CN107063060A - A kind of method and device for determining surface planarity - Google Patents
A kind of method and device for determining surface planarity Download PDFInfo
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- CN107063060A CN107063060A CN201710201173.3A CN201710201173A CN107063060A CN 107063060 A CN107063060 A CN 107063060A CN 201710201173 A CN201710201173 A CN 201710201173A CN 107063060 A CN107063060 A CN 107063060A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention discloses a kind of method and device for determining surface planarity.Wherein, this method includes：The spatial positional information of multiple collection points on surface to be measured is obtained successively, and spatial positional information includes abscissa data, ordinate data and the altitude information of collection point；Datum plane is determined, datum plane is the plane being fitted according to the spatial positional information of multiple collection points；The height error between each collection point and datum plane is determined respectively, and according to the flatness on height error calculating surface to be measured.The datum plane that this method determines most to match with collection point by the form of fitting, effectively prevent error during using the plane of physical presence as datum plane, and potential error when eliminating manual intervention, so as to drastically increase the accuracy of detection of flatness；And this method can realize operation automation, detection repeatability and reproducibility are improved, it is adaptable to automatic production line.
Description
Technical field
The present invention relates to DATA REASONING technical field, more particularly to a kind of method and device for determining surface planarity.
Background technology
Flatness is all the important accuracy tolerance in production, assembling process all the time, its accuracy detection always with
Being all the most important thing of production link.Now with the progress of consumer electronics industry science and technology, large scale display screen is got over
To get over by consumers welcomed, this large-sized glass panel is in assembling process, if matched connection member
Flatness precision not enough, then can directly result in scrapping for glass panel, add the cost of enterprise.For another example, present mobile phone
Shell mostly uses aluminum integrated casing, is directly added by CNC (Computer numerical control, Digit Control Machine Tool)
Work is completed, and follow-up screen is directly installed on aluminium shell, if this aluminium shell flatness precision is inadequate, in screen
This screen is may result in during curtain assembling to scrap.
In process of the present invention is realized, inventor has found that at least there are the following problems in the prior art：
Traditional method measuring flatness is mostly comparatively laborious, it is impossible to is applied to production line and does full inspection to product.Such as scheme
Table mensuration is beaten shown in 1, dragging dial gauge is moved in marble platform manually, makes gauge outfit keep contacting with tested plane,
And the value on dial gauge is recorded in real time, minimum value is subtracted come Calculation Plane degree by maximum.This method precision is low, efficiency is low.
Also a kind of common method uses electrolevel.The characteristics of electrolevel is exactly precision height, carrying side
Just, still, need to move repeatedly the instrument when measurement plane is spent, the data of each measuring point are recorded, when wasting time and energy and adjusting
Between it is long, cumbersome data processing will also be carried out by having recorded after data, efficiency is low.
The content of the invention
A kind of method and device for determining surface planarity provided in an embodiment of the present invention, for solving existing flatness
The low technical problem of measuring method precision.
A kind of method for determining surface planarity provided in an embodiment of the present invention, comprises the following steps：
The spatial positional information of multiple collection points on surface to be measured is obtained successively, and spatial positional information includes collection point
Abscissa data, ordinate data and altitude information；
Datum plane is determined, datum plane is the plane being fitted according to the spatial positional information of multiple collection points；
The height error between each collection point and datum plane is determined respectively, and table to be measured is calculated according to height error
The flatness in face.
In a kind of possible implementation, determine that datum plane includes：
Set up the mathematical modeling Z=a of datum plane1+a2X+a3Y, wherein, a1,a2,a3On the basis of three of plane it is to be measured
Parameter；
It is determined that each collection point and the sum of square of deviations S of datum plane in the height direction, and
Wherein, n is the number of collection point, Xi,Yi,ZiAbscissa data, ordinate data and the high number of degrees of respectively i-th collection point
According to；
Three parameters to be measured of datum plane are determined, parameter to be measured is so that sum of square of deviations obtains the parameter of minimum value.
