CN213120020U - Heat treatment apparatus - Google Patents

Heat treatment apparatus Download PDF

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Publication number
CN213120020U
CN213120020U CN202021930788.3U CN202021930788U CN213120020U CN 213120020 U CN213120020 U CN 213120020U CN 202021930788 U CN202021930788 U CN 202021930788U CN 213120020 U CN213120020 U CN 213120020U
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Prior art keywords
insulator
exhaust pipe
muffle
internal space
heat
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CN202021930788.3U
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Chinese (zh)
Inventor
武田直也
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Shimadzu Industrial Systems Co Ltd
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Shimadzu Industrial Systems Co Ltd
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Abstract

The utility model provides a heat treatment device, which can prevent the exhaust pipe from being blocked by the release material released from the treated material. The heat treatment device (10) comprises: a pressure vessel (12); a first heat insulator (16) disposed in an internal space (14) of the pressure vessel (12); a heater (20) disposed in the internal space (18) of the first heat insulator (16); a storage section (24) which is disposed in the internal space (18) of the first heat insulator (16) and which stores an object to be treated (22); a pump (32); an exhaust pipe (34) connecting the internal space (28) of the housing section (24) and the pump (32); a trap (38) provided in the middle of the exhaust pipe (34) and configured to catch a discharge material discharged from the object to be treated (22); and a second heat insulator (68) disposed between the housing section (24) and the trap (38) and at least a part of the exhaust pipe (34).

Description

Heat treatment apparatus
Technical Field
The utility model relates to a heat treatment device.
Background
Conventionally, a heat treatment is performed on a treatment object including a metal, a magnetic material, a ceramic, or the like in a vacuum or pressurized environment. For example, a heat treatment apparatus disclosed in patent document 1 includes a heating chamber, a heater, and a muffle (muffle) plate. The heating chamber is provided with a heater and a muffle plate. A receiving area for the object to be processed is formed by a muffle plate. And the heat treatment apparatus is provided with an exhaust pipe for exhausting gas from the housing area.
The object to be processed is accommodated in the accommodating area. When current flows into the heater, the heater generates heat. The heat of the heater is transmitted to the object to be processed through the muffle plate. The object to be treated is degreased and then subjected to a predetermined treatment.
[ Prior art documents ]
[ patent document ]
[ patent document 1] International publication No. WO2016/006500
SUMMERY OF THE UTILITY MODEL
[ problem to be solved by the utility model ]
When degreasing an object to be treated, a gaseous binder, fine powdery or granular dust, or a discharge material containing both of them is discharged from the object to be treated. A trap is provided on the exhaust pipe to catch the emissions. However, sometimes the emissions accumulate in the exhaust pipe before they reach the trap. The exhaust pipe is blocked by the discharge material, and gas cannot be discharged. The release needs to be captured by a trap.
Therefore, an object of the present invention is to provide a heat treatment apparatus capable of preventing an exhaust pipe from being clogged with a discharge material discharged from a material to be treated.
[ means for solving problems ]
In order to solve the above problems, the heat treatment apparatus of the present invention has the following structure.
The heat treatment device of the utility model comprises: a pressure vessel; a first insulator disposed in an internal space of the pressure vessel; a heater disposed in an internal space of the first heat insulator; a housing unit that is disposed in an internal space of the first heat insulator and houses an object to be processed; a pump; an exhaust pipe connecting the internal space of the housing part and the pump; a trap provided in the middle of the exhaust pipe and configured to catch a discharge material discharged from the object to be treated; and a second heat insulator disposed between the housing portion and the trap at least in a part of the exhaust pipe.
[ effects of the utility model ]
According to the utility model discloses, the gas that discharges from the muffle furnace utilizes the second insulator and is difficult for cooling. The emissions contained in the gas are not easily liquefied. The effluent flows to the trap, where it becomes liquid or further becomes solid, while maintaining a high temperature. The exhaust pipe does not become liquid, solid or both in the middle of the exhaust pipe, and clogging of the exhaust pipe can be prevented.
Drawings
Fig. 1 is a diagram showing the structure of a heat treatment apparatus according to the present application.
Fig. 2 is a diagram showing the structure of the trap.
Fig. 3 is a view of the fin and the filter removed from the first exhaust pipe.
