JP2011017821A - Liquid crystal display panel and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide bridge connection using a transparent conductive member between a signal line wire and a scanning line wire for ensuring good electric connection.SOLUTION: A wiring switching region between a first wire 16a and a second wire 16b includes a first contact hole group 24 and a second contact hole group 25 formed therein. The first contact hole group 24 includes a plurality of contact holes that penetrate through a first insulating film 17 and a second insulating film 20 and expose the surface of the first wire 16a. The second contact hole group 25 includes a plurality of contact holes that penetrate through the second insulating film 4 and expose the surface of the signal line wire 16b. The first wire 16a and the second wire 16b are bridged by a connection electrode 23 that covers the contact hole groups 24 and 25.

Description

The present invention relates to a liquid crystal display panel in which scanning lines and signal lines, and lead lines such as first lead lines and second lead lines are formed in a non-display area of the liquid crystal display panel, and a method for manufacturing the same. More specifically, the present invention relates to a liquid crystal display panel in which the lead wirings are formed above and below an insulating film, and the lead wirings are bridge-connected in a predetermined wiring switching region, and a manufacturing method thereof.

Liquid crystal display panels are characterized by their light weight, thinness, and low power consumption compared to CRTs (cathode ray tubes), and are therefore used in many electronic devices for display purposes. As a method of applying an electric field to a liquid crystal layer of a liquid crystal display panel, there are a vertical electric field type and a horizontal electric field type. In a vertical electric field type liquid crystal display panel, electrodes are respectively provided on a pair of transparent substrates arranged with a liquid crystal layer interposed therebetween, and an electric field in a column direction is applied to liquid crystal molecules by the pair of electrodes. This vertical electric field type liquid crystal display panel includes TN (Twisted Nematic) mode, VA (Vertica
l Alignment) mode, MVA (Multi-domain Vertical Alignment) mode, etc. are known.

In addition, a horizontal electric field type liquid crystal display panel is provided with a pair of electrodes insulated only on one inner surface side of a pair of substrates arranged with a liquid crystal layer sandwiched therebetween, and an electric field in a horizontal direction is generally used as liquid crystal molecules. In contrast, it is applied. This horizontal electric field type liquid crystal display panel includes an IPS (In-Plane Switching) mode in which a pair of electrodes do not overlap in a plan view, and an FFS (Fringe Field S) overlapping.
witching) mode is known.

As described above, a plurality of types of liquid crystal display panels are known. Each of these liquid crystal display panels includes a pixel electrode and a common electrode that form an electric field for changing the orientation of liquid crystal molecules, a scanning line for changing the voltage of the pixel electrode for each pixel arranged in a matrix, and Signal lines are formed in the display area of the array substrate.

Electrode terminals for electrical connection with the driver IC are formed in the non-display area of the array substrate, and the scanning lines and signal lines are made of the same material as the scanning lines, and wiring lines and signals are formed on these electrode terminals. The wiring is electrically connected via a routing wire composed of a signal wire routing wire made of the same material as the wire. These lead-out lines are formed in the peripheral area of the display area. However, since the number of lead-out lines for the scanning lines and signal lines is very large, a wide peripheral area is required. In particular, when the driver IC is arranged in the extending direction of the signal line, in order to make the display area arranged in the center without being biased to either the left or right of the liquid crystal display panel, Since it is necessary to route the scanning lines for the scanning lines from both the left and right sides of the display area in the signal line extending direction, a wider peripheral area is required.

In order to reduce the area required for such a peripheral region, Patent Document 1 below discloses a liquid crystal display panel in which the lead wiring has a multilayer structure. Here, the configuration of the lead wiring of the liquid crystal display panel disclosed in Patent Document 1 below will be described with reference to FIGS. 6A is a partially enlarged plan view showing the arrangement of routing wirings on the left side of the peripheral region of the liquid crystal display panel of the conventional example, and FIG. 6B is a cross-sectional view taken along the line VB-VB in FIG. 6A. 7A is a plan view of a wiring switching region of a conventional liquid crystal display panel, and FIG. 7B is a cross-sectional view taken along line VIB-VIB in FIG. 7A.

