JP2011049195A - Device and method for processing workpiece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for processing a workpiece, capable of processing a workpiece in a truncated conical shape obtained by cutting the tip of a conical shape end part into a columnar shape in a short time for processing without losing a part other than the columnar shape as a grinding powder. <P>SOLUTION: The device for processing a workpiece includes at least a table for mounting a workpiece in a truncated conical shape, a core bit which is disposed over the workpiece mounted on the table, is in a cylindrical shape, has a grindstone on the tip, and can be rotated around a center axis, a driving motor for transmitting a driving force to the core bit and rotating it, and a feed mechanism for moving the core bit in the vertical direction relatively to the workpiece, wherein the core bit is cut and fed downward relatively by the feed mechanism while being rotated by the driving motor, the grindstone of the core bit is abutted to the workpiece mounted on the table, and the workpiece is hollowed into a columnar shape. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a columnar straight body portion and a truncated cone-shaped workpiece obtained by cutting the tip of a conical end portion cut and separated from an ingot whose end portion is a conical shape. The present invention relates to a processing apparatus and a processing method.

  An ingot, such as a silicon single crystal, pulled up by the Czochralski method (CZ method) or the like has a conical end (cone and tail) in a cylindrical straight body. The straight body portion of the ingot immediately after being pulled up is not completely cylindrical and does not have a uniform diameter. Therefore, the outer surface is ground so that the ingot has a predetermined diameter. Then, in the block cutting step, the conical end portion is separated by the inner peripheral blade slicer, the outer peripheral blade slicer, the band saw, etc., so that only the cylindrical straight body portion is obtained. Furthermore, the straight body portion is cut into a plurality of blocks as necessary. Thereafter, the wafer is sliced into a large number of silicon wafers with a wire saw or the like.

As a grinding device for grinding the outer peripheral surface of such an ingot, a cylindrical grinding device is most common.
FIG. 6 shows a schematic diagram of an example of a general cylindrical grinding apparatus.
The cylindrical grinding apparatus 100 includes clamps 102 and 102 ′ for holding the ingot 101, a grinding wheel 103 for grinding the ingot 101, and the like. The clamps 102 and 102 'are rotatable around their axes.

  Further, inside the clamps 102 and 102 ′, a conical recess (not shown) is formed so that the conical end of the ingot 101 can be held. A rotational driving force is transmitted from the clamps 102 and 102 ′ to rotate the ingot 101 around the axis, and at the same time, the grinding wheel 103 having a rotating disc-shaped grindstone is fed to the ingot 101 in the direction of the rotational axis. The straight body portion 101a of the ingot 101 is ground by a so-called traverse movement that is also sent in the direction of the rotation axis of 102 and 102 ′.

Thereafter, as described above, the conical end portion was cut and separated, but this portion was discarded as an unnecessary portion. However, although it is a single crystal having a high purity, it is not reasonable in terms of cost to be discarded, and a method for effectively utilizing the cut and separated conical end has been studied.
As such a utilization method, the conical end is cylindrically ground to a smaller diameter using a cylindrical grinding machine and processed into a cylindrical shape, and then cut into a test wafer. Or diverted to other products that can meet the specifications.
As a conventional method for cylindrical grinding of such a conical end portion, for example, a conical end portion of a semiconductor ingot while rotating a semiconductor ingot mounted on a cylindrical grinding apparatus as described above about its axis. A method for processing a semiconductor ingot is disclosed which includes a step of cylindrically grinding the outer periphery of the semiconductor ingot from one end of the straight body portion of the semiconductor ingot to a smaller diameter than the straight body portion by a predetermined length to form a step (see Patent Document 1).

JP-A-6-166600

  However, grinding to a desired diameter with a cylindrical grinding apparatus takes a long time in the process, and all the parts to be ground are lost as grinding powder. Therefore, it has been a problem to process the conical end portion into a cylindrical shape in a short time while reducing the loss of the portion to be ground.

  The present invention has been made in view of the above-described problems. A truncated cone-shaped workpiece obtained by cutting the tip of the conical end portion is processed into a cylindrical shape in a short time, and portions other than the cylindrical shape are processed. It is an object of the present invention to provide a workpiece machining apparatus and a machining method capable of machining with reduced loss.

