JP2010284757A - Robot, conveyance apparatus, and power supply method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a robot, conveyance apparatus, and a power supply method, capable of eliminating use of a power supply cable that is used for power supply to an inertia sensor mounted on a rotatably or slidably supported moving portion and reaches the moving portion from a base through a support portion for rotatable or slidable support and a power transmission mechanism for transmitting power for power generation. <P>SOLUTION: The robot 20 includes: an arm 21 whose one end supports a working terminal and whose other end is rotatably supported; a drive source for rotating the arm; an inertia sensor 32 that is mounted on the arm, detects an angular velocity of the rotating arm and outputs information on the angular velocity of the arm; a power generation apparatus 40 that is mounted on the arm and supplies electric power to the inertial sensor; and a secondary cell 52 for storing electric power generated by the power generation apparatus. The power generation apparatus is a generator or a solar battery driven by kinetic energy of the arm 21 and is installed in the vicinity of the sensor. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention is a robot that moves a terminal device attached to the tip of an arm to a desired position, a transfer device that moves the terminal device attached to a moving member to a desired position, and an arm attached to the tip or moving member of the arm. The present invention relates to a power supply method for supplying power to a sensor.

2. Description of the Related Art Conventionally, a device such as a robot that moves a terminal device attached to the tip of an arm to a desired position by rotating the arm and operates the terminal device at the position is known. For example, a feeding / unloading material apparatus that includes a gripping terminal and feeds / unprocesses a workpiece with respect to a processing apparatus, a painting robot that includes a painting terminal, a welding robot that includes a welding terminal, and the like are known.
When driving a robot, a control method is used in which the rotation angle of a drive source such as a motor driving a robot arm is measured, and the tip position of the arm is controlled based on the measured angle information. However, because the transmission mechanism and the arm that transmit the driving force from the drive source to the arm are not rigid, the transmission mechanism and the arm are deformed. In some cases, the position does not necessarily match the actual position. In addition, there is a problem that vibration is generated by the deformation of the transmission mechanism and the arm during operation. To solve these problems, a method has been devised in which an inertial sensor is attached to the tip of an arm to measure the movement of the tip, and the obtained angular velocity information from the inertial sensor is used for control. Patent Document 1 discloses a method for controlling an articulated robot that can perform high-precision positioning even when rigidity is low by controlling an arm operation based on an output signal of an inertial sensor, and can prevent a reduction in accuracy due to vibration. And an articulated robot.

However, since the inertial sensor is provided at the tip of the arm, it is necessary to supply power for driving the inertial sensor. Therefore, the base of the robot and the tip of the arm must be electrically connected. There is a possibility that a malfunction may occur in an apparatus that may get wet.
In Patent Document 2, a generator is provided at the tip of the arm, and a power transmission mechanism from the power shaft for driving the arm to the generator is provided to electrically connect the base of the robot and the tip of the arm. There has been disclosed a sensor power supply device for a power distribution robot that can supply power to the tip of an arm without any problem.

Japanese Patent Laid-Open No. 7-9374 JP 2001-233598 A

However, in the apparatus disclosed in Patent Document 1, since an inertial sensor is provided at the tip of the arm, electric power for driving the inertial sensor is supplied via a connecting portion that is deformed to rotate the arm. There is a need. For this reason, in addition to the above-described problems, there is a problem in that a disconnection or the like may occur because the power supply cable is bent at the connection portion. A cable excellent in durability that hardly causes disconnection or the like has a problem that it is heavier and has a larger volume, which may impair the downsizing of the device. Further, in order to maintain the reliability of the apparatus, it is necessary to frequently perform maintenance, and there is a problem that maintenance costs increase.
The device disclosed in Patent Document 2 requires a power shaft that reaches the vicinity of the tip of the arm, and has a problem that it cannot be applied to a device that does not have such a power shaft. Even a device having a power shaft that has reached the vicinity of the tip of the arm has a problem in that it is necessary to provide a power transmission mechanism from the power shaft to the generator and to provide a complicated power transmission mechanism.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A robot according to this application example includes an arm that supports a work terminal at one end and is rotatably supported at the other end, a drive source for rotating the arm, and an attachment to the arm. An inertial sensor that detects angular velocity at which the arm rotates and outputs angular velocity information of the arm, and a power generation device that is attached to the arm and supplies power to the inertial sensor, The power generator includes energy acquisition means for acquiring energy for conversion into electric power at a position where the power generator is disposed.

  According to the robot according to this application example, the power generation device includes the energy acquisition unit that acquires energy for conversion into electric power at a position where the power generation device is disposed. This eliminates the need for the power generation apparatus to acquire energy for conversion into electric power via the robot base or arm. This eliminates the need for a power supply cable that reaches the arm from the robot's base or a power transmission mechanism that transmits power for power generation, and the configuration of the robot is complicated by the provision of the cable and power transmission mechanism. It can be suppressed. Maintenance for ensuring the reliability of the cable and the power transmission mechanism is unnecessary, and the cost for maintenance can be suppressed.

  Application Example 2 In the robot according to the application example described above, the energy acquisition unit converts a part of inertial force acting on a member constituting the power generation device into kinetic energy of the member constituting the power generation device. It is preferable to acquire energy for converting to electric power.

  According to this robot, the energy acquisition means converts a part of the inertial force acting on the member constituting the power generation device into the kinetic energy of the member constituting the power generation device. When the arm is rotated by the drive source, an inertial force also acts on members constituting the power generation device attached to the arm. Therefore, when the arm is rotated, the kinetic energy of the member increases, so that a state in which the member is moving relative to the fixed portion of the power generation device can be formed. By disposing a magnet on one of the fixed portion and the member and a coil on the other, the member can move relative to the fixed portion to generate electric power.

  Application Example 3 In the robot according to the application example described above, it is preferable that the energy acquisition unit acquires energy for conversion into electric power by causing the electrons to absorb light energy and generating conduction electrons. .

  According to this robot, the energy acquisition unit causes the electrons to absorb light energy and generate conduction electrons. By taking out the conduction electrons, it can be used as electric power.

  Application Example 4 It is preferable that the robot according to the application example further includes a power storage device that stores electric power generated by the power generation device.

  According to this robot, electric power can be stored by the power storage device. Thereby, electric power can be stably supplied to an inertial sensor.

  [Application Example 5] A transfer device according to this application example supports a work terminal and is slidably supported, a drive source for moving the movement unit, and attached to the movement unit. And an inertial sensor that detects inertial force acting when the moving part is moved and outputs inertial force information acting on the moving part, and a power generation device attached to the moving part, and The power generation device includes energy acquisition means for acquiring energy for conversion into electric power at a position where the power generation device is disposed.

