JP2016211862A - Magnetic characteristic detection device, and magnetic characteristic detection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic characteristic detection device with improved detection accuracy of magnetic characteristics of a magnetic member.SOLUTION: A magnetic characteristic detection device 1 comprises: probes 21, 23 for outputting magnetic flux density signals according to magnetic flux density in a magnetic member 8; a hall element 31 and a coil 32 provided between the probe 21 and the probe 23, and for outputting magnetic field strength signals according to magnetic field strength in the vicinity of the magnetic member 8; a magnetic field strength calculation part 40 for calculating magnetic field strength in the magnetic member 8 based on the magnetic field strength signals; and a magnetic characteristic calculation part 45 for calculating magnetic characteristics of the magnetic member 8 based on the magnetic field strength calculated by the magnetic field strength calculation part 40, and the magnetic flux density signals outputted by the probes 21, 23. Output signal lines 311, 312, which electrically connect the hall element 31 and the coil 32 to the magnetic field strength calculation part 40, send a composite signal of the magnetic field strength signal outputted by the hall element 31 and the magnetic field strength signal outputted by the coil 32 to the magnetic field strength calculation part 40.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a magnetic property detection apparatus and a magnetic property detection method for detecting magnetic properties of a magnetic member.

  2. Description of the Related Art Conventionally, a magnetic characteristic detection device that detects magnetic characteristics of a magnetic member such as an iron core provided in an electric motor is known. In the magnetic property detection device, the magnetic property of the magnetic member is calculated based on the relationship between the magnetic flux density and the magnetic field strength at the local part of the magnetic member. For example, in Patent Document 1, two probes that can be in contact with the surface of a magnetic member while maintaining a constant interval, and a plurality of probes that are arranged between the two probes in a direction away from the magnetic member. Between the magnetic flux density in the magnetic member detected by the two probes and the magnetic field intensity in the vicinity of the magnetic member detected by the plurality of Hall elements Describes a magnetic property detection device including a magnetic property calculation unit for calculating the magnetic property of the magnetic member.

JP 2013-238453 A

  In the magnetic characteristic detection device described in Patent Document 1, an electric power supply line that transmits electric power supplied to the Hall element and an output signal line that transmits an output signal output from the Hall element to each of a plurality of Hall elements are electrically connected. Connected. Since the power supply line and the output signal line are provided on the board on which the Hall element is mounted, the size of the board provided with the Hall element increases between the two probes, and the distance between the two probes is compared. Become longer. As the distance between the two probes increases, the spatial resolution of the magnetic flux density detected by the two probes decreases. For this reason, the accuracy of the magnetic characteristics of the magnetic member calculated based on the relationship between the magnetic flux density and the magnetic field strength is lowered.

  An object of the present invention is to provide a magnetic property detection apparatus that improves the detection accuracy of the magnetic property of a magnetic member.

The present invention is a magnetic property detection device, and includes a plurality of magnetic flux density detection units, a plurality of magnetic field strength detection units, a first calculation unit, a second calculation unit, and an output signal line.
The magnetic flux density detector is provided so as to be able to contact the surface of the magnetic member, detects the magnetic flux density in the magnetic member, and outputs a magnetic flux density signal corresponding to the detected magnetic flux density.
The magnetic field strength detection unit is arranged between a plurality of magnetic flux density detection units in a direction away from the surface of the magnetic member, and detects and detects the magnetic field strength near the surface of the magnetic member with which the magnetic flux density detection unit can contact. A magnetic field strength signal corresponding to the magnetic field strength is output.
The first calculation unit can calculate the magnetic field strength in the magnetic member based on a plurality of magnetic field strength signals output from the plurality of magnetic field strength detection units.
The second calculation unit is electrically connected to the first calculation unit and the magnetic flux density detection unit, and sets the magnetic field strength in the magnetic member calculated by the first calculation unit and the magnetic flux density in the magnetic member detected by the magnetic flux density detection unit. Based on this, the magnetic characteristic of the magnetic member is calculated.
The output signal line electrically connects at least two or more magnetic field strength detection units and the first calculation unit among the plurality of magnetic field strength detection units, and outputs at least two or more magnetic field strength detection units. A composite signal of the intensity signal is transmitted to the first calculation unit.

  In the magnetic property detection device of the present invention, a plurality of magnetic field strength detection units are provided between the plurality of magnetic flux density detection units. The plurality of magnetic field strength detection units transmit the magnetic field strength at the position where each magnetic field strength detection unit is provided to the first calculation unit as a magnetic field strength signal corresponding to the magnetic field strength. In the magnetic property detection apparatus of the present invention, the output signal line electrically connected to at least two or more magnetic field strength detection units is a plurality of magnetic field strength signals output by the at least two or more magnetic field strength detection units. It is provided so that the synthesized signal can be transmitted to the first calculator. As a result, a part of the output signal line provided in each of the plurality of magnetic field strength detection units is not necessary, and the space for providing the output signal line can be reduced. Therefore, the magnetic property detection apparatus of the present invention can detect the distribution of the magnetic flux density in a relatively narrow region by shortening the distance between the plurality of magnetic flux density detectors, so that the spatial resolution of the magnetic flux density is improved, The detection accuracy of the magnetic characteristics of the magnetic member can be improved.

