CN113798298B

CN113798298B - Glass substrate belt cleaning device

Info

Publication number: CN113798298B
Application number: CN202110983037.0A
Authority: CN
Inventors: 曹海勇; 葛树宝; 闫冬成; 杨园园
Original assignee: Tunghsu Technology Group Co Ltd; Hebei Guangxing Semiconductor Technology Co Ltd
Current assignee: Tunghsu Technology Group Co Ltd; Hebei Guangxing Semiconductor Technology Co Ltd
Priority date: 2021-08-25
Filing date: 2021-08-25
Publication date: 2023-03-17
Anticipated expiration: 2041-08-25
Also published as: CN113798298A

Abstract

The present disclosure provides a glass substrate cleaning device. The device comprises a frame, a cleaning tank, a conveying mechanism, a lifting mechanism and an ultrasonic mechanism. The cleaning tank comprises a bottom plate arranged on the frame and a side plate arranged around the periphery of the bottom plate. The conveying mechanism is arranged in a space defined by the bottom plate and the side plates and comprises a plurality of lower conveying shafts which are arranged in parallel at intervals, and the lower conveying shafts are obliquely arranged relative to the horizontal plane in the axial direction of the conveying shafts. The lifting mechanism is located below the base plate, and includes a lifting rod that can be raised and lowered, the lifting rod extending through the base plate and supporting the transport mechanism. The ultrasonic mechanism comprises an ultrasonic generating device and an ultrasonic vibrating plate, the ultrasonic vibrating plate is arranged between the bottom plate and the lower transmission shaft, and the ultrasonic generating device is used for driving the ultrasonic vibrating plate. The device combines inclined conveying and ultrasonic cleaning technologies, can reduce water stored on the surface of the glass to the maximum extent, and can efficiently remove residual glue on the surface of the glass.

Description

Glass substrate belt cleaning device

Technical Field

The disclosure relates to the field of production of flat ultra-thin glass, in particular to a glass substrate cleaning device.

Background

In recent years, although a technique for bonding glass substrates has been developed, a glue used for bonding remains on the surface of glass. In the subsequent production process, the residual glue needs to be cleaned.

In an automatic glass substrate production line, a horizontal transfer is mainly used in a cleaning production line. The ultrasonic cleaner is the core process equipment, and mainly has a good cleaning effect on oil stains on the surface of glass. With the rapid application of advanced glass substrates in recent years, the washer equipment should be upgraded. The horizontal conveying mechanism in the existing cleaning equipment can lead the water on the glass surface to be stored, and is not beneficial to the discharge of waste water.

Therefore, there is a need for an improved cleaning apparatus for glass substrates, and a cleaning device capable of effectively removing residual glue on the glass surface and reducing water on the glass surface is developed.

Disclosure of Invention

The present disclosure is directed to overcoming the above problems in the prior art, and providing a glass substrate cleaning apparatus, which combines inclined conveyance and ultrasonic cleaning techniques, and can reduce water stored on the glass surface to the maximum extent and remove the residual glue on the glass surface with high efficiency.

According to an aspect of the present disclosure, there is provided a glass substrate cleaning apparatus including:

a frame;

the washing tank comprises a bottom plate fixedly mounted on the rack and a plurality of side plates arranged around the periphery of the bottom plate;

the conveying mechanism is arranged in a space defined by the bottom plate and the side plates and comprises a plurality of lower conveying shafts which are arranged in parallel at intervals, and the axial directions of the lower conveying shafts are inclined relative to the horizontal plane;

a lifting mechanism located below the base plate, the lifting mechanism including a lifting rod that can be raised and lowered, the lifting rod extending through the base plate and supporting the transport mechanism; and

the ultrasonic mechanism comprises an ultrasonic generating device and an ultrasonic vibrating plate, the ultrasonic vibrating plate is arranged between the bottom plate and the lower transmission shaft, and the ultrasonic generating device is used for driving the ultrasonic vibrating plate.