In order to facilitate understanding, in FIG. 6A, conductive members formed of the same material as the scanning lines are indicated by dotted lines, and conductive members formed of the same material as the signal lines are indicated by solid lines.

In the liquid crystal display panel 50 disclosed in Patent Document 1 below, the array substrate AR includes a display area in which scanning lines 12 and signal lines 13 are arranged in a matrix on the surface of a transparent glass substrate 11, and a display area. It is divided into left and right sides (only the left side is shown in FIG. 6A) and a peripheral region located on the lower side. A scanning line electrode terminal 14 and a signal line electrode terminal 15 for connection to a driver IC (not shown) or an external circuit are provided in the peripheral region in the extending direction of the signal line 13. The region further includes a scanning line 12 and a scanning line electrode terminal 14.
A lead wiring 16 for connecting the two is formed.

The lead wiring 16 includes a first lead wiring 16 a made of the same material as the scanning line 12 and a second lead wiring 16 b made of the same material as the signal line 13. As shown in FIG. 6B, the first routing wiring 16a and the second routing wiring 16b have a two-layer structure with a first insulating film (generally referred to as a gate insulating film) 17 interposed therebetween. In general, they are alternately arranged adjacent to each other without overlapping each other in plan view.

At this time, a part of the first routing wiring 16 a disposed below the first insulating film 17 has one end directly connected to the end of the scanning line 12 and the other end below the first insulating film 17. Are directly connected to the scanning line electrode terminals 14 formed on the substrate. Further, the second routing wiring 16b formed on the upper side of the first insulating film 17 is electrically connected to the scanning line 12 in the first wiring switching region 18, and is again connected to the first routing wiring 16a in the second wiring switching region 19. To be electrically connected to the scanning line electrode terminal 14. Further, the signal line 13 is connected to the second routing wiring 1.
The signal line electrode terminal 15 is electrically connected to the signal line electrode terminal 15 directly or by switching to another lead wiring (not shown) made of the same material as the scanning line.

As shown in FIG. 7A, in the first wiring switching region 18 (see FIG. 6A),
The first routing wiring 16a and the second routing wiring 16b are arranged adjacent to each other with a certain distance L between their ends. Then, as shown in FIG. 7B, the first routing wiring 16
The first insulating film 17 covering the surface of a and the second insulating film (generally referred to as a passivation film) 20 covering the surface of the first insulating film 17 are provided with a partial surface of the first routing wiring 16a. A first contact hole 21 to be exposed is formed. Also, the second routing wiring 16
In the second insulating film 20 that covers the surface of b, a second contact hole 22 that exposes a part of the surface of the second routing wiring 16b is formed. These first contact holes 2
A connection electrode 23 made of a transparent conductive material that is the same material as the pixel electrode is formed on the surface of the second insulating film 20 so as to cover the first and second contact holes 22.
The routing wiring 16a and the second routing wiring 16b are bridge-connected. The second
Since the configuration of the wiring switching area 19 (see FIG. 6A) is substantially the same as that of the first wiring switching area 18, the illustration thereof is omitted.

According to the liquid crystal display panel 50 disclosed in Patent Document 1, the first lead wiring 16
Since the routing wiring composed of a and the second routing wiring 16b has a two-layer structure,
The pitch between the routing wirings can be reduced, and the area occupied by the peripheral region can be reduced.

JP 2005-91962 A

However, the first contact hole 21 and the second contact hole 22 as described above.
When the first lead wiring 16a and the second lead wiring 16b are bridge-connected by the connection electrode 23 made of a transparent conductive material covering the first, the first and second circles shown in FIG.
It is known that a so-called coverage failure may occur at the bottom edge of the second contact holes 21 and 22. This is because the transparent conductive material is generally formed so as to be laminated by sputtering from above in order to form the connection electrode 23.

