JP2011054331A - Induction heating method and induction heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an induction heating device capable of stable temperature distribution control, even if a conductive member such as a metal film is formed on the surface of a heated object. <P>SOLUTION: The induction heating device 10 indirectly heating a wafer arranged on a susceptor by induction-heating the susceptor includes: a susceptor 18 with its thickness varied so that its thickness is made thinner further toward an outer periphery side on a main face located at an opposite side where the wafer 23 is loaded; induction heating coils 26 (26a, 26b, 26c), arranged at an outer periphery side of the susceptor 18, for forming an alternating-current magnetic field in a direction parallel to the wafer loading face of the susceptor 18; and a control part 40 as well as an inverter 38 for controlling frequencies of the current inputted into the induction heating coils 26. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an induction heating method and an induction heating apparatus, and more particularly to an induction heating method and apparatus suitable for controlling the temperature of an object to be heated when a substrate such as a large-diameter wafer is processed.

  As an apparatus for heat-treating a substrate such as a semiconductor wafer using induction heating, those disclosed in Patent Document 1 and Patent Document 2 are known. As shown in FIG. 7, the induction heating apparatus disclosed in Patent Document 1 is a batch-type heat treatment apparatus, in which wafers 2 stacked in multiple stages are placed in a quartz process tube 3, and graphite is placed on the outer periphery of the process tube 3. A heating tower 4 formed of a conductive member such as a conductive member is disposed, and a solenoidal induction heating coil 5 is disposed on the outer periphery thereof. According to the induction heating apparatus 1 having such a configuration, the heating tower 4 is heated by the influence of the magnetic flux generated by the induction heating coil 5, and the wafer 2 disposed in the process tube 3 is heated by the radiant heat from the heating tower 4. Is done.

  Further, as shown in FIG. 8, the induction heating device disclosed in Patent Document 2 is a single-wafer type heat treatment device, in which a susceptor 7 that is concentrically divided into multiple parts is formed of graphite or the like. A wafer 8 is placed on the upper surface side, and a plurality of annular induction heating coils 9 are arranged on a concentric circle on the lower surface side to enable individual power control for the plurality of induction heating coils 9. According to the induction heating device 6 having such a configuration, since heat transfer between the susceptor 7 located in the heating range of each induction heating coil 9 and the other susceptor 7 is suppressed, the power to the induction heating coil 9 is reduced. The temperature distribution controllability of the wafer 8 by the control is improved.

  In Patent Document 2, it is described that the distribution of heat generation is favorably controlled by dividing the susceptor 7 on which the wafer 8 is placed. However, in Patent Document 3, the cross-sectional shape of the susceptor is devised. It is disclosed to improve the heat generation distribution. The induction heating device disclosed in Patent Document 3 pays attention to the fact that the heat generation amount is reduced on the inner side where the diameter of the induction heating coil formed in an annular shape is small, and by increasing the thickness of the inner part of the susceptor, The inner part is closer to the induction heating coil than the outer part, so that the amount of heat generation and the heat capacity are increased.

JP 2004-71596 A JP 2009-87703 A JP 2006-100067 A

  However, in any of the induction heating apparatuses configured as described above, the magnetic flux acts perpendicularly to the graphite. For this reason, when a metal film or the like is formed on the surface of the wafer as an object to be heated, the wafer may be directly heated, and temperature distribution control may be disturbed.

  Therefore, in the present invention, the above-described problems are solved, and even when a conductive member such as a metal film is formed on the surface of an object to be heated, an induction heating method capable of performing stable temperature distribution control, And it aims at providing an induction heating apparatus.

  In order to achieve the above object, an induction heating method according to the present invention is an induction heating method in which an object to be heated arranged on a susceptor is indirectly heated by induction heating the susceptor. A thickness change is applied so that the thickness of the susceptor becomes thinner, and an AC magnetic flux is generated in a direction parallel to the surface of the susceptor on which the object is to be heated. The heating portion of the susceptor is changed by controlling the frequency of the current input to the susceptor.

  Further, in the induction heating method having the above characteristics, the control of the frequency determines a heating area of the susceptor for each use frequency band, adopts a higher frequency band when heating the outer peripheral side area of the susceptor, It is preferable to adopt a lower frequency band when heating the inner circumferential side band.

