JP2011002567A5 - - Google Patents
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- Publication number
- JP2011002567A5 JP2011002567A5 JP2009144279A JP2009144279A JP2011002567A5 JP 2011002567 A5 JP2011002567 A5 JP 2011002567A5 JP 2009144279 A JP2009144279 A JP 2009144279A JP 2009144279 A JP2009144279 A JP 2009144279A JP 2011002567 A5 JP2011002567 A5 JP 2011002567A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009144279A JP5290063B2 (en) | 2009-06-17 | 2009-06-17 | Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate |
CN2010102027250A CN101930181B (en) | 2009-06-17 | 2010-06-07 | Proximity exposure apparatus, method for controlling substrate temperature and method of manufacturing panel substrate |
TW099118384A TW201100977A (en) | 2009-06-17 | 2010-06-07 | Proximity exposure device, its substrate temperature control method, and manufacturing method of a display panel substrate |
KR1020100056457A KR101153605B1 (en) | 2009-06-17 | 2010-06-15 | Proximity exposure apparatus, method for controlliproximity exposure apparatus, method for controlling a substrate temperature in the porximity exposung a substrate temperature in the porximity exposure apparatus and method of manufacturing a displayre apparatus and method of manufacturing a display panel substrate panel substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009144279A JP5290063B2 (en) | 2009-06-17 | 2009-06-17 | Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011002567A JP2011002567A (en) | 2011-01-06 |
JP2011002567A5 true JP2011002567A5 (en) | 2011-02-17 |
JP5290063B2 JP5290063B2 (en) | 2013-09-18 |
Family
ID=43369426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009144279A Expired - Fee Related JP5290063B2 (en) | 2009-06-17 | 2009-06-17 | Proximity exposure apparatus, substrate temperature control method for proximity exposure apparatus, and method for manufacturing display panel substrate |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5290063B2 (en) |
KR (1) | KR101153605B1 (en) |
CN (1) | CN101930181B (en) |
TW (1) | TW201100977A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5465701B2 (en) * | 2011-08-12 | 2014-04-09 | 株式会社上村工業 | Rapid and high-precision temperature control device for glass substrate surface in manufacturing process of liquid crystal display etc. |
CN109901363A (en) * | 2017-12-11 | 2019-06-18 | 中国科学院光电技术研究所 | Negative refraction imaging and photo-etching method and equipment |
KR102008509B1 (en) * | 2019-06-14 | 2019-08-07 | ㈜ 엘에이티 | Display Glass Temperature Control System |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5836738U (en) * | 1981-08-31 | 1983-03-10 | 三洋電機株式会社 | Exposure mask device |
JPS62122128A (en) * | 1985-11-21 | 1987-06-03 | Nec Corp | Proximity exposure device |
JPH06252028A (en) * | 1993-03-01 | 1994-09-09 | Dainippon Screen Mfg Co Ltd | Inert gas purge mechanism of proximity exposure device |
JPH0821911A (en) * | 1994-07-05 | 1996-01-23 | Toppan Printing Co Ltd | Exposing method |
JP2000081706A (en) * | 1998-09-03 | 2000-03-21 | Adtec Engineeng Co Ltd | Aligner |
JP2006013401A (en) * | 2004-06-29 | 2006-01-12 | Canon Inc | Micromachining apparatus |
JP2006147778A (en) * | 2004-11-18 | 2006-06-08 | Nikon Corp | Manufacturing method of exposure device and micro device |
JP4781049B2 (en) * | 2005-08-30 | 2011-09-28 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
JP4472626B2 (en) * | 2005-12-14 | 2010-06-02 | 株式会社オーク製作所 | Exposure equipment |
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2009
- 2009-06-17 JP JP2009144279A patent/JP5290063B2/en not_active Expired - Fee Related
-
2010
- 2010-06-07 TW TW099118384A patent/TW201100977A/en unknown
- 2010-06-07 CN CN2010102027250A patent/CN101930181B/en not_active Expired - Fee Related
- 2010-06-15 KR KR1020100056457A patent/KR101153605B1/en not_active IP Right Cessation