder 11 to which particles composed of the second conductive metal powder 12 and the heat-meltable resin 15 are adhered. A first intermediate in which a third resin layer 41 made of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around 11 is obtained.

次いで、第1導電性金属粉末11の周囲に第3樹脂層41を形成した第1中間物と、熱溶融性樹脂15であるスチレンアクリル共重合体とを重量比94対5で混合し、第1中間物に熱溶融性樹脂15の粒子を静電力により付着させる。   Next, the first intermediate in which the third resin layer 41 is formed around the first conductive metal powder 11 and the styrene acrylic copolymer as the heat-meltable resin 15 are mixed at a weight ratio of 94: 5, The particles of the hot-melt resin 15 are adhered to one intermediate by electrostatic force.

次いで、第1中間物に熱溶融性樹脂15の粒子を付着させたものに、機械的衝撃力を加える処理を行い第1中間物に熱溶融性樹脂15からなる第4樹脂層51を形成した第2中間物を得る。   Next, a process in which a mechanical impact force is applied to the first intermediate having the particles of the heat-meltable resin 15 attached thereto to form a fourth resin layer 51 made of the heat-meltable resin 15 on the first intermediate. A second intermediate is obtained.

次いで、第1中間物に第4樹脂層51を形成した第2中間物と、荷電制御剤13であるアゾ系金属染料とを重量比99対1で混合した後、機械的衝撃力を加える処理を行い、第2中間物の表面に荷電制御剤13を固着した回路形成用荷電性粉末50、すなわち導電性金属粉末の第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41、並びに熱溶融性樹脂15からなる第4樹脂層51を形成し、その表面に荷電制御剤13を固着した回路形成用荷電性粉末50を得る。   Next, the second intermediate in which the fourth resin layer 51 is formed on the first intermediate and the azo metal dye that is the charge control agent 13 are mixed at a weight ratio of 99: 1, and then a mechanical impact force is applied. And the second conductive metal powder 12 and the heat around the first conductive metal powder 11 of the conductive metal powder, that is, the conductive powder 50 for circuit formation in which the charge control agent 13 is fixed to the surface of the second intermediate. A third resin layer 41 made of a meltable resin 15 and a fourth resin layer 51 made of a heat-meltable resin 15 are formed, and a chargeable powder 50 for circuit formation in which the charge control agent 13 is fixed on the surface thereof is obtained.

上述の第3の参考例の回路形成用荷電性粉末によれば、第3樹脂層と荷電制御剤との間に熱溶融性樹脂からなる第4樹脂層を形成しているため、導電性金属粉末が回路形成用荷電性粉末の表面に現れることを防止することができる。したがって、導電性金属粉末による帯電性の劣化を防止することができるため、回路形成用荷電性粉末の帯電性を向上させることができ、その結果、印刷性がさらに向上し、より狭ピッチの回路パターンの形成に対応可能となる。   According to the above-mentioned chargeable powder for circuit formation of the third reference example, since the fourth resin layer made of a heat-meltable resin is formed between the third resin layer and the charge control agent, the conductive metal It is possible to prevent the powder from appearing on the surface of the chargeable powder for circuit formation. Accordingly, deterioration of the chargeability due to the conductive metal powder can be prevented, so that the chargeability of the chargeable powder for circuit formation can be improved. As a result, the printability is further improved, and the circuit having a narrower pitch. It is possible to cope with pattern formation.

図6に、本発明に係る回路形成用荷電性粉末の第4の参考例の断面図を示す。回路形成用荷電性粉末60は、第1導電性金属粉末11の周囲に、第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41が形成され、第3樹脂層41の周囲に、荷電制御剤13及び熱溶融性樹脂15からなる第5樹脂層61が形成される構造をなす。   FIG. 6 shows a sectional view of a fourth reference example of the charged powder for circuit formation according to the present invention. In the circuit-forming chargeable powder 60, a third resin layer 41 composed of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around the first conductive metal powder 11. A structure in which a fifth resin layer 61 made of the charge control agent 13 and the heat-meltable resin 15 is formed around is formed.

