JP2010281547A - Heat treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment device which properly makes an atmosphere inside a heat treatment space completely isolated from the external of the heat treatment space in a simple constitution. <P>SOLUTION: A vacuum heating furnace 10 includes a vacuum container 12, and a core tube 30 detachable from the vacuum container 12. The vacuum container 12 includes a core tube end supporting section 22, a core tube introducing section 25, a first muffle cover body 182 and a first heat insulating material cover body 202, having an insertion hole 191, and a second muffle cover body 184 and a second heat insulating material cover body, having an insertion hole 193. A second seal section 34 includes a core tube-side flange member 348, bellows for vacuum 342, and a gas inflow/outflow unit 350, and the core tube 30 is air-tightly connectable to the vacuum container 12. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a heat treatment apparatus configured to perform heat treatment on a workpiece disposed in a heat treatment space.

  In heat treatment equipment that performs heat treatment such as firing or sintering in vacuum or in an inert gas atmosphere, a bottomed cylinder is used to protect heaters, heat insulating materials, furnace shells, etc. from contaminants such as wax and moisture that evaporate from the workpiece. Some have adopted a configuration in which an inner muffle exhibiting a shape is arranged so as to surround a workpiece (see, for example, Patent Documents 1 and 2).

  Examples of the configuration of the inner muffle are usually commercially available, such as those formed by hollowing out columnar graphite, or a C / C composite plate that is a compression-molded plate of scaly graphite or a composite material in which carbon is reinforced with carbon fibers. These are made of a flexible material. By sealing the workpiece with such an inner muffle, it has been said that wax, moisture, and the like evaporated from the workpiece during heat treatment can be reliably collected by the inner muffle.

Japanese Patent Laid-Open No. 2000-111261 No. 07-33118

  However, although the inner muffle has a sealed structure, it seals the heat treatment space in the inner muffle only by contact between graphites, so that the atmosphere inside the heat treatment space is completely against the outside of the heat treatment space. It does not make it independent.

  For this reason, when trying to heat-treat workpieces that may generate gas, etc. that fouls heaters, heat insulating materials, furnace shells, etc., the atmosphere inside the heat-treatment space is appropriately used by using means other than the inner muffle. It can be said that it may be preferable to completely separate from the outside of the heat treatment space. For example, when an extremely small amount of work is placed in a furnace for experiments or research purposes and heat treatment is performed in an inert gas atmosphere or in a vacuum, it is assumed that unintended gas is generated from the work. As a precaution, it is preferable to completely separate the atmosphere inside the heat treatment space from the outside of the heat treatment space.

  An object of the present invention is to provide a heat treatment apparatus capable of appropriately making the atmosphere inside the heat treatment space completely independent of the outside of the heat treatment space with a simple configuration.

  The heat treatment apparatus according to the present invention is configured to perform heat treatment on a workpiece disposed in a heat treatment space. This heat treatment apparatus is configured to cover a vacuum vessel configured to selectively attach a furnace core tube, a furnace core tube removable from the vacuum vessel, and an end of the furnace core tube. A sealing unit configured to be airtightly connectable to the vacuum vessel.

  The vacuum vessel includes at least a furnace core tube end support part, a furnace core pipe introduction part, and a partition member. The furnace core tube end support portion is disposed at the first end portion of the vacuum vessel and is configured to support the first end portion of the furnace core tube. The furnace core tube introduction part is disposed at the second end of the vacuum vessel, and when the furnace core tube is mounted, a furnace core tube introduction port for introducing the furnace core tube into the vacuum vessel, and the furnace core tube It has a vacuum vessel side flange member arranged around the introduction port. The partition member is arranged inside the vacuum vessel and is configured to define a heat treatment space, and has an insertion hole for inserting the furnace core tube and a plug member for closing the insertion hole.

