JP2010274333A - Drain liquid treating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suitably operate a pump in accordance with an amount of a drain liquid in a drain liquid tank even when foreign matters intrude into the drain liquid, or the drain liquid is viscous during delivery of the drain liquid stored in the drain liquid tank to the outside with the pump, and thereby to improve economical efficiency. <P>SOLUTION: The drain liquid treating device 1 for delivering a drain liquid stored in a drain liquid tank body 3 to a drain liquid adjusting means 40 by a pump 4 is constituted so that a control means 6 controls an operation of the pump 4 by turning on/off a state of an optical sensor 7 by driving a light shielding plate 8 by a light shielding plate driving means 9 in accordance with the liquid level of the drain liquid. The light shielding plate driving means 9 is equipped with: a rotating shaft part 10 fixed by the light shielding plate 8 and having an axial center in a thickness direction of the light shielding plate 8; an arm 13 having an extended part 12 extended from the rotating shaft part 10 toward a radial direction of the rotating shaft part 10 and extended downward into the drain liquid tank body 3; and a float 14 arranged on an end of the extended part 12. The light shielding plate 8 is rotated in accordance with lifting and lowering of the float 14. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a drainage treatment apparatus including a drainage tank that temporarily stores drainage sent from a processing apparatus to a drainage adjusting unit.

  In a processing apparatus that performs various types of processing, processing may be performed while supplying a processing liquid to a processing region in order to improve processing quality. For example, a cutting apparatus used for cutting a workpiece such as glass, resin, or various ceramics used for semiconductor wafers, electronic components, or optical components is held by the holding means and the holding means. A cutting means for cutting the workpiece and a machining liquid supply means for supplying a machining liquid to an area where the machining is performed by the cutting means are provided.

  The machining fluid is supplied to the machining area for the purpose of cooling machining heat due to cutting and for removing chips generated by cutting from the workpiece. City water is also used as such a processing liquid, but pure water is mainly used when the workpiece is a semiconductor. Further, when cutting a workpiece having high hardness and high processing heat generated by cutting, an aqueous solution such as a surfactant having high hydrophilicity and high cooling effect may be used.

  In general, pure water, surfactants, and the like are more expensive than city water, and therefore, the drained liquid used and discharged in the processing apparatus is reused. For example, the drainage discharged from the processing device is stored in a drainage tank, and the stored drainage is pumped to a drainage adjustment means such as a pure water facility or a cutting fluid circulation device, and repeatedly purified for use. A system has been proposed. (For example, refer to Patent Document 1).

  However, since the amount of drainage discharged from the processing apparatus is not always constant, the drainage tank may be emptied. If the pump continues to operate while the drainage tank is empty, the pump may be damaged.

  On the other hand, even when a pump capable of idling is used, it is uneconomical to perform idling for a long time. Therefore, it has also been proposed to detect the liquid level in the drainage tank using a float sensor or the like in which the float moves up and down according to the liquid level of the drainage, and to control the operation of the pump according to the liquid level (for example, Patent Document 2).

JP 2000-157996 A JP 05-177116 A

  However, if foreign matter such as processing waste is mixed in the drainage or the drainage itself is a viscous liquid, the float sensor may not operate normally. It may not be possible to control.

  The present invention has been made in view of the above-mentioned facts, and the problem is that foreign matter is mixed in the drainage when the drainage stored in the drainage tank is sent to the outside using a pump. Even when there is viscosity, the pump is appropriately operated according to the amount of drainage in the drainage tank, and further, the economy is improved.

  The present invention includes a drainage tank main body that stores drainage liquid from the processing apparatus, a pump that feeds the drainage liquid stored in the drainage tank main body to the drainage adjustment means, and a drainage tank stored in the drainage tank main body. The liquid level detection means includes a liquid level detection means for detecting the liquid level of the liquid and a control means for controlling the operation of the pump according to the output from the liquid level detection means. And a light sensor having a light receiving means for receiving the light emitted from the light emitting means, a light shielding plate disposed so as to be able to block off an optical path from the light emitting means to the light receiving means, and a drain tank body And a light shielding plate driving means for moving the light shielding plate according to the liquid level of the drained liquid stored in the light shielding plate. The light shielding plate driving means is a rotation that is fixed to the light shielding plate and has an axis in the thickness direction of the light shielding plate. Shaft part and radial direction of rotating shaft part from rotating shaft part And an arm having an extending portion that extends into the drainage tank main body, a float disposed at the end of the extending portion, and a holder that rotatably holds the rotating shaft and is fixed inside the drainage tank main body. Member.

