JP4918168B1 - Induction heating device - Google Patents

Abstract

An induction heating apparatus capable of suppressing heat generation from an edge of an opening provided in a partition wall even when a magnetic pole is disposed outside a chamber.
SOLUTION: A chamber 12 constituting a process chamber and a magnetically permeable shielding plate 46 for shielding an opening 42 provided in a housing 26 which is an outer periphery of the chamber 12 and is a conductive partition member constituting the chamber 12. In the induction heating apparatus 10 having a magnetic pole disposed close to the magnetic pole and an induction heating coil wound around the magnetic pole, at least two magnetic poles 32 and 34 are provided for one opening 42, and two magnetic poles are provided. 32 and 34 have opposite polarities.
[Selection] Figure 4

Description

  The present invention relates to an induction heating device, and more particularly to an induction heating device suitable for controlling the temperature of an object to be heated when heat treating a large-diameter semiconductor substrate.

  When batch processing a large-sized semiconductor substrate, even if a metal film or the like is formed on the substrate surface, the metal film is directly heated, resulting in variations in temperature distribution in the substrate surface. There is known an induction heating apparatus capable of suppressing the above (for example, see Patent Document 1).

  The technique disclosed in Patent Document 1 includes a chamber constituting a process chamber and an induction heating coil wound around a core constituting a magnetic pole. According to the induction heating apparatus having such a configuration, the magnetic flux generated through the magnetic pole is generated in parallel with the mounting direction of the semiconductor substrate that is the object to be heated disposed in the chamber. For this reason, even when a metal film or the like is formed on the surface of the semiconductor substrate, magnetic flux is not input in a direction intersecting with the metal film, and the substrate may be directly heated by induction heating. No. For this reason, the temperature distribution in the substrate surface does not vary.

JP 2010-59490 A

  According to the induction heating apparatus configured as disclosed in Patent Document 1, the metal film is certainly directly heated by induction heating even in a semiconductor substrate or the like whose surface is coated with the metal film. There is no fear.

  However, in the induction heating apparatus configured as described above, the partition walls constituting the chamber are made of a heat-resistant metal such as aluminum, so that the magnetic flux generated from the magnetic poles reaches the susceptor that is the induction heating member. It is necessary to form an opening (a magnetic opening through which at least magnetic flux is transmitted) in a part of the film. However, when an opening is provided in the chamber, the inside of the chamber cannot be evacuated. Further, when the opening is sealed with a magnetic pole in order to seal the chamber, there is a risk that contamination will occur in the chamber.

  For this reason, the opening provided in the chamber usually has characteristics such as vacuum strength, magnetic flux permeability, heat resistance, low thermal expansion coefficient, low thermal conductivity, and resistance to thermal shock, and there is no risk of contamination. Quartz was to be placed.

In the case of such a configuration, a considerable amount of magnetic flux generated from the magnetic poles is also applied to the edge of the opening in the partition wall made of a conductive member. There is a problem that the magnetic flux applied to the edge of the opening causes an induced current and heat, and the chamber is heated.
Therefore, an object of the present invention is to provide an induction heating device that can suppress heat generation from the edge of an opening provided in a partition wall even when a magnetic pole is disposed outside the chamber.

  In order to achieve the above object, an induction heating apparatus according to the present invention includes a chamber mainly composed of a metal material constituting a process chamber, and a magnet that is disposed on the outer periphery of the chamber and transmits magnetic flux formed in the chamber. An induction heating device having an induction heating coil configured to heat an induction heating member disposed in the chamber through a static opening, wherein the magnetic opening is arranged with respect to one magnetic opening. A plurality of the induction heating coils are provided so that the sum of the magnetic fluxes input to the edge is zero or close to zero.

  In the induction heating device having the above-described characteristics, the induction heating coil may be arranged to generate an alternating magnetic flux directed to the side end surface of the induction heating member. By setting it as such a structure, an alternating current magnetic flux can be produced in the direction parallel to the to-be-heated material mounting surface of a to-be-induced heating member. For this reason, even if the main surface of the object to be heated is covered with an induction heating member such as a metal film, the object to be heated is not directly heated, and it becomes easy to equalize the temperature distribution.