Fig. 4 is a view of a structure in which the inner diameter of a portion having the fins and the coolant pipe is made larger than the inner diameter of a portion having the second insulator.
Fig. 5 is a diagram showing the structure of a pressing member and an elastic body that press the muffle cover.
Fig. 6 is a view showing another structure of the pressing member and the elastic body for pressing the muffle cover.
[ description of reference numerals ]
10: heat treatment apparatus
12: pressure vessel
16: first insulator
20: heating device
22: object to be treated
24: muffle furnace (containing part)
26: gas source
32: pump and method of operating the same
34. 36: exhaust pipe
38: trap device
40: container body
42: container lid
44: inner wall
46: outer wall
48: heat insulator body
50: heat insulator cover
52: muffle furnace body
54: muffle furnace cover
64: inner piping
66: outside pipe
68: second insulator
70. 90: fin plate
72: filter
74. 92: cooling liquid pipe
76. 82: cover body
78. 84: opening of the container
80. 86: bent portion of first exhaust pipe
100: pressing member
102: elastic body
108: concave part of muffle cover
110: through hole of heat insulator cover
114: gap between heat insulator cover and muffle cover
Detailed Description
The heat treatment apparatus of the present invention will be described with reference to the drawings. The components described in one embodiment may be given the same reference numerals in other embodiments and the description thereof may be omitted.
[ embodiment 1]
The heat treatment apparatus 10 of the present application shown in fig. 1 includes: a container-shaped pressure vessel 12; a first insulator 16 disposed in the internal space 14 of the pressure vessel 12; a heater 20 disposed in the internal space 18 of the first insulator 16; a muffle (inner box) 24 for accommodating the object to be processed 22; a gas source 26; a supply pipe 30 for connecting the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24 from the gas source 26; a pump 32; a first exhaust pipe 34 connecting the pump 32 with the inner space 28 of the muffle 24; a second exhaust pipe 36 connecting the pump 32 and the internal space 14 of the pressure vessel 12 or the internal space 18 of the insulator 16; the trap 38 is provided in the middle of the first exhaust pipe 34.
The heat treatment apparatus 10 is an apparatus for performing sintering, semi-sintering, calcination, degreasing, degassing, welding, metallization, quenching, solution treatment, tempering, annealing, aging heat treatment, or the like.
[ pressure vessel ]
The pressure vessel 12 includes a vessel body 40 and a vessel lid 42. The container body 40 has a cylindrical shape and is open at both ends. The container lid 42 opens and closes openings at both ends of the container body 40. When both ends of the container body 40 are closed by the container lid 42, the internal space 14 of the pressure container 12 becomes a sealed space. The internal space 14 of the pressure vessel 12 is pressurized when gas is supplied from the gas source 26 and depressurized when gas is discharged by the pump 32.
The pressure vessel 12 is of a dual construction including an inner wall 44 and an outer wall 46. The cooling fluid flows between the inner wall 44 and the outer wall 46. The heat treatment apparatus 10 may also include a pump (not shown) for supplying the coolant between the inner wall 44 and the outer wall 46.
[ first insulator ]
The first insulator 16 is disposed in the internal space 14 of the pressure vessel 12. The first insulator 16 includes an insulator body 48 and an insulator cover 50. The insulator body 48 has a cylindrical or box shape and is open at both ends. The openings at both ends of the insulator body 48 are opened and closed by insulator covers 50. An opening/closing device (not shown) for the heat insulator cover 50 is provided in the internal space 14 of the pressure vessel 12. The heat insulator cover 50 can be opened and closed in a state where the container cover 42 is closed. The first insulator 16 includes a heat-resistant material such as graphite felt or graphite foil.
[ Heater ]
A heater 20 is disposed in the internal space 18 of the first insulator 16. The heater 20 may be a rod heater made of graphite, or may be another type of heater. The heater 20 is linear, and the longitudinal direction of the heater 20 is oriented in the longitudinal direction of the muffle 24. Further, a plurality of heaters 20 are disposed around the muffle 24. The heat treatment apparatus of the present invention includes a circuit (not shown) for supplying electric power to the heater 20. Electric power is supplied from the electric circuit to the heater 20, and the heater 20 generates heat. The heat of the heater 20 is confined in the inner space 18 of the first insulator 16.