It is a schematic diagram of the magnetic characteristic detection apparatus by 1st embodiment of this invention. It is a fragmentary sectional view of the magnetic characteristic detection apparatus by 1st embodiment of this invention. It is the III-III sectional view taken on the line of FIG. It is a schematic diagram explaining the calculation method of the magnetic field intensity in the magnetic characteristic detection apparatus by 1st embodiment of this invention. It is a characteristic view explaining the calculation method of the magnetic field intensity in the magnetic characteristic detection apparatus by 1st embodiment of this invention. It is a schematic diagram explaining the calculation method of the magnetic field intensity in the magnetic characteristic detection apparatus by 2nd embodiment of this invention. It is a schematic diagram explaining the calculation method of the magnetic field intensity in the magnetic characteristic detection apparatus by 2nd embodiment of this invention, Comprising: It is a schematic diagram which shows a state different from FIG. It is a schematic diagram of the magnetic characteristic detection apparatus by 3rd embodiment of this invention. It is a schematic diagram explaining the calculation method of the magnetic field intensity in the magnetic characteristic detection apparatus by 3rd embodiment of this invention. It is a fragmentary sectional view of the magnetic characteristic detection apparatus by 4th embodiment of this invention.

Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
A magnetic property detection apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

Initially, the structure of the magnetic characteristic detection apparatus 1 is demonstrated based on FIGS.
The magnetic characteristic detection apparatus 1 includes a support unit 10, a magnetic flux sensor 20, a magnetic field sensor 30, power supply lines 313 and 314, output signal lines 311 and 312, a magnetic field strength calculation unit 40 as a “first calculation unit”, A magnetic characteristic calculation unit 45 as a “calculation unit” is provided. The magnetic characteristic detection device 1 detects the magnetic flux density in the magnetic member 8 and the magnetic field sensor 30 in which the magnetic flux sensor 20 detects a local iron loss of the magnetic member 8 made of a magnetic material such as an automobile motor stator. It calculates from the area of the hysteresis loop created based on the relationship with the magnetic field intensity in the magnetic member 8 to be.

  The support portion 10 is formed of a first support member 11, a second support member 12, a third support member 13, a movable member 14, a coil spring 15, and the like.

  The first support member 11 is a substantially rod-shaped member provided at a position farthest from the magnetic member 8 in the support portion 10. The first support member 11 has an accommodation hole 111 for accommodating the end of the movable member 14 so as to be able to reciprocate in the center on the magnetic member 8 side.

  The second support member 12 is a bottomed cylindrical member provided on the radially outer side of the first support member 11 and the magnetic member 8 side. The second support member 12 forms an accommodation space 100 in which the movable member 14 is accommodated so as to be capable of reciprocating together with the first support member 11. The bottom portion of the second support member 12 on the magnetic member 8 side has a plurality of insertion holes 121 through which the magnetic flux sensor 20 is inserted.

  The third support member 13 is a bottomed cylindrical member provided on the radially outer side of the bottom portion of the second support member 12 and on the magnetic member 8 side. The third support member 13 has a plurality of insertion holes 131 that are formed so as to be able to communicate with the insertion holes 121 and through which the magnetic flux sensor 20 is inserted. A base material 16 on which the magnetic field sensor 30 is mounted is provided at a portion that is substantially in the center of the third support member 13 and surrounded by the plurality of insertion holes 131.

The movable member 14 is accommodated in the accommodation space 100 so as to be capable of reciprocating. The movable member 14 is formed of a shaft portion 141, a flange portion 142, and the like. The end of the shaft 141 opposite to the magnetic member 8 is received in the receiving hole 111 while sliding on the inner wall of the receiving hole 111. A flange portion 142 is provided on the magnetic member 8 side of the shaft portion 141. The flange portion 142 has the same size as the inner diameter of the accommodation space 100. Accordingly, the movable member 14 reciprocates while the outer wall of the shaft portion 141 slides on the inner wall of the accommodation hole 111 and the outer wall of the flange portion 142 slides on the inner wall of the accommodation space 100. An end surface 143 of the flange portion 142 on the magnetic member 8 side is formed so as to be able to contact the magnetic flux sensor 20.

  The coil spring 15 is provided on the outer side in the radial direction of the shaft portion 141. One end of the coil spring 15 is in contact with the end surface opposite to the magnetic member 8 of the flange portion 142. The other end of the coil spring 15 is The first support member 11 is in contact with the end surface of the magnetic member 8 side. The biasing force of the coil spring 15 acts in a direction in which the first support member 11 and the movable member 14 are separated from each other. Accordingly, the coil spring 15 can bias the magnetic flux sensor 20 toward the magnetic member 8 via the movable member 14.

  The magnetic flux sensor 20 is composed of a plurality of probes. In the first embodiment, the magnetic flux sensor 20 has four probes 21, 22, 23, and 24 as “magnetic flux density detectors” as shown in FIG. 3. The probes 21, 22, 23, and 24 are provided so as to come into contact with the surface 9 of the magnetic member 8. The probes 21, 22, 23, 24 are provided so that the tips are located at the apexes of the rhombus on the same plane when not in contact with the magnetic member 8. The probes 21, 22, 23, 24 are electrically connected to the magnetic characteristic calculator 45 by signal lines (such as signal lines 211, 231 shown in FIG. 1). In the first embodiment, the two probes 21 and 23 detect one component of the magnetic flux density (component in the imaginary line VL3 direction shown in FIG. 3). The two probes 22 and 24 detect the other component of the magnetic flux density (component in the direction of the imaginary line VL1 shown in FIG. 3).