  In the induction heating apparatus having the above-described characteristics, it is preferable that a plurality of the magnetic openings are provided, and a magnetic slit that transmits magnetic flux is formed between the adjacent magnetic openings. Even in such a configuration, the sum of the magnetic fluxes injected into the edge of the magnetic opening is substantially zero or close to zero with respect to a substantially single magnetic opening. A plurality of induction heating coils are arranged in Therefore, the induced current generated at the edge of the magnetic opening can be canceled or partially canceled, and heat generation from the edge of the magnetic opening can be suppressed.

  Moreover, in the induction heating apparatus having the above-described features, it is preferable to provide a magnetic pole around which the induction heating coil is wound. By setting it as such a structure, the generated magnetic flux can be converged and a heating efficiency can be improved.

  In the induction heating apparatus having the above-described characteristics, it is preferable to provide a yoke that connects at least two magnetic poles around which the induction heating coil is wound. By setting it as such a structure, the magnetic flux which links a chamber reduces and it can suppress the heating of a chamber.

  Moreover, in the induction heating apparatus having the above-described features, it is preferable to provide an insertion passage through which the refrigerant is inserted at the outer edge of the magnetic opening. With such a configuration, even when the cancellation of the induced current generated at the edge of the magnetic opening is partially offset, heat generation from the edge of the opening can be suppressed. .

  Moreover, in the induction heating apparatus having the above-described features, it is preferable that two windings having different polarities among the plurality of induction heating coils be paired to have the same number of turns and the shape of the winding cross section. With such a configuration, the magnetic flux generated from each magnetic pole becomes equal, and the magnetic flux applied to the edge of the magnetic opening is also approximated or equal. For this reason, it is possible to improve the cancellation accuracy of the induced current generated at the edge.

In addition, in the induction heating device having the above-described features, the cross-sectional shape and dimensions of the magnetic poles are preferably equal. This is because even in such a configuration, the cancellation accuracy of the induced current generated at the edge can be improved.
In addition, the induction heating apparatus having the above-described characteristics is provided with a power supply unit that can equalize the value of current flowing through the induction heating coil.

  According to the induction heating device having the above-described characteristics, magnetic flux generated from a plurality of induction heating coils is input to the edge of the magnetic opening, and the sum of the magnetic fluxes is zero or a single induction heating coil. It will approach zero compared to the case of using. For this reason, at least a part of the induced current generated at the edge of the magnetic opening is canceled out, and heat generation from the edge of the magnetic opening provided in the chamber can be suppressed.

It is a top view which shows the structure of the induction heating apparatus which concerns on 1st Embodiment. It is a figure which shows the structure of the AA cross section in FIG. It is a top view which shows the relationship between the angle of two magnetic poles, and an opening part. It is a figure which shows the front form of the opening part provided in the housing. It is a figure which shows the detail of the assembly | attachment form of the magnetic-permeable shielding member and cooling plate provided in the opening part. It is a top view for demonstrating the form of the opening part provided in the housing in the induction heating apparatus which concerns on 2nd Embodiment. It is a figure which shows the front form of the opening part provided in the housing in the induction heating apparatus which concerns on 2nd Embodiment.

  Hereinafter, embodiments of the induction heating apparatus of the present invention will be described in detail with reference to the drawings. First, a schematic configuration of the induction heating apparatus according to the first embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a partial cross-sectional block diagram illustrating a planar configuration of the induction heating apparatus, and FIG. 2 is a block diagram illustrating a cross-section taken along line AA in FIG.

The induction heating apparatus 10 according to the present embodiment is a batch-type apparatus in which a wafer 60 as a heated object and a susceptor 16 as an induction heating member (heating element) are stacked in multiple stages to perform heat treatment.
The induction heating apparatus 10 is configured based on a chamber 12, an excitation unit 28 disposed outside the chamber 12, and a power supply unit 40.