Such a poor coverage portion is the first routing wiring 16a or the second routing wiring 16b.
This may cause corrosion, and may hinder good electrical connection between the second routing wiring 16b and the first routing wiring 16a. Further, as the number of pixels of the liquid crystal display panel increases, the number of various lead wirings also increases. If such a problem is left unattended, it will be a major factor in image quality degradation.

The present invention has been made to solve the above-described problems, and an object of the present invention is to use a connection electrode made of a transparent conductive member for bridge connection through contact holes of the first routing wiring and the second routing wiring. Even if coverage failure occurs at the bottom edge of the contact hole, good electrical connection with the first routing wiring and the second routing wiring can be secured, thereby providing stable display image quality. An object of the present invention is to provide a liquid crystal display panel and a manufacturing method thereof.

In order to solve the above-described problems, a liquid crystal display panel of the present invention includes a first transparent substrate and a second transparent substrate that are disposed to face each other with a liquid crystal layer interposed therebetween, and the liquid crystal layer side of the first transparent substrate is disposed on the liquid crystal layer side. A liquid crystal display panel in which a plurality of scanning line electrode terminals and signal line electrode terminals electrically connected to the scanning lines and signal lines of the display area are formed around the display area by lead wirings, respectively. Because
The routing wiring is
A plurality of scanning line routing wires that respectively route the scanning lines to the plurality of scanning line electrode terminals; and a plurality of signal line routing wires that respectively route the signal lines to the plurality of signal line electrode terminals;
The plurality of scanning line routing wirings and / or the plurality of signal line routing wirings are electrically insulated from the first routing wiring formed of the same scanning line material as the scanning lines and the first routing wiring. And a second lead wiring formed of the same signal line material as the signal line,
The second routing wiring is switched and connected to the first routing wiring in a predetermined wiring switching area;
In the wiring switching area,
A first contact hole group having a plurality of contact holes that pass through the first insulating film and the second insulating film and expose the surface of the first routing wiring; A second contact hole group in which a plurality of contact holes that expose the surface of the lead-out wiring are disposed;
The first routing wiring and the second routing wiring are bridge-connected by connection electrodes formed on the second insulating film while covering all contact holes of the first and second contact hole groups. It is characterized by that.

In the liquid crystal display panel of the present invention, even if the contact hole forming range in the wiring switching region is the same as that of the conventional example, the number of contact holes formed in the contact hole forming range is larger than that of the conventional example. Increasing. Therefore, according to the liquid crystal display panel of the present invention, even if a coverage failure occurs in any one of the contact holes, the portion of the coverage failure is smaller than that in the conventional example, and the other plurality of contact holes Since sufficient coverage can be maintained, sufficient electrical connection between the scanning line routing wiring and the signal line routing wiring can be ensured.

In the liquid crystal display panel of the present invention, a part of the scanning line is directly connected to the scanning line electrode terminal by the scanning line routing wiring, and the other part is connected to the scanning line through the first wiring switching region. It is preferable that the second routing wiring is switched to the second routing wiring, and the second routing wiring is switched to the first routing wiring via the second wiring switching region and connected to the scanning line electrode terminal. .

With such a configuration, the first routing wiring directly connected to the scanning line is the first.
Although arranged below the insulating film, the second routing wiring connected to the scanning line can be arranged on the surface of the first insulating film, so that the routing wiring for the scanning line has a two-layer structure. be able to. Therefore, according to the liquid crystal display panel of the present invention, it becomes possible to narrow the peripheral portion of the display area necessary for forming the lead-out wiring for the scanning line.

In the liquid crystal display panel of the present invention, it is preferable that the connection electrode is formed of the same transparent conductive material as the pixel electrode formed in the display region.

According to the liquid crystal display panel of the present invention, since the connection electrode can be formed simultaneously with the formation of the pixel electrode, it is not necessary to increase the number of steps for forming the connection electrode.

In the liquid crystal display panel of the present invention, the first routing wiring and the second routing wiring located in the wiring switching area are wider than the first routing wiring and the second routing wiring outside the wiring switching area. Preferably it is formed.