  According to the transfer device according to this application example, the power generation device includes energy acquisition means for acquiring energy for conversion into electric power at a position where the power generation device is disposed. Thereby, it is not necessary for the power generation device to acquire energy for conversion into electric power through the substrate or the moving unit of the transport device. For this reason, there is no need for a power supply cable that reaches the moving unit from the base of the transport device, a power transmission mechanism that transmits power for power generation, and the configuration of the transport device by including the cable and the power transmission mechanism. Can be prevented from becoming complicated. Maintenance for ensuring the reliability of the cable and the power transmission mechanism is unnecessary, and the cost for maintenance can be suppressed.

  Application Example 6 In the transfer device according to the application example described above, the energy acquisition unit converts a part of inertial force acting on a member constituting the power generation device into kinetic energy of the member constituting the power generation device. Therefore, it is preferable to acquire energy for converting into electric power.

  According to this transport device, the energy acquisition means converts a part of the inertial force acting on the member constituting the power generation device into the kinetic energy of the member constituting the power generation device. When the moving unit is moved by the drive source, an inertial force also acts on members constituting the power generation device attached to the moving unit. Therefore, when the moving part is moved, the kinetic energy of the member increases, so that a state in which the member moves relative to the fixed part of the power generation device can be formed. By disposing a magnet on one of the fixed portion and the member and a coil on the other, the member can move relative to the fixed portion to generate electric power.

  Application Example 7 In the transfer device according to the application example described above, the energy acquisition unit may acquire energy for converting into electric power by causing the electrons to absorb light energy and generating conduction electrons. preferable.

  According to this transport device, the energy acquisition means causes the electrons to absorb light energy and generate conduction electrons. By extracting the conduction electrons, a state in which the conduction electrons can be used can be obtained.

  Application Example 8 It is preferable that the transfer device according to the application example further includes a power storage device that stores electric power generated by the power generation device.

  According to this transport device, electric power can be stored by the power storage device. Thereby, electric power can be stably supplied to an inertial sensor.

  [Application Example 9] A power supply method according to this application example is a power supply method for supplying power to an inertial sensor attached to a moving part supported rotatably or slidably, and is attached to the moving part. An energy acquisition step of acquiring energy for conversion into electric power by the obtained energy acquisition means, and a power generation step of generating electric power by converting the energy acquired in the energy acquisition step into electric power .

According to the power supply method according to this application example, in the energy acquisition step, energy for conversion into electric power is acquired by the energy acquisition unit attached to the moving unit. In the power generation process, power is generated by converting the energy acquired in the energy acquisition process into electric power.
Thereby, it is not necessary to acquire the energy for converting into electric power in a power generation process via the support part which can be rotated or slidably supported by the moving part supported so as to be rotated or slidable. Therefore, there is no need for a power supply cable that reaches the moving part via a support part that can rotate or slide, a power transmission mechanism that transmits power for power generation, and the like. By comprising, it can suppress that the structure of an apparatus provided with a moving part becomes complicated. Maintenance for ensuring the reliability of the cable and the power transmission mechanism is unnecessary, and the cost for maintenance can be suppressed.

  Application Example 10 In the power supply method according to the application example described above, in the energy acquisition process, when the moving unit is rotated or slid, an inertial force acting on a member constituting a device that performs the power generation process. It is preferable to acquire the energy for converting into electric power by converting into the kinetic energy of the member which comprises the apparatus which implements the said electric power generation process.

  According to this power supply method, in the energy acquisition process, the inertial force is converted into kinetic energy of the members constituting the device that performs the power generation process. Therefore, when the moving part is moved, the kinetic energy of the member increases, so that a state in which the member is moving relative to the fixed part of the device that performs the power generation process can be formed. By disposing a magnet on one of the fixed portion and the member and a coil on the other, the member can move relative to the fixed portion to generate electric power.

  [Application Example 11] In the power supply method according to the application example described above, in the energy acquisition step, the energy for converting light into power is acquired by causing the electrons to absorb light energy and generating conduction electrons. Is preferred.

  According to this power supply method, in the energy acquisition step, the energy acquisition means causes the electrons to absorb light energy and generate conduction electrons. In the power generation step, the conduction electrons can be taken out and used as electric power.

  Application Example 12 It is preferable that the power supply method according to the application example further includes a power storage process for storing the power generated in the power generation process.

  According to this power supply method, power is accumulated in the power storage process. As a result, in addition to the power generated in the power generation process, the power stored in the power storage process can be supplied to the inertial sensor, so that the power can be stably supplied to the inertial sensor.

The external appearance perspective view which shows schematic structure of a feeding / dispensing material apparatus. The functional structure block diagram which shows the functional structure which drives a robot mechanism. The schematic diagram which shows the main structures of an electric power generating apparatus. The external appearance perspective view which shows schematic structure of a feeding / dispensing material apparatus. (A) is an external appearance perspective view which shows schematic structure of a ceiling suspension conveyance apparatus. FIG. 2B is an external perspective view illustrating a schematic configuration of a head conveyance device in the printing apparatus. The schematic diagram which shows the main structures of an electric power generating apparatus.

  Hereinafter, an embodiment of a robot, a transfer device, and a power supply method will be described with reference to the drawings. In the drawings referred to in the following description, the vertical and horizontal scales of members or parts and the scales of each part may be shown differently from actual ones in order to display the constituent members in an easy-to-understand manner.

(First embodiment)
A first embodiment that is an embodiment of a robot, a transfer device, and a power supply method will be described. The present embodiment will be described with reference to an example of a feeding / dispensing device that is an example of a transport device. The supply / discharge material apparatus according to the present embodiment is, for example, a supply / discharge material apparatus that handles a wafer in which a plurality of semiconductor chips constituting a semiconductor device are partitioned in a semiconductor device manufacturing process.

<Feeding material equipment>
First, the mechanical configuration of the supply / discharge material apparatus 10 will be described with reference to FIG. FIG. 1 is an external perspective view showing a schematic configuration of the supply / discharge material apparatus.
As shown in FIG. 1, the supply / discharge material device 10 includes a holding hand 12, a robot mechanism 20, a supply / discharge material device control unit 30, an angular velocity sensor 32, an angle sensor 34 (see FIG. 2), and a power supply device. 50.

The robot mechanism 20 includes a hand holding mechanism 24, a supply / discharge material arm 21, an arm shaft portion 26, and a machine base 28. The machine base 28 supports the arm shaft portion 26 so as to be rotatable around the rotation axis of the arm shaft portion 26 and precisely positioned and fixed via a built-in bearing mechanism (not shown). The arm shaft portion 26 is connected to an arm drive motor 22 (see FIG. 2) built in the machine base 28 via an arm drive mechanism 23 (see FIG. 2), and is rotated by the arm drive motor 22. . An angle sensor 34 is connected to the arm drive motor 22, and the rotation angle of the arm drive motor 22 is measured by the angle sensor 34.
One end of the supply / discharge material arm 21 is fixed to the end of the arm shaft portion 26 opposite to the side supported by the machine base 28. The feed / release material arm 21 is rotated about the rotation axis of the arm shaft portion 26 by the arm drive motor 22. The rotation angle of the feed / release material arm 21 is measured by measuring the rotation angle of the arm drive motor 22 by the angle sensor 34.