  In order to achieve the above object, according to the present invention, a cylindrical straight body portion and an ingot in which the end portion of the straight body portion is conical are cut and separated, and the conical end thus cut is separated. A workpiece processing apparatus for processing a truncated cone-shaped workpiece obtained by cutting the tip of a portion into a cylindrical shape, at least a table for mounting the truncated cone-shaped workpiece, and a table mounted on the table A core bit that is disposed above the workpiece and has a cylindrical shape and has a grindstone at the tip, can rotate around a central axis, a driving motor that transmits the driving force to the core bit and rotates the core bit, and the core bit with respect to the workpiece A feed mechanism that relatively moves in the vertical direction, and the core bit is cut and fed relatively downward by the feed mechanism while being rotated by a drive motor, and the grindstone of the core bit is placed on the table Processing device of a work is provided, characterized in that which is brought into contact with the workpiece is intended to be processed void the workpiece in a cylindrical shape.

  Thus, at least a table on which the truncated cone-shaped workpiece is placed, and a core bit that is disposed above the workpiece placed on the table and is cylindrical and rotatable around a central axis having a grindstone at the tip. And a drive motor that transmits the driving force to the core bit to rotate it, and a feed mechanism that moves the core bit in the vertical direction relative to the workpiece, while the core bit is rotated by the drive motor. If the workpiece is cut and fed relatively downward by the feed mechanism, the workpiece of the core bit is brought into contact with the workpiece placed on the table and the workpiece is cut into a cylindrical shape, the workpiece can be cut in a short time. It can be processed into a cylindrical shape with high accuracy, and almost all parts other than the cylindrical shape remain in a block shape without being lost as grinding powder. The part can be utilized without being wasted, and it can reduce costs.

At this time, it is preferable to have positioning means for aligning the center axis of the core bit with the core of the workpiece to be processed.
Thus, if there is a positioning means for matching the center axis of the core bit with the core of the workpiece to be machined, the workpiece can be machined into a cylindrical shape with higher accuracy.

  Further, at this time, the positioning means is arranged on the table and moving means for moving the table on which the work is placed directly below the core bit, and contacts the outer peripheral surface of the work to position the work. A positioning block, and a pressing block that is disposed at a position facing the positioning block and that moves forward in the horizontal direction with respect to the workpiece and presses the workpiece. The positioning block includes the positioning block and the workpiece. When the table is moved immediately below the core bit by the moving means in a state where the outer peripheral portion is in contact, the workpiece core is arranged at a position that coincides with the central axis of the core bit. Can do.

  Thus, the positioning means is disposed on the table and moves on the table to move the table on which the work is placed, and contacts the outer peripheral surface of the work to position the work. A positioning block, and a pressing block that is disposed at a position facing the positioning block and that moves forward in the horizontal direction with respect to the workpiece and presses the workpiece. The positioning block includes the positioning block and the workpiece. When the table is moved directly below the core bit by the moving means in a state where the outer peripheral portion is in contact, the workpiece core is arranged at a position that coincides with the central axis of the core bit. The workpiece can be centered and positioned with a simple configuration, and the workpiece can be processed into a cylindrical shape with higher accuracy.

At this time, it is preferable that at least one guide roller is provided close to the outer peripheral surface of the core bit, and the workpiece is processed while the guide roller is close to the outer peripheral surface of the core bit.
Thus, if the workpiece is processed while having at least one guide roller close to the outer peripheral surface of the core bit and the guide roller is close to the outer peripheral surface of the core bit, the core bit rotates eccentrically. As a result, the workpiece can be machined into a cylindrical shape with higher accuracy, and the life reduction of the core bit and the machining loss of the workpiece can be suppressed.

At this time, it is preferable that the guide roller is disposed on the positioning block and / or the presser block.
In this way, if the guide roller is disposed in the positioning block and / or the presser block, the core bit is disposed in the immediate vicinity where the core bit contacts and rotates. It can suppress more reliably that it rotates eccentrically.

At this time, it is preferable that a part of the outer peripheral surface of the truncated cone bottom of the workpiece is subjected to cylindrical grinding.
As described above, if a part of the outer peripheral surface of the bottom of the truncated cone of the work is cylindrically ground, the positioning block and the presser block that are pressed against the outer peripheral surface of the work are made simple. In addition, the workpiece can be positioned more easily and accurately.

At this time, a mechanism for automatically controlling the movement of the table by the positioning means and the punching of the workpiece by the core bit can be provided.
Thus, if the mechanism for automatically controlling the movement of the table by the positioning means and the punching of the workpiece by the core bit is provided, the work process time of the operator can be reduced.

