JP2011083138A - Power supply system to carrier dolly in clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a power supply system to a carrier dolly in a clean room, preventing scattering of dust to the outside of a power-supply cover and the inside of the clean room, and holding a degree of cleanness in the clean room, in a contact type power supply system advantageous for a miniaturization and a lightening. <P>SOLUTION: A carrier room R1, is which the carrier dolly 1 travels, and a power supply room R2 disposing a power supply rail 4 supplying power by the sliding contact of a collector ring 2 are partitioned by a ventilation type floor 5 forming a slit hole 51 so as to insert a collector-ring supporting material 3 projected to the carrier dolly 1 side. The power-supply rail 4 is covered with the power-supply cover 6 forming a slit opening 61 for inserting the collector-ring supporting material along the traveling direction of the carrier dolly 1 while a shielding plate 7 shielding the slit opening 61 for the power-supply cover 6 facing the collector ring 2 is disposed to the collector-ring supporting material 3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a power feeding system for a transport carriage in a clean room, and in particular, to a transport carriage in a clean room that prevents dust generated during power feeding to a transport carriage traveling in a clean room from being attached to a transported object. The present invention relates to a power supply system.

  Conventionally, if dust or the like adheres to a transported object such as a liquid crystal substrate, it becomes a defective substrate and cannot be used as a product. Therefore, it is transported in a clean room that maintains a specified cleanliness level in manufacturing factories and automatic warehouses for precision equipment such as liquid crystals and semiconductors. A cart (RGV, OHV, etc.) or a stacker crane is run and transported. In particular, liquid crystal substrates and the like are transported using a cassette in which a plurality of sheets are stacked and stored, and this carrier cart or stacker crane (hereinafter referred to as “carrying cart”) is required in a cable carrier type, a non-contact type or a contact type. A transport system that supplies a large amount of electric power has been proposed.

By the way, in the transfer system in the clean room, when the power supply system to the transfer carriage is performed by the cable carrier type, an apparatus for winding and unwinding the cable according to the traveling of the transfer carriage is necessary, and the apparatus becomes complicated, The cable may break due to use.
Further, when the contact type is used, a power supply rail (or power supply line) is laid along the traveling direction of the conveyance carriage, and a current collector (current collection brush) for collecting electricity in sliding contact with the power supply rail is provided on the conveyance carriage side. It is arranged and arranged.
However, this contact-type power supply system has an advantage that it can be provided at a low cost, but on the other hand, the current collector moves in sliding contact with the power supply rail in accordance with the traveling of the transport carriage. Fine dust (hereinafter referred to as “dust”) is generated due to the wear of this material and is scattered in the clean room and adheres to the transported object, which is unsuitable as a power supply system in the clean room.
Therefore, a contact-type power supply system has been proposed in which dust generated on the current collector and / or the power supply rail is scattered and does not adhere to a transported object transported in a clean room. For example, there is one disclosed in Patent Document 1.
This is because a power supply rail as a power supply means is disposed along the movement path of the transport carriage (moving body) in the clean room, and a current collector is provided as a current collection means in sliding contact with the power supply rail. A dust collector that sucks dust generated by sliding contact with the power supply rail is provided on the ground side along the movement path, and the power supply rail is covered with a power supply cover that forms an opening over the movement path, and is collected. Air in the power supply cover is sucked by the dust collector through multiple dust collection ducts connected to the power supply cover so that dust such as fine dust generated by the sliding contact of electrons is not scattered around the power supply cover. And is configured to discharge to the outside.

By the way, in what was disclosed by patent document 1, since the slit-shaped opening part was always opening over the movement path | route in the electric power feeding cover which covered the electric power feeding rail, even if the electric power feeding rail was covered with the electric power feeding cover However, if the current in the power supply cover is agitated by the current collector moving inside the power supply cover and a turbulent flow is generated, and this agitation turbulence is stronger than the suction force by the dust collector, it will occur when the current collector moves in sliding contact. This dust turbulence is scattered directly into the clean room from the opening of the power supply cover together with the stirring turbulence, and there is a problem that the cleanness in the clean room cannot be maintained at a high level.
Further, in order to prevent dust from being generated by the stirring turbulence generated by the movement of the current collector from the opening of the power supply cover, it is necessary to weaken the generated stirring turbulence force. For this purpose, it is necessary to reduce the moving speed of the current collector, that is, to reduce the traveling speed of the transport carriage, which causes a problem that the transport capability is lowered.
Moreover, in order to prevent dust from scattering from the opening of the power supply cover without reducing the transport speed of the transport carriage, it can be achieved by increasing the dust collection force by the dust collector. However, for this purpose, it is necessary to increase the size and strength of the dust collector, resulting in a problem that the equipment cost increases and the running cost also increases.
In addition, since a plurality of dust collection ducts are connected to the power supply cover, it is necessary to rotate the plurality of dust collection ducts, and there is a problem that this dust collection apparatus is also increased in size.