  The chamber 12 is a process chamber configured based on the boat 14, the rotary table 18, and the housing 26. The boat 14 is configured by stacking a plurality of susceptors 16 on which wafers 60 to be heated are placed in a vertical direction. A support member (not shown) is disposed between the susceptors 16 and is configured to maintain a predetermined interval for disposing the wafer 60. The support member (not shown) is not affected by the magnetic flux, is preferably made of a member having high heat resistance and a low coefficient of thermal expansion, and specifically, made of quartz or the like.

The susceptor 16 may be made of a conductive member, and may be made of, for example, graphite, SiC, SiC-coated graphite, refractory metal, or the like.
The rotary table 18 is configured based on a table 20, a rotary shaft 22, and a base 24. The table 20 is a table for supporting the boat 14 composed of a plurality of susceptors 16 arranged in a stacked manner, and a support portion (not shown) is provided. The rotating shaft 22 is a shaft fixed to the rotation center of the table 20, and rotates by receiving a driving force from a driving source (not shown), thereby rotating the table 20, and a plurality of susceptors mounted on the table 20. 16 is rotated. The base 24 is a base having a drive source such as a motor for rotating the rotary shaft 22, and ensures a stable state of the table 20. By rotating the boat 14 by the rotary table 18, the susceptor 16 can be uniformly heated even when the excitation unit 28, which is a heating source, is arranged biased with respect to the induction heating device 10. Further, by arranging the excitation unit 28 in a biased manner, it is possible to reduce the size of the device as compared with the case where the induction heating device 10 is evenly arranged on the outer periphery of the boat 14 (chamber 12).

  The housing 26 is a partition for keeping the inside of the chamber 12 in a vacuum. The housing 26 in the embodiment can be formed easily by forming the planar form into a polygon (hexagon in the example shown in FIG. 1). The component of the housing 26 is made of aluminum or stainless steel from the process side. Here, aluminum has a disadvantage in shape formation and a welding surface for shape formation, and has lower heat resistance than stainless steel. For this reason, stainless steel is often used as a constituent member of the housing 26. As shown in FIGS. 3 to 5, at least a part of the housing 26 is provided with an opening (magnetic opening through which magnetic flux is transmitted) 42, and the opening 42 has a magnetically permeable shielding plate 46, The magnetically permeable cooling plates 48 are stacked so as to be in close proximity or close to each other. The magnetically permeable shielding plate 46 is a member for separating the inner region and the outer region of the chamber 12 and has vacuum strength, magnetic flux permeability, heat resistance, low thermal expansion, low thermal conductivity, and thermal shock resistance. For example, quartz may be used. On the other hand, the cooling plate 48 cools the magnetically permeable shielding plate 46 by conducting the temperature of the refrigerant transmitted from the cooling pipe 50, which will be described in detail later, and the magnetic pole 32 (32 a associated with the heating of the magnetically permeable shielding plate 46. To 32c) and 34 (34a to 34c). Examples of the constituent member of the cooling plate 48 include ceramic members such as aluminum nitride, SiC, and alumina.

  In the housing 26 according to the embodiment, openings 42 are provided on two sides forming a planar hexagonal body. In the case of the example according to the embodiment, a square piece 26 is provided at the apex portion of the hexagon, a part of the square piece 26 is cut out, and a slit that communicates the two openings 42 (a magnetic slit that transmits magnetic flux). ) 44 is provided. Thereby, the opening part 42 provided in two sides will comprise the body of the single opening part connected via the slit 44 over two adjacent sides.

