JP2011133383A - Device for measuring two-dimensional vector magnetism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for measuring two-dimensional vector magnetism capable of suppressing a change of magnetic characteristics of a sample due to hole drilling or removal of an insulation film by dispensing with hole drilling for the sample and winding of an enamel wire for a hole, removing the insulation film accompanying measurement of magnetic flux density and dispensing with load management of a probe. <P>SOLUTION: The device for measuring the two-dimensional vector magnetism has a sensor base, a vacuum section table, a negative pressure generating means, four probes with screws, and two coils. Respective two probes of two sets of measuring parts are connected to a voltage detection part with two pieces of wiring on the edge face of the sensor base. The edge face of the sensor base has four holes forming spiral grooves screwed with the screws. Springs are stored in each hole, base parts of each probe are inserted in each hole, and each probe biases the springs so that needle edges may be projected from each hole. A suction recess part formed on the suction face of the vacuum suction table with the negative pressure generation device is depressurized to adsorb the sample so as to perform magnetic measurement. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a two-dimensional vector magnetometer, and more particularly to a two-dimensional vector magnetometer used when measuring magnetic properties on a two-dimensional plane of a plate-shaped magnetic body.

In order to save energy, increasing the energy efficiency of electrical equipment is being studied. One way to achieve this high efficiency is to reduce the magnetic loss of electrical steel sheets used in iron core materials such as electric motors and transformers. For this purpose, it is necessary to accurately grasp the local magnetic characteristics of the electrical steel sheet.
For the measurement of local magnetic characteristics, a two-dimensional vector magnetism measuring apparatus using two-dimensional vector magnetic characteristics is generally used. As shown in Patent Document 1, a conventional two-dimensional vector magnetic measuring device includes a magnetic flux density measuring means for measuring a magnetic flux density in an X direction and a Y direction of a magnetic steel sheet as a sample, and an X direction and a Y direction of the electromagnetic steel sheet. Magnetic field strength measuring means for measuring the magnetic field strength.

Conventional magnetic flux density measuring means include, for example, a Bx coil in which an enamel wire is wound in the X-axis direction through a hole formed in the electromagnetic steel plate, and an enamel wire in the Y-axis direction through a hole formed in the same electromagnetic steel plate. A probe coil method based on a probe coil method in which a magnetic flux density B is measured by using a By coil is known.
Also known is a probe method based on a probe method in which a voltage on a magnetic steel sheet is measured with a set of probes in the X-axis direction and a set of probes in the Y-axis direction. At the time of measurement, pressure is applied to these probes to ensure that the tip of the probe is in contact with the sample (magnetic steel plate).
As a conventional magnetic field strength measuring means, for example, an Hx coil wound in the X-axis direction above or below the electromagnetic steel sheet and a Hy coil wound in the Y-axis direction above or below the electromagnetic steel sheet are used. Those based on the H coil method for measuring the magnetic field strength H are known.
From the magnetic flux density B and the magnetic field strength H measured in this way, the two-dimensional magnetic characteristics of the electrical steel sheet are obtained.
When measuring the magnetic properties of the magnetic steel sheet, the magnetic steel sheet is excited by supplying electric power to the coil, and the magnetic flux density B is measured by the probe coil method or the probe method in the X-axis direction and the Y-axis direction. To measure the magnetic field strength H.

JP 2006-254841 A

  However, in the measurement of the magnetic flux density by the probe coil method, it is necessary to accurately make a total of four holes, one pair in each of the X and Y directions, in the central part of the magnetic steel sheet and to wind an enamel wire in each hole. It was. It is necessary to perform these machining operations as many as the number of electromagnetic steel sheets, and the operations are complicated, and it is necessary to strictly control the positions where holes are formed.