[ muffle furnace ]
A muffle 24 is disposed in the internal space 18 of the first insulator 16. The muffle 24 is made of graphite or the like. The muffle 24 includes a muffle body 52 and a muffle cover 54. The muffle body 52 has a cylindrical or box shape, and both ends thereof are open. The muffle cover 54 opens and closes openings at both ends of the muffle body 52.
[ treated article ]
The object 22 is disposed in the internal space 28 of the muffle 24. That is, the muffle 24 functions as a storage portion for the object 22. The material of the object 22 is a superhard metal, an iron-based metal, a nonferrous metal, a magnetic material, ceramics, graphite, high-speed steel, die steel, low alloy steel, or the like, and the metal includes an alloy. The object 22 to be treated is a powder, a granule, or a solid having a predetermined shape.
By housing the object to be treated 22 in the muffle 24, it is possible to prevent or reduce discharge of a discharged material from the object to be treated 22 to the outside of the muffle 24 when the object to be treated 22 is degreased.
[ gas source ]
The gas source 26 performs storage, generation, or both of nitrogen, argon, hydrogen, carbon monoxide, helium, methane, and the like. The gas source 26 is connected to the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24 by supply pipes 30. The supply pipe 30 is branched and provided with a valve 56 and a valve 58, respectively. The flow rate of the gas can be controlled by opening and closing the valves 56 and 58. Gas is introduced from a gas source 26 into the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24 through a supply pipe 30. A plurality of gas sources 26 may be provided to supply a plurality of gases to the interior space 14 of the pressure vessel 12 or the interior space 18 of the insulator 16 and the interior space 28 of the muffle 24. A plurality of supply pipes 30 are provided to supply a plurality of gases. Further, since the heat insulator 16 is not completely sealed, by introducing gas into one of the internal space 14 of the pressure vessel 12 and the internal space 18 of the heat insulator 16, gas can be introduced into the other.
[ Pump ]
The pump 32 is connected to the interior space 28 of the muffle 24 by a first exhaust pipe 34. The pump 32 is connected to the internal space 14 of the pressure vessel 12 or the internal space 18 of the heat insulator 16 by a second exhaust pipe 36. Gas is discharged from the interior space 14 of the pressure vessel 12, the interior space 18 of the insulator 16, and the interior space 28 of the muffle 24 by a pump 32. The first exhaust pipe 34 and the second exhaust pipe 36 are provided with a valve 60 and a valve 62, respectively, and exhaust can be controlled by opening and closing the valve 60 and the valve 62. Since the heat insulator 16 is not completely sealed, gas is discharged from one of the internal space 14 of the pressure vessel 12 and the internal space 18 of the heat insulator 16, and the other gas is also discharged.
[ exhaust pipes ]
As shown in fig. 2, the first exhaust pipe 34 passes through the container body 40 of the pressure container 12, the insulator body 48 of the first insulator 16, and the muffle body 52 of the muffle 24, and is connected to the internal space 28 of the muffle 24. The first exhaust pipe 34 is a double pipe including an inner pipe 64 and an outer pipe 66. In fig. 2, a part of the first exhaust pipe 34 from the pressure vessel 12 to the trap 38 is constituted by an inner pipe 64 and an outer pipe 66. The coolant flows between the inner pipe 64 and the outer pipe 66. The present application includes a pump (not shown) for flowing coolant between the inner pipe 64 and the outer pipe 66. The temperature of the first exhaust pipe 34 does not rise excessively. Further, as in the case of the first exhaust pipe 34, a part or the whole of the second exhaust pipe 36 may be constituted by the inner pipe 64 and the outer pipe 66.
The space between the inner and outer pipes 64, 66 may be connected between the inner and outer walls 44, 46 of the pressure vessel 12. The pressure vessel 12 is cooled together with the first exhaust pipe 34.
[ second insulator ]
A second insulator 68 (fig. 2) is provided inside the first exhaust pipe 34. The second insulator 68 contains a heat-resistant material such as graphite felt or graphite foil. The second insulator 68 has a cylindrical shape, and the outer periphery thereof is in contact with the inner pipe 64 of the first exhaust pipe 34. A second insulator 68 is disposed in the first exhaust conduit 34 between the first insulator 16 and a position proximate the forward end of the trap 38. The second insulator 68 is preferably disposed in the first exhaust conduit 34 from a location through the first insulator 16 to the trap 38. In addition to the above-described positions, in the case where the first exhaust pipe 34 has a bent portion, the heat loss at the bent portion is often large, and therefore the second heat insulator 68 may be provided at the bent portion.