  The magnetically permeable shielding plate 46 according to the embodiment is pressed and held by a step portion 26b provided on the outer edge of the opening 42 of the housing 26 made of aluminum or the like. A cooling plate 48 is closely arranged outside the magnetically permeable shielding plate 46 (between the magnetically permeable shielding plate 46 and the magnetic poles 32 and 34), and cooling that allows a refrigerant to be inserted into the outer edge portion of the cooling plate 48. The tube 50 is closely placed. With such an arrangement configuration, heat exchange is performed between the refrigerant inserted into the cooling pipe 50 and the cooling plate 48 to cool the cooling plate 48. Since the cooling plate 48 has a higher thermal conductivity than the magnetically permeable shielding plate 46, the cooling plate 48 is subjected to heat exchange (heat transfer) between the magnetically permeable shielding plate 46 and the cooling plate 48. The whole is cooled. Thereafter, heat exchange is performed between the cooled cooling plate 48 and the magnetically permeable shielding plate 46, and the magnetically permeable shielding plate 46 is cooled. Thereby, it can avoid that a magnetic pole is overheated by the influence of radiant heat.

  In addition, the housing 26 according to the embodiment is provided with an insertion passage 26 c for allowing a coolant such as cooling water to pass therethrough in the vicinity of the opening 42. By adopting such a configuration, it is possible to suppress the housing 26 from being heated by radiation heat from the susceptor 16 or heating by a residual induced current.

  The magnetically permeable shielding plate 46 is pressed against the stepped portion 26b through the O-ring 52 as shown in FIG. Then, it is fixed by a fixing block 56 via the cooling plate 48, the cooling pipe 50, and the insulating member 54. Note that the slits 44 provided between the square pieces 26 a are closed by the O-ring 52. With such a configuration, the inner region and the outer region of the chamber 12 can be isolated, and the inside of the chamber 12 can be evacuated.

  The exciting unit 28 includes a core 30 (30a to 30c) and induction heating coils 36 (36a to 36c) and 38 (38a to 38c). The core 30 is an iron core formed in a bowl shape. The core 30 has magnetic poles 32 (32a to 32c) and 34 (34a to 34c) formed by winding induction heating coils 36 and 38, which will be described in detail later, at both ends, and connects between the two magnetic poles. Yoke 35 (35a to 35c) is provided. The end faces of the magnetic poles 32 and 34 are configured to have a plane parallel to the tangent line of the circular susceptor 16, that is, a plane orthogonal to the radial extension line of the susceptor 16. By setting it as such a structure, the induction heating coils 36 and 38 can be wound near the end surface of the magnetic poles 32 and 34, and the leakage of the magnetic flux from other than the front-end | tip of a magnetic pole can be suppressed. Therefore, there is no waste in the magnetic flux input to the susceptor 16, and the heating efficiency can be improved. The core 30 is preferably composed of ferrite or the like. According to such a configuration, the magnetic poles 32 and 34 and the yoke 35 having desired shapes can be obtained by firing after forming a clay-like raw material. For this reason, shape formation can be performed freely. In addition, in the induction heating device 10 according to the present embodiment, the magnetic poles 32 and 34 have the same cross-sectional shape (end face shape) and dimensions. With such a configuration, the amount of magnetic flux generated from the end faces of the magnetic poles 32 and 34 is equalized through induction heating coils having the same conditions such as the number of turns, coil diameter, winding shape, and current value.

  The induction heating coils 36 and 38 are conductive wires wound around both ends of the core 30 constituting the magnetic poles 32 and 34. By supplying current to the induction heating coils 36 and 38, magnetic flux is generated from the tip of the magnetic pole located in the direction intersecting with the winding direction of the coil. In the present embodiment, the magnetic pole end face (magnetic pole tip) faces in the direction orthogonal to the wafer placement surface of the susceptor 16, so that an alternating magnetic flux is generated from the magnetic pole end face in a direction parallel to the wafer placement face of the susceptor 16. Will be. The induction heating coils 36 and 38 according to the embodiment prevent the induction heating coils 36 and 38 from being overheated by a tubular member through which the refrigerant can be inserted (for example, when using water as the refrigerant, a copper tube or the like). However, it may be configured by combining a tubular member and a litz wire. In the case of configuring the induction heating coils 36 and 38 by combining the tubular member and the litz wire, the tubular member is used at the magnetic pole front end portion or a portion close to the magnetic pole front end, and the rear end side thereof is used. Is a configuration using a litz wire. In addition, the induction heating coils 36 and 38 according to the embodiment have a current application direction or a winding direction determined so that the polarities of magnetic fluxes generated in the magnetic poles 32 and 34 are reversed, as will be described in detail later. The two coils having such a configuration are formed as a pair so that the number of turns and the shape of the winding cross section are equal. With such a configuration, the generated magnetic fluxes of both are equal, the magnetic flux applied to the edge of the opening 42 and the generated induced current are equalized, and the cancellation accuracy of the induced current can be improved.

