KR101657094B1 - Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법 - Google Patents

Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법 Download PDF

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Publication number
KR101657094B1
KR101657094B1 KR1020090054394A KR20090054394A KR101657094B1 KR 101657094 B1 KR101657094 B1 KR 101657094B1 KR 1020090054394 A KR1020090054394 A KR 1020090054394A KR 20090054394 A KR20090054394 A KR 20090054394A KR 101657094 B1 KR101657094 B1 KR 101657094B1
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South Korea
Prior art keywords
saw sensor
fluid
sensor device
chamber
sample
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KR1020090054394A
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English (en)
Korean (ko)
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KR20100136172A (ko
Inventor
이헌주
이수석
조은철
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삼성전자주식회사
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Priority to KR1020090054394A priority Critical patent/KR101657094B1/ko
Priority to US12/568,724 priority patent/US8247949B2/en
Priority to JP2009230605A priority patent/JP2011002442A/ja
Publication of KR20100136172A publication Critical patent/KR20100136172A/ko
Priority to US13/541,610 priority patent/US8456062B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Hematology (AREA)
  • Biomedical Technology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
KR1020090054394A 2009-06-18 2009-06-18 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법 Expired - Fee Related KR101657094B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020090054394A KR101657094B1 (ko) 2009-06-18 2009-06-18 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법
US12/568,724 US8247949B2 (en) 2009-06-18 2009-09-29 Surface acoustic wave sensor device and method of controlling liquid using the same
JP2009230605A JP2011002442A (ja) 2009-06-18 2009-10-02 Ｓａｗセンサーデバイス及びこれを利用した流体制御方法
US13/541,610 US8456062B2 (en) 2009-06-18 2012-07-03 Surface acoustic wave sensor device and method of controlling liquid using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090054394A KR101657094B1 (ko) 2009-06-18 2009-06-18 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법

Publications (2)

Publication Number Publication Date
KR20100136172A KR20100136172A (ko) 2010-12-28
KR101657094B1 true KR101657094B1 (ko) 2016-09-13

Family

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Family Applications (1)

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KR1020090054394A Expired - Fee Related KR101657094B1 (ko) 2009-06-18 2009-06-18 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법

Country Status (3)

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US (2) US8247949B2 (enExample)
JP (1) JP2011002442A (enExample)
KR (1) KR101657094B1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101657094B1 (ko) * 2009-06-18 2016-09-13 삼성전자주식회사 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법
WO2014062190A1 (en) * 2012-10-19 2014-04-24 Technology Development Llc Empire Analyte detection system with cleaning phase and renewable liquid sensing material and methods therefore
EP2989329A1 (de) * 2013-04-26 2016-03-02 Sulzer Pumpen AG Verfahren zur beurteilung eines verschleisszustandes einer baugruppe einer strömungsmaschine, baugruppe, sowie strömungsmaschine
US11346787B2 (en) 2016-09-30 2022-05-31 Kyocera Corporation Detection sensor, detection sensor kit, sensor device, method for producing detection sensor, and detection method
CN111373658B (zh) * 2017-07-07 2024-05-17 艾维亚纳分子技术有限公司 用于接合流体材料的感测器的方法和装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006234791A (ja) * 2005-01-26 2006-09-07 Seiko Instruments Inc 反応器、マイクロリアクタチップ、及びマイクロリアクタシステム、並びに反応器の製造方法
JP2007078490A (ja) * 2005-09-13 2007-03-29 Canon Inc 液体充填性を向上させた生化学反応カセット
WO2008019693A2 (en) * 2006-08-17 2008-02-21 Atonomics A/S Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
JP2008524626A (ja) * 2004-12-20 2008-07-10 ハネウェル・インターナショナル・インコーポレーテッド 閉ループ調節を備える小型流量制御装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5918258A (en) * 1996-07-11 1999-06-29 Bowers; William D. High-sensitivity instrument to measure NVR in fluids
JP4464172B2 (ja) * 2003-03-31 2010-05-19 キヤノン株式会社 生化学反応カートリッジ及びその使用方法
CN101360679B (zh) * 2005-12-09 2013-07-10 京瓷株式会社 流体驱动器和使用该流体驱动器的发热装置以及分析装置
US7229821B1 (en) * 2006-02-16 2007-06-12 P.J. Edmonson Ltd. Acoustic wave RFID/biosensor assemblies
KR20080090645A (ko) 2007-04-05 2008-10-09 대성산업가스 주식회사 진공발생기를 구비하는 산소농도분석기
KR101657094B1 (ko) * 2009-06-18 2016-09-13 삼성전자주식회사 Ｓａｗ 센서 디바이스 및 이를 이용한 유체 제어 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008524626A (ja) * 2004-12-20 2008-07-10 ハネウェル・インターナショナル・インコーポレーテッド 閉ループ調節を備える小型流量制御装置
JP2006234791A (ja) * 2005-01-26 2006-09-07 Seiko Instruments Inc 反応器、マイクロリアクタチップ、及びマイクロリアクタシステム、並びに反応器の製造方法
JP2007078490A (ja) * 2005-09-13 2007-03-29 Canon Inc 液体充填性を向上させた生化学反応カセット
WO2008019693A2 (en) * 2006-08-17 2008-02-21 Atonomics A/S Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte

Also Published As

Publication number Publication date
KR20100136172A (ko) 2010-12-28
JP2011002442A (ja) 2011-01-06
US8456062B2 (en) 2013-06-04
US8247949B2 (en) 2012-08-21
US20120266664A1 (en) 2012-10-25
US20100319439A1 (en) 2010-12-23

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