The gas passes through the hollow portion of the second insulator 68. The gas discharged from the muffle 24 is not easily cooled by the second insulator 68. The gas reaches the trap 38 in a high temperature state. The emissions contained in the gas are not readily liquefied and solidified before reaching the trap 38. The first exhaust pipe 34 can be prevented from being clogged with the emissions. In the internal space 18 of the first insulator 16, the presence or absence of the second insulator 68 is arbitrary. As long as the high-temperature gas can reach the trap 38, the second insulator 68 does not need to be located at all positions of the first exhaust pipe 34 between the position where the first insulator 16 starts to penetrate the first exhaust pipe 34 and the trap 38, and the second insulator 68 may be provided at least in part of the first exhaust pipe 34.
[ trapper ]
When the object 22 is degreased, a gaseous binder, fine powder or granular dust, or a discharge material containing all of them is discharged from the object 22. The effluent is discharged from the first exhaust pipe 34. A trap 38 for trapping the released material is provided in the middle of the first exhaust pipe 34. As shown in fig. 2, the trap 38 includes a fin 70 and a filter 72.
A coolant pipe 74 is disposed in the first exhaust pipe 34. The fins 70 have a plate shape, and the fins 70 are attached to the cooling liquid pipe 74. The coolant flows in the coolant pipe 74. The fins 70 are cooled by the cooling fluid. The gas flowing in the first exhaust pipe 34 is cooled by contacting the fins 70, and the emissions contained in the gas become liquid on the surfaces of the fins 70. There are also cases where the effluent that becomes liquid becomes solid by further cooling. When the gas contacts the coolant tube 74, the effluent contained in the gas also becomes liquid or solid at the surface of the coolant tube 74.
In the first exhaust pipe 34, it is preferable to shorten the distance from the first insulator 16 to the trap 38 as much as possible. This is to make it easy for the high-temperature gas to reach the fin 70.
The coolant pipe 74 is attached to the lid 76 in a linear shape. An opening 78 is formed midway in the first exhaust pipe 34, and the coolant pipe 74 enters the first exhaust pipe 34 from the opening 78. The opening 78 of the first exhaust pipe 34 is closed by the cover 76. The first exhaust pipe 34 is oriented in two directions at the bent portion 80. The coolant pipe 74 is inserted into the first exhaust pipe 34 toward either direction at or near the bent portion 80. As shown in fig. 3, the fins 70 and the coolant tube 74 may be pulled out from the first exhaust pipe 34.
The first exhaust pipe 34 does not have the second insulator 68 at the portion where the fin 70 is provided. The first exhaust pipe 34 has a double structure of the inner pipe 64 and the outer pipe 66 at a portion including the fin 70. Further, the coolant flows between the inner pipe 64 and the outer pipe 66. Therefore, when the gas contacts the inside of the inner pipe 64, the emissions on the inner surface of the inner pipe 64 become liquid or solid. As shown in fig. 3, when the fins 70 and the cooling liquid pipe 74 are pulled out, the liquid, the solid, or both adhering to the inner surface of the inner pipe 64 are scraped out by the fins 70.
A filter 72 is disposed downstream of fin 70. The cooled gas reaches the filter 72. The filter 72 collects fine powdery, granular, or both emissions contained in the discharged gas.
The filter 72 is attached to the lid 82. An opening 84 is formed midway in the first exhaust pipe 34, and the filter 72 enters the first exhaust pipe 34 from the opening 84. The opening 84 is closed by the cover 82. Similarly to the fin 70, the first exhaust pipe 34 is provided with a bent portion 86, and the filter 72 is disposed at or near this portion 86. As shown in fig. 3, the filter 72 may be removed.
The gas is cooled by the fins 70 and the like, and the portion of the first exhaust pipe 34 having the filter 72 may not have a double structure of the inner pipe 64 and the outer pipe 66.
[ others ]
The internal space 14 of the pressure vessel 12 is provided with a fan 88. A motor 90 for rotating the fan 88 is attached to the container cover 42. The fan 88 rotates when the container lid 42 is closed and the insulator lid 50 is opened. Gas circulates within the interior space 14 of the pressure vessel 12 and the interior space 18 of the insulator 16. The muffle cover 54 is sometimes opened when the gas is circulated.