  The magnetic field sensor 30 includes a hall element and a coil. In the first embodiment, Hall elements 31 and 33 as “magnetic field strength detection units” and coils 32 and 34 as “magnetic field strength detection units” are configured.

As shown in FIGS. 2 and 3, the Hall elements 31 and 33 are respectively provided on different surfaces of the base material 16.
As shown in FIG. 3, the Hall element 31 is mounted on a substrate 161 on a surface parallel to the virtual line VL <b> 1 of the base material 16. The hall element 31 is electrically connected to power supply lines 313 and 314 that supply power to the hall element 31 and output signal lines 311 and 312 formed on the substrate 161. The power supply lines 313 and 314 are connected to the Hall element 31 from a direction perpendicular to the surface 9 of the magnetic member 8 with respect to the Hall element 31. The output signal lines 311 and 312 are connected to the Hall element 31 from a direction parallel to the surface 9 of the magnetic member 8 with respect to the Hall element 31.

  When power is supplied, the Hall element 31 detects one component of the magnetic field strength at the position where the Hall element 31 is provided (component in the direction of the virtual line VL3 shown in FIG. 3). The hall element 31 transmits a magnetic field strength signal corresponding to the detected magnetic field strength to the magnetic field strength calculator 40 via the output signal lines 311 and 312. The output signal line 311 and the output signal line 312 are formed so as to partially overlap (region 315 shown in FIG. 2).

  As shown in FIG. 3, the Hall element 33 is mounted on a substrate 162 on a surface parallel to the virtual line VL <b> 3 of the base material 16. The Hall element 33 is electrically connected to a power supply line for supplying power to the Hall element 33 and output signal lines 331 and 332 formed on the substrate 162. The power supply line of the hall element 33 is connected to the hall element 33 from a direction perpendicular to the surface 9 of the magnetic member 8 with respect to the hall element 33. The output signal lines 331 and 332 are connected to the Hall element 33 from a direction parallel to the surface 9 of the magnetic member 8 with respect to the Hall element 33.

  When power is supplied, the hall element 33 detects the other component of the magnetic field strength at the position where the hall element 33 is provided (component in the direction of the virtual line VL1 shown in FIG. 3). The hall element 33 transmits a magnetic field strength signal corresponding to the detected magnetic field strength to the magnetic field strength calculation unit 40 via the output signal lines 331 and 332. The output signal line 331 and the output signal line 332 are formed so as to partially overlap (region 335 shown in FIG. 2).

The two coils 32 and 34 are arranged so as to line up with the Hall elements 31 and 33 on the side opposite to the magnetic member 8 with respect to the Hall elements 31 and 33.
The coil 32 is formed from a part of the output signal lines 311 and 312 that are provided on the opposite side of the Hall element 31 from the magnetic member 8 at a predetermined interval (two-dot chain line 32 in FIG. 2). The coil 32 detects one component of the magnetic field strength in the region surrounded by the two-dot chain line 32 at a position farther from the magnetic member 8 than the Hall element 31, and outputs a magnetic field strength signal corresponding to the detected magnetic field strength. To do. The magnetic field strength signal output from the coil 32 and the magnetic field strength signal output from the Hall element 31 are transmitted to the magnetic field strength calculation unit 40 via the output signal lines 311 and 312.

  The coil 34 is formed of a part of output signal lines 331 and 332 provided at a predetermined interval on the opposite side of the Hall element 33 from the magnetic member 8 (two-dot chain line 34 in FIG. 2). The coil 34 detects the other component of the magnetic field strength in the region surrounded by the two-dot chain line 34 at a position farther from the magnetic member 8 than the Hall element 33, and outputs a magnetic field strength signal corresponding to the detected magnetic field strength. To do. The magnetic field strength signal output from the coil 34 and the magnetic field strength signal output from the Hall element 33 are transmitted to the magnetic field strength calculation unit 40 through the output signal lines 331 and 332.

  The magnetic field strength calculation unit 40 includes a power supply 41, a signal processing unit 42, a calculation unit 43, and the like. The power source 41 is electrically connected to the Hall elements 31 and 33. The signal processing unit 42 is a so-called two-phase lock-in amplifier that can detect the phase of an input signal, and is electrically connected to the output signal lines 311, 312, 331, 332 and the reference signal line 420. ing. The calculation unit 43 is electrically connected to the signal processing unit 42 via signal lines 421 and 422. The magnetic field strength calculation unit 40 calculates the magnetic field strength in the magnetic member 8 based on the magnetic field strength at the position where the Hall elements 31 and 33 and the coils 32 and 34 are provided. Details of the operation of the magnetic field intensity calculation unit 40 will be described later.

  The magnetic characteristic calculation unit 45 is electrically connected to the magnetic field strength calculation unit 40 via the signal line 401. Further, the magnetic characteristic calculation unit 45 is electrically connected to the magnetic flux sensor 20 via the signal lines 211 and 231. The magnetic characteristic calculation unit 45 creates a hysteresis loop based on the magnetic field strength signal output from the magnetic field strength calculation unit 40 and the magnetic flux density signal output from the magnetic flux sensor 20 and calculates the magnetic characteristics of the magnetic member 8.

  Next, the operation of the magnetic property detection apparatus 1 will be described with reference to FIGS.

