JP2011121164A - Surface coated cutting tool - Google Patents
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Abstract
Description
本発明は、鋼、鋳鉄等の鉄系材料の切削加工において、すぐれた靭性、耐熱衝撃性、耐摩耗性を発揮する立方晶窒化ホウ素（以下、ｃＢＮで示す）と窒化チタン（以下、ＴｉＮで示す）との複合硬質膜を被覆形成した表面被覆切削工具に関する。 The present invention provides cubic boron nitride (hereinafter referred to as cBN) and titanium nitride (hereinafter referred to as TiN) that exhibit excellent toughness, thermal shock resistance, and wear resistance in cutting of iron-based materials such as steel and cast iron. And a surface-coated cutting tool having a composite hard film formed thereon.
従来から、硬質薄膜の成膜法としては、物理蒸着（ＰＶＤ）法、化学蒸着（ＣＶＤ）法等がよく知られており、工具基体の表面に、これらの成膜法で硬質膜を被覆形成することにより、耐摩耗性を向上させるとともに表面被覆切削工具の長寿命化が図られている。
近年、硬質薄膜の他の成膜法としてエアロゾルデポジション（Ａｅｒｏｓｏｌ Ｄｅｐｏｓｉｔｉｏｎ。以下、ＡＤで示す）法が開発され、このＡＤ法を利用して、工具基体表面に硬質膜を成膜する表面被覆切削工具について注目されている。
ＡＤ法については、非特許文献１に紹介されているが、図１に示されるＡＤ装置において、サブミクロンオーダーの原料超微粒子をエアロゾル発生器に装填し、高圧ガスと混合、エアロゾル化し、中〜低真空に排気された成膜チャンバー内の基板に高速で吹き付けることで金属、セラミックス膜を成膜するコーティング手法である。
ＡＤ法の成膜の原理は、「常温衝撃固化現象」と命名されており、特にセラミックスの成膜においては、特定範囲のサイズを持つ微細な粒子がノズルからガスと共に送られた際に得る一定範囲の運動エネルギーを持って基板に衝突する際に、微細結晶に破砕し、この粒子同士が緻密に結合しながら膜を形成するというものである。
このＡＤ法による成膜の特徴としては、
（イ）金属やセラミックス（酸化物、非酸化物）の成膜が可能である。
（ロ）高温の熱処理が不要なため、通常の焼結プロセスでは得られない原料粉組成を維持した熱非平衡なセラミックス組織が得られる。
（ハ）高速（条件によってはＰＶＤ、ＣＶＤの３０倍以上）かつ大面積で緻密な微結晶組織を持つコーティングが可能である。
（ニ）基板は、硬度や弾性率などの機械特性に配慮すれば、Ｓｉ，ＳＵＳ３０４，樹脂，ガラスなど広く選択可能である。
等が挙げられる。
Conventionally, physical vapor deposition (PVD) method, chemical vapor deposition (CVD) method, etc. are well known as film formation methods for hard thin films, and hard films are coated on the surface of the tool base by these film formation methods. As a result, the wear resistance is improved and the life of the surface-coated cutting tool is extended.
In recent years, an aerosol deposition (hereinafter referred to as AD) method has been developed as another method for forming a hard thin film, and surface coating cutting for forming a hard film on the surface of a tool substrate by using this AD method. Attention has been focused on tools.
The AD method is introduced in Non-Patent Document 1, but in the AD apparatus shown in FIG. 1, submicron-order raw material ultrafine particles are loaded into an aerosol generator, mixed with high-pressure gas, converted into aerosol, This is a coating technique in which a metal or ceramic film is formed by spraying at a high speed on a substrate in a film forming chamber evacuated to a low vacuum.
The principle of film formation by the AD method is named “normal temperature impact solidification phenomenon”, and in particular, in the film formation of ceramics, a certain amount obtained when fine particles having a specific size range are sent together with gas from a nozzle. When it collides with a substrate with a kinetic energy within a range, it breaks into fine crystals and forms a film while these particles are closely bonded.
As a feature of film formation by this AD method,
(A) Metals and ceramics (oxides, non-oxides) can be formed.
(B) Since a high-temperature heat treatment is not required, a thermal non-equilibrium ceramic structure maintaining a raw material powder composition that cannot be obtained by a normal sintering process is obtained.
(C) High-speed coating (30 or more times higher than PVD and CVD depending on conditions) and a large area and a dense microcrystalline structure are possible.
(D) The substrate can be widely selected from Si, SUS304, resin, glass, etc. in consideration of mechanical properties such as hardness and elastic modulus.
Etc.
上記ＡＤ法の具体的な適用例として、例えば、特許文献１には、Ａｌ２Ｏ３と他のセラミックス（例えば、ＳｉＣ，Ｓｉ３Ｎ４，ＴｉＮ，ＴｉＣＮ，ＴｉＣ，ＡｌＮ，Ｃ，ＢＮ）材料との複合膜をＡＤ法によって形成することにより、ステンレス鋼、合金鋼の切削ですぐれた切削性能を示す表面被覆切削工具が得られることが述べられている。
また、特許文献２には、ダイヤモンド微粒子とセラミック（例えば、Ａｌ２Ｏ３，ＴｉＯ２，ＳｉＯ２，ＡｌＳｉＮＯ，ＳｉＣ，ＴａＣ，Ｂ４Ｃ，ＢＮ，ＳｉＮ，Ｙ２Ｏ３，ＺｒＯ２，ＭｇＯ）粒子との複合膜をＡＤ法によって形成することにより、密着性にすぐれ、Ａｌ合金の切削ですぐれた耐摩耗性を示す表面被覆切削工具が得られることが述べられている。
また、特許文献３には、ＡＤ法によってダイヤモンド膜を形成したダイヤモンド被覆工具が示され、このダイヤモンド被覆工具は摩擦係数が小さく耐摩耗性に優れることが述べられている。
しかし、特許文献１に示される表面被覆切削工具は基板との密着性及び耐摩耗性が十分とはいえず、また、特許文献２、３に示されるものは、硬質膜成分がダイヤモンドであり、このダイヤモンドが鉄系材料と反応を起こすため、鋼、鋳鉄等の鉄系材料の切削工具として用いることはできない。
As a specific application example of the AD method, for example, Patent Document 1 discloses Al 2 O 3 and other ceramics (for example, SiC, Si 3 N 4 , TiN, TiCN, TiC, AlN, C, and BN) materials. It is stated that a surface-coated cutting tool exhibiting excellent cutting performance in cutting stainless steel and alloy steel can be obtained by forming a composite film with
Patent Document 2 discloses diamond fine particles and ceramics (for example, Al 2 O 3 , TiO 2 , SiO 2 , AlSiNO, SiC, TaC, B 4 C, BN, SiN, Y 2 O 3 , ZrO 2 , MgO). It is stated that by forming a composite film with particles by the AD method, it is possible to obtain a surface-coated cutting tool having excellent adhesion and excellent wear resistance by cutting an Al alloy.
