JP2011073931A - 窒化ガリウム基板 - Google Patents
窒化ガリウム基板 Download PDFInfo
- Publication number
- JP2011073931A JP2011073931A JP2009227768A JP2009227768A JP2011073931A JP 2011073931 A JP2011073931 A JP 2011073931A JP 2009227768 A JP2009227768 A JP 2009227768A JP 2009227768 A JP2009227768 A JP 2009227768A JP 2011073931 A JP2011073931 A JP 2011073931A
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- Prior art keywords
- gallium nitride
- substrate
- nitride substrate
- plane
- main surface
- Prior art date
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- Granted
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- 239000000758 substrate Substances 0.000 title claims abstract description 96
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 229910002601 GaN Inorganic materials 0.000 title claims abstract description 83
- 239000013078 crystal Substances 0.000 claims abstract description 30
- 238000003776 cleavage reaction Methods 0.000 claims description 6
- 230000007017 scission Effects 0.000 claims description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 10
- 239000002019 doping agent Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【解決手段】窒化ガリウム基板10は、例えば直径2インチ、厚さ1[cm]のGaN単結晶インゴットから切り出されたものである。窒化ガリウム基板10は、GaN単結晶のC面に対する主面12の傾斜角θが20°以上160°以下であり、破壊靭性が1.36[MN/m3/2]以上である。このような窒化ガリウム基板10によれば、クラックが入りにくく、割れが低減される。
【選択図】図1
Description
により求められる。なお、上式において、KIcは破壊靭性値(単位MN/m3/2)であり、Eはヤング率であり、Hはビッカース硬度であり、Pは荷重であり、cはクラック長さである。
Claims (5)
- 基板結晶のC面に対する主面の傾斜角が20°以上160°以下であり、破壊靭性が1.36[MN/m3/2]以上であることを特徴とする、窒化ガリウム基板。
- 主面が[1−100]方向に傾斜していることを特徴とする、請求項1に記載の窒化ガリウム基板。
- 主面の形状が、[11−20]方向を長手方向とし、[11−20]方向と垂直な方向を短手方向とする細長形状であることを特徴とする、請求項2に記載の窒化ガリウム基板。
- 主面と基板結晶のC面との成す角が75°±4°以内であることを特徴とする、請求項2に記載の窒化ガリウム基板。
- [11−20]方向に垂直な方向に沿った劈開面を有することを特徴とする、請求項4に記載の窒化ガリウム基板。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009227768A JP5381581B2 (ja) | 2009-09-30 | 2009-09-30 | 窒化ガリウム基板 |
US12/788,455 US8183668B2 (en) | 2009-09-30 | 2010-05-27 | Gallium nitride substrate |
TW099117293A TW201111565A (en) | 2009-09-30 | 2010-05-28 | Gallium nitride substrate |
EP10164201.5A EP2305860B1 (en) | 2009-09-30 | 2010-05-28 | Gallium nitride substrate |
CN2010101949650A CN102031564A (zh) | 2009-09-30 | 2010-05-31 | 氮化镓衬底 |
US13/455,785 US20120208355A1 (en) | 2009-09-30 | 2012-04-25 | Gallium nitride substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009227768A JP5381581B2 (ja) | 2009-09-30 | 2009-09-30 | 窒化ガリウム基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011073931A true JP2011073931A (ja) | 2011-04-14 |
JP5381581B2 JP5381581B2 (ja) | 2014-01-08 |
Family
ID=42735293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009227768A Active JP5381581B2 (ja) | 2009-09-30 | 2009-09-30 | 窒化ガリウム基板 |
Country Status (5)
Country | Link |
---|---|
US (2) | US8183668B2 (ja) |
EP (1) | EP2305860B1 (ja) |
JP (1) | JP5381581B2 (ja) |
CN (1) | CN102031564A (ja) |
TW (1) | TW201111565A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5365454B2 (ja) * | 2009-09-30 | 2013-12-11 | 住友電気工業株式会社 | Iii族窒化物半導体基板、エピタキシャル基板及び半導体デバイス |
JP6137197B2 (ja) * | 2012-12-17 | 2017-05-31 | 三菱化学株式会社 | 窒化ガリウム基板、および、窒化物半導体結晶の製造方法 |
JP7397760B2 (ja) * | 2020-06-09 | 2023-12-13 | 株式会社東芝 | 発電素子 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008143772A (ja) * | 2006-11-17 | 2008-06-26 | Sumitomo Electric Ind Ltd | Iii族窒化物結晶の製造方法 |