ここで、回路形成用荷電性粉末60の具体的な製造方法を説明する。まず、第1導電性金属粉末11である平均粒径が3.0μmの球状の銅粒子と、第2導電性金属粉末12である平均粒径が0.5μmの球状の銅粒子及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比15対14で混合、微粉砕した粒子とを重量比65対29で混合し、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 60 for circuit formation is demonstrated. First, spherical copper particles having an average particle diameter of 3.0 μm as the first conductive metal powder 11, spherical copper particles having an average particle diameter of 0.5 μm as the second conductive metal powder 12, and heat melting properties. The styrene acrylic copolymer as the resin 15 is mixed at a weight ratio of 15:14 and finely pulverized particles are mixed at a weight ratio of 65:29, and the first conductive metal powder 11 and the second conductive metal powder 12 and the heat are mixed. The particles composed of the meltable resin 15 are adhered by electrostatic force.

次いで、第1導電性金属粉末11に第2導電性金属粉末12及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41を形成した中間物を得る。   Next, the first conductive metal powder 11 is subjected to a process of applying a mechanical impact force to the first conductive metal powder 11 to which particles composed of the second conductive metal powder 12 and the heat-meltable resin 15 are adhered. An intermediate in which a third resin layer 41 made of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around 11 is obtained.

次いで、第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41を形成した中間物と、荷電制御剤13であるアゾ系金属染料及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比1対5で混合、微粉砕した粒子とを重量比94対6で混合し、中間物に荷電制御剤13及び熱溶融性樹脂15で構成した粒子を静電力により付着させる。   Next, an intermediate in which a third resin layer 41 made of the second conductive metal powder 12 and the heat-meltable resin 15 is formed around the first conductive metal powder 11, an azo metal dye that is the charge control agent 13, and A styrene acrylic copolymer, which is a heat-meltable resin 15, is mixed at a weight ratio of 1: 5, and finely pulverized particles are mixed at a weight ratio of 94: 6. The constituted particles are adhered by electrostatic force.

次いで、中間物に荷電制御剤13及び熱溶融性樹脂15で構成した粒子を付着させたものに、機械的衝撃力を加える処理を行い中間物の周囲に第5の樹脂層61を形成した回路形成用荷電性粉末60、すなわち第1導電性金属粉末11の周囲に第2導電性金属粉末12及び熱溶融性樹脂15からなる第3樹脂層41、並びに荷電制御剤13及び熱溶融性樹脂15からなる第5樹脂層61を形成した回路形成用荷電性粉末60を得る。   Next, a circuit in which a fifth resin layer 61 is formed around the intermediate by performing a process of applying a mechanical impact force to the intermediate formed by adhering particles composed of the charge control agent 13 and the heat-meltable resin 15. The forming chargeable powder 60, that is, the third resin layer 41 made of the second conductive metal powder 12 and the heat-meltable resin 15 around the first conductive metal powder 11, and the charge control agent 13 and the heat-meltable resin 15. A chargeable powder 60 for circuit formation in which the fifth resin layer 61 made of is formed is obtained.

上述の第4の参考例の回路形成用荷電性粉末によれば、第3樹脂層の周囲に熱溶融性樹脂と荷電制御剤とからなる第5樹脂層を形成しているため、別の工程により荷電制御剤を回路形成用荷電性粉末の表面に固着する必要がなくなる。したがって、回路形成用荷電性粉末の製造工程が簡略化できるため、回路形成用荷電性粉末の低コスト化が実現できる。   According to the chargeable powder for circuit formation of the fourth reference example described above, the fifth resin layer made of the heat-meltable resin and the charge control agent is formed around the third resin layer. This eliminates the need to fix the charge control agent on the surface of the circuit forming chargeable powder. Therefore, since the manufacturing process of the circuit-forming chargeable powder can be simplified, the cost of the circuit-forming chargeable powder can be reduced.

図7に、本発明に係る回路形成用荷電性粉末の第5の参考例の断面図を示す。回路形成用荷電性粉末70は、第1導電性金属粉末11の周囲に、第2導電性金属粉末12、荷電制御剤13及び熱溶融性樹脂15からなる第6樹脂層71が形成される構造をなす。   FIG. 7 shows a cross-sectional view of a fifth reference example of the chargeable powder for circuit formation according to the present invention. The circuit-forming chargeable powder 70 has a structure in which a sixth resin layer 71 made of the second conductive metal powder 12, the charge control agent 13 and the heat-meltable resin 15 is formed around the first conductive metal powder 11. Make.

