JP2011126052A - Screen printing machine and method for cleaning mask of screen printing machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a screen printing machine capable of performing sufficient cleaning of a mask to be used for screen printing of a cavity substrate, and a method for cleaning the mask of the screen printing machine. <P>SOLUTION: This screen printing machine is equipped with a cleaning device 16 which removes paste Pst sticking to the lower surface of a projecting part 13t in relatively moving to the mask 13. In this case, a mask contact region R formed by putting a paper member 42 across the upper end of a nozzle part 41, is successively brought into contact with the lower surface of each projecting part 13t of a mask region MRC corresponding with a cavity part. In addition, the cleaning device 16 includes a paper member take-up mechanism 57 which takes up the paper member 42 in the take-up direction where the paper member 42 slides to the mask 13 and at a take-up speed for sliding motion, while the paste Pst sticking to the lower surface of the projecting part 13t of the mask region MRC corresponding with the cavity part, is removed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a screen printing machine that performs screen printing on a so-called cavity substrate having electrodes on the upper surface of a substrate body and the bottom surface of an opening formed on the upper surface of the substrate body, and a mask cleaning method for the screen printing machine. .

  Among substrates on which electronic components are mounted, a so-called cavity substrate having electrodes on the bottom surface of an opening (cavity portion) formed on the upper surface of the substrate body in addition to the upper surface of the substrate body is known. Since this cavity substrate can arrange electronic components three-dimensionally, it is possible to construct a high-density substrate with a small size.

  In order to print a paste such as solder on the electrode (cavity electrode) provided on the bottom surface of the cavity part of the cavity substrate and the electrode (flat part electrode) provided on the upper surface of the substrate body, A first mask region having a pattern hole corresponding to the cavity portion electrode in a convex portion having a shape protruding downward to be fitted, and a flat plate-like second mask region having a pattern hole corresponding to the flat portion electrode. A screen printer having a mask provided as a different area is used.

  In such a screen printer, in order to prepare for screen printing on the next substrate to be loaded after finishing screen printing on the substrate, the mask is formed by moving relative to the mask and spanning a paper member on the upper end. There is known a device provided with a cleaning device that removes paste adhered to the lower surface of the mask by bringing the contact region into contact with the lower surface of the mask (for example, Patent Document 1).

JP 2004-66832 A

  However, when the lower surface of the first mask region having the convex portion that fits into the cavity portion is cleaned by the cleaning device, when the paper member is sequentially brought into contact with the lower surface of each convex portion, one convex portion After the removal of the paste on the lower surface of the paper, when the paper member comes into contact with the convex portion to be cleaned next, the paste removed from the previous convex portion may be rubbed against the next convex portion. In addition, there is a problem that the printing accuracy of screen printing may deteriorate due to insufficient cleaning of the mask.

  Accordingly, an object of the present invention is to provide a screen printer capable of sufficiently cleaning a mask used for screen printing of a cavity substrate, and a mask cleaning method for a screen printer.

The screen printing machine according to claim 1, wherein the plurality of first electrodes provided on the bottom surface of each of the plurality of openings formed in a part of the top surface of the substrate body and the plurality of first electrodes provided on the top surface of the substrate body. A first pattern hole corresponding to the first electrode is formed in each of a substrate positioning portion for positioning a substrate having two electrodes and a plurality of downwardly protruding convex portions that fit into the opening of the substrate body. A first mask region and a mask having a flat second mask region provided as a region different from the first mask region and having a second pattern hole corresponding to the second electrode, After the first mask region of the mask is brought into contact with the upper surface of the substrate positioned by the positioning unit and screen printing is performed on the first electrode, the second mask region of the mask is brought into contact with the upper surface of the substrate to contact the second electrode. Screen printing A screen printing machine that performs relative movement with respect to a mask, and sequentially contacts a mask contact area formed by spanning a paper member over an upper end of a paper member support portion with a lower surface of each convex portion of the first mask area. And removing the paste adhering to the lower surface of each convex portion of the first mask region, and removing the paste adhering to the lower surface of the second mask region by bringing the mask contact region into contact with the lower surface of the second mask region The cleaning device includes a paper member having a winding direction and a winding speed at which the paper member slides with respect to the mask while removing the paste adhered to the lower surface of the convex portion of the first mask region. Paper member winding means for winding