  Further, according to the present invention, the end portion is cut and separated from a cylindrical straight body portion and an ingot in which the end portion of the straight body portion is conical, and the tip end of the cut conical end portion is cut. A method of processing a workpiece in which the frustoconical workpiece obtained in this way is machined into a columnar shape, wherein the frustoconical workpiece is placed on a table, and a cylindrical core bit having a grindstone at the tip is placed around the central axis. The core bit is cut and fed relatively downward from above the workpiece placed on the table while rotating the workpiece, and the workpiece is punched into a cylindrical shape by bringing the grindstone of the core bit into contact with the workpiece. A workpiece processing method characterized by the above is provided.

  In this way, the truncated cone-shaped workpiece is placed on the table, and the core bit having a grindstone at the tip is rotated around the central axis while the core bit is rotated from above to below the workpiece placed on the table. The workpiece can be processed into a cylindrical shape with high accuracy in a short time by making the core bit grindstone abut against the workpiece and punching the workpiece into a cylindrical shape. Almost all portions other than the cylindrical shape remain in a block shape without being lost as grinding powder, so that this portion can be used without being wasted and the cost can be reduced.

At this time, it is preferable that the workpiece is machined after positioning is performed so that the center axis of the core bit coincides with the core of the workpiece to be machined.
In this way, if the workpiece is machined after positioning so that the center axis of the core bit coincides with the core of the workpiece to be machined, the workpiece can be machined into a cylindrical shape with higher accuracy in a short time.

  Further, at this time, the positioning is performed by moving a positioning block that positions the workpiece by contacting the outer peripheral surface of the workpiece, and moving the table directly below the core bit in a state where the positioning block and the outer peripheral portion of the workpiece are in contact. When the work block is placed at a position on the table such that the core of the work coincides with the central axis of the core bit, the work block moves forward in the horizontal direction from the position facing the positioning block. This can be done by pressing the workpiece and moving the table on which the workpiece is placed directly below the core bit.

  Thus, in the positioning, the positioning block for positioning the workpiece by contacting the outer peripheral surface of the workpiece is moved to the position immediately below the core bit while the positioning block and the outer peripheral portion of the workpiece are in contact with each other. By a presser block that is disposed at a position on the table such that the core of the work coincides with the central axis of the core bit and advances in a horizontal direction with respect to the work from a position facing the positioning block. If the workpiece is pressed and moved by moving the table on which the workpiece is placed directly below the core bit, the workpiece can be easily centered and positioned, and the workpiece is processed into a cylindrical shape with higher accuracy. it can.

At this time, it is preferable to process the workpiece while bringing a guide roller close to the outer peripheral surface of the core bit.
In this way, if the workpiece is processed while the guide roller is brought close to the outer peripheral surface of the core bit, the core bit can be prevented from rotating eccentrically, and as a result, the workpiece can be processed into a cylindrical shape with higher accuracy. It is possible to reduce the life of the core bit and the machining loss of the workpiece.

At this time, it is preferable to reduce the cutting speed only at the start of cutting and at the end of cutting when cutting into the workpiece by the core bit.
In this way, when cutting into the workpiece by the core bit, if the cutting speed is decreased only at the start of cutting and at the end of cutting, it is possible to suppress the occurrence of chipping in the workpiece.

At this time, as the workpiece, a part of the outer peripheral surface of the bottom portion of the truncated cone that is cylindrically ground can be used.
As described above, if a part of the outer peripheral surface of the bottom of the truncated cone is cylindrically ground as the workpiece, the workpiece can be easily pressed by the positioning block and the holding block, and the workpiece can be positioned. It can be done more easily and accurately.

At this time, the movement of the table in the positioning and the punching of the workpiece by the core bit can be automatically controlled.
Thus, the movement of the table in the positioning and the punching of the workpiece by the core bit can be automatically controlled to reduce the work process time of the operator.

  According to the present invention, in the workpiece processing apparatus, at least a table on which a truncated cone-shaped workpiece is placed, and a cylindrical shape around the central axis that is disposed above the workpiece placed on the table and has a grindstone at the tip. A core bit that is rotatable, a drive motor that transmits the driving force to the core bit and rotates the core bit, and a feed mechanism that moves the core bit relative to the workpiece in a vertical direction. The workpiece is cut and fed relatively downward by the feed mechanism while being rotated by the workpiece, and the workpiece of the core bit is brought into contact with the workpiece placed on the table to cut the workpiece into a cylindrical shape. It can be accurately processed into a cylindrical shape in time, and almost all the parts other than the cylindrical shape can be blocked without loss as grinding powder. Since left in Jo, available without wasting this portion, the cost can be reduced.