In a kind of possible implementation, three parameters to be measured of datum plane are determined, including：
Successively with parameter a to be measured1,a2,a3For the first-order partial derivative of variable determination deviation quadratic sum；
It is determined that so that three first-order partial derivatives of sum of square of deviations are zero parameter a to be measured1,a2,a3。
In a kind of possible implementation, it is determined that so that three first-order partial derivatives of sum of square of deviations are zero to treat
Survey parameter a1,a2,a3, including：
It is determined that coefficient matrix B and coefficient matrix C when three first-order partial derivatives of sum of square of deviations are zero, and：
Parameter matrix a to be measured is determined, and：
In a kind of possible implementation, the flatness on surface to be measured is calculated according to height error, including：
Using the absolute value sum of the maximum of height error and minimum value as surface to be measured flatness.
Based on same inventive concept, the embodiment of the present invention also provides a kind of device for determining surface planarity, including：
Acquisition module, the spatial positional information for obtaining multiple collection points on surface to be measured successively, spatial positional information
Abscissa data, ordinate data and altitude information including collection point；
Fitting module, for determining datum plane, datum plane is to be fitted according to the spatial positional information of multiple collection points
Plane；
Processing module, for determining the height error between each collection point and datum plane respectively, and according to height by mistake
Difference calculates the flatness on surface to be measured.
In a kind of possible implementation, fitting module includes：
Model sets up unit, the mathematical modeling Z=a for setting up datum plane1+a2X+a3Y, wherein, a1,a2,a3For base
Three parameters to be measured of directrix plane；
First determining unit, for determining each collection point and the sum of square of deviations S of datum plane in the height direction,
AndWherein, n is the number of collection point, Xi,Yi,ZiThe horizontal stroke of respectively i-th collection point
Coordinate data, ordinate data and altitude information；
Second determining unit, three parameters to be measured for determining datum plane, parameter to be measured is so that sum of square of deviations
Obtain the parameter of minimum value.
In a kind of possible implementation, the second determining unit includes：
Determination subelement, for successively with parameter a to be measured1,a2,a3For the single order local derviation of variable determination deviation quadratic sum
Number；
Subelement is handled, for determining to cause that three first-order partial derivatives of sum of square of deviations are zero parameter a to be measured1,
a2,a3。
In a kind of possible implementation, processing subelement is used for：
It is determined that coefficient matrix B and coefficient matrix C when three first-order partial derivatives of sum of square of deviations are zero, and：
Parameter matrix a to be measured is determined, and：
In a kind of possible implementation, processing module is used for：By the absolute of the maximum of height error and minimum value
It is worth sum as the flatness on surface to be measured.
A kind of method and device for determining surface planarity provided in an embodiment of the present invention, it is only necessary to obtain surface to be measured
The spatial positional information of upper collection point, can be fitted determination according to the spatial positional information of collection point on surface to be measured afterwards and treat
The datum plane on surface is surveyed, the flatness on surface to be measured is determined by being fitted the datum plane determined.This method passes through fitting
Form determines the datum plane most matched with collection point, when effectively prevent using the plane of physical presence as datum plane
Error, and potential error when eliminating manual intervention, so as to drastically increase the accuracy of detection of flatness；And the party
Method can realize operation automation, improve detection repeatability and reproducibility, it is adaptable to automatic production line.And this method root
Datum plane is determined according to the sum of square of deviations minimum between collection point and datum plane, can very easily determine to calculate base
Coefficient matrix during directrix plane, calculating speed is fast, efficiency high.
Other features and advantages of the present invention will be illustrated in the following description, also, partly becomes from specification
Obtain it is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages can be by the explanations write
Specifically noted structure is realized and obtained in book, claims and accompanying drawing.
Below by drawings and examples, technical scheme is described in further detail.
Brief description of the drawings
Accompanying drawing is used for providing a further understanding of the present invention, and constitutes a part for specification, the reality with the present invention
Applying example is used to explain the present invention together, is not construed as limiting the invention.In the accompanying drawings：
Fig. 1 is the schematic diagram for beating table mensuration in the prior art；
Fig. 2 is the method flow diagram of determination surface planarity in the embodiment of the present invention；
Fig. 3 is the method flow diagram of determination datum plane in the embodiment of the present invention；
Fig. 4 is datum plane and the schematic diagram on surface to be measured in the embodiment of the present invention；
Fig. 5 is the structure chart of the device of determination surface planarity in the embodiment of the present invention；
Fig. 6 is the structure chart of fitting module in the embodiment of the present invention；
Fig. 7 is the structure chart of the second determining unit in the embodiment of the present invention.