Patent Document 3 discloses a diamond-coated tool in which a diamond film is formed by an AD method, and it is stated that this diamond-coated tool has a small friction coefficient and excellent wear resistance.
However, the surface-coated cutting tool shown in Patent Document 1 cannot be said to have sufficient adhesion and abrasion resistance with the substrate, and those shown in Patent Documents 2 and 3 are diamonds whose hard film component is diamond, Since this diamond reacts with iron-based materials, it cannot be used as a cutting tool for iron-based materials such as steel and cast iron.
また、上記ＡＤ法によらない硬質複合膜の成膜法として、例えば、特許文献４、５には、ＥＳＣ（Ｅｌｅｃｔｒｏｓｔａｔｉｃ Ｓｐｒａｙ Ｃｏａｔｉｎｇ）法によって、基体にｃＢＮ粒子を付着させた後、ＣＶＩ（Ｃｈｅｍｉｃａｌ Ｖａｐｏｒ Ｉｎｆｉｌｔｒａｔｉｏｎ）法により、ｃＢＮ粒子間隙にＴｉＮを充填することにより、ｃＢＮとＴｉＮとからなる複合膜を成膜する方法が開示されているが、この成膜法では、高電圧・高温・真空装置が必要とされ、硬質膜の製造コストが嵩むという問題がある。また、ｃＢＮ粒子を付着させてからＴｉＮを成膜するため、膜の組成を傾斜構造にすることができない。このため、基板との密着性が問題である。 As a method for forming a hard composite film not based on the AD method, for example, in Patent Documents 4 and 5, after cBN particles are attached to a substrate by an ESC (Electrostatic Spray Coating) method, CVI (Chemical Vapor) is used. A method of forming a composite film made of cBN and TiN by filling TiBN into the cBN particle gap by the Infiltration method is disclosed. However, in this film forming method, a high voltage / high temperature / vacuum apparatus is used. There is a problem that the manufacturing cost of the hard film increases. In addition, since TiN is deposited after the cBN particles are adhered, the composition of the film cannot be an inclined structure. For this reason, adhesiveness with a board | substrate is a problem.
本発明は、高電圧・高温・真空装置を必要とせず、作製コストの低減を図るとともに、鋼、鋳鉄等の鉄系材料の切削加工にあたり、ＡＤ法により膜の組成を変調させて成膜することにより、靭性、耐熱衝撃性、耐摩耗性にすぐれ、かつ、長期の使用に亘りすぐれた切削性能を発揮する複合硬質膜を被覆形成した表面被覆切削工具を提供することを目的とする。 The present invention does not require a high voltage / high temperature / vacuum device, reduces the production cost, and forms a film by modulating the composition of the film by the AD method in cutting of iron-based materials such as steel and cast iron. Accordingly, an object of the present invention is to provide a surface-coated cutting tool that is coated with a composite hard film that exhibits excellent toughness, thermal shock resistance, and wear resistance, and exhibits excellent cutting performance over a long period of use.
本発明者等は、ｃＢＮとＴｉＮとからなる複合硬質膜に着目し、ＡＤ法によってこれを成膜することにより、工具基体との密着性に優れた複合硬質膜が形成されること、さらに、超硬合金焼結体、ｃＢＮ焼結体、サーメットあるいは高速度鋼等を工具基体とし、その表面にＡＤ法で複合硬質膜を成膜するにあたり、ｃＢＮとＴｉＮとの含有比率をその膜厚方向に沿って調整し、さらに、すくい面、逃げ面の所望特性に応じた組成傾斜構造の複合硬質膜とすることによって、靭性、耐熱衝撃性および耐摩耗性にすぐれた鋼、鋳鉄等の鉄系材料の切削加工に好適な表面被覆切削工具が得られることを見出したのである。 The present inventors pay attention to a composite hard film composed of cBN and TiN, and by forming this by the AD method, a composite hard film having excellent adhesion to the tool substrate is formed. When a cemented carbide sintered body, cBN sintered body, cermet or high speed steel is used as a tool base and a composite hard film is formed on the surface by the AD method, the content ratio of cBN and TiN is determined in the direction of the film thickness. Steel, cast iron, and other iron systems with excellent toughness, thermal shock resistance and wear resistance by adjusting to the above and further forming a composite hard film with a composition gradient structure according to the desired characteristics of the rake face and flank face It has been found that a surface-coated cutting tool suitable for material cutting can be obtained.