A hand holding mechanism 24 is fixed to the opposite end of the supply / discharge material arm 21 fixed to the arm shaft portion 26. The hand holding mechanism 24 includes a holding bearing 24a fixed to the supply / discharge material arm 21, and a holding mechanism shaft 24b supported by the holding bearing 24a so as to be slidable and capable of being precisely positioned and fixed. The holding mechanism shaft 24b can be slid in the axial direction of the holding mechanism shaft 24b with respect to the holding bearing 24a by a vertical drive source (not shown). The axial direction of the holding mechanism shaft 24 b is substantially parallel to the axial direction of the arm shaft portion 26.
The holding hand 12 is attached to the free end of the holding mechanism shaft 24b. By rotating the feeding / dispensing material arm 21, the holding hand 12 is positioned at a position facing the conveyance object. By sliding the holding mechanism shaft 24b with respect to the holding bearing 24a, the holding hand 12 is brought into and out of contact with the object to be conveyed, and the object to be conveyed held by the holding hand 12 is lifted from the placement place or placed. Or approach the place.

An angular velocity sensor 32 is fixed to the hand holding mechanism 24 to which the holding hand 12 is attached on the side opposite to the holding hand 12. That is, the angular velocity sensor 32 is fixed to the upper surface near the tip of the supply / discharge material arm 21 and can measure the angular velocity at which the supply / discharge material arm 21 is rotated.
The power supply device 50 includes a power generation device 40 and a secondary battery 52. The secondary battery 52 is disposed at a position adjacent to the angular velocity sensor 32 on the upper surface of the supply / discharge material arm 21. The secondary battery 52 is electrically connected to the power supply terminal of the angular velocity sensor 32.
The power generation device 40 is disposed at a position adjacent to the secondary battery 52 on the upper surface of the supply / discharge material arm 21. The output terminal of the power generation device 40 is connected to the power source terminal of the secondary battery 52 and the angular velocity sensor 32. In the power generation device 40, a built-in sliding weight 41 (see FIG. 3) is arranged in a state of sliding in a direction connecting the shaft of the holding mechanism shaft 24b and the shaft of the arm shaft portion 26.
The material supply / control device controller 30 performs overall control of the operation of each part of the material supply / discharge material device 10 based on a control program input in advance via an information input / output device (not shown).

<Functional configuration of robot mechanism>
Next, a functional configuration for driving the robot mechanism 20 will be described with reference to FIG. FIG. 2 is a functional configuration block diagram showing a functional configuration for driving the robot mechanism.
As described above, in order to rotate the feeding / discharging material arm 21, the feeding / dispensing material device 10 includes an arm driving motor 22, an arm driving mechanism 23, an angular velocity sensor 32, an angle sensor 34, and a power supply device 50. And a material supply / control device control unit 30.
As the angular velocity sensor 32, for example, a gyro sensor can be used. For example, an encoder can be used as the angle sensor 34. The feed / release material arm 21 corresponds to an arm, the robot mechanism 20 corresponds to a robot, the arm drive motor 22 corresponds to a drive source, and the angular velocity sensor 32 corresponds to an inertial sensor.

As shown in FIG. 2, the material supply / control device control unit 30 includes a robot control unit 31 for controlling the arm drive motor 22. The robot control unit 31 includes a control command generation unit 36, an arm operation control unit 38, and a motor driver 39.
The control command generation unit 36 outputs an operation command for the supply / removal material arm 21 for executing an operation command for the robot mechanism 20 based on an operation command for material supply or material removal. The operation command is input to the material supply / discharge material device 10 from an input device (not shown). An operation command of the robot mechanism 20 based on the operation command is output from the overall control unit (not shown) included in the supply / discharge material apparatus control unit 30 to the control command generation unit 36. For example, the operation command of the supply / discharge material arm 21 output by the control command generator 36 is commanded such that the trajectory of the tip of the supply / discharge material arm 21 is the position of the tip of the supply / discharge material arm 21 for each hour.

The arm operation control unit 38 outputs a control signal of the arm drive motor 22 for executing the operation command of the supply / discharge material arm 21 output by the control command generating unit 36. The arm operation control unit 38 determines an optimal control signal of the arm drive motor 22 for executing the operation command of the supply / discharge material arm 21 based on the angle information from the angle sensor 34 and the angular velocity information from the angular velocity sensor 32. Generate and output. The motor driver 39 supplies power to the arm drive motor 22 according to the control signal output from the arm operation control unit 38 to drive the arm drive motor 22. When the arm drive motor 22 is driven, the supply / discharge material arm 21 is rotated about the arm shaft portion 26 via the arm drive mechanism 23.
The rotation angle of the motor shaft driven by the arm drive motor 22 is measured by the angle sensor 34 connected to the motor shaft of the arm drive motor 22, and the arm operation is performed as the rotation angle information of the supply / discharge material arm 21. It is sent to the control unit 38. The angular velocity at which the feed / release material arm 21 is rotated is measured by an angular velocity sensor 32 fixed to the upper surface near the tip of the feed / release material arm 21, and the arm operation control unit 38 is used as angular velocity information of the feed / release material arm 21. Sent to.

  The angular velocity sensor 32 is connected to the power generation device 40 of the power supply device 50 and the secondary battery 52. The electric power generated by the power generation device 40 or the electric power generated by the power generation device 40 and stored in the secondary battery 52 is supplied to the angular velocity sensor 32 as electric power for driving the angular velocity sensor 32.

<Power generation device>
Next, the configuration of the power generation device 40 will be described with reference to FIG. FIG. 3 is a schematic diagram illustrating a main configuration of the power generation device.
As shown in FIG. 3, the power generation device 40 includes a sliding weight 41, a sliding weight spring 48, a transmission gear 42, an intermediate gear 43, a rotor 44, a stator 45, a magnetic core 46, and a coil 47. And a rectifier circuit 54.

