JP2011145281A - 保持体に固定された物差しを備える配列装置 - Google Patents
保持体に固定された物差しを備える配列装置 Download PDFInfo
- Publication number
- JP2011145281A JP2011145281A JP2010254042A JP2010254042A JP2011145281A JP 2011145281 A JP2011145281 A JP 2011145281A JP 2010254042 A JP2010254042 A JP 2010254042A JP 2010254042 A JP2010254042 A JP 2010254042A JP 2011145281 A JP2011145281 A JP 2011145281A
- Authority
- JP
- Japan
- Prior art keywords
- ruler
- sphere
- holding body
- spheres
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 22
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 230000010354 integration Effects 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000006094 Zerodur Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000003100 immobilizing effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
Abstract
【解決手段】この発明によると、物差し(1)が球(3)の二次元的配列によって保持体(2)に固定される。球(3)が一方で直接に保持体(2)に載置し、他方で物差し(1)が直接に球(3)上に載置する。保持体(2)と物差し(1)の間の保持力は、保持体(2)に球(3)の固定式保持によって或いは物差し(1)に球(3)の固定式保持によって保証される。球(3)の配列は、それらの球の間に自由空間(4)が残留し、その自由空間が外方に案内する通路を形成するようになる。
【選択図】 図2
Description
2.....保持体
3.....球
4.....自由空間
12....載置面
51、52....層(保持手段)
53....層
Claims (8)
- 保持体(2)に固定された物差し(1)を備える配列装置において、物差し(1)が測定部分(11)を有し、二次元的に分配されて配置された球(3)の上に保持体(2)に支持され、球が測定領域(M)を形成する物差し(1)の測定部分(11)に対向位置して配置されていて、球(3)が一方で保持体(2)に、他方で物差し(1)に不動に固定されていることを特徴とする配列装置。
- 球(3)が保持手段(51、52、53)を介してその球位置で保持体(2)や物差し(1)に不動に保持されていて、保持手段(51、52、53)が球(3)と保持体(2)の間並びに球(3)と物差し(1)の間に材料一体化を奏することを特徴とする請求項1に記載の配列装置。
- 保持手段が保持体(2)に配置された第一層(51)と物差し(1)に配置された第二層(52)とであり、それらの層に球(3)が埋め込まれていることを特徴とする請求項2に記載の配列装置。
- 保持手段が球(3)を包装する層(53)であることを特徴とする請求項2或いは3に記載の配列装置。
- 球(3)が物差し(1)の厚さ(D)より小さい相互中心間隔(A)に配置されていることを特徴とする請求項1乃至4のいずれか一項に記載の配列装置。
- 球(3)は、これら球が後方へ案内する通路を形成する相互自由空間(4)を有するように、配置固定されていることを特徴とする請求項1乃至5のいずれか一項に記載の配列装置。
- 保持体(2)や物差し(1)の材料は同じ熱膨張係数を有することを特徴とする請求項1乃至6のいずれか一項に記載の配列装置。
- 保持体(2)や物差し(1)の膨張係数は1.5×10-6K-1 より小さい、好ましくは0.1×10-6 K-1 より小さいことを特徴とする請求項7に記載の配列装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009047120.0 | 2009-11-25 | ||
DE102009047120A DE102009047120A1 (de) | 2009-11-25 | 2009-11-25 | Anordnung mit einem an einem Träger befestigten Maßstab |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011145281A true JP2011145281A (ja) | 2011-07-28 |
JP2011145281A5 JP2011145281A5 (ja) | 2013-10-03 |
JP5579024B2 JP5579024B2 (ja) | 2014-08-27 |
Family
ID=43901884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010254042A Active JP5579024B2 (ja) | 2009-11-25 | 2010-11-12 | 保持体に固定された物差しを備える配列装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8234793B2 (ja) |
EP (1) | EP2348288B1 (ja) |
JP (1) | JP5579024B2 (ja) |
CN (1) | CN102095372B (ja) |
DE (1) | DE102009047120A1 (ja) |
ES (1) | ES2613038T3 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8958002B2 (en) | 2009-10-22 | 2015-02-17 | Samsung Electronics Co., Ltd. | Image sensors |
JP2015075484A (ja) * | 2013-10-07 | 2015-04-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mitbeschrankter Haftung | 測定目盛及びその測定目盛を備えた光電式位置測定装置 |
JP2016099341A (ja) * | 2014-11-19 | 2016-05-30 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | キャリヤに固定された測定原器を有する装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009002142A1 (de) * | 2009-04-02 | 2010-10-07 | Dr. Johannes Heidenhain Gmbh | Anordnung mit einem an einem Träger befestigten Maßstab und Verfahren zum Halten eines Maßstabs an einem Träger |