ここで、回路形成用荷電性粉末70の具体的な製造方法を説明する。まず、第1導電性金属粉末11である平均粒径が3.0μmの球状の銅粒子と、第2導電性金属粉末12である平均粒径が0.5μmの球状の銅粒子、荷電制御剤13及び熱溶融性樹脂15であるスチレンアクリル共重合体を重量比15対1対19で混合、微粉砕した粒子とを重量比65対35で混合し、第1導電性金属粉末11に第2導電性金属粉末12、荷電制御剤13及び熱溶融性樹脂15で構成される粒子を静電力により付着させる。   Here, the specific manufacturing method of the chargeable powder 70 for circuit formation is demonstrated. First, spherical copper particles having an average particle diameter of 3.0 μm as the first conductive metal powder 11, spherical copper particles having an average particle diameter of 0.5 μm as the second conductive metal powder 12, a charge control agent 13 and a styrene acrylic copolymer which is a heat-meltable resin 15 are mixed at a weight ratio of 15: 1: 1 and finely pulverized particles are mixed at a weight ratio of 65:35. Particles composed of the conductive metal powder 12, the charge control agent 13, and the heat-meltable resin 15 are adhered by electrostatic force.

次いで、第1導電性金属粉末11に第2導電性金属粉末12、荷電制御剤13及び熱溶融性樹脂15で構成される粒子を付着させたものに、機械的衝撃力を加える処理を行い第1導電性金属粉末11の周囲に第2導電性金属粉末12、荷電制御剤13及び熱溶融性樹脂15からなる第6樹脂層71を形成した回路形成用荷電性粉末70を得る。   Next, a process of applying a mechanical impact force to the first conductive metal powder 11 to which particles composed of the second conductive metal powder 12, the charge control agent 13, and the heat-meltable resin 15 are attached is performed. A chargeable powder for circuit formation 70 is obtained in which a sixth resin layer 71 made of the second conductive metal powder 12, the charge control agent 13, and the heat-meltable resin 15 is formed around the first conductive metal powder 11.

上述の第5の参考例の回路形成用荷電性粉末によれば、第1導電性金属粉末の周囲に第2導電性金属粉末と荷電制御剤と熱溶融性樹脂とからなる第6樹脂層のみを形成しているため、1回の工程で第1導電性金属粉末の周囲に第2導電性金属粉末と荷電制御剤とを配設することができる。したがって、回路形成用荷電性粉末の製造工程が簡略化できるため、回路形成用荷電性粉末の低コスト化が実現できる。   According to the charged powder for circuit formation of the fifth reference example described above, only the sixth resin layer made of the second conductive metal powder, the charge control agent, and the heat-meltable resin is provided around the first conductive metal powder. Therefore, the second conductive metal powder and the charge control agent can be disposed around the first conductive metal powder in one step. Therefore, since the manufacturing process of the circuit-forming chargeable powder can be simplified, the cost of the circuit-forming chargeable powder can be reduced.

本発明の請求項1の回路形成用荷電性粉末によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含むため、回路パターンを形成する際に、第1導電性金属粉末間にできる隙間に、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填を密にすることができる。したがって、回路パターンのシート抵抗を減少させることができるとともに、回路パターンの損失を小さくすることができる。   According to the charged powder for circuit formation of claim 1 of the present invention, the circuit pattern includes the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder. When the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder enters the gap formed between the first conductive metal powders, the conductive metal powder in the circuit pattern is closely packed. Can be. Therefore, the sheet resistance of the circuit pattern can be reduced and the loss of the circuit pattern can be reduced.

また、第1導電性金属粉末を含む第1荷電性粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末を含む第2荷電性粉末とからなるため、第1荷電性粉末と第2荷電性粉末との割合を所望の値にすることにより、第1導電性金属粉末と第2導電性金属粉末との割合を所望の値にすることができる。したがって、第1導電性金属粉末間にできる隙間にできるだけ多くの第2導電性金属粉末が入り込むように、回路形成用荷電性粉末を設計する段階で第1導電性金属粉末と第2導電性金属粉末との割合を最適にすることができる。   In addition, since the first chargeable powder containing the first conductive metal powder and the second chargeable powder containing the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, the first charge By setting the ratio between the conductive powder and the second charged powder to a desired value, the ratio between the first conductive metal powder and the second conductive metal powder can be set to a desired value. Therefore, the first conductive metal powder and the second conductive metal are designed at the stage of designing the charged powder for circuit formation so that as much second conductive metal powder as possible can enter the gap formed between the first conductive metal powders. The ratio with the powder can be optimized.