  In the heating method in which the magnetic flux is generated in the horizontal direction with respect to the wafer mounting surface of the susceptor 16, the frequency of the current applied to the induction heating coils 36 and 38 is several tens of kHz. When copper is used for the tubular member, the copper tube having a wall thickness of about 1 mm is induction-heated, which lowers the heating efficiency of the susceptor 16 and increases power loss. On the other hand, if it is a litz wire using a strand of about 0.18φ, it is considered that the magnetic flux is transmitted. End up. A litz wire that does not have a cooling action may rise in temperature when it generates heat by induction heating, and may exceed the operating temperature limit. For this reason, by disposing a tubular member having a cooling action on the magnetic pole front end side and a litz wire on the rear end side, it becomes possible to suppress power loss and prevent overheating of the coil.

The exciting unit 28 is configured by arranging a plurality (three in the example shown in FIG. 2) of the core 30 and the induction heating coils 36 and 38 configured as described above along the stacking direction of the susceptor 16.
Further, in the exciting unit 28 as described above, the core 30 of the embodiment has a predetermined angle θ formed by a line extending from the center point O of the susceptor 16 toward the center of each magnetic pole end face as shown in FIG. It is configured to have an angle (depending on the angle formed by the housing 26). By making the angle between the magnetic poles 32 and 34 and reversing the polarities of one magnetic pole 32 and the other magnetic pole 34, the generated magnetic flux travels between the magnetic poles 32 and 34. Thereby, it is possible to generate a magnetic flux passing through the center side of the susceptor 16 rather than a magnetic flux generated by the single magnetic pole 32 (34).

  As described above, in the induction heating device 10 according to the present embodiment, the square piece 26a provided with the slit 44 forms the two openings 42 as a single opening, and each opening 42 is magnetically transmissive. The shield plate 46 and the cooling plate 48 are disposed, and the magnetic poles 32 and 34 having different polarities are provided outside the cooling plate 48.

  In the induction heating apparatus 10 according to the embodiment, the housing 26 is made of a metal member. Therefore, an induced current caused by the magnetic flux generated from the magnetic poles 32 and 34 is generated at the edge of the opening 42 located in the vicinity of the magnetic poles 32 and 34 (see FIG. 4). When an induced current is generated at the edge of the opening 42, heat (inductive heating) is generated by the induced current, and the housing may be heated. This induced current generates an eddy current in a direction corresponding to the magnetic flux transmission direction, and flows along the edge shape of the opening 42. For this reason, like the induction heating device 10 according to the present embodiment, by arranging the two magnetic poles 32 and 34 having different polarities in one opening 42 substantially, at the edge of the opening 42, An induced current in the opposite direction flows in each case. When two induced currents having different flow directions (polarities) are generated at the edge of the opening 42, the induced currents cancel each other, and heat generation can be suppressed.

  This is also clear from the fact that the induced electromotive force generated according to the product of the input current (ampere) to the magnetic poles 32 and 34 and the number of turns (turns) of the induction heating coils 36 and 38 is shown as follows. . The ampere turn of the magnetic pole 32 (100 A × 7 turns) + the ampere turn of the magnetic pole 34 (−100 A × 7 turns) = 0 ampere turn.

  In order to perform such an operation with higher accuracy, the cross-sectional shape and size of the magnetic pole 32 and the magnetic pole 34 are preferably equal. This is because the lengths of the induction heating coils 36 and 38 wound around the magnetic poles 32 and 34 are equalized, and the amount of magnetic flux generated from the magnetic poles 32 and 34 is equalized.