Guides 92 may also be provided from the insulator body 48 toward the fan 88. The direction of the circulating gas is determined by the guide 92. The shape of the guide 92 is not limited as long as the direction of the gas is determined. The pressure vessel 12 has a double structure, and a coolant flows through the pressure vessel, so that the circulating gas is cooled by the coolant. A water-cooled heat exchanger 94a may be disposed between the fan 88 and the heat insulator 16, and the gas may be cooled by the heat exchanger 94 a. The heat exchangers 94b and 94c may be disposed at any position of the gas circulation.
[ Heat treatment ]
Next, a heat treatment using the heat treatment apparatus 10 of the present application will be described. The heat treatment described above is an example, and is appropriately changed depending on the type of the object 22 to be treated and the treatment method.
(1) The object 22 to be processed is accommodated in the internal space 28 of the muffle 24, and the muffle cover 54, the heat insulator cover 50, and the container cover 42 are closed.
(2) The pump 32 is driven to discharge gas from the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24. Simultaneously with the exhaust, a gas is supplied from a gas source 26 to the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24, and these spaces 14, 18, 28 are filled with a predetermined gas. The internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle furnace 24 are brought to predetermined pressures by adjusting the supply amount and the exhaust amount of the gas.
(3) Power is supplied to the heater 20 to heat the heater and raise the temperature of the internal space 18 of the heat insulator 16. The muffle 24 disposed in the internal space 18 of the heat insulator 16 is heated, and the object 22 is further heated.
The temperature of the object 22 positioned in the internal space 28 of the muffle 24 is increased, and the object 22 is degreased. When degreasing, the pump 32 is driven to capture the effluent generated from the object 22 by the fin 70 and the filter 72 located in the middle of the first exhaust pipe 34. Gas is supplied to the interior space 28 of the muffle 24 from a gas source 26 as needed. The internal space 28 of the muffle 24 is brought to a predetermined pressure by the intake and exhaust. In addition to the internal space 28 of the muffle 24, a gas may be supplied from the gas source 26 to the internal space 14 of the pressure vessel 12 and the internal space 18 of the insulator 16.
When the gas flows through the first exhaust pipe 34, the gas flows to the trap 38 while being kept at a high temperature by the second insulator 68. The emissions do not liquefy, solidify, or both at the surface of the second insulator 68. The first exhaust pipe 34 is not blocked. In particular, when the object to be treated 22 contains a ceramic material, the vaporization temperature of the emission material is high, and the emission material flows into the trap 38 while being kept at a high temperature by the second heat insulator 68.
(4) After the degreasing of the object 22 is completed, the temperature of the internal space 18 of the heat insulator 16 is changed by changing the value of the current flowing through the heater 20. The current flowing into the heater 20 is increased to raise the temperature of the object 22 to be processed. For example, the object 22 is heat-treated at about 1500 ℃.
(5) After the object 22 is heat-treated, the object 22 is cooled. The insulator cover 50 and muffle cover 54 are opened. The fan 88 is rotated to circulate the gas, thereby cooling the object 22. During cooling, gas may be introduced from the gas source 26 into the internal space 14 of the pressure vessel 12, the internal space 18 of the insulator 16, and the internal space 28 of the muffle 24. Further, the pressure vessel 12 may be cooled by supplying a coolant between the inner wall 44 and the outer wall 46 of the pressure vessel 12. By cooling the pressure vessel 12, the gas in contact with the inner wall 44 of the pressure vessel 12 is cooled. The circulated gas may be cooled by the heat exchangers 94a, 94b, and 94 c. By cooling the gas, the object 22 is cooled by contacting the gas.
When the object 22 is cooled, the container lid 42, the insulator lid 50, and the muffle lid 54 are opened to take out the object 22.
If a large amount of the emissions is captured by the trap 38, the fins 70, the filter 72, or both (FIG. 3) are removed from the first exhaust conduit 34 to remove the emissions. The object attached to the inner side of the first exhaust pipe 34 is scraped out by contacting the fin 70 when the fin 70 is removed.