また、第1導電性金属粉末を含む第1荷電性粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末を含む第2荷電性粉末とからなるため、第1及び第2荷電性粉末を混合するだけで、回路形成用荷電性粉末の中に、平均粒径の異なる第1及び第2導電性金属を含むことができるため、回路形成用荷電性粉末の製造工程が簡略化され、低コスト化が実現する。   Further, since the first chargeable powder containing the first conductive metal powder and the second chargeable powder containing the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder, Since the first and second conductive metals having different average particle diameters can be contained in the circuit-forming charged powder simply by mixing the second charged powder, the process for producing the circuit-forming charged powder Is simplified and the cost is reduced.

さらに、第1及び第2荷電性粉末の表面に荷電制御剤が固着しているため、均一な帯電性を有する回路形成用荷電性粉末を得ることができる。したがって、この回路形成用荷電性粉末を用いることにより、帯電性の制御が容易に行なえ、印刷性が向上し、狭ピッチの回路パターンの形成に対応可能となり、さらに低いシート抵抗を有する回路パターンの形成が可能となる。   Furthermore, since the charge control agent is fixed to the surfaces of the first and second chargeable powders, a chargeable powder for circuit formation having uniform chargeability can be obtained. Therefore, by using this chargeable powder for circuit formation, the chargeability can be easily controlled, the printability is improved, and it is possible to cope with the formation of a circuit pattern with a narrow pitch. Formation is possible.

請求項2の回路形成用荷電性粉末によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含むため、回路パターンを形成する際に、第1導電性金属粉末間にできる隙間に、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填を密にすることができる。したがって、回路パターンのシート抵抗を減少させることができるとともに、回路パターンの損失を小さくすることができる。   According to the charged powder for forming a circuit of claim 2, since the first conductive metal powder and the second conductive metal powder having an average particle size smaller than the first conductive metal powder are included, a circuit pattern is formed. In this case, the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder enters a gap formed between the first conductive metal powders, so that the conductive metal powder is densely filled in the circuit pattern. Can do. Therefore, the sheet resistance of the circuit pattern can be reduced and the loss of the circuit pattern can be reduced.

また、第1導電性金属粉末の周囲に荷電制御剤、接着強化剤及び熱溶融性樹脂からなる第2樹脂層を形成しているため、別の工程により荷電制御剤を第1及び第2荷電性粉末の外周部に固着する必要がなくなり、回路形成用荷電性粉末の製造工程が簡略化できる。したがって、回路形成用荷電性粉末の低コスト化が実現できる。   In addition, since the second resin layer made of the charge control agent, the adhesion strengthening agent, and the heat-meltable resin is formed around the first conductive metal powder, the charge control agent is separated into the first and second charges by separate steps. It becomes unnecessary to adhere to the outer periphery of the conductive powder, and the manufacturing process of the charged powder for circuit formation can be simplified. Therefore, cost reduction of the chargeable powder for circuit formation is realizable.

請求項3の回路形成用荷電性粉末によれば、第1荷電性粉末と第2荷電性粉末との帯電特性を略同一にしているため、感光体に形成される一定の電界で、第1及び第2荷電性粉末が選択されることなく感光体に引き寄せられる。したがって、ほぼすべての第1及び第2荷電性粉末を回路パターンの印刷に用いることができるため、被印刷物上に回路パターンを形成する際に、第1導電性金属粉末間にできる隙間により多くの第2導電性金属粉末が入り込み、回路パターンにおける導電性金属粉末の充填をより密にすることができ、回路パターンの比抵抗をさらに減少させることができる。   According to the chargeable powder for forming a circuit of the third aspect, since the charge characteristics of the first chargeable powder and the second chargeable powder are substantially the same, the first charge powder and the second chargeable powder have the first electric field formed on the photoconductor. And the second chargeable powder is attracted to the photoreceptor without being selected. Therefore, since almost all of the first and second charged powders can be used for printing the circuit pattern, more gaps are formed between the first conductive metal powders when forming the circuit pattern on the substrate. The second conductive metal powder can enter, the filling of the conductive metal powder in the circuit pattern can be made denser, and the specific resistance of the circuit pattern can be further reduced.