According to an embodiment of the present disclosure, the transfer mechanism further includes a base including a first support and a second support, the first support and the second support being disposed at both ends of the lower transmission shaft.

According to an embodiment of the present disclosure, the transfer mechanism further includes a transmission gear, the first and second brackets include a mounting hole through which the lower transmission shaft extends, and the transmission gear is mounted at an end of the lower transmission shaft.

According to one embodiment of the present disclosure, each lower transfer shaft is provided with a plurality of conveying wheels at intervals in an axial direction thereof.

According to one embodiment of the disclosure, the transport wheel is an O-ring fitted over the lower transmission shaft.

According to one embodiment of the present disclosure, the lower transmission shaft is inclined by 5-10 ° with respect to the horizontal plane in the axial direction of the transmission shaft.

According to an embodiment of the present disclosure, the transfer mechanism further includes an upper pressing shaft, and a mounting position of the upper pressing shaft is higher than a mounting position of the lower transmission shaft.

According to one embodiment of the present disclosure, bearing seats are provided above the tops of the first and second brackets, and the upper pressing shaft is supported on the bearing seats by means of bearings.

According to an embodiment of the present disclosure, the apparatus further includes a sensor located at a side away from the substrate entrance, the sensor being configured to detect the presence or absence of the glass substrate at the corresponding position and to transmit a detection signal to the controller.

According to one embodiment of the present disclosure, a lift mechanism includes an automatic level lift mechanism and a jacking driver, the automatic level lift mechanism being a four-point synchronous lift mechanism and including a lift rod.

According to an embodiment of the present disclosure, the bottom plate includes an opening for passing the lifting rod therethrough, a side wall of the opening is provided with a sealing groove, and a sealing ring is disposed in the sealing groove.

According to one embodiment of the present disclosure, the seal ring is a ceramic seal ring.

According to one embodiment of the present disclosure, the ultrasonic vibration plate is installed on the lifting rod, and the base of the transmission mechanism is installed at both ends of the ultrasonic vibration plate.

According to an embodiment of the present disclosure, the second bracket of the base is directly mounted on the ultrasonic vibration plate, and the first bracket is mounted on the ultrasonic vibration plate via the lifting cylinder. The output end of the lifting cylinder lifts the first bracket by a predetermined height such that the lower transmission shaft and the upper pressing shaft installed between the first bracket and the second bracket are inclined by a predetermined angle.

Compared with the existing horizontal conveying cleaning device, the glass substrate cleaning device has the following advantages:

the lower transmission shaft of the device is obliquely arranged relative to the horizontal plane in the axial direction of the transmission shaft, so that the glass substrate is also obliquely supported on the lower transmission shaft, water on the surface of the glass can automatically flow into the cleaning tank after the cleaning is finished, and the water on the surface of the glass is reduced;

the device is also provided with a lifting mechanism for lifting the conveying mechanism, the lifting mechanism enables the glass to be completely immersed in water during cleaning, and meanwhile, the height of the water is not required to be close to the inlet of the glass, so that the water is prevented from overflowing from the inlet of the glass;

according to the device, the conveying wheels are arranged on the lower conveying shaft and the upper pressing shaft, so that the glass substrate is in close point contact with the lower conveying shaft and the upper pressing shaft through the conveying wheels, and the surface of the glass substrate can be in contact with the cleaning liquid in the largest range to improve the cleaning effect;

the automatic horizontal lifting mechanism adopts a four-point synchronous lifting mechanism, can realize four-point integral synchronous lifting and automatic leveling, and prevents equipment from being damaged and glass substrates from being damaged due to asynchronous lifting.

The combination of the lower transmission shaft and the upper pressing shaft can realize stable transmission of the glass substrate and stable lifting process of the glass substrate, and the upper pressing shaft can avoid the problem that the glass substrate cannot sink into the cleaning liquid due to the buoyancy effect of the cleaning liquid in the sinking process of the glass substrate.

Additional features and advantages of the disclosure will be set forth in the detailed description which follows.