Embodiment
The preferred embodiments of the present invention are illustrated below in conjunction with accompanying drawing, it will be appreciated that preferred reality described herein
Apply example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Referring to Fig. 2, a kind of flow for the method for determining surface planarity provided in an embodiment of the present invention is as follows, specific bag
Include step 101-103：
Step 101：The spatial positional information of multiple collection points on surface to be measured is obtained successively, and spatial positional information includes
Abscissa data, ordinate data and the altitude information of collection point.
In the embodiment of the present invention, surface to be measured is specifically as follows a surface of product to be measured, in the product to be measured by phase
After fixation, you can to determine the spatial positional information of each collection point on surface to be measured using equipment such as ranging instruments.Together
When, when obtaining spatial positional information, because method provided in an embodiment of the present invention can determine whether the datum plane of collection point, with
The change of the placed angle of plane to be measured, corresponding change can also occur for the datum plane, therefore in the space for obtaining collection point
Too many requirement is had no to the placed angle on the surface to be measured during positional information.
Optionally, collection point can be obtained using the manipulator of distance measuring sensor is fixed with the embodiment of the present invention
Spatial positional information.Above-mentioned steps 101 may include steps of A1-A2：
Step A1：The positional information of manipulator is determined, the positional information includes abscissa data and ordinate data.
Step A1：Determine altitude information corresponding with positional information on surface to be measured, and by abscissa data, vertical sit
Data and altitude information are marked as the spatial positional information of a collection point.
Specifically, because surface to be measured and manipulator can share same coordinate system, therefore can be directly by manipulator
X/Y coordinate datas as collection point corresponding on surface to be measured abscissa data and ordinate data；Meanwhile, in machinery
The altitude information of collection point can be obtained using distance measuring sensor under the current X/Y coordinates of hand, the altitude information may act as
Altitude information in the spatial positional information of collection point.X/Y coordinates are adjusted by the motion of control machinery hand, and different
The corresponding altitude information of X/Y measurement of coordinates, and then the spatial positional information of multiple collection points can be determined respectively.
Step 102：Datum plane is determined, datum plane is to be formed according to the fitting of the spatial positional information of multiple collection points
Plane.
In the embodiment of the present invention, because the spatial positional information of collection point includes abscissa data, ordinate data and height
Degrees of data, therefore a coordinate points in a collection point corresponding three-dimensional coordinate system, multiple different same three-dimensionals of collection point correspondence
Multiple different coordinate points under coordinate system, are that can be fitted to show that corresponding benchmark is put down according to the coordinate points of all collection points
Face.It can be seen from mathematical principle, the deviation being fitted between the datum plane drawn and all collection points is minimum.Specifically, collection
The absolute value sum minimum of deviation or the maximum of absolute value of the bias are minimum or deviation flat between point and datum plane
Side and minimum etc., may be different according to the datum plane that different minimal conditions is determined.
Step 103：The height error between each collection point and datum plane is determined respectively, and according to height error meter
Calculate the flatness on surface to be measured.
In the embodiment of the present invention, flatness refers to variation of the surface to be measured relative to its ideal plane, in step
The datum plane that determination is fitted in 102 may act as the ideal plane on the surface to be measured, therefore it is determined that being gathered on surface to be measured
After the spatial positional information and datum plane of point, the flatness on the surface to be measured can be very easily determined.The embodiment of the present invention
In, the height error between collection point and datum plane is specifically as follows beeline of the collection point apart from datum plane；Also may be used
Think the distance between collection point in the height direction and datum plane, the short transverse and above-mentioned collection spatial positional information
Altitude information when direction it is consistent, such as Z-direction.The height between all collection points and datum plane is being determined respectively
The flatness on surface to be measured can be determined after error.