First, an external magnetic field having a predetermined value is applied to the magnetic member 8 to magnetize the magnetic member 8, and then the external magnetic field is removed. Thereby, the magnetic member 8 is polarized in accordance with the magnetic characteristics of the magnetic member 8, so that a magnetic field is formed in the magnetic member 8.
At this time, an induced voltage is generated in the probe 21 and the probe 23 in contact with the surface 9 of the magnetic member 8 and in the probe 22 and the probe 24 due to a change in magnetic flux density in the magnetic member 8. . The magnetic flux sensor 20 outputs the induced voltage generated in the probes 21, 22, 23, 24 to the magnetic characteristic calculation unit 45 as a magnetic flux density signal.

  Further, when a magnetic field is formed in the magnetic member 8, the power supply 41 of the magnetic field strength calculation unit 40 supplies power to the Hall elements 31 and 33. The Hall elements 31 and 33 to which power is supplied detect the magnetic field intensity at the position where the Hall elements 31 and 33 are provided, and the electric power corresponding to the magnetic field intensity is output via the output signal lines 311, 312, 331 and 332. The signal is output to the signal processing unit 42 of the magnetic field strength calculation unit 40. The coils 32 and 34 detect the magnetic field intensity at the position where the coils 32 and 34 are provided, and calculate the magnetic field intensity of the electric signal corresponding to the magnetic field intensity via the output signal lines 311, 312, 331 and 332. The signal is output to the signal processing unit 42 of the unit 40. At this time, the output signal lines 311 and 312 transmit a combined signal of the magnetic field strength signal output from the coil 32 and the magnetic field strength signal output from the Hall element 31. The output signal lines 331 and 332 transmit a combined signal of the magnetic field strength signal output from the coil 34 and the magnetic field strength signal output from the Hall element 33.

The signal processing unit 42 separates the magnetic field strength signals corresponding to the magnetic field strengths detected by the Hall elements 31 and 33 and the coils 32 and 34 from the magnetic field strength signals transmitted by the output signal lines 311, 312, 331 and 332. Here, based on FIG. 4, a signal processing method in the signal processing unit 42, taking as an example a composite signal of the magnetic field strength signal of the Hall element 31 and the magnetic field strength signal of the coil 32 transmitted by the output signal lines 311 and 312. Will be explained.
As shown in FIG. 4, when the combined signal S10 of the magnetic field strength signal of the Hall element 31 and the magnetic field strength signal of the coil 32 is input to the signal processing unit 42, the signal processing unit 42 adds the reference signal line to the combined signal S10. The reference signal input by 420 is multiplied. Thereby, the magnetic field strength signal S11 of the Hall element 31 and the magnetic field strength signal S21 of the coil 32 are separated from the combined signal S10. The separated two magnetic field strength signals S11 and S12 are output to the calculation unit 43. Note that the combined signal S10 and the magnetic field strength signals S11 and S12 shown in FIG. 4 indicate time t on the horizontal axis and output voltage Vout on the vertical axis.

  The computing unit 43 calculates the magnetic field strength in the magnetic member 8 based on the plurality of magnetic field strength signals output from the signal processing unit 42. Here, a method for calculating the magnetic field strength in the magnetic member 8 based on the two magnetic field strength signals S11 and S21 shown in FIG. 4 will be described with reference to FIG.

  FIG. 5 is a characteristic diagram showing the relationship between the magnetic field strength in the polarized magnetic member 8 and the position of the magnetic member 8 in the depth direction. In FIG. 5, the horizontal axis indicates the magnetic field strength near and inside the polarized magnetic member 8, and the vertical axis indicates the position of the magnetic member 8 in the depth direction. In the horizontal axis of FIG. 5, the surface 9 of the magnetic member 8 is set to 0, the positive direction indicates the direction away from the surface 9 on the outer side of the magnetic member 8, and the negative direction indicates the surface on the inner side of the magnetic member 8. The direction away from 9 is shown. In FIG. 5, the relationship between the actual magnetic field strength and the position of the magnetic member 8 in the depth direction is indicated by a dotted line DL0. The true value of the magnetic field strength in the magnetic member 8 is the magnetic field strength Ms0 at the distance L0 on the inner side of the magnetic member 8 from the surface 9 of the magnetic member 8.

The magnetic field strength signal S11 of the Hall element 31 and the magnetic field strength signal S21 of the coil 32 output from the signal processing unit 42 are different positions in the direction away from the magnetic member 8, specifically, the center C31 of the Hall element 31 and The magnetic field intensity corresponds to the position of the center C32 of the coil 32 (see FIG. 2). Since the center C31 of the Hall element 31 is at a distance L31 from the surface 9 of the magnetic member 8 as shown in FIG. 2, the magnetic field intensity M31 detected by the Hall element 31 in FIG. 5 is plotted at the distance L31. (Point P31 in FIG. 5). Similarly, since the center C32 of the coil 32 is at a distance L32 from the surface 9 of the magnetic member 8 as shown in FIG. 2, the magnetic field intensity M32 detected by the coil 32 in FIG. Plotted (point P32 in FIG. 5). Based on the extrapolation line EL1 connecting the points P31 and P32 plotted on FIG. 5, the magnetic field strength Ms3 at the distance L0 in the internal direction of the magnetic member 8 from the surface 9 of the magnetic member 8 is calculated.
The calculation unit 43 performs the calculation as described above to calculate the magnetic field strength Ms3 that is one component of the magnetic field strength in the magnetic member 8. The calculation unit 43 performs the same for the Hall element 33 and the coil 34, and calculates one component of the magnetic field strength in the magnetic member 8. The calculation unit 43 outputs the calculated magnetic field strength to the magnetic characteristic calculation unit 45.