Therefore, as a conventional technique for solving this problem, a magnetic flux density measuring means based on a probe method for measuring the magnetic flux density in the X direction and the Y direction of a magnetic steel sheet using two sets of probes has been developed. Each probe is provided with a coil spring, and the tip of each needle is brought into contact with the electromagnetic steel plate by the biasing force of each coil spring.
However, in measuring the magnetic flux density by the probe method, if the magnetic steel sheet is covered with an insulating coating, the probe and the ground iron of the magnetic steel sheet cannot be connected. Therefore, it is necessary to pierce the insulating coating with the tip of the probe or to remove the insulating coating. Among these, when the method of piercing the needle tip is adopted, there arises a problem that the wear of the needle tip portion or the load for piercing the needle tip affects the measurement of the magnetic flux density. On the other hand, in the case of the method of removing the insulating film, it has been necessary to physically remove the insulating film by sandpaper or the like, which is troublesome.

  In the probe method, each probe is pressed against the magnetic steel sheet by the biasing force of the coil spring. Therefore, the positioning of the electromagnetic steel sheet becomes unstable, and it is difficult to install the electromagnetic steel sheet at a fixed position. Therefore, in practice, a sponge or the like is pressed against the surface (upper surface) of the electrical steel sheet to fix the electrical steel sheet. As a result, it has been difficult to observe the surface of the electrical steel sheet, which has been performed for the purpose of magnetic domain observation and temperature measurement during the measurement.

  Therefore, the present invention eliminates the need for drilling the sample and winding the enamel wire around the hole, which has been performed at the time of measuring the magnetic flux density by the probe coil method, and at the time of measuring the magnetic flux density by the probe method. This eliminates the need to remove the insulating coating and control the load on the probe, and can suppress changes in the magnetic properties of the sample due to the perforation or removal of the insulating coating. An object of the present invention is to provide a two-dimensional vector magnetic measuring apparatus which can measure by simply adsorbing to a sample and can simplify the preparation of a sample and the setting of a measuring instrument.

  According to the first aspect of the present invention, there is provided a vacuum suction table having a sensor base having a flat tip surface and a suction recess provided on a suction surface on which a sample for measurement is sucked, provided around the tip portion of the sensor base. And negative pressure generating means for making the suction concave portion negative and sucking the sample to the suction surface, and protruding from the tip end surface of the sensor base with the same length so that each probe is positioned at the apex of the square And four coils each of which is contacted with the back surface of the sample, and two coils held on the tip surface of the sensor base so that the angle formed by the winding direction is 90 ° The two-dimensional vector magnetic measuring device comprises two measuring probes arranged diagonally as one set of measuring units, thereby configuring two sets of measuring units, and these measuring units These two probes are connected to one end of two wires on the tip surface of the sensor base. The other ends of these wires are connected to the voltage detection unit, and the sensor base has four holes with a spiral groove formed on the inner peripheral surface of the tip surface of the sensor base. A spring is housed, and a screw that is screwed into the spiral groove is formed on the outer peripheral surface of the base portion of each probe, and the base portion of each probe is inserted into each hole, and The probe is a two-dimensional vector magnetometer that is urged by the spring so that its tip protrudes from each hole.

According to the first aspect of the present invention, the two-dimensional vector magnetism measuring apparatus has two coils whose angle formed by each winding direction is 90 °. Therefore, for example, the magnetic field strength in the X direction and the Y direction of a sample such as an electromagnetic steel sheet can be detected.
The two-dimensional vector magnetometer has four probes. These probes protrude from the front end surface of the sensor base with the same length so as to be located at the apex of the rectangle. Of these, two sets of measuring units are configured by using two probes at diagonal positions as one set of measuring units. As a result, the magnetic flux density and magnetic field strength in the X direction and Y direction of the sample can be measured.
When measuring the magnetic flux density, each probe is connected to the corresponding wiring at a position close to the tip of the probe, that is, at the tip surface of the sensor base. Thus, by measuring the magnetic flux density at a position close to the sample, the measurement error can be reduced as compared with the conventional case.

