JP2011090528A - Vacuum processor and graph line display method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To compare a plurality of graphs in an overlapped manner. <P>SOLUTION: On a screen 100, when graph lines 132 of a plurality of measurement values of vacuum processing have different peaks, first and second measure lines 101 and 102 are aligned with the peak of the other graph line 132, first and second time on an X axis where the first and the second measure lines 101 and 102 are located are displayed, the graph line 132 is selected and moved, the peak positions are aligned with each other, and the measurement values are compared. Thus, it is possible to correct the disturbance at a graph start point using noise, to achieve accurate comparison. It is possible to move the graph 132 while viewing a control signal or the shape of the graph line 132, thereby facilitating correction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a technical field of a vacuum processing apparatus, and more particularly to mass production technology using a vacuum processing apparatus.

Vacuum processing techniques include film formation techniques such as sputtering, CVD, and vapor deposition, etching techniques, surface modification techniques, impurity implantation techniques, and vacuum drying techniques, and are used in a wide range of fields.
When mass-producing products of the same product type using the vacuum processing technology, the same vacuum processing is performed on the processing object of the same standard, but the quality varies.
When checking the cause of quality variation or managing the manufacturing process so that the variation does not cause defective products, measure the status of the vacuum processing equipment in operation and compare and verify the measurement results between lots. To be done.

In particular, if you want to quantitatively check the difference in operating current, temperature, pressure, etc. of equipment in the vacuum processing equipment between lots or between vacuum processing equipment, measure and memorize the measured values during the manufacturing process. In addition, the measured values were graphed by an inspection device and their shapes were compared.
However, the number of devices to be measured in the vacuum processing apparatus has increased, and the types of physical quantities that are items to be measured have increased, making it difficult to graph and compare large amounts of measured values.

In particular, it has recently become important to be able to compare device data by visual recognition, but when graphing measured values for multiple vacuum treatments, visibility can be improved if multiple graph lines can be overlaid and compared. It is very time-consuming to superimpose by manipulating time and measured values.

JP 2009-80844 A

  An object of the present invention is to provide a technique for solving the above-described problems of the prior art, and according to the present invention, it is possible to easily and accurately superimpose and compare a large number of measurement values.