本発明は、上記知見に基づいてなされたものであって、
「（１） 工具基体の表面に、立方晶窒化ホウ素と窒化チタンとの複合硬質膜が１〜１５μｍの膜厚で被覆形成された表面被覆切削工具において、上記複合硬質膜の構成成分である立方晶窒化ホウ素と窒化チタンは、工具基体側では窒化チタン含有比率が高く、また、表層側では立方晶窒化ホウ素の含有比率が高くなる組成傾斜構造を備えていることを特徴とする表面被覆切削工具。
（２） すくい面の複合硬質膜の窒化チタンに対する立方晶窒化ホウ素の含有比率は、切れ刃稜線を境界として、逃げ面の複合硬質膜の窒化チタンに対する立方晶窒化ホウ素の含有比率より高いことを特徴とする前記（１）に記載の表面被覆切削工具。
（３） 少なくともすくい面の複合硬質膜における上記組成傾斜構造は、すくい面の複合硬質膜の表層の窒化チタンに対する立方晶窒化ホウ素の含有比率が１．５〜４．０であることを特徴とする前記（１）または（２）に記載の表面被覆切削工具。
（４） 少なくとも逃げ面の複合硬質膜における上記組成傾斜構造は、逃げ面の複合硬質膜の表層の窒化チタンに対する立方晶窒化ホウ素の含有比率が０．６７〜１．５であることを特徴とする前記（１）または（２）に記載の表面被覆切削工具。」
を特徴とするものである。
The present invention has been made based on the above findings,
“(1) In a surface-coated cutting tool in which a composite hard film of cubic boron nitride and titanium nitride is coated on the surface of a tool base with a film thickness of 1 to 15 μm, cubic that is a component of the composite hard film. A surface-coated cutting tool characterized in that the boron nitride and titanium nitride have a composition gradient structure in which the titanium nitride content ratio is high on the tool base side and the cubic boron nitride content ratio is high on the surface layer side. .
(2) The content ratio of cubic boron nitride to titanium nitride of the composite hard film on the rake face is higher than the content ratio of cubic boron nitride to titanium nitride in the composite hard film on the flank face with the cutting edge ridge as a boundary. The surface-coated cutting tool according to (1), which is characterized in that
(3) The above composition gradient structure in at least the rake face composite hard film is characterized in that the content ratio of cubic boron nitride to titanium nitride in the surface layer of the rake face composite hard film is 1.5 to 4.0. The surface-coated cutting tool according to (1) or (2).
(4) The composition gradient structure in at least the flank composite hard film is characterized in that the content ratio of cubic boron nitride to titanium nitride in the surface layer of the flank composite hard film is 0.67 to 1.5. The surface-coated cutting tool according to (1) or (2). "
It is characterized by.
本発明について、以下に説明する。 The present invention will be described below.
本発明では、複合硬質膜を形成する工具基体としては、炭化タングステン基超硬合金、炭窒化チタン基サーメット、立方晶窒化ホウ素基超高圧焼結材料、高速度工具鋼等の、既によく知られている各種切削工具基体材料を用いることができる。
本発明では、上記工具基体表面に、前記ＡＤ（Ａｅｒｏｓｏｌ Ｄｅｐｏｓｉｔｉｏｎ）法により複合硬質膜を成膜する。
まず、本発明の複合硬質膜のＡＤ法による成膜の概要を図１により説明する。
図１において、例えば、粒径が０．１〜１．０μｍのｃＢＮ粉末、粒径が０．１〜１．０μｍのＴｉＮ粉末を、それぞれエアロゾル発生器内に充填し、これを高圧ガス（Ｈｅ，Ａｒ，Ｎ２あるいは空気）と混合し、エアロゾル化し、中、低真空圧の成膜チャンバー内の基板に高速で吹き付けることで、基板上にｃＢＮとＴｉＮとの所望の含有比率からなる複合膜を成膜することができる。
なお、本発明でいう含有比率とは、立方晶窒化ホウ素と窒化チタンの合量に占める体積比率を示し、膜厚方向に０．２μｍ、基板と平行方向に３オｍの領域について断面方向からオージェ電子分光法による面分析を行い、その測定結果より、複合硬質層に占める各成分の体積割合を算出することによって求めた値をいう。
In the present invention, as the tool base for forming the composite hard film, tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, cubic boron nitride-based ultra-high pressure sintered material, high-speed tool steel, etc. are already well known. Various cutting tool substrate materials can be used.
In the present invention, a composite hard film is formed on the surface of the tool base by the AD (Aerosol Deposition) method.
First, an outline of film formation by the AD method of the composite hard film of the present invention will be described with reference to FIG.
In FIG. 1, for example, cBN powder having a particle size of 0.1 to 1.0 μm and TiN powder having a particle size of 0.1 to 1.0 μm are filled in an aerosol generator, and the high pressure gas (He , Ar, N 2 or air), aerosolized, and sprayed at a high speed onto the substrate in the film formation chamber of medium and low vacuum pressure, thereby forming a composite film having a desired content ratio of cBN and TiN on the substrate Can be formed.
In addition, the content ratio as used in the field of this invention shows the volume ratio which occupies for the total amount of cubic boron nitride and titanium nitride, and it is from a cross-sectional direction about the area | region of 0.2 micrometer in a film thickness direction, and 3 micrometers in a direction parallel to a board | substrate. It means a value obtained by performing surface analysis by Auger electron spectroscopy and calculating the volume ratio of each component in the composite hard layer from the measurement result.