In addition, a spiral groove is formed in the four holes formed in the sensor base, and a screw that can be screwed into the groove is formed on the outer peripheral surface of the base portion of the probe. Therefore, the negative pressure generating means is operated to make negative pressure on the suction recess (depressed space) formed on the suction surface of the vacuum suction table. After that, the negative pressure state is maintained, and the sample whose back surface is in contact with the tip of each probe is pushed in the direction of the sensor base against the biasing force of each spring, and finally the back surface is adsorbed. The sample is vacuum-sucked to a vacuum suction table as a surface. Meanwhile, the four probes inserted into the four holes are pressed by the sample in the depth direction of each hole. Thus, the threaded probe is pushed into the holes while rotating with the spiral groove as a guide. During this pressing, the tip of each probe remains pressed on the back surface of the sample. As a result, the probe breaks the insulating coating and penetrates it, and each probe can be brought into contact with the back surface of the sample.
Further, when the operation of the negative pressure generating means is stopped and the pressing of each probe by the sample is released, the probe is reversely rotated by the urging force (spring force) of the spring and returned to the state before the pressing.
This configuration eliminates the need for drilling the sample and winding the enamel wire around the hole, which was performed when measuring the magnetic flux density using the conventional probe coil method, and measuring the magnetic flux density using the probe method. The removal of the insulating film and the management of the load on the probe, which are sometimes performed, are also unnecessary. In addition, changes in the magnetic properties of the sample due to these perforations and removal of the insulating coating can be suppressed. Further, the measurement can be performed only by adsorbing the sample to the vacuum adsorption table, and the preparation of the sample and the setting of the measuring instrument can be simplified.

As the sample, for example, an electromagnetic steel plate, an amorphous metal, or the like can be adopted.
As a material of the vacuum suction table, for example, non-magnetic materials such as alumina ceramics and PEEK (Polyetherherketone) can be employed.
As the shape of the vacuum suction table in plan view, for example, any shape other than a triangle, a quadrilateral or more polygon, a circle, and an ellipse can be adopted.
The adsorption surface is, for example, the surface (upper surface) on the surface of the vacuum adsorption table on which the sample is adsorbed.
The shape of the suction recess is arbitrary. For example, when the suction recess is a groove, a linear shape, a rectangular ring shape, an annular shape, or an elliptical shape can be adopted as the shape in plan view. Further, when the suction recess is a spot-like recess, the shape of the suction recess in a plan view can be, for example, a circle, an ellipse, a polygon more than a triangle, and the like.
Furthermore, as a cross-sectional shape orthogonal to the length direction of the suction recess, for example, a rectangular shape, a semicircular shape, a U shape, a V shape, or the like can be adopted. The number of suction recesses formed on the suction surface may be one or plural. A gasket made of rubber (silicone rubber or the like) or soft synthetic resin (sponge or the like) may be provided around the adsorption surface in order to increase the degree of adhesion with the sample when the sample is adsorbed.

As the negative pressure generating means, for example, various vacuum devices (vacuum suction devices) can be employed.
The probe is provided to determine the magnetic flux density in the sample. After bringing the probe into contact with the conductive plate-like sample, the sample is AC-excited. At that time, an eddy current is generated in the sample. By measuring this eddy current, the magnetic flux density can be calculated.

により求めることができる。 The coil is provided to determine the magnetic field strength in the sample. When the sample is AC-excited, it is induced from the magnetic field on the surface of the sample, and electricity flows through the coil. By measuring the voltage, the magnetic field strength can be calculated.
In the case of the cross-sectional area Sc of the lead wire, the electric voltage Vc flowing through the coil having N turns, the effective cross-sectional area Sp [m ² ] of the probe, and the potential difference Vp [V] between the probes, the magnetic flux density B between the probes and Magnetic field strength H is

It can ask for.

Further, a flexible substrate may be provided on the front end surface of the sensor base, and a conductor pattern for electrically connecting the probe and the voltage detection unit may be formed on the flexible substrate.
As the material of the flexible substrate, phenol, epoxy, polyimide, polystyrene, or the like can be used. Preferred are polyimide and polystyrene. These materials have low dielectric loss and can reduce the influence of noise caused by the substrate.
The two coils can be formed of enameled wires having an outer diameter of 0.03 mm or less. For this reason, even if the number of turns of the coil increases, the coil does not increase in size, and as a result, the magnetic measurement sensor can be reduced in size.

