JP2010259023A - Crystal resonator element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact and thin crystal resonator element which prevents a base or a support arm from being broken due to a load mainly applied from a main surface direction. <P>SOLUTION: The crystal resonator element 100 includes: a crystal piece equipped with a base 111, a plurality of resonant arms 112, 113 extending from the base 111 in the same direction, and a support arm 114 extending from the base 111; and excitation electrodes 121a, 121b, 122a, 122b, connection electrodes 123a, 123b and conductive wiring patterns 125, 126 which are provided on the surface of the piezoelectric piece. In the crystal resonator element 100, a groove is provided on the main surface of at least any one of the base 111 and the support arm 114. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a crystal resonator element used in electronic equipment.

  Conventionally, a crystal resonator or a crystal oscillator is mounted as one of electronic components inside an electronic device such as a computer, a mobile phone, or a small information device. This crystal resonator or crystal oscillator is used as a reference signal source or a clock signal source. In addition, crystal resonators and crystal oscillators have a crystal resonator element mounted therein.

  FIG. 5 is a perspective view showing an example of a conventional crystal resonator element. 6 is a perspective view showing a crystal piece constituting the crystal resonator element shown in FIG. As shown in FIG. 5, the crystal resonator element 400 includes a crystal piece 410 (see FIG. 6), excitation electrodes 421a, 421b, 422a and 422b provided on the surface of the crystal piece 410, connection electrodes 423a and 423b, frequency adjustment metal films 424a and 424b, and conductive wiring patterns 425, 426, and 427.

  As shown in FIG. 6, the crystal piece 410 includes a base 411 that is a substantially rectangular flat plate in plan view, and a first vibrating arm 412 and a second vibrating arm that extend in the same direction from one side of the base 411. It consists of a part 413 and a support arm part 414. The front and back main surfaces of the first vibrating arm portion 412 and the second vibrating arm portion 413 are bottomed having a predetermined length from the boundary portion with the base portion 411 toward the tip of each vibrating arm portion. Two groove portions 415 are provided in parallel for each vibrating arm portion.

  The support arm portion 414 includes a first vibration arm portion 412 and a second vibration arm portion 413 at a side portion of the base portion 411 in which the first vibration arm portion 412 and the second vibration arm portion 413 extend. From the gap, the vibrating arm portion extends in a predetermined length in the extending direction. Note that the outer shape of the crystal piece 410 is formed by using a well-known photolithography technique and etching technique (see, for example, Patent Document 1).

  As shown in FIG. 5, the excitation electrode 421 a has an inner surface of a groove portion 415 provided on the front and back main surfaces of the first vibrating arm portion 412 constituting the crystal piece 410 and a main surface around the opening of the groove portion 415. Is provided. The excitation electrode 421 b is provided on both opposite side surfaces of the first vibrating arm portion 412. The excitation electrode 422 a is provided on the inner surface of the groove portion 415 provided on the front and back main surfaces of the second vibrating arm portion 413 and the main surface around the opening of the groove portion 415. The excitation electrode 422b is provided on both opposing side surfaces of the second vibrating arm portion 413.

  The connection electrodes 423a are provided one by one on the front and back main surfaces of the support arm portion 414 and at a position facing each other between the main surfaces, and a part thereof is a first vibrating arm on the front and back main surfaces of the support arm portion 414. It is provided in contact with one side of the part 412 side. Further, the connection electrodes 423b are provided one by one on the front and back main surfaces of the support arm portion 414, and are provided at positions facing each other between the main surfaces, and a part of the connection electrodes 423b is the second on the front and back main surfaces of the support arm portion 414. It is provided in contact with one side of the vibrating arm 413 side. The connection electrodes 423a and 423b are provided on the front and back main surfaces of the support arm portion 414 so as to be shifted in position so as not to be electrically connected to each other.

The frequency adjusting metal film 424 a is provided on the front and back main surfaces of the first vibrating arm portion 412, and is electrically connected to the excitation electrodes 421 b provided on both side surfaces of the first vibrating arm portion 412. Connected. Further, the frequency adjusting metal film 424b is provided on the front and back main surfaces of the second vibrating arm 413, and is electrically connected to the excitation electrodes 422b provided on both side surfaces of the second vibrating arm 413. Connected. The crystal resonator element 400 adjusts the vibration frequency value to a desired value by increasing or decreasing the amount of metal constituting the frequency adjusting metal films 424a and 424b.