The present invention relates to a vacuum processing unit that vacuum-processes an object to be processed disposed in a vacuum chamber, and a plurality of measurement values output from the vacuum processing unit together with the measurement time of the measurement value and the vacuum processing. A storage device that stores information, a calculation device that calculates the measurement value, and a display device that displays a calculation result of the calculation device, and when a predetermined number of the processing objects are continuously subjected to the same vacuum processing The measurement value of one lot, and a vacuum processing apparatus that stores the measurement values of a plurality of lots in the storage device, the storage device stores a data analysis program, the data analysis program, When a measurement value for displaying a graph line is selected from the plurality of measurement values stored in the storage device, the measurement time of the selected measurement value is a time from a predetermined reference time X On-axis conversion The position of the measured value on the X-axis is obtained from the converted time on the X-axis, with the predetermined position on the X-axis of the XY coordinate as the position of the reference time, and from the magnitude of the measured value A position on the Y axis is obtained, a graph line is generated from the position on the X axis and the position on the Y axis of the plurality of measurement values at which the measurement times are continuous, and together with the XY coordinates, the graph line is generated. When one of the graph lines displayed on the display device is selected, the other displayed graph lines belonging to the lot of the selected graph line are also selected together The selected graph line is a vacuum processing apparatus configured to be able to move on the XY coordinates together in the direction in which the X axis extends by the same distance.
Further, according to the present invention, a control signal including an operation signal for operating the processing apparatus that performs the vacuum processing and a stop signal for stopping the operation is output from the control apparatus, and the control signal starts the operation Stored in the storage device together with an operation start time and an operation stop time to stop the operation, and the data analysis program selects a measurement value for displaying a graph line from the plurality of measurement values stored in the storage device Then, the measurement time of the selected measurement value is converted into an X-axis conversion time that is a time from a predetermined reference time, and on the display device, the position is separated from the X-axis. The time axis is displayed in parallel with the X axis, the predetermined position on the time axis is set as the reference time, and the X axis indicated by the intersection where a straight line parallel to the Y axis intersects the X axis and the time axis. Up conversion time The position on the time axis of the operation start time and the operation stop time is determined so that the conversion time on the time axis is the same time, and on the display device, the operation signal is said height indicating a stop signal to display the control signal at a timing chart with different horizontal component, the timing chart belonging to the same said lot and the graph line selected, together with the selected said graph lines, a vacuum processing apparatus in parallel with the time axis Ru is the distance in the same direction.
In addition, the present invention stores a vacuum processing unit that vacuum-processes an object to be processed disposed in a vacuum chamber, and a plurality of measurement values output by the vacuum processing unit in association with the vacuum processing together with a measurement time. A storage device, a calculation device that calculates the measurement value, and a display device that displays a calculation result of the calculation device, and the predetermined number of substrates subjected to the vacuum processing in succession is defined as one lot. An operation for operating the apparatus for performing the vacuum processing, with the measurement values obtained when the processing object is continuously processed in the same vacuum as one lot, the measurement values of a plurality of lots being stored in the storage device A control signal including a signal and a stop signal for stopping the operation is stored in the storage device in association with the vacuum processing together with the operation start time for starting the operation and the operation stop time for stopping the operation. true A data processing program is stored in the storage device, and the data analysis program selects a measurement value for displaying a graph line from the plurality of measurement values stored in the storage device. Then, the measurement time of the selected measurement value is converted into an X-axis conversion time that is a time from a predetermined reference time, and a predetermined position on the X-axis of an XY coordinate is converted to the position of the reference time. As described above, the position on the X-axis of the measurement value is obtained from the converted time on the X-axis, the position on the Y-axis is obtained from the magnitude of the measurement value, and the plurality of measurement values having the measurement time continuous A plurality of graph lines are generated from the position on the X-axis and the position on the Y-axis, and are displayed on the display device together with the XY coordinates, and the operation start time stored in the storage device and the Operation stop time from the reference time The time converted on the time axis is obtained, and on the display device, the time axis is displayed at a position separated from the X axis in parallel with the X axis, and a straight line parallel to the Y axis is Finding the position on the time axis of the operation start time and the operation stop time so that the converted time on the X axis and the converted time on the time axis respectively indicated by the intersections intersecting with the time axis are the same time, On the display device, on the time axis, the control signal is displayed in a timing chart having horizontal lines having different heights indicating the operation signal and the stop signal , and any one of the displayed timing charts When one timing chart is selected, other displayed timing charts belonging to the lot to which the selected timing chart belongs are also selected together, and the selected timing is selected . And the graph line belonging to the same lot as the selected timing chart is configured to be able to move on the time axis together in the same direction in the same direction in the direction in which the time axis extends. The vacuum processing apparatus is configured to be moved by the same distance in the same direction together with the timing chart .
Further, the present invention is two out of the moved the recalculates the X-axis on the converted time from the position of the X-axis of the measurement values of the graph line, a plurality of the graph line displayed on said display device When the above graph line is selected as the first selection group and the X-axis conversion time on the X-axis is designated as the first time, the graph line on the X-axis of the first selection group Of the conversion times, the first measurement value corresponding to the X-axis conversion time closest to the first time is set as the first measurement value for each graph line, and the display device in the first display measured values for each of the graphs line selected to a vacuum processing apparatus configured so that displays a difference between the first measured value.
Moreover, this invention is displayed on the said display apparatus, the graph line of the 2nd selection group is selected from the said several graph lines other than the said 1st selection group, and the said X-axis conversion time on the said X-axis is When instructed as the second time, the measurement value corresponding to the X-axis converted time closest to the second time among the X-axis converted times of the graph lines of the second selection group a second measurement value and second measurement value for each said graph line is, the difference between the second measurement and the first measurement value is configured so that is displayed on the display device It is a vacuum processing apparatus .
In the present invention, the display device displays first and second main major lines parallel to the Y axis, and an intersection of each graph line and the first main major line of the first selection group. The converted time on the X-axis is the first time for each graph line, and the converted time on the X-axis of the intersection of each graph line of the second selection group and the second main major line and the said second time for each said graph line, the first, the position of the second main measure line is configured to be changed, the first, the position of the second main measure line is changed Then, said 1st, 2nd time is a vacuum processing apparatus comprised so that it might each be changed to the said X-axis conversion time which said 1st, 2nd main major line changed.
