JP2011079545A - Case - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a gap from being generated between the peripheral edge part of a lid and a tray in a case for storing a pellicle. <P>SOLUTION: The case 1 has a closed structure A for closing a space between the peripheral edge part 10 of the lid 4 and the tray 3 under a condition that the lid 4 covering the tray 3 is bent by its own weight. The closed structure A has an inclined part 3b to which the undersurface 10a of the peripheral edge part 10 of the lid 4 tightly attaches on the upper face of the tray 3 under a condition that the undersurface 10a of the peripheral edge part 10 of the lid 4 is inclined to the horizontal upper face of the tray 3 by the lid 4 bent by its own weight. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a case for accommodating a pellicle or the like.

For example, a pellicle is an exposure apparatus that performs exposure processing in a photolithography process when manufacturing thin film transistors (TFTs), color filters (CFs), etc. constituting LSIs and liquid crystal displays (LCDs). In order to prevent this, it is used by being attached to the photomask or the like. Since this pellicle is installed on the optical path of the optical system of the exposure apparatus, exposure processing cannot be performed properly if foreign matter is attached or scratched. For this reason, the pellicle is housed in a dedicated case when transported after manufacture, etc., in order to prevent adhesion and damage of foreign matter. As shown in FIG. 13, this pellicle storage case is generally composed of a tray 100 on which the pellicle is placed and a lid 101 that covers the tray 100.

  In the case, when the pellicle is stored, the peripheral edge of the lid 101 and the tray 100 are fitted together, held together, or adhered with an adhesive tape to ensure hermeticity in the case (Patent Document 1). .

JP 2004-361647 A

However, for example, as shown in FIG. 13, when the center of the lid is bent downward due to its own weight, the peripheral edge of the lid is lifted, and a gap is easily formed between the peripheral edge of the lid and the tray. For this reason, it is easy for outside air to enter the case, and foreign matter may enter. In particular, when the pellicle is enlarged and the case is enlarged, the deflection due to the weight of the lid increases, and the amount of deformation at the peripheral edge of the lid increases, so that foreign matter is more likely to enter.

Further, when the lid is bent by its own weight, the peripheral edge of the lid may be relatively displaced outward and may protrude greatly from the tray. Even when the peripheral edge of the lid and the tray are fitted in this state, a gap is easily formed.

The present invention has been made in view of this point, and prevents a gap from being generated between the peripheral edge of the lid and the tray in a case for storing a pellicle or the like.

  In order to achieve the above object, the present invention is a case having a tray and its lid, and has a sealing structure that seals between the peripheral edge of the lid and the tray in a state where the lid is bent by its own weight.

According to the present invention, since the case has a sealed structure in consideration of bending due to the weight of the lid, it is possible to prevent a gap from being generated between the peripheral edge of the lid and the tray when the lid is put on the tray.

  The sealing structure may have a structure in which the peripheral edge portion of the lid and the tray are in close contact with each other in a state where the lid is bent by its own weight.

  Further, in the sealing structure, the lid is bent by its own weight, and the lower surface of the peripheral edge of the lid is inclined with respect to the horizontal upper surface of the tray, and the inclined portion where the lower surface of the peripheral edge of the lid closely contacts the upper surface of the tray. You may have.

  The sealing structure may have a structure in which the lower surface of the peripheral edge of the lid is parallel to the horizontal upper surface of the tray and is in close contact with the horizontal upper surface of the tray in a state where the lid is bent by its own weight. .

  The sealing structure may include an interposition member interposed between the peripheral edge portion of the lid and the tray and in close contact with the peripheral edge portion of the lid and the tray.

  The interposition member is in close contact with the lower surface of the peripheral edge of the lid and the horizontal upper surface of the tray in a state where the lid is bent by its own weight and the lower surface of the peripheral edge of the lid is inclined with respect to the horizontal upper surface of the tray. May be.

  The interposition member may be formed of a material softer than the tray. In this case, the lid may be formed by a vacuum forming method.

  The outer shape of the tray in the horizontal direction may be formed in a shape corresponding to the amount of deformation of the peripheral edge of the lid in the horizontal direction when the lid is bent by its own weight.

  The lid may be made of resin.

The case described above may be for storing a pellicle. The case may be used for storing a pellicle having an area of 1000 cm ² or more.

