JP2010268439A - Surface mounting crystal vibrator - Google Patents

Surface mounting crystal vibrator Download PDF

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Publication number
JP2010268439A
JP2010268439A JP2010077567A JP2010077567A JP2010268439A JP 2010268439 A JP2010268439 A JP 2010268439A JP 2010077567 A JP2010077567 A JP 2010077567A JP 2010077567 A JP2010077567 A JP 2010077567A JP 2010268439 A JP2010268439 A JP 2010268439A
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crystal
base
vibrator
crystal plate
cover
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Satoshi Umeki
三十四 梅木
Takeshi Saito
健史 齊藤
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To prevent a surface mounting crystal vibrator from being damaged by falling shock. <P>SOLUTION: The surface mounting crystal vibrator has a base 2 made of crystal or glass including mounting terminals 5a, 5b in at least both end portions of a flat outer bottom surface and is configured by sealing a crystal piece in which at least an exciting electrode is formed. In the surface mounting crystal vibrator, recesses 9a, 9b are provided in both the end portions of the outer bottom surface of the base 2, the mounting terminals 5a, 5b are formed in the recesses 9a, 9b, and the crystal piece is composed of a crystal plate 1 for the vibrator which is surrounded with a holding frame as an outer circumferential portion and connected partially. The crystal plate 1 for the vibrator, the base 2 and a cover 3 are laminated while directly bonding their outer circumferential parts. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は水晶又はガラスを容器材料とした表面実装用の水晶振動子(以下、表面実装振動子とする)を技術分野とし、特に水晶を用いた積層型の表面実装振動子(以下、積層型振動子とする)に関する。   The present invention has a technical field of a surface mount crystal resonator (hereinafter referred to as a surface mount resonator) using crystal or glass as a container material, and in particular, a stacked surface mount resonator using crystal (hereinafter referred to as a stack type). A vibrator).

(発明の背景)
表面実装振動子は小型・軽量であることから、例えば携帯型とした各種の電子機器に周波数や時間の基準源として内蔵される。このようなものの一つに、いずれも水晶とした振動子用水晶板とベース用及びカバー用水晶板を積層して厚みを小さくした積層型振動子がある。
(Background of the Invention)
Since the surface-mounted vibrator is small and light, it is built in, for example, various portable electronic devices as frequency and time reference sources. One of these is a laminated vibrator in which a quartz crystal plate for a vibrator, which is made of quartz, and a quartz plate for a base and a cover are laminated to reduce the thickness.

(従来技術の一例)
第4図は一従来例を説明する図で、同図(a)は積層型振動子のセット基板に対する実装断面図、同図(b)は振動子用水晶板の平面図である。
(Example of conventional technology)
FIG. 4 is a diagram for explaining a conventional example, in which FIG. 4 (a) is a mounting sectional view of a laminated vibrator on a set substrate, and FIG. 4 (b) is a plan view of a quartz crystal plate for the vibrator.

積層型振動子は振動子用水晶板1とベース用水晶板2とカバー用水晶板3を積層してなる。振動子用水晶板1は例えば音叉基部1aと細棒1bが連結した保持枠1cが音叉状水晶片1dを取り囲む。音叉状水晶片1dにおける一対の音叉腕1eには、それぞれが電気的に共通接続される図示しない一対の励振電極を有する。一対の励振電極は細棒1bの一主面を経て、保持枠1cの両端部に設けた引出端子4(ab)に接続する。   The laminated vibrator is formed by laminating a quartz crystal plate 1, a base quartz plate 2, and a cover quartz plate 3. In the quartz crystal plate 1 for vibrator, for example, a holding frame 1c in which a tuning fork base 1a and a thin rod 1b are connected surrounds a tuning fork crystal piece 1d. The pair of tuning fork arms 1e in the tuning fork crystal piece 1d has a pair of excitation electrodes (not shown) that are electrically connected in common. The pair of excitation electrodes are connected to lead terminals 4 (ab) provided at both ends of the holding frame 1c through one main surface of the thin rod 1b.