請求項4の回路形成用荷電性粉末によれば、接着強化剤が、回路パターンを形成したセラミックグリーンシートを焼成する際に、回路パターンを形成する導電性金属粉末と焼成されたセラミックシートとの接着を強化させる役目を担う。したがって、焼成後、焼成されたセラミックシートと回路パターンとの接着強度が向上するため、セラミックシートから回路パターンが剥がれるのを防止することができる。   According to the chargeable powder for circuit formation according to claim 4, when the adhesion reinforcing agent fires the ceramic green sheet on which the circuit pattern is formed, the conductive metal powder that forms the circuit pattern and the fired ceramic sheet Plays a role in strengthening adhesion. Therefore, since the adhesive strength between the fired ceramic sheet and the circuit pattern is improved after firing, it is possible to prevent the circuit pattern from being peeled off from the ceramic sheet.

請求項5の多層配線基板によれば、第1導電性金属粉末と、第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末とを含む回路形成用荷電性粉末を使用して、電子写真法によって回路パターンをセラミックグリーンシートに印刷し、その後、それらのセラミックグリーンシートを積層して多層配線基板を形成するため、焼成後、多層配線基板を構成する回路パターンにおける導電性金属粉末の充填を密にすることができる。   According to the multilayer wiring board of claim 5, the circuit-forming charged powder comprising the first conductive metal powder and the second conductive metal powder having an average particle size smaller than that of the first conductive metal powder is used. In order to form a multilayer wiring board by printing a circuit pattern on a ceramic green sheet by electrophotography and then laminating those ceramic green sheets, the conductive metal powder in the circuit pattern constituting the multilayer wiring board after firing The packing of can be made dense.

したがって、多層配線基板を構成する回路パターンのシート抵抗及び損失を小さくすることができるため、この回路パターンで構成される多層配線基板を高周波領域に使用することが可能となる。   Therefore, since the sheet resistance and loss of the circuit pattern constituting the multilayer wiring board can be reduced, the multilayer wiring board constituted by this circuit pattern can be used in the high frequency region.

本発明に係る回路形成用荷電性粉末の第1の参考例の断面図である。It is sectional drawing of the 1st reference example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第1の実施例の断面図である。It is sectional drawing of the 1st Example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第2の実施例の断面図である。It is sectional drawing of the 2nd Example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第2の参考例の断面図である。It is sectional drawing of the 2nd reference example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第3の参考例の断面図である。It is sectional drawing of the 3rd reference example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第4の参考例の断面図である。It is sectional drawing of the 4th reference example of the chargeable powder for circuit formation which concerns on this invention. 本発明に係る回路形成用荷電性粉末の第5の参考例の断面図である。It is sectional drawing of the 5th reference example of the chargeable powder for circuit formation which concerns on this invention. 被印刷物上に回路パターンの形成する際に用いる電子写真システムの構成図である。It is a block diagram of the electrophotographic system used when forming a circuit pattern on to-be-printed material. 本発明に係る多層配線基板の一実施例の断面図である。It is sectional drawing of one Example of the multilayer wiring board based on this invention. 従来の回路形成用荷電性粉末を示す断面図である。It is sectional drawing which shows the conventional chargeable powder for circuit formation.

符号の説明Explanation of symbols

10〜70 回路形成用荷電性粉末
11 第1導電性金属粉末
12 第2導電性金属粉末
13 荷電制御剤
15 熱溶融性樹脂
21 第1荷電性粉末
22 第2荷電性粉末
23 第1樹脂層
33 第2樹脂層
41 第3樹脂層
51 第4樹脂層
61 第5樹脂層
71 第6樹脂層
85 被印刷物
90 多層配線基板
91a〜91c セラミックグリーンシート
92a,92b 回路パターン
10 to 70 Chargeable powder for circuit formation 11 First conductive metal powder 12 Second conductive metal powder 13 Charge control agent 15 Hot melt resin 21 First chargeable powder 22 Second chargeable powder 23 First resin layer 33 Second resin layer 41 Third resin layer 51 Fourth resin layer 61 Fifth resin layer 71 Sixth resin layer 85 Printed material 90 Multilayer wiring boards 91a to 91c Ceramic green sheets 92a and 92b Circuit pattern