The sliding weight 41 has a substantially rectangular parallelepiped shape. The sliding weight 41 is slidable in the longitudinal direction of the substantially rectangular parallelepiped shape indicated by the arrow a or the arrow b in FIG. 3, and the movement of the sliding weight 41 in other directions is restricted. Is attached. As described above, the slidable direction of the sliding weight 41 (the direction indicated by the arrow a or the arrow b) substantially coincides with the direction connecting the axis of the holding mechanism shaft 24b and the axis of the arm shaft portion 26. ing.
One end of a sliding weight spring 48 is fixed to the end of the sliding weight 41 on the side close to the arm shaft portion 26. The other end of the sliding weight spring 48 is fixed to a fixed wall 49 formed on the base of the power generation device 40 (not shown). When the sliding weight 41 slides in the direction of arrow a or arrow b, the sliding weight spring 48 expands and contracts, and a force in a direction to return the sliding weight 41 to the original position is applied to the sliding weight 41.
Rack teeth (not shown) are formed on one surface of the sliding weight 41 extending in the longitudinal direction. A small gear 42a of the transmission gear 42 is engaged with the rack. The large gear 42 b of the transmission gear 42 meshes with the small gear 43 a of the intermediate gear 43, and the large gear 43 b of the intermediate gear 43 meshes with the rotor gear 44 a of the rotor 44.

  The rotor 44 has a rotor gear 44a projecting from one surface of a rotor body 44b having a disk shape made of a permanent magnet. The rotor main body 44 b is loosely fitted in a hole formed in the stator 45, and the disc-shaped cylindrical surface of the rotor main body 44 b faces the wall surface of the hole of the stator 45. The stator 45 is made of a high magnetic permeability material and is formed integrally with a magnetic core 46 made of a high magnetic permeability material. A pair of coils 47 and 47 are wound around the magnetic core 46.

  When the feeding / discharging material arm 21 is rotated, a centrifugal force acts on the sliding weight 41, so that the sliding weight 41 is in the direction indicated by the arrow a in FIG. Moving. At this time, the sliding weight spring 48 is extended. When the angular velocity at which the feeding / discharging material arm 21 is rotated decreases, the centrifugal force acting on the sliding weight 41 decreases, and the sliding weight 41 is fed and removed by the force that the sliding weight spring 48 tries to return to the original state. The material arm 21 is returned to the direction indicated by the arrow b in FIG. That is, the sliding weight 41 is reciprocated by the centrifugal force generated by the rotation of the feeding / discharging material arm 21 and the force of the sliding weight spring 48. The sliding weight spring 48 and the sliding weight 41 correspond to energy acquisition means for converting centrifugal force, which is inertial force, into kinetic energy of the sliding weight 41.

The reciprocating movement of the sliding weight 41 in the direction of the arrow a or the arrow b is converted into the rotational movement of the transmission gear 42 by the combination of the rack of the sliding weight 41 and the small gear 42 a of the transmission gear 42. The rotational movement of the transmission gear 42 is accelerated through the intermediate gear 43 and transmitted to the rotor 44.
When the rotor 44 rotates, a magnetic flux that changes according to the rotational motion of the rotor 44 is induced in the stator 45 and the magnetic core 46. Due to this change in magnetic flux, alternating power is induced in the pair of coils 47 by a known electromagnetic induction action.

  The pair of coils 47 and 47 are connected to the rectifier circuit 54, and the electric power rectified by the rectifier circuit 54 is supplied to the angular velocity sensor 32 as electric power for driving the angular velocity sensor 32. Alternatively, after being stored in the secondary battery 52 once, it is supplied to the angular velocity sensor 32 as electric power for driving the angular velocity sensor 32.

Hereinafter, effects of the first embodiment will be described. According to the first embodiment, the following effects can be obtained.
(1) The power generation device 40 includes a sliding weight 41 and a sliding weight spring 48. The power generation device 40 is fixed to the supply / removal material arm 21 in a state in which the sliding weight 41 moves against the sliding weight spring 48 by an inertia force when the supply / discharge material arm 21 is rotated. With this configuration, the inertial force that acts on the sliding weight 41 when the supply / discharge material arm 21 is rotated can be extracted as the kinetic energy of the sliding weight 41. Thereby, in the electric power generating apparatus 40, it is possible to generate electric power without having to acquire the energy for converting into electric power through the supply / discharge material arm 21 of the robot mechanism 20 or the like.

  (2) The power supply device 50 includes a power generation device 40 and a secondary battery 52. The electric power generated by the power generation device 40 can be stored in the secondary battery 52. Thereby, electric power can be stably supplied to the angular velocity sensor 32.

  (3) The power supply device 50 includes a power generation device 40 and a secondary battery 52, and the secondary battery 52 is disposed at a position adjacent to the angular velocity sensor 32 on the upper surface of the supply / discharge material arm 21. The battery is disposed at a position adjacent to the secondary battery 52. Thereby, the wiring for sending electric power from the electric power generation apparatus 40 to the angular velocity sensor 32 can be formed only by arranging the wiring on the supply / discharge material arm 21. Since the wiring is not disposed in a portion that moves relative to each other like the arm shaft portion 26 and the machine base 28, the wiring can be substantially prevented from being bent or twisted.

  (4) An angular velocity sensor 32 is disposed near the tip of the rotatable feed / release material arm 21. Thereby, the angular velocity at the time of rotation of the feeding / dispensing material arm 21 can be measured. Using the measured angular velocity information, it is possible to control the turning operation and stopping operation of the supply / discharge material arm 21.

(Second embodiment)
Next, a second embodiment that is an embodiment of the robot, the transfer device, and the power supply method will be described. In this embodiment, an example of a robot or a transfer device that is different from the supply / discharge material device described in the first embodiment will be described.

<Feeding material equipment>
FIG. 4 is a diagram illustrating a feed / unloading material apparatus 310 that is an embodiment of the robot, the transfer apparatus, and the power supply method, which is different from the feed / unloading material apparatus 10 described in the first embodiment. The description will be given with reference. FIG. 4 is an external perspective view showing a schematic configuration of the supply / discharge material apparatus.
As shown in FIG. 4, the supply / discharge material device 310 includes a holding hand 12, a robot mechanism 320, a supply / discharge material device control unit 330, an angular velocity sensor 332, an angle sensor (not shown), and a power supply device 350. It is equipped with.

  The robot mechanism 320 includes a hand holding mechanism 24, a supply / discharge material arm 321, an arm shaft portion 326, and a machine base 328. The machine base 328 supports the arm shaft portion 326 through a built-in bearing mechanism (not shown) so that the arm shaft portion 326 can rotate around the rotation shaft of the arm shaft portion 326 and can be positioned and fixed precisely. The arm shaft portion 326 is connected to an arm drive motor (not shown) built in the machine base 328 via an arm drive mechanism (not shown), and is rotated by the arm drive motor. An angle sensor is connected to the arm drive motor, and the rotation angle of the arm drive motor is measured by the angle sensor.