  The power supply unit 40 includes an inverter (not shown) corresponding to the induction heating coils 36 and 38 wound around the magnetic poles 32 and 34 of each core 30, an AC power supply (not shown), and a power control (not shown). The current and voltage to be supplied, the frequency, the frequency, and the like can be adjusted in units of induction heating coils 36 and 38 provided in each core 30. In the induction heating device 10 according to the embodiment, the induction heating coils 36 and 38 wound around the single core 30 (for example, the induction heating coil 36a wound around the magnetic pole 32a and the induction heating coil wound around the magnetic pole 34a). 38a) is a parallel or serial relationship on the circuit, and the winding direction is the same, and the current input direction is reversed. Thereby, the polarities of the two magnetic poles (for example, the magnetic pole 32a and the magnetic pole 34a) in each core 30 can be reversed. Here, when a resonant type inverter is adopted, a resonant capacitor matched to each control frequency is connected in parallel so that the frequency can be easily switched, and this is used as a signal from the power control unit. It is desirable to configure so that it can be switched accordingly.

  The power control unit according to the embodiment includes zone control means (not shown). The zone control means plays a role of controlling the input power to each induction heating coil 36, 38 while avoiding the influence of mutual induction occurring between the induction heating coils 36, 38 wound around the adjacent core 30. Bear.

  Since each of the induction heating coils 36 and 38 wound around the core 30 stacked in close proximity as described above is operated as an individual induction heating coil, the induction heating coils adjacent to each other vertically (for example, induction Mutual induction occurs in the heating coil 38a and the induction heating coil 38b), which may adversely affect individual power control. For this reason, the zone control means matches the frequency of the current applied to the adjacent induction heating coil based on the detected current frequency and waveform (current waveform) and synchronizes the phase of the current waveform (phase difference). Power control (zone control control) that avoids the influence of mutual induction between adjacently arranged induction heating coils by controlling so that the phase difference is approximated to 0 or a phase difference of 0) It is possible.

  Such control detects a current value, a current frequency, a voltage value, and the like supplied to the induction heating coils 36 and 38, and inputs them to the zone control means. In the zone control means, for example, the phase of the current waveform between the induction heating coils 36a, 38a wound around the core 30a and the induction heating coils 36b, 38b wound around the core 30b is detected, respectively, and this is synchronized or predetermined. Control to maintain the phase difference of. Such control is performed by outputting a signal that instantaneously changes the frequency of the current supplied to each induction heating coil to the power control unit.

  In the case of a configuration such as the induction heating apparatus 10 according to the present embodiment, the power control is based on a control map (vertical temperature distribution control map) stored in a storage unit (memory) (not shown) provided in the power control unit. Thus, it suffices to output a signal for outputting input power to be changed in units of elapsed time from the start of heat treatment. The control map corrects the temperature change between the stacked susceptors from the start of heat treatment to the end of heat treatment, and gives power to each induction heating coil to obtain an arbitrary temperature distribution (for example, uniform temperature distribution). Any value may be recorded as long as the elapsed time from the start of the heat treatment is recorded. Further, in the case where measurement means (not shown) for measuring the temperature of the susceptor 16 is provided, it is preferable to perform temperature control (power control) by feeding back the susceptor temperature in each zone.

  In the power supply unit 40 having such a configuration, the frequency of the current input to each induction heating coil 36 and 38 is instantaneously adjusted based on the signal from the power control unit, and the phase control of the current waveform is performed. By performing power control for each induction heating coil 36, 38, the temperature distribution in the vertical direction in the boat 14 can be controlled.

  Moreover, according to the induction heating apparatus 10 having such a configuration, since the magnetic flux works horizontally with respect to the wafer 60, even when a conductive member such as a metal film is formed on the surface of the wafer 60, There is no possibility that the temperature distribution of the wafer 60 is disturbed.