  The seal unit includes a furnace core tube side flange member, a vacuum bellows, and a gas inflow / outflow unit. The furnace core tube side flange member is connected to the second end so as to support the second end of the furnace core tube. The vacuum bellows is connectable between the vacuum vessel side flange member and the furnace core tube side flange member, and is configured to maintain a vacuum in the vacuum vessel. The gas inflow / outflow unit is a gas inflow / outflow unit connectable to the outside of the furnace core tube side flange, and is configured to supply gas to and discharge gas from the furnace core tube via the second end. The

  In the above configuration, the heat treatment apparatus can be used for multiple purposes by appropriately inserting the removable furnace core tube into the vacuum vessel. At this time, even if there is a difference in thermal expansion between the furnace core tube and the vacuum vessel, the difference in thermal expansion is absorbed by the extendable vacuum bellows. The vacuum bellows maintains the airtightness between the furnace core tube and the inside and outside air of the vacuum vessel.

  And by using the furnace core tube appropriately, for example, even if there are gases or evaporates generated from the workpiece, those generated products contaminate the furnace structures such as heating elements and heat insulating materials in the vacuum vessel. It will not be done.

  According to the present invention, it is possible to make the atmosphere inside the heat treatment space completely independent from the outside of the heat treatment space as appropriate with a simple configuration.

It is a figure which shows the outline of the vacuum heating furnace which concerns on embodiment of this invention. It is a figure explaining the use condition of a vacuum heating furnace. It is a figure which shows the state by which the furnace core tube was introduce | transduced into the vacuum heating furnace. It is a figure which shows the outline of a 1st vacuum seal part and a 2nd vacuum seal part.

  An outline of a vacuum heating furnace 10 according to an embodiment of the present invention will be described with reference to FIG. The vacuum heating furnace 10 has a substantially cylindrical shape, and includes a vacuum vessel 12, a gas supply unit 14 that supplies gas into the vacuum vessel 12, and a gas discharge unit 16 that discharges gas from the vacuum vessel 12.

  The vacuum container 12 includes a container main body 122 and a first door 124 and a second door 126 that are supported by the container main body 122 in a swingable state. The first door 124 is provided with a furnace core tube end support portion 22 that can support a furnace core pipe 30 described later. On the other hand, the second door 126 is provided with the furnace core tube introduction part 25. The furnace core tube introduction part 25 is disposed around the furnace core tube introduction port 24 and the furnace core tube introduction port 24 for introducing the furnace core tube 30 into the vacuum vessel 12 when the furnace core tube 30 is mounted. The vacuum vessel side flange member 26 and the vacuum vessel lid 28 connected to the vacuum vessel side flange member 26 are provided.

  Inside the vacuum vessel 12 is provided a work support base 196 configured to support a work to be heat-treated. A cylindrical muffle body 18 is provided around the work support 196. A first muffle lid 182 and a second muffle lid 184 are provided so as to selectively close open portions on both sides of the muffle body 18.

  In this embodiment, the muffle body 18, the first muffle lid 182, and the second muffle lid 184 are each composed of a C / C composite formed by reinforcing carbon with carbon fiber. It is not limited.

  A cylindrical heat insulating material body 20 is provided outside the muffle body 18. Furthermore, a first heat insulating material cover 202 and a second heat insulating material cover 204 for selectively closing the open ends on both sides of the heat insulating material main body 20 are provided.

  In this embodiment, the muffle body 18, the first muffle lid body 182, the second muffle lid body 184, the heat insulating material body 20, the first heat insulating material cover body 202, and the second heat insulating material cover body 204, A partition member configured to define a heat treatment space is formed. However, the configuration of the partition member is not limited to this.

  The first muffle lid body 182 is connected to the first heat insulating material lid body 202 through fastening parts such as bolts and nuts, and the first heat insulating material lid body 202 is connected to the first door 124 described above. It is fixed. Similarly, the second muffle cover body 184 is connected to the second heat insulating material cover body 204 through fastening parts such as bolts and nuts, and the second heat insulating material cover body 204 is further connected to the second heat insulating material cover 204 described above. It is fixed to the door 126. Therefore, the first muffle lid 182 and the first heat insulating material lid 202 move so as to open the heat treatment space as the first door 124 is opened. Further, as the second door 126 is opened, the second muffle lid 184 and the second heat insulating material lid 204 move so as to open the heat treatment space.

  The first muffle lid 182 and the first heat insulating material lid 202 are formed with an insertion hole 191 into which a core tube 30 described later can be inserted, and this insertion hole 191 is selectively closed. A first plug 192 is provided. Similarly, the second muffle lid body 184 and the second heat insulating material lid body 204 are formed with insertion holes 193 through which the core tube 30 described later can be inserted, and the insertion holes 193 are selectively closed. A second plug 194 is provided.

