JP2010258016A - Metal core substrate, conductive member for metal plates, and method for manufacturing them - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simply manufacture a metal plate having two functions for a part covered by an insulating layer and a part connected to outside electrically. <P>SOLUTION: At a conductive member, a nickel (Ni) based thin film layer 15, a Cu-Sn-Ni intermetallic compound layer 16, and a Sn system surface layer 14 is formed in this order on a surface of a Cu system substrate 12. Surface roughness is 0.1-0.4 μm in an arithmetic average roughness Ra and 1.0-3.5 μm in a ten-point average roughness Rz for a surface of the Cu-Sn-Ni intermetallic compound layer 16 touched with the Sn system surface layer 14. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a metal core substrate in which a metal plate is disposed as a core material of a circuit board, a metal plate of the metal core substrate, a conductive member suitable for use as the metal plate, and a method of manufacturing the same.

A metal core substrate is formed by arranging a metal plate as a core material of a circuit board, and is excellent in heat dissipation, mechanical strength, shielding properties, and the like. In recent years, along with demands for higher performance of automobiles, securing a large cabin space, and the like, they have been widely used in vehicles as substrates for realizing compact and high-density mounting.
Examples of this type of metal core substrate include those described in Patent Document 1 to Patent Document 5. In the metal core substrates described in these patent documents, an insulating layer is formed on the surface of a metal plate such as aluminum or copper as a core, a circuit pattern is formed on the upper surface, and electronic components are mounted on the circuit pattern. It is like that.

  Among these, in the metal core substrate described in Patent Document 1, the portion where the circuit pattern is formed through the insulating layer is the heat radiating plate portion, and both end portions are the external connection terminal plate portions. A part of the core metal plate is exposed from the insulating layer. And it is stored and fixed in a box-shaped case made of resin in a state where the heat generating element and the driving component are mounted on the heat radiating plate portion. Moreover, the male connector part is integrally formed in the case, and it arrange | positions so that the terminal plate part of a metal core board may protrude outward in the male connector part, The terminal plate part in the male connector part An external female connector can be connected.

In Patent Document 2, a part of the insulating layer of the metal core substrate is removed to expose the metal plate, and the exposed portion is subjected to Ni plating or Au plating to form a solder connection pad. Patent Document 3 and Patent Document 4 also describe that a plating film is formed on the metal plate so that a part of the metal plate can be electrically connected to the outside.
On the other hand, in Patent Document 5, when a metal plate made of a rolled copper plate having a small surface roughness is used, the surface of the metal plate is roughened by etching or a pulse electrolysis technique in order to improve adhesion to the insulating layer. It is described. Roughening the surface of the metal plate to improve the adhesion with the insulating layer is also described in Patent Document 3.

JP 2006-253428 A JP 2004-172425 A Japanese Patent Laid-Open No. 2002-2223070 JP 2003-332752 A JP 2008-223063 A

By the way, in this kind of metal core substrate, as represented by Patent Document 1, both a part where an electronic component is mounted such as a heat radiating plate part and a part which is electrically connected to the outside such as a terminal plate part. In the former case, the metal plate serving as the core is covered with the insulating layer in the former, and is exposed from the insulating layer in the latter. In this embodiment, since the surface of the metal plate is generally smooth at the portion covered with the insulating layer, the insulating layer is not directly formed on the metal plate as described in Patent Document 3 and Patent Document 5. In order to improve the adhesion to the insulating layer, it is necessary to roughen the metal plate. On the other hand, in the external connection portion, the metal plate is exposed from the insulating layer as described in Patent Documents 2 to 4. In addition, it is necessary to plate the exposed metal plate.
In either case, the metal plate cannot be used as it is, and the roughening process and the partial processing of the plating process are necessary, and the productivity is poor.

The inventors previously filed Japanese Patent Application No. 2009-89032 for the purpose of improving the above problems. The invention according to this application has a Cu-based substrate and a surface for easily producing a metal plate having both functions of a portion covered with an insulating layer and a portion electrically connected to the outside. A conductive member in which an Sn-based surface layer is formed and an intermetallic compound layer having a Cu-Sn intermetallic compound or a Ni-Sn intermetallic compound is formed between the Sn-based surface layer and the Cu-based substrate. The surface roughness of the surface of the intermetallic compound layer in contact with the Sn-based surface layer is an arithmetic average roughness Ra of 0.05 to 0.35 μm, and a ten-point average roughness Rz of 0.5 to 3. It is characterized by being 0 μm.
Although the above-mentioned problems are improved by this invention, a metal plate excellent in heat resistance as a connection terminal and a further improvement in adhesion to an insulating layer is demanded for a metal core substrate.