Further, the present invention corresponds to a vacuum processing unit that vacuum-processes a processing object disposed in a vacuum chamber, and a plurality of measurement values output by the vacuum processing unit together with the vacuum processing together with a measurement time of the measurement value. And a storage device that stores information, a calculation device that calculates the measurement value, and a display device that displays a calculation result of the calculation device, and when a predetermined number of the processing objects are continuously subjected to the vacuum processing The measured value of one lot is taken as one lot, and a graph line of the measured value stored in the storage device of the vacuum processing apparatus in which the measured values of the plurality of lots are stored in the storage device is displayed on the display device. In the graph line display method, when a measurement value for displaying a graph line is selected from the plurality of measurement values stored in the storage device, the measurement time of the selected measurement value is set to a predetermined value. The time from the reference time In terms of X-axis on the conversion time, and the predetermined position on the X-axis of the X-Y coordinates as a position of the reference time, obtains the position on the X-axis of the measurement values from the X-axis on the conversion time, the seeking a position on the size or et Y axis measurements, the generates a graph line and a position on the X-axis of the plurality of the measured values the measurement time is continuous with the position on the Y axis displayed on the display device together with the X-Y coordinate of the indicated the graph line, to be able to select the desired graph line, when any one of the graph line is Ru is selected, the graph line selected the other displayed the graph lines belonging to the lot are also selected together, is selected the graph line so that could same distance move together on the X-Y coordinates to a direction in which the X axis extends in The graph line display method .
Further, according to the present invention, a control signal including an operation signal for operating the processing apparatus that performs the vacuum processing and a stop signal for stopping the operation is output from the control apparatus, and the control signal starts the operation Stored in the storage device together with an operation start time and an operation stop time to stop the operation, and when a measurement value for displaying a graph line is selected from the plurality of measurement values stored in the storage device, The measurement time of the selected measurement value is converted into an X-axis conversion time that is a time from a predetermined reference time, and is parallel to the X-axis at a position separated from the X-axis on the display device. and displaying a two-time axis, the predetermined position and the reference time on the time axis, before SL Y-axis and the X-axis on the conversion time indicated cross the intersection, each parallel line within the said time axis and said X-axis And time converted on the time axis Seeking a position on the time axis of the operation stop time and before Symbol operation start time as the same time, the display on the device, on the time axis, high indicating the stop signal and the operation signal is is displaying the control signal at a timing chart with different horizontal component, the timing chart belonging to the same said lot with the selected graph line, together with the selected said graph line, parallel to the time axis is a graph lines display method Ru is the distance in the same direction.
In addition, the present invention stores a vacuum processing unit that vacuum-processes an object to be processed disposed in a vacuum chamber, and a plurality of measurement values output from the vacuum processing unit in association with the vacuum processing together with a measurement time. A storage device; a calculation device that calculates the measurement value; and a display device that displays a calculation result of the calculation device. The measurement value when the processing object is continuously subjected to the same vacuum processing is taken as one lot, the measurement values of a plurality of the lots are stored in the storage device, and an operation signal for operating the vacuum processing device And a control signal including a stop signal for stopping the operation are stored in the storage device in association with the vacuum processing together with an operation start time for starting the operation and an operation stop time for stopping the operation. A graph line display method for displaying a graph line of the measurement value stored in the storage device of the empty processing device on the display device, wherein a graph line is obtained from a plurality of the measurement values stored in the storage device. Is selected, the measurement time of the selected measurement value is converted into an X-axis conversion time that is a time from a predetermined reference time, and the X-Y coordinate on the X-axis is converted. Using the predetermined position as the reference time position, the position on the X axis of the measurement value is obtained from the converted time on the X axis, the position on the Y axis is obtained from the magnitude of the measurement value, and the measurement time is continuous. A plurality of graph lines are generated from the positions on the X-axis and the positions on the Y-axis of the plurality of measurement values being displayed, displayed on the display device together with the XY coordinates, and stored in the storage device The reference of the operation start time and the operation stop time performed The time converted on the time axis, which is the time from the beginning, is obtained. On the display device, the time axis is displayed in parallel with the X axis at a position separated from the X axis, and a straight line parallel to the Y axis is The converted time on the X axis and the converted time on the time axis indicated by the intersections intersecting the X axis and the time axis are the same time, and the operation start time and the operation stop time on the time axis. A position is obtained, and on the display device, the control signal is displayed in a timing chart having horizontal line segments having different heights indicating the operation signal and the stop signal on the time axis, and the timing chart is displayed. When any one of the timing charts is selected, other displayed timing charts belonging to the lot to which the selected timing chart belongs are also selected and selected. The timing chart is configured to be able to move on the time axis in the same direction and in the same direction in the direction in which the time axis extends, and the graph line belonging to the same lot as the selected timing chart is selected. is a graph lines display method wherein Ru is the distance in the same direction along with the timing chart.
Further, the present invention, the double the X-axis on the converted time from the position of the X-axis of the measurement of moving the graph line recalculated from among the plurality of the graph line displayed on said display device When the X-axis conversion time on the X-axis is designated as the first time when the plurality of graph lines are selected as the first selection group, the X-axis of each graph line of the first selection group Among the up-converted times, a first measured value corresponding to the X-axis converted time closest to the first time is set as a first measured value for each graph line, and the display device In the graph line display method , the first measurement value is displayed for each selected graph line, and the difference between the first measurement values is displayed.
In the present invention, the graph line of the second selection group is selected from the plurality of graph lines other than the first selection group displayed on the display device, and the X-axis conversion time on the X-axis is When instructed as the second time, the measurement value corresponding to the X-axis converted time closest to the second time among the X-axis converted times of the graph lines of the second selection group a second measurement value and second measurement value for each said graph line is, is the first measurement value and the second graph line display method is the difference between the measured Ru is displayed on the display device .
In the present invention, the display device displays first and second main major lines parallel to the Y axis, and an intersection of each graph line and the first main major line of the first selection group. The converted time on the X-axis is the first time for each graph line, and the converted time on the X-axis of the intersection of each graph line of the second selection group and the second main major line and the said second time for each said graph line, the first, the position of the second main measure line is configured to be changed, the first, the position of the second main measure line is changed Then, the first and second times are graph line display methods for changing to the X-axis converted times indicated by the changed first and second main major lines, respectively.