本発明においては、上記ＡＤ法を利用して成膜するにあたり、複合硬質膜の下部層を形成する成膜初期段階では、原料微粒子粉末中のＴｉＮ含有比率が高くなるように、また、複合硬質膜の上部層を形成する成膜後期段階では、原料微粒子粉末中のｃＢＮ含有比率が高くなるように、それぞれのエアロゾル発生器内のガス圧を調節することにより、工具基体側ではＴｉＮ含有比率が高く、また、表層側ではｃＢＮの含有比率が高くなる組成傾斜構造を備える複合硬質膜を成膜する。
なお、本発明の複合硬質膜は、その焼結性を高めるために、成膜後、アニーリング、レーザーアニーリングを行ってもよい。
本発明の複合硬質膜は、工具基体側ではＴｉＮ含有比率が高く、ｃＢＮ含有比率が低くなっているため、工具基体との密着性に優れる。
一方、複合硬質膜の表層側では、ｃＢＮ含有比率が高く、ＴｉＮ含有比率が低くなっているため、硬質であって耐摩耗性に優れ、しかも、鉄系材料との反応性が小さいため溶着等を発生する恐れが少ない。
本発明の複合硬質膜は、その膜厚が１μｍ未満であると、すぐれた耐摩耗性を長期の使用に亘って発揮することはできず、一方、その膜厚が１５μｍを超えると、膜内に発生した残留応力により、剥離やチッピングが生じやすくなるため、複合硬質膜の膜厚は、１〜１５μｍと定めた。
In the present invention, when forming a film using the AD method, at the initial stage of film formation in which the lower layer of the composite hard film is formed, the TiN content ratio in the raw material fine particle powder is increased, and the composite hard In the later stage of film formation for forming the upper layer of the film, the TiN content ratio on the tool substrate side is adjusted by adjusting the gas pressure in each aerosol generator so that the cBN content ratio in the raw fine particle powder is increased. In addition, a composite hard film having a high composition gradient structure in which the content ratio of cBN is high on the surface layer side is formed.
In addition, in order to improve the sinterability, the composite hard film of the present invention may be subjected to annealing or laser annealing after film formation.
Since the composite hard film of the present invention has a high TiN content ratio and a low cBN content ratio on the tool base side, it has excellent adhesion to the tool base.
On the other hand, on the surface layer side of the composite hard film, since the cBN content ratio is high and the TiN content ratio is low, it is hard and has excellent wear resistance, and also has low reactivity with iron-based materials, so that welding, etc. There is little possibility to generate.
When the film thickness is less than 1 μm, the composite hard film of the present invention cannot exhibit excellent wear resistance over a long period of use, while when the film thickness exceeds 15 μm, Since the residual stress generated in the film tends to cause peeling and chipping, the thickness of the composite hard film was determined to be 1 to 15 μm.
上記の組成傾斜構造を有する本発明の複合硬質膜は、工具基体側の下部層では、ｃＢＮとＴｉＮの含有比率は相対的にＴｉＮ含有割合が高いため、工具基体との密着性に優れ、工具基体と硬質膜間での付着強度が向上したものとなる。
また、複合硬質膜の表層側の上部層において、ｃＢＮとＴｉＮの含有比率に関し、相対的にｃＢＮ含有割合が高いため、硬質であって耐摩耗性および耐酸化性に優れ、しかも、鋼や鋳鉄等の切削加工においてすぐれた耐溶着性を示す。
さらに、複合硬質膜の中間層は、ｃＢＮ含有比率とＴｉＮ含有比率がほぼ同量のものとして形成されていることから、すぐれた靭性を備えたものとなるばかりか、下部層あるいは上部層との密着強度を高めることとなる。
The composite hard film of the present invention having the above-described composition gradient structure is excellent in adhesion to the tool base because the content ratio of cBN and TiN is relatively high in the lower layer on the tool base side, and the tool base The adhesion strength between the substrate and the hard film is improved.
In addition, in the upper layer on the surface layer side of the composite hard film, since the cBN content ratio is relatively high with respect to the content ratio of cBN and TiN, it is hard and has excellent wear resistance and oxidation resistance, and also steel or cast iron Excellent welding resistance in cutting such as.
Furthermore, since the intermediate layer of the composite hard film is formed so that the cBN content ratio and the TiN content ratio are approximately the same amount, it has not only excellent toughness but also the lower layer or the upper layer. The adhesion strength will be increased.
また、本発明の表面被覆切削工具は、複合硬質膜の組成傾斜構造を、切れ刃稜線を境界として、すくい面あるいは逃げ面のそれぞれに対して、調整することが望ましい。
つまり、一般的に表面被覆切削工具では、そのすくい面には、被削材に対する非反応性と膜の硬さが求められ、一方、逃げ面には界面強度と耐摩耗性が求められているところ、ｃＢＮは鉄系被削材との反応性が低いとともに硬質であるが、ｃＢＮの含有比率が高くなると、ｃＢＮ粒子の界面強度が低下し、切削時に脱落したｃＢＮ粒子によってすきとり摩耗が発生しやすくなる。
そこで、本発明の表面被覆切削工具では、すくい面については、すくい面の複合硬質膜の表層のＴｉＮに対するｃＢＮの含有比率が１．５〜４．０となる組成傾斜構造をとることが望ましい。
ここで、すくい面では、ＴｉＮに対してｃＢＮ含有比率が高いことが望ましいが、ＴｉＮに対するｃＢＮの含有比率が４．０（８０ｖｏｌ％）を越えると、付着強度および界面強度の著しい低下が避けられず、一方、ＴｉＮに対するｃＢＮの含有比率が１．５（６０ｖｏｌ％）未満では、耐クレータ摩耗性の向上効果が少ないことから、すくい面の表層のＴｉＮに対するｃＢＮの含有比率は１．５〜４．０であることが望ましい。
In the surface-coated cutting tool of the present invention, it is desirable to adjust the composition gradient structure of the composite hard film with respect to each of the rake face or the flank face with the cutting edge ridge line as a boundary.
In other words, in general, surface-coated cutting tools require non-reactivity to the work material and film hardness on the rake face, while flank faces require interface strength and wear resistance. However, cBN has low reactivity with iron-based work materials and is hard, but when the content ratio of cBN increases, the interfacial strength of the cBN particles decreases, and the cBN particles dropped off during cutting generate scraping wear. It becomes easy to do.