As described above, the gas discharged from the muffle 24 flows to the trap 38 while maintaining a high temperature state. Thus, the emissions contained in the gas do not become liquid, solid, or both before reaching the trap 38. The first exhaust pipe 34 is not blocked by the purge. The first exhaust pipe 34 includes a double pipe, and the surface temperature of the first exhaust pipe 34 is reduced to reduce the influence on the devices and the human body located around the first exhaust pipe 34. In addition, in the case where the first exhaust pipe 34 has a flange connection portion, an elastic body such as an O-ring (O-ring) is used in the flange connection portion, and thus the elastic body is prevented from being deteriorated by heat.
[ embodiment 2]
As shown in fig. 4, the inner diameter of the portion 94 of the first exhaust duct 34 having the fins 90 and the coolant tubes 92 may be larger than the inner diameter of the portion 96 having the second insulator 68. Since the gas kept at a high temperature by the second insulator 68 reaches the fins 90, the fins 90 and the cooling liquid pipe 92 are enlarged, increasing the cooling capacity.
The inner pipe 64 and the outer pipe 66 may be divided by a partition plate 98 at the boundary between the portion 94 and the portion 96 of the first exhaust pipe 34. The flow pattern of the coolant may also be changed in the portion 94 and the portion 96 of the first exhaust pipe 34. For example, a thermometer is disposed in the portion 96 of the first exhaust pipe 34, and the coolant is circulated between the inner pipe 64 and the outer pipe 66 as necessary. Further, the portion 94 of the first exhaust pipe 34 cools the gas by flowing the coolant between the inner pipe 64 and the outer pipe 66 at all times.
The portion 96 of the first exhaust pipe 34 may not be a double pipe as long as the temperature of the outer surface of the second insulator 68 does not become high.
[ embodiment 3]
The heat insulator cover 50 is disposed in parallel with the muffle cover 54. As shown in fig. 5, the structure for mounting the muffle cover 54 to the heat insulator cover 50 may include a pressing member 100 and an elastic body 102. The pressing member 100 has a rod shape having a first end 104 and a second end 106. The pressing member 100 includes a heat-resistant material such as graphite felt or graphite foil. The first end 104 of the pressing member 100 is attached to the muffle lid 54. The first end 104 of the pressing member 100 is fixed to the muffle cover 54. A recess 108 may be provided in the muffle lid 54 and the first end 104 may be inserted into this recess 108 so that the position of the first end 104 is not shifted.
The insulator cover 50 has a through hole 110 through which the pressing member 100 passes. The pressing member 100 is not fixed to the heat insulator cover 50, and can move in the through hole 110. A protrusion member 112 is attached to the heat insulator cover 50 on the side opposite to the muffle cover 54, and an elastic body 102 is fixed to the protrusion member 112. The elastic body 102 uses a plate spring. The second end 106 of the pressing member 100 contacts the elastic body 102 or is fixed to the elastic body 102.
The elastic body 102 applies a force to the pressing member 100 in a direction from the heat insulator cover 50 toward the muffle cover 54. The pressing member 100 presses the muffle cover 54 toward the muffle body 52. As the muffle 24 thermally expands, the position of the muffle cover 54 moves toward the insulator cover 50. The muffle cover 54 is pressed by the elastic force of the elastic body 102, so that the muffle cover 54 does not open. The flow of the emissions from the interior space 28 of the muffle 24 to the interior space 18 of the first insulator 16 is prevented. The second exhaust pipe 36 can be prevented from being clogged with the emissions. Further, since the gap 114 is formed between the insulator cover 50 and the muffle cover 54, the muffle cover 54 can be prevented from pushing the insulator cover 50 open. So that heat can be prevented from being emitted from the inner space 18 of the first insulator 16.
The elastic body 102 is not limited to a plate spring, and a coil spring 116 may be used as shown in fig. 6. The coil spring 116 is attached to a fixing member 118, the fixing member 118 is attached to the insulator cover 50, and the coil spring 116 applies a force from the insulator cover 50 toward the muffle cover 54 to the pressing member 100. The elastic body 102 and the method of fixing the elastic body are not limited as long as the pressing member 100 can press the muffle cover 54.
A heat treatment apparatus according to a first aspect includes: a pressure vessel; a first insulator disposed in an internal space of the pressure vessel; a heater disposed in an internal space of the first heat insulator; a housing unit that is disposed in an internal space of the first heat insulator and houses an object to be processed; a pump; an exhaust pipe connecting the internal space of the housing part and the pump; a trap provided in the middle of the exhaust pipe and configured to catch a discharge material discharged from the object to be treated; and a second insulator disposed between the housing part and the trap at least in a part of the exhaust pipe.