Since the graph lines of the measurement values can be easily overlapped and compared, the vacuum processing can be easily analyzed.
Since the graph lines of the measured values of the vacuum processing can be superimposed by matching the broken lines of the control signal, the comparison based on the control signal can be performed.
Since the graph start points disturbed by noise can be matched, the comparison becomes accurate. Since the movement of the graph line can while watching the shape of the polyline and graph lines of the control signals, modification is simple.

The block diagram for demonstrating the vacuum processing apparatus of this invention Screen of display device for explaining analysis method of vacuum processing of the present invention (1) Screen (2) of the display device for explaining the analysis method of the vacuum processing of the present invention Screen (3) of the display device for explaining the analysis method of the vacuum processing of the present invention Screen (4) of the display device for explaining the analysis method of the vacuum processing of the present invention Screen (5) of the display device for explaining the analysis method of the vacuum processing of the present invention

Reference numeral 1 in FIG. 1 is an example of the vacuum processing apparatus of the present invention, and includes a vacuum processing unit 20.
The vacuum processing unit 20 has a vacuum chamber 11.
Inside the vacuum chamber 11, a processing equipment group 23 that performs vacuum processing of a substrate as a processing target is disposed.

  The processing equipment group 23 includes a plurality of processing equipment. Here, the processing equipment includes a vapor deposition source 34 disposed on the bottom surface of the vacuum chamber 11, and an EB gun 33 that irradiates the vapor deposition source 34 with an electron beam. The holding device 31 arranged above the vapor deposition source 34 and the heater 32 arranged inside the holding device 31 are included.

Reference numeral 15 in FIG. 1 denotes a substrate that is an object to be processed, which is held by the holding device 31 with the film formation surface facing the vapor deposition source 34.
A peripheral device group 24 and a control unit 21 are arranged outside the vacuum chamber 11.
The peripheral device group 24 includes a plurality of peripheral devices. Here, the peripheral devices include a vacuum exhaust system 36, a gas introduction system 37, a heater power supply 38, and a vapor deposition power supply 39. Yes.

  The evacuation system 36 and the gas introduction system 37 are connected to the vacuum chamber 11, and the inside of the vacuum chamber 11 can be evacuated by operating the vacuum evacuation system 36, and the vacuum chamber is operated by operating the gas introduction system 37. 11, a gas such as a reactive gas can be introduced from the gas introduction system 37. For example, reactive vapor deposition can be performed.

The heater power supply 38 and the vapor deposition power supply 39 are connected to the heater 32 and the EB gun 33, respectively, and supply power from the heater power supply 38 and the vapor deposition power supply 39 to the heater 32 and the EB gun 33, respectively.
The heater 32 generates heat with the supplied electric power, raises the temperature of the holding device 31, and heats the substrate 15 in a vacuum atmosphere. The EB gun 33 irradiates the vapor deposition source 34 with an electron beam with the supplied electric power, heats the vapor deposition material disposed in the vapor deposition source 34, and releases vapor of the vapor deposition material into the vacuum atmosphere in the vacuum chamber 11.
The vapor reaches the substrate 15 in a vacuum atmosphere or a reactive gas atmosphere, and forms a thin film on the film formation surface.