The method (such as beating table mensuration, using electrolevel) of traditional measurement surface flatness is, it is necessary to use certain
One reference plane of one fixation and physical presence is as evaluation benchmark, so as to cause tested surface relative to this fixed reference
The posture (or angle) in face can influence the measurement result of flatness.And a kind of determination surface plane provided in an embodiment of the present invention
The method of degree, it is only necessary to obtain the spatial positional information of collection point on surface to be measured, afterwards according to collection point on surface to be measured
Spatial positional information can be fitted the datum plane for determining surface to be measured, and table to be measured is determined by being fitted the datum plane determined
The flatness in face.The datum plane that this method determines most to match with collection point by the form of fitting, effectively prevent with reality
The plane that border is present is as error during datum plane, and potential error when eliminating manual intervention, so as to be greatly enhanced
The accuracy of detection of flatness；And this method can realize operation automation, detection repeatability and reproducibility are improved, is fitted
For automatic production line.
Another embodiment of the present invention provides a kind of method for determining surface planarity, and it includes the step shown in Fig. 2
101-103, and it implements process and technique effect embodiment shown in Figure 2；Meanwhile, in embodiments of the present invention,
Shown in Figure 3, step 102 " determining datum plane " can include step 1021-1023：
Step 1021：Set up the mathematical modeling Z=a of datum plane1+a2X+a3Y, wherein, a1,a2,a3On the basis of plane
Three parameters to be measured.
In the embodiment of the present invention, all collection points can be located under same three-dimensional system of coordinate, therefore can utilize plane
The mathematical modeling Z=a of establishing equation datum plane1+a2X+a3Y, wherein, X, Y, Z represent the variable of datum plane, a1,a2,a3
On the basis of plane three parameters to be measured, by determining a1,a2,a3Datum plane can be determined.
Step 1022：It is determined that each collection point and the sum of square of deviations S of datum plane in the height direction, andWherein, n is the number of collection point, Xi,Yi,ZiThe horizontal seat of respectively i-th collection point
Mark data, ordinate data and altitude information.
In the embodiment of the present invention, the short transverse is to obtain the direction referred to during the altitude information of collection point, and the present invention is real
Apply specific by taking the Z-direction under three-dimensional system of coordinate as an example in example, and abscissa data are the data in X-direction, ordinate number
According to for the data in Y direction.Meanwhile, in order to avoid the datum plane that finally determines is perpendicular to X-axis or Y-axis, the present invention is implemented
In example, the distance between point on the two dimensional surface that abscissa data and ordinate data are determined is not less than default threshold value.
If specifically, determining the spatial positional information by manipulator, only needing to ensure that manipulator is being spaced enough X/Y seats
The lower gathered data of mark.
In addition, it can be seen from mathematical knowledge, if the deviation between datum plane and all collection points is minimum, when this is inclined
The first-order partial derivative of difference can be with the extreme value of determination deviation when being zero.If by the absolute value of deviation between collection point and datum plane
Sum minimum as Rule of judgment, then be not easy determine its first-order partial derivative, therefore in the embodiment of the present invention with each collection point with
The sum of square of deviations of datum plane in the height direction is as judgment standard, and not only the single order of easy determination deviation quadratic sum is inclined
Derivative, and sum of square of deviations S is non-negative binomial, there is minimum value in it；Meanwhile, the deviation square in the present embodiment is in geometry
Represented in meaning be a collection point on altitude information direction (i.e. Z-direction) apart from the distance of datum plane square,
Sum of square of deviations is all square distance sums, therefore the sum of square of deviations also necessarily has minimum value, i.e., flat by determination deviation
Side and S first-order partial derivative, datum plane can be determined easily and fast.
Step 1023：Three parameters to be measured of datum plane are determined, it is minimum that parameter to be measured is so that sum of square of deviations is obtained
The parameter of value.
In the embodiment of the present invention, the plane determined when sum of square of deviations is minimum may act as the benchmark being fitted
Plane.Specifically, when sum of square of deviations is minimum, sum of square of deviations S first-order partial derivative is zero.Above-mentioned steps 1023 are true
Determine three parameters to be measured of datum plane, comprise the following steps B1-B2：
Step B1：Successively with parameter a to be measured1,a2,a3For the first-order partial derivative of variable determination deviation quadratic sum.