According to the first aspect of the present invention, spiral grooves are formed in the four holes formed in the sensor base, and screws that can be screwed into the grooves are provided on the outer peripheral surface of the base portion of each probe. Is formed. Therefore, the negative pressure generating means generates negative pressure on the suction concave portion of the suction surface and presses the sample against the urging force of the spring, whereby the sample is vacuum-sucked on the vacuum suction table with the back surface as the suction surface. Until this adsorption is completed, the screwed probe is pushed into the inner part of each hole while rotating with a spiral groove as a guide. As a result, the probe breaks the insulating coating and penetrates it, and each probe contacts the back surface of the sample.
This eliminates the need for perforating the sample and winding the enamel wire around the hole, which was performed when measuring the magnetic flux density by the conventional probe coil method, and is performed when measuring the magnetic flux density by the probe method. In addition, it is not necessary to remove the insulating film and manage the load on the probe. In addition, it is possible to suppress changes in the magnetic properties of the sample due to these perforations and removal of the insulating coating. Further, the measurement can be performed only by adsorbing the sample to the vacuum adsorption table, and the preparation of the sample and the setting of the measuring instrument can be simplified.

It is a perspective view of the use start state of the two-dimensional vector magnetism measuring device concerning Example 1 of this invention. It is a top view of the use condition of the two-dimensional vector magnetism measuring device concerning Example 1 of this invention. It is a disassembled perspective view of the sensor part of the two-dimensional vector magnetism measuring apparatus concerning Example 1 of this invention. It is a longitudinal cross-sectional view of the sensor part of the two-dimensional vector magnetism measuring apparatus which concerns on Example 1 of this invention. It is a top view of the sensor part of the two-dimensional vector magnetism measuring device concerning Example 1 of this invention. It is a principal part expanded sectional view which shows the insertion state of the probe to the hole formed in the sensor base of the two-dimensional vector magnetism measuring apparatus which concerns on Example 1 of this invention. It is a perspective view which shows the relationship between the probe tip part of the probe of the two-dimensional vector magnetism measuring apparatus which concerns on Example 1 of this invention, and a flexible substrate. It is a top view of the vacuum suction table of the two-dimensional vector magnetism measuring apparatus concerning Example 1 of this invention. It is S9-S9 sectional drawing of FIG. 8 in the use start state of a vacuum suction table.

  Examples of the present invention will be specifically described below.

1 and 2, reference numeral 10 denotes a two-dimensional vector magnetic measurement apparatus according to Embodiment 1 of the present invention. The two-dimensional vector magnetic measurement apparatus 10 is arranged in a magnetized portion M and a central space of the magnetized portion M. And a sensor unit S.
The magnetizing portion M has a pair of exciting yokes 101x opposite to each other in the X direction (lateral direction in FIG. 1) and a pair of exciting yokes 101y opposite to the Y direction (longitudinal direction in FIG. 1). The exciting yokes 101x and 101y are magnetically coupled by a square yoke 102 in plan view. The exciting coil 103 is wound around each exciting yoke 101x, 101y. In a space surrounded by the exciting yokes 101x and 101y, a rectangular electromagnetic steel plate (sample) 100 for measurement is arranged in plan view. In order to concentrate the magnetic flux on the electromagnetic steel sheet 100, the tips of the exciting yokes 101x and 101y are tapered.

Next, the sensor unit S will be described with reference to FIGS.
The sensor unit S has a sensor base B made of a plastic block body as a main body, and a vacuum suction table 30 on which an insulating steel plate 100 with insulating coating is sucked is provided around the sensor base B.
The sensor base B has a base portion fitted into a main base 11 having a rectangular parallelepiped that is long in the vertical direction and a fitting recess 11a formed at a center portion of a tip surface (one end surface in the length direction) of the in base 11. 11 and a sub-base 12 made of the same material.