ベース用及びカバー用水晶板2、3は平板状として例えば一主面側を凹状とし、外周部の厚みを中央領域よりも大きくする。ベース用水晶板2は外底面の両端部に実装端子5(ab)を有し、電極貫通孔6によって振動子用水晶板1(保持枠1c)の引出端子4(ab)に電気的に接続する。なお、実装端子5(ab)は外側面に半田フィレット用の端面電極を有するが、ここでは便宜的に省略されている。そして、これらの振動子用、ベース用及びカバー用水晶板1、2、3はシロキサン結合(Si−O−Si)等による原子間レベルでの直接接合とする。   The base and cover crystal plates 2 and 3 are flat, for example, one main surface side is concave, and the thickness of the outer peripheral portion is larger than the central region. The base crystal plate 2 has mounting terminals 5 (ab) at both ends of the outer bottom surface, and is electrically connected to the lead terminals 4 (ab) of the crystal plate for vibrator 1 (holding frame 1 c) through the electrode through holes 6. To do. The mounting terminal 5 (ab) has an end face electrode for solder fillet on the outer surface, but is omitted here for convenience. The crystal plates 1, 2, and 3 for the vibrator, base, and cover are directly bonded at an interatomic level by siloxane bonds (Si-O-Si) or the like.

これらのものでは、振動子用、ベース用及びカバー用水晶板1、2、3を直接接合とした積層型とするので、特に厚みを小さくした薄型の表面実装振動子が得られる。ちなみに、平面外形を3.2×1.5mmとし、厚みを0.36mm以下とした表面実装振動子が得られる。これらは、音叉型に限らず、例えばATカットとした振動子用水晶板1の場合でも同様である。   Since these are of the laminated type in which the crystal plates 1, 2, and 3 for the vibrator, the base, and the cover are directly bonded, a thin surface mount vibrator having a particularly small thickness can be obtained. Incidentally, a surface-mounted vibrator having a planar outer shape of 3.2 × 1.5 mm and a thickness of 0.36 mm or less can be obtained. These are not limited to the tuning fork type, and the same applies to, for example, the quartz crystal plate 1 for an oscillator having an AT cut.

特開2008−182665号公報JP 2008-182665 A 特開2008−078791号公報JP 2008-078791 A

(従来技術の問題点)
しかしながら、上記構成の積層型振動子では、セット基板7に対して例えば半田リフローによっての搭載後に、外部衝撃(例えば落下衝撃)によって、特にベース用水晶板2の中央領域にて破損する問題があった。本発明者等の実験では、積層型振動子(ベース用水晶板2)の外底面とセット基板7の表面との間隙(間隔)dがクリーム半田8等の厚みによって大きいほど、外部衝撃に対する破損頻度が高くなることが判明した。
(Problems of conventional technology)
However, the laminated vibrator having the above-described configuration has a problem of being damaged by an external impact (for example, a drop impact) after mounting on the set substrate 7 by, for example, solder reflow, particularly in the central region of the base crystal plate 2. It was. In the experiments by the present inventors, the larger the gap (spacing) d between the outer bottom surface of the laminated vibrator (base crystal plate 2) and the surface of the set substrate 7 is, the larger the thickness of the cream solder 8 etc. is, the more damage to external impact is. The frequency was found to be high.

すなわち、外部衝撃によって、例えばベース用水晶板2に対して垂直方向の分散ベクトルによる外力Pが作用したと想定すると、間隔dが大きいほど、ベース用水晶板2の中央領域での撓み(湾曲)も大きくなる。そして、振動子用水晶板1は、例えばセラミックに比較し、強度の小さい脆性材からなる。したがって、振動子用水晶板1は自らの強度(弾性限界)よりも大きい撓み力によって破損に至り、間隔dが大きいほど破損頻度が高くなることが判明した。   That is, assuming that an external force P due to a vertical dispersion vector is applied to the base crystal plate 2 due to external impact, for example, the larger the distance d, the more the bending (curvature) in the center region of the base crystal plate 2 becomes. Also grows. The quartz crystal plate for vibrator 1 is made of a brittle material having a lower strength than, for example, ceramic. Therefore, it has been found that the quartz crystal plate for vibrator 1 is broken by a bending force larger than its own strength (elastic limit), and the frequency of breakage increases as the distance d increases.