  The method for cleaning a mask of a screen printer according to claim 2 is provided on the upper surface of the plurality of first electrodes provided on the bottom surface of each of the plurality of openings formed on a part of the upper surface of the substrate body. A first substrate corresponding to the first electrode corresponds to each of a substrate positioning portion that positions the substrate having the plurality of second electrodes and a plurality of convex portions that protrude downward and fit into the openings of the substrate body. A mask having a first mask region in which the pattern hole is formed and a flat second mask region provided as a region different from the first mask region and in which a second pattern hole corresponding to the second electrode is formed The first mask region of the mask is brought into contact with the upper surface of the substrate positioned by the substrate positioning portion and screen printing is performed on the first electrode, and then the second mask region of the mask is brought into contact with the upper surface of the substrate. A method for cleaning a mask of a screen printing machine that performs screen printing on a second electrode, wherein a cleaning device that forms a mask contact region by spanning a paper member over an upper end of a paper member support is moved relative to the mask, The process of removing the paste adhering to the lower surface of each convex portion of the first mask region by sequentially bringing the mask contact region into contact with the lower surface of each convex portion of the first mask region, and the relative movement of the cleaning device with respect to the mask And removing the paste adhering to the lower surface of the second mask region by bringing the mask contact region into contact with the lower surface of the second mask region, the paste adhering to the lower surface of each convex portion of the first mask region In the removing step, while the paste attached to the lower surface of the convex portion of the first mask region is being removed, the paper member is in contact with the first mask region. Performing winding of the paper member in the winding direction and winding speed movement.

  In the present invention, while the mask contact area of the paper member is brought into contact with the lower surface of the convex portion of the first mask area and the paste adhering to the portion is being removed, the paper member is in contact with the first mask area. Since the paper member is wound in the winding direction and the winding speed that slide, after the removal of the paste of one convex portion is finished, the next is the convex portion where the paste is removed. When the paper member comes into contact, the paste removed from the front convex portion is not rubbed against the rear convex portion. For this reason, the mask used for the screen printing of the cavity substrate can be sufficiently cleaned, and the printing accuracy can be improved. In addition, since the paper member is taken up while the paste attached to the lower surface of the convex portion is being removed, even if the convex portions are adjacent to each other at a very close distance, It is possible to reliably prevent the paste removed from the convex portion from being rubbed against the subsequent convex portion. In addition, since the paper member is wound with the winding direction and the winding speed sliding with respect to the first mask region, the paper member is rubbed against the lower surface of the convex portion, and the paste is efficiently removed by the paper member. Removed.

The top view of the screen printer in one embodiment of the present invention 1 is a schematic configuration diagram of a screen printing machine according to an embodiment of the present invention. (A) Top view (b) Side sectional view of cavity substrate to be printed by screen printer in one embodiment of the present invention (A) Top view (b) Side sectional view of a mask provided in a screen printer according to an embodiment of the present invention BRIEF DESCRIPTION OF THE DRAWINGS (a) Perspective view (b) Partial side sectional view of a cleaning device provided in a screen printer according to an embodiment of the present invention (A) (b) (c) (d) Operation explanatory diagram of the screen printer in one embodiment of the present invention (A) (b) (c) (d) Operation explanatory diagram of the screen printer in one embodiment of the present invention (A) (b) (c) (d) Operation | movement explanatory drawing of the cleaning apparatus with which the screen printer in one embodiment of this invention is provided Explanatory drawing of operation | movement of the cleaning apparatus with which the screen printer in one embodiment of this invention is provided.

  Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, a screen printing machine 1 according to the present embodiment carries out screen printing by carrying in and positioning a substrate 2 introduced from the upstream side thereof, and then a downstream apparatus (for example, a component mounting machine) (not shown). To be taken out. Hereinafter, for convenience of explanation, the horizontal plane direction (left and right direction in FIG. 1), which is the conveyance direction of the substrate 2, is the X axis direction, and the horizontal plane direction orthogonal to the X axis direction (up and down direction in FIG. 1) is the Y axis direction. And The vertical direction (direction perpendicular to the paper surface of FIG. 1) is taken as the Z-axis direction.

  1 and 2, the screen printer 1 includes a substrate positioning unit 12 including a pair of conveyor mechanisms for positioning the substrate 2 on a base 11, and screen printing is performed above the substrate positioning unit 12. In addition to the mask 13, a paste supply head 14, a camera unit 15, and a cleaning device 16 are provided to be movable with respect to the base 11. Further, in FIG. 1, the substrate 2 loaded from the outside is carried into positions before and after the substrate positioning portion 12 in the transport direction (X-axis direction) of the substrate positioning unit 12 on the base 11 (shown in FIG. 1). An arrow A), a substrate carry-in portion 12a composed of a pair of conveyor mechanisms that deliver the substrate 2 to the substrate positioning portion 12, and a substrate carry-out portion 12b composed of a pair of conveyor mechanisms that carry the substrate 2 received from the substrate positioning portion 12 to the outside. It has.