  A circular cable insertion through hole 11c is formed in the inner wall of the fitting recess 11a of the main base 11 in a plan view through the center portion of the upper surface and the center portion of the lower surface. The fitting recess 11a is square when viewed from the front. The sub-base 12 is a rectangular cylinder, and its internal space is communicated with the cable insertion through hole 11c. The sub-base 12 has a length such that its tip protrudes outward in a state where the base is fitted in the fitting recess 11a. A flexible substrate 14, which is a square thin frame member in plan view, is placed on the distal end surface of the sub-base 12. A rectangular tube-shaped coil base 15 is housed in the internal space at the tip of the sub-base 12. A coil 16 is provided at the tip of the coil base 15.

  Four probe insertion holes 12a are formed at the four corners of the sub-base 12 through the upper surface (tip surface) and the lower surface (original surface). Further, in the back wall of the fitting recess 11a of the main base 11, the corresponding position of the probe insertion hole 12a can communicate with the corresponding probe insertion hole 12a and the inner wall of the tip part is spiral. Another probe insertion hole 11b in which a groove (inner thread) 11e is formed is formed. Each of the different probe insertion holes 11b does not penetrate the upper and lower surfaces of the back wall of the fitting recess 11a. A coil-shaped spring 11d that constantly urges probes 13a to 13d, which will be described later, is housed in the back of each of the separate probe insertion holes 11b.

  In each of the probe insertion holes 11b and 12a communicated, four probes 13a to 13d project the needle tip portion outward by the same length by the urging force of each spring 11d, and the length thereof. It is inserted to be movable in the direction. Each probe 13a-13d is four metal rods of the same length. Each of the probes 13a to 13d is provided in the sensor base B through the probe insertion holes 11c and 12a so as to be positioned at the apex of a quadrangle whose diagonal is 90 degrees. The tips of the probes 13a to 13d are smaller in diameter than the main body portions of the probes 13a to 13d. Thereby, an annular step portion exists between the tip portion of each probe 13a to 13d and the base portion of the probe tip portion. An annular (inner flange-shaped) stopper portion 11f that prevents the probes 13a to 13d from jumping out from the probe insertion holes 11a by hooking the stepped portion at the tip of the sub-base 12 is provided. It is integrally formed (FIG. 6).

A screw (external screw) 13e is formed on the outer peripheral surface of the base portion of each probe 13a to 13d. Each screw 13e is loosely screwed into the spiral groove 11e of the probe insertion hole 11b. The term “loosely screwed” as used herein means that the probes 13a to 13d can move forward (upward) while rotating in the probe insertion holes 11b and 12a by the biasing force (push-up force) of the spring 11d. The state where it is screwed together. In order to “loosely engage”, a lubricant (such as grease) that smoothly moves the probes 13a to 13d is supplied between the screw 13e of each probe 13a to 13d and the groove 11e. Further, if the screw 13e and the groove 11e are not in a spiral surface contact but in a spiral line contact, the resistance to the screw 13e is further reduced, and the movement in the axial direction is accompanied by the rotation of each probe 13a to 13d. Will be smoother.
Of the four probes 13a to 13d, one probe 13a and a probe 13b existing at a diagonal position are used as a set to form one measuring unit 13A (FIG. 7). The remaining probes 13c and 13d are used as the other measurement unit 13B. That is, one measurement unit 13A is used to measure the magnetic properties in the horizontal direction (X direction) of the electromagnetic steel sheet 100 (80 mm in length and thickness and 0.3 mm in thickness) that is the measurement target, and the other measurement unit. 13B is used for measuring the magnetic properties in the longitudinal direction (Y direction) of the electromagnetic steel sheet 100.