The peripheral equipment group 24, the sensor portion is attached to the processing device included in the processing device group 23, also includes measuring apparatus for measuring the physical quantity such as temperature measurement, pressure measurement, also Ya heater power supply 38 A measuring device is also included which is disposed inside the vapor deposition power source 39 and the like and measures physical quantities such as current and voltage.
In the peripheral device group 24, the pressure in the vacuum chamber 11 measured by the peripheral devices included in the peripheral device group 24, the temperature of the substrate 15, the amount of gas introduced, the amount of current flowing to the heater 32, the power supplied to the EB gun 33, etc. measurements are generated, measurements, and occurrence time of the measurement value and the measured value is associated, is input from a peripheral device group 24 to the control unit 21.

A sequencer 41 and a computer 40 are arranged in the control unit 21, and measurement values and measurement times input from the peripheral device group 24 are input to the computer 40 via the sequencer 41.
The data analysis program 45 of the computer 40 includes an arithmetic device 42, a storage device 43, and a display device 44. The input measurement values are stored in the storage device 43 together with the measurement time.

In the vacuum chamber 11, the substrate 15 that has been subjected to vacuum processing is carried out of the vacuum chamber 11, an unprocessed substrate is carried in, and vacuum processing is performed.
A predetermined number of substrates are assigned a lot number for each substrate to be processed continuously, and the measured value is stored in the storage device 43 so that the lot number of the measured value is known. The file name includes a lot number, lot name, and other indications that can distinguish lots. In addition, vacuum processing such as vacuum processing numbers can be distinguished so that different vacuum treatments can be distinguished within a single lot. The display also includes the measurement value. Therefore, the measured value is associated with the lot and the vacuum processing from the file name.

  On the other hand, the sequencer 41 stores a procedure for operating the vacuum processing unit 20. The sequencer 41 controls the peripheral device group 24 and the processing device group 23 with respect to the peripheral device group 24 and the processing device group 23. However, a control signal for performing vacuum processing while operating is output. This control signal includes at least an operation signal for operating the peripheral device group 24 and the processing device group 23 and a stop signal for stopping the operation.

  The control signal is output to the peripheral devices 36 to 39 included in the peripheral device group 24 and the processing devices 31 to 34 included in the processing device group 23 and also to the computer 40. The sequencer 41 outputs to the computer 40 the control signal and the start time when the output of the operation signal is started and the stop time when the output of the stop signal is started in association with the operation signal and the stop signal. The control signal is assigned a lot number, a vacuum processing number, and the like of the vacuum processing performed by the control signal, is associated with the lot and the vacuum processing, and is stored together with the start time and the stop time.

  In this vacuum processing apparatus 1, a plurality of lots of substrates are subjected to vacuum processing, and the storage device 43 has a plurality of lots of vacuum processing measurement values, measurement times corresponding to the measurement values, and control signals for controlling the vacuum processing. It is assumed that the start time and stop time in the control signal are stored, and the operation procedure of the computer 40 for comparing and analyzing the measurement results of a plurality of vacuum processes will be described.

The storage device 43 stores a program for analyzing the vacuum processing. This program is activated, and the measurement values corresponding to the plurality of vacuum processing are processed together with the measurement times at which the measurement values are generated. Read into memory etc.
The lot and vacuum processing such as the lot number or vacuum processing number in which the measurement value is generated can be distinguished by the file name of the measurement value.

The measured values to be analyzed here are the measurement results of the same processing devices 31 to 34 or the peripheral devices 36 to 39, are the same physical quantities, and the intervals of the measurement times are constant during one vacuum processing, and between the vacuum processing But it is set to a constant value.
Further, the control signal that controls the vacuum processing when the measurement value to be read is generated is also read. The start time and the stop time can be set to the time included in the measurement time, for example. The correspondence between the lot of control signals and the vacuum processing can be understood from the name of the control signal file.

Reference numeral 100 in FIG. 2 indicates a screen of the display device 44 connected to the computer 40. It may be a screen of a display device of another computer that communicates with the computer 40 by means such as a LAN.
The screen 100 is provided with a measured value specifying column 110 and a control signal specifying column 120 for specifying the measured value that has been read and the control signal corresponding to the measured value. And a graph display area 130 for displaying the graph line of the measurement value and a timing chart display area 140 for displaying the control signal so that the change of the control signal can be visually recognized correspondingly. In the timing chart display area 140, the operation signal and the stop signal can be distinguished, and the control signal is displayed so that the position of the start time and the stop time can be known.

In addition to the lot and vacuum processing, the measurement value can be specified by the file name 151 so that the type of measurement value (for example, current value, voltage, pressure, etc.) can be specified. There is provided a name display column 111 for displaying the file names 151 (names 1 to 6) of the respective measurement values subjected to the measurement in a vertical row.
Further, the measurement value specifying column 110 is provided with a display instruction column 114 for instructing a measurement value to be displayed in a graph among the read measurement values.

X-Y coordinate to be displayed, the Y-axis has left and right two, or scale measurements left Y-axis, graph Display in correspondence to one of the scales of the right Y-axis The measured value specifying column 110 is provided with a Y-axis instruction column 115 for selecting the Y-axis, and a measure instruction column 113 for instructing display of a major line, which will be described later. It has been.

  When the check box 154 displayed in the vertical column in the display instruction column 114 is checked, the checked measurement values are displayed in a graph in the graph display area 130 and are displayed on the left side displayed in the vertical axis in the Y axis instruction column 115 respectively. By checking either the Y-axis check box 156 or the right-side Y-axis check box 155, the Y-axis corresponding to the measurement value is selected to be left or right, and one vertical column is displayed in the measure indication column 113. A desired major line is displayed by attaching a single mark or a double mark to the check box 153 arranged in (1).

Further, the measurement value specifying column 110 is provided with a color instruction column 112 for instructing the color of the graph line , and by changing the color of the color sample 152 displayed in a vertical column in the color instruction column 112. The color of the displayed graph line can be changed.
Display contents such as check boxes in the columns 111 to 114 are displayed at the same height so that the correspondence between the display contents and the measurement value names 151 can be easily seen.