Claims (4)

電子写真法によって被印刷物上に回路パターンを印刷する際に使用される回路形成用荷電性粉末であって、第1導電性金属粉末、該第1導電性金属粉末の周囲に形成された熱溶融性樹脂からなる第1樹脂層、及び該第1樹脂層の表面に固着した荷電制御剤で構成される第1荷電性粉末と、前記第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末、該第2導電性金属粉末の周囲に形成された熱溶融性樹脂からなる第1樹脂層、及び該第1樹脂層の表面に固着した荷電制御剤で構成される第2荷電性粉末と、を備え、
前記第1荷電性粉末と前記第2荷電性粉末との帯電特性が略同一となるようにそれぞれ調整し、前記第1荷電性粉末と前記第2荷電性粉末とを所望の割合で混合してなることを特徴とする回路形成用荷電性粉末。
A chargeable powder for forming a circuit used when a circuit pattern is printed on an object to be printed by electrophotography, the first conductive metal powder, and the heat melting formed around the first conductive metal powder A first resin layer made of a conductive resin, a first chargeable powder composed of a charge control agent fixed to the surface of the first resin layer, and a second conductive material having an average particle size smaller than that of the first conductive metal powder. Second chargeability comprising a conductive metal powder, a first resin layer made of a heat-meltable resin formed around the second conductive metal powder, and a charge control agent fixed to the surface of the first resin layer and powder, the Bei example,
The first chargeable powder and the second chargeable powder are adjusted to have substantially the same charging characteristics, and the first chargeable powder and the second chargeable powder are mixed at a desired ratio. A chargeable powder for forming a circuit.
電子写真法によって被印刷物上に回路パターンを印刷する際に使用される回路形成用荷電性粉末であって、第1導電性金属粉末、及び該第1導電性金属粉末の周囲に形成された熱溶融性樹脂と荷電制御剤とからなる第2樹脂層で構成される第1荷電性粉末と、前記第1導電性金属粉末より平均粒径が小さい第2導電性金属粉末、及び該第2導電性金属粉末の周囲に形成された熱溶融性樹脂と荷電制御剤とからなる第2樹脂層で構成される第2荷電性粉末とを備え、
前記第1荷電性粉末と前記第2荷電性粉末との帯電特性が略同一となるようにそれぞれ調整し、前記第1荷電性粉末と前記第2荷電性粉末とを所望の割合で混合してなることを特徴とする回路形成用荷電性粉末。
A chargeable powder for forming a circuit used when a circuit pattern is printed on a substrate by electrophotography, the first conductive metal powder, and the heat formed around the first conductive metal powder A first chargeable powder comprising a second resin layer comprising a meltable resin and a charge control agent; a second conductive metal powder having an average particle size smaller than that of the first conductive metal powder; and the second conductivity e Bei a second charged powder composed of the second resin layer comprising a heat-fusible resin formed around sexual metal powder and a charge control agent,
The first chargeable powder and the second chargeable powder are adjusted to have substantially the same charging characteristics, and the first chargeable powder and the second chargeable powder are mixed at a desired ratio. A chargeable powder for forming a circuit.
前記第1荷電性粉末および/または前記第2荷電性粉末が接着強化剤を備えることを特徴とする請求項1あるいは請求項2に記載の回路形成用荷電性粉末。 The charged powder for circuit formation according to claim 1 or 2 , wherein the first charged powder and / or the second charged powder includes an adhesion reinforcing agent. 電子写真法によってセラミックグリーンシート上に回路パターンを印刷し、前記回路パターンが印刷された前記セラミックグリーンシートを積層して形成することを特徴とする請求項1乃至請求項に記載の回路形成用荷電性粉末を用いた多層配線基板。 Printed circuit pattern on a ceramic green sheet by an electrophotographic method, for circuit formation of claim 1 to claim 3, characterized in that formed by laminating the ceramic green sheet in which the circuit pattern is printed A multilayer wiring board using charged powder.
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