Therefore, in the surface-coated cutting tool of the present invention, it is desirable that the rake face has a composition gradient structure in which the content ratio of cBN to TiN in the surface layer of the composite hard film on the rake face is 1.5 to 4.0.
Here, on the rake face, it is desirable that the cBN content ratio is high with respect to TiN. However, if the content ratio of cBN with respect to TiN exceeds 4.0 (80 vol%), a significant decrease in adhesion strength and interface strength can be avoided. On the other hand, if the content ratio of cBN to TiN is less than 1.5 (60 vol%), the effect of improving crater wear resistance is small, so the content ratio of cBN to TiN on the surface layer of the rake face is 1.5-4. 0.0 is desirable.
また、本発明の表面被覆切削工具では、逃げ面の複合硬質膜の表層のＴｉＮに対するｃＢＮの含有比率は０．６７〜１．５となる組成傾斜構造をとることが望ましい。
つまり、脱落したｃＢＮ粒子によって生じるすきとり摩耗を抑制するために、ｃＢＮ粒子が脱落しないように界面強度を保つ必要があることから、逃げ面の複合硬質膜の表層のＴｉＮに対するｃＢＮの含有比率は１．５（６０ｖｏｌ％）以下にすることが望ましいが、逃げ面の複合硬質膜の表層のＴｉＮに対するｃＢＮの含有比率が０．６７（４０ｖｏｌ％）未満になると、ｃＢＮの含有率の低下により耐摩耗性が確保できなくなることから、逃げ面の複合硬質膜の表層のＴｉＮに対するｃＢＮの含有比率は０．６７〜１．５であることが望ましい。
なお、ＡＤ法によれば、すくい面の表層あるいは逃げ面の複合硬質膜の表層のｃＢＮ含有比率は、成膜終期の基板各面へのＴｉＮとｃＢＮの吹き付けを調整（例えば、エアロゾル容器内のガス圧を調整）することによって、所望の含有比率を容易に得ることができる。
In the surface-coated cutting tool of the present invention, it is desirable to adopt a composition gradient structure in which the content ratio of cBN to TiN in the surface layer of the composite hard film on the flank is 0.67 to 1.5.
That is, in order to suppress the scraping abrasion caused by the dropped cBN particles, it is necessary to maintain the interface strength so that the cBN particles do not fall off. Therefore, the content ratio of cBN to TiN of the surface layer of the composite hard film on the flank surface is 1.5 (60 vol%) or less is desirable, but when the content ratio of cBN to TiN in the surface layer of the composite hard film on the flank face is less than 0.67 (40 vol%), the resistance is reduced due to a decrease in the content of cBN. Since the wearability cannot be secured, the content ratio of cBN to TiN in the surface layer of the composite hard film on the flank is preferably 0.67 to 1.5.
According to the AD method, the cBN content ratio of the surface layer of the rake face or the composite hard film of the flank face is adjusted by spraying TiN and cBN on each surface of the substrate at the end of film formation (for example, in an aerosol container). The desired content ratio can be easily obtained by adjusting the gas pressure.
上記のとおり、本発明の表面被覆切削工具は、工具基体の表面に、ｃＢＮとＴｉＮとの複合硬質膜が形成され、かつ、複合硬質膜中のｃＢＮとＴｉＮは、工具基体側ではＴｉＮ含有比率が高く、一方、表層側ではｃＢＮ含有比率が高くなる組成傾斜構造を備えているので、複合硬質膜全体として、硬さ、靭性、付着強度に優れる。また、好ましくは、切れ刃稜線を境界として、すくい面の複合硬質膜における窒化チタンに対する立方晶窒化ホウ素の含有比率を、逃げ面の複合硬質膜のそれより高くすること、すくい面の複合硬質膜の表層の窒化チタンに対する立方晶窒化ホウ素の含有比率を１．５〜４．０とすること、逃げ面の複合硬質膜の表層の窒化チタンに対する立方晶窒化ホウ素の含有比率を０．６７〜１．５とすることで、すくい面、逃げ面のそれぞれに求められる特性を備えることができるので、特に、鋼や鋳鉄等の鉄系材料の切削加工において、すぐれた耐溶着性、耐摩耗性を発揮し、長期の使用に亘ってすぐれた耐摩耗性を発揮するとともに、工具寿命の延命化が図られるのである。 As described above, in the surface-coated cutting tool of the present invention, the composite hard film of cBN and TiN is formed on the surface of the tool base, and the cBN and TiN in the composite hard film have a TiN content ratio on the tool base side. On the other hand, since it has a composition gradient structure in which the cBN content ratio is high on the surface layer side, the composite hard film as a whole is excellent in hardness, toughness, and adhesion strength. Preferably, the ratio of cubic boron nitride to titanium nitride in the composite hard film on the rake face is made higher than that of the composite hard film on the flank face, with the cutting edge ridge as a boundary, and the composite hard film on the rake face The content ratio of cubic boron nitride to titanium nitride in the surface layer is 1.5 to 4.0, and the content ratio of cubic boron nitride to titanium nitride in the surface layer of the composite hard film on the flank is 0.67 to 1. .5, it is possible to provide the characteristics required for each of the rake face and the flank face, so that excellent welding resistance and wear resistance can be obtained particularly in cutting of iron-based materials such as steel and cast iron. In addition to exhibiting excellent wear resistance over a long period of use, the tool life can be extended.
以下に、本発明の表面被覆切削工具を実施例に基づいて説明する。
なお、ここでは工具基体材料として超硬合金基体を使用したが、工具基体としては、ｃＢＮ焼結体、サーメットあるいは高速度鋼等の通常用いられる工具基体を使用することがもちろん可能である。
Below, the surface covering cutting tool of this invention is demonstrated based on an Example.