According to the present invention, in a case storing a pellicle or the like, it is possible to prevent a gap from being generated between the peripheral edge of the lid and the tray, and to prevent foreign matter from entering the case.

It is a perspective view which shows the outline of a structure of a case. It is a longitudinal cross-sectional view which shows the structure of a case in the state where the lid | cover was vacant. It is a longitudinal cross-sectional view which shows the structure of the case of the state in which the cover was covered on the tray. (A) is an expanded sectional view near the central part of the side of the peripheral part of the lid, and (b) is an enlarged sectional view near the end part of the side of the peripheral part of the lid. It is a top view of a tray. It is a longitudinal cross-sectional view which shows the other structural example of the case of the state in which the cover was vacant. It is a longitudinal cross-sectional view which shows the other structural example of the case of the state which covered the tray on the lid | cover. It is a longitudinal cross-sectional view which shows the other structural example of the case of the state in which the cover was vacant. It is a longitudinal cross-sectional view which shows the other structural example of the case of the state which covered the tray on the lid | cover. It is a longitudinal cross-sectional view which shows the case when the interposition member is interposed between the lid and the tray. It is a longitudinal cross-sectional view which shows a case in case a lid | cover has a curved side part. It is an expanded sectional view of the side part of a lid. It is explanatory drawing which shows the case before improvement.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing the configuration of the case 1 according to the present embodiment. 2 and 3 are explanatory views of a longitudinal section showing an outline of the configuration of the case 1.

  The case 1 has a tray 3 on which the pellicle 2 is placed and a lid 4 that covers the tray 3.

 The tray 3 has, for example, a thick, substantially square shape, and a mounting surface 3a as a horizontal upper surface is formed on the upper surface. As shown in FIG. 2, an inclined portion 3 b that has a substantially triangular cross section and is inclined so that the outer side is higher than the inner side is formed at the peripheral portion of the upper surface of the tray 3. The inclined portion 3b may be formed of the same material as the other portions of the tray 3, or may be formed of a material softer than the other portions of the tray 3, such as a rubber material. Moreover, in this Embodiment, the inclination part 3b of the said tray 3 comprises the sealing structure A which seals between the peripheral part 10 of the said lid 4, and the tray 3 in the state in which the cover 4 bent with dead weight. .

  As shown in FIG. 3, when the lid 4 is placed on the tray 3, the lid 4 is bent by its own weight, and the lower surface 10 a of the peripheral portion 10 of the lid 4 described later is inclined with respect to the mounting surface 3 a of the tray 3. The inclined portion 3b is formed so that the lower surface 10a of the peripheral edge portion 10 of the lid 4 is in close contact with the inclined portion 3b. For example, the inclined surface 3c on the upper surface of the inclined portion 3b is formed so as to match the inclination angle of the lower surface 10a of the peripheral edge portion 10 of the lid 4.

  The deformation of the peripheral portion 10 of the lid 4 when bent by its own weight differs between the vicinity of the central portion and the vicinity of the end portions on the four sides of the peripheral portion 10, and the deformation amount in the vicinity of the central portion is more than the vicinity of the end portion. Is big. As shown in FIG. 4, the peripheral portion 10 of the lid 4 has a larger inclination angle in the center portion than in the end portion. Therefore, in the inclined portion 3 b, the inclination angle α <b> 1 in the central portion along the circumferential direction accordingly (see FIG. 4 (a)) is set to be larger than the inclination angle α2 at the end (FIG. 4 (b)).

  Further, the tray 3 is formed so that the outer dimension is substantially the same as or slightly larger than the lid 4. As shown in FIGS. 4a and 4b, the peripheral edge portion 10 of the lid 4 is displaced outward in the horizontal direction when bent by its own weight, and the displacement amount is larger at the center portion than at the end portion at each side. . For this reason, as shown in FIG. 5, the inclined portion 3b of the tray 3 is formed such that the central portion protrudes outward from the end portion and the outer shape is curved in an arc shape when seen from the plane. That is, the outer shape of the tray 3 in the horizontal direction is formed in a shape corresponding to the amount of deformation of the peripheral edge portion 10 of the lid 4 when the lid 4 is bent by its own weight, and the lid 4 is outside the tray 3. Suppresses protruding.