Drawings

The accompanying drawings, which are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure without limiting the disclosure. In the drawings:

fig. 1 is a top perspective view of a partial structure of a glass substrate cleaning apparatus according to one embodiment of the present disclosure.

Fig. 2 is a side cross-sectional view of a glass substrate cleaning apparatus according to one embodiment of the present disclosure.

Description of the reference numerals

100 machine frame, 200 cleaning tank, 210 bottom plate, 220 side plate, 221 inlet, 300 transmission mechanism, 310 base, 311 first support, 312 second support, 313 lifting cylinder, 320 lower transmission shaft, 321 transmission wheel, 330 transmission gear, 340 upper pressure shaft, 350 bearing seat, 400 lifting mechanism, 410 automatic horizontal lifting mechanism, 420 lifting driver, 500 ultrasonic mechanism, 510 ultrasonic vibration plate, 520 ultrasonic generator, 600 sensor and A axis.

Detailed Description

The following detailed description of specific embodiments of the present disclosure is provided in connection with the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present disclosure, are given by way of illustration and explanation only, not limitation.

In the case where no description is made to the contrary, the terms "upper", "lower", "top" and "bottom" used in the present disclosure are used with reference to the actual usage state of the related components, and refer to the specific directions shown in fig. 1. Furthermore, the terms "first," "second," and the like, as used in this disclosure, are intended to distinguish one element from another, and not necessarily for order or importance. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated.

Referring to fig. 1 to 2, the present disclosure provides a glass substrate cleaning apparatus. The apparatus generally includes a frame 100, a cleaning tank 200, a transfer mechanism 300, a lift mechanism 400, and an ultrasonic mechanism 500.

As shown in fig. 1, the cleaning tank 200 is mounted on the frame 100. The sink 200 generally includes a base plate 210 and a plurality of side plates 220. In order to clearly show the internal structure of the device, only two side plates are shown in fig. 1. However, in actual use, the side plates of the apparatus should be disposed around the entire periphery of the bottom plate 210 to form a space in which the cleaning solution can be contained. The bottom plate 210 and the side plate 220 are fixedly installed on the frame 100. Alternatively, the cleaning tank 200 may further include a ceiling plate (refer to fig. 2). One of the side plates (the left side plate in fig. 1) is provided with a base plate entrance 221. The bonded glass substrate enters the cleaning tank 200 through the inlet 221. The inlet 210 is provided at a position higher than the highest water level in the wash tank 200 so as to prevent water from overflowing from the inlet 210.

As shown in fig. 1, the transfer mechanism 300 may include a base 310 and a lower transfer shaft 320 mounted on the base 310. The base 310 is supported by four lift rods of the lift mechanism 400. As shown in fig. 2, the base 310 may include a first bracket 311 and a second bracket 312 that are disposed opposite and spaced apart. The plurality of lower transmission shafts 320 are supported between the first bracket 311 and the second bracket 312. For example, one end of each lower transmission shaft 320 is supported on the first bracket 311, and the other end is supported on the second bracket 312. In some embodiments of the present disclosure, each of the first bracket 311 and the second bracket 312 includes a plurality of mounting holes. Both ends of the lower transmission shaft 320 extend through the mounting holes of the first and

second brackets

311 and 312, respectively, so that each lower transmission shaft 320 is rotatably supported by the first and

second brackets

311 and 312. The first bracket 311 may be supported on an output end of the elevation cylinder 313, and the second bracket 312 may be supported on the ultrasonic vibration plate 510. The elevation cylinder 313 serves to elevate the position of the first bracket 311 such that the axis a of the lower transmission shaft 320 supported between the first bracket 311 and the second bracket 312 is inclined by 5-10 ° with respect to the horizontal plane. Alternatively, the lift cylinder 313 may not be used. The position of the mounting hole of the first bracket 311 for mounting the lower push shaft 320 may be set high and the position of the mounting hole of the second bracket 312 may be set low, whereby the axis a of the lower transmission shaft 320 may be inclined with respect to the horizontal plane. A driving gear 330 may be installed on an end of the lower transmission shaft 320 extending beyond the installation hole. The transmission gear 330 rotates the transmission shaft 320 under the action of a transmission mechanism (not shown here).