It is the schematic which shows an example of the workpiece processing apparatus of this invention. It is explanatory drawing explaining the outline of the workpiece | work used as the process target with the processing apparatus and processing method of the workpiece | work of this invention. It is explanatory drawing explaining the outline of the processing method of the workpiece | work of this invention. It is the schematic which shows an example of the positioning means and guide roller of the processing apparatus of the workpiece | work of this invention. It is the schematic which shows an example of the handling apparatus which can be used with the processing apparatus and processing method of the workpiece | work of this invention. It is the schematic which shows an example of the general cylindrical grinding apparatus used with the processing method of the conventional workpiece | work.

Hereinafter, although an embodiment is described about the present invention, the present invention is not limited to this.
In general, an ingot made of, for example, a silicon single crystal or the like pulled up by the CZ method or the like has a conical end portion in a cylindrical straight body portion. After such an ingot is pulled up, the outer peripheral surface is ground so as to have a predetermined diameter, and the conical end portion is cut and separated in the block cutting process so that only the cylindrical straight body portion is formed.

In order to effectively use the cut and separated conical end portion without discarding, the conical end portion is subjected to cylindrical grinding using a cylindrical grinder and a circle having a desired diameter smaller than the straight body portion. After processing into a columnar shape, it was used by cutting into a test wafer.
However, grinding to a desired diameter with a cylindrical grinding apparatus takes a long time in the process, and all the parts to be ground are lost as grinding powder. Therefore, it has been a problem to process the conical end portion into a cylindrical shape in a short time while reducing the loss of the portion to be ground.

  Therefore, the present inventors have made extensive studies to solve such problems. As a result, instead of machining the conical end into a cylindrical shape by cylindrical grinding, it can be machined into a cylindrical shape with high accuracy in a short time by drilling with a core bit having a cylindrical grindstone of a predetermined diameter. The present invention has been completed by conceiving that processing can be performed while reducing the loss of portions other than the cylindrical shape.

FIG. 1 is a schematic view showing an example of a workpiece machining apparatus according to the present invention.
FIG. 2 is an explanatory view for explaining the outline of a workpiece to be machined by the workpiece machining apparatus and machining method of the present invention.
As shown in FIG. 2, the ingot pulled up by the CZ method or the like has a conical end portion (cone and tail) in a cylindrical straight body portion. This conical end portion is cut off from the straight body portion, and a pointed portion is cut off to form a truncated cone shape. This frustoconical workpiece is a processing target in the present invention. Here, in order to pierce and cut into a cylindrical shape having a desired diameter smaller than the diameter of the straight body portion by the workpiece processing apparatus and processing method of the present invention, the cutting surface having a sharp tip is cut. It is cut to have a diameter larger than the desired diameter.

  As shown in FIG. 1, a workpiece processing apparatus 1 according to the present invention includes a table 5 on which a truncated cone-shaped workpiece W as described above is placed, a core bit 2 for punching the workpiece W into a cylindrical shape, A driving motor 4 that rotates the core bit 2 by transmitting a driving force and a feed mechanism 3 that moves the core bit 2 in the vertical direction relative to the workpiece W are provided.

The core bit 2 is disposed above the workpiece W placed on the table 5 during processing. Moreover, as shown in FIG. 3, the core bit 2 is cylindrical and the grindstone 6 is provided in the front-end | tip. And it can rotate around the central axis.
Here, what is normally attached to a commercially available core drill can be used for the core bit 2, and the diameter of the core bit 2 can be selected according to the diameter of the columnar shape of the workpiece | work W processed.
Thus, in the workpiece machining apparatus of the present invention, the workpiece W can be easily machined to various diameters by changing the diameter of the core bit 2 to be used.

  Furthermore, the core bit 2 can be moved in the vertical direction relative to the workpiece W by the feed mechanism 3. That is, as shown in FIG. 1, the core bit 2 can be moved up and down with respect to the work W, or the work W can be moved up and down with respect to the core bit 2.

