JP2011112193A5 - - Google Patents

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Publication number
JP2011112193A5
JP2011112193A5 JP2009271184A JP2009271184A JP2011112193A5 JP 2011112193 A5 JP2011112193 A5 JP 2011112193A5 JP 2009271184 A JP2009271184 A JP 2009271184A JP 2009271184 A JP2009271184 A JP 2009271184A JP 2011112193 A5 JP2011112193 A5 JP 2011112193A5
Authority
JP
Japan
Prior art keywords
arm
output shaft
nut
axis
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009271184A
Other languages
English (en)
Japanese (ja)
Other versions
JP5521512B2 (ja
JP2011112193A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009271184A priority Critical patent/JP5521512B2/ja
Priority claimed from JP2009271184A external-priority patent/JP5521512B2/ja
Publication of JP2011112193A publication Critical patent/JP2011112193A/ja
Publication of JP2011112193A5 publication Critical patent/JP2011112193A5/ja
Application granted granted Critical
Publication of JP5521512B2 publication Critical patent/JP5521512B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009271184A 2009-11-30 2009-11-30 アクチュエータ Expired - Fee Related JP5521512B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009271184A JP5521512B2 (ja) 2009-11-30 2009-11-30 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009271184A JP5521512B2 (ja) 2009-11-30 2009-11-30 アクチュエータ

Publications (3)

Publication Number Publication Date
JP2011112193A JP2011112193A (ja) 2011-06-09
JP2011112193A5 true JP2011112193A5 (enExample) 2013-01-17
JP5521512B2 JP5521512B2 (ja) 2014-06-18

Family

ID=44234678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009271184A Expired - Fee Related JP5521512B2 (ja) 2009-11-30 2009-11-30 アクチュエータ

Country Status (1)

Country Link
JP (1) JP5521512B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3039157B2 (ja) 1992-08-21 2000-05-08 日本電気株式会社 外部同期回路
KR101215489B1 (ko) 2010-11-23 2012-12-26 제이와이피글로벌 주식회사 베어링부재 및 이를 구비하는 베어링 조인트 장치
JP6224383B2 (ja) * 2013-09-05 2017-11-01 Ntn株式会社 ボールねじ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131412A (ja) * 1982-01-28 1983-08-05 Hideo Nakagawa 流体圧シリンダ
JP4576982B2 (ja) * 2004-11-09 2010-11-10 日本精工株式会社 ボールねじ装置
JP2006236746A (ja) * 2005-02-24 2006-09-07 Nissin Ion Equipment Co Ltd イオンビーム照射装置

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