  One end of the supply / discharge material arm 321 is fixed to the end of the arm shaft portion 326 opposite to the side supported by the machine base 328. The feeding / dispensing material arm 321 includes an arm part 321a, an arm part 321b, and an arm joint part 323. One end of the arm part 321 a and one end of the arm part 321 b are connected by an arm joint part 323. One end of the arm portion 321 b opposite to the one end connected to the arm joint portion 323 is fixed to the arm shaft portion 326. Since the arm shaft portion 326 is rotatable about the rotation axis of the arm shaft portion 326 with respect to the machine base 328, the arm portion 321 b whose one end is fixed to the arm shaft portion 326 is relative to the machine base 328. The arm shaft portion 326 can freely rotate around the rotation axis.

The arm portion 321b supports the arm portion 321a so as to be rotatable about the rotation axis of the arm joint portion 323 via the arm joint portion 323. The portion of the arm joint portion 323 where the arm portion 321a is fixed is connected to an arm portion drive motor (not shown) built in the arm portion 321b via an arm portion drive mechanism (not shown). It is rotated by a drive motor. The arm part 321a and the arm part 321b can adjust the angle formed between each other in the arm joint part 323. That is, the feeding / discharging material arm 321 can bend and stretch at the arm joint portion 323. An arm angle sensor is connected to the arm drive motor, and the rotation angle of the arm drive motor is measured by the arm angle sensor. By measuring the rotation angle of the arm unit drive motor, the rotation angle of the arm unit 321a with respect to the arm unit 321b can be measured.
The axial direction of the rotation shaft of the arm shaft portion 326 and the axial direction of the rotation shaft of the arm joint portion 323 are substantially parallel to each other.

The hand holding mechanism 24 is fixed to the opposite end of the arm portion 321a fixed to the arm joint portion 323. The hand holding mechanism 24 includes a holding bearing 24a fixed to the arm portion 321a, and a holding mechanism shaft 24b supported by the holding bearing 24a so as to be slidable and capable of being accurately positioned and fixed. The holding mechanism shaft 24b can be slid in the axial direction of the holding mechanism shaft 24b with respect to the holding bearing 24a by a vertical drive source (not shown). The axial direction of the holding mechanism shaft 24 b is substantially parallel to the axial direction of the rotation shaft of the arm shaft portion 326 and the axial direction of the rotation shaft of the arm joint portion 323.
The holding hand 12 is attached to the free end of the holding mechanism shaft 24b. The holding hand 12 is positioned at a position facing the object to be transported by turning and bending the supply / discharge material arm 321. By sliding the holding mechanism shaft 24b with respect to the holding bearing 24a, the holding hand 12 is brought into and out of contact with the object to be conveyed, and the object to be conveyed held by the holding hand 12 is lifted from the placement place or placed. Or approach the place.

An angular velocity sensor 332 a is fixed to the hand holding mechanism 24 to which the holding hand 12 is attached on the side opposite to the holding hand 12. That is, the angular velocity sensor 332a is fixed to the tip of the arm portion 321a, and can measure the angular velocity at which the arm portion 321a is rotated.
An angular velocity sensor 332b is fixed to a side surface of one end connected to the arm joint portion 323 of the arm portion 321b. Therefore, the angular velocity sensor 332b is fixed to the tip of the arm portion 321b, and can measure the angular velocity at which the arm portion 321b is rotated.

The power supply device 350 has basically the same configuration as the power supply device 50 described above. The power supply device 350 disposed in the arm portion 321a is referred to as a power supply device 350a, and the power supply device 350 disposed in the arm portion 321b is referred to as a power supply device 350b.
The power supply device 350a includes a power generation device 340a and a secondary battery 352a. The secondary battery 352a is disposed on the upper surface of the arm portion 321a. The secondary battery 352a is electrically connected to the power supply terminal of the angular velocity sensor 332a.
The power generation device 340a is disposed at a position adjacent to the secondary battery 352a on the upper surface of the arm portion 321a. An output terminal of the power generation device 340a is connected to a power source terminal of the secondary battery 352a and the angular velocity sensor 332a. The power generation device 340a includes a sliding weight similar to the sliding weight 41 (see FIG. 3), and the sliding weight slides in a direction connecting the axis of the holding mechanism shaft 24b and the axis of the arm joint portion 323. It is arranged in a moving state. When the arm portion 321a is rotated, electric power is generated from the centrifugal force acting on the sliding weight by rotating the arm portion 321a, similarly to the power generation device 40 described above.
The power generated by the power generation device 340a or the power generated by the power generation device 340a and stored in the secondary battery 352a is supplied to the angular velocity sensor 332a as power for driving the angular velocity sensor 332a.

The power supply device 350b includes a power generation device 340b and a secondary battery 352b. The secondary battery 352b is disposed near the arm joint portion 323 on the upper surface of the arm portion 321b. The secondary battery 352b is electrically connected to the power supply terminal of the angular velocity sensor 332b.
The power generation device 340b is disposed at a position adjacent to the secondary battery 352b on the upper surface of the arm portion 321b. The output terminal of the power generation device 340b is connected to the power supply terminals of the secondary battery 352b and the angular velocity sensor 332b. The power generation device 340b includes a sliding weight similar to the sliding weight 41, and the sliding weight is arranged in a state of sliding in a direction connecting the axis of the arm joint portion 323 and the axis of the arm shaft portion 326. It is installed. When the arm portion 321b is rotated, electric power is generated from the centrifugal force acting on the sliding weight by rotating the arm portion 321b, as in the power generation device 40 described above.
The power generated by the power generation device 340b or the power generated by the power generation device 340b and stored in the secondary battery 352b is supplied to the angular velocity sensor 332b as power for driving the angular velocity sensor 332b.

  The material supply / control device controller 330 performs overall control of the operation of each part of the material supply / discharge material device 310 based on a control program input in advance via an information input / output device (not shown). The material supply / control device controller 330 can control the operation of the arm unit 321b based on the angular velocity information obtained by the angular velocity sensor 332b and the angle information obtained by the angle sensor built in the machine base 328. At the same time, the relative movement of the arm part 321a with respect to the arm part 321b can be controlled by the angular speed information by the angular speed sensor 332a and the angle information by the arm angle sensor incorporated in the arm part 321b. That is, the operation of the arm portion 321a and the operation of the supply / discharge material arm 321 that controls the arm portion 321b can be controlled using the angular velocity information and the angle information.

<Conveyor>
Next, a transport device having a configuration in which a holding device or the like that holds a transport object moves in parallel along an orthogonal coordinate system will be described with reference to FIG. FIG. 5 is an external perspective view showing a schematic configuration of the transport apparatus. FIG. 5A is an external perspective view illustrating a schematic configuration of the ceiling-carrying conveyance device, and FIG. 5B is an external perspective view illustrating a schematic configuration of the head conveyance device in the printing apparatus.

<Ceiling suspension transfer device>
First, the ceiling suspension transfer device 410 will be described. As shown in FIG. 5A, the ceiling-suspended transfer device 410 includes a main scanning direction moving mechanism 402, a sub-scanning direction moving mechanism 403, a lifting / lowering moving mechanism 404, a holding mechanism 412, a distance sensor, and an acceleration sensor. 432, a power supply device 450, and a transfer device control unit (not shown).