DE102009045515B3 (de) * | 2009-10-09 | 2011-03-03 | Dreier Lasermesstechnik Gmbh | Vorrichtung zur Überprüfung der Genauigkeit von Werkzeugmaschinen und Messeinrichtungen |
DE102009047120A1 (de) * | 2009-11-25 | 2011-05-26 | Dr. Johannes Heidenhain Gmbh | Anordnung mit einem an einem Träger befestigten Maßstab |
US9612107B2 (en) * | 2014-06-10 | 2017-04-04 | Faro Technologies, Inc. | Length artifact and method of measurement |
IT201900003817A1 (it) * | 2019-03-15 | 2020-09-15 | Parpas S P A | Encoder lineare |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001041712A (ja) * | 1999-07-27 | 2001-02-16 | Fuji Photo Optical Co Ltd | 被測定体の支持装置およびその製造方法 |
JP2007127649A (ja) * | 2005-11-04 | 2007-05-24 | Dr Johannes Heidenhain Gmbh | 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3635511A1 (de) | 1986-10-18 | 1988-04-28 | Zeiss Carl Fa | Halterung fuer mass- und formverkoerperung |
JP2683148B2 (ja) * | 1990-09-04 | 1997-11-26 | アルプス電気株式会社 | 透明タツチスイツチ |
JPH06324221A (ja) * | 1993-05-11 | 1994-11-25 | Nippon Telegr & Teleph Corp <Ntt> | 光ファイバアレイ |
DE4406799C2 (de) * | 1994-03-02 | 1997-11-06 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
US5778553A (en) * | 1996-07-03 | 1998-07-14 | Hollensbe; Homer D. | Dimension transfer tool |
US6964113B2 (en) * | 2001-03-06 | 2005-11-15 | Faro Laser Trackers, Llc | Scale-bar artifact and methods of use |
JP4477440B2 (ja) * | 2004-07-15 | 2010-06-09 | 株式会社ミツトヨ | スケール弾性保持方法及び位置測定装置 |
EP1742023A1 (de) * | 2005-07-06 | 2007-01-10 | Schneeberger Holding AG | Linearführungssystem mit Vorrichtung zur Positionsmessung |
US7707739B2 (en) | 2005-11-04 | 2010-05-04 | Dr. Johannes Heidenhain Gmbh | Method for attaching a scale to a carrier, a scale, and carrier having a scale |
DE102005053088A1 (de) * | 2005-11-04 | 2007-05-10 | Dr. Johannes Heidenhain Gmbh | Verfahren zum Befestigen eines Maßstabs an einen Träger sowie Maßstab und Träger mit diesem Maßstab |
JP4982554B2 (ja) * | 2006-03-29 | 2012-07-25 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体 |
US8007609B2 (en) * | 2007-10-31 | 2011-08-30 | Symphony Acoustics, Inc. | Parallel plate arrangement and method of formation |
DE102009002142A1 (de) * | 2009-04-02 | 2010-10-07 | Dr. Johannes Heidenhain Gmbh | Anordnung mit einem an einem Träger befestigten Maßstab und Verfahren zum Halten eines Maßstabs an einem Träger |
US8051575B2 (en) * | 2009-10-20 | 2011-11-08 | Faro Technologies, Inc. | Mounted scale bar |
DE102009047120A1 (de) * | 2009-11-25 | 2011-05-26 | Dr. Johannes Heidenhain Gmbh | Anordnung mit einem an einem Träger befestigten Maßstab |
-
2009
- 2009-11-25 DE DE102009047120A patent/DE102009047120A1/de not_active Withdrawn
-
2010
- 2010-08-31 EP EP10174572.7A patent/EP2348288B1/de active Active
- 2010-08-31 ES ES10174572.7T patent/ES2613038T3/es active Active
- 2010-11-12 JP JP2010254042A patent/JP5579024B2/ja active Active
- 2010-11-16 US US12/927,488 patent/US8234793B2/en active Active
- 2010-11-25 CN CN201010562650.7A patent/CN102095372B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001041712A (ja) * | 1999-07-27 | 2001-02-16 | Fuji Photo Optical Co Ltd | 被測定体の支持装置およびその製造方法 |