Although a cemented carbide substrate is used here as the tool substrate material, it is of course possible to use a commonly used tool substrate such as a cBN sintered body, cermet or high speed steel as the tool substrate.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、ボールミルで９６時間湿式混合し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を６Ｐａの真空中、温度：１４００℃に１時間保持の条件で焼結し、所定寸法に外周加工した後、切刃部に幅：０．１３ｍｍ、角度２５°のホーニング加工を施し、仕上げ研磨を施すことにより、いずれもＷＣ基超硬合金からなり、かつＩＳＯ規格ＳＮＧＡ１２０４１２のインサート形状をもった超硬合金基体１〜１０を製造した。 As raw material powders, WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and Co powder, all having an average particle diameter of 1 to 3 μm, were prepared. The mixture is blended for 96 hours by a ball mill, dried by a ball mill, dried, and then pressed into a green compact at a pressure of 100 MPa. The green compact is vacuumed at 6 Pa at a temperature of 1400 ° C. for 1 hour. After sintering under holding conditions and processing the outer periphery to a predetermined dimension, the cutting edge is subjected to honing with a width of 0.13 mm and an angle of 25 °, and finish polishing is performed. And cemented carbide bases 1 to 10 having an ISO standard SNGA12041 insert shape were manufactured.
ついで、上記の超硬合金基体を、アセトン中で超音波洗浄し、乾燥した状態で、図１に示されるＡＤ装置の成膜チャンバー内の公転軸に装着し、
まず、粒径が０．１〜１．０μｍのｃＢＮ粉末と、粒径が０．１〜１．０μｍのＴｉＮ粉末の原料微粒子を、それぞれ、エアロゾル発生器に装入し、粉末の凝集を防ぐため、エアロゾル発生器の下の振動機を振動させながらエアロゾル発生器にガスを流し、Ａｒガスを用いて、ガス圧力３００Ｐａ、ガス搬入速度５Ｌ／ｍｉｎで原料微粒子をエアロゾル化し、同様の方法でエアロゾル化したＴｉＮ粉末と混合し、成膜チャンバー内の超硬合金基体に所定時間ノズルから吹きつけ、かつ、ノズルを１〜５ｍｍ／ｓｅｃで移動させることにより、工具基体表面に、図２に示される所定膜厚、所定のｃＢＮ／ＴｉＮ比率の複合膜（図２では、第１下部層，第２下部層，中間層，上部層として示す）を、ｃＢＮおよびＴｉＮ粉末が入ったエアロゾル容器内のガス圧を調整することで形成し、
ＩＳＯ規格ＳＮＧＡ１２０４１２に規定するスローアウエイチップ形状の本発明複合硬質膜被覆工具１〜１０（以下、本発明工具１〜１０という）を作製した。
Next, the above-mentioned cemented carbide substrate is ultrasonically cleaned in acetone and dried, and attached to the revolution shaft in the film forming chamber of the AD apparatus shown in FIG.
First, raw material fine particles of a cBN powder having a particle size of 0.1 to 1.0 μm and a TiN powder having a particle size of 0.1 to 1.0 μm are respectively charged into an aerosol generator to prevent aggregation of the powder. Therefore, gas is flowed to the aerosol generator while vibrating the vibrator under the aerosol generator, and the raw material fine particles are aerosolized using Ar gas at a gas pressure of 300 Pa and a gas carry-in speed of 5 L / min. FIG. 2 shows the surface of the tool substrate by mixing with the TiN powder formed, spraying the cemented carbide substrate in the film forming chamber from the nozzle for a predetermined time, and moving the nozzle at 1 to 5 mm / sec. Aerosol container containing cBN and TiN powder with a composite film (shown as a first lower layer, a second lower layer, an intermediate layer and an upper layer in FIG. 2) having a predetermined film thickness and a predetermined cBN / TiN ratio It is formed by adjusting the gas pressure inside,
The present invention composite hard film coated tools 1 to 10 (hereinafter referred to as the present invention tools 1 to 10) having a throwaway tip shape defined in ISO standard SNGA12041 were produced.
また、上記超硬合金基体１〜１０について、上記本発明工具１〜１０と同様な方法により、第１下部層，第２下部層，中間層を成膜した後、上部層の成膜時に、ｃＢＮおよびＴｉＮ粉末が入ったエアロゾル容器内のガス圧を、すくい面および逃げ面のそれぞれに対して調整することにより、すくい面の表層および逃げ面の表層に、それぞれ、表４に示すｃＢＮ含有比率を有するＩＳＯ規格ＳＮＧＡ１２０４１２に規定するスローアウエイチップ形状の本発明複合硬質膜被覆工具１１〜２０（以下、本発明工具１１〜２０という）を作製した。 Further, after the first lower layer, the second lower layer, and the intermediate layer are formed on the cemented carbide substrates 1 to 10 by the same method as the above-described tools 1 to 10, the upper layer is formed. By adjusting the gas pressure in the aerosol container containing cBN and TiN powder with respect to each of the rake face and the flank face, the cBN content ratios shown in Table 4 are respectively shown in the rake face surface and the flank face layer. The present invention composite hard film-coated tools 11 to 20 (hereinafter referred to as the present invention tools 11 to 20) having a throwaway tip shape defined in ISO standard SNGA12041 having the followings were produced.
さらに、上記超硬合金基体１〜１０について、成膜初期よりｃＢＮおよびＴｉＮ粉末が入ったエアロゾル容器内のガス圧を、すくい面および逃げ面のそれぞれに対して調整することにより、すくい面の表層および逃げ面の表層に、それぞれ、表５に示すｃＢＮ含有比率を有するＩＳＯ規格ＳＮＧＡ１２０４１２に規定するスローアウエイチップ形状の本発明複合硬質膜被覆工具２１〜３０（以下、本発明工具２１〜３０という）を作製した。 Further, with respect to the cemented carbide substrates 1 to 10, by adjusting the gas pressure in the aerosol container containing cBN and TiN powder from the initial stage of film formation to each of the rake face and the flank face, the surface layer of the rake face In the surface layer of the flank, the present invention composite hard film coated tools 21 to 30 of the throwaway tip shape defined in ISO standard SNGA120204 having the cBN content ratio shown in Table 5 (hereinafter referred to as the present invention tools 21 to 30). Was made.