そして、これらの問題は積層型振動子として全体の厚みが小さいほど、特にベース用水晶板2の厚みが小さいほど、ベース用水晶板2が撓みやすくなるので、顕著になる。例えばベース用水晶板2の外周部の厚みは0.12mm、中央領域の厚みは0.09mmとなることから、撓みが大きくなって破損に至る。   These problems become more prominent because the base crystal plate 2 is more easily bent as the overall thickness of the laminated vibrator is smaller, particularly as the base crystal plate 2 is thinner. For example, the thickness of the outer peripheral portion of the base crystal plate 2 is 0.12 mm, and the thickness of the central region is 0.09 mm.

(発明の目的)
本発明は耐衝撃性を向上する積層型振動子を含む表面実装振動子を提供することを目的とする。
(Object of invention)
It is an object of the present invention to provide a surface mount vibrator including a laminated vibrator that improves impact resistance.

本発明は、特許請求の範囲(請求項1)に示したように、平坦状とした外底面の少なくとも両端部に実装端子を有する水晶又はガラスからなるベースを有し、少なくとも励振電極の形成された水晶片を密閉封入してなる表面実装水晶振動子において、前記ベースの外底面の両端部には窪みが設けられ、前記実装端子は前記窪みに形成された構成とする。   The present invention has a base made of crystal or glass having mounting terminals at least at both ends of a flat outer bottom surface, and at least an excitation electrode is formed as shown in the claims (Claim 1). In the surface-mounted crystal resonator in which the crystal piece is hermetically sealed, recesses are provided at both ends of the outer bottom surface of the base, and the mounting terminals are formed in the recesses.

このような構成であれば、表面実装振動子をセット基板に搭載した際、例えば半田リフロー時のクリーム半田はベース外底面の凹所内に埋設される。したがって、ベースの外底面とセット基板との間隔が小さくなるので、外部衝撃があってもベースの外底面の中央領域がセット基板に衝突して止まる(衝止)。これにより、ベースの撓みを抑制して、撓みによるベースの中央領域での破損を防止できる。   With such a configuration, when the surface-mounted vibrator is mounted on the set substrate, for example, cream solder at the time of solder reflow is embedded in a recess on the bottom surface of the base. Accordingly, since the distance between the outer bottom surface of the base and the set substrate is reduced, the central region of the outer bottom surface of the base collides with the set substrate and stops even if there is an external impact (stop). As a result, it is possible to suppress the base from being bent and prevent the base from being damaged by the bending.

(実施態様項)
本発明の請求項2では、請求項1において、前記水晶片は外周部としての保持枠に取り囲まれて一部が連結した振動子用水晶板からなり、前記振動子用水晶板と前記ベース及び前記カバーとは外周部が直接接合された積層型とする。これにより、厚みを小さくした表面実装振動子を得られる。
(Embodiment section)
According to a second aspect of the present invention, in the first aspect, the quartz crystal piece includes a quartz crystal plate for a vibrator that is surrounded by a holding frame as an outer peripheral portion and partially connected thereto, and the quartz crystal plate for the vibrator, the base, The cover is a laminated type in which the outer periphery is directly joined. As a result, a surface-mounted vibrator having a reduced thickness can be obtained.

同請求項3では、請求項2において、前記ベース及びカバーはいずれも水晶として凹部を有するベース用水晶板及びカバー用水晶板からなる。これにより、振動子用水晶板を含めていずれも水晶板とするので膨張係数を同一として、熱衝撃等による応力歪みを小さくして振動特性を良好にする。そして、ベース用及びカバー用水晶板はいずれも凹部を有するので、振動子用水晶板を単純な平板状として振動領域との間隙確保できる。   In the third aspect of the present invention, in the second aspect, the base and the cover each include a base crystal plate and a cover crystal plate having a concave portion as a crystal. As a result, all the quartz plates including the quartz plate for the vibrator are made of quartz, so that the expansion coefficient is the same, stress distortion due to thermal shock or the like is reduced, and vibration characteristics are improved. Since both the base crystal plate and the cover crystal plate have recesses, the resonator crystal plate can be formed in a simple flat plate shape to ensure a gap with the vibration region.