  The magnetic characteristic calculation unit 45 is a combination of the induced voltage generated in the probes 21, 22, 23, and 24 when the magnitude of the external magnetic field applied to the magnetic member 8 is changed and the magnetic field intensity output from the calculation unit 43. Based on the above, a hysteresis loop is formed. The magnetic characteristic calculator 45 obtains the iron loss of the magnetic member 8 from the size of the hysteresis loop.

  (A) The magnetic characteristic detection apparatus 1 according to the first embodiment is provided such that the Hall element 31 and the coil 32 for detecting the magnetic field strength and the Hall element 33 and the coil 34 are arranged in a direction away from the magnetic member 8. Output signal lines 311 and 312 for transmitting the magnetic field strength signal S11 of the Hall element 31 and the magnetic field strength signal S21 of the coil 32 are electrically connected to the Hall element 31 and the coil 32. Further, output signal lines 331 and 332 for transmitting the magnetic field strength signal of the Hall element 33 and the magnetic field strength signal of the coil 34 are electrically connected to the Hall element 33 and the coil 34. That is, in the magnetic characteristic detection apparatus 1 according to the first embodiment, the configuration capable of detecting two magnetic field strengths shares an output signal line, and a combined signal of the two magnetic field strength signals is calculated by a set of output signal lines. To the unit 43. Accordingly, the size of the substrates 161 and 162 on which the output signal lines are formed can be reduced as compared with the case where the output signal lines are provided in each of the Hall element and the coil. Therefore, the distance between the probe 21 and the probe 23 located on both sides of the substrate 161 and the distance between the probe 22 and the probe 24 located on both sides of the substrate 162 can be shortened. The spatial resolution of the magnetic flux density is improved, and the detection accuracy of the magnetic characteristics of the magnetic member 8 can be improved.

  (B) In the magnetic property detection device 1, a part of the output signal lines 311 and 312 of the Hall element 31 forms the coil 32. A part of the output signal lines 331 and 332 of the Hall element 33 forms a coil 34. The effect that a part of the output signal line of the Hall element forms a coil will be described based on FIG. 5 in comparison with a magnetic characteristic detection device having two Hall elements as a configuration capable of detecting the magnetic field strength.

In the magnetic characteristic detection device of the comparative example, two Hall elements are arranged in a direction away from the magnetic member 8. For this reason, depending on the size of the Hall element, the distance between the center of the Hall element closer to the magnetic member 8 and the center of the Hall element farther from the magnetic member 8 becomes longer than that of the magnetic property detection device 1. Specifically, as shown in FIG. 5, in the magnetic characteristic detection device of the comparative example, the center of the Hall element closer to the magnetic member 8 is set to the same position as the center C31 of the Hall element 31 provided in the magnetic characteristic detection device 1. If the distance from the center of the Hall element far from the magnetic member 8 to the surface 9 of the magnetic member 8 is a distance L92 longer than the distance L32, the distance (L92-L31) between the centers of the Hall elements in the comparative example is It becomes longer than the distance (L32-L31) between the center C31 of the Hall element 31 and the center C32 of the coil 32 of the embodiment. Therefore, in the comparative example, a point P31 where the magnetic field intensity detected by the Hall element closer to the magnetic member 8 is plotted and a point P92 where the magnetic field intensity detected by the Hall element far from the magnetic member 8 is plotted are connected. The magnetic field strength Ms9 is obtained from the extrapolation line EL9.
On the other hand, in the magnetic property detection device 1 in which the distance (L32-L31) between the center C31 of the Hall element 31 and the center C32 of the coil 32 is shorter than the distance (L92-L31), the magnetic field is greater than the extrapolation line EL3 and the magnetic field strength Ms9. A magnetic field strength Ms3 having a value close to the strength Ms0 is calculated.
In the first embodiment, the output signal lines 311 and 312 of the Hall element 31 and a part of the output signal lines 331 and 332 of the Hall element 33 are used as the coils 32 and 34 so as to leave the magnetic member 8 outside. Since the spatial resolution of the magnetic field strength at is relatively improved, the magnetic field strength close to the true value of the magnetic field strength can be calculated. Thereby, the detection accuracy of the magnetic characteristics of the magnetic member 8 can be further improved.

  (C) The magnetic characteristic detection device 1 includes a combination of the hall element 31 and the coil 32 and a combination of the hall element 33 and the coil 34 as a configuration capable of detecting the magnetic field intensity. In the magnetic characteristic detection apparatus 1, the output phase of the magnetic field strength signal output from the Hall elements 31 and 33 is different from the output phase of the magnetic field strength signal output from the coils 32 and 34, so that the phase of the input signal can be detected. It is possible to easily separate the magnetic field strength signals of the Hall elements 31 and 33 and the magnetic field strength signals of the coils 32 and 34 from the synthesized signal using a lock-in amplifier. Thereby, the structure of the magnetic characteristic detection apparatus 1 can be simplified.

  (D) Moreover, since the magnetic characteristic detection apparatus 1 is equipped with the coil as a structure which can detect a magnetic field intensity | strength, the line which supplies electric power to a coil becomes unnecessary. Thereby, the structure of the magnetic characteristic detection apparatus 1 can be further simplified.

  (E) Further, since the magnetic characteristic detection apparatus 1 includes a coil as a configuration capable of detecting the magnetic field strength, the magnetic field at a plurality of positions in the direction away from the magnetic member 8 while reducing the number of Hall elements. The intensity can be detected. Therefore, the number of parts of the magnetic property detection device 1 can be reduced, and the manufacturing cost can be reduced.