  Further, the table 5 can be moved in the horizontal direction on the processing apparatus by, for example, an air cylinder, a ball screw, a linear guide, etc., and the table 5 can be moved directly below the core bit 2 with the workpiece W placed thereon. Can be configured. In addition, in the state where the workpiece W is completely punched, the grindstone 6 portion of the core bit 2 comes into contact with the work W mounting surface of the table 5. For this reason, it is desirable that the material of the table 5 can be cut by contact with the grindstone 6 of the core bit 2. Alternatively, a groove may be provided in the portion of the table 5 on which the grindstone 6 abuts so that the grindstone 6 does not abut on the table 5.

Further, a supply port (not shown) for supplying a polishing liquid during processing of the workpiece W can be provided. For example, a supply port is provided inside the core bit 2 and the polishing liquid is supplied to the grindstone 6 from the supply port. Can do. For example, water can be used as the polishing liquid.
Further, when the core bit 2 is moved relatively upward after the workpiece W is punched, a fluid such as water is sprayed from the supply port to the inside of the core bit 2 to apply an internal pressure. The workpiece W that is in close contact with the inside can be separated, and the core bit 2 can be moved smoothly. Alternatively, a compressed air may be used as the fluid and a mechanism for injecting the compressed air into the core bit 2 may be provided.
Further, in order to unload the workpiece W after the punching process from the table 5, as shown in FIG. 5, a suction type handling device 12 can be provided so that the workpiece W can be sucked and pulled out.

In the workpiece machining apparatus 1 configured as described above, the core bit 2 is rotated by the driving motor 4 while being relatively cut by the feed mechanism 3 and the grindstone 6 of the core bit 2 is placed on the table 5. The workpiece W is brought into contact with the workpiece W, and the workpiece W can be punched into a cylindrical shape.
With such a workpiece processing apparatus 1, the workpiece can be accurately processed into a cylindrical shape in a short time. In addition, almost all the parts other than the cylindrical shape remain in a block shape without being lost as grinding powder, so that it can be used without wasting this part, for example, sold as valuables, and the cost can be reduced. Become.

  At this time, it is preferable to have positioning means for matching the central axis of the core bit 2 with the core of the workpiece W to be processed. For example, the positioning means can be configured as shown in FIG. That is, the positioning means 7 is arranged on the table 5 and the moving means 11 for moving the table 5 on which the workpiece W is placed directly below the core bit 2, and contacts the outer peripheral surface of the workpiece W to position the workpiece W. A positioning block 8 that is disposed at a position facing the positioning block 8, and has a presser block 9 that moves forward with respect to the work W in the horizontal direction by, for example, air pressure of the air cylinder 13 to press the work W. ing.

The positioning block 8 is such that the core of the work W is the central axis of the core bit 2 when the table 5 is moved directly below the core bit 2 by the moving means 11 with the positioning block 8 and the outer periphery of the work W in contact with each other. Are arranged in advance on the table 5 so as to coincide with each other.
If such positioning means 7 is provided, the positioning of the workpiece W can be performed with a simple configuration, and the workpiece W can be processed into a cylindrical shape with higher accuracy.

At this time, as shown in FIG. 4, at least one guide roller 10 is provided to be close to the outer peripheral surface of the core bit 2, and the workpiece W is processed while the guide roller 10 is close to the outer peripheral surface of the core bit 2. It is preferable that
As described above, if the workpiece W is provided with at least one guide roller 10 close to the outer peripheral surface of the core bit 2 and the workpiece W is processed while the guide roller 10 is close to the outer peripheral surface of the core bit 2, the workpiece W is Even a hard material such as silicon can suppress the core bit 2 from rotating eccentrically when cutting into the workpiece W. As a result, the workpiece W can be machined into a cylindrical shape with higher accuracy, the life of the core bit 2 due to eccentricity can be suppressed, and an increase in machining loss can be suppressed.

  The guide roller 10 is preferably disposed on the positioning block 8 and / or the presser block 9 as shown in FIG. 4, and in this way, the core bit 2 rotates in contact with the workpiece W. Since the guide roller 10 is disposed in the immediate vicinity, the core bit 2 can be more reliably suppressed from rotating eccentrically. Further, it is preferable to have a plurality of guide rollers 10, particularly three or more. If there are three or more, the eccentricity of the core bit 2 can be more reliably suppressed.

  Further, at this time, as shown in FIG. 2, it is preferable that a part of the outer peripheral surface of the bottom of the truncated cone of the workpiece W is cylindrically ground. In such a case, for example, the positioning block shown in FIG. 8 and the part of the presser block 9 that contacts the work W do not need to have a complicated shape, and can be configured easily. If a part of the outer peripheral surface of the bottom of the truncated cone of the workpiece W is cylindrically ground to a predetermined diameter in advance, the positioning block 8 can be easily placed on the table 5 at a more accurate position. Therefore, the workpiece W can be positioned more easily and accurately.

  At this time, as shown in FIG. 1, the mechanism 14 for automatically controlling the movement of the table 5 by the positioning means 7 and the punching of the workpiece W by the core bit 2, particularly the cutting feed speed control and rotation control of the core bit 2 is provided. Can be provided. If such a mechanism 14 is provided and automatic control is performed, the work process time of the operator can be reduced.

Next, the workpiece machining method of the present invention will be described.
Here, the case where the workpiece processing apparatus 1 as shown in FIG. 1 is used will be described.
First, as shown in FIG. 3, the truncated cone-shaped workpiece W is placed on the table 5. At this time, for example, as shown in FIG. 5, the workpiece W may be placed with the bottom of the truncated cone of the workpiece W facing downward, or may be placed with the bottom of the truncated cone facing upward.

At this time, it is preferable that the workpiece W be machined after positioning so that the center axis of the core bit 2 and the core of the workpiece W to be machined coincide with each other. For example, as shown in FIG. When the positioning block 8 that contacts and positions the workpiece W is moved directly below the core bit 2 with the positioning block 8 and the outer peripheral portion of the workpiece W in contact with each other, the core of the workpiece W is the core bit 2 The work W is pressed by a presser block 9 which is arranged at a position on the table 5 so as to coincide with the central axis, and advances in a horizontal direction with respect to the work W from a position facing the positioning block 8. This can be done by moving the table 5 on which W is placed directly below the core bit 2.
If positioning is performed in this manner, the workpiece W can be easily positioned, and the workpiece W can be processed into a cylindrical shape with higher accuracy.

Next, as shown in FIG. 3, while rotating the core bit 2 around the central axis, the core bit 2 is relatively cut and fed downward from above the workpiece W placed on the table 5.
Here, the rotational speed and cutting feed speed of the core bit 2 can be appropriately determined according to the ingot to be processed, the diameter of the grindstone 6 of the core bit 2, and the like. For example, the rotational speed is 400 to 600 rpm and the cutting feed speed is 0. 3 to 3.0 mm / min.

In this way, the core bit 2 is cut and fed, the grindstone 6 of the core bit 2 is brought into contact with the workpiece W, and the workpiece W is punched into a cylindrical shape.
If the workpiece W is processed in this manner, the workpiece W can be processed into a cylindrical shape with high accuracy in a short time. Moreover, since almost all parts other than the cylindrical shape remain in a block shape without being lost as grinding powder, this part can be used without being wasted, and the cost can be reduced.

Here, it is desirable to stop the rotation of the core bit 2 immediately after the cutting of the workpiece W is completed. In this way, the cylindrical workpiece after the punching process rotates together with the rotation of the core bit 2, and the core bit 2 It is possible to suppress the occurrence of chipping due to the damage caused by the collision.
Further, at this time, for example, water can be drilled while being supplied to the grindstone 6. And the supply amount of the grinding fluid can be 5-20 L / min, for example.

  Further, the core bit 2 is moved relatively upward after the workpiece W is punched. At this time, a fluid such as water is injected from the supply port into the core bit 2 at a supply rate of about 5 L / min during cutting and about 20 L / min when the cutting is completed so as to apply an internal pressure. By doing so, the workpiece W that is in close contact with the inside of the core bit 2 can be separated, and the core bit 2 can be moved smoothly. Alternatively, compressed air may be used as the fluid, and the compressed air may be injected into the core bit 2.

  At this time, as shown in FIG. 4, it is preferable to process the workpiece W while bringing the guide roller 10 close to the outer peripheral surface of the core bit 2, thereby suppressing the core bit 2 from rotating eccentrically. can do. As a result, the workpiece W can be machined into a cylindrical shape with higher accuracy, the life reduction of the core bit 2 due to eccentricity can be suppressed, and an increase in machining loss can be suppressed.

At this time, in the cutting into the workpiece W by the core bit 2, it is preferable to reduce the cutting speed only at the start of cutting and at the end of cutting. For example, the cutting speed from the start of cutting to the cutting amount of about 30 mm is 0.3 mm / min, the cutting speed from the remaining cutting amount of about 15 mm to the end of cutting is 1.0 mm / min, and the cutting speed at the other intermediate portion is It can be about 2.0 mm / min.
In this way, when cutting into the workpiece W by the core bit 2, if the cutting speed is decreased only at the start of cutting and at the end of cutting, the lack of the workpiece W that is likely to occur at the start of cutting and at the end of cutting, particularly when machining the workpiece W. Can be suppressed.

At this time, as the workpiece W, a workpiece in which a part of the outer peripheral surface of the truncated cone bottom as shown in FIG. If such a workpiece W is used, the workpiece W can be easily pressed by the positioning block 8 and the pressing block 9 as shown in FIG. If a part of the outer peripheral surface of the bottom of the truncated cone of the workpiece W is cylindrically ground to a predetermined diameter in advance, the positioning block 8 can be easily placed on the table 5 at a more accurate position. Therefore, the workpiece W can be positioned more easily and accurately.
Then, after finishing the processing, the table 5 is moved to a position where the punched workpiece W is taken out and carried out.

  At this time, the movement of the table 5 in the positioning described above, that is, the movement of the table 5 on which the work W is placed before the work W is processed, and the unloading of the table 5 on which the work W is placed after the work W is punched. It is possible to automatically control the movement to the position and the punching of the workpiece W by the core bit 2, particularly the cutting feed speed control and rotation control of the core bit 2. If such automatic control is performed, the work process time of the operator can be reduced.

  EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples of the present invention, but the present invention is not limited to these.

Example 1
Using a workpiece processing apparatus of the present invention as shown in FIG. 1, the length of the truncated cone is cut and separated from a silicon single crystal ingot having a diameter of 300 mm according to the workpiece processing method of the present invention, and the pointed portion is cut. A 150 mm workpiece was processed into a cylindrical shape having a diameter of 200 mm.
The workpiece was processed after being positioned by positioning means as shown in FIG. During processing, water was supplied from a supply port provided in the core bit, and the flow rate was 5 L / min during cutting and 20 L / min when cutting was completed. Further, a guide roller as shown in FIG. 4 was provided in one position on the positioning block, and processing was performed while the guide roller was brought close to the outer peripheral surface of the core bit.

And the processing time in that case, the work process time which the operator performed, and the processing loss of the workpiece | work were evaluated.
The results are shown in Table 1. As shown in Table 1, it can be seen that the processing time is 0.5 hours, which is significantly improved compared to the result of 33.5 hours in the comparative example described later. It can be seen that the machining loss of the workpiece is also significantly less than the result of 1 kg and 13 kg of the comparative example.
Also, the work process time performed by the worker is significantly reduced to 0.5 hours compared to 4 hours in the comparative example.
As described above, the workpiece machining apparatus and machining method according to the present invention process a truncated cone-shaped workpiece obtained by cutting the tip of the conical end portion into a cylindrical shape in a short time, It was confirmed that processing was possible with reduced loss.

(Example 2)
1. Implementation other than using the workpiece machining apparatus of the present invention as shown in FIG. 1, provided with a mechanism for automatically controlling the movement of the table when positioning the workpiece at the machining position, the cutting feed rate control of the core bit, and the rotation control. The workpiece was machined in the same manner as in Example 1, and the machining time, the work process time performed by the operator, and the machining loss of the workpiece were evaluated in the same manner as in Example 1. Here, the cutting speed of the core bit is 0.3 mm / min from the start of cutting to the cutting amount of about 30 mm, the cutting speed from the remaining cutting amount of about 15 mm to the end of cutting is 1.0 mm / min, and others The cutting speed at the portion was 2.0 mm / min, and the rotation speed of the core bit was 500 rpm.
The results are shown in Table 1. As shown in Table 1, the work process time performed by the worker is shortened from 0.5 hours to 0.1 hour as compared with Example 1, and the work process performed by the worker by performing automatic control. The time could be further reduced.

(Comparative example)
A frustum-shaped workpiece was processed into a columnar shape by a conventional method of cylindrically grinding a workpiece using a cylindrical grinding apparatus as shown in FIG.
The results are shown in Table 1. As shown in Table 1, it can be seen that all of the machining time, the work process time performed by the worker, and the machining loss of the workpiece are worse than those of Example 1.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and exhibits the same function and effect. Are included in the technical scope.