同請求項4では、請求項3において、前記ベース用水晶板及びベース用カバーの前記凹部の底面にはシールド電極が形成される。これにより、EMI(電磁波障害)を軽減して、発振周波数の変化等を防止できる。   In the fourth aspect of the present invention, in the third aspect, a shield electrode is formed on the bottom surface of the concave portion of the base crystal plate and the base cover. Thereby, EMI (electromagnetic wave interference) can be reduced and a change in the oscillation frequency can be prevented.

本発明の第1実施形態を説明する積層型振動子の図で、同図(a)は外観図、同図(b)はセット基板に対する実装断面図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a view of a laminated vibrator for explaining a first embodiment of the present invention, FIG. 1A is an external view, and FIG. 本発明の第2実施形態を説明する積層型振動子の図で、同図(a)は断面図、同図(b)は外底面図である。It is a figure of the laminated vibrator explaining 2nd Embodiment of this invention, The figure (a) is sectional drawing, The figure (b) is an outer bottom view. 本発明の他の実施形態を説明する表面実装振動子の断面図である。It is sectional drawing of the surface mount vibrator explaining other embodiment of the present invention. 従来例を説明する積層型振動子の図で、同図(a)はセット基板に対する実装断面図、同図(b)は振動子用水晶板の平面図である。FIG. 2A is a diagram of a laminated vibrator for explaining a conventional example, in which FIG. 1A is a mounting sectional view with respect to a set substrate, and FIG. 2B is a plan view of a quartz crystal plate for vibrator.

(第1実施形態)
以下、第1図(外観図、実装断面)によって本発明の一実施形態としての表面実装振動子を説明する。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。
(First embodiment)
Hereinafter, a surface-mounted vibrator as one embodiment of the present invention will be described with reference to FIG. 1 (outside view, mounting cross section). In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

表面実装振動子はここでも前述した積層型振動子とし、振動子用、ベース用及びカバー用水晶板1、2、3の外周部を直接接合してなる。振動子用水晶板1は音叉基部1aの一部と連結した音叉状水晶片1dを保持枠1cによって取り囲む。ベース用及びカバー用水晶板2、3はいずれも凹状として外周部の厚みを大きくする。ベース用水晶板2の外底面の両端部には実装端子5(ab)を有する。ここでの平面外形は、例えば前述したように3.2×1.5mmとし、厚みを0.36mmとし、ベース用水晶板2の厚みを0.12mmとする。   The surface-mounted vibrator is also the above-described laminated vibrator, and is formed by directly joining the outer peripheral portions of the vibrator, base, and cover crystal plates 1, 2, and 3. The quartz crystal plate 1 for a vibrator surrounds a tuning fork crystal piece 1d connected to a part of the tuning fork base 1a by a holding frame 1c. The base and cover crystal plates 2 and 3 are both concave to increase the thickness of the outer peripheral portion. Both ends of the outer bottom surface of the base crystal plate 2 have mounting terminals 5 (ab). The planar outer shape here is, for example, 3.2 × 1.5 mm as described above, the thickness is 0.36 mm, and the thickness of the base crystal plate 2 is 0.12 mm.

この実施形態では、ベース用水晶板2の外底面の両端部に、外周辺側を開放した窪み9(ab)を設ける。そして、実装端子5(ab)が、窪み9(ab)の底面及び内周側面に形成される。実装端子5(ab)は前述同様に電極貫通孔6によって、振動子用水晶板1の引出端子4(ab)に電気的に接続する。   In this embodiment, recesses 9 (ab) having an open outer peripheral side are provided at both ends of the outer bottom surface of the base crystal plate 2. And the mounting terminal 5 (ab) is formed in the bottom face and inner peripheral side surface of the hollow 9 (ab). The mounting terminal 5 (ab) is electrically connected to the lead terminal 4 (ab) of the crystal plate for vibrator 1 through the electrode through-hole 6 as described above.

これらの窪み9(ab)を含む外形加工や、実装端子5(ab)及び電極貫通孔6等の電極パターンは、図示しない水晶ウェハの状態で例えばフォトリソグラフィックやウェットエッチングによって形成される。そして、振動子用水晶板1とベース用及びカバー用水晶板2、3の水晶ウェハと直接接合した後、個々の積層型振動子に分割される。   The external shape processing including these depressions 9 (ab) and the electrode patterns such as the mounting terminals 5 (ab) and the electrode through holes 6 are formed in a state of a crystal wafer (not shown) by, for example, photolithography or wet etching. Then, after being directly bonded to the crystal wafer 1 for the vibrator and the crystal wafers for the base and cover crystal plates 2 and 3, it is divided into individual laminated vibrators.