  By providing such a feature, the heating efficiency on the outer peripheral side of the susceptor can be made higher than that on the inner peripheral side by putting the frequency in the high frequency band into the induction heating coil. On the other hand, the heating efficiency on the inner peripheral side of the susceptor can be made higher than that on the outer peripheral side by putting a frequency in the low frequency band into the induction heating coil.

  An induction heating apparatus according to the present invention for achieving the above object is an induction heating apparatus for indirectly heating an object to be heated disposed on a susceptor by induction heating the susceptor, wherein the object to be heated is A main surface opposite to the placement surface is provided with a susceptor having a thickness change so that the thickness is thinner toward the outer periphery side, and is disposed on the outer periphery side of the susceptor, and is parallel to the surface to be heated in the susceptor. And an induction heating coil for forming an alternating magnetic flux in any direction, and a frequency control means for controlling the frequency of the current applied to the induction heating coil.

  In addition, the frequency control means in the induction heating apparatus having the above characteristics includes a control map that divides the heating area of the susceptor on the circumference, and the frequency of the current is increased as the heating area on the outer periphery is heated. It is preferable that the control is performed to lower the frequency of the current as the heating area inside is heated.

  By providing such a feature, the heating efficiency of an arbitrary heating region of the susceptor can be improved by selecting the frequency of the current input to the induction heating coil. Thereby, temperature distribution control of a to-be-heated material can be stabilized.

In the induction heating apparatus having the above characteristics, the thickness change of the susceptor may be made by providing an inclined surface on the opposite main surface.
By making the thickness change of the susceptor with the inclined surface, the corners are reduced, and the concentration of magnetic flux and heat on the corners can be prevented.

Further, in the induction heating apparatus having the above characteristics, the thickness change of the susceptor may be formed by providing a stepped step portion on the opposite main surface.
With such a configuration, it is easy to process the susceptor, and it is possible to easily grasp the division of the region in which the heating efficiency changes due to the change in the frequency band.

According to the induction heating method having the above characteristics, stable temperature distribution control can be performed even when a conductive member such as a metal film is formed on the surface of the object to be heated.
Moreover, according to the induction heating apparatus having the above characteristics, a method that exhibits the above effects can be realized.

It is a block diagram which shows the structure of the induction heating apparatus which concerns on 1st Embodiment. It is a figure which shows the structure of the susceptor used for embodiment. It is a figure which shows the passage route of the magnetic flux in the induction heating apparatus which concerns on embodiment. It is a figure which shows the mode of the magnetic flux which passes a susceptor inner surface, and the eddy current which arises in an inner surface. It is a figure which shows the other structure of the susceptor used for embodiment. It is a block diagram which shows the structure of the induction heating apparatus which concerns on 2nd Embodiment. It is a figure which shows the structure of the conventional batch type induction heating apparatus. It is a figure which shows the structure of the conventional single wafer type induction heating apparatus.

  Hereinafter, embodiments of the induction heating method and apparatus according to the present invention will be described in detail with reference to the drawings. First, a schematic configuration of the induction heating apparatus according to the first embodiment will be described with reference to FIG. 1A is a partial cross-sectional block diagram illustrating a side configuration of the induction heating apparatus, and FIG. 1B is a partial cross-sectional block diagram illustrating a top configuration of the induction heating apparatus.

The induction heating apparatus 10 according to the present embodiment is a batch-type apparatus in which a wafer 23 as an object to be heated and a susceptor 18 as an exothermic material are stacked in multiple stages to perform heat treatment.
The induction heating apparatus 10 includes a boat 12 in which wafers 23 and a susceptor 18 are stacked in multiple stages, a chamber 24 that accommodates the boat 12, an induction heating coil 26 (26a to 26c) that heats the susceptor 18, and an induction heating coil 26. The power supply unit that supplies power is basically configured.