JP2008543089A (ja) * | 2005-06-01 | 2008-11-27 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 半極性(Ga,Al,In,B)N薄膜、ヘテロ構造およびデバイスの成長と作製のための方法及び装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6773504B2 (en) * | 2001-04-12 | 2004-08-10 | Sumitomo Electric Industries, Ltd. | Oxygen doping method to gallium nitride single crystal substrate and oxygen-doped N-type gallium nitride freestanding single crystal substrate |
US8633093B2 (en) * | 2001-04-12 | 2014-01-21 | Sumitomo Electric Industries Ltd. | Oxygen doping method to gallium nitride single crystal substrate |
US6379985B1 (en) * | 2001-08-01 | 2002-04-30 | Xerox Corporation | Methods for cleaving facets in III-V nitrides grown on c-face sapphire substrates |
JP3841092B2 (ja) * | 2003-08-26 | 2006-11-01 | 住友電気工業株式会社 | 発光装置 |
JP2006044982A (ja) * | 2004-08-04 | 2006-02-16 | Sumitomo Electric Ind Ltd | 窒化物半導体単結晶基板とその合成方法 |
JP4518209B1 (ja) * | 2009-09-07 | 2010-08-04 | 住友電気工業株式会社 | Iii族窒化物結晶基板、エピ層付iii族窒化物結晶基板、ならびに半導体デバイスおよびその製造方法 |
US7884447B2 (en) * | 2005-07-11 | 2011-02-08 | Cree, Inc. | Laser diode orientation on mis-cut substrates |
WO2007126158A1 (ja) * | 2006-04-27 | 2007-11-08 | Panasonic Corporation | 半導体発光素子およびウエハ |
JP5003033B2 (ja) * | 2006-06-30 | 2012-08-15 | 住友電気工業株式会社 | GaN薄膜貼り合わせ基板およびその製造方法、ならびにGaN系半導体デバイスおよびその製造方法 |
CN101522962A (zh) * | 2006-10-16 | 2009-09-02 | 三菱化学株式会社 | 氮化物半导体的制造方法、结晶生长速度增加剂、氮化物单晶、晶片及器件 |
JP4986714B2 (ja) * | 2007-05-30 | 2012-07-25 | 三洋電機株式会社 | 窒化物系半導体レーザ素子およびその製造方法 |
JP4572963B2 (ja) * | 2008-07-09 | 2010-11-04 | 住友電気工業株式会社 | Iii族窒化物系半導体発光素子、及びエピタキシャルウエハ |
JP4375497B1 (ja) * | 2009-03-11 | 2009-12-02 | 住友電気工業株式会社 | Iii族窒化物半導体素子、エピタキシャル基板、及びiii族窒化物半導体素子を作製する方法 |
JP5040977B2 (ja) * | 2009-09-24 | 2012-10-03 | 住友電気工業株式会社 | 窒化物半導体基板、半導体装置およびそれらの製造方法 |
KR100976819B1 (ko) * | 2010-02-10 | 2010-08-20 | (주)더리즈 | 반도체 기판 및 이를 이용한 발광소자 |
US8471366B2 (en) * | 2011-11-30 | 2013-06-25 | Sumitomo Electric Industries, Ltd. | Nitride semiconductor substrate |
JP2013243217A (ja) * | 2012-05-18 | 2013-12-05 | Sumitomo Electric Ind Ltd | Iii族窒化物半導体レーザ素子 |
-
2009
- 2009-09-30 JP JP2009227768A patent/JP5381581B2/ja active Active
-
2010
- 2010-05-27 US US12/788,455 patent/US8183668B2/en active Active
- 2010-05-28 TW TW099117293A patent/TW201111565A/zh unknown
- 2010-05-28 EP EP10164201.5A patent/EP2305860B1/en active Active
- 2010-05-31 CN CN2010101949650A patent/CN102031564A/zh active Pending
-
2012
- 2012-04-25 US US13/455,785 patent/US20120208355A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008543089A (ja) * | 2005-06-01 | 2008-11-27 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 半極性(Ga,Al,In,B)N薄膜、ヘテロ構造およびデバイスの成長と作製のための方法及び装置 |
JP2008143772A (ja) * | 2006-11-17 | 2008-06-26 | Sumitomo Electric Ind Ltd | Iii族窒化物結晶の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8183668B2 (en) | 2012-05-22 |
TW201111565A (en) | 2011-04-01 |
CN102031564A (zh) | 2011-04-27 |
JP5381581B2 (ja) | 2014-01-08 |
EP2305860A3 (en) | 2011-07-13 |
EP2305860B1 (en) | 2019-06-26 |
EP2305860A2 (en) | 2011-04-06 |
US20110073871A1 (en) | 2011-03-31 |
US20120208355A1 (en) | 2012-08-16 |
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