As shown in FIG. 5, the excitation electrodes 421a and 422b, the frequency adjusting metal film 424b, and the connection electrode 423b are electrically provided by, for example, conductive wiring patterns 425 and 426 provided on the surface of the crystal piece 410. Connected. Specifically, the connection electrode 423b is electrically connected to the excitation electrode 422b and the frequency adjusting metal film 424b by a conductive wiring pattern 425 provided on the side surface of the support portion 414 and the side surface of the base portion 411. . The conductive wiring pattern 425 is electrically connected to the excitation electrode 421a by a conductive wiring pattern 426 provided on the front and back main surfaces of the base 411.

  The excitation electrodes 421b and 422a, the frequency adjusting metal film 424a, and the connection electrode 423a are electrically connected by, for example, a conductive wiring pattern 427 provided on the surface of the crystal piece 410. Specifically, the connection electrode 423a is electrically connected to the excitation electrode 421b and the frequency adjusting metal film 424a by a conductive wiring pattern (not shown) provided on the side surface of the support portion 414 and the side surface of the base portion 411. Connected. The excitation electrode 421b is electrically connected to the excitation electrode 422a by a conductive wiring pattern 427 provided on the front and back main surfaces and side surfaces of the base 411. Each excitation electrode, connection electrode, frequency adjusting metal film, and conductive wiring pattern are composed of, for example, a Cr layer as a base metal and an Au layer provided on the base metal.

As described above, the crystal resonator element 400 is formed by forming the excitation electrode, the connection electrode, the conductive wiring pattern, and the frequency adjusting metal film on the surface of the crystal piece 410 by the photolithography technique and the vapor deposition technique (for example, , See Patent Document 2).
The quartz resonator element 400 is mounted on, for example, an element connection electrode pad formed on the bottom surface of the recess of a container body provided with a recess having an opening on one main surface. It is hermetically sealed with a lid to form a crystal resonator.

JP 2004-357178 A JP 2006-345519 A

  As the quartz crystal resonator becomes smaller and thinner, the quartz resonator element 400 mounted therein needs to be smaller and thinner. In particular, when the width dimension of the crystal resonator element 400 that has been reduced in thickness is reduced for miniaturization, the length dimension and width dimension of the vibrating arm portion are defined by a desired frequency value. It is necessary to reduce the width dimension. However, the mechanical strength of the support arm portion 414 and the base portion 411 to which the support arm portion 414 is connected when the width dimension is reduced decreases.

For example, the quartz crystal vibration element 400 is subjected to ultrasonic cleaning for removing foreign substances adhering to the surface in the manufacturing process. When ultrasonic cleaning is performed with such a conventional structure, a load due to an impact at the time of collapse of bubbles generated by ultrasonic vibration is applied to the crystal resonator element 400 mainly from the main surface direction of the support arm portion 414. The load sometimes caused a crack in the support arm portion 414. Further, in the crystal resonator element 400, the support arm portion 414 may break due to this crack. In addition, a crack generated in the support arm portion 414 reaches the base portion 411, and the base portion 411 portion may be broken. Further, after being configured as a crystal resonator, when an impact is applied from the outside due to dropping or the like, the base 411 or the support arm portion 414 of the crystal resonator element 400 mounted inside the crystal resonator is bent due to insufficient mechanical strength. May cause damage.
An object of the present invention is to provide a small and thin crystal resonator element in which breakage such as breakage is less likely to occur in a base and a support arm due to a load.

  The present invention has been made to solve the above-mentioned problem, and the vibrating arm portion is provided between a base, a plurality of vibrating arms extending in the same direction from the base, and the vibrating arm adjacent to the base. A quartz crystal element provided with a support arm portion extending in the same direction as the quartz crystal element, and a quartz crystal resonator element provided with at least an excitation electrode, a connection electrode, and a conductive wiring pattern on a surface of the crystal piece, the base portion And a groove part is provided in at least one main surface of the support arm part.