Further, by adopting a contactless power feeding system instead of the contact power feeding system, it is possible to suppress the generation of dust during the sliding movement of the current collector. However, this contactless power supply system lays an induction line unit that passes a high-frequency sine wave current along the movement path (traveling path), and generates an electromotive force by resonating with the frequency of the induction line unit on the transport carriage side. The pickup unit to be arranged is arranged.
For this reason, there is a problem that the cost of the power feeding system increases, and that the pickup unit becomes larger and heavier, and the larger and heavier transportation carriage cannot be avoided.

JP 2002-191101 A

  In view of the above-described problems of the conventional contact type power supply system for a transport carriage, the present invention prevents dust from being scattered outside the power supply cover and inside the clean room in a contact type power supply system advantageous for downsizing and weight reduction. And it aims at providing the electric power feeding system to the conveyance trolley | bogie in a clean room which maintained the cleanliness in the clean room.

  In order to achieve the above object, a power feeding system for a transport cart in a clean room according to the present invention transports a transport chamber in which the transport cart travels and a power feed chamber in which a power feed rail that feeds power by sliding contact with a current collector is disposed. Partition the current collector support projecting on the carriage side with a vented floor with slit holes and insert the power supply rail into the slit opening for the current collector support along the running direction of the transport carriage The power collecting cover is covered with the formed power feeding cover, and a shielding plate is provided on the current collecting support member so as to shield the slit opening of the power feeding cover facing the current collector.

  In this case, the slit hole formed in the ventilated floor can be formed so that the aeration flow rate is higher than the aeration flow rate by other parts of the aeration type floor.

  In addition, the fan filter unit can be disposed on the power supply cover that covers the power supply rail.

  In addition, the fan filter unit is arranged so that the suction speed at the slit opening of the power supply cover is equal to or higher than the flow velocity set so that the stirring turbulence of the air in the power supply cover generated by the movement of the current collector does not scatter outside the power supply cover. Can be set.

  In addition, the length of the shielding plate that moves in the power supply cover and shields the slit opening of the power supply cover is adjusted so that the stirring turbulence of the air due to the current collector that moves in sliding contact with the power supply rail is affected by the slit opening of the power supply cover. The length can be prevented from scattering outside from the portion.

  According to the power supply system for the transport trolley in the clean room of the present invention, the transport chamber in which the transport trolley travels and the power supply chamber in which the power supply rail that supplies power by sliding contact with the current collector are provided on the side of the transport trolley. The power supply cover is formed by partitioning with a ventilated floor with slit holes so that the current collector support material is inserted, and the power supply rail is formed with a slit opening for current collector support material insertion along the traveling direction of the transport carriage. In addition, the current collector support member is provided with a shielding plate configured to shield the slit opening of the power supply cover facing the current collector, so that the current collector slides along the power supply rail during power supply. The dust generated by contact can be securely confined in the power supply cover, so that a high degree of cleanliness can be maintained in the transfer chamber and the power supply can be made contact-type. It is possible.

  In addition, the slit hole formed in the ventilated floor is formed so that the aeration flow rate is higher than the aeration flow rate by other parts of the aerial floor, so that dust generated in the power feeding chamber flows back to the transfer chamber side. Can be reliably prevented and the degree of cleanliness on the transfer chamber side can be maintained at a high level.

  In addition, by disposing the fan filter unit on the power supply cover that covers the power supply rail, the negative pressure inside the power supply cover can be easily formed, and there is no need for the dust collection duct to be circulated as in the past. Can be simplified, and the dust collector can be miniaturized.

  In addition, the fan filter unit is arranged so that the suction speed at the slit opening of the power supply cover is equal to or higher than the flow velocity set so that the stirring turbulence of the air in the power supply cover generated by the movement of the current collector does not scatter outside the power supply cover. As a result, the speed of the transport carriage can be increased, and the transport capability can be easily and reliably improved.

  In addition, the length of the shielding plate that moves in the power supply cover and shields the slit opening of the power supply cover is adjusted so that the stirring turbulence of the air due to the current collector that moves in sliding contact with the power supply rail is affected by the slit opening of the power supply cover. By ensuring that the length can be prevented from scattering from the outside of the unit, it is possible to ensure that dust generated in the power supply cover leaks out of the power supply cover even when the carriage is running at high speed or turbulent flow is generated in the power supply cover. Can be prevented.

It is a front view which shows one Example of the electric power feeding system to the conveyance trolley in a clean room of this invention. It is a side view which shows the electric power feeding part of the electric power feeding system by A arrow view of FIG. It is a top view which shows the electric power feeding part of the same electric power feeding system by the arrow B of FIG. It is explanatory drawing explaining the flow of the air in a clean room.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a power feeding system for a transport carriage in a clean room according to the present invention will be described below with reference to the drawings.