Step B2：It is determined that so that three first-order partial derivatives of sum of square of deviations are zero parameter a to be measured1,a2,a3。
In the embodiment of the present invention, the mathematical modeling of datum plane is Z=a1+a2X+a3Y, if the space of i-th of collection point
The corresponding coordinate points of positional information are Pi(Xi,Yi,Zi), i=1,2 ... ..., n, Xi,Yi,ZiThe horizontal stroke of respectively i-th collection point
Coordinate data, ordinate data and altitude information, then the mathematical modeling of collection point can be expressed as：
Wherein, fiFor the deviation between i-th of collection point and datum plane.
If：
As described above, Xi、YiIt is exactly the location point for laser ranging, that is to say the coordinate points of robot movement, is
Know condition；a1、a2、a3It is three unknown numbers to be estimated, fiIt is that each collection point is flat relative to benchmark on actual surface to be measured
The deviation in face, it is N number of separate and meets normal distribution (a1+a2Xi+a3Yi+ δ) stochastic variable.So above-mentioned adopts
The mathematical modeling of collection point can just be represented with the form of matrix：
Z=Xa+f；
Meanwhile, the mathematical modeling of datum plane is Z=a1+a2X+a3Y, due to a1,a2,a3On the basis of three of plane treat
Parameter is surveyed, herein to unify with above-mentioned collection point and conveniently describing, datum plane is set to Zi=a1+a2Xi+a3Yi, benchmark
Plane and the schematic diagram on surface to be measured are shown in Figure 4, and the figure that wherein curve is represented is surface to be measured, and what rhombus was represented is
Datum plane.a1、a2、a3Value should cause the Z of whole measured points in actual plane to be measurediRelative to datum plane's
Sum of square of deviations S is minimum, i.e.,：
It is minimum.Now, the single order local derviation of determination deviation quadratic sum
Number, you can to obtain equation below group：
Equation group is further simplified as：
Now, make：
Represent that above-mentioned equation group is with matrix form：BC=a.It is determined that coefficient matrix B inverse matrix B-1Afterwards, a=B- 1C.Due to Xi,Yi,ZiAbscissa data, ordinate data and the altitude information of respectively i-th collection point, i.e., above-mentioned is
Matrix number B and C are directly to determine, and then can directly determine coefficient matrix a, you can to determine three parameter a to be measured1,
a2,a3。
Optionally, the flatness on surface to be measured is calculated in above-mentioned steps 103 according to height error, is specifically as follows：By height
The maximum of error and the absolute value sum of minimum value are spent as the flatness on surface to be measured.In the embodiment of the present invention, collection point
Height error between datum plane is specifically as follows beeline of the collection point apart from datum plane；Can also be in height
Spend the distance between collection point and datum plane, i.e., the deviation f between above-mentioned collection point and datum plane on directioni, i.e., this
When flatness be | max (fi)|+|min(fi)|。
A kind of method for determining surface planarity provided in an embodiment of the present invention, it is only necessary to obtain and gathered on surface to be measured
The spatial positional information of point, can be fitted determination surface to be measured according to the spatial positional information of collection point on surface to be measured afterwards
Datum plane, determine the flatness on surface to be measured by being fitted the datum plane determined.This method is true by the form of fitting
The datum plane that fixed and collection point most matches, effectively prevent error during using the plane of physical presence as datum plane,
And potential error when eliminating manual intervention, so as to drastically increase the accuracy of detection of flatness；And this method can be real
Now operation automation, improves detection repeatability and reproducibility, it is adaptable to automatic production line.And this method is according to collection point
Sum of square of deviations minimum between datum plane determines datum plane, when can very easily determine calculating benchmark plane
Coefficient matrix, calculating speed is fast, efficiency high.
The flow for the method that surface planarity is determined in the embodiment of the present invention is described in detail above, and this method can also
Realized by corresponding device, the 26S Proteasome Structure and Function of the device is described in detail below.
A kind of device for determining surface planarity provided in an embodiment of the present invention, it is shown in Figure 5, including：Acquisition module
51st, fitting module 52 and processing module 53.
Acquisition module 51 is used for the spatial positional information for obtaining multiple collection points on surface to be measured successively, space bit confidence
Breath includes the abscissa data, ordinate data and altitude information of collection point.
Fitting module 52 is used to determine datum plane, and datum plane is to be intended according to the spatial positional information of multiple collection points
The plane closed.
Processing module 53 is used to determine the height error between each collection point and datum plane respectively, and according to height
The flatness on error calculation surface to be measured.