  3 (a) and 3 (b), the substrate 2 is configured based on a substrate body 21 in which an upper layer side substrate member 21b is bonded to the upper surface of a lower layer side substrate member 21a. A plurality of flat portion electrodes fd are provided on the upper surface of the substrate body 21 (upper surface of the upper layer side substrate member 21b), and are provided on a part of the upper surface of the substrate body 21 (a part of the upper layer side substrate member 21b). A plurality of cavity portion electrodes cd are provided on the bottom surface of the cavity portion CV that is an opening (the upper surface of the lower layer side substrate member 21a). That is, the substrate 2 is provided on a plurality of cavity portion electrodes cd (first electrodes) provided on the bottom surfaces of the plurality of cavity portions CV formed on a part of the upper surface of the substrate body 21 and on the upper surface of the substrate body 21. The cavity substrate has a plurality of flat portion electrodes fd (second electrodes).

  4A and 4B, the mask 13 has a rectangular shape as a whole, and its four sides are supported by a frame member 13w. The rectangular region surrounded by the frame member 13w is provided with a cavity portion corresponding mask region MRC and a flat portion corresponding mask region MRF which are separate regions.

The cavity portion corresponding mask region MRC is provided with a plurality of downwardly projecting convex portions 13t that fit into the plurality of cavity portions CV of the substrate 2, and each convex portion 13t has a lower layer side. A plurality of first pattern holes H1 corresponding to a plurality of cavity part electrodes cd provided on the upper surface (bottom surface of the cavity part CV) of the substrate member 21a are provided. On the other hand, in the flat portion corresponding mask region MRF, a plurality of second pattern holes H2 corresponding to the plurality of flat portion electrodes fd provided on the upper surface of the upper layer side substrate member 21b are provided.

  As can be seen from FIG. 4A, the cavity-corresponding mask region MRC is the region of the two masks 13 located across the center line CL of the mask 13 parallel to the short side direction (X-axis direction) of the mask 13. The flat portion corresponding mask region MRF is formed on the other side of the two mask 13 regions located with the center line CL interposed therebetween. As described above, the mask 13 in the present embodiment is a cavity portion corresponding mask region MRC (first mask region) having a plurality of convex portions 13t protruding downward and a region different from the cavity portion corresponding mask region MRC. This is a mask corresponding to a cavity substrate having a flat portion corresponding mask region MRF (second mask region) provided as.

  In FIG. 2, the entire board positioning unit 12 included in the screen printing machine 1 is provided so as to be movable in a horizontal plane direction (XY plane direction) and a vertical direction (Z-axis direction). By moving, the substrate 2 positioned by the substrate positioning unit 12 can be aligned with the mask 13.

  In FIG. 2, the paste supply head 14 provided in the screen printer 1 is provided above the mask 13 so as to be movable in the horizontal plane direction (XY plane direction) and the vertical direction (Z axis direction). Two guide members 14a facing each other in the axial direction are provided. Each guide member 14a is formed of a “spar” -like member extending in the X-axis direction, and the paste Pst supplied (pressed) below the paste cartridge 14b built in the paste supply head 14 is the target on the mask 13. The path of the paste Pst is guided so as to be concentrated and supplied to the place.

  2 and 5 (a) and 5 (b), the entire cleaning device 16 included in the screen printer 1 is provided so as to be movable in the horizontal plane direction (here, the Y-axis direction) (in FIG. 1). Arrow B), the upper end of the nozzle portion 41 is a paper member supporting portion formed in a horizontal and rectangular cylindrical closed cross section, and extends in the Y-axis direction so that the upper end of the nozzle portion 41 passes in the Y-axis direction. The paper member 42 is arranged so as to be spanned. A part of the paper member 42 stretched over the upper end of the nozzle portion 41 forms a mask contact region R (FIGS. 5B and 2) that is brought into contact with the lower surface of the mask 13 by the nozzle portion 41 from below. Yes.

  The cleaning device 16 removes (wipes) the paste Pst adhering to the lower surface of the mask 13 by moving relative to the mask 13 with the mask contact region R being in contact with the lower surface of the mask 13. A pair of roller members 43 are provided at positions where the nozzle portion 41 is sandwiched in the Y-axis direction, and the paper member 42 is wound up by the rotation operation of the pair of roller members 43 and the mask contact region R is updated. .

  2 and 5 (a) and 5 (b), the inside of the nozzle portion 41 of the cleaning device 16 is an air suction pipe 41a penetrating vertically, and a vacuum pressure is supplied into the air suction pipe 41a. By doing so, air can be sucked into the air suction conduit 41 a via the mask contact region R of the paper member 42.