  As shown in FIGS. 3 and 7, the flexible substrate 14 has four wirings formed by etching or metal plating the copper foil on the surface of a copper clad plate obtained by bonding a copper foil to a polyimide film. is there. These two wirings constitute one set of wiring portions 14c and 14d, thereby forming two sets of wiring portions 14c and 14d. One end of the wiring of one wiring part 14c is connected to the probes 13a and 13b that constitute one measuring part 13A. Specifically, the flexible substrate 14 has four holes 14e provided so as to be located at the vertices of a quadrangle whose diagonal is 90 degrees, and the probe 13a is provided in these holes 14e. , 13b are respectively inserted. The probes 13a and 13b and the wiring are connected by soldering at a position where both the probes 13a and 13b are in contact with one end of the wiring. Similarly, one end of the wiring of the other wiring portion 14d is connected to the probes 13c and 13d constituting the one measuring portion 13B. The other end of the wiring of the one wiring portion 14c is connected to a voltmeter (not shown).

  As shown in FIG. 5, the coil 16 is formed by winding a 0.03 mm lead wire on the outer peripheral surface of a square ceramic plate in plan view. The coil 16 includes a Hx coil 16a wound in a square horizontal direction and a Hy coil 16b wound in a square vertical direction. That is, the angle formed by the winding direction of the Hx coil 16a and the winding direction of the Hy coil 16b is 90 °.

The sensor unit S configured as described above is assembled as follows.
As shown in FIG. 3, first, the sub base 12 is fitted into the fitting recess 11a of the main base 11, and the probes 13a to 13d are inserted into the four communicating probe insertion holes 11b and 12a. Thereafter, the tip portions of the probes 13 a to 13 d are inserted into the holes 14 e formed in the flexible substrate 14 and brought into contact with the tip surface of the sub-base 12. Next, one end of the wiring formed on the flexible substrate 14 is fixed by soldering to a place where it contacts the probes 13a to 13d. The other end of the wiring is connected to a voltmeter provided outside using cable insertion through holes 11 b and 12 a formed in the main base 11 and the sub base 12.
Thereafter, the coil base 15 is attached to the sub base 12, and the coil 16 is attached to the coil base 15. The lead wire of the coil 16 passes through the cable insertion through holes 11b and 12a and is connected to a voltmeter (not shown). Thus, the sensor unit S is assembled.

Next, the vacuum suction table 30 will be described with reference to FIGS.
The vacuum suction table 30 is a thick frame member having a square shape in plan view made of alumina-based ceramic, which is a nonmagnetic material, and an inner space having a square shape in front view through the front and back surfaces is formed at the center. Has been. In the inner space, the tip of the sub-base 12 of the sensor unit S is fitted. In this fitted state, the tip surface of the sub-base 12 and the suction surface (upper surface) 30a of the vacuum suction table 30 are in the same plane.
The suction surface 30a is formed with a square annular suction groove (suction recess) 31 in plan view at an intermediate position between the inner periphery and the outer periphery of the vacuum suction table 30. One end of a suction path 32 formed inside the vacuum suction table 30 is communicated with a part of the back wall of the suction groove 31. Via this suction path 32 and a suction pipe 33 communicated with the other end of the suction path 32, the suction groove 31 communicates with a suction portion of a vacuum device (negative pressure generating means) 34 disposed outside. (FIG. 9).
Furthermore, a gasket 35 made of silicone rubber having a square shape in plan view, used when adsorbing the back surface of the electromagnetic steel sheet 100 to the inner peripheral edge and the outer peripheral edge, is attached to each of the suction surfaces 30a. It is embedded in a state protruding from the suction surface 30a.

Next, with reference to FIGS. 1-6, the measuring method of the two-dimensional magnetic characteristic of the electromagnetic steel plate 100 by the two-dimensional vector magnetism measuring apparatus 10 based on Example 1 of this invention is demonstrated.
First, the vacuum device 34 is operated, and the electromagnetic steel sheet 100 as a sample is sucked and fixed to the vacuum suction table 30 while pressing the probes 13a to 13d. Thereafter, electric power is supplied to each excitation coil 103, and the electromagnetic steel sheet 100 is AC-excited (FIGS. 1 and 2). In this state, in-plane two-dimensional magnetic characteristics of the electromagnetic steel sheet 100 are obtained by measuring the magnetic flux density vector B and the magnetic field vector H in the X direction and the Y direction. Hereinafter, this measurement method will be described in detail.
First, the tip of each of the probes 13a to 13d is brought into contact with the back surface of the horizontally disposed electromagnetic steel sheet 100, and this state is maintained and the electromagnetic steel sheet 100 is pushed downward (sensor base B side). At this time, the probe bases 13a to 13d are rotated in a predetermined direction with their needle tips abutting against the back surface of the electromagnetic steel plate 100 and the screw 13e and the spiral groove 11e being screwed together. (Inside the probe insertion holes 11b, 12a). Thus, since each probe tip 13a-13d rotates in the state in which each tip part was pressed on the back surface of the electromagnetic steel sheet 100, the insulation coating of the back surface of the electromagnetic steel sheet 100 is penetrated by each needle point part, Each probe 13 a to 13 d is in contact with a conductive portion of the electromagnetic steel plate 100.