As shown in fig. 1 and 2, a plurality of lower transmission shafts 320 are arranged parallel to and spaced apart from each other. Each lower transmission shaft 320 rotates about a respective axis a. The plurality of lower transmission shafts 320 are driven by the transmission mechanism to rotate synchronously and in the same direction. In the illustrated embodiment of the present disclosure, the plurality of lower transfer shafts 320 rotate clockwise about the axis a to transfer the glass substrate from the illustrated left side to the illustrated right side (as indicated by the arrow in fig. 1). Each lower transmission shaft is disposed obliquely with respect to the horizontal plane in the direction of the axis a, preferably at an angle of 5-10 deg. to the horizontal plane. That is, the inclined direction of the lower transfer shaft 320 is perpendicular to the transfer direction of the glass substrate. By arranging the lower transfer shaft 320 to be inclined in the axial direction, thereby supporting the glass substrate also obliquely on the lower transfer shaft 320, the water on the glass surface can automatically flow into the cleaning bath 200 after the cleaning is completed, and the water storage on the glass surface can be reduced.

In some embodiments of the present disclosure, each lower transmission shaft 320 is provided with a plurality of conveying wheels 321 at intervals in the axial direction a thereof. The delivery wheel 321 may employ an O-ring. The O-ring is fitted over the lower transfer shaft 320. The conveying wheel 321 makes the contact between the glass substrate and the lower conveying shaft 320 similar to point contact, and the maximum contact of the surface of the glass substrate with the cleaning liquid can be achieved to improve the cleaning effect.

In some embodiments of the present disclosure, the transfer mechanism 300 further comprises a pressing shaft 340. The number of the upper pressing shafts 340 may be less than the number of the lower transmission shafts 320. The upper pressing shaft 340 is installed at a higher position than the lower transmission shaft 320. The upper pressing shaft 340 serves to restrain the glass substrate upward to prevent the glass substrate from floating due to buoyancy when the glass substrate is lowered into water. A bearing housing 350 may be provided above the top of the first bracket 311 and the second bracket 312, a bearing is installed in the bearing housing 350, and the upper pressing shaft 340 is supported on the bearing housing 350 using a bearing. Similarly to the lower transmission shaft 320, a plurality of conveying wheels 321 may also be disposed on the upper pressing shaft 340 to contact the glass substrate with the upper pressing shaft 340 at a close point, so as to contact the surface of the glass substrate with the cleaning solution to the maximum extent to improve the cleaning effect. The upper pressing shaft 340 is disposed in parallel with the lower transmission shaft 320.

The lifting mechanism 400 is provided below the base plate 210. The lift mechanism 400 generally includes an automatic level lift mechanism 410 and a lift drive 420. The automatic level lifting mechanism 410 can adopt a four-point synchronous lifting mechanism, which can realize four-point integral synchronous lifting and automatic leveling, and prevent the equipment from being damaged and the glass substrate from being damaged due to asynchronous lifting. The jacking driver 420 drives the auto-leveling mechanism 410 to move up and down. The base plate 210 is provided with four openings, and four lift pins of the automatic level-raising mechanism 410 extend through the corresponding openings of the base plate 210. A sealing structure is required between the elevating bar and the bottom plate 210 to prevent water leakage. At the position where the bottom plate 210 is provided with the opening, a sealing groove may be formed on a sidewall of the opening, and a wear-resistant sealing member such as a ceramic sealing ring may be disposed in the sealing groove. Thereby preventing the water in the cleaning tank 200 from flowing out from the opening 210 and the gap of the elevation bar. Other waterproof structures can also be adopted, for example, a water blocking pipe can be sleeved on the part of the lifting rod above the bottom plate 210, and a water blocking cover similar to a bottle cap in shape is arranged outside the water blocking pipe. The sealing structure for preventing liquid leakage is realized through the matching of the water blocking pipe and the water blocking cover. Other leak-proof structures known to those skilled in the art may also be used. When the lift driver 420 drives the auto-leveling mechanism 410 to move upward, the auto-leveling mechanism 410 supports the lower transmission shaft 320 of the transfer mechanism 300 to be lifted to the same height as the entrance 221. At this time, the transferred glass substrate is in conformity with the height of the gap between the lower transfer shaft 320 and the upper pressing shaft 340 and can be smoothly transferred onto the lower transfer shaft 320. After the glass substrate is entirely supported on the transfer mechanism 300, the lift-up driver 420 drives the auto-leveling mechanism 410 to move down, whereby the transfer mechanism 300 and the glass substrate move down together with the auto-leveling mechanism 410 such that the glass substrate is immersed in water for cleaning.