The operation of transporting the substrate 2 by the operation of the substrate carry-in portion 12a, the substrate positioning portion 12 and the substrate carry-out portion 12b is performed by a control device 50 (FIG. 2) provided in the screen printing machine 1 with a substrate transport mechanism 51 (FIG. 2) including an actuator not shown. This is done by performing the operation control of 2). Further, the alignment operation of the substrate 2 with respect to the mask 13 by the movement of the entire substrate positioning unit 12 in the horizontal plane direction and the vertical direction is performed by the control device 50 provided in the screen printer 1 with a substrate positioning mechanism 52 (including an actuator not shown). This is done by performing the operation control of FIG.

  Positioning operation of the paste supply head 14 with respect to the mask 13 by the movement of the paste supply head 14 in the horizontal plane direction and the vertical direction is the operation control of the paste supply head moving mechanism 53 (FIG. 2) including an actuator (not shown). The operation of supplying the paste Pst from the paste supply head 14 is performed by the control device 50 controlling the operation of the paste supply mechanism 54 (FIG. 2) including an actuator (not shown).

  In FIG. 2, the camera unit 15 includes a first camera 15 a with the imaging field of view facing upward and a second camera 15 b with the imaging field of view facing downward, and the camera unit 15 moves in the horizontal plane below the mask 13. The operation is performed when the control device 50 controls the operation of the camera moving mechanism 55 including an actuator (not shown). Further, the control of the imaging operation of the first camera 15a and the second camera 15b is performed by the control device 50, and the image data obtained by the imaging operation of the first camera 15a and the second camera 15b is input to the control device 50 (FIG. 2).

  The positioning of the cleaning device 16 with respect to the mask 13 and the movement operation in the Y-axis direction are performed by the control device 50 controlling the operation of a cleaning device moving mechanism 56 (FIG. 2) including an actuator (not shown). Further, the winding operation of the paper member 42 by the pair of roller members 43 is performed when the control device 50 controls the operation of the paper member winding mechanism 57 (FIG. 2) including an actuator (not shown). Further, the suction operation of air through the mask contact region R of the paper member 42 performed by supplying a vacuum pressure into the air suction conduit 41a is performed by a suction mechanism 58 (FIG. 2) including an actuator (not shown) by the control device 50. This is done by performing the operation control.

  In the step of executing screen printing on the substrate 2 by the screen printer 1, first, the substrate 2 is loaded into the substrate carry-in portion 12a of the screen printer 1. When the control device 50 of the screen printing machine 1 detects that the substrate 2 has been loaded into the substrate carry-in unit 12a by a detector (not shown), the substrate transfer mechanism 51 is operated to move the substrate carry-in unit 12a to the substrate positioning unit 12. The board | substrate 2 is delivered and the board | substrate positioning part 12 positions the board | substrate 2 (board | substrate positioning process). When the substrate positioning unit 12 positions the substrate 2, the substrate positioning mechanism 52 is operated to move the substrate 2 together with the substrate positioning unit 12, and the first pattern hole in the mask area MRC corresponding to the cavity portion of the mask 13. The substrate 2 is aligned with the mask 13 (cavity portion corresponding mask region MRC) so that H1 and the cavity portion electrode cd provided on the substrate 2 face each other vertically (FIG. 6A). Process).

  In the alignment of the substrate 2 with respect to the cavity portion corresponding mask region MRC, the control device 50 of the screen printing machine 1 controls the operation of the camera moving mechanism 55 to move the camera unit 15 below the cavity portion corresponding mask region MRC. The substrate is horizontally moved and images (image recognition) a mask-side positioning mark (not shown) provided in the cavity corresponding mask region MRC by the first camera 15a, and the substrate provided on the substrate 2 by the second camera 15b. A side positioning mark (not shown) is imaged (image recognition), and the substrate 2 is moved so that both the positioning marks coincide with each other in the vertical direction.

When the first alignment step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to raise the substrate 2 together with the substrate positioning unit 12 (arrows shown in FIG. 6A). C1) The upper surface of the substrate 2 is brought into contact with the lower surface of the mask 13. Accordingly, the convex portion 13t of the mask 13 and the cavity portion CV of the substrate 2 are vertically fitted, and the first pattern hole H1 in the cavity portion corresponding mask region MRC and the cavity portion electrode cd of the substrate 2 are vertically matched. (FIG. 6B. First mask contact process).

  When the first mask contact process is completed, the control device 50 of the screen printing machine 1 brings the guide member 14a of the paste supply head 14 into contact with the upper surface of the mask region MRC corresponding to the cavity portion of the mask 13 and then supplies the paste. The paste Pst is supplied from the head 14 into the cavity region corresponding mask region MRC (in the convex portion 13t) of the mask 13. As a result, the paste Pst is filled into the first pattern hole H1 of the mask 13 (FIG. 6C) (first paste filling step).