JP2007127649A (ja) * | 2005-11-04 | 2007-05-24 | Dr Johannes Heidenhain Gmbh | 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8958002B2 (en) | 2009-10-22 | 2015-02-17 | Samsung Electronics Co., Ltd. | Image sensors |
JP2015075484A (ja) * | 2013-10-07 | 2015-04-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mitbeschrankter Haftung | 測定目盛及びその測定目盛を備えた光電式位置測定装置 |
JP2016099341A (ja) * | 2014-11-19 | 2016-05-30 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | キャリヤに固定された測定原器を有する装置 |
Also Published As
Publication number | Publication date |
---|---|
JP5579024B2 (ja) | 2014-08-27 |
CN102095372A (zh) | 2011-06-15 |
EP2348288A2 (de) | 2011-07-27 |
US8234793B2 (en) | 2012-08-07 |
EP2348288B1 (de) | 2016-12-28 |
EP2348288A3 (de) | 2016-06-15 |
ES2613038T3 (es) | 2017-05-22 |
DE102009047120A1 (de) | 2011-05-26 |
US20110119945A1 (en) | 2011-05-26 |
CN102095372B (zh) | 2015-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5579024B2 (ja) | 保持体に固定された物差しを備える配列装置 | |
CN101803001B (zh) | 静电夹持装置、光刻设备以及制造静电夹持装置的方法 | |
US9081309B2 (en) | Detector module, cooling arrangement and lithographic apparatus comprising a detector module | |
JP2000180118A (ja) | 走行可能なx/y座標測定台 | |
TW200923594A (en) | Device for controlling temperature of an optical element | |
TW200527162A (en) | Exposure apparatus and device manufacturing method | |
US20100296071A1 (en) | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | |
CN102566304A (zh) | 光刻设备和可移除构件 | |
JP2011069813A (ja) | 長さ測定装置 | |
TW200923598A (en) | Lithographic apparatus having a lorentz actuator with a composite carrier | |
JP4965970B2 (ja) | 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 | |
TW201001613A (en) | Shear-layer chuck for lithographic apparatus | |
US8650769B2 (en) | Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate | |
US8817228B2 (en) | Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement | |
JP2021015285A (ja) | 物体保持装置、処理装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 | |
KR20190050828A (ko) | 물체 유지 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 및 물체 유지 방법 | |
JP2015126126A (ja) | インプリント装置、および物品の製造方法 | |
CN101075097B (zh) | 光刻设备和装置制造方法 | |
JP2005352037A (ja) | 光学部材の保持構造、露光装置 | |
JP2019078747A (ja) | 担持体に固定されたスケールを有する装置 | |
TW200523999A (en) | Stage device and exposure device | |
JP2014204103A (ja) | 移動体装置及び露光装置、並びにデバイス製造方法 | |
JP2013062287A (ja) | 型、それを用いたインプリント方法および物品の製造方法 | |
JP2009119677A (ja) | Ledプリントヘッドの製造方法 | |
Rhee et al. | Fabrication of 300-mm silicon reference wafer by using direct laser writer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130722 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130819 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131031 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131126 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140225 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140228 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140310 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140611 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140708 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5579024 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |