JP2011021909A5 - - Google Patents
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- Publication number
- JP2011021909A5 JP2011021909A5 JP2009164928A JP2009164928A JP2011021909A5 JP 2011021909 A5 JP2011021909 A5 JP 2011021909A5 JP 2009164928 A JP2009164928 A JP 2009164928A JP 2009164928 A JP2009164928 A JP 2009164928A JP 2011021909 A5 JP2011021909 A5 JP 2011021909A5
- Authority
- JP
- Japan
- Prior art keywords
- encoder scale
- scale according
- encoder
- substrate
- phase grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims 7
- 230000001070 adhesive effect Effects 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 6
- 230000001681 protective effect Effects 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009164928A JP2011021909A (ja) | 2009-07-13 | 2009-07-13 | エンコーダ用スケール、及びエンコーダ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009164928A JP2011021909A (ja) | 2009-07-13 | 2009-07-13 | エンコーダ用スケール、及びエンコーダ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011021909A JP2011021909A (ja) | 2011-02-03 |
| JP2011021909A5 true JP2011021909A5 (enExample) | 2012-10-04 |
Family
ID=43632133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009164928A Pending JP2011021909A (ja) | 2009-07-13 | 2009-07-13 | エンコーダ用スケール、及びエンコーダ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011021909A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104024803B (zh) * | 2011-10-31 | 2017-02-15 | 日本精工株式会社 | 扭矩检测装置以及电动动力转向装置 |
| JP6199596B2 (ja) * | 2012-12-17 | 2017-09-20 | 株式会社ミツトヨ | 光学エンコーダ用の照明部 |
| JP6138621B2 (ja) * | 2013-07-31 | 2017-05-31 | 株式会社ミツトヨ | エンコーダ用スケール及びその製造方法 |
| JP7196033B2 (ja) * | 2019-07-30 | 2022-12-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02116039A (ja) * | 1988-10-26 | 1990-04-27 | Canon Inc | 情報記録媒体 |
| JPH03140823A (ja) * | 1989-10-26 | 1991-06-14 | Sony Magnescale Inc | ホログラムスケール及びその製造方法 |
| JPH0594866U (ja) * | 1992-05-20 | 1993-12-24 | 株式会社トーツヤ | 透明ホログラム |
| JP2008292406A (ja) * | 2007-05-28 | 2008-12-04 | Mitsutoyo Corp | 光電式エンコーダ |
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2009
- 2009-07-13 JP JP2009164928A patent/JP2011021909A/ja active Pending