  The present invention has been made in view of such circumstances, and it is possible to easily manufacture a metal plate having both functions of a portion covered with an insulating layer and a portion electrically connected to the outside, and further bonding. The purpose is to improve the heat resistance and heat resistance.

  In order to solve this problem, the present invention proposes a conductive member for a metal plate, a metal plate manufactured from the conductive member, a metal core substrate using the metal plate, and a manufacturing method thereof.

  The metal plate of Japanese Patent Application No. 2009-89032 previously filed by the inventors has a Cu-based substrate, a Sn-based surface layer is formed on the surface, and a Cu-based substrate between the Sn-based surface layer and the Cu-based substrate. -Conductive member in which an intermetallic compound layer having a Sn intermetallic compound or a Ni-Sn intermetallic compound is formed, and the surface roughness of the surface in contact with the Sn-based surface layer of the intermetallic compound layer is an arithmetic average roughness The Ra is 0.05 to 0.35 μm, and the ten-point average roughness Rz is 0.5 to 3.0 μm.

  There has been a demand for a metal plate that is further improved in adhesion to an insulating layer and excellent in heat resistance as a connection terminal during a heat treatment process or component mounting at the time of forming a metal core substrate. As an improvement of -89032, we deal with a so-called three-layer plating product (Ni-based thin film layer + Cu-Sn intermetallic compound layer + Sn-based surface layer) in which a Ni-based thin film layer is added as a barrier layer on a Cu-based substrate. As a result, the problem of heat resistance as a connection terminal was solved, but satisfactory performance was not obtained for resin adhesion.

As a result of further research, the inventors paid attention to the Cu—Sn—Ni intermetallic compound, and the surface roughness thereof includes a small amount of Ni entering from the Ni plating film as a base during the formation of the intermetallic compound, And it discovered that the reflow conditions after plating had big influence.
Further, (1) if the Ni content is high, the Cu—Sn—Ni intermetallic compound itself and the entire formed plating layer are also adversely affected, so the Ni content in the intermetallic compound is in the range of 1 to 70 at%. (2) The Cu-Sn-Ni intermetallic compound has the knowledge that there is an optimal reflow temperature and holding time at which Ni can easily be contained.
Furthermore, for the resin adhesion, it is preferable that the surface roughness of the Cu-Sn-Ni intermetallic compound layer is large, but there is a limit to the surface roughness from the viewpoint of a terminal plate when used as a connector. In view of these, the surface roughness of the Cu-Sn-Ni intermetallic compound layer that can maximize the resin adhesion and exhibit high functionality as a terminal plate is Ra: 0.1 to 0.4 μm, It was found that Rz: 1.0 to 3.5 μm is optimal.

  Further, as a manufacturing method, a Ni-based thin film layer as a barrier layer and a Ni amount diffusing into the Cu—Sn—Ni intermetallic compound are taken into consideration, and a thick Ni plating film is formed. Form a thin Cu plating film so that it can be easily diffused into the Cu-Sn-Ni intermetallic compound, and further increase the peak temperature at 250 to 450 ° C. under the reflow conditions after plating. It has been found that by making the holding time as long as 5 to 30 seconds, Ni can be easily contained in the Cu—Sn—Ni intermetallic compound.

  As a result of these findings, the conductive member for a metal plate of the present invention is a conductive material in which a Ni-based thin film layer, a Cu-Sn-Ni intermetallic compound layer, and a Sn-based surface layer are formed in this order on the surface of a Cu-based substrate. The surface roughness of the surface of the Cu—Sn—Ni intermetallic compound layer in contact with the Sn-based surface layer is 0.1 to 0.4 μm in terms of arithmetic average roughness Ra, and ten points. The average roughness Rz is 1.0 to 3.5 μm.