According to such a liquid crystal display panel of the present invention, a wide wiring switching region is ensured, so that a contact hole group consisting of more contact holes can be formed, whereby the first routing wiring and the second routing are formed. The electrical connection with the wiring can be made more reliable.

The method for manufacturing a liquid crystal display panel according to the present invention includes a first transparent substrate and a second transparent substrate that are opposed to each other with a liquid crystal layer interposed therebetween, and the liquid crystal layer side of the first transparent substrate has a display. A method of manufacturing a liquid crystal display panel in which a scanning line electrode terminal and a signal line electrode terminal electrically connected to a scanning line and a signal line of the display area, respectively, are formed in a peripheral portion of the area by lead wiring. The following steps (1) to (7) are provided.
(1) patterning and forming a scanning line made of a scanning line material, a gate electrode, and a first routing wiring on the first transparent substrate;
(2) A step of covering the surface of the first transparent substrate obtained in the step with a first insulating film,
(3) forming a semiconductor layer at a position corresponding to the gate electrode on the first insulating film;
(4) A signal line made of a signal line material on the first insulating film, a source electrode, a drain electrode, a second
A step of patterning and forming a routing wiring;
(5) A step of covering the surface of the first transparent substrate obtained in the step with a second insulating film,
(6) A contact that forms an electrode connection contact hole for connecting the pixel electrode and the drain electrode, and at the same time, exposes the surface of the first routing wiring through the first insulating film and the second insulating film. A first contact hole group in which a plurality of holes are disposed; and a second contact hole group in which a plurality of contact holes that penetrate the second insulating film and expose a surface of the second routing wiring are disposed. Forming in the wiring switching region;
(7) A connection electrode made of the same transparent conductive member as the pixel electrode on the second insulating film while covering all the contact holes of the pixel electrode connection contact hole and the first and second contact hole groups. Forming a bridge connection between the first routing wiring and the second routing wiring.

According to the manufacturing method of the liquid crystal display panel of the present invention, a manufacturing method more suitable for the above-described liquid crystal display panel of the present invention is provided.

It is a schematic plan view which shows the array substrate of the liquid crystal display device of 1st Embodiment. 2A is a diagram showing a wiring switching region between the first routing wiring and the second routing wiring in the peripheral region in the liquid crystal display panel of the present embodiment, and FIG. 2B is a cross-sectional view taken along the line IB-IB in FIG. 2A. is there. It is a figure which shows the wiring switching area | region which shows the modification of the liquid crystal display panel of this embodiment. It is a figure which shows the manufacturing method of the liquid crystal display panel of this embodiment in process order. It is a figure which shows the manufacturing method of the liquid crystal display panel of this embodiment following FIG. 4 in order of a process. FIG. 6A is a partially enlarged plan view showing the arrangement of routing wirings on the left side of the peripheral region of the liquid crystal display panel common to the present embodiment and the conventional example, and FIG. 6B is a cross-sectional view taken along the line VB-VB in FIG. 7A is a plan view of a wiring switching region of a conventional liquid crystal display panel, and FIG. 7B is a cross-sectional view taken along the line VIB-VIB in FIG. 7A.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below is
The liquid crystal display panel for embodying the technical idea of the present invention is illustrated, and is not intended to specify the present invention as the liquid crystal display panel, and is not included in the scope of the claims. The present invention can be equally applied to the embodiment. In each drawing used for the description in this specification, each layer and each member are displayed in different scales so that each layer and each member can be recognized on the drawing. However, it is not necessarily displayed in proportion to the actual dimensions.

FIG. 1 is a schematic plan view showing an array substrate of the liquid crystal display device of the first embodiment. The liquid crystal display panel 10 of this embodiment includes a display area DA on which various images are displayed and a frame area PF formed around the display area DA, and a driver IC is provided on one end side of the frame area PF. Or, a terminal portion Dr for external connection is formed. In the frame area PF, the wiring lines 16 and the signal lines 13 that route the scanning lines 12 in the display area DA to the terminal portions Dr are connected to the terminal portions D.
A routing wiring 16C leading to r is provided.