The main scanning direction moving mechanism 402 includes a pair of main scanning guide rails 421 and 421 extending in the main scanning direction, a main scanning linear motor formed on the main scanning guide rail 421, and a main scanning formed on the scanning plate 422. And a slider. The scanning plate 422 is spanned between the pair of main scanning guide rails 421 and 421 and extends in the sub scanning direction substantially orthogonal to the main scanning direction. The scanning plate 422 is freely moved in the main scanning direction by a main scanning linear motor and a main scanning slider. The pair of main scanning guide rails 421 and 421 are fixed by being suspended from, for example, a ceiling.
The sub scanning direction moving mechanism 403 includes a sub scanning linear motor formed on the scanning plate 422 and a sub scanning slider formed on the sub scanning frame 423. The sub scanning frame 423 is freely moved in the sub scanning direction by a sub scanning linear motor and a sub scanning slider.
The scanning plate 422 corresponds to a moving unit, and the main scanning linear motor and the main scanning slider correspond to a driving source.

The elevating / lowering mechanism 404 includes a ball bearing disposed in the sub-scanning frame 423, a ball bearing drive motor, and a ball screw fixed to the elevating shaft 424. The elevating shaft 424 is moved up and down by a ball bearing, a ball bearing drive motor, and a ball screw.
The holding mechanism 412 fixed to the side opposite to the ball screw of the lifting shaft 424 is moved to an arbitrary position in the main scanning direction and the sub scanning direction by the main scanning direction moving mechanism 402 and the sub scanning direction moving mechanism 403, The lifting / lowering moving mechanism 404 can be brought into contact with the object to be conveyed.
The transport device control unit controls the operation of each unit of the suspended transport device 410 based on a control program input in advance via an information input / output device (not shown).

The main scanning linear motor and the sub-scanning linear motor are connected to a distance sensor for measuring a driving distance by each.
An acceleration sensor 432a is fixed to the outer surface of the sub-scanning frame 423 that is substantially parallel to the main scanning direction. The acceleration sensor 432a can measure acceleration in the main scanning direction. An acceleration sensor 432b is fixed to the outer surface of the sub scanning frame 423 that is substantially parallel to the sub scanning direction. The acceleration sensor 432b can measure acceleration in the sub-scanning direction.
The holding mechanism 412 is based on the movement distance information in each direction by the distance sensor connected to the main scanning linear motor or the sub scanning linear motor and the acceleration information in each direction by the acceleration sensor 432a or the acceleration sensor 432b. Can be controlled. As the distance sensor, for example, a linear encoder can be used. The acceleration sensor 432a or the acceleration sensor 432b corresponds to an inertial sensor, and the acceleration information corresponds to inertial force information.

The power supply device 450 disposed on the outer surface substantially parallel to the main scanning direction of the sub-scanning frame 423 is referred to as a power supply device 450a, and the power supply device 450 disposed on the outer surface substantially parallel to the sub-scanning direction of the sub-scanning frame 423. Is represented as a power supply device 450b.
The power supply device 450a includes a power generation device 440a and a secondary battery 452a. The secondary battery 452a is disposed on the outer surface of the sub-scanning frame 423 adjacent to the acceleration sensor 432a. The secondary battery 452a is electrically connected to the power supply terminal of the acceleration sensor 432a.
The power generation device 440a is disposed at a position adjacent to the secondary battery 452a on the outer surface of the sub-scanning frame 423. The output terminal of the power generation device 440a is connected to the power source terminal of the secondary battery 452a and the acceleration sensor 432a. The power generation device 440a includes a swing weight 441 (see FIG. 6), and the power generation device 440a is disposed so that the swing weight 441 can swing on a surface substantially parallel to the main scanning direction.

When the scanning plate 422 is moved in the main scanning direction, the sub-scanning frame 423 is moved in the main scanning direction, so that the oscillating weight 441 is accelerated or decelerated when accelerating or decelerating. Inertial force corresponding to acceleration acts. Electric power is generated from the inertial force acting on the swing weight 441.
The power generated by the power generation device 440a or the power generated by the power generation device 440a and stored in the secondary battery 452a is supplied to the acceleration sensor 432a as power for driving the acceleration sensor 432a.

The power supply device 450b includes a power generation device 440b and a secondary battery 452b. The secondary battery 452b is disposed on the outer surface of the sub-scanning frame 423 adjacent to the acceleration sensor 432b. The secondary battery 452b is electrically connected to the power supply terminal of the acceleration sensor 432b.
The power generation device 440b is disposed at a position adjacent to the secondary battery 452b on the outer surface of the sub-scanning frame 423. The output terminal of the power generation device 440b is connected to the power terminals of the secondary battery 452b and the acceleration sensor 432b. The power generation device 440b includes a swing weight 441, and the power generation device 440b is disposed so that the swing weight 441 can swing on a surface substantially parallel to the sub-scanning direction.

By moving the sub-scanning frame 423 in the sub-scanning direction, an acceleration corresponding to the acceleration at the time of acceleration or deceleration acts on the oscillating weight 441 at the time of acceleration or deceleration at the time of movement. Electric power is generated from the inertial force acting on the swing weight 441.
The power generated by the power generation device 440b or the power generated by the power generation device 440b and stored in the secondary battery 452b is supplied to the acceleration sensor 432b as power for driving the acceleration sensor 432b.

<Head transfer device>
Next, the head conveyance device 460 will be described. As shown in FIG. 5B, the head transport device 460 moves the ejection head 462 of the printing device, and includes a head carriage 476, a carriage shaft 474, a drive belt 473, a drive pulley 472, and a drive. A motor 471, an acceleration sensor 482, an encoder 484, and a power supply device 490 are provided. The printing apparatus includes a printing apparatus control unit (not shown) that performs overall control of the operation of each unit of the printing apparatus.

The drive motor 471 is fixed to a device frame (not shown), and a drive pulley 472 is fixed to one end of the drive shaft. A drive belt 473 is stretched between the drive pulley 472 and a driven pulley (not shown), and the drive belt 473 is driven by a drive motor 471. The carriage shaft 474 is disposed in parallel with the extending direction of the drive belt 473. A head carriage 476 is supported on the carriage shaft 474 by being slidably fitted in the axial direction of the carriage shaft 474. The head carriage 476 is fixed to the drive belt 473, and is moved along the carriage shaft 474 by driving the drive belt 473. The ejection head 462 held by the head carriage 476 is moved in the axial direction of the carriage shaft 474 and is held at an arbitrary position.
The printing apparatus control unit controls the operation of each unit of the printing apparatus based on a control program input in advance via an information input / output apparatus (not shown).