The control signal specifying column 120 is the same as the measured value specifying column 110 except for the Y-axis indicating column 115, and includes a name display column 121, a color indicating column 122, a major indicating column 123, and a display indicating column 124. And are provided.
The intersection of the major line indicated by the major indication column 123 and the graph line (folded line) of the control signal indicates whether the control signal at the intersection is an operation signal or a stop signal. Is displayed on the screen 100 as the signal value of the control signal. The signal state of whether the intersection is an operation signal or a stop signal may be indicated by other methods such as symbols and figures.

In the figure, reference numeral 161 indicates the names of control signals (names 11 to 16) that can specify the lot and vacuum processing, reference numeral 162 indicates a color sample, and reference numerals 163 and 164 indicate check boxes.
Using the check boxes 153 to 156, 163, and 164 in the measured value specifying column 110 and the control signal specifying column 120, the measured value to be displayed with a check is selected, and as shown in FIG. Displays a graph line 132 created from the selected measurement values. The graph line 132 is displayed together with the XY coordinates 131 separately for each vacuum process.
In the timing chart display area 140, a broken line 134 generated from the control signal is displayed together with the time axis 141. The time axis 141 is located directly below the X axis of the XY coordinates 131 on the screen 100 and is parallel to the X axis.

The measurement time corresponding to the measurement value and the start time and stop time corresponding to the operation start and stop start of the control signal, respectively, are times starting from 24 hours a day and starting from midnight. Along with the date, even if one of the year, month, or date is different at the same time, the time is different.
A reference time, which is a different time, is set for each vacuum process, and the measurement time corresponding to the measurement value is converted to an X-axis conversion time that is the time from the vacuum process reference time at which the measurement value was measured. Then, it is stored in the memory or the storage device 43 in association with the measured value.

As the reference time, a start time, a stop time, or the like included in a control signal for controlling the peripheral device group 24 or the processing device group 23 that has performed the vacuum processing in which the measured value is measured can be used. The reference time is a time associated with the measurement value.
Here, the read measurement values belong to different lots, and the first operation signal included in the control signal obtained by performing vacuum processing on the read measurement values is set as the reference time.

  The time per unit length of the X axis is input from the keyboard or calculated from the time of the measured value to be read, and the X coordinate of the measured value is the position of the reference time on the X axis and the X axis. It is obtained by converting the conversion time on the X axis of each measurement value corresponding to the measurement value into a position on the X axis based on the time per unit length. Here, the intersection of the X axis and the selected left Y axis is the origin of the XY coordinates, and the position of the reference time is arranged at a predetermined position on the X axis on the right side of the origin.

  The measurement values used in this example are measurement values transmitted from the same peripheral devices 36 to 39 or processing devices 31 to 34, and the time interval between measurement times stored in association with the measurement values is one vacuum. It is set to a constant value during processing, and is also set to a constant value during vacuum processing. Therefore, a plurality of measured values correspond to one X-axis converted time.

Of the left and right Y axes, the value per unit length on the Y axis designated by the Y axis designation column 115 and the value of the intersection between the X axis and the designated Y axis are input from a keyboard or the like. Or the magnitude of the measured value.
Therefore, the Y coordinate which is the position on the selected Y axis of each measurement value is obtained from the value of the measurement value based on the value of the intersection of the Y axis and the X axis and the value per unit length of the Y axis. .

In this way, the X coordinate and Y coordinate of each measurement value are obtained, and the measurement value of the same vacuum processing is made into a single graph line by the least square method or the coordinate value points of the measurement value are connected by line segments. Graph. As shown in FIG. 3, the measurement values instructed by checking the check box 154 in the display instruction column 114 are displayed as graph lines 132. Here, there are five graph lines 132.
The start time and stop time are converted to time-converted time that is the time on the time axis 141 from the reference time, with the same reference time as the measurement value as a reference.

  The origin of the time axis 141 is a point where the extension line of the Y axis on the left side of the XY coordinate 131 intersects the time axis 141, and the position of the reference time on the time axis 141 passes through the reference time on the X axis. A perpendicular to the X axis intersects with the time axis 141. The time per unit length of the time axis is determined, and therefore the start time and stop time are located on the time axis 141 according to the value of the converted time on the time axis.

In this example, the time per unit length of the time axis is the same as the time per unit length of the X axis, and therefore the straight line that intersects the X axis and the time axis 141 perpendicularly has the same value. The conversion time on the X axis and the conversion time on the time axis are passed.
The operation signal and the stop signal included in the control signal are displayed in horizontal line segments that are parallel to the time axis 141 and have different heights, and at the time on the time axis converted from the start time, the end point and the next of one stop signal are displayed. The control signal is displayed by a broken line 134 formed by connecting the start point of one operation signal, the end point of one operation signal, and the start point of the next stop signal by a vertical vertical line segment.
The vertical line segment is located at the time on the time axis obtained by converting the start time and the stop time.

As shown in FIG. 3, a plurality of graph lines 132 and a plurality of broken lines 134 are respectively displayed in the graph display area 130 and the timing chart display area 140, and the first start time in the control signal for each measurement value is displayed. In the graph line 132 set as the reference time, a protrusion shape 132a with the peak position of the graph line 132 on the left side and a protrusion shape 132b on the right side can be seen.

In this program, a plurality (two in this example) of major lines perpendicular to the X axis can be displayed in the graph display area 130, and the timing chart display area 140 is also perpendicular to the time axis 141. Multiple (two in this example) auxiliary measure lines can be displayed.
When displaying the major line and the auxiliary major line, marks are added to the check boxes 153 and 163 in the major instruction columns 113 and 123, respectively.

In this example, the computer 40 is configured to display two major lines and two auxiliary major lines. In FIG. 4, the first major line 101 is a graph line 132 having a left protrusion shape 132 a. The second major line 102 is arranged so as to pass through the peak and the peak of the graph line 132 of the right protrusion shape 132b.

The major line and the auxiliary major line can be moved by inputting the converted time on the X axis and the converted time on the time axis, or can be moved with a mouse or the like.
The converted time on the X-axis where the first major line 101 is located and the converted time on the time-axis where the first auxiliary measure line 103 is located are equal, and the second major line 102 is located. The conversion time on the X axis and the conversion time on the time axis at which the second auxiliary major line 104 is located are also made equal.