  As shown in FIG. 1, the lid 4 is formed in a square shape when viewed from above, and a peripheral edge 10 that is in close contact with the inclined portion 3 b of the tray 3 when the pellicle 2 is stored; It has the inner peripheral part 11 which does not contact. The peripheral edge portion 10 has a rectangular frame shape, and becomes horizontal before the lid 4 is covered with the tray 3 as shown in FIG. 2, and the lid 4 is put on the tray 3 as shown in FIG. When it bends, it inclines so that the outside becomes higher. For example, a transparent material is used for the lid 4. In addition, the lower surface 10a of the peripheral part 10 may be provided with an uneven structure such that the lid 4 and the tray 3 are fitted to each other.

  The inner peripheral part 11 has a rectangular ceiling part 20 located in the center and a side part 21 that is located around the ceiling part 20 and connects the ceiling part 20 and the peripheral part 10. When the lid 4 is put on the tray 3 and the lid 4 is bent, the ceiling portion 20 is bent downward and the side surface portion 21 is opened outward, so that the lower surface 10 a of the peripheral edge portion 10 is horizontally mounted on the tray 3. It inclines so that an outer side may become high with respect to the mounting surface 3a.

  The material of the tray 3 and the lid 4 is not particularly limited, and examples thereof include engineering plastic, reinforced plastic, and metal. From the viewpoint of weight reduction and moldability, plastic materials are often selected, and acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. The above resin may be imparted with antistatic properties in order to prevent foreign matter adhesion due to static electricity. Fiber reinforced plastics can also be used. When selecting a metal, you may use aluminum from a viewpoint of weight reduction.

  The tray 3 and the lid 4 can be manufactured by an assembly such as vacuum molding, injection molding, or bonding using a plate made of the above-described material, but is preferably manufactured by vacuum molding. The thickness of the lid 4 is desirably 1 mm to 10 mm.

The dimensions of the tray 3 and the lid 4 of the case 1 are set in accordance with the size of the pellicle 2 to be accommodated. In the present embodiment, the area is preferably 10,000 cm ² or more, more preferably 16000 cm ² or more. In order to store the pellicle 2, it has a size larger than that of the pellicle 2.

  The pellicle 2 accommodated in the case 1 includes, for example, a transparent pellicle film 2c, a pellicle frame 2a to which the outer peripheral portion of the pellicle film 2c is attached, and a pellicle frame 2a as a mask as shown in FIGS. And a mask pressure-sensitive adhesive layer 2b applied along the pellicle frame 2a for adhering to the reticle. A release material 2d made of a protective film such as a release paper is attached to the surface (lower surface) of the mask adhesive layer 2b.

  The release material 2d has a larger area than the mask adhesive layer 2b. For example, the release material 2d is adhered to the tray 3 with an adhesive tape to fix the pellicle 2 to the tray 3. As a method of fixing the pellicle 2 to the tray 3, a locking member provided on the tray 3 is locked in a locking groove formed in the pellicle frame 2 a, or the pellicle frame 2 a is sandwiched between the tray 3 and the lid 4. And are not particularly limited.

  When the pellicle 2 is stored in the case 1, as shown in FIGS. 1 and 3, the lid 4 is attached to the tray 3 with the pellicle 2 placed and fixed near the center of the placement surface 3 a of the tray 3. Covered. At this time, the lid 4 is bent by its own weight, the peripheral portion 10 of the lid 4 is opened outward and inclined, and the peripheral portion 10 of the lid 4 and the inclined portion 3a of the tray 3 are tightly adhered. Thereafter, for example, the tray 3, the lid 4, a square or the like is held by clips or the like, or the adhesive tape is stretched around the peripheral portion to fasten the inner space where the pellicle 2 is sealed. preferable. The method for fixing the tray 3 and the lid 4 is not particularly limited.

  According to the above embodiment, the case 1 has the sealing structure A that seals between the peripheral edge 10 of the lid 4 and the tray 3 in a state where the lid 4 is bent by its own weight. It is possible to prevent a gap from being generated between the peripheral edge portion 10 and the tray 3. As a result, it is possible to prevent foreign matter from entering the case 1 and contaminating the pellicle 2.