  The encoder 484 is connected to the drive shaft of the drive motor 471, and can measure the moving distance of the ejection head 462 by measuring the rotation angle of the drive motor 471. The acceleration sensor 482 is fixed to the head carriage 476, and the acceleration acting on the head carriage 476 can be measured by driving the head carriage 476. The movement of the ejection head 462 held by the head carriage 476 can be controlled by the position information obtained from the movement distance information by the encoder 484 and the acceleration information by the acceleration sensor 482.

The power supply device 490 includes a power generation device 491 and a secondary battery 492. The secondary battery 492 is disposed on the outer surface of the head carriage 476 adjacent to the acceleration sensor 482. The secondary battery 492 is electrically connected to the power supply terminal of the acceleration sensor 482.
The power generation device 491 is disposed at a position adjacent to the secondary battery 492 on the outer surface of the head carriage 476. The output terminal of the power generation device 491 is connected to the power source terminals of the secondary battery 492 and the acceleration sensor 482. The power generation device 491 includes a swing weight 441. The power generation device 491 is disposed so that the swing weight 441 can swing on a surface substantially parallel to the carriage shaft 474.
When the head carriage 476 is guided and moved by the carriage shaft 474, an inertial force corresponding to the acceleration at the time of acceleration or deceleration acts on the oscillating weight 441 at the time of acceleration or deceleration at the time of movement. Electric power is generated from the inertial force acting on the swing weight 441.
The electric power generated by the power generation device 491 or the electric power generated by the power generation device 491 and stored in the secondary battery 492 is supplied to the acceleration sensor 482 as power for driving the acceleration sensor 482.

<Power generation device>
Next, configurations of the power generation device 440 and the power generation device 491 will be described with reference to FIG. FIG. 6 is a schematic diagram illustrating a main configuration of the power generation device. Since the configuration of the power generation device 440 and the configuration of the power generation device 491 are substantially the same, the power generation device 440 will be described here.
As illustrated in FIG. 6, the power generation device 440 includes a swing weight 441, a transmission gear 442, an intermediate gear 443, a rotor 444, a stator 445, a magnetic core 446, a coil 447, and a rectifier circuit 454. ing.

The swing weight 441 is a rotating weight and is fixed to the rotation shaft 442a of the transmission gear 442. The transmission gear 442 can rotate around the axis of the rotation shaft 442a, and the swing weight 441 can rotate around the axis of the rotation shaft 442a. The oscillating weight 441 is formed in a shape in which the position of the center of gravity of the oscillating weight 441 is largely shifted from the axis of the rotation shaft 442a. As the swing weight 441 rotates, the transmission gear 442 rotates.
The small gear 443a of the intermediate gear 443 is engaged with the large gear 442b of the transmission gear 442. The large gear 443b of the intermediate gear 443 meshes with the rotor gear 444a that protrudes from one surface of the rotor main body 444b of the rotor 444.
The configurations of the rotor 444, the stator 445, the magnetic core 446, the coil 447, and the rectifier circuit 454 are substantially the same as the configurations of the rotor 44, the stator 45, the magnetic core 46, the coil 47, and the rectifier circuit 54 described above.

  When the sub-scanning frame 423 to which the power generation device 440 is attached moves in the direction of the arrow c, for example, substantially perpendicular to the rotation axis of the swing weight 441, the swing weight 441 is accompanied by acceleration or deceleration during the movement. Inertial force acts on Since the inertial force can be considered to act on the position of the center of gravity of the swinging weight 441, the swinging weight 441 swings as shown by the arrow d or e in FIG. By disposing the swinging weight 441 so that the axial direction of the rotation axis intersects the vertical direction, when the acceleration decreases, the swinging weight 441 is returned to the original position by gravity. That is, the swing weight 441 swings due to the inertial force and gravity due to the movement of the sub-scanning frame 423 and the like. The swing weight 441 corresponds to energy acquisition means for converting inertial force into kinetic energy of the swing weight 441.

  The functions of the rotor 444, the stator 445, the magnetic core 446, the coil 447, and the rectifier circuit 454 are substantially the same as the functions of the rotor 44, the stator 45, the magnetic core 46, the coil 47, and the rectifier circuit 54 described above. Similar to the power generation device 40 described above, the inertial force acting on the swing weight 441 is converted into electric power and supplied to the acceleration sensor 432 and the like as electric power for driving the acceleration sensor 432 and the like. Alternatively, after being stored in the secondary battery 452 or the like, it is supplied to the acceleration sensor 432 or the like as electric power for driving the acceleration sensor 432 or the like.

Hereinafter, effects of the second embodiment will be described. According to the second embodiment, the following effects can be obtained.
(1) The power generation device 440 includes a swing weight 441. The power generation device 440 is fixed to the sub-scanning frame 423 in a state where the swing weight 441 is swung by inertial force when the sub-scanning frame 423 is moved in the main scanning direction or the sub-scanning direction. With this configuration, the inertial force acting on the swing weight 441 when the sub-scanning frame 423 is moved can be extracted as the kinetic energy of the swing weight 441. As a result, the power generation device 440 can perform power generation without having to acquire energy for conversion into electric power through parts that move relative to each other, such as the main scanning guide rail 421 and the scanning plate 422. .

  (2) The power generation device 491 includes an oscillating weight 441. The power generation device 491 is fixed to the head carriage 476 in a state where the swing weight 441 is swung by inertial force when the head carriage 476 is moved along the carriage shaft 474. With this configuration, the inertial force that acts on the swing weight 441 when the head carriage 476 is moved can be extracted as the kinetic energy of the swing weight 441. As a result, the power generation device 491 can generate power without having to acquire energy for conversion into electric power through a portion in which the head carriage 476 moves relative to the base of the printing device and the like.

  (3) The power supply device 450 and the power supply device 490 include a power generation device 440 or a power generation device 491 and a secondary battery 452 or a secondary battery 492. Electric power generated by the power generation device 440 or the power generation device 491 can be stored in the secondary battery 452 or the secondary battery 492. Thereby, power can be stably supplied to the acceleration sensor 432 or the acceleration sensor 482.

  (4) The power supply device 450 includes a power generation device 440 and a secondary battery 452, the secondary battery 452 is disposed at a position adjacent to the acceleration sensor 432, and the power generation device 440 is adjacent to the secondary battery 452. Arranged in position. Thereby, the wiring for sending electric power from the power generation device 440 to the acceleration sensor 432 can be formed simply by arranging the wiring in the sub-scanning frame 423. Since the wiring is not disposed in a portion that moves relative to other members such as the main scanning guide rail 421 and the scanning plate 422, the wiring can be substantially prevented from being bent or twisted. .