  When moving the first and second major lines 101 and 102, the conversion time on the X-axis input for movement or the mouse is selected in the measured value selected by marking in the major instruction column 113 or with the mouse. If there is no measurement value corresponding to the conversion time on the X-axis of the movement destination due to movement, the measurement value selected by the mark is closest to the input conversion time on the X-axis and is associated with the measurement value. The first and second major lines 101 and 102 are moved at the converted time on the X axis.

The first and second auxiliary major lines 103 and 104 are moved to a time-axis converted time that is the same time as the X-axis converted time to which the first and second major lines 101 and 102 are moved.
Conversely, when the first and second auxiliary major lines 103 and 104 are moved, the converted time on the X-axis is the same as the converted time on the time axis of the moved first and second auxiliary major lines 103 and 104. First major line 101 is moved.

  At this time, if the measurement value corresponds to the conversion time on the X axis of the movement destination of the first and second major lines 101 and 102, the first and second major lines 101 and 102 are on the X axis. Moved to the conversion time, the first and second auxiliary major lines 103 and 104 are moved to the conversion time on the time axis that is the same as the conversion time on the X-axis.

  On the other hand, if the measured value does not correspond to the conversion time on the X-axis of the movement destination, the measurement value selected by the mark in the measure indication column 113 is closest to the conversion time on the X-axis of the movement destination, The X-axis converted time associated with the measurement value is selected, and the first or second major line 101, 102 and the first major line 101, 102 are first and the X-axis converted time and the time-axis converted time at the same time. Alternatively, the second auxiliary major lines 103 and 104 are moved, respectively.

Also, among the measurement values selected by being marked in the major instruction column 113, the X-axis converted times at which the first and second major lines 101 and 102 are located are the first and second times, and the first If the measurement values corresponding to the first and second times are referred to as the first and second measurement values, the positions of the first and second times can be known, and the time between the first and second times. together on the screen 100 calculated 1 in FIG. 4, first, the second measurement value, together with the first, second distinguishing intersection of the major lines 101 and 102 graph line 132 symbols P1~P4 It is displayed on the screen 100.

In the present invention, one or more desired number of graph lines 132 out of the plurality of displayed graph lines 132 can be selected and moved, and the distance on the X axis to be selected and moved is defined as time. After inputting from the keyboard or inputting the converted time on the X-axis for positioning the measurement point specified in the graph line 132, selecting the desired number with the mouse and moving it with the mouse pointer, or after selecting the desired number, A desired number of selected graph lines 132 can be moved in parallel with the X axis by a moving method such as moving in accordance with the pressing time of a specific key on the keyboard.

As described above, the measurement time of the measurement value is equally spaced, and therefore, the X-axis converted time corresponding to the measurement value is also equally spaced. X-axis is one of one of the X-axis on the conversion time is corresponding to the measured values in the graph line 132, the measured value in the other graph line 132 are associated, the amount of movement of the graph line 132, the adjacent The time between the up-converted times is set as an integral multiple of the unit time with the unit time.

Therefore, the movement time specified as the movement amount of the graph line 132 and the movement time obtained from the converted time on the X-axis specified as the movement destination are movement times that are integral multiples of the unit time by rounding, rounding up, or rounding down. The X-axis converted time of each measurement point is changed based on the converted moving time, and the graph line 132 of the measured value is also rewritten based on the converted X-axis converted time.

At this time, a control signal related to the selected graph line 132, for example, a control signal obtained by performing vacuum processing on the selected graph line 132, has a conversion time on the time axis of the start time and the stop time converted to an X-axis conversion time. The broken line 141 is also moved in parallel with the time axis 141 in the same time and in the same direction as the moving time of the graph line 132.

Select the desired broken line 141 displayed in the timing chart display area 140, enter with the keyboard, specify the conversion time on the X-axis of the destination, move with the movement of the mouse pointer, move with the cursor, etc. The measured value associated with the control signal to be moved and moved by the same means as when moving the line 132, for example, the measured value measured during the vacuum processing controlled by the control signal of the selected broken line 141. The graph lines 132 may be moved together.

  In this case as well, when the time between adjacent measured values on the X-axis is the unit time, the movement amount is an integral multiple of the unit time, and the input time and the destination time-converted time are Similarly to the above, the conversion time on the time axis of the control signal to be moved and the conversion time on the X axis of the measurement value to be moved are converted to a movement time that is an integral multiple of the unit time by rounding, rounding up, rounding down, etc. Calculated and displayed based on the converted travel time.

The difference between the first time and the second time is the time difference between the peak positions of the graph line 132 of the left protrusion shape 132a and the graph line 132 of the right protrusion shape 132b. select graph line 132 of shape, the time difference between the peak position between the graph line 132 of the other protrusion shapes are moved to be zero, the peak position of each graph line 132 overlap as shown in FIG. 5 The shape and height of each graph line 132 can be easily compared.

  The broken line 134 is drawn with the operation signal up and the stop signal down. In the timing chart display area 140, the broken line 134 has a shape 134a in which the time of the rising edge 181 of the operation signal is the reference time. It can be seen that there is a shape 134b in which the rising edge 182 of the noise included in the control signal is mistaken as an operation signal and is used as a reference signal.

Each graph line 132 uses the converted time on the time axis of the first operation signal included in the control signal corresponding to each graph line 132 as the reference time, but the correct rising edge 183 of the misidentified shape 134b is set to the position of the reference time. The fold lines 134 may be moved so that they move, and the corresponding graph lines 132 may be moved together to overlap.

Since the graph line 132 is moved and the X-axis conversion time corresponding to the measurement value is corrected by the movement amount, the first and second measurement values displayed on the screen 100 are the X-axis after the measurement time is corrected. The measured value is equal to the upper conversion time. Accordingly, the difference between the first measurement values of the designated graph line 132 is the difference between the first measurement value of the graph line 132 that has not moved and the first measurement value of the graph line 132 that has been moved.