The ultrasonic mechanism 500 generally includes an ultrasonic horn 510 and an ultrasonic wave generating device 520. The ultrasonic vibration plate 510 is disposed between the lower transmission shaft 320 and the base plate 210, and the ultrasonic vibration plate 510 may be supported by the base plate 210 or may be supported by four lift pins of the auto leveling mechanism 410. In the disclosed embodiment, the ultrasonic vibration plates 510 are installed at the top ends of the four lift pins of the automatic level-raising mechanism 410. The second bracket 312 is mounted to one end of the ultrasonic horn 510. The output end of the lifting cylinder 313 is mounted to the end of the ultrasonic horn 510 opposite the second bracket 312. The first bracket 311 is provided on an output end of the lifting cylinder 313. Thus, the ultrasonic horn 510 and the transfer mechanism 300 move together with the elevation of the elevation bar, and there is no need to readjust the distance between the ultrasonic horn 510 and the lower transmission shaft 320 during the elevation. Optionally, the base plate 210 is further provided with an additional opening through which the output shaft of the lifting cylinder 313 passes. The gap between the other opening and the output shaft of the lift cylinder 313 also needs to be sealed with a sealing structure. Alternatively, the ultrasonic vibration plate 510 may be disposed on the base plate 210, and the first bracket 311 and the second bracket 312 may be connected to the corresponding lift pins, respectively. In this case, the elevation mechanism 400 drives only the transfer mechanism 300 to be raised and lowered, and the position of the ultrasonic vibration plate 510 does not change.

The ultrasonic wave generating device 520 operates at a predetermined frequency and voltage and transmits a signal to the ultrasonic horn 510 through a cable, so that the ultrasonic horn 510 generates ultrasonic vibration waves. Bubble groups are formed above the ultrasonic vibration plate 510 and act on the periphery of the surface of the glass substrate, so that residual glue on the surface of the glass substrate is stripped, and the cleaning effect is realized. In some embodiments of the present disclosure, the top plate of the ultrasonic horn 510 is a perforated mesh plate.

In some embodiments of the present disclosure, the apparatus further comprises a sensor 600 and a controller (not shown) for detecting the glass substrate. The sensor 600 is mounted on the base plate 210 and is located on a side away from the inlet 221 (i.e., the right side as viewed in fig. 1). When the glass substrate is moved to a position corresponding to the sensor 600 by the conveying action of the conveying mechanism 300, the sensor 600 judges that the glass substrate is present at the position corresponding thereto based on the collected information and sends the collected detection signal to the controller. The controller judges that the glass substrate has been completely supported on the conveyance mechanism 300 based on the signal, and controls the elevation of the conveyance mechanism 300 accordingly.

