JP2011002442A5 - - Google Patents

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Publication number
JP2011002442A5
JP2011002442A5 JP2009230605A JP2009230605A JP2011002442A5 JP 2011002442 A5 JP2011002442 A5 JP 2011002442A5 JP 2009230605 A JP2009230605 A JP 2009230605A JP 2009230605 A JP2009230605 A JP 2009230605A JP 2011002442 A5 JP2011002442 A5 JP 2011002442A5
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JP
Japan
Prior art keywords
saw sensor
sensor device
fluid
saw
sample chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009230605A
Other languages
English (en)
Japanese (ja)
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JP2011002442A (ja
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Publication date
Priority claimed from KR1020090054394A external-priority patent/KR101657094B1/ko
Application filed filed Critical
Publication of JP2011002442A publication Critical patent/JP2011002442A/ja
Publication of JP2011002442A5 publication Critical patent/JP2011002442A5/ja
Pending legal-status Critical Current

Links

JP2009230605A 2009-06-18 2009-10-02 Sawセンサーデバイス及びこれを利用した流体制御方法 Pending JP2011002442A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090054394A KR101657094B1 (ko) 2009-06-18 2009-06-18 Saw 센서 디바이스 및 이를 이용한 유체 제어 방법

Publications (2)

Publication Number Publication Date
JP2011002442A JP2011002442A (ja) 2011-01-06
JP2011002442A5 true JP2011002442A5 (enExample) 2013-04-04

Family

ID=43353114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009230605A Pending JP2011002442A (ja) 2009-06-18 2009-10-02 Sawセンサーデバイス及びこれを利用した流体制御方法

Country Status (3)

Country Link
US (2) US8247949B2 (enExample)
JP (1) JP2011002442A (enExample)
KR (1) KR101657094B1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101657094B1 (ko) * 2009-06-18 2016-09-13 삼성전자주식회사 Saw 센서 디바이스 및 이를 이용한 유체 제어 방법
WO2014062190A1 (en) * 2012-10-19 2014-04-24 Technology Development Llc Empire Analyte detection system with cleaning phase and renewable liquid sensing material and methods therefore
EP2989329A1 (de) * 2013-04-26 2016-03-02 Sulzer Pumpen AG Verfahren zur beurteilung eines verschleisszustandes einer baugruppe einer strömungsmaschine, baugruppe, sowie strömungsmaschine
US11346787B2 (en) 2016-09-30 2022-05-31 Kyocera Corporation Detection sensor, detection sensor kit, sensor device, method for producing detection sensor, and detection method
CN111373658B (zh) * 2017-07-07 2024-05-17 艾维亚纳分子技术有限公司 用于接合流体材料的感测器的方法和装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5918258A (en) * 1996-07-11 1999-06-29 Bowers; William D. High-sensitivity instrument to measure NVR in fluids
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
JP4464172B2 (ja) * 2003-03-31 2010-05-19 キヤノン株式会社 生化学反応カートリッジ及びその使用方法
JP4694945B2 (ja) * 2005-01-26 2011-06-08 セイコーインスツル株式会社 反応器、マイクロリアクタチップ、及びマイクロリアクタシステム、並びに反応器の製造方法
JP4671346B2 (ja) * 2005-09-13 2011-04-13 キヤノン株式会社 液体充填性を向上させた生化学反応カセット
CN101360679B (zh) * 2005-12-09 2013-07-10 京瓷株式会社 流体驱动器和使用该流体驱动器的发热装置以及分析装置
US7229821B1 (en) * 2006-02-16 2007-06-12 P.J. Edmonson Ltd. Acoustic wave RFID/biosensor assemblies
WO2008019693A2 (en) * 2006-08-17 2008-02-21 Atonomics A/S Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
KR20080090645A (ko) 2007-04-05 2008-10-09 대성산업가스 주식회사 진공발생기를 구비하는 산소농도분석기
KR101657094B1 (ko) * 2009-06-18 2016-09-13 삼성전자주식회사 Saw 센서 디바이스 및 이를 이용한 유체 제어 방법

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