(Second embodiment)
Next, a magnetic property detection apparatus according to a second embodiment of the present invention will be described with reference to FIGS. The second embodiment differs from the first embodiment in the configuration of the magnetic field strength calculation unit. In addition, the same code | symbol is attached | subjected to the site | part substantially the same as 1st embodiment, and description is abbreviate | omitted.

  The magnetic characteristic detection apparatus according to the second embodiment includes a support unit 10, a magnetic flux sensor 20, a magnetic field sensor 30, power supply lines 313 and 314, output signal lines 311, 312, 331 and 332, and a magnetic field as a “first calculation unit”. An intensity calculator 50, a magnetic characteristic calculator 45, and the like are provided.

  The magnetic field strength calculation unit 50 includes a power supply 41, a signal processing unit 52, a calculation unit 43, and the like. The signal processing unit 52 is electrically connected to the output signal lines 311, 312, 331, and 332. The magnetic field strength calculation unit 50 calculates the magnetic field strength in the magnetic member 8 based on the magnetic field strength at the positions of the Hall elements 31 and 33 and the coils 32 and 34. The magnetic field strength calculation unit 50 is electrically connected to the calculation unit 43 via signal lines 521 and 522. The magnetic field strength calculation unit 50 outputs the calculated magnetic field strength in the magnetic member 8 to the calculation unit 43.

  Next, the operation of the magnetic property detection apparatus according to the second embodiment will be described with reference to FIGS.

  After the magnetic member 8 is magnetized by applying an external magnetic field to the magnetic member 8, the external magnetic field is removed to polarize the magnetic member 8. At this time, in the magnetic characteristic detection apparatus according to the second embodiment, the power supply 41 repeatedly turns on and off the supply of power to the Hall elements 31 and 33 and supplies the power to the Hall elements 31 and 33 in pulses. In the signal processing unit 52, processing for the magnetic field strength signals output from the Hall elements 31, 33 and the coils 32, 34 when the power source 41 stops supplying power to the Hall elements 31, 33, and The processing for the magnetic field intensity signals output from the Hall elements 31 and 33 and the coils 32 and 34 when power is supplied to the elements 31 and 33 is different.

  When the power supply 41 stops supplying power to the hall element 31, no power is supplied to the hall elements 31 and 33, so no magnetic field strength signal is output from the hall elements 31 and 33. Thereby, as shown in FIG. 6, the signal processing unit 52 is only the magnetic field strength signal output from the coil 32, as shown in FIG. 6, as the “first process”.

When the power source 41 supplies power to the Hall element 31, the combined signal S202 transmitted by the output signal lines 311 and 312 is a combined signal of the magnetic field strength signal of the Hall element 31 and the magnetic field strength signal of the coil 32. is there. Therefore, as shown in FIG. 7, the signal processing unit 52 stops the supply of power to the Hall element 31 from the combined signal S <b> 202 input to the signal processing unit 52 as a “second step” as illustrated in FIG. 7. The magnetic field strength signal S221 of the Hall element 31 is separated from the combined signal S202 by subtracting the magnetic field strength signal S221 of the current time. The signal processing of the signal processing unit 52 when the power supply 41 is turned on / off is the same for the combination of the Hall element 33 and the coil 34.
The signal processing unit 52 outputs the magnetic field strength signals of the Hall elements 31 and 33 and the magnetic field strength signals of the coils 32 and 34 to the calculation unit 43. The computing unit 43 calculates the magnetic field strength in the magnetic member 8 as in the first embodiment. The signal processing unit 52 outputs the calculated magnetic field strength to the magnetic characteristic calculation unit 45.

  In the second embodiment, an electric signal corresponding to the magnetic field intensity detected by the Hall element in the signal processing unit 52 and the magnetic field intensity detected by the coil are turned on and off alternately by the power supply 41 to the Hall elements 31 and 33. Is separated from the electrical signal according to Thereby, it is possible to separate the two magnetic field strength signals from the combined signal output by the set of output signal lines without using the reference signal. Therefore, the second embodiment can achieve the effects of the first embodiment and can further reduce the manufacturing cost of the magnetic property detection device.

(Third embodiment)
Next, a magnetic property detection apparatus according to a third embodiment of the present invention will be described with reference to FIG. The third embodiment differs from the first embodiment in the configuration of the magnetic field strength calculation unit. In addition, the same code | symbol is attached | subjected to the site | part substantially the same as 1st embodiment, and description is abbreviate | omitted.

  The magnetic characteristic detection apparatus according to the third embodiment includes a support unit 10, a magnetic flux sensor 20, a magnetic field sensor 35, power supply lines 313 and 314, output signal lines 311, 312, 331 and 332, and a magnetic field as a “first calculation unit”. An intensity calculator 60, a magnetic characteristic calculator 45, and the like are provided.

  The magnetic field sensor 35 includes two Hall elements 31 and 33 and two coils 37 and 39 as two “magnetic field intensity detection units”. In the third embodiment, the coil 37 is formed of a material capable of detecting the temperature of the base material 16, and functions as a resistance temperature detector whose resistance changes depending on the environmental temperature, for example.

  The magnetic field strength calculation unit 60 includes a power source 41, a signal processing unit 42, a temperature detection unit 64, a calculation unit 63, and the like.