  The susceptor 18 may be made of a conductive member, for example, graphite. As shown in FIG. 2, the susceptor 18 according to the present embodiment has a circular planar shape (see FIG. 2B) and a cross-sectional shape that is convex downward (see FIG. 2A). Specifically, the thickness of the central portion and the outer edge portion of the susceptor 18 is made different so that the outer edge portion is thinner than the central portion on the main surface opposite to the wafer mounting surface. An inclined surface 22 is formed. In the present embodiment, the inclined surface 22 provided on the opposite main surface has a stepwise inclination angle. This is because it becomes possible to finely adjust the relationship between the heating efficiency and thickness, details of which will be described later.

  The hole 20 provided on the outer edge side and the hole 20a provided in the central portion of the opposite main surface are for fitting the support member 14 constituting the boat 12. The support member 14 may be made of quartz or the like that is not affected by heating due to electromagnetic induction.

  Further, the boat 12 in the present embodiment is mounted on a turntable 16 having a motor (not shown), and can rotate the susceptor 18 and the wafer 23 during the heat treatment process. By adopting such a configuration, it is possible to suppress an uneven distribution of heat generation when the susceptor 18 is heated. Further, as will be described in detail later, even when the arrangement form of the induction heating coil 26 as a heating source is deviated from the center of the susceptor 18, the susceptor 18 can be uniformly heated.

  The chamber 24 is made of, for example, an aluminum plate, and accommodates the boat 12 therein by forming a circular or polygonal (hexagonal in this embodiment) side wall. By adopting such a configuration, it is possible to prevent the diffusion of heat and the heating of the core 28 to be described in detail later.

  The induction heating coil 26 is configured by winding a copper wire around a core 28 disposed on the outer peripheral side of the boat 12. In the induction heating apparatus 10 according to the embodiment, the core body 30 formed in an arcuate shape projects toward the boat 12 so as to form three magnetic pole faces 34 (34a to 34c) with respect to one core 28. An induction heating coil 26 is wound around each of the three convex portions 32 (32a to 32c) provided. The core 28 may be made of a ferrite-based ceramic or the like, and may be formed by firing after forming a clay-like raw material. This is because it is possible to freely form a shape by using such a member. Further, by using the core 28, the diffusion of the magnetic flux can be prevented as compared with the case of the induction heating coil 26 alone, and highly efficient induction heating in which the magnetic flux is concentrated can be realized.

  The induction heating coil 26 is wound around the outer periphery of the convex portion 32 formed on the core 28. For this reason, the central axis in the winding direction of the induction heating coil 26 and the central axis in the mounted state of the wafer 23 or the susceptor 18 face in a direction perpendicular to each other, and the tip surface of the convex portion 32 facing the susceptor 18 is a magnetic pole. It becomes the surface 34. With such a configuration, an alternating magnetic flux is generated in a direction parallel to the wafer mounting surface of the susceptor 18 from the magnetic pole surface 34 around which the induction heating coil 26 is wound. In the present embodiment, each magnetic pole surface 34a, 34b, 34c is formed so as to face the center of the susceptor 18, and is configured to be arranged at intervals of 60 degrees from the center of the susceptor 18 as a base point. . By adopting such an angular relationship, it is possible to reduce the arrangement of the cores 28 while generating a magnetic flux passing through the center of the susceptor 18.

  In addition, the induction heating coil 26 is preferably a tubular member (for example, a copper tube) having a hollow inside. This is because the heating of the induction heating coil 26 itself can be suppressed by inserting a cooling member (for example, cooling water) into the copper tube during the heat treatment.

  The three induction heating coils 26a, 26b, and 26c configured as described above are connected to a single power supply unit. The power supply unit is provided with an inverter 38, an AC power supply (not shown), and a control unit (frequency control means) 40, and is configured so that the current, voltage, frequency, etc. supplied to the induction heating coil can be adjusted. Here, when a resonance type inverter is used as the inverter 38, a resonance circuit corresponding to each control frequency is connected in parallel so that the frequency can be easily switched, and this is connected to a signal from the control unit 40. It is desirable to be able to switch according to Further, when a non-resonant type inverter is used as the inverter 38, for example, by using a PWM type inverter, it becomes possible to operate at a frequency corresponding to a signal from the control unit 40. By adopting such a configuration, it is possible to realize frequency switching during operation.