That is, the Sn-based surface layer formed on the outermost layer has electrical characteristics such as good contact and solderability as a conductive member, and is widely used for connector terminals, lead frames, and the like. The Cu—Sn—Ni intermetallic compound layer formed under the Sn-based surface layer has a film thickness that is not necessarily uniform and has irregularities. By setting the surface roughness of the irregularities in the above range, when using the conductive member as a metal plate, the exposed intermetallic compound layer is removed by removing the Sn-based surface layer for the portion covered with the insulating layer. The surface has moderate irregularities, and the insulating layer can be bonded with high bonding strength. Moreover, since the portion not covered with the insulating layer has good electrical characteristics as a conductive member due to the Sn-based surface layer, it can be used as an electrical connection portion with the outside as it is.
In this case, when the surface roughness of the surface of the intermetallic compound layer in contact with the Sn-based surface layer is smaller than the above range, the unevenness is almost eliminated, and good bonding strength with the insulating layer cannot be obtained. If the above range is exceeded, the bonding strength with the insulating layer will increase, but an intermetallic compound layer with large irregularities will be present under the Sn-based surface layer. This is not preferable because the resistance is increased.

  Furthermore, although the Cu—Sn—Ni intermetallic compound itself is known, the composition range in the present invention is (Cu + Ni) /Sn=0.5 to 3.0 (molar ratio), preferably 0. The Ni content is 1 to 70 at%, preferably 5 to 35 at%. Furthermore, it is preferable that the average particle diameter of a Cu-Sn-Ni intermetallic compound is 0.2-3.0 micrometers.

The metal plate of the present invention is characterized in that a part of the Sn-based surface layer on the surface of the conductive member is removed, and the surface of the Cu—Sn—Ni intermetallic compound layer is exposed.
Furthermore, the metal core substrate of the present invention is characterized in that an exposed portion of the Cu—Sn—Ni intermetallic compound layer in the metal plate is covered with an insulating layer.

And the manufacturing method of the metal plate of this invention is plating Ni or Ni alloy on the surface of Cu type | system | group base material, then plating Cu or Cu alloy, and plating Sn or Sn alloy on it, respectively. After forming the plating layer, a conductive member in which a Cu-Sn-Ni intermetallic compound layer is formed between the Cu-based substrate and the outermost Sn-based surface layer is heated and reflowed. And a step of removing a part of the Sn-based surface layer in the conductive member to expose a surface of the intermetallic compound layer.

  The method for manufacturing a metal core substrate of the present invention includes a step of manufacturing a metal plate by the method for manufacturing a metal plate and forming an insulating layer on the exposed intermetallic compound layer.

  According to the present invention, the intermetallic compound layer under the outermost Sn-based surface layer has moderate irregularities, and when used as a metal plate, the portion covered with the insulating layer is Sn-based. When the surface layer is removed, the insulating layer can be bonded with high bonding strength due to the unevenness of the exposed intermetallic compound layer surface, while the portion not covered by the insulating layer is formed by the Sn-based surface layer having excellent electrical characteristics. It can be used as it is as an electrical connection part with the outside as it is, and also when it is used as a connector terminal, good insertability can be obtained. Therefore, a metal plate that has two different functions, a part that has improved bondability to the insulating layer and a part that has improved electrical connection reliability and connector terminals without special post-processing. Easy to make.

It is sectional drawing which shows one Embodiment of the manufacturing method of the metal core board | substrate which concerns on this invention to process order. It is the expanded sectional view which modeled and showed the surface layer part of one embodiment of the conductive member for metal plates concerning the present invention. It is sectional drawing which shows a use condition about one Embodiment of the metal core board | substrate which concerns on this invention. It is a front view which shows notionally the apparatus for measuring the dynamic friction coefficient of an electrically-conductive member.

Embodiments of the present invention will be described below.
First, the metal core substrate will be described. As shown in FIG. 3, the metal core substrate 1 is composed of a circuit board portion 2 arranged at the center in the length direction and connector terminal portions 3 arranged at both ends. It is formed. In the circuit board portion 2, both surfaces of a metal plate 4 serving as a core are covered with an insulating layer 5, a circuit conductor 6 is formed on the insulating layer 5, and an electronic component 7 is mounted thereon. On the other hand, the connector terminal portion 3 has both end portions not covered by the insulating layer 5 of the metal plate 4 as the connector terminal portion 3 as it is, and the external connector terminal 8 is connected in a fitted state as indicated by a two-dot chain line. It has become so.
Further, the metal plate 4 is formed by removing a part of the outermost surface layer of the central portion to be the connector terminal portion 3 and exposing the surface of the inner layer in the metal plate conductive member 11 described below. is there.