  It is possible to arrange a plurality of photosensors, in which case the control means controls the operation of the pump in accordance with the states of the photosensors. Further, a through hole that can be positioned in the optical path of the optical sensor is formed in the light shielding plate, and the state of the optical sensor can be changed in relation to the position, size, shape, and the like of the through hole.

  In the present invention, since the operation of the pump is controlled based on the liquid level of the drainage detected by the liquid level detection means, it is possible to perform control to stop the operation of the pump when the liquid level decreases. This can prevent the pump from being damaged. In addition, since the shield plate drive means has a structure in which a float is connected to the arm, it malfunctions when the drainage fluid is viscous like the float type sensor or when the waste fluid contains machining waste. No problem occurs. It is also possible to operate the pump economically.

  If a plurality of optical sensors are arranged and the control means controls the operation of the pump in accordance with the states of the plurality of optical sensors, finer control is possible, and damage to the pump can be prevented more effectively. it can.

  Further, when a through hole that can be positioned in the optical path of the optical sensor is formed in the light shielding plate, desired control can be easily and flexibly realized depending on the position, shape, or number of the through holes.

It is the internal structure figure which looked at the drainage processing apparatus from the front side. It is sectional drawing which expands and shows schematically the inside of a drainage processing apparatus. In the 1st example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor and the 2nd photosensor are turned on from the side. In the 1st example of a drainage processing device, it is an internal structure figure which looked at the state where only the 1st photosensor is turned off from the side. In the 1st example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor and the 2nd photosensor are off from the side. In the 2nd example of a drainage processing device, it is an internal structure figure which looked at the state where only the 1st photosensor is turned off from the side. In the 2nd example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor and the 2nd photosensor are turned on from the side. In the 2nd example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor and the 2nd photosensor are off from the side. In the 3rd example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor, the 2nd photosensor, and the 3rd photosensor are turned on from the side. In the 3rd example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor is off and the 2nd photosensor and the 3rd photosensor are on from the side. In the 3rd example of a drainage processing device, it is the internal structure figure which looked at the state where the 1st photosensor and the 2nd photosensor are off, and the 3rd photosensor is on from the side. In the 3rd example of a drainage processing device, it is an internal structure figure which looked at the state where the 1st photosensor, the 2nd photosensor, and the 3rd photosensor are turned off from the side.

  The drainage treatment apparatus 1 shown in FIG. 1 is an apparatus that stores the drainage discharged from the processing apparatus 20 and sends it to the drainage adjustment means 40, and the drainage tank that stores the drainage flowing in from the processing apparatus 20. The main body 3, the pump 4 for sending the drainage stored in the drainage tank main body 3 to the drainage adjustment means 40, and the liquid level of the drainage stored in the drainage tank main body 3 are detected and the liquid level is detected. A liquid level detection means 5 for performing a corresponding output and a control means 6 for controlling the operation of the pump 4 based on the output from the liquid level detection means 5 are provided.

  The liquid level detecting means 5 is a light sensor 7 configured to receive light emitted from the light emitting means 70 in the light receiving means 71, and a light shielding that rotates so as to block the optical path from the light emitting means 70 to the light receiving means 71. It comprises a plate 8 and light shielding plate driving means 9 for moving the light shielding plate 8 in accordance with the liquid level of the drainage in the drainage tank main body 3.

  The control unit 6 transmits an input port for inputting the output from the liquid level detection unit 5, a memory for storing information input from the input port, a CPU for performing various calculations, and the like for transmitting signals to the pump 4. Output port.

  As shown in FIG. 2, a rotating shaft portion 10 is connected to the light shielding plate 8. The rotating shaft portion 10 has an axis in the thickness direction of the light shielding plate 8, and the light shielding plate 8 rotates in the surface direction as the rotating shaft portion 10 rotates.

  A bracket 30 extending in the horizontal direction is fixed to a wall surface inside the drainage tank body 3. The bracket 30 is formed with a through hole 30 a for avoiding contact with the light shielding plate 8. On the upper surface side of the bracket 30, a support wall 30 b that supports the optical sensor 7 from the side portion side is fixed in an upright state. On the other hand, a holding member 11 is fixed to the lower surface side of the bracket 30 so as to rotatably hold the rotary shaft portion 10 connected to the light shielding plate 8.

  The other end side of the rotating shaft portion 10 is in a state of being connected to the extending portion 12 via the bending portion 10a. The extending portion 12 extends in the radial direction of the rotating shaft portion 10 and hangs down inside the drainage tank main body 3 as shown in FIG. The rotating shaft portion 10 and the extending portion 12 constitute an arm 13.