  The present invention also includes a base, a plurality of vibrating arm portions extending from the base in the same direction, a first extending portion extending from the base in a direction perpendicular to the vibrating arm portion, A crystal piece comprising: a support arm portion configured by a second extension portion extending in the same direction as the vibrating arm portion from an extension tip portion of the first extension portion; and A crystal resonator element having at least an excitation electrode, a connection electrode, and a conductive wiring pattern provided on a surface, wherein a groove portion is provided on at least one main surface of the base portion and the support arm portion. It is a crystal vibration element.

  According to the present invention, a part of the conductive wiring pattern is provided on the inner surface of the groove portion provided on the base portion, and a metal film is provided on the inner surface of the groove portion provided on the support arm portion. This is a feature of a crystal resonator element.

  According to the crystal resonator element according to the present invention, by providing a groove on at least one main surface of the support arm portion extending in the same direction as the vibrating arm portion between the base portion and the vibrating arm portion adjacent from the base portion, The mechanical strength with respect to the load from the main surface direction of a base part and a support arm part can be improved.

  Further, according to the crystal resonator element according to the present invention, the base, the first extension extending from the base in a direction orthogonal to the vibration arm, and the extension of the first extension The main surface direction of the base portion and the support arm portion is provided by providing a groove portion on at least one main surface of the support arm portion formed by the second extension portion extending in the same direction as the vibrating arm portion from the distal end portion. The mechanical strength with respect to the load from the can be improved.

  Furthermore, according to the crystal resonator element according to the present invention, a part of the conductive wiring pattern is provided on the inner surface of the groove portion provided in the base portion, and the metal film is provided on the inner surface of the groove portion provided in the support arm portion. By providing, the mechanical strength with respect to the load from the main surface direction of a base part or a support arm part can further be improved.

  From the above, the present invention has an effect that it is possible to provide a small and thin crystal resonator element that is less likely to be broken or broken in the base portion or the support arm portion due to a load.

1 is an external perspective view showing a crystal resonator element according to an embodiment of the present invention. It is a figure which shows the crystal piece which comprises the crystal vibration element of FIG. 1, (a) is a top view, (b) is sectional drawing of AA of (a) description. It is sectional drawing which shows the 1st modification of the crystal piece which comprises the crystal vibration element which concerns on embodiment of this invention. The modification of the crystal piece which comprises the crystal oscillation element which concerns on embodiment of this invention is shown, (a) is a top view which shows a 2nd modification, (b) is a top view which shows a 3rd modification. It is. It is a perspective view which shows the conventional quartz resonator element. It is a perspective view which shows the crystal piece which comprises the crystal oscillation element of FIG.

Hereinafter, a crystal resonator element according to an embodiment of the present invention will be described with reference to the drawings.
In each of the drawings, a part of the structure is not shown, and some dimensions are exaggerated for the sake of clarity. In particular, the thickness of the crystal piece is exaggerated.

  FIG. 1 is an external perspective view showing a crystal resonator element according to an embodiment of the present invention. 2A and 2B are diagrams illustrating a crystal piece constituting the crystal resonator element illustrated in FIG. 1, in which FIG. 2A is a plan view and FIG. 2B is a cross-sectional view taken along line AA in FIG. FIG. 3 is a cross-sectional view showing a first modification of the crystal piece constituting the crystal resonator element according to the first embodiment of the present invention. FIG. 4 shows a modification of the crystal piece constituting the crystal resonator element according to the embodiment of the present invention, (a) is a plan view showing a second modification, and (b) is a third modification. FIG. As shown in FIG. 1, the crystal resonator element 100 includes a crystal piece 110 (see FIG. 2), excitation electrodes 121a, 121b, 122a and 122b provided on the surface of the crystal piece 110, connection electrodes 123a and 123b, frequency adjusting metal films 124a and 124b, conductive wiring patterns 125, 126 and 127, and a metal film 128.

  As shown in FIG. 2, the crystal piece 110 includes a base 111 that is a substantially rectangular flat plate in plan view, and a first vibrating arm 112 and a second vibrating arm that extend from one side of the base 111 in the same direction. It consists of a part 113 and a support arm part 114. The bottom surface provided on the front and back main surfaces of the first vibrating arm portion 112 and the second vibrating arm portion 113 with a predetermined length from the boundary portion with the base portion 111 toward the tip of each vibrating arm portion. The first groove portions 115 are provided in parallel for each vibrating arm portion.