Next, the metal plate conductive member 11 will be described.
As shown in FIG. 2, the metal plate conductive member 11 of this embodiment has a Ni-based thin film layer 15, a Cu—Sn—Ni intermetallic compound layer 16, and a Sn-based surface layer 14 on the surface of a Cu-based substrate 12. Are formed in this order.
The Cu-based substrate 12 is made of, for example, a plate made of Cu or a Cu alloy. The material of the Cu alloy is not necessarily limited, but oxygen-free copper, tough pitch copper, Cu-Zr alloy, Cu-Cr-Zr alloy, Cu-Fe-P alloy is excellent in press workability while having conductivity. For example, OFC, TC, TAMAC4, C151, MZC1, ZC, TAMAC194 manufactured by Mitsubishi Shindoh Co., Ltd. are preferably used.

The Cu-Sn-Ni intermetallic compound layer 16 is an alloy layer formed by diffusing Ni alloy plated on the Cu-based substrate 12, Cu alloy, and surface Sn by reflow treatment, as will be described later. The surface roughness of the surface in contact with the Sn-based surface layer 14 is 0.1 to 0.4 μm in terms of arithmetic average roughness Ra, and 1.0 to 3.5 μm in terms of 10-point average roughness Rz.
The reason why the arithmetic average roughness Ra is 0.1 to 0.4 μm in terms of Ra is that when it is used as the connector terminal portion 3, a smaller Ra is preferable because the insertion / extraction force is reduced. In order to ensure a good bonding strength between the surface and the insulating layer 5 when the surface layer 14 is removed, Ra is required to be 0.1 μm or more, and if the irregularities become larger to exceed 0.4 μm, the Sn-based surface This is because the unevenness of the Cu—Sn—Ni intermetallic compound layer 16 becomes resistance and increases the insertion / extraction force when the connector terminal portion 3 is used with the layer 14 covered.

  On the other hand, with respect to the ten-point average roughness Rz, if Rz is 1.0 μm or more, the anchor effect for the insulating layer 5 functions effectively and the bonding strength can be increased, but the peaks and valleys are locally too large. And cause defects. When Rz exceeds 3.5 μm, Cu in the Cu-based substrate 12 diffuses at a high temperature, and the Cu—Sn—Ni intermetallic compound layer 16 grows to reach the surface of the conductive member 11, whereby Cu is formed on the surface. An oxide will be formed, increasing the contact resistance. Therefore, Rz is preferably up to 3.5 μm.

  The outermost Sn-based surface layer 14 is formed by performing reflow treatment after electrolytic plating of Sn or an Sn alloy, and is formed to a thickness of, for example, 0.05 to 1.5 μm. When the thickness of the Sn-based surface layer 14 is less than 0.05 μm, Cu diffuses at high temperatures and Cu oxide is easily formed on the surface, so that contact resistance increases, and solderability and Corrosion resistance also decreases. On the other hand, if the thickness exceeds 1.5 μm, the effect of hardening the surface base by the Cu—Sn—Ni intermetallic compound layer 16 present in the lower layer of the flexible Sn-based surface layer 14 is reduced, and when used as the connector terminal portion 3 The insertion / extraction force increases.

  The Ni-based thin film layer 15 has a thickness of 0.05 to 1.5 μm, and the plating thickness before the reflow treatment is the same as the Ni-based thin film layer 15 and Cu—Sn remaining on the Cu-based substrate as a barrier layer after the reflow treatment. In consideration of the amount of Ni diffusing into the Ni intermetallic compound layer 16, it is preferably set to 0.2 to 1.5 μm. When it is 0.2 μm or less, it does not remain as a barrier layer after the reflow treatment, and when it is 1.5 μm or more, the Ni present in the Cu—Sn—Ni intermetallic compound layer 16 increases, and between the Cu—Sn—Ni metals The strength of the compound layer 16 is adversely affected.

  Further, the Cu plating film before the reflow treatment needs to be thinned so that a necessary amount of Ni can easily diffuse into the Cu—Sn—Ni intermetallic compound 16 from the lower Ni plating film. .5 μm is preferred. If it is 0.05 μm or less, the Cu contained in the Cu—Sn—Ni intermetallic compound layer 16 is reduced, and the target Cu—Sn—Ni intermetallic compound layer 16 cannot be formed. If it exists, it becomes difficult to diffuse Ni of a base layer in the Cu-Sn-Ni intermetallic compound layer 16, and a desired surface roughness as the Cu-Sn-Ni intermetallic compound layer 16 cannot be obtained.