  Since the sealing structure A has a structure in which the peripheral edge portion 10 of the lid 4 and the tray 3 are in close contact with each other in a state where the lid 4 is bent by its own weight, the peripheral edge portion 10 of the lid 4 and the tray 3 have a simple structure. It is possible to ensure a tight seal between them.

  In the sealed structure A, the lid 4 is bent by its own weight, and the lower surface 10a of the peripheral edge portion 10 of the lid 4 is inclined with respect to the horizontal placement surface 3a of the tray 3, and the lower surface 10a of the peripheral edge portion 10 of the lid 4 is in close contact. An inclined portion 3b is provided on the upper surface of the tray 3. In such a case, when the cover 4 is placed on the tray 3, a force in a direction in close contact with the inclined portion 3 b (perpendicular to the inclined surface 3 c) acts on the peripheral portion 10 of the lid 4. 3 can be improved.

The outer shape of the tray 3 in the horizontal direction is formed in a shape corresponding to the amount of deformation of the peripheral edge portion 10 of the lid 4 when the lid 4 is bent by its own weight, so that the area of the tray 3 is minimized. It is possible to suppress the lid 4 from protruding outside the tray 3 while keeping the limit. As a result, the airtightness between the lid 4 and the tray 3 can be further improved while realizing the tray 3 that is excellent in handling and cost.

  When the material of the lid 4 is resin, it is inexpensive and lightweight, and a gap with the tray 3 due to the bending of the lid 4 can be prevented.

The case 1 is for storing, for example, a large pellicle 2 having an area of 10000 cm ² or more. In such a case, the lid 4 is particularly bent, so that there is a gap between the peripheral edge 10 of the lid 4 and the tray 3 when storing the pellicle. The effect of the present invention for preventing the occurrence of this is very great.

  In the sealing structure A in the above embodiment, the lower surface of the peripheral edge portion 10 of the lid 4 is parallel to the horizontal upper surface of the tray 3 and is in close contact with the horizontal upper surface of the tray 3 in a state where the lid 4 is bent by its own weight. You may have a structure.

  For example, as shown in FIG. 6, the peripheral edge portion of the tray 3 is formed horizontally like the placement surface 3a. For example, the peripheral portion 10 of the lid 4 is formed thicker than the other portions such that the inclined portion 3b of the tray 3 of the above embodiment is attached to the lower surface side of the peripheral portion 10 of the lid 4, for example. . When the lid 4 is not covered with the tray 3 and is not bent by its own weight, the peripheral edge portion 10 of the lid 4 is inclined such that the lower surface 10a is lower with respect to the horizontal plane, as shown in FIG. When the cover 4 is placed on the tray 3 and the lid 4 is bent by its own weight, the lower surface 10a is formed to be horizontal. In such a case, similarly to the embodiment described above, it is possible to prevent the peripheral edge 10 of the lid 4 and the tray 3 from coming into close contact with each other when the pellicle is accommodated, and a gap between the peripheral edge 10 of the lid 4 and the tray 3 can be prevented. . As a result, it is possible to prevent foreign matter from entering the case 1 and contaminating the pellicle 2. The thick part on the lower surface side of the peripheral edge 10 of the lid 4 may be formed of the same material as the other parts of the lid 4, for example, a material softer than the tray 3, for example, a rubber material. It may be.

  In the above example, the peripheral edge portion 10 of the lid 4 may be formed with the same thickness as other portions as shown in FIG. In such a case, the peripheral edge portion 10 of the lid 4 is inclined so that the outer side becomes lower with respect to the horizontal plane in a state where the lid 4 is not covered with the tray 3 and is not bent by its own weight, and the tray 3 as shown in FIG. When the lid 4 is bent and bent by its own weight, it may be formed so as to be horizontal and in close contact with the upper surface of the tray 3.

  In the above embodiment, the inclined surface is formed on the peripheral edge 10 side or the tray 3 side of the lid 4 so that the peripheral edge 10 of the lid 4 and the tray 3 are in close contact with each other. An interposition member may be interposed between the peripheral edge of the lid and the tray.