Shown in Figure 6 in a kind of possible implementation, fitting module 52 includes：Model sets up unit 521,
One determining unit 522 and the second determining unit 523.
Model sets up the mathematical modeling Z=a that unit 521 is used to set up datum plane1+a2X+a3Y, wherein, a1,a2,a3For
Three parameters to be measured of datum plane.
First determining unit 522 is used to determine each collection point and the sum of square of deviations of datum plane in the height direction
S, andWherein, n is the number of collection point, Xi,Yi,ZiRespectively i-th collection point
Abscissa data, ordinate data and altitude information.
Second determining unit 523 is used for three parameters to be measured for determining datum plane, and parameter to be measured is so that deviation square
With the parameter for obtaining minimum value.
Shown in Figure 7 in a kind of possible implementation, the second determining unit 523 includes：Determination subelement
5231 and processing subelement 5232.
Determination subelement 5231 is used for successively with parameter a to be measured1,a2,a3Single order for variable determination deviation quadratic sum is inclined
Derivative.
Processing subelement 5232 is used for the parameter to be measured for determining that three first-order partial derivatives for causing sum of square of deviations are zero
a1,a2,a3。
In a kind of possible implementation, processing subelement 5232 specifically for：
It is determined that coefficient matrix B and coefficient matrix C when three first-order partial derivatives of sum of square of deviations are zero, and：
Parameter matrix a to be measured is determined, and：
In a kind of possible implementation, processing module 53 is used for：By the exhausted of the maximum of height error and minimum value
To flatness of the value sum as surface to be measured.
A kind of method and device for determining surface planarity provided in an embodiment of the present invention, it is only necessary to obtain surface to be measured
The spatial positional information of upper collection point, can be fitted determination according to the spatial positional information of collection point on surface to be measured afterwards and treat
The datum plane on surface is surveyed, the flatness on surface to be measured is determined by being fitted the datum plane determined.This method passes through fitting
Form determines the datum plane most matched with collection point, when effectively prevent using the plane of physical presence as datum plane
Error, and potential error when eliminating manual intervention, so as to drastically increase the accuracy of detection of flatness；And the party
Method can realize operation automation, improve detection repeatability and reproducibility, it is adaptable to automatic production line.And this method root
Datum plane is determined according to the sum of square of deviations minimum between collection point and datum plane, can very easily determine to calculate base
Coefficient matrix during directrix plane, calculating speed is fast, efficiency high.
It should be understood by those skilled in the art that, embodiments of the invention can be provided as method, system or computer journey
Sequence product.Therefore, in terms of the present invention can be using complete hardware embodiment, complete software embodiment or combination software and hardware
The form of embodiment.Moreover, the present invention can be used in one or more calculating for wherein including computer usable program code
The computer program product that machine usable storage medium is implemented on (including but is not limited to magnetic disk storage and optical memory etc.)
Form.
The present invention is the flow with reference to method according to embodiments of the present invention, equipment (system) and computer program product
Figure and/or block diagram are described.It should be understood that can be by each in computer program instructions implementation process figure and/or block diagram
Flow and/or the flow in square frame and flow chart and/or block diagram and/or the combination of square frame.These computers can be provided
Processor of the programmed instruction to all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing devices
To produce a machine so that produced by the instruction of computer or the computing device of other programmable data processing devices
For realizing the function of being specified in one flow of flow chart or multiple flows and/or one square frame of block diagram or multiple square frames
Device.
These computer program instructions, which may be alternatively stored in, can guide computer or other programmable data processing devices with spy
Determine in the computer-readable memory that mode works so that the instruction being stored in the computer-readable memory, which is produced, to be included
The manufacture of command device, the command device is realized in one flow of flow chart or multiple flows and/or one square frame of block diagram
Or the function of being specified in multiple square frames.
These computer program instructions can be also loaded into computer or other programmable data processing devices so that
Series of operation steps is performed on computer or other programmable devices to produce computer implemented processing, so as to calculate
The instruction performed on machine or other programmable devices is provided for realizing in one flow of flow chart or multiple flows and/or side
The step of function of being specified in one square frame of block diagram or multiple square frames.