Next, such a conductive member 11 and a series of methods for manufacturing the metal core substrate 1 from the conductive member 11 will be described with reference to FIG.
First, as shown in FIG. 1 (a), as a Cu-based substrate 12, a Cu or Cu alloy plate material is prepared, and after cleaning the surface by degreasing, pickling, etc., Ni plating, Cu plating, By sequentially performing the Sn plating in this order, the Ni plating layer 21, the Cu plating layer 22, and the Sn plating layer 23 are formed as shown in FIG. In addition, pickling or rinsing is performed between the plating processes.

Ni plating conditions include a plating bath, a watt bath mainly composed of nickel sulfate (NiSO ₄ ), boric acid (H ₃ BO ₃ ), nickel sulfamate (Ni (NH ₂ SO ₃ ) ₂ ) and boric acid. A sulfamic acid bath or the like mainly composed of (H ₃ BO ₃ ) is used. In some cases, nickel chloride (NiCl ₂ ) or the like is added as a salt that easily causes an oxidation reaction. The plating temperature is 45 to 55 ° C., the current density is 20 to 50 A / dm ² , and the plating thickness is 0.2 to 1.5 μm.

As the conditions for Cu plating, a copper sulfate bath containing copper sulfate (CuSO ₄ ) and sulfuric acid (H ₂ SO ₄ ) as main components is used in the plating bath, and chlorine ions (Cl ⁻ ) are added for leveling. . The plating temperature is 35 to 55 ° C., the current density is 20 to 60 A / dm ² , and the plating thickness needs to be thin so that Ni in the lower layer can easily diffuse into the Cu—Sn—Ni intermetallic compound. The thickness is 0.05 to 0.5 μm.
As the conditions for Sn plating, a sulfuric acid bath mainly composed of sulfuric acid (H ₂ SO ₄ ) and stannous sulfate (SnSO ₄ ) is used as a plating bath, the plating temperature is 15 to 35 ° C., and the current density is 10 to 10. 30 A / dm ² and the plating thickness is 0.6 to 2.3 μm.

All the plating processes are performed at a higher current density than a general plating technique. In this case, the plating solution agitation technology is important. However, by using a method of spraying the plating solution at a high speed toward the processing plate or a method of flowing the plating solution in parallel with the processing plate, A fresh plating solution can be supplied quickly, and a uniform plating layer can be formed in a short time with a high current density. The flow rate of the plating solution is desirably 0.5 m / second or more on the surface of the treatment plate. In addition, in order to enable the plating process at a current density that is an order of magnitude higher than that of the prior art, an insoluble anode such as a Ti plate coated with iridium oxide (IrO ₂ ) having a high anode limit current density is used as the anode. It is desirable.
These plating conditions are summarized as shown in Tables 1 to 3 below.

  And after giving these three types of plating processes, it heats and performs a reflow process. The reflow treatment is a treatment in which the treated material after plating is heated at a temperature of 250 to 450 ° C. for 5 to 30 seconds in a heating furnace having a CO reducing atmosphere and then cooled using 10 to 90 ° C. water. .

  As described above, after the three-layer plating is performed on the surface of the Cu-based substrate 12 under the plating conditions shown in Table 1, Table 2, and Table 3, the reflow treatment is performed, so that FIG. 1 (c) and FIG. As shown, a conductive member 11 having a Ni-based thin film layer 15, a Cu-Sn-Ni intermetallic compound layer 16, and a Sn-based surface layer 14 formed in this order on the surface of a Cu-based substrate 12 is manufactured.