  The electromagnetic steel plate 100 subjected to alternating current excitation generates an eddy current and a magnetic field on the surface thereof. If the electromagnetic steel plate 100 contacts the probes 13a to 13d, electricity due to eddy current flows between the probes 13a to 13d. The voltage is measured with a voltmeter. At the same time, electricity flows through the coil due to the magnetic field on the surface. The electricity voltage is measured with a voltmeter. By calculating the voltage measured by these voltmeters using an arithmetic device (not shown), the magnetic flux density and magnetic field strength between the probes 13a to 13d of the electromagnetic steel sheet 100 can be obtained.

This eliminates the need for drilling the magnetic steel sheet 100 and winding the enamel wire around the hole, which has been performed at the time of measuring the magnetic flux density by the conventional probe coil method, and at the time of measuring the magnetic flux density by the probe method. It is also unnecessary to remove the insulating film and manage the load on the probe. In addition, it is possible to suppress changes in the magnetic properties of the electrical steel sheet 100 due to these perforations and removal of the insulating coating. Further, the measurement can be performed only by adsorbing the electromagnetic steel sheet 100 to the vacuum suction table, and the preparation of the electromagnetic steel sheet 100, the setting of the measuring device, and the like can be simplified.
As a method of penetrating the insulating coating on the back surface of the electromagnetic steel sheet 100, for example, the main base 11 is moved upward with the sub base 12 as a guide in a state where the electromagnetic steel sheet 100 is in contact with the needle tips of the probes 13a to 13d ( Even if it is slid forward, the probes 13a to 13d can be rotated in a predetermined direction with the screw 13e and the groove 11e screwed together.

10 Two-dimensional vector magnetometer,
11b, 12a Probe insertion hole (hole),
11d spring,
11e spiral groove,
13A, 13B measuring section,
13a-13d probe,
13e screw,
14c wiring,
16 coils,
30 vacuum suction table,
30a adsorption surface,
31 Adsorption recess,
34 Vacuum device (negative pressure generating means),
100 electromagnetic steel sheet (sample),
B Sensor base.

Claims (1)

A sensor base with a flat tip surface;
A vacuum suction table provided around the tip of the sensor base and having a suction recess formed on a suction surface on which a measurement sample is sucked;
A negative pressure generating means for making the suction concave portion negative pressure and for adsorbing the sample to the suction surface;
Four probes that protrude from the tip surface of the sensor base with the same length so that each probe is positioned at the apex of a quadrangle, and each tip is in contact with the back surface of the sample;
A two-dimensional vector magnetometer comprising two coils held at a tip surface of the sensor base so that an angle formed by a winding direction is 90 °,
By configuring the two probes arranged diagonally as one set of measurement units, two sets of measurement units are configured,
The two probes of these measuring units are connected to one end of two wires at the tip surface of the sensor base,
The other ends of these wires are connected to the voltage detection unit,
Four holes with spiral grooves formed on the inner peripheral surface are formed in the tip surface of the sensor base,
Each hole contains a spring,
On the outer peripheral surface of the base part of each probe, a screw that is screwed into the spiral groove is formed,
A two-dimensional vector magnetic measurement apparatus in which a base portion of each probe is inserted into each hole, and each probe is biased by the spring so that a tip of the probe protrudes from each hole.

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