このようなものでは、セット基板7への半田リフローによる積層型振動子の搭載時には、セット基板7の回路端子に塗布されたクリーム半田8が、実装端子5(ab)の形成された外底面の両端部の窪み9(ab)内に埋設(充填)される。したがって、実装端子5(ab)、回路端子10(ab)及び半田8を加味した積層型振動子の外底面とセット基板7の表面との間隔dは、従来例よりも小さくできる。   In such a case, when the laminated vibrator is mounted on the set substrate 7 by solder reflow, the cream solder 8 applied to the circuit terminals of the set substrate 7 is applied to the outer bottom surface on which the mounting terminals 5 (ab) are formed. It is embedded (filled) in the depression 9 (ab) at both ends. Therefore, the distance d between the outer bottom surface of the laminated vibrator including the mounting terminal 5 (ab), the circuit terminal 10 (ab), and the solder 8 and the surface of the set substrate 7 can be made smaller than in the conventional example.

これにより、積層型振動子に対する外部衝撃があっても、特にこれらの分散ベクトルによる垂直方向からの外力Pがベース用水晶板2に作用しても、ベース用水晶板2の中央領域はセット基板7の表面で衝止する。したがって、ベース用水晶板2の湾曲を抑制して撓みによる中央領域での破損を防止できる。   As a result, even if an external impact is applied to the laminated vibrator, even if an external force P from the vertical direction due to these dispersion vectors acts on the base crystal plate 2, the central region of the base crystal plate 2 is set substrate. Stop at 7's surface. Therefore, it is possible to prevent the base crystal plate 2 from being bent and to prevent damage in the central region due to bending.

(第2実施形態)
第2図は本実施例の第2実施形態を説明する積層型振動子の図で、同図(a)は同断面図、同図(b)は同外底面図である。なお、前実施形態と同一部分の説明は省略又は簡略する。
(Second Embodiment)
FIGS. 2A and 2B are views of a laminated vibrator for explaining the second embodiment of the present embodiment. FIG. 2A is a sectional view thereof, and FIG. 2B is a bottom view of the same. In addition, description of the same part as previous embodiment is abbreviate | omitted or simplified.

第2実施形態では、前述同様に振動子用水晶板1とベース用及びカバー用水晶板2、3とを直接接合による積層型振動子とする。ここでは、ベース用及びカバー用水晶板2、3の凹部底面にシールド電極11(ab)を形成する。そして、ベース用水晶板2の外底面の4角部に実装端子5(abcd)を有する。   In the second embodiment, as described above, the vibratory crystal plate 1 and the base and cover crystal plates 2 and 3 are formed into a laminated vibrator by direct bonding. Here, the shield electrode 11 (ab) is formed on the bottom surfaces of the concave portions of the base and cover crystal plates 2 and 3. Then, the mounting terminals 5 (abcd) are provided at the four corners of the outer bottom surface of the base crystal plate 2.

4角部の実装端子5(abcd)のうちの斜対向する一組の対角部の実装端子5(ab)は前述同様に音叉状水晶片1dの引出端子4(ab)に電極貫通孔6等によって電気的に接続する。また、他組の対角部の実装端子5(cd)はシールド電極11(ab)に図示しない電極貫通孔等によって電気的に接続する。そして、この場合でも、各実装端子5(abcd)の設けられる4角部には窪み9(abcd)が設けられ、実装端子5(abcd)は窪み9(abcd)内に形成される。   Of the four corner mounting terminals 5 (abcd), the diagonally facing pair of diagonal mounting terminals 5 (ab) is connected to the lead-out terminals 4 (ab) of the tuning-fork crystal piece 1d in the same way as described above. Electrically connected by etc. The other pair of diagonal mounting terminals 5 (cd) are electrically connected to the shield electrode 11 (ab) by an electrode through hole (not shown). Even in this case, the recesses 9 (abcd) are provided in the four corners where the mounting terminals 5 (abcd) are provided, and the mounting terminals 5 (abcd) are formed in the recesses 9 (abcd).

