JP2010519723A - エレクトロマイグレーションに対する向上した信頼度を有する相互接続構造体及びその製造方法 - Google Patents
エレクトロマイグレーションに対する向上した信頼度を有する相互接続構造体及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000003989 dielectric material Substances 0.000 claims abstract description 61
- 230000002265 prevention Effects 0.000 claims abstract description 51
- 230000004888 barrier function Effects 0.000 claims abstract description 38
- 238000009792 diffusion process Methods 0.000 claims abstract description 38
- 239000004020 conductor Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 8
- 238000005137 deposition process Methods 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- CNCZOAMEKQQFOA-HZQGBTCBSA-N 4-[(2s,3s,4r,5r,6r)-4,5-bis(3-carboxypropanoyloxy)-2-methyl-6-[[(2r,3r,4s,5r,6s)-3,4,5-tris(3-carboxypropanoyloxy)-6-[2-(3,4-dihydroxyphenyl)-5,7-dihydroxy-4-oxochromen-3-yl]oxyoxan-2-yl]methoxy]oxan-3-yl]oxy-4-oxobutanoic acid Chemical compound OC(=O)CCC(=O)O[C@@H]1[C@H](OC(=O)CCC(O)=O)[C@@H](OC(=O)CCC(O)=O)[C@H](C)O[C@H]1OC[C@@H]1[C@@H](OC(=O)CCC(O)=O)[C@H](OC(=O)CCC(O)=O)[C@@H](OC(=O)CCC(O)=O)[C@H](OC=2C(C3=C(O)C=C(O)C=C3OC=2C=2C=C(O)C(O)=CC=2)=O)O1 CNCZOAMEKQQFOA-HZQGBTCBSA-N 0.000 claims description 4
- 241001521328 Ruta Species 0.000 claims description 4
- 235000003976 Ruta Nutrition 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229920000412 polyarylene Polymers 0.000 claims description 4
- 235000005806 ruta Nutrition 0.000 claims description 4
- -1 silsesquioxane Inorganic materials 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 150000002170 ethers Chemical class 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 31
- 239000002184 metal Substances 0.000 abstract description 31
- 239000004065 semiconductor Substances 0.000 description 25
- 239000000463 material Substances 0.000 description 16
- 239000000758 substrate Substances 0.000 description 16
- 238000012545 processing Methods 0.000 description 10
- 239000010949 copper Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- 229910016570 AlCu Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 125000005647 linker group Chemical group 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76847—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned within the main fill metal
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Abstract
エレクトロマイグレーション(EM)に対する向上した信頼度を有する相互接続構造体を提供すること。
【解決手段】
本発明の相互接続構造体は、EM防止ライナ(66)を金属相互接続部内に少なくとも部分的に組み込むことによって、EM故障により引き起こされる回路不良開口を回避する。1つの実施形態において、導電性材料(64、68)を誘電体材料(54B)から分離する拡散障壁に当接する「U字形」のEM防止ライナ(66)が設けられる。別の実施形態においては、「U字形」EM防止ライナと拡散障壁との間には空間が配置される。さらに別の実施形態において、拡散障壁に当接する水平EMライナが設けられる。さらに別の実施形態において、水平EMライナと拡散障壁との間には空間が存在する。
【選択図】 図3
Description
52A:第1の接続レベル
52B:第2の接続レベル
54A:第1の誘電体材料
54B:第2の誘電体材料
56:導電体構造部
58、58’:拡散障壁
60、60’:誘電体キャップ層
64、68:導電性材料
66:EM防止ライナ
Claims (30)
- 内部に配置された少なくとも1つの導電性充填構造部(64)を有する誘電体材料(54B)を含む相互接続構造体であって、前記少なくとも1つの導電性充填構造部は、前記少なくとも1つの導電性充填構造部の第1の導電性領域(64)を前記少なくとも1つの導電性充填構造部の第2の導電性領域(68)から少なくとも部分的に分離するエレクトロマイグレーション(EM)防止ライナ(66)を含む、相互接続構造体。