  When the first paste filling step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to lower the substrate 2 together with the substrate positioning unit 12 (arrows shown in FIG. 6D). C2), the substrate 2 and the mask 13 (cavity portion corresponding mask region MRC) are relatively spaced apart in the vertical direction (FIG. 6D). As a result, the paste Pst is removed, and the paste Pst is printed (transferred) on each cavity electrode cd of the substrate 2 (first plate removal step).

  When the first plate removal step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to move the substrate 2 together with the substrate positioning portion 12 in the Y-axis direction, and the flat portion of the mask 13. The substrate 2 is aligned with the mask 13 (flat portion corresponding mask region MRF) so that the second pattern hole H2 in the corresponding mask region MRF and the flat portion electrode fd provided on the substrate 2 face each other vertically ( Fig. 7 (a) Second alignment step).

  In the alignment of the substrate 2 with respect to the flat portion corresponding mask region MRF, the control device 50 of the screen printing machine 1 controls the operation of the camera moving mechanism 55 to move the camera unit 15 below the flat portion corresponding mask region MRF. The substrate is horizontally moved and images (image recognition) a mask side positioning mark (not shown) provided in the flat portion corresponding mask region MRF by the first camera 15a, and the substrate provided on the substrate 2 by the second camera 15b. A side positioning mark (not shown) is imaged (image recognition), and the substrate 2 is moved so that both the positioning marks coincide with each other in the vertical direction.

  When the second alignment step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to raise the substrate 2 together with the substrate positioning unit 12 (arrows shown in FIG. 7A). D1) The upper surface of the substrate 2 is brought into contact with the lower surface of the mask 13. As a result, the second pattern hole H2 in the mask portion MRF corresponding to the flat portion of the mask 13 and the flat portion electrode fd of the substrate 2 are aligned vertically (FIG. 7B, second mask contact step). .

  Here, since the cavity portion electrode cd is provided in the cavity portion CV that is recessed from the upper surface of the substrate 2, the mask 13 is placed on the upper surface of the substrate 2 after the printing of the paste Pst on the cavity portion electrode cd is completed. The mask 13 does not come into contact with the paste Pst on the cavity electrode cd (see FIG. 7C).

  When the second mask contact process is completed, the control device 50 of the screen printing machine 1 brings the guide member 14a of the paste supply head 14 into contact with the upper surface of the mask region MRF corresponding to the flat portion of the mask 13 and then supplies the paste. The paste Pst is supplied from the head 14 into the flat area corresponding mask region MRF of the mask 13. Thereby, the paste Pst is filled in the second pattern hole H2 of the mask 13 (FIG. 7C). Second paste filling step.

When the second paste filling step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to lower the substrate 2 together with the substrate positioning unit 12 (FIG. 7D
), The substrate 2 and the mask 13 (flat portion corresponding mask region MRF) are relatively separated in the vertical direction (FIG. 7D). As a result, the paste Pst is removed, and the paste Pst is printed (transferred) on each flat portion electrode fd of the substrate 2 (second plate removal step).

  When the second plate removal step is completed, the control device 50 of the screen printing machine 1 operates the substrate positioning mechanism 52 to align the conveyor mechanisms of the substrate positioning unit 12 and the substrate carry-out unit 12b. Then, after the positioning of the conveyor mechanisms of the substrate positioning unit 12 and the substrate carry-out unit 12b is finished, the substrate transfer mechanism 51 is operated to deliver the substrate 2 from the substrate positioning unit 12 to the substrate carry-out unit 12b, The board | substrate 2 is carried out from the screen printer 1 by the carrying-out part 12b (board | substrate carrying-out process). Thereby, the execution process of the screen printing on the board | substrate 2 by the screen printer 1 is complete | finished.

  In the screen printing machine 1 according to the present embodiment, the paste Pst is printed on the substrate 2 by the above procedure. When the control device 50 of the screen printing machine 1 finishes the screen printing process for several sheets of the substrate 2, The lower surface of the mask 13 is cleaned using the cleaning device 16. In the cleaning of the lower surface of the mask 13, the cleaning for the cavity portion corresponding mask region MRC and the cleaning for the flat portion corresponding mask region MRF are performed separately.

  In the cleaning of the mask area MRC corresponding to the cavity portion of the mask 13, the control device 50 of the screen printing machine 1 controls the operation of the cleaning device moving mechanism 56 to move the entire cleaning device 16 in the horizontal plane direction (here, the Y-axis direction). 8A to 8D, the mask contact region of the paper member 42 of the cleaning device 16 is placed on one lower surface of the convex portion 13t in the cavity region corresponding mask region MRC. R is brought into contact (FIG. 8A). Then, the paste Pst (remaining residue DS of the paste Pst) adhering to the lower surface of the convex portion 13t in the mask region corresponding to the cavity portion MRC of the mask 13 is removed by adhering to the mask contact region R of the paper member 42. The lower surface of the thirteen convex portions 13t (the lower surface of the cavity portion corresponding mask region MRC) is cleaned.