  In this case, for example, as shown in FIG. 10, the interposition member 40 has an upper surface 40 a that has a substantially triangular cross section and is inclined so that the outside becomes higher, and a horizontal lower surface 40 b. In a state where the lid 4 is bent by its own weight and the lower surface 10a of the peripheral edge portion 10 of the lid 4 is inclined with respect to the horizontal upper surface of the peripheral edge portion of the tray 3, the lower surface 10a of the peripheral edge portion 10 of the lid 4 is in close contact with the upper surface 40a. The horizontal upper surface of this is in close contact with the lower surface 40b. The interposition member 40 is formed in a frame shape along the peripheral edge of the tray 3. Further, the interposition member 40 is formed of, for example, a rubber material that is softer than the tray 3. The interposing member 40 is preferably a low outgas rubber material, and preferred rubber materials include fluoro rubber, silicon rubber, petroleum rubber, and rubber materials generally used for O-rings.

When the pellicle 2 is stored, the interposition member 40 is placed on the upper surface of the tray 3 and the lid 4 is placed thereon. In this case, since the gap between the peripheral edge 10 of the lid 4 and the tray 3 can be sealed by the interposition member 40, it is possible to prevent a gap from being generated between the peripheral edge 10 of the lid 4 and the tray 3 when the pellicle is stored. As a result, it is possible to prevent foreign matter from entering the case 1 and contaminating the pellicle 2. Further, since the interposition member 40 is formed of a rubber material, the interposition member 40 is deformed according to the shape of the peripheral edge portion 10 of the lid 4 and the tray 3, and the airtightness between the peripheral edge portion 10 of the lid 4 and the tray 3. Can be improved.

By the way, when an injection molding method is used for a large molded product, the cost may be high, the moldability may not be easy, or the dimensional accuracy may be low. Therefore, it is preferable to employ a vacuum forming method.
Further, when the interposition member 40 is soft as in the above example, the dimensional accuracy of the lid 4 is insufficient, and the gap between the peripheral edge of the lid 4 and the tray 3 can be spotted. However, the gap between the peripheral edge portion 10 of the lid 4 and the tray 3 can be appropriately sealed corresponding to the spots.

  In the above embodiment, the side part 21 of the lid 4 may have the following shape. For example, as shown in FIG. 11, the side surface portion 21 has a plurality of steps including a plurality of curved line segments, for example, a three-step curved shape. For example, as shown in FIG. 12, the side surface portion 21 has arcuate curved line segments 21a convex inwardly and arcuate curved line segments 21b convex outwardly alternately in this order from the bottom. Yes.

  The curved line segments 21a and 21b of the side surface portion 21 are set so that, for example, the radii of curvature R1 to R6 of the vertical cross section fall within a range of 5 mm to 50 mm. Note that the curvature radii of the curved line segments 21a and 21b may be the same or different.

  In this case, since the rigidity of the entire lid 4 is improved, the deformation of the lid 4 is suppressed and stabilized, so that it is possible to more reliably prevent a gap from being formed between the peripheral edge portion 10 of the lid 4 and the tray 3.

The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the idea described in the claims, and these naturally belong to the technical scope of the present invention. It is understood.

  For example, the case 1 in the above embodiment stores the pellicle, but the present invention can also be applied to a case storing other stored items.

Specific examples and comparative examples are shown below, and their evaluation will be described.
[Example 1]
Lid size width x depth x height 1700mm x 1900mm x 120mm, the width of the adhesive surface of the lid with the tray is 20mm, the angle between the edge of the lid and the side in a state where there is no self-deflection, 97 ° A lid having a three-step staircase shape as shown in FIG. 11 was molded using a mold. The lid was molded using an acrylic resin plate having a thickness of 3 mm under conditions of a mold temperature of 90 ° C. and a molding time of 150 seconds.
A rubber intervening member was manufactured in accordance with the shape of the gap between the peripheral edge of the lid and the tray caused by the lift of the lid due to its own weight, and was pasted on the peripheral edge of the tray.
In the tray paired with the lid, the upper surface of the peripheral edge portion of the tray serving as an adhesive surface with the lid was leveled. Also, taking into account the amount of the lid protruding from the outer periphery of the tray due to its own weight, the central part of the long side protrudes 6 mm outwardly in a convex arc shape compared to both corners of the long side of the tray. The outer shape of the tray was formed so that the central part of the short side protruded 4.5 mm outwardly in a circular arc shape compared to both corners of the short side.
When the tray thus manufactured was covered with the lid, the outer edge of the peripheral edge of the lid and the outer peripheral edge of the peripheral edge of the tray could be substantially matched.
When the peripheral part of the lid and the tray was sealed with an adhesive tape, the peripheral part of the case could be sealed with almost no gap and without the adhesive tape floating. Moreover, the protrusion of the outer side of the peripheral part of the lid with respect to the peripheral part of the tray was 1 mm at the maximum.