  The support arm portion 114 is formed between the first vibration arm portion 112 and the second vibration arm portion 113 at the side portion of the base 111 where the first vibration arm portion 112 and the second vibration arm portion 113 extend. From the gap, the vibrating arm portion extends in a predetermined length in the extending direction. The support arm portion 114 has a rectangular shape in plan view, and a second groove portion 116 is provided on the front and back main surfaces along the length direction. The second groove 116 is provided on the front and back main surfaces of the support arm 114 at a position where a center axis (not shown) of the width of the second groove 116 is aligned with the center axis CL1 of the width of the support 114. ing. The second groove 116 has an end on the base side reaching the main surface of the base 111 near the support arm 114, and an end on the support arm tip leading side reaching the tip of the support arm 114. It is provided with such a length. The second groove portions 116 provided on the front and back main surfaces of the support arm portion 114 are provided so that their bottom portions face each other.

A third groove 117 is provided on the front and back main surfaces of the base 111 along the length direction orthogonal to the extending direction of the support arm 114 in plan view. The third groove 117 is located at a position shifted toward the support arm 214 from the central axis CL2 of the base 111 parallel to one side of the base 111 where the support arm 114 extends. The central axis (not shown) in the width direction is located. The third groove 117 has an end on the first vibrating arm portion side that extends to the vicinity of the extended portion of the first vibrating arm portion 112 of the base 111, and an end on the second vibrating arm portion side. The length is provided so as to reach the vicinity of the extended portion of the second vibrating arm 113 of the base 111. The third groove portions 117 provided on the front and back main surfaces of the base portion 111 are provided so that the bottom surfaces thereof face each other.
Note that the outer shape of the crystal piece 110 including the first groove 115, the second groove 116, and the third groove 117 is formed by using a well-known photolithography technique and etching technique.

  As shown in FIG. 1, the excitation electrode 121 a is provided on the inner surface of the first groove 115 provided on the front and back main surfaces of the first vibrating arm portion 112 and the main surface around the opening of the first groove 115. ing. The excitation electrodes 121b are provided on opposite side surfaces of the first vibrating arm portion 112. The excitation electrode 122a is provided on the inner surface of the first groove 115 provided on the front and back main surfaces of the second vibrating arm 113 and the main surface around the opening of the first groove 115. The excitation electrodes 122b are provided on opposite side surfaces of the second vibrating arm portion 113.

  The connection electrodes 123a are provided one by one on the front and back main surfaces of the support arm portion 114, and are provided at positions facing each other between the main surfaces, and a part thereof is the first vibrating arm portion on the front and back main surfaces of the support arm portion 114. It is provided in contact with one side of 112 side. The connection electrodes 123b are provided one by one on the front and back main surfaces of the support arm portion 114 and at a position facing each other between the main surfaces, and a part thereof is a second vibrating arm on the front and back main surfaces of the support arm portion 114. It is provided in contact with one side of the portion 113 side. Note that the connection electrodes 123a and 123b are provided on the support arm portion 114 so as not to be electrically connected to each other on the front and back main surfaces of the support arm 114, and are provided in such a size as not to be electrically connected to the metal film 128 described later. .

  The frequency adjusting metal film 124a is provided on the front and back main surfaces of the first vibrating arm portion 112 and is electrically connected to the excitation electrodes 121b provided on both side surfaces of the first vibrating arm portion 112. is doing. Further, the frequency adjusting metal film 124 b is provided at the front end portion of the front and back main surfaces of the second vibrating arm portion 113, and is electrically connected to the excitation electrode 122 b provided on both side surfaces of the second vibrating arm portion 113. Connected to. The crystal resonator element 100 adjusts the vibration frequency value to a desired value by increasing / decreasing the amount of the metal constituting the frequency adjusting metal films 124a and 124b.