  The temperature detector 64 is electrically connected to the output signal lines 311 and 312. That is, the output signal lines 311 and 312 are electrically connected to the signal processing unit 42 and the temperature detection unit 54, respectively. The temperature detection unit 64 detects the temperature of the substrate 161 on which the Hall element 31 and the coil 37 are mounted based on signals transmitted by the output signal lines 311 and 312. The temperature detection unit 64 outputs a signal corresponding to the temperature of the substrate 161 to the calculation unit 63 via the signal line 641 (see FIG. 9).

  The calculation unit 63 is electrically connected to the signal processing unit 42 and the temperature detection unit 64. The calculation unit 63 calculates the magnetic field strength in the magnetic member 8 based on a plurality of magnetic field strength signals output from the signal processing unit 42 and a signal corresponding to the temperature of the substrate 161 output from the temperature detection unit 64.

  In the third embodiment, the coil 37 detects the temperature of the substrate 161 that is the same temperature as the Hall element 31. Accordingly, the magnetic field strength of the magnetic member 8 at the position where the Hall element 31 is provided can be calculated in consideration of the temperature characteristics of the Hall element 31 mounted on the substrate 161. Therefore, the third embodiment has the effects of the first embodiment and can further improve the detection accuracy of the magnetic characteristics of the magnetic member 8.

  In addition, the physique of the substrates 161 and 162 can be made smaller than the case where the temperature of the base material 16 is detected separately from the configuration capable of detecting the magnetic field strength. Thereby, the distance between the probe 21 and the probe 23 located on both sides of the substrate 161 and the distance between the probe 22 and the probe 24 located on both sides of the substrate 162 are the same as those in the first embodiment. It can be the same degree.

(Fourth embodiment)
Next, a magnetic property detection apparatus according to a fourth embodiment of the present invention will be described with reference to FIG. The fourth embodiment is different from the second embodiment in the configuration of the magnetic field sensor. In addition, the same code | symbol is attached | subjected to the site | part substantially the same as 1st embodiment, and description is abbreviate | omitted.

  The magnetic property detection apparatus according to the fourth embodiment includes a support unit 10, a magnetic flux sensor 20, a magnetic field sensor 70, power supply lines 313, 314, 723, 724, output signal lines 311, 312, 331, 332, and a magnetic field strength calculation unit 50. And a magnetic characteristic calculator 45 and the like.

The magnetic field sensor 70 is composed of a plurality of Hall elements. The fourth embodiment includes four Hall elements 31, 33, 72, and 74 as "magnetic field intensity detection units".
The two Hall elements 72 and 74 are arranged to be aligned with the Hall elements 31 and 33 in a direction away from the magnetic member 8 with respect to the two Hall elements 31 and 33.

  The hall element 72 is mounted on the substrate 161. The hall element 72 is electrically connected to power supply lines 723 and 724 that supply power to the hall element 72 and output signal lines 311 and 312. When power is supplied, the hall element 72 detects one component of the magnetic field strength at the position where the hall element 72 is provided. The hall element 72 transmits a magnetic field strength signal corresponding to the magnetic field strength detected via the output signal lines 311 and 312 to the magnetic field strength calculation unit 50.

  The hall element 74 is mounted on the substrate 162. The Hall element 74 is electrically connected to a power supply line that supplies power to the Hall element 74 and output signal lines 331 and 332. When power is supplied, the hall element 74 detects the other component of the magnetic field strength at the position where the hall element 74 is provided. The hall element 74 transmits a magnetic field strength signal corresponding to the magnetic field strength detected via the output signal lines 331 and 332 to the magnetic field strength calculation unit 50.

Next, the operation of the magnetic property detection apparatus according to the fourth embodiment will be described.
After the magnetic member 8 is magnetized by applying an external magnetic field to the magnetic member 8, the external magnetic field is removed to polarize the magnetic member 8. At this time, in the magnetic property detection apparatus according to the fourth embodiment, the power supply 41 supplies power to the Hall element 31 while the supply of power to the Hall element 72 is stopped. Thereby, only the magnetic field strength signal of the Hall element 31 is input to the signal processing unit 52. In the signal processing unit 52, signals transmitted from the output signal lines 311 and 312 are output to the calculation unit 43 as magnetic field strength signals of the Hall elements 31.

Further, when the inside of the magnetic member 8 is polarized, in the magnetic characteristic detection device according to the fourth embodiment, the power supply 41 stops supplying power to the Hall element 31 while supplying power to the Hall element 72. As a result, only the magnetic field strength signal of the Hall element 72 is input to the signal processing unit 52. In the signal processing unit 52, signals transmitted from the output signal lines 311 and 312 are output to the calculation unit 43 as magnetic field strength signals of the Hall elements 72.
The computing unit 73 calculates the magnetic field strength in the magnetic member 8 based on the magnetic field strength signal transmitted alternately by the signal processing unit 52.

  In the fourth embodiment, two magnetic field strength signals output from the Hall elements 31 and 72 can be transmitted to the magnetic field strength calculation unit 50 through the output signal lines 311 and 312. By switching the power supply from the power source 41 within a set of Hall elements, the magnetic field strengths at a plurality of positions in the direction away from the magnetic member 8 can be detected. Therefore, the size of the substrates 161 and 162 on which the output signal lines are formed can be reduced and the spatial resolution of the magnetic flux density is improved, compared with the case where the output signal lines are provided in each of the two Hall elements. The detection accuracy of the magnetic characteristics of the member 8 can be improved.