Note that the configuration of the lead-out wiring portion on the left side of the peripheral region in the liquid crystal display panel 10 of this embodiment is not substantially different from that of the conventional example shown in FIG. 6A, and therefore will be described with appropriate reference to FIG. 6A. In addition, the same components as those of the conventional example will be described with the same reference numerals.

The terminal portion Dr is formed on the surface of the glass substrate 11 (corresponding to the first transparent substrate of the present invention) in the extending direction of the signal line 13, and as shown in FIG. Electrode terminal 14
And a signal line electrode terminal 15 formed of a signal line material. The scanning line 12 and the scanning line electrode terminal 14 are connected by a plurality of lead wires 16. The lead wiring 16 includes a first lead wiring 16a made of a scanning line material and a second lead wiring 16b made of a signal line material.
And is formed from. The first routing wiring 16a and the second routing wiring 16b are provided between the gate insulating film 17 and the liquid crystal display panel of the conventional example shown in FIG. 6B.
The two-layer structure is sandwiched between them and they are alternately arranged adjacent to each other without overlapping each other in plan view.

At this time, one end of the first routing wiring 16 a disposed below the first insulating film 17 is directly connected to the end of the scanning line 12, and the other end is below the gate insulating film 17. It is directly connected to the formed scanning line electrode terminal 14. Also, the second formed on the upper side of the gate insulating film 17.
The routing wiring 16 b is electrically connected to the scanning line 12 in the first wiring switching area 18, and is switched again to the first routing wiring 16 a in the second wiring switching area 19 and is electrically connected to the scanning line electrode terminal 14. Has been. Further, the signal line 13 is connected to the signal line 13 and the second line.
The lead wire 16c is directly connected to the signal line electrode terminal 15 directly.

In the liquid crystal display panel 10 of this embodiment, as shown in FIG. 2B, the surface of the first routing wiring 16a made of the scanning line material is covered with the gate insulating film 17, and the first wiring wiring 16a is made of the signal line material. The second routing wiring 16b is formed on the surface of the gate insulating film (corresponding to the first insulating film of the present invention) 17, and the surface thereof is covered with a passivation film (corresponding to the second insulating film of the present invention) 20. . In the first wiring switching region 18, as shown in FIG. 2A, the first routing wiring 16 a and the second routing wiring 16 b are arranged adjacent to each other with a constant distance L therebetween. Has been.

A gate insulating film 17 covering the surface of the first routing wiring 16a and the gate insulating film 17
In the passivation film 20 that covers the surface of the first contact hole group 24, a plurality of first contact hole groups 24, for example, a total of 16 (4 × 4) contact holes that expose the surface of the first routing wiring 16 a are formed. . In other words, in this example, in the wiring switching region 18, the surface of the first routing wiring 16a is exposed at 16 locations. On the other hand, the passivation film 20 that covers the surface of the second routing wiring 16b is similarly applied to the second routing wiring 1.
A second contact hole group 25 including a total of 16 (4 × 4) contact holes exposing the surface of 6b is formed. That is, in this example, in the wiring switching region, the surface of the second routing wiring 16b is exposed at 16 locations.

The 16 contact holes of the first contact hole group 24 and the 16 contact holes of the second contact hole group 25 are the same as the pixel electrode formed on the surface of the passivation film 20, for example, ITO (Indium Thin Oxide). ) Or IZO (Indium Zinc O
xide) or the like, which is covered with a connection electrode 23 made of a transparent conductive material. This
The first routing wiring 16a and the second routing wiring 16b are bridge-connected through a connection electrode 23 made of a transparent conductive material.