  According to the induction heating device having such a configuration, it is possible to efficiently heat the susceptor 16 that is an induction heating member while preventing the magnetic poles 32 and 34 disposed outside the chamber 12 from being heated.

  Next, a second embodiment according to the induction heating device of the present invention will be described in detail with reference to the drawings. Most configurations of the induction heating apparatus according to the present embodiment are the same as those of the induction heating apparatus 10 according to the first embodiment described above. Therefore, in the present embodiment, only the main parts that are different in configuration from the induction heating apparatus 10 according to the first embodiment are illustrated and described, and the same configuration is the same in the drawings. A detailed description is omitted with reference numerals. The difference from the induction heating apparatus 10 according to the first embodiment is the form of the opening 142 provided in the housing 26. Specifically, in the induction heating apparatus according to the first embodiment, the two openings 42 are communicated by the slits 44 provided on the corners 26a to form a single opening. The magnetically permeable shielding plate 46 and the cooling plate 48 are individually arranged for each. On the other hand, in the induction heating apparatus according to the present embodiment, as shown in FIGS. 6 and 7, no square piece is provided in the opening 142, and a single magnetically permeable shielding plate 46 and a single cooling plate 48 are used. The opening 42 is shielded.

  Even in such a configuration, by making the polarities of the magnetic poles 32 and 34 different, the induced current generated at the edge of the opening 142 in the housing 26 can be offset. In addition, about another structure, an effect | action, and an effect, it is the same as that of the induction heating apparatus 10 which concerns on 1st Embodiment mentioned above.

DESCRIPTION OF SYMBOLS 10 ......... Induction heating apparatus, 12 ......... Chamber, 14 ......... Boat, 16 ......... Susceptor, 18 ......... Rotary table, 20 ......... Table, 22 ......... Rotating shaft, 24 ......... Base, 26 ......... Housing, 28 ......... Excitation part, 30 (30a-30c) ......... Core, 32 (32a-32c) ......... Magnetic pole, 34 (34a-34c) ......... Magnetic pole, 35 ( 35a-35c) ......... Yoke, 36 (36a-36c) ......... Induction heating coil, 38 (38a-38c) ......... Induction heating coil, 40 ......... Power supply, 42 ......... Opening, 46 ..... Magnetically permeable shielding plate, 48 .... Cooling plate, 50 .... Cooling tube, 60 ..... Wafer.

Claims (9)

A chamber mainly composed of a metal material constituting a process chamber, and induction heating disposed in the chamber through a magnetic opening disposed on the outer periphery of the chamber and transmitting a magnetic flux formed in the chamber. An induction heating device having an induction heating coil for heating a member,
A plurality of the induction heating coils are provided with respect to one magnetic opening so that the sum of magnetic fluxes applied to the edge of the magnetic opening becomes zero or close to zero. Induction heating device.   The induction heating apparatus according to claim 1, wherein the induction heating coil is arranged to generate an alternating magnetic flux toward an end surface of the induction heating member. Providing a plurality of the magnetic openings;
The induction heating apparatus according to claim 1, wherein a magnetic slit that transmits a magnetic flux is formed between the adjacent magnetic openings.   The induction heating apparatus according to any one of claims 1 to 3, further comprising a magnetic pole around which the induction heating coil is wound.   The induction heating apparatus according to claim 4, further comprising a yoke that connects at least two magnetic poles around which the induction heating coil is wound.   The induction heating apparatus according to any one of claims 1 to 5, wherein an insertion passage through which a refrigerant is inserted is provided at an outer edge of the magnetic opening.   The induction heating according to any one of claims 1 to 6, wherein two coils having different polarities among the plurality of induction heating coils are paired and the number of windings and the shape of the winding cross section are made equal. apparatus.   The induction heating apparatus according to claim 7, wherein the magnetic poles have the same cross-sectional shape and dimensions. The induction heating apparatus according to claim 7 or 8, further comprising a power supply unit capable of equalizing a current value flowing through the induction heating coil.

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