- 前記少なくとも1つの導電性充填構造部を前記誘電体材料から分離する拡散障壁をさらに含む、請求項1に記載の相互接続構造体。
- 前記EM防止ライナは、U字形であり、前記EM防止ライナは、前記拡散障壁に当接する、請求項2に記載の相互接続構造体。
- 前記EM防止ライナは、U字形であり、前記EM防止ライナと前記拡散障壁との間に空間が存在する、請求項2に記載の相互接続構造体。
- 前記EM防止ライナは、前記拡散障壁に当接する水平EMライナである、請求項2に記載の相互接続構造体。
- 前記EM防止ライナは、水平EMライナであり、前記水平EMライナと前記拡散障壁との間に空間が存在する、請求項2に記載の相互接続構造体。
- 前記誘電体材料は、4.0又はそれ以下の誘電率を有する、請求項1に記載の相互接続構造体。
- 前記誘電体材料は、SiO2、シルセスキオキサン、Si、C、O及びH原子を含むCドープ酸化物、熱硬化性ポリアリーレンエーテル、又はこれらの多層から構成される、請求項7に記載の相互接続構造体。
- 前記EM防止ライナは、Ta、TaN、Ti、TiN、Ru、RuN、RuTa、RuTaN、Ir、IrCu、又はCo(W,B,P,Mo,Re)から構成される、請求項1に記載の相互接続構造体。
- 前記少なくとも1つの開口部は、ライン開口部である、請求項1に記載の相互接続構造体。
- 前記少なくとも1つの開口部は、組み合わされたライン開口部及びビア開口部である、請求項1に記載の相互接続構造体。
- 前記誘電体材料は、下部相互接続レベルの上に位置する上部相互接続レベルであり、前記下部相互接続レベルは、内部に埋め込まれた別の導電性構造部を有する別の誘電体材料を含む、請求項1に記載の相互接続構造体。
- 前記上部相互接続レベル及び前記下部相互接続レベルは、誘電体キャップ層によって部分的に分離される、請求項12に記載の相互接続構造体。
- 内部に配置された少なくとも1つの導電性充填構造部を有する誘電体材料を含む相互接続構造体であって、前記少なくとも1つの導電性充填構造部は、拡散障壁によって前記誘電体材料から分離され、前記少なくとも1つの導電性充填構造部は、下部導電性材料を上部導電性材料から分離し、かつ前記拡散障壁に当接する水平エレクトロマイグレーション(EM)防止ライナを含む、相互接続構造体。
- 前記誘電体材料は、4.0又はそれ以下の誘電率を有する、請求項14に記載の相互接続構造体。
- 前記誘電体材料は、SiO2、シルセスキオキサン、Si、C、O及びH原子を含むCドープ酸化物、熱硬化性ポリアリーレンエーテル、又はこれらの多層から構成される、請求項15に記載の相互接続構造体。
- 前記水平EM防止ライナは、Ta、TaN、Ti、TiN、Ru、RuN、RuTa、RuTaN、Ir、IrCu、又はCo(W,B,P,Mo,Re)から構成される、請求項14に記載の相互接続構造体。
- 前記少なくとも1つの開口部は、ライン開口部である、請求項14に記載の相互接続構造体。
- 前記少なくとも1つの開口部は、組み合わされたライン開口部及びビア開口部である、請求項14に記載の相互接続構造体。
- 前記誘電体材料は、下部相互接続レベルの上に位置する上部相互接続レベルであり、前記下部相互接続レベルは、内部に埋め込まれた別の導電性構造部を有する別の誘電体材料を含む、請求項14に記載の相互接続構造体。
- 前記上部相互接続レベル及び前記下部相互接続レベルは、誘電体キャップ層によって部分的に分離される、請求項20に記載の相互接続構造体。
- 相互接続構造体を製造する方法であって、
誘電体材料内に少なくとも1つの開口部を設けるステップであって、前記少なくとも1つの開口部が拡散障壁で内部を覆われる、ステップと、
前記少なくとも1つの開口部内に第1の導電性領域を形成するステップと、
少なくとも前記第1の導電性領域の表面上にエレクトロマイグレーション(EM)防止ライナを形成するステップと、
前記EM防止ライナ上に第2の導電性領域を形成するステップであって、前記第1及び第2の導電性領域が、前記誘電体材料内に導電性構造部を形成する、ステップと、
を含む方法。 - 前記EM防止ライナは、U字形であり、前記EM防止ライナは、前記拡散障壁に当接する、請求項22に記載の方法。
- 前記EM防止ライナは、U字形であり、前記EM防止ライナと前記拡散障壁との間に空間が存在する、請求項22に記載の方法。
- 前記EM防止ライナは、前記拡散障壁に当接する水平EMライナである、請求項22に記載の方法。
- 前記EM防止ライナは、水平EMライナであり、前記水平EMライナと前記拡散障壁との間に空間が存在する、請求項22に記載の方法。
- 前記第1の導電性領域を形成する前記ステップは、ボトムアップ堆積充填プロセスを含む、請求項22に記載の方法。
- 前記EM防止ライナを形成する前記ステップは、非選択的堆積プロセスを含む、請求項22に記載の方法。
- 前記EM防止ライナを形成する前記ステップは、指向性又は選択的堆積プロセスを含む、請求項22に記載の方法。
- 前記誘電体材料上に誘電体キャップ層を形成するステップをさらに含む、請求項22に記載の方法。
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US11/560,044 US7569475B2 (en) | 2006-11-15 | 2006-11-15 | Interconnect structure having enhanced electromigration reliability and a method of fabricating same |
PCT/US2007/077975 WO2008060745A1 (en) | 2006-11-15 | 2007-09-10 | Interconnect structure having enhanced electromigration reliability and a method of fabricating same |
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JP5274475B2 (ja) | 2013-08-28 |
US20090289368A1 (en) | 2009-11-26 |
US8138083B2 (en) | 2012-03-20 |
US20080111239A1 (en) | 2008-05-15 |
KR20090080514A (ko) | 2009-07-24 |
US7569475B2 (en) | 2009-08-04 |
EP2095409A4 (en) | 2014-05-21 |
EP2095409A1 (en) | 2009-09-02 |
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