Thus, in the conventional liquid crystal display panel 50 shown in FIG.
Although only contact holes 21 and 22 are formed and bridge-connected, in the liquid crystal display panel 10 of this embodiment, a contact hole group 24 composed of 16 contact holes each.
, 25 are formed for bridge connection. Further, in the liquid crystal display panel 10 of the present embodiment, the formation range of the first and second contact hole groups 24 and 25 is almost the same as that of the conventional example, as is apparent from comparison with FIG. . Therefore, the size of each contact hole of this embodiment is smaller than that of the conventional example. However, if the number of contact holes in each of the contact hole groups 24 and 25 is greatly increased as compared with the conventional example, even if a coverage defect occurs in any of the contact holes, the portion of the defective coverage is that of the conventional example. In addition, since sufficient coverage can be maintained in other contact holes, the electrical connection between the first routing wiring 16a and the second routing wiring 16b is sufficiently ensured.

In the present embodiment, the case of the first wiring switching area 18 has been described. However, the configuration of the second wiring switching area 19 is the same as that of the first wiring switching area 18 and is not shown. In this embodiment, the signal line 13 is connected to the signal line electrode terminal 15 by the signal line 13 and the second routing wiring 16c. However, the signal line electrode terminal 15 is on the same layer as the scanning line 12. If formed, the same configuration as that of the second wiring switching region 19 described above is employed. Also in this case, illustration is omitted.

Next, a modification of this embodiment will be described with reference to FIG. In FIG. 3, the first routing wiring 16a and the second routing wiring 16b are made thinner than those shown in FIG. 2, but actually the same thickness as that shown in FIG. Is. In this example, the first routing wiring 16a ′ and the second routing wiring 16b ′ positioned in the wiring switching area A are the first routing wiring 16a and the second routing wiring 1 positioned in the area B adjacent to the wiring switching area A.
It is formed wider than 6b. With such a configuration, it is possible to secure a wider wiring switching area A, form a larger number of contact hole groups, and form the first routing wiring 16a and the second routing wiring 16a.
The electrical connection with the routing wiring 16b can be made more reliable. It should be noted that such a thickened wiring switching region A may be formed every other scanning line 12 as is apparent with reference to FIG. 6A, so that the area required for forming the wiring switching region A is as follows. It can be secured sufficiently.

Next, the manufacturing method of the liquid crystal display panel of this embodiment is demonstrated using FIG.4 and FIG.5. Here, only the method for manufacturing the FFS mode array substrate AR is shown, and the color filter substrate is not different from that of the conventional example, and the description thereof is omitted. 4 and 5
1 shows one sub-pixel of the display area on the left side, and the wiring switching area of the peripheral area on the right side.

First, a scanning line material (for example, a two-layer structure of Al / Mo) over the entire surface of the glass substrate 11
After the metal thin film is formed, the scanning line 12 and the common wiring 26 are patterned by photolithography and etching so that they are parallel to each other. At this time, in the vicinity of the intersection of the scanning line 12 and the signal line (not shown), a part of the scanning line 12 is partially widened, or a part of the scanning line 12 is extended. TF
T gate electrode G is formed at the same time. Further, in the peripheral region, the first routing wiring 16a, the common wiring (not shown), and the scanning line electrode terminal 14 (see FIG. 6A) are simultaneously formed by patterning using the same scanning line material (FIG. 4A). ).

Next, the entire surface of the substrate obtained by the above process is covered with a transparent conductive film made of, for example, ITO by sputtering, and the common electrode 27 is formed by photolithography and etching (FIG. 4B). The common electrode 27 is electrically connected by being in direct contact with the common wiring 26. However, the common electrode 27 is not electrically connected to the scanning line 12 or the gate electrode G and does not overlap with the signal line in plan view. Each pixel region is formed as an independent one.

Next, the entire surface of the substrate obtained by the above process is covered with a gate insulating film 17 made of silicon nitride or silicon oxide by a plasma CVD method (FIG. 4C). This
In the peripheral region, the surface of the first routing wiring 16 a is covered with the gate insulating film 17.

Subsequently, for example, amorphous silicon (hereinafter referred to as “a-Si”) is formed by plasma CVD.
" ) And an n ⁺ a-Si layer to be an ohmit layer are formed over the entire surface of the gate insulating film 17, and then the a-Si layer and the n ⁺ a-Si are formed in the TFT formation region by photolithography and etching. A semiconductor layer 28 composed of layers is formed (FIG. 4D).