  The controller 40 is connected to the inverter 38, and the current and voltage supplied to the induction heating coil 26 based on a current value, voltage value, and temperature detected by a detector (not shown) or a control program inputted in advance. Control of selection of the induction heating coil 26 which supplies a frequency and an electric current is performed. Thereby, it is possible to control the range of the horizontal magnetic flux generated via the induction heating coil 26, that is, the heating region of the susceptor 18. The control unit 40 stores a control map that divides the heating region of the susceptor 18 on the circumference (concentric circles), and has a higher frequency as the outer heating region is heated based on information such as the detected temperature. The control signal is output so that a current is supplied to the induction heating coil 26, and the control signal is output so that a current having a lower frequency is supplied to the induction heating coil 26 as the inner heating region is heated.

  In the induction heating apparatus 10 according to the embodiment, the induction heating coil 26b and the induction heating coil 26c are connected to the inverter 38 so as to be electrically separated from each other. When the winding directions of the induction heating coil 26a, the induction heating coil 26b, and the induction heating coil 26c are the same, the induction heating coil 26b and the induction heating coil 26c are connected to the inverter 38 with the induction heating coil 26a. They are connected so that currents of opposite phase flow. By adopting such a configuration, the direction of the magnetic flux generated by flowing current through the induction heating coil 26a and the magnetic flux generated by flowing current through the induction heating coils 26b, 26c are reversed, and the convex portions 32a, 32b, 32c. The polarities of the magnetic pole surface 34a and the magnetic pole surfaces 34b and 34c are the opposite directions. For this reason, when magnetic flux is generated by a combination of the induction heating coil 26a and the induction heating coil 26b, a combination of the induction heating coil 26a and the induction heating coil 26c, the magnetic pole surfaces 34a and 34b (34a and 34c) to be combined. It is possible to generate a magnetic flux passing between them. The direction of the magnetic flux to be generated may be determined by reversing the polarity of the magnetic pole surface 34 by reversing the winding direction of the induction heating coil 26 with the same connection form.

  Moreover, it is desirable to arrange a heat insulating material 36 on the tip side of the convex portion 32 constituting the magnetic pole surface 34 so as to suppress heating of the core 28 and the induction heating coil 26. The heat insulating material 36 may be a ceramic plate or the like, and for example, a plate member made of porous alumina is preferable.

  Here, regarding the relationship between the induction heating coil 26 and the chamber 24, the following is preferable. That is, the core body 30 including the induction heating coil 26 is disposed outside the chamber 24, the induction heating coil 26 is wound, and the convex portions 32 constituting the magnetic pole surface 34 are provided on the side walls constituting the chamber 24. The holes 24a are protruded into the chamber 24. For this reason, as shown in FIG. 1, the heat insulating material 36 may be directly fixed to the tip (magnetic pole surface 34) of the convex portion 32, or may be fixed using a side wall constituting the chamber 24. . Further, in order to suppress heating of the side walls constituting the chamber 24, a cooling mechanism may be provided outside the chamber 24. With such a configuration, the core body 30 can be disposed outside the side wall constituting the chamber 24, and the magnetic pole surface 34 can be disposed in the vicinity of the susceptor 18, improving heating efficiency and heating the core 28. Two effects such as suppression can be achieved.

  According to the induction heating apparatus 10 having such a configuration, switching control of the induction heating coils 26a, 26b, and 26c for supplying current can be performed, so that the induction heating coil 26a alone can be operated, the induction heating coil 26a and the induction heating coil 26a. The operation by the combination with the heating coil 26b and the operation by the combination of the induction heating coil 26a and the induction heating coil 26c can be respectively performed. The path of magnetic flux generated in each operation mode is roughly as shown in FIG.

  That is, when the induction heating coil 26a is operated alone, a magnetic flux (arrow A) is generated with the convex portion 32a as the center, and the magnetic flux passes through the vicinity of the magnetic pole surface 34a, that is, only the outer edge portion of the susceptor 18. Become. Next, in the case of operation with a combination of the induction heating coil 26a and the induction heating coil 26b, a magnetic flux as shown by an arrow B going back and forth between the magnetic pole surface 34a and the magnetic pole surface 34b is generated. For this reason, the passage route of the magnetic flux passes through the inner peripheral side of the susceptor 18 as compared with the case where the induction heating coil 26a is operated alone. Further, when the induction heating coil 26a and the induction heating coil 26c are operated in combination, a magnetic flux as shown by an arrow C going back and forth between the magnetic pole surface 34a and the magnetic pole surface 34c is generated. For this reason, the passage route of the magnetic flux passes through the approximate center of the susceptor 18.