  When the cleaning of the lower surface of one convex portion 13t is completed, the control device 50 of the screen printing machine 1 sets the entire cleaning device 16 to Y so that the mask contact region R of the paper member 42 contacts the adjacent convex portion 13t. By moving in the axial direction, the lower surface of each convex portion 13t is cleaned one after another (FIG. 8 (a) → FIG. 8 (b) → FIG. 8 (c) → FIG. 8 (d)). Thereby, the paste Pst is removed from the lower surfaces of all the convex portions 13t (first paste removing step).

  The control device 50 of the screen printing machine 1 removes the paste Pst adhering to the lower surface of each convex portion 13t in the cavity region corresponding mask region MRC of the mask 13, and the mask contact region of the paper member 42 of the cleaning device 16 is removed. While R is in contact with the lower surface of the convex portion 13t, that is, while the paste Pst adhering to the lower surface of the convex portion 13t in the cavity corresponding region MRC is being removed, the paper member take-up mechanism 57 is The paper member 42 is wound up by operating (arrow F shown in FIGS. 8A to 8D). As a result, after the removal of the paste Pst of one convex portion 13t in the cavity portion corresponding mask region MRC is finished, the previous convex portion is brought into contact with the convex portion 13t from which the paste Pst is removed next. It is possible to prevent the paste Pst removed from 13t from being rubbed against the subsequent convex portion 13t.

Here, the moving direction (winding direction) of the paper member 42 with respect to the nozzle portion 41 during winding of the paper member 42 may be the same direction as the moving direction of the nozzle portion 41 with respect to the mask 13 or opposite. In order to rub the paper member 42 on the mask 13 so that the paste Pst is efficiently removed (wiped off), the nozzle portion 41 moves relative to the mask 13. During this time, the paper member 42 needs to slide with respect to the mask 13. For this reason, the cleaning device 16 has a winding direction and a winding speed at which the paper member 42 slides with respect to the mask 13 while the paste Pst adhering to the lower surface of the convex portion 13t of the mask 13 is being removed. The paper member 42 is wound up. Specifically, the control device 50 of the screen printing machine 1 sets the moving direction (winding direction) of the paper member 42 with respect to the nozzle portion 41 to the same direction as the moving direction of the nozzle portion 41 with respect to the mask 13, or The moving direction of the paper member 42 with respect to the nozzle portion 41 is set to be opposite to the moving direction of the nozzle portion 41 with respect to the mask 13, the moving speed of the paper member 42 with respect to the nozzle portion 41, and the movement of the nozzle portion 41 with respect to the mask 13. Make sure the speed is not the same.

  On the other hand, in the cleaning of the mask area MRF corresponding to the flat portion of the mask 13 in the screen printer 1, the control device 50 of the screen printer 1 controls the operation of the cleaning device moving mechanism 56 so that the entire cleaning device 16 is moved in the horizontal plane. While moving in the Y-axis direction (arrow G shown in FIG. 9), the mask contact region R of the paper member 42 of the cleaning device 16 is brought into contact with the lower surface of the flat portion corresponding mask region MRF (FIG. 9). Then, the paste Pst (remaining residue DS of the paste Pst) adhering to the lower surface of the mask area MRF corresponding to the flat portion of the mask 13 is removed by adhering to the mask contact area R of the paper member 42, and the lower surface of the mask 13 is cleaned. (Second paste removing step).

  When cleaning the mask 13 in the screen printing machine 1 described above, the control device 50 of the screen printing machine 1 controls the operation of the suction mechanism 58, and the mask contact area R of the paper member 42 from the air suction line 41a. Air is sucked through the vacuum. As a result, the paste Pst adhering to the lower surface of the mask 13 is sucked out to the paper member 42 side, and the paste Pst is effectively removed.