  Next, in order to use the conductive member 11 manufactured as described above as the metal plate 4 of the metal core substrate 1 shown in FIG. 3, as shown in FIG. The Sn-based surface layer 14 that is the outermost surface layer is removed. When the Sn-based surface layer 14 is removed, a mask 24 is coated on a region to be the connector terminal portion 3 in the conductive member 11, and pure Sn such as L80 manufactured by Reybold Co., Ltd. is etched to form Cu-Sn-Ni. By immersing in an etching solution for stripping a plating film made of a component that does not corrode the alloy for 5 minutes, the Sn-based surface layer 14 in the region not covered by the mask 24 is removed, and the underlying Cu—Sn—Ni metal The compound layer 16 is exposed. The Cu—Sn—Ni intermetallic compound layer 16 has Ra and Rz formed to have a predetermined surface roughness as described above, while the connector terminal portion 3 covered with the mask 24 and In such a region, the Sn-based surface layer 14 maintains a smooth surface. The state shown in FIG. 1D in which the Sn-based surface layer 14 is partially removed and the Cu—Sn—Ni intermetallic compound layer 16 is exposed is the metal plate 4.

Next, as shown in FIG. 1E, the insulating layer 5 made of resin is coated on the exposed portion of the Cu—Sn—Ni intermetallic compound layer 16 of the metal plate 4. This insulating layer 5 is formed by laminating an adhesive sheet (prepreg) obtained by thermocompression bonding a resin of epoxy resin or polyimide resin, or by impregnating a glass cloth of a reinforcing material into a semi-cured state. It is formed by a method such as applying in a liquid state and curing.
When the circuit conductor 6 is formed on the insulating layer 5, the metal core substrate 1 is completed. The circuit conductor 6 is formed by laminating a copper foil on the insulating layer 5 and is formed by a method such as pattern etching of a necessary portion.

Next, examples of the present invention will be described.
As a Cu alloy plate (Cu base material), a TC material made by Mitsubishi Shindoh Co., Ltd. having a thickness of 0.25 mm was used, and Ni, Cu, and Sn plating processes were sequentially performed at the plating thicknesses shown in Table 4. . Between each plating process, the water washing process for washing away a plating solution from the processing material surface was put.
In the plating treatment in this example, an insoluble anode of a Ti plate coated with iridium oxide was sprayed on the Cu alloy plate at a high speed.
A reflow treatment was performed on the plated material. This reflow treatment was performed 1 minute after the last Sn plating treatment, and was performed in a reducing atmosphere at a heating temperature of 250 ° C. to 450 ° C. and a holding time of 5 to 30 seconds.

Next, with respect to this treatment material, the Sn-type surface layer was removed using the above-described etching solution for removing the plating film, with the region assuming the connector portion covered with a mask, and exposed Cu—Sn—Ni metal. As the surface roughness of the intermetallic compound layer, arithmetic average roughness Ra and ten-point average roughness Rz were measured. This surface roughness is obtained by using a scanning confocal infrared laser microscope LEXT OLS-3000-IR manufactured by Olympus Co., Ltd. on the surface of the exposed Cu—Sn—Ni intermetallic compound layer, and a condition of 100 times the objective lens. By irradiating with laser light, measuring the distance from the reflected light, and continuously measuring the distance while scanning the laser light linearly along the surface of the Cu-Sn-Ni intermetallic compound layer Asked.
Table 4 shows the above test conditions, the surface roughness of the Cu—Sn—Ni intermetallic compound layer, and the minimum film thickness of the Sn-based surface layer.

For the sample prepared as shown in Table 4, the Sn-based surface layer was removed and Cu—Sn—Ni was removed.
An insulating layer made of glass epoxy resin of FR-4 with UL / ANSI grade was formed with a thickness of 0.2 mm by glass hot pressing on the part where the intermetallic compound layer was exposed.
Then, the contact resistance, the dynamic friction coefficient, and the solder heat resistance after 105 ° C. × 1000 hours are measured for the connector portion that is in the Sn-based surface layer state, and the insulating layer is formed on the circuit board portion on which the insulating layer is formed. The peel strength was measured.
The contact resistance was measured under the condition of sliding with a load of 0.49 N (50 gf) using an electrical contact simulator manufactured by Yamazaki Seiki Co., Ltd. after leaving the sample at 105 ° C. for 1000 hours.

  As for the dynamic friction coefficient, a plate-shaped male test piece and a hemispherical female test piece having an inner diameter of 1.5 mm are prepared with each sample so as to simulate the contact portion of the male terminal and female terminal of the fitting type connector. Then, using a horizontal load measuring device (Model-2152NRE) manufactured by Aiko Engineering Co., Ltd., the frictional force between the two test pieces was measured to obtain the dynamic friction coefficient. Referring to FIG. 4, a male test piece 32 is fixed on a horizontal base 31, a hemispherical convex surface of a female test piece 33 is placed on the male test piece 33, and the plating surfaces are brought into contact with each other. The load P of 9N (500 gf) is applied and the male test piece 32 is pressed. With the load P applied, the frictional force F when the male test piece 32 was pulled 10 mm in the horizontal direction indicated by the arrow at a sliding speed of 80 mm / min was measured by the load cell 35. A dynamic friction coefficient (= Fav / P) was determined from the average value Fav of the friction force F and the load P.