  As shown in FIG. 1, the excitation electrodes 121a and 122b, the frequency adjusting metal film 124b, and the connection electrode 123b are electrically connected by, for example, conductive wiring patterns 125 and 126 provided on the surface of the crystal piece 110. is doing. Specifically, the connection electrode 123b is electrically connected to the excitation electrode 122b and the frequency adjusting metal film 124b by the conductive wiring pattern 125 provided on the side surface of the support portion 114 and the side surface of the base portion 111. The conductive wiring pattern 125 is electrically connected to the excitation electrode 121a by a conductive wiring pattern 126 provided on the front and back main surfaces of the base 111. A part of the conductive wiring pattern 126 is provided on the inner surface of the third groove 117.

  The excitation electrodes 121b and 122a, the frequency adjusting metal film 124a, and the connection electrode 123a are electrically connected by, for example, a conductive wiring pattern 127 provided on the surface of the crystal piece 110. Specifically, the connection electrode 123a is electrically connected to the excitation electrode 121b and the frequency adjusting metal film 124a by a conductive wiring pattern (not shown) provided on the side surface of the support portion 114 and the side surface of the base portion 111. ing. The excitation electrode 121b is electrically connected to the excitation electrode 122a by a conductive wiring pattern 127 provided on the front and back main surfaces and side surfaces of the base 111. Each excitation electrode, connection electrode, frequency adjusting metal film, and conductive wiring pattern are composed of, for example, a Cr layer as a base metal and an Au layer provided on the base metal.

  On the inner surface of the second groove 116 and the main surface around the opening of the second groove 116, a metal film 128 having the same Cr—Au structure as the excitation electrode and the like is provided. The metal film 128 is not electrically connected to the connection electrodes 123a and 123b and the conductive wiring pattern 125 provided on the support arm 114.

  When this crystal resonator element 100 is vibrated, an alternating voltage is applied to the connection electrodes 123a and 123b. When an electrical state after application is instantaneously captured, the excitation electrode 121b of the first vibrating arm portion 112 has a + (plus) potential, the excitation electrode 121a has a-(minus) potential, and changes from + to-. An electric field is generated. On the other hand, the excitation electrode of the second vibrating arm portion 113 at this time has a polarity opposite to the polarity generated in the exciting electrode of the first vibrating arm portion 112. These applied electric fields cause an expansion / contraction phenomenon in the first vibrating arm portion 112 and the second vibrating arm portion 113, and a bending vibration having a resonance frequency set in each vibrating arm portion is obtained.

  The crystal resonator element 100 is formed by forming the excitation electrode, the connection electrode, the conductive wiring pattern, and the frequency adjusting metal film on the surface of the crystal piece 110 by a photolithography technique and a vapor deposition technique. In addition, the crystal resonator element 100 is mounted on, for example, an element connection electrode pad formed on the bottom surface of the concave portion of a container body provided with a concave portion having an opening portion on one main surface. It is hermetically sealed with a lid to form a crystal resonator.

According to the crystal resonator element 100 described above, the base groove 111 and the support arm portion 114 are provided by providing the second groove portion 116 in the support arm portion 114 constituting the crystal piece 110 and further providing the third groove portion 117 in the base portion 111. The mechanical strength against the load from the main surface direction can be improved. Further, by providing a metal film 128 on the inner surface of the second groove portion 116 and further providing a part of the conductive wiring pattern 126 on the inner surface of the third groove portion 117, the load from the main surface direction of the support arm portion 114 and the base portion 111. The mechanical strength against can be further improved.
Therefore, for example, cracking of the base 111 and the support arm 114 caused by a load from the main surface direction of the base 111 and the support arm 114 due to ultrasonic cleaning during the manufacturing process can be prevented. It is possible to prevent the support arm portion from being broken by the load. Further, even when an impact is applied to the crystal unit from the outside due to a drop or the like, the occurrence of breakage or the like in the base 111 and the support arm unit 114 of the crystal resonator element 100 mounted inside the crystal unit is reduced. be able to.

(First modification)
FIG. 3 shows a first modification of the crystal piece constituting the crystal resonator element according to the embodiment of the invention. The first modification of the crystal piece constituting the crystal resonator element according to the embodiment of the present invention is that the crystal groove 110a includes only the second groove portion 116 and the first groove portion on only one main surface of the support arm portion 114 and the base portion 111. Three groove portions 117 are provided.