  As described above, the screen printer 1 according to the present embodiment includes the plurality of cavity electrodes provided on the bottom surfaces of the plurality of cavity portions CV (openings) formed on a part of the upper surface of the substrate body 21. cd (first electrode) and a substrate positioning portion 12 for positioning the substrate 2 having a plurality of flat portion electrodes fd (second electrodes) provided on the upper surface of the substrate main body 21 and a cavity portion CV of the substrate main body 21 A cavity portion corresponding mask region MRC (first mask region) in which a first pattern hole H1 corresponding to the cavity portion electrode cd is formed in each of a plurality of protruding portions 13t having a shape protruding downward, and corresponding to the cavity portion. Corresponding to a flat plate-like flat portion provided as a region different from the mask region MRC and having a second pattern hole H2 corresponding to the flat portion electrode fd And a mask 13 having a mask area MRF (second mask area), and the cavity area corresponding mask area MRC of the mask 13 is brought into contact with the upper surface of the substrate 2 positioned by the substrate positioning section 12 to screen the cavity section electrode cd. After printing, the screen printing machine 1 performs screen printing on the flat part electrode fd by bringing the flat part corresponding mask region MRF of the mask 13 into contact with the upper surface of the substrate 2, and moves relative to the mask 13. The mask contact region R formed by suspending the paper member 42 over the upper end of the nozzle portion 41 that is a member support portion is sequentially brought into contact with the lower surface of each convex portion 13t of the cavity portion corresponding mask region MRC to thereby correspond to the cavity portion corresponding mask region MRC. The paste Pst adhering to the lower surface of each convex portion 13t is removed, and the mask contact region R is made flat. A cleaning device 16 is provided to remove the paste Pst attached to the lower surface of the flat portion corresponding mask region MRF in contact with the lower surface of the mask portion corresponding mask region MRF, and the cleaning device 16 has a convex portion 13t of the cavity portion corresponding mask region MRC. While removing the paste Pst adhering to the lower surface of the paper member, a paper member winding means for winding the paper member 42 at a winding direction and a winding speed in which the paper member 42 slides with respect to the mask 13 ( A paper member take-up mechanism 57) is provided.

  Further, the mask cleaning method of the screen printing machine in the present embodiment is performed by using a plurality of cavity part electrodes provided on the bottom surfaces of the plurality of cavity parts CV (openings) formed in a part of the upper surface of the substrate body 21. cd (first electrode) and a substrate positioning portion 12 for positioning the substrate 2 having a plurality of flat portion electrodes fd (second electrodes) provided on the upper surface of the substrate main body 21 and a cavity portion CV of the substrate main body 21 A cavity portion corresponding mask region MRC (first mask region) in which a first pattern hole H1 corresponding to the cavity portion electrode cd is formed in each of a plurality of protruding portions 13t having a shape protruding downward, and corresponding to the cavity portion. A flat plate-like frame provided as a region different from the mask region MRC and having a second pattern hole H2 corresponding to the flat electrode fd. And a mask 13 having a mask portion MRF (second mask region), and the cavity portion corresponding mask region MRC of the mask 13 is brought into contact with the upper surface of the substrate 2 positioned by the substrate positioning portion 12. A method of cleaning the mask 13 of the screen printer 1 that performs screen printing on the flat portion electrode fd by performing screen printing on the flat portion electrode fd by performing screen printing on the cd and then bringing the flat portion corresponding mask region MRF of the mask 13 into contact with the upper surface of the substrate 2 The cleaning device 16 that forms the mask contact region R by covering the paper member 42 over the upper end of the nozzle portion 41 that is a member support portion is moved relative to the mask 13, and the mask contact region R is moved to the cavity region corresponding mask region MRC. Each convex portion 13t is sequentially brought into contact with the lower surface of each convex portion 13t so that each convex portion of the cavity portion corresponding mask region MRC. The process of removing the paste Pst adhering to the lower surface of the portion 13t (first paste removing step) and the cleaning device 16 are moved relative to the mask 13 so that the mask contact region R is placed on the lower surface of the flat portion corresponding mask region MRF. And a step of removing the paste Pst adhering to the lower surface of the flat portion corresponding mask region MRF (second paste removing step), and the paste adhering to the lower surface of each convex portion 13t of the cavity corresponding mask region MRC In the step of removing Pst (first paste removing step), the paper member 42 is in the cavity portion corresponding mask while removing the paste Pst adhering to the lower surface of the convex portion 13t of the cavity portion corresponding mask region MRC. The paper member 42 is wound at a winding direction and a winding speed that slide with respect to the region MRC. It seems to be.

  Thus, in the screen printer 1 (the cleaning method of the mask 13 of the screen printer 1) in the present embodiment, the mask contact region R of the paper member 42 is placed on the lower surface of the convex portion 13t of the cavity portion corresponding mask region MRC. While removing the paste Pst adhered to the contact portion, the paper member 42 is wound up at a winding direction and a winding speed at which the paper member 42 slides relative to the cavity corresponding mask region MRC. When the paper member 42 comes into contact with the convex portion 13t from which the paste Pst is removed next after the removal of the paste Pst of one convex portion 13t is completed, the previous convex shape The paste Pst removed from the portion 13t is not rubbed against the subsequent convex portion 13t. For this reason, the mask 13 used for the screen printing of the cavity substrate can be sufficiently cleaned, and the printing accuracy can be improved. Further, since the paper member 42 is wound while the paste Pst attached to the lower surface of the convex portion 13t is being removed, the convex portions 13t are adjacent to each other at a very close distance. In addition, it is possible to reliably prevent the paste Pst removed from the front convex portion 13t from being rubbed against the rear convex portion 13t. Further, since the paper member 42 is wound with the winding direction and the winding speed sliding with respect to the cavity portion corresponding mask region MRC, the paper member 42 is rubbed against the lower surface of the convex portion 13t, and the paste Pst Is efficiently removed by the paper member 42.

