JP2011008070A - マイクロミラー装置 - Google Patents

マイクロミラー装置 Download PDF

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Publication number
JP2011008070A
JP2011008070A JP2009152121A JP2009152121A JP2011008070A JP 2011008070 A JP2011008070 A JP 2011008070A JP 2009152121 A JP2009152121 A JP 2009152121A JP 2009152121 A JP2009152121 A JP 2009152121A JP 2011008070 A JP2011008070 A JP 2011008070A
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JP
Japan
Prior art keywords
stress
layer
refractive index
mirror
micromirror device
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Pending
Application number
JP2009152121A
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English (en)
Japanese (ja)
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JP2011008070A5 (enrdf_load_stackoverflow
Inventor
Akihiro Fuse
晃広 布施
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
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Ricoh Co Ltd
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Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2009152121A priority Critical patent/JP2011008070A/ja
Publication of JP2011008070A publication Critical patent/JP2011008070A/ja
Publication of JP2011008070A5 publication Critical patent/JP2011008070A5/ja
Pending legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2009152121A 2009-06-26 2009-06-26 マイクロミラー装置 Pending JP2011008070A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009152121A JP2011008070A (ja) 2009-06-26 2009-06-26 マイクロミラー装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009152121A JP2011008070A (ja) 2009-06-26 2009-06-26 マイクロミラー装置

Publications (2)

Publication Number Publication Date
JP2011008070A true JP2011008070A (ja) 2011-01-13
JP2011008070A5 JP2011008070A5 (enrdf_load_stackoverflow) 2012-07-12

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ID=43564805

Family Applications (1)

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JP2009152121A Pending JP2011008070A (ja) 2009-06-26 2009-06-26 マイクロミラー装置

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JP (1) JP2011008070A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109154678A (zh) * 2016-05-13 2019-01-04 三菱电机株式会社 光学部件及激光加工机
CN110702224A (zh) * 2018-07-10 2020-01-17 罗伯特·博世有限公司 法布里-珀罗干涉仪-单元和用于制造法布里-珀罗干涉仪-单元的方法
CN110954714A (zh) * 2019-12-20 2020-04-03 江苏集萃微纳自动化系统与装备技术研究所有限公司 一种原子力显微镜的探针的刚度实时调节方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08254612A (ja) * 1995-03-15 1996-10-01 Canon Inc 多層膜光学部品およびその製造方法
JP2007063574A (ja) * 2005-08-29 2007-03-15 Showa Shinku:Kk 多層膜の成膜方法および成膜装置
JP2009020468A (ja) * 2007-07-13 2009-01-29 Brother Ind Ltd マイクロミラーの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08254612A (ja) * 1995-03-15 1996-10-01 Canon Inc 多層膜光学部品およびその製造方法
JP2007063574A (ja) * 2005-08-29 2007-03-15 Showa Shinku:Kk 多層膜の成膜方法および成膜装置
JP2009020468A (ja) * 2007-07-13 2009-01-29 Brother Ind Ltd マイクロミラーの製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109154678A (zh) * 2016-05-13 2019-01-04 三菱电机株式会社 光学部件及激光加工机
CN109154678B (zh) * 2016-05-13 2021-03-26 三菱电机株式会社 光学部件及激光加工机
CN110702224A (zh) * 2018-07-10 2020-01-17 罗伯特·博世有限公司 法布里-珀罗干涉仪-单元和用于制造法布里-珀罗干涉仪-单元的方法
CN110954714A (zh) * 2019-12-20 2020-04-03 江苏集萃微纳自动化系统与装备技术研究所有限公司 一种原子力显微镜的探针的刚度实时调节方法
CN110954714B (zh) * 2019-12-20 2021-10-19 江苏集萃微纳自动化系统与装备技术研究所有限公司 一种原子力显微镜的探针的刚度实时调节方法

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