(Other embodiments)
In the first to third embodiments, the configuration capable of detecting a set of magnetic field strengths is a combination of a Hall element and a coil. A combination of a magnetoresistive element and a coil may be used.

  In the above-described embodiment, a configuration in which two magnetic field strengths can be detected is combined, and one component of the magnetic field strength is detected at a plurality of positions (for example, in the first embodiment, the combination of the Hall element 31 and the coil 32) A combination of the Hall element 33 and the coil 34). You may have the structure which can detect three or more magnetic field strengths with respect to the component of one direction of a magnetic field.

  In the third embodiment, the coil functions as a resistance temperature detector. It may function as a thermocouple or a thermistor temperature sensor.

  In the third embodiment, one of the two coils functions as a resistance temperature detector. When there are a plurality of coils, at least one coil may function as a resistance temperature detector.

  In the fourth embodiment, a component in one direction of the magnetic field strength is detected by a combination of two Hall elements. However, the configuration capable of detecting the magnetic field strength is not limited to this. It may be a combination of two magnetoresistive elements, or a combination of one Hall element and one magnetoresistive element.

  In the above-described embodiment, the magnetic property detection apparatus includes two probes for one direction component of the magnetic flux density, and thus four probes are used to detect the two direction components of the magnetic flux density. We prepared. In addition, since it has a configuration capable of detecting two magnetic field strengths with respect to a component in one direction of the magnetic field strength, it has a configuration capable of detecting four magnetic field strengths in order to detect a component in two directions of the magnetic field strength. It was. However, the configuration capable of detecting the probe and the magnetic field strength is not limited to this. In order to detect only one direction component of the magnetic flux density, only two probes may be provided. Moreover, since only the component of one direction of a magnetic field strength is detected, you may provide the structure which can detect two magnetic field strengths.

  In the above-described embodiment, a plurality of probes are provided as the magnetic flux density detection unit. However, the configuration of the magnetic flux density detector is not limited to this.

  As mentioned above, this invention is not limited to such embodiment, It can implement with the various form of the range which does not deviate from the summary.

DESCRIPTION OF SYMBOLS 1, 3 ... Magnetic characteristic detection apparatus 8 ... Magnetic member 9 ... Surface 21, 22, 23, 24 ... Probe (magnetic flux density detection part)
31, 32, 72, 74... Hall element (magnetic field intensity detector)
33, 34, 37, 39... Coil (magnetic field intensity detector)
311, 312, 331, 332... Output signal line 40, 50, 60... Magnetic field strength calculation unit (first calculation unit)
45 ... Magnetic characteristic calculation unit (second calculation unit)
S10, S201, S202 ... Composite signal

Claims (5)

A plurality of magnetic flux density detectors (21) provided so as to be able to contact the surface (9) of the magnetic member (8), detecting a magnetic flux density in the magnetic member, and outputting a magnetic flux density signal corresponding to the detected magnetic flux density. , 22, 23, 24),
A magnetic field detected by detecting the magnetic field strength in the vicinity of the surface of the magnetic member, which is provided between the plurality of magnetic flux density detectors so as to be separated from the surface of the magnetic member, and can contact the magnetic flux density detector. A plurality of magnetic field strength detectors (31, 32, 33, 34, 37, 39, 72, 74) for outputting a magnetic field strength signal corresponding to the strength;
A first calculator (40, 50, 60) capable of calculating the magnetic field strength in the magnetic member based on a plurality of magnetic field strength signals output by the plurality of magnetic field strength detectors;
The magnetic field intensity in the magnetic member calculated by the first calculation unit and the magnetic flux density in the magnetic member detected by the magnetic flux density detection unit are electrically connected to the first calculation unit and the magnetic flux density detection unit. A second calculation unit (45) for calculating magnetic characteristics of the magnetic member based on the
A plurality of magnetic field intensity signals output from the at least two or more magnetic field intensity detection units, wherein the at least two or more magnetic field intensity detection units are electrically connected to the first calculation unit among the plurality of magnetic field intensity detection units. Output signal lines (311, 312, 331, 332) for transmitting the combined signal (S 10, S 201, S 202) to the first calculator,
A magnetic property detection device comprising: The at least two or more magnetic field strength detection units include at least one coil (32, 34, 37, 39) capable of generating an induced voltage in response to a change in magnetic field, and a Hall element (31, 33) or Including at least one magnetoresistive element;
2. The magnetic characteristic detection apparatus according to claim 1, wherein the output signal line is electrically connected to the coil and the Hall element or the magnetoresistive element.   The magnetic characteristic detection device according to claim 2, wherein the coil is made of a material capable of detecting a temperature in the vicinity of the Hall element or the magnetoresistive element.   4. The magnetic property detection apparatus according to claim 3, wherein the coil is one of a resistance temperature detector, a thermocouple, or a thermistor temperature detector. A magnetic property detection method for detecting a magnetic property of the magnetic member using the magnetic property detection device according to any one of claims 2 to 4,
A first step of stopping the supply of power to the Hall element or the magnetoresistive element, and making the combined signal transmitted by the output signal line a magnetic field strength signal corresponding to the magnetic field strength detected by the coil;
A second step of supplying electric power to the Hall element or the magnetoresistive element and separating a magnetic field strength signal corresponding to the magnetic field intensity detected by the Hall element or the magnetoresistive element from a combined signal transmitted by the output signal line; ,
A magnetic property detection method comprising:

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