  As shown in FIG. 1, a float 14 that floats on the drainage stored in the drainage tank body 3 is disposed at the lower end of the extending portion 11, and responds to fluctuations in the level of drainage. When the vertical position of the float 14 fluctuates, the arm 13 rotates about the axis of the rotating shaft portion 10, and the shielding plate 8 fixedly connected to the rotating shaft portion 10 also moves in the front-rear direction in FIG. It is the structure which rotates. Thus, the arm 12, the float 14, and the holding member 11 constitute the light shielding plate driving means 9.

  As shown in FIG. 2, the light emitted from the light emitting means 70 of the optical sensor 7 has a horizontal optical axis in the illustrated example, and a light receiving means 71 is disposed on the optical path. Between the light emitting means 70 and the light receiving means 71, a space 72 for accommodating the peripheral edge portion of the light shielding plate 8 in a non-contact state is formed. Depending on the position of the light shielding plate 8, the light sensor 7 allows the light emitted from the light emitting means 70 to pass toward the light receiving means 71 (on state) or the light emitted from the light emitting means 70. It acts to be in one of the states (off state) in which the light receiving means 71 is blocked from passing through.

  A signal line 15 extending from the upper part of the optical sensor 7 toward the outside of the drainage tank main body 3 is connected to the control means 6 shown in FIG. 1, and the optical sensor 7 is in an on state through the signal line 15. It is possible to notify the control means 6 of whether it is in the off state. One or two or more photosensors may be used. When there are two or more photosensors, the state of each photosensor is individually recognized by the control means 6.

  Below, the example of the change of the number of optical sensors, arrangement | positioning position, and the structure of a shielding board and the example of the liquid feeding control method by the operation control of the pump 4 in each example are demonstrated.

(1) 1st example The shielding board 8 of the example of FIG. 3 is formed in the substantially fan shape. In addition, the optical path connecting the light emitting means 70a and the light receiving means 71a of the first optical sensor 7a and the second light on an arc having a radius of curvature smaller than the arc portion 80 of the shielding plate 8 and centering on the rotation center of the shielding plate 8. An optical path connecting the light emitting means 70b and the light receiving means 71b of the sensor 7b is located.

  The first optical sensor 7a and the second optical sensor 7b are arranged at positions where both are turned on when the float 14 is also at a low position because the liquid level of the drainage 3a is low. The first optical sensor 7a is an optical sensor that is initially turned off when the arm 13 and the light shielding plate 8 are rotated clockwise in FIG. 3, and the second optical sensor 7b is an off-state of the first optical sensor 7a. The light sensor is turned off when the light shielding plate 8 is further rotated in the same direction after entering the state. The arrangement positions of the first optical sensor 7a and the second optical sensor 7b are determined according to the conditions of the liquid level range when the pump 4 is operated.

When the state of the first optical sensor 7a and the second optical sensor 7b that change according to the position of the shielding plate 8 is (S1, S2), (S1, S2) takes one of the following states.
(S1, S2) = (on, on),
(S1, S2) = (off, on),
(S1, S2) = (off, off),
(S1, S2) = (On, Off)

  The state of the first optical sensor 7 a and the second optical sensor 7 b is output to the control means 6 through the signal line 15. As shown in FIG. 3, when the float 14 is not raised because the liquid level of the drainage 3a is low, and the arm 12 is not lifted, the shielding plate 8 is moved to the first optical sensor 7a and the second optical sensor 7a. Since the optical path of the optical sensor 7b is not blocked, the state (S1, S2) = (ON, ON) is established, and the control means 6 recognizes this state. In this case, if the pump 4 is operated, the drainage liquid 3 a inside the drainage tank main body 3 may be emptied and the pump 4 may break down. Send a signal to stop. In the pump 4 that has received this signal, since the liquid feeding to the drainage adjusting means 40 is stopped, the liquid volume of the drainage liquid 3a inside the drainage tank body 3 is not reduced thereafter.

  When the liquid level is increased by the drainage fluid flowing from the processing device 20, the float 14 is raised as shown in FIG. Since the rotating shaft portion 10 does not move up and down, the float 14 rises with the horizontal movement in the figure as the arm 13 rotates. Accordingly, along with this, the shielding plate 8 also rotates around the connecting portion with the rotary shaft portion 10. As a result of this rotation, only the first optical sensor 7a is eventually blocked by the shielding plate 8 and turned off, and the state changes to (S1, S2) = (off, on).