  (5) The power supply device 490 includes a power generation device 491 and a secondary battery 492. The secondary battery 492 is disposed at a position adjacent to the acceleration sensor 482, and the power generation device 491 is adjacent to the secondary battery 492. Arranged in position. As a result, the wiring for sending power from the power generation device 491 to the acceleration sensor 482 can be formed simply by arranging the wiring on the head carriage 476. Since the wiring is not disposed in a portion where the head carriage 476 moves relative to the base of the printing apparatus or the like, the wiring can be substantially prevented from being bent or twisted.

  (6) The acceleration sensor 432 or the acceleration sensor 482 is disposed on the sub-scanning frame 423 and the head carriage 476 to be moved. Thereby, the acceleration when the sub-scanning frame 423 and the head carriage 476 are moved can be measured. Using the measured acceleration information, the moving operation or stopping operation of the sub-scanning frame 423 or the head carriage 476 can be controlled.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the embodiment, the power generation device such as the power generation device 40 in the power supply device 50 of the supply / discharge material device 10 is attached to the sliding weight 41 or the like when the supply / discharge material arm 21 is rotated. It was a device that converts the inertial force acting into kinetic energy such as the sliding weight 41 and generates electric power from the kinetic energy. However, it is not essential to obtain energy for generating electric power from inertial force. A device that generates photoelectrons by the energy of light and generates electric power by taking out the photoelectrons, such as a solar cell, may be used.

  (Modification 2) In the above-described embodiment, the power supply device such as the power supply device 50 of the supply / discharge material device 10 stores power in addition to the power generation device so that the power supply device 50 includes the power generation device 40 and the secondary battery 52. Although the secondary battery as a device is provided, it is not essential that the power generation device includes a power storage device. If the power required to operate the inertial sensor can be supplied by the power generated by the power generator in parallel when the inertial sensor is operating, the power supply device includes a power storage device such as a secondary battery. There may be no configuration.

  (Modification 3) In the embodiment, as an example of the robot and the transfer device, the supply / discharge material device 10 including the robot mechanism 20, the supply / discharge material device 310 including the robot mechanism 320, the suspended transfer device 410, and the printing device are provided. The head transport device 460 provided is described as an example. However, the robot and the transfer device that can suitably supply power to the inertial sensor using the above-described power supply method are not limited to these exemplified devices. If it is an apparatus provided with the inertial sensor attached to the moving part supported so that rotation or sliding is possible, electric power can be suitably supplied to an inertial sensor by using the electric power supply method mentioned above. That is, a power supply cable that reaches the arm from the base of the robot via a support part that supports the rotation or the slidable movement to supply power to the inertial sensor, or supports the slidable or slidable movement. It is possible to eliminate the need for a power transmission mechanism that transmits power for power generation via the support portion. Thereby, it can suppress that the structure of a robot becomes complicated by providing a cable and a power transmission mechanism. Maintenance for ensuring the reliability of the cable and the power transmission mechanism is unnecessary, and the cost for maintenance can be suppressed.

  DESCRIPTION OF SYMBOLS 10,310 ... Feed / discharge material apparatus, 20,320 ... Robot mechanism, 21,321 ... Feed / release material arm, 22 ... Arm drive motor, 30, 330 ... Feed / discharge material apparatus control part, 32, 332a, 332b ... Angular velocity sensor , 40, 340a, 340b ... power generation device, 41 ... sliding weight, 42 ... transmission gear, 44 ... rotor, 45 ... stator, 50, 350, 350a, 350b ... power supply device, 52, 352a, 352b ... secondary battery, 402 ... Main scanning direction moving mechanism, 403 ... Sub scanning direction moving mechanism, 410 ... Ceiling transport device, 423 ... Sub scanning frame, 432, 432a, 432b ... Acceleration sensor, 440,440a, 440b ... Power generation device, 441 ... Swing Dynamic weight, 442 ... Transmission gear, 443 ... Intermediate gear, 444 ... Rotor, 445 ... Stator, 450, 450a, 450b ... Power supply 452,452A, 452b ... secondary battery, 460 ... head conveying apparatus 471 ... driving motor, 476 ... head carriage, 482 ... acceleration sensor, 490 ... power supply device, 491 ... power generator, 492 ... secondary battery.

Claims (12)

An arm that supports a work terminal at one end and is rotatably supported at the other end;
A drive source for rotating the arm;
An inertial sensor that is attached to the arm, detects an angular velocity at which the arm rotates, and outputs angular velocity information of the arm;
A power generator attached to the arm and supplying power to the inertial sensor,
The robot is characterized by comprising energy acquisition means for acquiring energy for conversion into electric power at a position where the power generation device is disposed.   The energy acquisition means acquires energy for conversion into electric power by converting a part of inertial force acting on a member constituting the power generation device into kinetic energy of the member constituting the power generation device. The robot according to claim 1, wherein the robot is characterized.   2. The robot according to claim 1, wherein the energy acquisition unit acquires energy for conversion into electric power by causing electrons to absorb light energy and generating conduction electrons. 3.   The robot according to any one of claims 1 to 3, further comprising a power storage device that stores electric power generated by the power generation device. A moving part that supports the work terminal and is slidably supported;
A drive source for moving the moving part;
An inertial sensor that is attached to the moving part, detects an inertial force acting when the moving part is moved, and outputs inertial force information acting on the moving part;
A power generation device attached to the moving unit,
The said power generator is equipped with the energy acquisition means which acquires the energy for converting into electric power in the position in which the said power generator was arrange | positioned, The conveying apparatus characterized by the above-mentioned.   The energy acquisition means acquires energy for conversion into electric power by converting a part of inertial force acting on a member constituting the power generation device into kinetic energy of the member constituting the power generation device. The transport apparatus according to claim 5, wherein the transport apparatus is characterized.   The said energy acquisition means acquires the energy for converting into electric power by making the electron absorb the energy of light and generating a conduction electron, The conveying apparatus of Claim 5 characterized by the above-mentioned.   The conveyance device according to claim 5, further comprising a power storage device that stores electric power generated by the power generation device. An electric power supply method for supplying electric power to an inertial sensor attached to a moving part that is supported rotatably or slidably,
An energy acquisition step of acquiring energy for conversion into electric power by means of energy acquisition means attached to the moving part;
And a power generation step of generating electricity by converting the energy acquired in the energy acquisition step into electric power.   In the energy acquisition step, an inertial force that acts on a member that constitutes the device that performs the power generation step when the moving unit is rotated or slid, and a motion of a member that constitutes the device that performs the power generation step The power supply method according to claim 9, wherein energy for conversion into electric power is acquired by conversion into energy.   The power supply method according to claim 9, wherein, in the energy acquisition step, energy for conversion into electric power is acquired by causing electrons to absorb light energy and generating conduction electrons.   The power supply method according to any one of claims 9 to 11, further comprising a power storage step of storing electric power generated in the power generation step.

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