When the glass substrate is cleaned using the apparatus of the present disclosure, the glass substrate first enters the cleaning bath 220 from the inlet 221 of the side plate 220. The controller controls the lift pins of the automatic leveling mechanism 410 to be raised such that the lower transfer shaft 320 is raised to a position substantially flush with the entrance 221. The transmission mechanism of the transfer mechanism 300 is activated to rotate the lower transmission shaft 320 about its axis a to move the glass substrate toward the right side as shown. When the glass substrate is entirely supported on the lower transfer shaft 320, the lift pins of the auto-leveling mechanism 410 are controlled to descend manually or based on information detected by the sensor. The ultrasonic horn 510 and the transfer mechanism 300 are lowered together with the lift pins so that the transfer mechanism 300 and the glass substrate positioned thereon are immersed in water. Then, the ultrasonic wave generator 520 is started to clean the glass substrate by using the bubbles generated by the ultrasonic vibration plate 510. When the cleaning is completed, the lift pins of the auto-leveling mechanism 410 lift the transfer mechanism 300, so that the glass substrate is raised above the cleaning solution. Because the glass substrate is obliquely arranged, water on the glass substrate flows back to the cleaning tank 200 along the oblique direction, and water storage on the surface of the glass is avoided.

The preferred embodiments of the present disclosure are described in detail with reference to the accompanying drawings, however, the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present disclosure within the technical idea of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

It should be noted that, in the foregoing embodiments, various features described in the above embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, various combinations that are possible in the present disclosure are not described again.

In addition, any combination of various embodiments of the present disclosure may be made, and the same should be considered as the disclosure of the present disclosure, as long as it does not depart from the spirit of the present disclosure.

Claims

1. A glass substrate cleaning device, comprising:

a frame;

the cleaning tank comprises a bottom plate fixedly mounted on the rack and a plurality of side plates arranged around the periphery of the bottom plate, and the bottom plate is provided with an opening;

the conveying mechanism is arranged in a space defined by the bottom plate and the side plates, and comprises a base and a plurality of lower conveying shafts which are arranged in parallel at intervals, the axis direction of each lower conveying shaft is inclined relative to the horizontal plane, the conveying mechanism further comprises an upper pressing shaft, the mounting position of the upper pressing shaft is higher than that of each lower conveying shaft, and the base comprises a first support and a second support;

a lifting mechanism located below the bottom plate, the lifting mechanism including a lifting rod that is capable of being raised and lowered, the lifting rod extending through the bottom plate and for supporting the transport mechanism, the lifting rod extending through an opening of the bottom plate, the lifting mechanism including an automatic leveling mechanism and a jacking driver, the automatic leveling mechanism being a four-point synchronous lifting mechanism and including the lifting rod; and

the ultrasonic mechanism comprises an ultrasonic generating device and an ultrasonic vibrating plate, the ultrasonic vibrating plate is arranged between the bottom plate and the lower transmission shaft, the ultrasonic generating device is used for driving the ultrasonic vibrating plate, the ultrasonic vibrating plate is arranged at the top end of the lifting rod, and the second support is supported on the ultrasonic vibrating plate;

the output end of the lifting cylinder is installed at one end, opposite to the second support, of the ultrasonic vibration plate, the first support is arranged at the output end of the lifting cylinder, and the lifting cylinder drives the first support to ascend.

2. The apparatus of claim 1, wherein the transfer mechanism further comprises a transmission gear, the first and second brackets comprise mounting holes through which the lower transmission shaft extends, and the transmission gear is mounted at an end of the lower transmission shaft.

3. The apparatus according to claim 1, wherein each of the lower transfer shafts is provided with a plurality of conveying wheels at intervals in an axial direction thereof.

4. The apparatus of claim 3, wherein the transfer wheel is an O-ring fitted over the lower transfer shaft.

5. The apparatus of claim 1, wherein the lower transmission shaft is inclined by 5-10 ° with respect to a horizontal plane in an axial direction of the transmission shaft.

6. The apparatus of claim 5, wherein a bearing seat is provided above the top of the first and second brackets, and the upper pressing shaft is supported on the bearing seat by a bearing.

7. The apparatus according to claim 1, further comprising a sensor located on a side away from the substrate entrance, the sensor for detecting the presence or absence of the glass substrate at the corresponding position and sending a detection signal to the controller.