  Thus, the operation of the pump 4 may be started immediately when the state of (S1, S2) = (off, on), but since the inflow amount of the drainage from the processing device 2 is not constant, Immediately after the inflow amount decreases and the liquid level drops to (S1, S2) = (ON, ON), the operation of the pump 4 must be stopped again. That is, depending on the state of change in the liquid level, the pump may be repeatedly activated and stopped many times. Therefore, the control means 6 stores the state before the state change, that is, in this case (S1, S2) = (ON, ON) in the memory, and the state before the change is (S1, S2). ) = (ON, ON), and when the liquid level is rising, the operation of the pump 4 is kept stopped.

  When the liquid level further rises from the state of (S1, S2) = (OFF, ON) shown in FIG. 4, the first optical sensor 7a and the second optical sensor are shielded by the shielding plate 8, as shown in FIG. Both optical paths 7b are blocked, and (S1, S2) = (off, off). Then, when the control means 6 recognizes the state, it sends a signal for starting the operation to the pump 4, starts the operation of the pump, and starts the liquid supply to the drainage treatment apparatus 40.

  When the liquid level of the drainage liquid in the drainage tank body 3 falls from the state of (S1, S2) = (off, off) and changes to (S1, S2) = (off, on) shown in FIG. The operation of the pump 4 may be stopped at that time, but when the inflow thereafter increases and the liquid level rises from this state and becomes (S1, S2) = (off, off), the pump 4 again Must start operation. Further, even if the liquid level falls further, the pump 4 does not immediately fail. If the state before the change is (S1, S2) = (off, off), the pump 4 is not stopped and the operation is continued. Let it continue. If the state before the change is (S1, S2) = (ON, ON), the pump is left unoperated as described above.

  When the liquid level further drops and (S1, S2) = (OFF, OFF), the control means 6 determines that the pump 4 may be broken, and causes the pump 4 to stop the pump 4. A signal is transmitted to stop the liquid feeding to the drainage treatment apparatus. When the liquid level rises from this state, the same control as described above is performed.

  In the above example, since there are two optical sensors, when (S1, S2) = (off, on), different control is performed depending on whether the liquid level is rising or falling. It is possible.

  Note that a third photosensor for preventing overflow of drainage may be provided on the extension of the second photosensor 7b in the clockwise direction. In this case, when the third optical sensor is turned off, the control unit 6 may issue a warning that the amount of liquid is excessive and may cause an overflow.

(2) 2nd example The example shown in FIGS. 6-8 is an example in case the pump 4 is a type which can be idle-run. As shown in FIG. 6, in this example, the first optical sensor 7a and the second optical sensor 7b are arranged at a distance greater than that of the first example shown in FIGS. Control different from the example becomes possible. In the second example, the control means 6 includes a timer. Except for the distance between the first optical sensor 7a and the second optical sensor 7b and the presence or absence of a timer, it is the same as the first example.

  For example, when it is assumed that the pump 4 is basically operated at all times, as shown in FIG. 6, the liquid level rises from when the float 14 is at the lowest position (S1, S2) = If it is (OFF, ON), the control means 6 will transmit the signal which operates the pump 4, and will operate the pump 4.

  On the other hand, as shown in FIG. 7, also when the liquid level drops and (S 1, S 2) = (ON, ON), the control means 6 sends a signal for stopping the operation to the pump 4. The timer is not immediately transmitted, but the timer provided in the control means 6 is operated, a predetermined time is set in the timer, and the pump is kept operating until the predetermined time elapses.

  When the predetermined time stored in the timer elapses, the control means 6 recognizes the states of the first optical sensor 7a and the second optical sensor 7b. If (S1, S2) = (ON, ON) at that time, a signal for stopping the pump 4 is transmitted to stop the operation of the pump 4. Thus, even if the pump 4 is of a type that can be idled, it is economical to stop the operation when the liquid level drops. If (S1, S2) = (ON, ON) is not satisfied when the predetermined time has elapsed, the operation of the pump 4 is continued.

  As shown in FIG. 8, when (S1, S2) = (off, off), it is determined that there is a possibility of overflow because the liquid level is too high, and a warning sound is generated. To inform. Thus, even when there are two photosensors, the possibility of overflow can be detected depending on the location of the photosensor and the control method.

(3) Third Example As shown in FIG. 9, a through hole 81 may be provided in the light shielding plate 8a, and the through hole 81 may be positioned in the optical path of the optical sensor. In the example of FIG. 9, the first optical sensor 7 a, the second optical sensor 7 b, and the third optical sensor 7 c are provided, and the shielding plate 8 is formed with a slit-like through hole 81 along an arc. .