Obviously, those skilled in the art can carry out various changes and modification without departing from the present invention's to the present invention
Spirit and scope.So, if these modifications and variations of the present invention belong to the model of the claims in the present invention and its equivalent technologies
Within enclosing, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
1. a kind of method for determining surface planarity, it is characterised in that comprise the following steps：
The spatial positional information of multiple collection points on surface to be measured is obtained successively, and the spatial positional information includes the collection point
Abscissa data, ordinate data and altitude information；
Datum plane is determined, the datum plane is the plane being fitted according to the spatial positional information of multiple collection points；
The height error between each collection point and the datum plane is determined respectively, and according to being calculated the height error
The flatness on surface to be measured.
2. according to the method described in claim 1, it is characterised in that the determination datum plane includes：
Set up the mathematical modeling Z=a of datum plane1+a2X+a3Y, wherein, a1,a2,a3On the basis of plane three parameters to be measured；
It is determined that each collection point and the sum of square of deviations S of the datum plane in the height direction, and
Wherein, n is the number of collection point, Xi,Yi,ZiAbscissa data, ordinate data and the high number of degrees of respectively i-th collection point
According to；
Three parameters to be measured of the datum plane are determined, the parameter to be measured is so that the sum of square of deviations obtains minimum value
Parameter.
3. method according to claim 2, it is characterised in that three parameters to be measured of the determination datum plane,
Including：
Successively with parameter a to be measured1,a2,a3The first-order partial derivative of the sum of square of deviations is determined for variable；
It is determined that so that three first-order partial derivatives of the sum of square of deviations are zero parameter a to be measured1,a2,a3。
4. method according to claim 3, it is characterised in that the determination causes three single orders of the sum of square of deviations
Partial derivative is zero parameter a to be measured1,a2,a3, including：
It is determined that coefficient matrix B and coefficient matrix C when three first-order partial derivatives of sum of square of deviations are zero, and：
Parameter matrix a to be measured is determined, and：
5. according to any described methods of claim 1-4, it is characterised in that described to be treated according to being calculated the height error
The flatness on surface is surveyed, including：
Using the absolute value sum of the maximum of the height error and minimum value as the surface to be measured flatness.
6. a kind of device for determining surface planarity, it is characterised in that including：
Acquisition module, the spatial positional information for obtaining multiple collection points on surface to be measured successively, the spatial positional information
Abscissa data, ordinate data and altitude information including the collection point；
Fitting module, for determining datum plane, the datum plane is to be fitted according to the spatial positional information of multiple collection points
Plane；
Processing module, for determining the height error between each collection point and the datum plane respectively, and according to the height
Spend the flatness on surface to be measured described in error calculation.
7. device according to claim 6, it is characterised in that the fitting module includes：
Model sets up unit, the mathematical modeling Z=a for setting up datum plane1+a2X+a3Y, wherein, a1,a2,a3On the basis of put down
Three parameters to be measured in face；
First determining unit, for determining each collection point and the sum of square of deviations S of the datum plane in the height direction, andWherein, n is the number of collection point, Xi,Yi,ZiThe horizontal seat of respectively i-th collection point
Mark data, ordinate data and altitude information；
Second determining unit, three parameters to be measured for determining the datum plane, the parameter to be measured is so that described inclined
Poor quadratic sum obtains the parameter of minimum value.
8. device according to claim 7, it is characterised in that second determining unit includes：
Determination subelement, for successively with parameter a to be measured1,a2,a3The first-order partial derivative of the sum of square of deviations is determined for variable；
Subelement is handled, for determining to cause that three first-order partial derivatives of the sum of square of deviations are zero parameter a to be measured1,
a2,a3。
9. device according to claim 8, it is characterised in that the processing subelement is used for：
It is determined that coefficient matrix B and coefficient matrix C when three first-order partial derivatives of sum of square of deviations are zero, and：
Parameter matrix a to be measured is determined, and：
10. according to any described devices of claim 6-9, it is characterised in that the processing module is used for：The height is missed
Difference maximum and minimum value absolute value sum as the surface to be measured flatness.
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| CN112504213A (en) * | 2020-12-10 | 2021-03-16 | 长江存储科技有限责任公司 | Semiconductor film flatness calculation method and system and semiconductor machine adjustment method |
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