According to the heat treatment apparatus described in the first aspect, the gas discharged from the accommodating portion flows to the trap while being kept at a high temperature by the second insulator. The trap is used to capture the release material without clogging the release material from the first insulator to the trap.
(second mode) the exhaust pipe penetrates the first insulator, and the exhaust pipe includes the second insulator between a position where the exhaust pipe penetrates the first insulator from the beginning and the trap.
According to the heat treatment apparatus described in the second aspect, the temperature of the gas passing through the exhaust pipe can be maintained between the heat insulator and the trap.
(third) the exhaust pipe includes an inner pipe and an outer pipe.
According to the heat treatment apparatus described in the third aspect, the exhaust pipe is a double pipe, and thus the coolant can be made to flow between the double pipes, and the exhaust pipe can be cooled.
(fourth item) the trap includes fins that cool the emissions.
According to the heat treatment apparatus described in the fourth aspect, the discharge is liquid, solid, or both on the surface of the fin, and the discharge can be prevented from reaching the pump.
(fifth item) the first insulator includes a tubular or box-shaped insulator body and insulator covers for opening and closing both ends of the insulator body, and the storage unit includes a tubular or box-shaped muffle body and muffle covers for opening and closing both ends of the muffle body, and a gap is provided between the insulator covers and the muffle covers.
According to the heat treatment apparatus described in the fifth aspect, the heat insulator cover can be prevented from being pressed by the muffle cover.
(sixth item) the heat treatment apparatus of the present invention comprises: a pressing member that presses the muffle cover toward the muffle body; and an elastic body that applies a force to the pressing member toward the muffle cover.
According to the heat treatment apparatus described in the sixth aspect, even when the muffle furnace is thermally elongated, the heat insulator cover and the muffle furnace cover can be kept closed by the elastic force of the elastic body.
The present invention can be implemented in various forms, which can be modified, corrected, and changed according to the knowledge of those skilled in the art, without departing from the scope of the present invention. The embodiments described are not independent embodiments, but may be implemented by combining them as appropriate according to the knowledge of a person skilled in the art.

Claims (6)

1. A thermal processing apparatus, comprising:
a pressure vessel;
a first insulator disposed in an internal space of the pressure vessel;
a heater disposed in an internal space of the first heat insulator;
a housing unit that is disposed in an internal space of the first heat insulator and houses an object to be processed;
a pump;
an exhaust pipe connecting the internal space of the housing part and the pump;
a trap provided in the middle of the exhaust pipe and configured to catch a discharge material discharged from the object to be treated; and
and a second heat insulator disposed between the housing part and the trap at least in a part of the exhaust pipe.
2. The thermal processing device of claim 1,
the exhaust pipe penetrates the first heat insulator, and
the exhaust pipe includes the second insulator between a position where the exhaust pipe penetrates the first insulator and the trap.
3. The heat treatment apparatus according to claim 1, wherein the exhaust pipe includes an inner pipe and an outer pipe.
4. The thermal processing device of claim 1, wherein said trap comprises fins that cool the emissions.
5. The heat treatment apparatus according to claim 1, wherein the first insulator includes a cylindrical or box-shaped insulator body and insulator covers for opening and closing both ends of the insulator body,
the accommodating part comprises a cylindrical or box-shaped muffle body and muffle covers for opening and closing two ends of the muffle body, and
a gap is provided between the heat insulator cover and the muffle cover.
6. The thermal processing device of claim 5, comprising:
a pressing member that presses the muffle cover toward the muffle body; and
and an elastic body that applies a force to the pressing member toward the muffle cover.
CN202021930788.3U 2020-01-31 2020-09-07 Heat treatment apparatus Active CN213120020U (en)

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Application Number Priority Date Filing Date Title
JP2020000300U JP3225851U (en) 2020-01-31 2020-01-31 Heat treatment equipment
JP2020-000300 2020-01-31

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Publication Number Publication Date
CN213120020U true CN213120020U (en) 2021-05-04

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CN (1) CN213120020U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN114001556A (en) * 2021-09-27 2022-02-01 百色皓海碳素有限公司 Roasting furnace exhaust pipe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114001556A (en) * 2021-09-27 2022-02-01 百色皓海碳素有限公司 Roasting furnace exhaust pipe

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