  In the third example, when the liquid level of the drainage is low and the float 14 is at the lowest position, the through hole 81 is positioned in the optical path of the first optical sensor 7a, the second optical sensor 7b, and the third optical sensor 7c. Thus, all the optical sensors are configured to be in an on state. That is, assuming that the states of the first optical sensor 7a, the second optical sensor 7b, and the third optical sensor 7c are (S1, S2, S3), (S1, S2, S3) = (ON, ON, ON). In this state, for example, it is determined that the amount of drainage is too small, and the control unit 6 stops the operation of the pump 4.

  When the liquid level rises and the float 14 rises, as shown in FIG. 10, the shading plate 8a rotates clockwise, and the through hole 81 is removed from the optical path of the first optical sensor 7a. Only in the off state, (S1, S2, S3) = (off, on, on). In this state, the control means 6 may send a signal for operating the pump 4, or operate the pump if the timer is activated and the liquid level rises even after a predetermined time has elapsed. You may make it make it. At this time, the pump 4 may be stopped.

  When the liquid level rises and the through hole 81 is removed from the optical path of the second optical sensor 7b as shown in FIG. 11, (S1, S2, S3) = (off, off, on). In this case, when the state before the change is (S1, S2, S3) = (off, on, on), the control method is determined depending on what control is performed at that time. For example, when the pump 4 is operated before the change, the state is maintained as it is, when the timer is operated, a signal for operating the pump 4 is transmitted, and when the pump 4 is stopped, the pump 4 is stopped. 4 starts operation.

  As the liquid level further rises, as shown in FIG. 12, when the through hole 81 is removed from the optical path of the third optical sensor 7c, (S1, S2, S3) = (off, off, off). In this case, it is determined that there is a possibility of overflow because the liquid level has risen too much, and notification is made by sounding a warning sound or the like.

  In addition, the through-hole formed in the shielding board 8a does not need to be slit-shaped, and a plurality of through-holes may be formed.

  As described in the first to third examples, the number and arrangement positions of the optical sensors may be arbitrarily set so that the desired control can be performed. Accordingly, the shape of the shielding plate and the range of movement can be set. Moreover, it is also free to set the optical sensor in an off state or an on state when the liquid level is in any state.

  A float 14 is disposed at the lower end of the extending portion 12 suspended from the rotary shaft portion 10 fixed to the shielding plate 8 (8a), and one or more optical sensors and shielding plates are disposed at a high position away from the liquid level of the drainage. Since the drainage does not adhere to the optical sensor and the shielding plate, even if foreign matter is mixed in the drainage or the drainage itself is viscous, the liquid level detection means There is no risk of 5 malfunctioning. Moreover, since the control means 6 can control operation | movement of a pump according to the state of an optical sensor, a pump can be operated economically.

1: Drainage treatment device 20: Processing device 3: Drainage tank body 4: Pump 40: Drainage adjustment means 5: Liquid level detection means 6: Control means 7, 7 a, 7 b, 7 c: Optical sensor 70: Light emission means 71 : Light receiving means 8: light shielding plate 9: light shielding plate driving means 10: rotating shaft portion 11: holding member 12: extending portion 13: arm 14: float 15: signal line

Claims (3)

A drainage tank main body for storing the drainage liquid from the processing apparatus, a pump for feeding the drainage liquid stored in the drainage tank main body to the drainage adjusting means, and a drainage liquid stored in the drainage tank main body. A drainage treatment apparatus comprising a liquid level detection means for detecting a liquid level, and a control means for controlling the operation of the pump in accordance with an output from the liquid level detection means,
The liquid level detecting means includes
An optical sensor comprising: a light emitting means; and a light receiving means for receiving light emitted from the light emitting means;
A light shielding plate disposed so as to be able to block an optical path from the light emitting means to the light receiving means by rotation;
A light shielding plate driving means for moving the light shielding plate according to the liquid level of the drainage stored in the drainage tank body,
The light shielding plate driving means includes:
A rotating shaft portion fixed to the light-shielding plate and having an axis in the thickness direction of the light-shielding plate; and an extending portion extending from the rotating shaft portion in the radial direction of the rotating shaft portion and depending on the drainage tank body. An arm having
A float disposed at the end of the extension,
A drainage treatment apparatus comprising: a holding member that rotatably holds the rotating shaft and is fixed inside the drainage tank body. A plurality of the optical sensors are disposed,
The control means includes
The drainage processing apparatus according to claim 1, wherein operation of the pump is controlled in accordance with a state of the plurality of optical sensors. The drainage processing apparatus according to claim 1, wherein a through hole that can be positioned in an optical path of the optical sensor is formed in the light shielding plate.

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