このような構成であっても、第1実施形態と同様に、セット基板7への搭載時には、クリーム半田8が窪み9(abcd)内に充填されて、積層型振動子の外底面とセット基板7の表面との間隙を小さくするので、ベース用水晶板2の破損を防止できる。   Even in such a configuration, as in the first embodiment, the cream solder 8 is filled in the recess 9 (abcd) when mounted on the set substrate 7, and the outer bottom surface of the multilayer vibrator and the set substrate are filled. Since the gap with the surface of 7 is reduced, the base crystal plate 2 can be prevented from being damaged.

そして、この例では、シールド電極11(ab)を設けるので、EMI(電磁波障害)を軽減する。また、例えば水晶発振器を構成した場合、音叉状水晶片1dの励振電極とセット基板7等との間の浮遊容量を軽減して発振周波数の変化を防止する。   In this example, since the shield electrode 11 (ab) is provided, EMI (electromagnetic interference) is reduced. Further, when a crystal oscillator is configured, for example, the stray capacitance between the excitation electrode of the tuning-fork crystal piece 1d and the set substrate 7 is reduced to prevent a change in oscillation frequency.

なお、第1及び第2実施形態においては、ベース用及びカバー用水晶板2、3は例えばセラミックよりも強度の小さいガラスを使用した場合でも適用できる。この場合、水晶はエッチング速度の異方性があるのに対し、ガラスは等方性なので、エッチングによって製作する場合は、水晶よりも安価なこともあって生産性を高められる。   In the first and second embodiments, the base and cover crystal plates 2 and 3 can be applied even when, for example, glass having a strength lower than that of ceramic is used. In this case, quartz has anisotropy in etching rate, whereas glass is isotropic. Therefore, when manufactured by etching, the productivity can be increased because it is cheaper than quartz.

ガラスとしては、一般に水晶より安価なホウケイ酸ガラスが使用される場合が多い。ここで、ホウケイ酸ガラスのヌープ硬度は590kg/mm  As glass, borosilicate glass that is generally cheaper than quartz is often used. Here, the Knoop hardness of the borosilicate glass is 590 kg / mm. 2 である。一方、水晶のヌープ硬度は、ホウケイ酸ガラスより高い710〜790km/mmIt is. On the other hand, the Knoop hardness of quartz is 710-790 km / mm, which is higher than that of borosilicate glass. 2 である。したがって、水晶からなるベース用及びカバー用水晶板2、3を使用した場合は、ホウケイ酸ガラスを使用した場合と比べて、積層型振動子の強度を確保しつつ、小型化・低背化が可能となる。It is. Therefore, when using the crystal plates 2 and 3 for the base and the cover made of crystal, the size and the height can be reduced while securing the strength of the laminated vibrator as compared with the case of using the borosilicate glass. It becomes possible.

(他の事項)
上記実施形態では表面実装振動子は積層型振動子として説明したが、例えば第3図に示した表面実装振動子であっても適用できる。すなわち、外底面に実装端子5(ab)を有する水晶やガラスからなる凹状としたベース12の内底面に台座13を設けて音叉状水晶片1dの音叉基部1aを固着し、開口端面をカバー14によって封止した場合でも同様に適用できる。
(Other matters)
In the above-described embodiment, the surface-mounted vibrator has been described as a laminated vibrator. However, for example, the surface-mounted vibrator shown in FIG. 3 can also be applied. That is, a pedestal 13 is provided on the inner bottom surface of a concave base 12 made of crystal or glass having mounting terminals 5 (ab) on the outer bottom surface, and the tuning fork base 1a of the tuning fork crystal piece 1d is fixed, and the opening end surface is covered with the cover 14. The same can be applied to the case of sealing with.

この場合、凹状としたベース12は底壁層12aと枠壁層12bが例えば直接接合される。また、カバー14は金属として例えばシーム溶接としたり、金属や絶縁体として樹脂封止やガラス封止としたりして開口端面に接合される。なお、本願発明では、一般的に設けられるアルミナセラミック(Al2O3)よりも強度の小さい脆性材からなる材料をベースとして適用した場合に適用でき、これらの中でも、請求項1では水晶及びガラスと特定している。   In this case, the bottom wall layer 12a and the frame wall layer 12b are directly joined to the concave base 12, for example. Further, the cover 14 is joined to the opening end surface by, for example, seam welding as the metal, or by resin sealing or glass sealing as the metal or insulator. The present invention can be applied to a case where a material made of a brittle material having a strength lower than that of generally provided alumina ceramic (Al 2 O 3) is used as a base, and among these, claim 1 specifies crystal and glass. ing.