  FIG. 4 is a diagram illustrating a state of a magnetic flux passing through the susceptor 18 and a current generated in the susceptor 18 when a current is input to the induction heating coil (when the susceptor 18 is operated) in a certain section of the susceptor 18. 4A shows the state of magnetic flux and current when a current in a high frequency band (60 kHz in this embodiment) is applied to the induction heating coil, and FIG. 4B shows a low frequency band ( The state of magnetic flux and current when a current of 20 kHz is applied in this embodiment is shown. In addition, the range on the outer peripheral side (the right side in FIG. 4) of the range divided by the broken line in FIG. 4 is the range when the induction heating coil 26a is operated alone, and the middle part (the range surrounded by the broken line). Is a range when operated by a combination of the induction heating coil 26a and the induction heating coil 26b, and a range when the inner peripheral side (left side in FIG. 4) is operated by a combination of the induction heating coil 26a and the induction heating coil 26c. It is.

  As can be seen from FIG. 4, whether a high-frequency current or a low-frequency current is applied, it is clockwise with respect to the direction of magnetic flux (in FIG. 4, the direction of magnetic flux is the front side of the page). , Which is counterclockwise on the paper surface). In addition, when a high frequency current is applied due to the influence of the penetration depth of the current, eddy current is generated on the inner peripheral side (center portion) compared to the outer peripheral side (tip portion) of the susceptor 18 with respect to the thickness of the susceptor 18. The proportion of the area of the portion, that is, the proportion of the area of the heat generating portion is small. From this, it can be said that the heating efficiency on the inner peripheral side of the susceptor 18 is poor in the case of heating with a high-frequency current. In other words, by applying a high-frequency current to the induction heating coil 26, the outer peripheral side of the susceptor 18 can be efficiently heated, and heat generation on the outer peripheral side can be promoted compared to the inner peripheral side. be able to.

  On the other hand, when a low-frequency current is applied, the penetration depth of the current in the thickness direction of the susceptor 18 becomes deep. For this reason, on the outer peripheral side of the susceptor 18, eddy currents generated on the front and back surfaces of the susceptor 18 interfere with each other and cancel out the current, thereby suppressing heat generation. On the other hand, on the inner peripheral side of the susceptor 18 having a sufficient thickness with respect to the penetration depth of the current, the ratio of the area of the heat generating portion is larger than when the high frequency current is supplied, and the heating efficiency is improved. Therefore, by applying a low-frequency current to the induction heating coil 26, the inner peripheral side of the susceptor 18 can be efficiently heated, and heat generation on the inner peripheral side can be promoted compared to the outer peripheral side.

  As described above, in the induction heating device 10 according to the present embodiment, the heating range of the susceptor 18 is controlled by controlling the combination of the induction heating coil 26 that inputs current in a time-sharing manner with the frequency of the input current with respect to the induction heating coil. The temperature distribution of the susceptor 18 (wafer 23) can be arbitrarily controlled by adjusting.

  In addition, the induction heating device 10 according to the present embodiment allows the heating range in the susceptor 18 to be controlled by applying current by arbitrarily combining the induction heating coils 26a, 26b, and 26c, thereby allowing the induction heating coil 26 to be controlled. It became possible to reduce the arrangement range angle. For this reason, the induction heating apparatus as a whole could be reduced in size.

  In addition, according to the induction heating apparatus 10 having the above-described configuration, even when a conductive member such as a metal film is formed on the surface of the wafer, the current cancels out in the metal film. This occurs only in the susceptor 18 and there is no possibility that the temperature distribution of the wafer 23 is disturbed.

  In the present embodiment, the current in the high frequency band is a frequency at which the eddy current generated on the front and back surfaces of the outer edge of the susceptor 18 has a penetration depth in a range where they do not interfere with each other, and the thickness of the susceptor and the current penetration depth. Derived from the relationship.