DESCRIPTION OF SYMBOLS 1 ... Work processing apparatus, 2 ... Core bit, 3 ... Feeding mechanism,
4 ... Driving motor, 5 ... Table, 6 ... Grinding wheel, 7 ... Positioning means,
8 ... Positioning block, 9 ... Presser block, 10 ... Guide roller,
11 ... Moving means, 12 ... Handling device,
13 ... Air cylinder of presser block, 14 ... Automatic control mechanism.

Claims (14)

A truncated cone-shaped body obtained by cutting and separating the end portion from a cylindrical straight body portion and an ingot in which the end portion of the straight body portion is conical, and cutting the tip of the cut conical end portion. A workpiece processing apparatus for processing a workpiece into a cylindrical shape, at least,
A table for placing the frustoconical workpiece, a core bit arranged above the workpiece placed on the table, having a cylindrical shape and having a grindstone at the tip, and rotatable about a central axis, and driven by the core bit A drive motor for transmitting and rotating the force; and a feed mechanism for moving the core bit relative to the workpiece in a vertical direction;
While the core bit is rotated by a driving motor, it is cut and fed relatively downward by the feed mechanism, and the workpiece of the core bit is brought into contact with the workpiece placed on the table to punch the workpiece into a cylindrical shape. Workpiece processing device characterized by being a thing.   2. The workpiece machining apparatus according to claim 1, further comprising positioning means for aligning a center axis of the core bit with a core of the workpiece to be machined. The positioning means includes a moving means for moving a table on which the work is placed directly below the core bit, a positioning block that is disposed on the table and contacts the outer peripheral surface of the work to position the work, A pressing block that is disposed at a position facing the positioning block and that advances in the horizontal direction with respect to the workpiece and presses the workpiece;
The positioning block is configured such that when the table is moved immediately below the core bit by the moving means in a state where the positioning block and the outer peripheral portion of the workpiece are in contact with each other, the core of the workpiece coincides with the central axis of the core bit. The workpiece machining apparatus according to claim 2, wherein the workpiece machining apparatus is disposed at such a position.   2. The apparatus according to claim 1, further comprising at least one guide roller disposed close to the outer peripheral surface of the core bit, wherein the workpiece is processed while the guide roller is disposed close to the outer peripheral surface of the core bit. 4. The workpiece processing apparatus according to any one of 3 above.   The workpiece processing apparatus according to claim 4, wherein the guide roller is disposed in the positioning block and / or the presser block.   6. The workpiece processing apparatus according to claim 1, wherein a part of an outer peripheral surface of a bottom portion of the truncated cone of the workpiece is subjected to cylindrical grinding.   The workpiece according to any one of claims 3 to 6, further comprising a mechanism for automatically controlling movement of the table by the positioning means and punching of the workpiece by the core bit. Processing equipment. A truncated cone-shaped body obtained by cutting and separating the end portion from a cylindrical straight body portion and an ingot in which the end portion of the straight body portion is conical, and cutting the tip of the cut conical end portion. A workpiece machining method for machining a workpiece into a cylindrical shape,
The frustoconical workpiece is placed on a table, and the core bit, which is cylindrical and has a grindstone at the tip, is rotated around the central axis while the core bit is relatively moved downward from above the workpiece placed on the table. A work machining method comprising cutting and feeding, bringing a grinding wheel of the core bit into contact with the work and punching the work into a cylindrical shape.   9. The workpiece machining method according to claim 8, wherein the workpiece is machined after positioning is performed so that a center axis of the core bit coincides with a core of the workpiece to be machined.   The positioning is performed when a positioning block that contacts the outer peripheral surface of the work and positions the work is moved directly below the core bit while the positioning block and the outer peripheral portion of the work are in contact with each other. The work piece is pressed by a holding block which is arranged at a position on the table such that the core of the work coincides with the central axis of the core bit and advances in a horizontal direction with respect to the work from a position facing the positioning block. The work processing method according to claim 9, wherein the work is performed by moving a table on which the work is placed directly below the core bit.   11. The workpiece machining method according to claim 8, wherein the workpiece is machined while a guide roller is brought close to the outer peripheral surface of the core bit.   12. The workpiece machining method according to claim 8, wherein, when cutting into the workpiece by the core bit, the cutting speed is decreased only at the start of cutting and at the end of cutting.   The workpiece processing method according to any one of claims 8 to 12, wherein a part of the outer peripheral surface of the bottom of the truncated cone is cylindrically ground as the workpiece. 14. The workpiece machining method according to claim 10, wherein the movement of the table in the positioning and the punching of the workpiece by the core bit are automatically controlled.

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