The peel strength was difficult to measure with a 0.25 mm copper plate. Therefore, Sn plating was performed on a 35 μm TC copper foil under the same conditions, followed by a reflow treatment, and then measured according to JIS C 6481.
The solder heat resistance was measured in accordance with the provisions of the normal measurement method of JIS C 6481. The case where the circuit board portion on which the insulating layer was formed was swollen or peeled was evaluated as x, and the case where it did not occur was rated as ○.
These results are shown in Table 5.

  As is apparent from Table 5, the metal plate of this example has a small contact resistance at a high temperature and a small coefficient of dynamic friction with respect to the connector portion, so that the insertion / extraction force when using the connector is small and good. It can be judged that the heat resistance is also excellent. Further, in the circuit board portion, the insulating layer is firmly bonded, and it can be determined that the bonding reliability is high so that no peeling or the like occurs.

In addition, with respect to the migration resistance of the insulating layer, an applied voltage of DC 50 V is applied between the metal plate sandwiching the insulating layer and the outer copper foil under the conditions in accordance with the provisions of JPCA-ET04-2007, and the insulation after 1000 hours has passed. The resistance value was measured.
As an example sample, three samples were selected from those manufactured under the conditions of samples 1 to 5 in Table 4, and as a comparative example, a black plate treatment as a conventional technique was performed as a roughening treatment of a metal plate. used. A sample having an insulation resistance value of 1 MΩ or less was evaluated as x.

As is apparent from this table, in the comparative example by the blackening treatment, the insulation resistance was lowered and became defective, but the example was not defective. This is presumably because Cu is roughened as an oxide in the blackening treatment, and therefore when Cu is humidified, the Cu oxide is easily ionized to cause insulation deterioration. On the other hand, the Cu—Sn—Ni intermetallic compound layer of the example is composed of Sn as an alloy component.
Since the metal ions are passivated, the metal ions are difficult to elute, so that the insulation resistance value is maintained without lowering.

DESCRIPTION OF SYMBOLS 1 Metal core board 2 Circuit board part 3 Connector part 4 Metal plate 5 Insulation layer 6 Circuit conductor 7 Electronic component 11 Conductive member 12 Cu-type base material 14 Sn-type surface layer 15 Ni thin film layer 16 Cu-Sn-Ni intermetallic compound layer 21 Ni plating layer 22 Cu plating layer 23 Sn plating layer 24 Mask

Claims (5)

A conductive member in which a Ni-based thin film layer, a Cu-Sn-Ni intermetallic compound layer, and a Sn-based surface layer are formed in this order on the surface of a Cu-based substrate, and the Sn-based surface layer of the intermetallic compound layer The surface roughness of the surface in contact with the metal core substrate is an arithmetic average roughness Ra of 0.1 to 0.4 μm and a ten-point average roughness Rz of 1.0 to 3.5 μm Conductive members for metal plates   The metal plate for a metal core substrate, wherein a part of the Sn-based surface layer in the conductive member for a metal plate according to claim 1 is removed, and a surface of the intermetallic compound layer is exposed.   The metal core board | substrate characterized by the exposed part of the said intermetallic compound layer being covered with the insulating layer in the metal plate for core metal boards | substrates of Claim 2.   The surface of the Cu-based substrate is plated with Ni or Ni alloy, then Cu or Cu alloy is plated, Sn or Sn alloy is plated thereon to form each plating layer, and then heated to reflow. A step of producing a conductive member in which a Ni-based thin film layer and a Cu-Sn-Ni intermetallic compound layer are formed between the Cu-based substrate and the outermost Sn-based surface layer by the treatment; And a step of removing a part of the Sn-based surface layer in the member to expose the surface of the intermetallic compound layer. A method for producing a metal plate for a metal core substrate.   A method for producing a metal core substrate, comprising: producing a metal plate by the production method according to claim 4 and forming an insulating layer on the exposed intermetallic compound layer.

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