  A cylindrical heater 25 is provided between the muffle body 18 and the heat insulator body 20 described above. The heater 25 is arranged at a predetermined position in the vacuum vessel 12 by a heater support member (not shown), and is configured to generate heat when receiving power supply from a power supply source (not shown).

  The gas supply unit 14 includes a gas supply device 142 for supplying a gas necessary for the heat treatment of the vacuum heating furnace 10 to the vacuum vessel 12. The gas supply device 142 is connected to the vacuum vessel 12 through a duct provided with a valve 144, ports 146, 148, and the like.

  The gas discharge unit 16 includes an exhaust duct 165 for discharging gas in the processing space surrounded by the muffle 18 main body, the first muffle cover 182 and the second muffle cover 184, and gas outside the processing space. And a duct connected to the exhaust ports 162 and 164 for discharging the gas. The exhaust duct 165 has a trap for collecting wax or the like, and is connected to the vacuum pump 160 via a valve 168. Each of the exhaust ports 162 and 164 is connected to the vacuum pump 160 via a valve 166.

  When the workpiece is put into the vacuum heating furnace 10 and heat treatment is performed, for example, as shown in FIG. 2A, the first door 124, the first heat insulating material lid 202, and the first muffle are used. By opening the lid 182 and placing the workpiece on the workpiece support 196 in the processing space, a large effective heating area can be obtained.

  Furthermore, the vacuum heating furnace 10 is configured so that heat treatment can be selectively performed using a furnace core tube 30 described later. When the furnace core tube 30 is used, first, as shown in FIG. 2B, the second door 126, the second heat insulating material lid 204, and the second muffle lid 184 are opened, and the first The plug 192 and the second plug 194 are removed. In this state, as shown in FIG. 2C, a furnace core tube support member 198 for supporting the furnace core tube 30 from below is placed on the work support base 196, and the second door 126 is attached. Close and remove the vacuum vessel lid 28. By removing the vacuum container lid 28, the furnace core tube 30 can be introduced into the vacuum heating furnace through the tube insertion port 24.

  FIG. 3 shows a state where the furnace core tube 30 is introduced into the vacuum heating furnace 10. Specifically, this figure shows a state where the furnace core tube 30 is inserted in the axial direction of the vacuum vessel 12. The furnace core tube 30 is made of a ceramic material such as graphite or alumina, and the first end portion 302 thereof is supported by the furnace core tube end portion supporting portion 22. The furnace core tube 30 has a structure that can be removed according to the processing amount, the size of the processed product, and the processing purpose. The center portion of the furnace core tube 30 is supported by a furnace core tube support member 198.

  Further, the furnace core tube 30 has a first end portion 302 covered with the first vacuum seal portion 32 and a second end portion 304 covered with the second vacuum seal portion 34. In this embodiment, the first vacuum seal portion 32 and the second vacuum seal portion 34 correspond to the seal unit of the present invention.

  Here, the outline of the 1st vacuum seal part 32 is demonstrated using FIG. 4 (A). As shown in the figure, the first end portion 302 of the furnace core tube 30 is supported by the furnace core tube end support portion 22 via a seal member such as an O-ring 326. The first vacuum seal portion 32 is configured to maintain the vacuum inside the vacuum vessel 12 and the furnace core tube 30 by covering the O-ring 326 and the first end portion 302 of the furnace core tube 30 in a sealed state. The cover member 322 is provided. The cover member 322 is provided with a thermocouple mounting flange 324 for enabling mounting of a thermocouple 36 for measuring the temperature in the furnace core tube 30.

  Subsequently, the outline of the second vacuum seal portion 34 will be described with reference to FIG. A furnace core tube side flange member 348 is connected to the second end portion 304 of the core tube 30 through a seal member such as an O-ring 345 in a state of supporting the second end portion 304. The furnace core tube side flange member 348 has a second end portion 346 of a vacuum bellows 342 having a first end portion 344 connected to the vacuum vessel side flange member 26 via a fastening member such as a bolt or a nut. Connected. The vacuum bellows 342 is configured to be expandable and contractable in the axial direction of the vacuum vessel 12 between the furnace core tube side flange member 26 and the furnace core tube side flange member 348, and maintains the vacuum in the vacuum vessel 12. Is configured to do.

