JP2011002567A5 - - Google Patents

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Publication number
JP2011002567A5
JP2011002567A5 JP2009144279A JP2009144279A JP2011002567A5 JP 2011002567 A5 JP2011002567 A5 JP 2011002567A5 JP 2009144279 A JP2009144279 A JP 2009144279A JP 2009144279 A JP2009144279 A JP 2009144279A JP 2011002567 A5 JP2011002567 A5 JP 2011002567A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009144279A
Other languages
Japanese (ja)
Other versions
JP5290063B2 (en
JP2011002567A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2009144279A priority Critical patent/JP5290063B2/en
Priority claimed from JP2009144279A external-priority patent/JP5290063B2/en
Priority to CN2010102027250A priority patent/CN101930181B/en
Priority to TW099118384A priority patent/TW201100977A/en
Priority to KR1020100056457A priority patent/KR101153605B1/en
Publication of JP2011002567A publication Critical patent/JP2011002567A/en
Publication of JP2011002567A5 publication Critical patent/JP2011002567A5/ja
Application granted granted Critical
Publication of JP5290063B2 publication Critical patent/JP5290063B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009144279A 2009-06-17 2009-06-17 Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate Expired - Fee Related JP5290063B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009144279A JP5290063B2 (en) 2009-06-17 2009-06-17 Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate
CN2010102027250A CN101930181B (en) 2009-06-17 2010-06-07 Proximity exposure apparatus, method for controlling substrate temperature and method of manufacturing panel substrate
TW099118384A TW201100977A (en) 2009-06-17 2010-06-07 Proximity exposure device, its substrate temperature control method, and manufacturing method of a display panel substrate
KR1020100056457A KR101153605B1 (en) 2009-06-17 2010-06-15 Proximity exposure apparatus, method for controlliproximity exposure apparatus, method for controlling a substrate temperature in the porximity exposung a substrate temperature in the porximity exposure apparatus and method of manufacturing a displayre apparatus and method of manufacturing a display panel substrate panel substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009144279A JP5290063B2 (en) 2009-06-17 2009-06-17 Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate

Publications (3)

Publication Number Publication Date
JP2011002567A JP2011002567A (en) 2011-01-06
JP2011002567A5 true JP2011002567A5 (en) 2011-02-17
JP5290063B2 JP5290063B2 (en) 2013-09-18

Family

ID=43369426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009144279A Expired - Fee Related JP5290063B2 (en) 2009-06-17 2009-06-17 Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate

Country Status (4)

Country Link
JP (1) JP5290063B2 (en)
KR (1) KR101153605B1 (en)
CN (1) CN101930181B (en)
TW (1) TW201100977A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5465701B2 (en) * 2011-08-12 2014-04-09 株式会社上村工業 Rapid and high-precision temperature control device for glass substrate surface in manufacturing process of liquid crystal display etc.
CN109901363A (en) * 2017-12-11 2019-06-18 中国科学院光电技术研究所 Negative refraction imaging and photo-etching method and equipment
KR102008509B1 (en) * 2019-06-14 2019-08-07 ㈜ 엘에이티 Display Glass Temperature Control System

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5836738U (en) * 1981-08-31 1983-03-10 三洋電機株式会社 Exposure mask device
JPS62122128A (en) * 1985-11-21 1987-06-03 Nec Corp Proximity exposure device
JPH06252028A (en) * 1993-03-01 1994-09-09 Dainippon Screen Mfg Co Ltd Inert gas purge mechanism of proximity exposure device
JPH0821911A (en) * 1994-07-05 1996-01-23 Toppan Printing Co Ltd Exposing method
JP2000081706A (en) * 1998-09-03 2000-03-21 Adtec Engineeng Co Ltd Aligner
JP2006013401A (en) * 2004-06-29 2006-01-12 Canon Inc Micromachining apparatus
JP2006147778A (en) * 2004-11-18 2006-06-08 Nikon Corp Manufacturing method of exposure device and micro device
JP4781049B2 (en) * 2005-08-30 2011-09-28 キヤノン株式会社 Exposure apparatus and device manufacturing method
JP4472626B2 (en) * 2005-12-14 2010-06-02 株式会社オーク製作所 Exposure equipment

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