比較のため、原料粉末として、いずれも０．５〜４μｍの範囲内の平均粒径を有するｃＢＮ粉末、ＴｉＮ粉末、ＡｌＮ粉末、ＴｉＣ粉末、ＴｉＣＮ粉末、Ｔｉ３Ａｌ粉末、Ｔｉ２Ａｌ粉末、ＴｉＡｌ３粉末、Ａｌ粉末、Ａｌ２Ｏ３粉末、ＷＣ粉末を用意し、これら原料粉末を表２に示される配合組成に配合し、ボールミルで８０時間湿式混合し、乾燥した後、１２０ＭＰａの圧力で直径：５０ｍｍ×厚さ：１．５ｍｍの寸法をもった圧粉体にプレス成形し、ついでこの圧粉体を、圧力：１Ｐａの真空雰囲気中、９００〜１３００℃の範囲内の所定温度に６０分間保持の条件で焼結して切刃片用予備焼結体とし、この予備焼結体を、別途用意した、Ｃｏ：１６質量％、ＷＣ：残りの組成、並びに直径：５０ｍｍ×厚さ：２ｍｍの寸法をもったＷＣ基超硬合金製支持片と重ね合わせた状態で、通常の超高圧焼結装置に装入し、通常の条件である圧力：４ＧＰａ、温度：１２００〜１４００℃の範囲内の所定温度に保持時間：０．８時間の条件で超高圧焼結し、焼結後上下面をダイヤモンド砥石を用いて研磨し、ワイヤー放電加工装置またはダイヤモンド切断機にて一辺３ｍｍの正三角形状に分割し、さらにＣｏ：６質量％、ＴａＣ：５質量％、ＷＣ：残りの組成およびＩＳＯ規格ＳＮＧＡ１２０４１２の形状（厚さ：４．７６mm×一辺長さ：１２．７mmの正方形）をもったＷＣ基超硬合金製インサート本体のろう付け部（コーナー部）に、質量％で、Ｃｕ：２６％、Ｔｉ：５％、Ｎｉ：２．５％、Ａｇ：残りからなる組成を有するＡｇ合金のろう材を用いてろう付けし、所定寸法に外周加工した後、切刃部に幅：０．１３ｍｍ、角度：２５°のホーニング加工を施し、さらに仕上げ研摩を施すことによりＩＳＯ規格ＳＮＧＡ１２０４１２のインサート形状をもち、表２に示されるｃＢＮ焼結体からなるｃＢＮ工具１〜１０（以下、比較例工具１〜１０という）を作製した。 For comparison, cBN powder, TiN powder, AlN powder, TiC powder, TiCN powder, Ti 3 Al powder, Ti 2 Al powder, TiAl, all having an average particle diameter in the range of 0.5 to 4 μm as a raw material powder 3 powder, Al powder, Al 2 O 3 powder and WC powder are prepared, these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 80 hours, dried, and then subjected to a diameter of 120 MPa. : Press molded into a green compact with dimensions of 50 mm × thickness: 1.5 mm, and this green compact is then subjected to a predetermined temperature in the range of 900 to 1300 ° C. for 60 minutes in a vacuum atmosphere of 1 Pa. It sinters on the conditions of holding | maintenance, and it is set as the pre-sintering body for cutting-blade pieces, This pre-sintering body prepared separately, Co: 16 mass%, WC: Remaining composition, Diameter: 50 mm x thickness: 2 mm With dimensions In a state of being superposed on a WC-based cemented carbide support piece, it is inserted into an ordinary ultra-high pressure sintering apparatus and maintained at a predetermined temperature within a range of pressure: 4 GPa, temperature: 1200 to 1400 ° C., which are normal conditions. Time: Super high pressure sintering under the condition of 0.8 hours, and after sintering, the upper and lower surfaces are polished with a diamond grindstone and divided into a regular triangle shape with a side of 3 mm by a wire electric discharge machine or a diamond cutting machine. Co: 6% by mass, TaC: 5% by mass, WC: remaining composition and WC-base cemented carbide with ISO standard SNGA1204112 shape (thickness: 4.76 mm × one side length: 12.7 mm square) For the brazing part (corner part) of the insert body, a brazing material of an Ag alloy having a composition consisting of Cu: 26%, Ti: 5%, Ni: 2.5%, and Ag: the remainder will be used. Attached to the outer circumference to the specified dimensions After processing, the cutting edge portion is subjected to honing processing with a width of 0.13 mm and an angle of 25 °, and further subjected to finish polishing to have an ISO standard SNGA12041 insert shape. From the cBN sintered body shown in Table 2 CBN tools 1 to 10 (hereinafter referred to as comparative example tools 1 to 10) were produced.
参考のため、実施例で使用した超硬合金基体１〜１０の上に、粒径が０．１〜１．０μｍのｃＢＮ粉末をＡＤ法による成膜を試みたが、成膜することができなかった。 For reference, an attempt was made to form a cBN powder having a particle size of 0.1 to 1.0 μm on the cemented carbide substrates 1 to 10 used in the examples by the AD method. There wasn't.