Further, a gas inflow / outflow unit 350 configured to supply gas to and discharge gas from the furnace core tube 30 is connected to the outside of the furnace core tube side flange member 348. The gas inflow / outflow unit 350 includes a gas introduction part 351 and a gas discharge part 352, and is configured to supply and discharge gas to the furnace core tube 30 through the second end 304. For example, in this embodiment, the gas inlet unloading unit 350, or by introducing N _2, H _2, atmospheric gas such as Ar gas into the furnace core tube 30, or to evacuate the inside of the furnace core tube 30 Configured as follows.

  In the above configuration, the workpiece can be placed on the workpiece support 196 in the processing space in the vacuum vessel 12 in the vacuum heating furnace 10 to increase the effective dimension and subjected to normal heat treatment. The furnace core tube 30 can be inserted into the furnace core tube 30 to heat-treat the workpiece inside the furnace core tube 30. That is, the vacuum heating furnace 10 can be used for multiple purposes.

  For example, by using the furnace core tube 30, the inside of the vacuum vessel 12 is not contaminated by contaminants generated from the workpiece. In addition, since the atmospheric gas can flow only inside the furnace core tube 30 having a relatively small diameter, heat treatment can be performed with a small amount of gas. For this reason, when an extremely small amount of work is placed in a furnace for experiments and research purposes and heat treatment is performed in an atmosphere of an inert gas or in a vacuum, heat treatment is appropriately performed using the furnace core tube 30. And good.

  And even if the furnace core tube 30 expands larger than the vacuum vessel 12 due to heat, the vacuum bellows 342 extends in accordance with the elongation of the furnace core tube 30 and absorbs the elongation of the furnace core tube 30. The vacuum in the vacuum vessel 12 is properly maintained.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

10-vacuum heating furnace 12-vacuum vessel 14-gas supply unit 16-gas discharge unit 22-furnace core tube end support unit 25-furnace core tube introduction unit 30-furnace core tube 32-first vacuum seal unit 34- Second vacuum seal portion 342-Vacuum bellows 348-Furnace core tube side flange member 350-Gas inflow / outflow unit

Claims (3)

A heat treatment apparatus configured to perform heat treatment on a workpiece arranged in a heat treatment space,
A vacuum vessel configured to selectively attach a furnace core tube;
A furnace core tube removable from the vacuum vessel;
A seal unit configured to cover an end of the furnace core tube, and configured to allow the furnace core tube to be hermetically connected to the vacuum vessel;
With
The vacuum vessel is
A furnace core tube end support portion disposed at a first end portion of the vacuum vessel and configured to support the first end portion of the furnace core tube;
A furnace core pipe inlet for introducing the furnace core pipe into the vacuum container when the furnace core pipe is mounted, and the furnace core pipe inlet arranged at the second end of the vacuum vessel A furnace tube introduction part having a vacuum vessel side flange member disposed around
A partition member disposed inside the vacuum vessel and configured to demarcate the heat treatment space, and comprising: an insertion hole for inserting the furnace core tube; and a plug member for closing the insertion hole A partition member having,
The seal unit is
A furnace core tube side flange member connected to the second end so as to support the second end of the furnace core tube;
A vacuum bellows configured to be connectable between the vacuum vessel side flange member and the furnace core tube side flange member, and configured to maintain a vacuum in the vacuum vessel;
A gas inflow / outflow unit connectable to the outside of the furnace core side flange, wherein the gas inflow is configured to supply gas to and discharge gas from the furnace core pipe via the second end. And a heat treatment apparatus comprising a discharge unit.   The heat treatment apparatus according to claim 1, wherein the partition member includes an inner muffle disposed so as to surround the heat treatment space and a heat insulating material disposed outside the inner muffle.   A first seal portion for maintaining a vacuum on the first end portion side of the furnace core tube at a first end portion of the vacuum vessel, and a thermoelectric for measuring the temperature in the furnace core tube. The heat processing apparatus of Claim 1 or 2 provided with the 1st seal | sticker part which can mount | wear with a pair.

Images