Although the embodiments of the present invention have been described so far, the present invention is not limited to those shown in the above-described embodiments. For example, in the above-described embodiment, the lower surface of the flat portion corresponding mask region MRF is cleaned after the lower surface of each convex portion 13t of the cavity portion corresponding mask region MRC is cleaned. Vice versa. In the above-described embodiment, the cleaning device 16 included in the screen printing machine 1 moves in the Y-axis direction that is the horizontal plane direction orthogonal to the transport direction (X-axis direction) of the substrate 2 to move the lower surface of the mask 13. Although the cleaning device 16 is designed to be moved, the moving direction of the cleaning device 16 is not particularly limited, and the lower surface of the mask 13 is cleaned by moving in the X-axis direction which is parallel to the transport direction of the substrate 2. May be.

  Provided are a screen printer capable of sufficiently cleaning a mask used for screen printing of a cavity substrate, and a method for cleaning a mask of a screen printer.

DESCRIPTION OF SYMBOLS 1 Screen printer 2 Board | substrate 12 Board | substrate positioning part 13 Mask 13t Convex-shaped part 16 Cleaning apparatus 21 Board | substrate body 41 Nozzle part (paper member support part)
42 Paper member 57 Paper member winding mechanism (paper member winding means)
CV cavity (opening)
cd Cavity part electrode (first electrode)
fd Flat part electrode (second electrode)
MRC Cavity corresponding mask area (first mask area)
Mask area corresponding to MRF flat part (second mask area)
H1 First pattern hole H2 Second pattern hole R Mask contact area Pst Paste

Claims (2)

Substrate positioning for positioning a substrate having a plurality of first electrodes provided on the bottom surface of each of a plurality of openings formed on a part of the top surface of the substrate body and a plurality of second electrodes provided on the top surface of the substrate body And a first mask region and a first mask region in which a first pattern hole corresponding to the first electrode is formed in each of a plurality of downwardly protruding convex portions that fit into the opening of the substrate body And a mask having a flat plate-like second mask region provided with a second pattern hole corresponding to the second electrode, the mask being formed on the upper surface of the substrate positioned by the substrate positioning portion. A screen printing machine for performing screen printing on the second electrode by contacting the second mask region on the upper surface of the substrate after performing screen printing on the first electrode by bringing the first mask region into contact with the first electrode;
The mask contact region formed by moving relative to the mask and suspending the paper member over the upper end of the paper member support portion is sequentially brought into contact with the lower surface of each convex portion of the first mask region, and each convex portion of the first mask region is A cleaning device that removes the paste adhering to the lower surface of the second mask region by removing the paste adhering to the lower surface of the shaped portion and bringing the mask contact region into contact with the lower surface of the second mask region;
The cleaning device takes up the paper member at a winding direction and a winding speed at which the paper member slides with respect to the mask while removing the paste adhered to the lower surface of the convex portion of the first mask region. A screen printing machine comprising a paper member take-up means for performing the above. Substrate positioning for positioning a substrate having a plurality of first electrodes provided on the bottom surface of each of a plurality of openings formed on a part of the top surface of the substrate body and a plurality of second electrodes provided on the top surface of the substrate body And a first mask region and a first mask region in which a first pattern hole corresponding to the first electrode is formed in each of a plurality of downwardly protruding convex portions that fit into the opening of the substrate body And a mask having a flat plate-like second mask region provided with a second pattern hole corresponding to the second electrode, the mask being formed on the upper surface of the substrate positioned by the substrate positioning portion. Screen printing on the first electrode by bringing the first mask region into contact with the first mask region, and then performing a screen printing on the mask of a screen printing machine that performs screen printing on the second electrode by bringing the second mask region into contact with the upper surface of the substrate. A training method,
The cleaning device that forms the mask contact region by wrapping the paper member on the upper end of the paper member support is moved relative to the mask, and the mask contact region is sequentially brought into contact with the lower surface of each convex portion of the first mask region. Removing the paste adhering to the lower surface of each convex portion of the first mask region;
Moving the cleaning device relative to the mask, bringing the mask contact area into contact with the lower surface of the second mask area, and removing the paste adhered to the lower surface of the second mask area,
In the step of removing the paste adhering to the lower surface of each convex portion of the first mask region, the paper member is removed from the first mask while the paste adhering to the lower surface of the convex portion of the first mask region is being removed. A method for cleaning a mask of a screen printing machine, wherein the paper member is wound at a winding direction and a winding speed sliding with respect to the region.

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