  Further, in the present embodiment, the susceptor 18 has a cross-sectional shape as shown in FIG. 2, and the main surface located on the opposite side of the wafer mounting surface is provided with the inclined surface 22. However, the susceptor used in the induction heating apparatus 10 of the present embodiment may be as shown in FIG. That is, the main surface located on the opposite side of the wafer mounting surface is provided with a stepped step portion 22a, thereby changing the thickness of the wafer 18a. Here, it is desirable to form a fillet surface (R) 22b at a corner of the step portion 22a (a portion intersecting with the vertical surface) to suppress concentration of magnetic flux and heat at the corner portion.

  Next, 2nd Embodiment which concerns on the induction heating apparatus of this invention is described, referring FIG. Most of the configuration of the induction heating apparatus 10a according to this embodiment is the same as that of the induction heating apparatus 10 according to the first embodiment described above. Therefore, portions having the same configuration are denoted by the same reference numerals in the drawings, and detailed description thereof is omitted.

  The difference from the induction heating apparatus 10 according to the first embodiment is that a plurality of (two in this embodiment) inverters 38 and 38a having different set frequencies are connected in parallel to the induction heating coil. be able to.

By supplying the current with the set frequency greatly dissociated (in this embodiment, about three times 20 kHz and 60 kHz) from the inverters 38 and 38a to the induction heating coil 26, the current in the high frequency band is interrupted to the current in the low frequency band. You can drive. Thereby, the temperature distribution control of the susceptor 18 can be further stabilized.
In addition, about another structure, an effect | action, and an effect, it is the same as that of the induction heating apparatus which concerns on 1st Embodiment mentioned above.

  In the embodiment, a wafer (semiconductor wafer) has been described as an example of an object to be heated. However, the difference in the object to be heated does not affect the implementation of the present invention, and other objects to be heated are heated. Can also be used.

DESCRIPTION OF SYMBOLS 10 ......... Induction heating apparatus, 12 ......... Boat, 14 ......... Support member, 16 ......... Rotary table, 18 ......... Susceptor, 20, 20a ......... Hole, 22 ...... Inclined surface, 23 ......... wafer, 24 .... chamber, 24a ......... hole, 26 (26a, 26b, 26c) ......... induction heating coil, 28 ......... core, 30 ......... core body, 32 (32a, 32b) , 32c) ..... convex part, 34 (34a, 34b, 34c) ..... magnetic pole surface, 36 ..... heat insulating material, 38 ....... inverter, 40 ..... control part.

Claims (6)

An induction heating method for indirectly heating an object to be heated arranged on a susceptor by induction heating the susceptor,
Giving a thickness change so that the outer peripheral side is thinner with respect to the susceptor,
From the induction heating coil provided on the outer peripheral side of the susceptor, an alternating magnetic flux is generated in a direction parallel to the heated object mounting surface of the susceptor,
An induction heating method, wherein a heating part of the susceptor is changed by controlling a frequency of a current supplied to the induction heating coil.   The frequency control determines the heating area of the susceptor for each frequency band used, adopts a higher frequency band when heating the outer peripheral side area of the susceptor, and lower when heating the inner peripheral band of the susceptor The induction heating method according to claim 1, wherein a frequency band is adopted. An induction heating apparatus that indirectly heats an object to be heated disposed on a susceptor by induction heating the susceptor,
A susceptor having a thickness change on the main surface opposite to the heated object placement surface so that the thickness is thinner toward the outer periphery side;
An induction heating coil that is disposed on the outer peripheral side of the susceptor and forms an alternating magnetic flux in a direction parallel to the object mounting surface of the susceptor;
An induction heating apparatus comprising frequency control means for controlling a frequency of a current supplied to the induction heating coil.   The frequency control means includes a control map that divides the heating area of the susceptor on the circumference, and when the heating area on the outer periphery is heated, the frequency of the current is increased to heat the heating area on the inner side. The induction heating apparatus according to claim 3, wherein control is performed to lower the frequency of the current.   The induction heating apparatus according to claim 3 or 4, wherein the thickness change of the susceptor is formed by providing an inclined surface on the opposite main surface.   The induction heating apparatus according to claim 3 or 4, wherein the thickness change of the susceptor is formed by providing a stepped step portion on the main surface on the opposite side.

Images