上記本発明工具１〜３０の各層の膜組成を、第１下部層、第2下部層、中間層および上部層について、その厚さ方向に０．２μｍ、基板と平行方向に３μmの領域の領域について、断面加工した試料の断面方向からオージェ電子分光法により測定したところ、それぞれ図２〜図６に示される目標とするｃＢＮ／ＴｉＮ比率と実質的に同じｃＢＮ／ＴｉＮ比率を示した。なおＡＤ法では成膜時にセラミックス粒子が基板に衝突する際に、数GPa程度の圧縮応力が発生し、セラミックス粒子が、衝突時に脆性破壊あるいは塑性変形するため、原料粒子が細かく破砕され、前記膜厚方向に０．２μmの領域内でも含有比率を調整することが可能である。
表３、表４、表５にｃＢＮ／ＴｉＮ比率を示す。
また、本発明工具１〜３０の膜厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値（５ヶ所の平均値）を示した。
これらの測定値を、表３、表４、表５に示す。
The film composition of each layer of the inventive tools 1 to 30 is as follows: the first lower layer, the second lower layer, the intermediate layer and the upper layer are 0.2 μm in the thickness direction and 3 μm in the direction parallel to the substrate When measured by Auger electron spectroscopy from the cross-sectional direction of the cross-section processed sample, the cBN / TiN ratio substantially the same as the target cBN / TiN ratio shown in FIGS. In the AD method, when the ceramic particles collide with the substrate during film formation, a compressive stress of about several GPa is generated, and the ceramic particles are brittlely fractured or plastically deformed during the collision. It is possible to adjust the content ratio even in the region of 0.2 μm in the thickness direction.
Tables 3, 4 and 5 show the cBN / TiN ratio.
Moreover, when the film thickness of this invention tool 1-30 was cross-sectional measured using the scanning electron microscope, all showed the average value (5 average values) substantially the same as target layer thickness.
These measured values are shown in Table 3, Table 4, and Table 5.
上記の本発明工具１〜３０および比較例工具１〜１０を用い、以下の切削条件で切削加工試験を実施した。
《切削条件１》
被削材： ＪＩＳ・ＳＣｒ４２０（硬さＨＲＡ：６２）の丸棒、
切削速度： ２３０ ｍ／ｍｉｎ、
送り： ０．２０ ｍｍ／ｒｅｖ、
切込み：０．２０ ｍｍ、
切削時間： ５ 分
の条件での、高硬度クロム鋼の乾式連続切削加工試験、
《切削条件２》
被削材： ＪＩＳ・ＳＵＪ２（硬さＨＲＡ：６０）の長さ方向等間隔４本縦溝入り丸棒、
切削速度： １８０ ｍ／ｍｉｎ、
送り： ０．１５ ｍｍ／ｒｅｖ、
切込み： ０．２０ ｍｍ、
切削時間： ５ 分
の条件での、焼入れ軸受鋼の乾式断続切削加工試験、
を行い、切刃の逃げ面摩耗幅を測定した。
上記切削条件１，２による切削加工試験の測定結果を表６に示した。
Using the above-described inventive tools 1 to 30 and comparative tools 1 to 10, a cutting test was performed under the following cutting conditions.
<< Cutting conditions 1 >>
Work material: JIS / SCr420 (hardness HRA: 62) round bar,
Cutting speed: 230 m / min,
Feed: 0.20 mm / rev,
Cutting depth: 0.20 mm,
Cutting time: Dry continuous cutting test of high-hardness chromium steel under the condition of 5 minutes,
<< Cutting conditions 2 >>
Work material: JIS / SUJ2 (Hardness HRA: 60) lengthwise equidistant four round grooved round bars,
Cutting speed: 180 m / min,
Feed: 0.15 mm / rev,
Cutting depth: 0.20 mm,
Cutting time: Dry interrupted cutting test of hardened bearing steel under the condition of 5 minutes,
The flank wear width of the cutting blade was measured.
The measurement results of the cutting test under the above cutting conditions 1 and 2 are shown in Table 6.
表６に示される結果から、本発明工具１〜１０は、複合硬質膜がｃＢＮとＴｉＮの複合膜として構成され、かつ、工具基体側ではＴｉＮ含有比率が高く、また、表層側ではｃＢＮ含有比率が高くなる組成傾斜構造を備えていることから、鉄系材料の切削加工では、硬質被覆層がすぐれた密着強度、高温硬さ、靭性を備え、溶着、欠損等の発生の恐れはなく、長期の使用に亘ってすぐれた耐摩耗性を発揮する。
また、本発明工具１１〜３０は、すくい面表層あるいは逃げ面表層で所定のｃＢＮ含有比率をさらに備えていることから、クレータ摩耗、すきとり摩耗の発生も全く見られず、長期の使用に亘ってすぐれた耐摩耗性を発揮するものであった。
これに対して、比較例工具１〜１０においては、欠損発生、耐摩耗性不足等により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Table 6, the inventive tools 1 to 10 are configured such that the composite hard film is a composite film of cBN and TiN, and the TiN content ratio is high on the tool substrate side, and the cBN content ratio is on the surface layer side. Because of the high composition gradient structure, the hard coating layer has excellent adhesion strength, high temperature hardness, toughness, and there is no risk of welding, fracture, etc. Exhibits excellent wear resistance over use.
In addition, since the tools 11 to 30 of the present invention are further provided with a predetermined cBN content ratio in the rake surface layer or the flank surface layer, no occurrence of crater wear and scraping wear is observed at all, and the tool is used for a long time. It exhibited excellent wear resistance.
On the other hand, it is apparent that the comparative tools 1 to 10 reach the service life in a relatively short time due to occurrence of defects, insufficient wear resistance, and the like.
上述のように、この発明の複合硬質膜を被覆形成した表面被覆切削工具は、鋼、鋳鉄等の切削加工に用いた場合に好適であるが、他の被削材の切削加工に用いることも勿論可能であり、さらに、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、低コスト化に十分満足に対応できるものである。 As described above, the surface-coated cutting tool formed by coating the composite hard film of the present invention is suitable for use in cutting of steel, cast iron, etc., but may also be used for cutting of other work materials. Of course, this is possible, and it is possible to satisfactorily meet the demands for higher performance of the cutting apparatus, labor saving and energy saving of cutting, and cost reduction.
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