1 to 4 show an embodiment of a power feeding system for a transport carriage in a clean room according to the present invention.
This power supply system for the transport carriage in the clean room is for supplying power to the transport carriage 1 for transporting a transported object such as a substrate by a contact type power supply system in a manufacturing factory or an automatic warehouse for precision equipment such as liquid crystal and semiconductor. In the clean room R, the feeding rail 4 is laid so as to be in sliding contact with the transport chamber R1 in which the transported goods normally stored in the cassette K are mounted on the transport cart 1 and transported, and the current collector 2 projecting from the transport cart 1 Then, the power supply chamber R2 that is covered with the power supply cover 6 is partitioned by a ventilated floor 5, and a slit hole 51 is formed in the vented floor 5 along the traveling direction of the transport carriage 1. The slit hole 51 is formed in a slit shape so that the current collecting support member 3 protruding from the conveyance carriage side is along the traveling direction of the conveyance carriage 1.
As described above, the vented floor 5 separating the transfer chamber R1 and the power supply chamber R2 by the transfer cart 1 is preferably configured so that the downflow caused by the clean air ejected from the entire ceiling of the clean room is the transfer chamber R1 of the transfer cart 1. Further, it is configured to circulate through the ventilated floor 5 to the power feeding chamber R2 side.
As a result, the contamination of the conveyed product can be prevented even by the fine dust generated in the transfer chamber R1.

  The transport cart that travels in the transport chamber R1 is not particularly limited. For example, the transport cart travels as the wheels on the transport cart roll along a travel rail laid on a ventilated floor. At the same time, the cassette K storing the transported objects such as the substrates is mounted on the transport carriage, and the dust generated when the transport carriage 1 travels passes through the ventilated floor 5 due to the downflow, and the lower power supply chamber R2 It is possible to prevent it from adhering to the conveyed product in the cassette.

  In addition, as shown in FIG. 4, the ventilated floor 5 that partitions the transfer chamber R <b> 1 and the power supply chamber R <b> 2 forms a required downflow by clean air, but along the traveling direction of the transfer carriage 1. The opening by the slit hole 51 to be formed is set so that the aeration flow rate is higher than the aeration flow rate by other parts of the aeration type floor 5. Thereby, in the power supply chamber R2 described later, even if dust generated from the current collector 2 that is in sliding contact with the power supply rail 4 leaks from the slit opening 61 of the power supply cover 6 into the power supply chamber due to turbulence or the like, the transfer chamber R1 side Thus, the backflow to the transfer chamber R1 can be completely prevented, and the cleanliness of the transfer chamber R1 can be maintained.

A power supply rail 4 is laid along the traveling direction of the transport carriage 1 in the power supply chamber R2, and an outer periphery of the power supply rail 4 is covered with a power supply cover 6. A slit opening 61 for inserting the current collector support material is formed along the travel direction of the transport carriage 1 so that the current collection support material 3 protruding from the position can be moved along with the travel of the transport carriage 1.
The width of the slit opening 61 is determined so as to have a slight gap that does not come into contact with the current collecting support member 3 that moves as the transport carriage 1 travels.

  The current collector 2 projecting from the transport cart 1 is not particularly limited. For example, as shown in FIGS. 1 to 2, a current collector support material 3 having an L-shape projecting from the lower portion of the transport cart. The current collector 2 is attached to the front end of the current collector support member 3 so as to be in sliding contact with the power supply rail 4. In this case, the vertical portion of the current collector support member 3 is inserted into the slit hole 51 of the ventilated floor 5, the horizontal portion is inserted into the slit opening 61 of the power supply cover 6, and the current collector support member 3 is horizontally disposed. The shield plate 7 is attached inside the power supply cover 6 and close to the slit opening surface of the power supply cover 6.

As shown in FIGS. 2 to 3, the shielding plate 7 is configured to shield the slit opening 61 of the power supply cover 6 from the inner side without contacting the power supply cover 6. Is determined in such a way as to prevent the air stirring turbulent flow caused by the current collector 2 moving in sliding contact with the power supply rail 4 from being scattered outside the slit opening 61 even if it occurs in the power supply cover.
The shielding plate 7 is fixed to the horizontal portion of the current collecting support member 3, but the material is not particularly limited and can be arbitrarily selected.
Thereby, the shielding plate 7 can be prevented from moving inside the power supply cover while the carriage 1 is running, and the air inside the power supply cover including dust leaks out of the power supply cover together with the turbulent flow.