[Comparative Example 1]
Lid size width x depth x height 1700mm x 1900mm x 120mm, the width of the adhesive surface of the lid with the tray is 20mm, the angle between the peripheral edge of the lid and the side surface in the state where there is no self-weight deflection, the lid A lid having a three-step staircase shape as shown in FIG. 11 was molded using a mold. The lid was molded using an acrylic resin plate having a thickness of 3 mm under conditions of a mold temperature of 90 ° C. and a molding time of 150 seconds.
Subsequently, the tray was covered with no intervening member. At that time, as a result of the lid being bent by its own weight, the peripheral edge of the lid starts to be inclined with respect to the peripheral edge of the tray from the vicinity of the center of the case about 200 mm from the corner of the case side, and the central part on the long side The maximum inclination was 3.8 °, and the maximum was 3.7 ° at the center of the short side. In addition, this inclination started to generate a gap between the peripheral edge of the lid and the tray, and a gap of 4 mm at the maximum at the center on the long side and 2 mm at the center at the short side.
As for the protrusion of the outer edge of the lid with respect to the peripheral edge of the tray, the outer edge started to protrude from the corner of the side of the case by about 300 mm on the long side, and protruded up to 6 mm at the center on the long side. The short side started to protrude from the vicinity of the center about 400 mm from the corner of the side of the case, and protruded up to 4.5 mm at the center on the short side.
In this state, the periphery of the lid and the tray was sealed with an adhesive tape, but the adhesive tape had a maximum width of about 10 mm and a maximum length of about 1200 mm near the center of each side of the case.

INDUSTRIAL APPLICABILITY The present invention is useful for preventing a gap from being generated between the peripheral edge of the lid and the tray in a case for storing a pellicle or the like.

DESCRIPTION OF SYMBOLS 1 Case 2 Pellicle 2a Pellicle frame 2b Mask adhesive material layer 2c Pellicle film 2d Release material 3 Tray 3a Mounting surface 3b Inclined part 3c Inclined surface 4 Lid 10 Peripheral part 11 Inner peripheral part 20 Ceiling part 21 Side part 40 Interposition member A Sealed structure

Claims (10)

A case having a tray and a lid covering the tray,
A case having a sealing structure that seals between the peripheral edge of the lid and the tray in a state where the lid placed on the tray is bent by its own weight.   The case according to claim 1, wherein the sealing structure has a structure in which a peripheral edge of the lid and the tray are in close contact with each other in a state where the lid is bent by its own weight.   The sealed structure has an inclined portion on the upper surface of the tray in which the lid is bent by its own weight and the lower surface of the peripheral edge of the lid is inclined with respect to the horizontal upper surface of the tray, and the lower surface of the peripheral edge of the lid is in close contact. The case according to claim 2.   The sealing structure has a structure in which the lower surface of the peripheral edge of the lid is parallel to the horizontal upper surface of the tray and is in close contact with the horizontal upper surface of the tray in a state where the lid is bent by its own weight. The case described.   2. The case according to claim 1, wherein the sealing structure includes an interposition member that is interposed between a peripheral edge of the lid and the tray and is in close contact with the peripheral edge of the lid and the tray.   The interposition member is in close contact with the lower surface of the peripheral edge of the lid and the horizontal upper surface of the tray in a state where the lid is bent by its own weight and the lower surface of the peripheral edge of the lid is inclined with respect to the horizontal upper surface of the tray. 5. The case described in 5.   The case according to claim 5 or 6, wherein the interposition member is formed of a material softer than the tray.   The horizontal shape of the tray is formed in a shape corresponding to the amount of deformation of the peripheral edge of the lid in the horizontal direction when the lid is bent by its own weight. The case described in.   The case according to any one of claims 1 to 8 is for storing a pellicle. The case according to claim 9 is for storing a pellicle having an area of 1000 cm ² or more.

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