FIG. 6 shows a state in which the peaks of the respective graph lines 132 coincide with each other, and the first and second major lines 101 and 102 are moved on the graph lines 132 after coincidence to convert the position to be observed on the X axis. The time and first and second measured values can be displayed.

DESCRIPTION OF SYMBOLS 1 ... Vacuum processing apparatus 11 ... Vacuum tank 15 ... Process target 20 ... Vacuum processing part 21 ... Control part 23 ... Processing equipment group 24 ... Peripheral equipment group 31-34 ... Processing equipment 36-39 ... peripheral equipment 40 ... computer 42 ... computing device 43 ... storage device 44 ... display device 45 ... data analysis program 101 ... first major line 102 ... second major line 103 ... first Auxiliary major line 104 …… Second auxiliary major line 131 …… XY coordinate 141 …… Time axis

Claims (12)

A vacuum processing unit for vacuum processing a processing object arranged in a vacuum chamber;
A storage device that stores a plurality of measurement values transmitted from the vacuum processing unit in association with the vacuum processing together with a measurement time at which the measurement value is generated,
A computing device for computing the measured value;
A display device for displaying a calculation result of the calculation device;
It is a data analysis program in which the measurement values of a plurality of times of the vacuum processing are set as one lot, and the measurement values of a plurality of the lots are stored in the storage device,
The arithmetic device reads the measurement values of the plurality of lots stored in the storage device, and the measurement time of the read measurement values is a time from a reference time determined for each vacuum process. X-axis converted time converted to
A predetermined position on the X-axis of the XY coordinate is set as the reference time, and the measured value is obtained as a position on the X-axis from the converted time on the X-axis. A position on the Y axis of the Y coordinate is obtained, and one graph is generated from the position on the X axis and the position on the Y axis of the plurality of measurement values associated with the same vacuum processing, A plurality of the graphs are displayed on the display device together with the XY coordinates according to the read measurement values,
When any one of the displayed graphs is selected, the other graphs included in the lot of the selected graph are also selected and selected from the displayed graphs. The data analysis program configured such that the graph is moved on the XY coordinates together by the same distance in the direction in which the X axis extends. A control signal including an operation signal for operating the apparatus for performing the vacuum processing and a stop signal for stopping the operation corresponds to the vacuum processing together with a start time for starting the operation and a stop time for stopping the operation. And stored in the storage device,
The arithmetic device obtains a time-axis converted time in which the start time and the stop time of the control signal stored in the storage device are converted to a time from the reference time,
A time axis is displayed in parallel with the X axis at a position separated from the X axis,
The predetermined position on the time axis is the reference time, and the converted time on the X axis and the converted time on the time axis indicated by intersections where a straight line parallel to the Y axis intersects the X axis and the time axis, respectively. Are determined to be the same time, and from the converted time on the time axis of the start time and the stop time of the control signal, the position of the start time and the stop time on the time axis is obtained,
The control signal is displayed by a broken line connecting the start time and the stop time with a difference in height from the time axis between the operation signal and the stop signal,
The data analysis program according to claim 1, wherein the broken line of the same lot as the selected graph is moved by the same distance in the same direction together with the selected graph. A vacuum processing unit for vacuum processing the processing object disposed in the vacuum chamber;
A storage device that stores a plurality of measurement values transmitted from the vacuum processing unit in association with the vacuum processing together with a measurement time at which the measurement value is generated,
A computing device for computing the measured value;
A display device for displaying a calculation result of the calculation device;
In the storage device, a plurality of measurements of the vacuum treatment are set as one lot, and the measurement values of the plurality of lots are stored,
A control signal including an operation signal for operating the vacuum processing apparatus and a stop signal for stopping the operation corresponds to the vacuum processing together with a start time for starting the operation and a stop time for stopping the operation. A data analysis program stored in the storage device,
The arithmetic device reads the measurement values of the plurality of lots stored in the storage device, and sets the measurement time of the read measurement values from a reference time determined for each vacuum process. X time on the X-axis converted to
A predetermined position on the X axis of the XY coordinate is set as the reference time, and the measured value is obtained as a position on the X axis from the converted time on the X axis, and the X− is calculated from the magnitude of the measured value. A position on the Y axis of the Y coordinate is obtained, and one graph is generated from the position on the X axis and the position on the Y axis of the plurality of measurement values associated with the same vacuum processing, A plurality of the graphs are displayed on the display device together with the XY coordinates according to the read measurement values,
The arithmetic device obtains a time-axis converted time in which the start time and the stop time of the control signal stored in the storage device are converted to a time from the reference time,
A time axis is displayed in parallel with the X axis at a position separated from the X axis,
The predetermined position on the time axis is the reference time, and the converted time on the X axis and the converted time on the time axis indicated by intersections where a straight line parallel to the Y axis intersects the X axis and the time axis, respectively. Are determined to be the same time, and from the converted time on the time axis of the start time and the stop time of the control signal, the position of the start time and the stop time on the time axis is obtained,
The control signal is displayed by a broken line connecting the start time and the stop time with a difference in height from the time axis between the operation signal and the stop signal,
When any one of the displayed broken lines is selected, the other displayed broken lines included in the lot of the selected broken lines are also selected, and the selected broken line is selected as the time. It is configured to be able to move on the axis in the same direction and the same distance in the direction in which the time axis extends,
A data analysis program in which the graph of the same lot as the selected broken line is moved by the same distance in the same direction together with the selected broken line. The converted time on the X-axis that is the position on the X-axis of the measurement value included in the moved graph is obtained,
When two or more of the graphs to be displayed are selected and the first time within the range of the converted time on the X-axis included in the X-axis is indicated, the selected For each graph, the measured value whose X-axis converted time is closest to the first time is specified as the first measured value,
The difference value between the first measurement values of the different graphs and the first measurement value are configured to be displayed on the display device. The data analysis program described. In addition to the first time, when a second time within the range of the conversion time on the X axis included in the X axis is indicated, the conversion time on the X axis is calculated for each selected graph. The measurement closest to the second time is identified as the second measurement,
A difference value between the first measurement value of one graph and the second measurement value of the other graph, and the second measurement value are both displayed on the display device. The data analysis program according to claim 4. A first major line passing through a point on the XY coordinate whose X coordinate is the first time, and perpendicular to the X axis;
A second major line that passes through a point on the XY coordinate where the X coordinate is the second time and is perpendicular to the X axis;
The positions of the first and second major lines are configured to be changeable,
When the positions of the first and second major lines are changed, the first and second times are respectively changed to the converted time on the X-axis indicated by the changed first and second major lines. The data analysis program according to claim 5 configured as described above. A vacuum processing unit that arranges a processing object in a vacuum chamber and vacuum-processes the processing object transmits a measurement value, stores it in a storage device corresponding to the vacuum processing together with a measurement time when the measurement value is generated,
X obtained by reading the measurement value corresponding to the plurality of vacuum processes stored in the storage device, and converting the measurement time of the read measurement value to a time from a reference time determined for each vacuum process Find the on-axis conversion time,
A predetermined position on the X axis of the XY coordinate is set as the reference time, the position on the X coordinate of the measured value is obtained from the converted time on the X axis, and the Y axis of the measured value is calculated from the magnitude of the measured value An upper position is obtained, and one graph is generated from the X coordinate and the Y coordinate of the plurality of measurement values associated with the same vacuum processing, and the plurality of graphs are determined by the read measurement values. Display on the display device together with the XY coordinates;
When any one of the displayed graphs is selected, the other displayed graphs included in the lot of the selected graph are also selected, and the selected graph is the X A method of analyzing graph data configured to move on the Y coordinate together in the direction in which the X axis extends in the same distance. The vacuum processing apparatus is controlled by a control signal including an operation signal for operating the vacuum processing apparatus and a stop signal for stopping the operation, and the control signal is a start time for starting the processing operation. And stored in the storage device in association with the vacuum processing together with a stop time for stopping the processing operation,
The arithmetic device obtains a time-axis converted time in which the start time and the stop time of the control signal stored in the storage device are converted to a time from the reference time,
Display the time axis parallel to the X axis at a position separated from the X axis,
The predetermined position on the time axis is the reference time, and the converted time on the X axis and the converted time on the time axis respectively indicated by intersections where a straight line parallel to the Y axis intersects the X axis and the time axis are: From the conversion time on the time axis of the start time and the stop time of the control signal so as to be the same time, obtain the position on the time axis of the start time and the stop time,
The control signal is displayed by a broken line connecting the start time and the stop time with a difference in height from the time axis between the operation signal and the stop signal,
The graph data analysis method according to claim 7, wherein the broken line of the same lot as the selected graph is moved in the same direction and the same distance together with the selected graph. When an object to be processed is placed in a vacuum chamber and the object to be processed is vacuum processed with a plurality of processors, the operating state of the processor is measured,
In a storage device that stores a plurality of measurement values together with a measurement time at which the measurement values are measured, a plurality of measurement values of the vacuum treatment are set as one lot, and the measurement values of the plurality of lots are stored,
A control signal including an operation signal for operating the apparatus that performs the vacuum processing and a stop signal for stopping the operation corresponds to the vacuum processing together with a start time for starting the operation and a stop time for stopping the operation. And store it in the storage device,
Reading the measurement values of the plurality of lots stored in the storage device, converting the measurement time of the read measurement values into a time from a reference time determined for each of the vacuum processes, on the X axis Find the conversion time,
A predetermined position on the X axis of the XY coordinate is set as the reference time, the position on the X coordinate of the measured value is obtained from the converted time on the X axis, and the Y axis of the measured value is calculated from the magnitude of the measured value An upper position is obtained, and one graph is generated from the X coordinate and the Y coordinate of the plurality of measurement values associated with the same vacuum processing, and the plurality of graphs are determined by the read measurement values. Display on the display device together with the XY coordinates;
Obtaining a converted time on the time axis obtained by converting the start time and the stop time of the operation signal stored in the storage device into a time from the reference time;
Display the time axis parallel to the X axis at a position separated from the X axis,
The predetermined position on the time axis is the reference time, and the converted time on the X axis and the converted time on the time axis respectively indicated by intersections where a straight line parallel to the Y axis intersects the X axis and the time axis are: From the conversion time on the time axis of the start time and the stop time of the control signal so as to be the same time, obtain the position on the time axis of the start time and the stop time,
The control signal is displayed by a broken line connecting the start time and the stop time with a difference in height from the time axis between the operation signal and the stop signal,
When any one of the displayed broken lines is selected, the other displayed broken lines included in the lot of the selected broken lines are also selected, and the selected broken line is The time axis can be moved in the same direction and the same distance along the direction in which the time axis extends,
The graph data analysis method in which the graph of the same lot as the selected broken line is moved in the same direction and the same distance together with the selected broken line. Obtaining the converted time on the X-axis which is the position on the X-axis of the measurement value included in the moved graph;
When two or more of the graphs to be displayed are selected and a first time within the range of the converted time on the X-axis included in the X-axis is indicated, the selected For each graph, the measured value closest to the first time on the X-axis converted time is specified as the first measured value,
The graph data analysis according to any one of claims 7 to 9, wherein a difference value between the first measurement values of the different graphs and the first measurement value are displayed on the display device. Method. In addition to the first time, when a second time within the range of the conversion time on the X axis included in the X axis is indicated, the conversion time on the X axis is calculated for each selected graph. The measurement closest to the second time is identified as the second measurement,
The graph according to claim 10, wherein a difference value between the first measurement value of one graph and the second measurement value of the other graph and the second measurement value are both displayed on the display device. How to analyze the data. A first major line passing through a point on the XY coordinate whose X coordinate is the first time, and perpendicular to the X axis;
A second measure line perpendicular to the X axis passing through a point on the XY coordinate where the X coordinate is the second time;
The positions of the first and second major lines are configured to be changeable,
When the positions of the first and second major lines are changed, the first and second times are respectively changed to the X-axis converted times indicated by the changed first and second major lines. Item 12. The method for analyzing graph data according to Item 11.

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