Further, the fan filter unit 8 is disposed outside the power supply cover 6 at a predetermined interval or an arbitrary interval. The fan filter unit 8 sucks air in the power supply cover, filters dust contained in the sucked air with a built-in filter, and then exhausts the air into the power supply room or out of the clean room.
In this case, the suction speed in the slit opening 61 of the power supply cover 6 is set so that a part of the stirring turbulent flow of the air in the power supply cover generated by the movement of the current collector 2 does not scatter outside the power supply cover through the slit opening 61. A plurality of fan filter units 8, 8 are arranged at a predetermined interval so as to be equal to or higher than the set flow rate.

  By configuring as described above, the power supply system for the transport carriage in the clean room of the present invention is equipped with a cassette, and when the transport carriage travels in the clean room, specifically in the transport chamber, dust generated in the transport chamber is The air is promptly guided to the inside of the power supply room through the ventilated floor by the downflow with clean air, and the cleanliness in the transfer room is maintained.

  In addition, the current collector that moves following the conveyance of the conveyance carriage in the power supply chamber generates dust by slidingly contacting the power supply rail. The dust is covered by the power supply cover, and the dust is further covered in the power supply cover. Since it is sucked by the fan filter unit and is always set to a negative pressure, it does not leak to the outside. Furthermore, turbulence is generated in the power supply cover from the inside of the slit opening formed in the power supply cover, particularly in the rearward direction of the current collection along with the movement of the current collector. The slit opening corresponding to this turbulent flow part is shielded. Since it is shielded by the plate, dust generated in the power supply cover does not leak to the outside.

  In addition, even if dust in the power supply cover leaks from the slit opening, it is limited to the power supply room at the bottom of the ventilated floor. There is no contamination.

In the above embodiment, the interior of the clean room R is divided into the transfer chamber R1 and the power supply chamber R2 by the ventilated floor 5 up and down. It is also possible to arrange the feeding chamber R2 adjacently through a ventilated wall (not shown).
In this case, the downflow caused by the clean air is directed from the ceiling of the transfer chamber R1 to the floor of the transfer chamber R1, and then flows to the power supply chamber R2 side through the ventilated wall at the bottom of the side wall to supply power into the power supply chamber R2. A power supply rail covered with a cover was laid, and a current collecting support member protruding from the slit was formed in the ventilation wall, and the current collector was laid in the power supply cover through the slit opening of the power supply cover. The power supply rail and the current collector are in sliding contact. The operation in this case is the same as in the previous embodiment.

  As mentioned above, although the electric power feeding system to the carriage in the clean room of the present invention has been described based on the illustrated embodiment, the present invention is not limited to the configuration described in the above embodiment, and the configuration described in the embodiment. The configuration can be changed as appropriate without departing from the spirit of the invention, for example, by appropriately combining them.

  The power supply system for the transport carriage in the clean room of the present invention has a characteristic of preventing the dust generated when power is supplied to the transport carriage from adhering to the transported object. In addition to being suitable for use as a transfer device, for example, it can also be used as a transfer device for automatic warehouses.

DESCRIPTION OF SYMBOLS 1 Transfer cart 2 Current collector 3 Current collector support material 4 Power supply rail 5 Ventilation floor 51 Slit hole 6 Power supply cover 61 Slit opening 7 Shielding plate 8 Fan filter unit R Clean room R1 Transport room R2 Power supply room K Cassette

Claims (5)

  A slit hole is formed so that a current collecting support projecting on the side of the conveyance carriage is inserted into the conveyance chamber in which the conveyance carriage travels and a power supply room in which a power supply rail for supplying power by sliding contact with the current collector is arranged. The power supply rail is partitioned by a ventilated floor, and the power supply rail is covered with a power supply cover that is formed along the traveling direction of the transport carriage, and the power collection rail is opposed to the current collection. A power feeding system for a transport carriage in a clean room, characterized in that a shielding plate configured to shield a slit opening of a power feeding cover is disposed.   2. The power feeding system for a transport carriage in a clean room according to claim 1, wherein the slit hole formed in the ventilated floor is formed so that the aeration flow rate is higher than the aeration flow rate by other parts of the ventilated floor.   3. A power feeding system for a carriage in a clean room according to claim 1, wherein a fan filter unit is disposed on a power feeding cover that covers the power feeding rail.   The suction speed at the slit opening of the power supply cover is set to the power supply cover at intervals such that the stirring turbulence of the air in the power supply cover generated by the movement of the current collector does not scatter outside the power supply cover. 4. A power feeding system for a transport carriage in a clean room according to claim 1, wherein a fan filter unit is provided.   The length of the shielding plate that moves within the power supply cover and shields the slit opening of the power supply cover is the same as the stirring turbulence of the air due to the current collector that moves in sliding contact with the power supply rail from the slit opening of the power supply cover. 5. The power feeding system for a transport carriage in a clean room according to claim 1, wherein the length is such that it can be prevented from scattering to the outside.

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