(Second modification)
Fig.4 (a) shows the 2nd modification of the crystal piece which comprises the crystal oscillation element which concerns on embodiment of this invention. The second modification of the crystal piece constituting the crystal resonator element according to the embodiment of the present invention is that, in the crystal piece 110b, the second groove portion 116 is a base portion of the second groove portion 116 provided in the support arm portion 114. The side groove is connected to the third groove 117. In the crystal resonator element 100 using the crystal piece 110b according to the second modification, the conductive wiring pattern 126 and the metal film 128 are connected to each other.

(Third modification)
FIG. 4B shows a modification of the crystal piece constituting the crystal resonator element according to the embodiment of the invention. A third modification of the crystal piece constituting the crystal resonator element according to the embodiment of the present invention is that in the crystal piece 110c, the support arm portion 114 is a vibrating arm from the side portion of the base portion 111 on the second vibration arm portion side. A first extending portion 114a extending in a direction orthogonal to the extending direction of the portion in plan view, and extending from the extending distal end portion of the first extending portion 114a in the same direction as the extending direction of the vibrating arm portion. It is comprised by the provided 2nd extension part 114b.

  On the front and back main surfaces of the support arm portion 114, a second groove portion 116 communicating from the first extension portion 114a to the second extension portion 114b is provided. A third groove 117 is provided on the front and back main surfaces of the base 111, and the second groove 116 and the third groove 117 communicate with each other.

The second groove portion 116 provided in the second extending portion 114b portion has a center axis (not shown) of the width of the second groove portion 116 as a center axis CL1 of the width of the second extending portion 114b. It is provided together.
Further, the second groove 116 provided in the first extending portion 114a is located at a position shifted from the central axis CL2 of the width of the base 111 toward the first vibrating arm portion 112. The central axis of the width is provided. Further, the third groove 117 is shifted from the central axis CL2 of the width of the base 111 toward the first vibrating arm 112, similarly to the second groove 116 provided in the first extending portion 114a. The central axis of the width of the third groove 117 is provided at the position.

  In the quartz resonator element using the quartz piece 100c of the second modification, the inner surfaces of the second groove 116 and the third groove 117 are part of a predetermined conductive wiring pattern or support arms. One of the metal films 128 that are not electrically connected to the connection electrodes 123a and 123b and the conductive wiring pattern provided in the portion 114 is provided.

DESCRIPTION OF SYMBOLS 100 ... Quartz vibrating element 110, 110a, 110b, 110c ... Crystal piece 111 ... Base part 112 ... First vibrating arm part 113 ... Second vibrating arm part 114 ... Support arm Part 114a ... First extension part 114b ... Second extension part 115 ... First groove part 116 ... Second groove part 117 ... Third groove part 121a, 121b, 122a 122b ... excitation electrodes 123a, 123b ... connection electrodes 124a, 124b ... frequency adjusting metal films 125,126,127 ... conducting wiring patterns 128 ... metal films

Claims (3)

A crystal piece comprising a base, a plurality of vibrating arm portions extending in the same direction from the base portion, and a supporting arm portion extending in the same direction as the vibrating arm portion between the vibrating arm portions adjacent to the base portion; ,
A quartz resonator element in which at least an excitation electrode, a connection electrode, and a conductive wiring pattern are provided on the surface of the quartz piece,
A crystal vibration element, wherein a groove is provided on at least one main surface of the base and the support arm. A base, a plurality of vibrating arm portions extending from the base in the same direction, a first extending portion extending from the base in a direction perpendicular to the vibrating arm portion, and the first extending portion A crystal piece comprising a support arm portion constituted by a second extending portion extending in the same direction as the vibrating arm portion from the extending tip portion of
A quartz resonator element in which at least an excitation electrode, a connection electrode, and a conductive wiring pattern are provided on the surface of the quartz piece,
A quartz resonator element, wherein a groove is provided on at least one main surface of the base and the support arm.   2. A part of the conductive wiring pattern is provided on the inner surface of the groove portion provided on the base, and a metal film is provided on the inner surface of the groove portion provided on the support arm portion. Alternatively, the crystal resonator element according to claim 2.

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