Next, the entire surface of the substrate obtained by the above-described process is formed on the signal line material (for example, Mo / Al /
After coating with a metal thin film having a three-layer structure of Mo, a source electrode S (part of the signal line 13) and a drain electrode D of the TFT are formed by photolithography and etching (FIG. 5A). . Both the source electrode S portion and the drain electrode D portion are the semiconductor layer 2.
The exposed region of the semiconductor layer 28 that partially overlaps the surface of the electrode 8 and is not covered between the electrodes serves as a channel region ch of the TFT. At this time, the gate insulating film 17 is formed in the peripheral region.
The second routing wiring 16b is simultaneously patterned on the surface of FIG. 5 (FIG. 5A).

Next, the entire surface of the substrate obtained by the above process is covered with a passivation film 20 made of silicon nitride or silicon oxide by plasma CVD. Thereby, in the peripheral region, the surface of the second routing wiring 16b is covered with the passivation film (FIG. 5B).
).

Next, a contact hole 29 is formed in the passivation film 20 at a location in contact with the drain electrode D by plasma etching to expose a part of the drain electrode D (FIG. 5).
(C)). At this time, in the peripheral region, the gate insulating film 17 that covers the surface of the first routing wiring 16a and the passivation film 20 that covers the surface of the gate insulating film 17 are a total that exposes the surface of the first routing wiring 16a. A first contact hole group 24 composed of 16 (4 × 4) contact holes is formed simultaneously. Further, the second routing wiring 16
In the passivation film 20 covering the surface of b, the second contact hole group 25 consisting of a total of 16 (4 × 4) contact holes exposing the surface of the second routing wiring 16b.
Are formed simultaneously.

Next, the entire surface of the substrate obtained by the above process is covered with a transparent conductive film made of, for example, ITO by a sputtering method. Then, a pixel electrode 31 having a plurality of slits 30 is formed by photolithography and etching, and is electrically connected to the drain electrode through the contact hole 29 of the passivation film 20. At this time, in the peripheral region, the 16 contact holes of the first contact hole group 24 and the second contact hole group 2
16 contact holes 5 are covered with a connection electrode 23 made of the same transparent conductive material as that of the pixel electrode 31, whereby the first routing wiring 16 a and the second routing wiring 16 b are bridge-connected (see FIG. 5 (D)).

Further, the array substrate AR is completed by forming a predetermined alignment film (not shown) over the entire surface. Then, the array substrate AR manufactured in this way and the separately manufactured color filter substrate CF are opposed to each other, the periphery is sealed with a sealing material, and the liquid crystal is injected between both substrates, whereby the liquid crystal according to this embodiment is used. A display panel is obtained.

In the above embodiment, the first contact hole group 24 and the second contact hole group 2
5 shows an example in which 4 × 4 = 16 contact holes are formed. However, in the present invention, if a plurality of contact holes are formed in each of the contact hole groups 24 and 25, a predetermined effect is obtained. Play. Therefore, the number of contact holes formed in each contact hole group is the same as that of the first routing wiring 16a and the second routing hole in the switching region.
What is necessary is just to set suitably according to the width | variety and length of the routing wiring 16b.

In the above embodiment, the case of the FFS mode liquid crystal display panel which is a horizontal electric field type liquid crystal display panel has been described as an example. However, the same horizontal electric field type IPS mode liquid crystal display panel, TN mode, VA mode, The present invention is equally applicable to a vertical electric field type liquid crystal display panel such as the MVA mode.