1 振動子用水晶板、2 ベース用水晶板、3 カバー用水晶板、4 引出端子、5 実装端子、6 電極貫通孔、7 セット基板、8 半田、9 窪み、10 回路端子、11 シールド電極、12 ベース、13 台座、14 カバー。   1 crystal plate for vibrator, 2 crystal plate for base, 3 crystal plate for cover, 4 lead terminal, 5 mounting terminal, 6 electrode through hole, 7 set substrate, 8 solder, 9 recess, 10 circuit terminal, 11 shield electrode, 12 base, 13 base, 14 cover.

Claims (4)

平坦状とした外底面の少なくとも両端部に実装端子を有する水晶又はガラスからなるベースを有し、少なくとも励振電極の形成された水晶片を密閉封入してなる表面実装水晶振動子において、前記ベースの外底面の両端部には窪みが設けられ、前記実装端子は前記窪みに形成されたことを特徴とする表面実装水晶振動子。   A surface-mount crystal resonator having a base made of crystal or glass having mounting terminals on at least both ends of a flat outer bottom surface, wherein at least a crystal piece on which an excitation electrode is formed is hermetically sealed. A surface-mounted crystal resonator, wherein recesses are provided at both ends of the outer bottom surface, and the mounting terminals are formed in the recesses. 請求項1において、前記水晶片は外周部としての保持枠に取り囲まれて一部が連結した振動子用水晶板からなり、前記振動子用水晶板と前記ベース及び前記カバーとは外周部が直接接合された積層型とする表面実装水晶振動子。   2. The crystal unit according to claim 1, wherein the crystal piece is composed of a crystal plate for a vibrator that is surrounded by a holding frame as an outer peripheral portion and is partially connected, and the crystal plate for the vibrator, the base, and the cover have an outer peripheral portion directly. A surface-mount crystal unit with a laminated structure. 請求項2において、前記ベース及びカバーはいずれも水晶として凹部を有するベース用水晶板及びカバー用水晶板からなる表面実装水晶振動子。   3. The surface-mount crystal resonator according to claim 2, wherein the base and the cover are both a base crystal plate and a cover crystal plate each having a concave portion as a crystal. 請求項3において、前記ベース用水晶板及びベース用カバーの前記凹部の底面にはシールド電極の形成された表面実装水晶振動子。   4. The surface-mount crystal resonator according to claim 3, wherein a shield electrode is formed on a bottom surface of the concave portion of the base crystal plate and the base cover.
JP2010077567A 2009-04-14 2010-03-30 Surface mounting crystal vibrator Pending JP2010268439A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013172368A (en) * 2012-02-22 2013-09-02 Nippon Dempa Kogyo Co Ltd Piezoelectric device and manufacturing method of the same
WO2018092776A1 (en) * 2016-11-17 2018-05-24 株式会社大真空 Piezoelectric oscillation device
JP2019192818A (en) * 2018-04-26 2019-10-31 新日本無線株式会社 Manufacturing method of electronic component package

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013172368A (en) * 2012-02-22 2013-09-02 Nippon Dempa Kogyo Co Ltd Piezoelectric device and manufacturing method of the same
WO2018092776A1 (en) * 2016-11-17 2018-05-24 株式会社大真空 Piezoelectric oscillation device
JPWO2018092776A1 (en) * 2016-11-17 2019-10-17 株式会社大真空 Piezoelectric vibration device
US11152910B2 (en) 2016-11-17 2021-10-19 Daishinku Corporation Piezoelectric resonator device
JP2019192818A (en) * 2018-04-26 2019-10-31 新日本無線株式会社 Manufacturing method of electronic component package
JP7125002B2 (en) 2018-04-26 2022-08-24 日清紡マイクロデバイス株式会社 Electronic component package manufacturing method

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