DESCRIPTION OF SYMBOLS 10 ... Liquid crystal display panel 11 ... Glass substrate 12 ... Scanning line 13 ... Signal line 14 ... Scanning line electrode terminal 15 ... Signal line electrode terminal 16 ... Lead-out wiring 16a, 16a '... 1st
Lead wiring 16b, 16b ', 16c ... second lead wiring, 17 ... first insulating film (gate insulating film) 18 ... first wiring switching region 19 ... second wiring switching region 20 ... second
Insulating film (passivation film) 21 ... first contact hole 22 ... second contact hole 23 ... connecting electrode 24 ... first contact hole group 25 ... second contact hole group 26 ... common wiring 27 ... lower electrode 28 ... semiconductor layer 29 ... Contact hole 30 ...
Slit 31 ... Pixel electrode

Claims (5)

A first transparent substrate and a second transparent substrate, which are opposed to each other with a liquid crystal layer interposed therebetween, are provided on the liquid crystal layer side of the first transparent substrate, and the display region is scanned around the display region by a lead-out wiring. A plurality of scanning line electrode terminals and signal line electrode terminals electrically connected to the lines and the signal lines, respectively,
The routing wiring is
A plurality of scanning line routing wires that respectively route the scanning lines to the plurality of scanning line electrode terminals; and a plurality of signal line routing wires that respectively route the signal lines to the plurality of signal line electrode terminals;
The plurality of scanning line routing wirings and / or the plurality of signal line routing wirings are electrically insulated from the first routing wiring formed of the same scanning line material as the scanning lines and the first routing wiring. And a second lead wiring formed of the same signal line material as the signal line,
The second routing wiring is switched and connected to the first routing wiring in a predetermined wiring switching area;
In the wiring switching area,
A first contact hole group having a plurality of contact holes that pass through the first insulating film and the second insulating film and expose the surface of the first routing wiring; A second contact hole group in which a plurality of contact holes that expose the surface of the lead-out wiring are disposed;
The first routing wiring and the second routing wiring are bridge-connected by connection electrodes formed on the second insulating film while covering all contact holes of the first and second contact hole groups. A liquid crystal display panel characterized by that. The scanning line is
A part is directly connected to the scanning line electrode terminal by the scanning line routing wiring,
The other part is switched from the scanning line to the second routing wiring through the first wiring switching area, and is switched from the second routing wiring to the first routing wiring through the second wiring switching area. The liquid crystal display panel according to claim 1, wherein the liquid crystal display panel is connected to the scanning line electrode terminal. The liquid crystal display panel according to claim 1, wherein the connection electrode is formed of the same transparent conductive material as the pixel electrode formed in the display region. The first routing wiring and the second routing wiring located in the wiring switching area are formed wider than the first routing wiring and the second routing wiring outside the wiring switching area. The liquid crystal display panel according to claim 1. A first transparent substrate and a second transparent substrate, which are opposed to each other with a liquid crystal layer interposed therebetween, are provided on the liquid crystal layer side of the first transparent substrate, and the display region is scanned around the display region by a lead-out wiring. A method of manufacturing a liquid crystal display panel in which a scanning line electrode terminal and a signal line electrode terminal electrically connected to a line and a signal line, respectively, are formed, and the following steps (1) to (7) A method for producing a liquid crystal display panel comprising the steps of:
(1) patterning and forming a scanning line made of a scanning line material, a gate electrode, and a first routing wiring on the first transparent substrate;
(2) A step of covering the surface of the first transparent substrate obtained in the step with a first insulating film,
(3) forming a semiconductor layer at a position corresponding to the gate electrode on the first insulating film;
(4) A signal line formed of a signal line material on the first insulating film, a source electrode, a drain electrode,
A step of patterning and forming a second routing wiring;
(5) A step of covering the surface of the first transparent substrate obtained in the step with a second insulating film,
(6) A contact that forms an electrode connection contact hole for connecting the pixel electrode and the drain electrode, and at the same time, exposes the surface of the first routing wiring through the first insulating film and the second insulating film. A first contact hole group in which a plurality of holes are disposed; and a second contact hole group in which a plurality of contact holes that penetrate the second insulating film and expose a surface of the second routing wiring are disposed. Forming in the wiring switching region;
(7) A connection electrode made of the same transparent conductive member as the pixel electrode on the second insulating film while covering all the contact holes of the pixel electrode connection contact hole and the first and second contact hole groups. Forming a bridge connection between the first routing wiring and the second routing wiring.

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