JP2010212544A - Method of manufacturing electronic component - Google Patents

Method of manufacturing electronic component Download PDF

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Publication number
JP2010212544A
JP2010212544A JP2009059073A JP2009059073A JP2010212544A JP 2010212544 A JP2010212544 A JP 2010212544A JP 2009059073 A JP2009059073 A JP 2009059073A JP 2009059073 A JP2009059073 A JP 2009059073A JP 2010212544 A JP2010212544 A JP 2010212544A
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electronic component
resin body
electronic
manufacturing
dummy
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JP2009059073A
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Japanese (ja)
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Hiroshi Tomita
浩史 冨田
Mikio Taoka
幹夫 田岡
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Panasonic Corp
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Panasonic Corp
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Priority to JP2009059073A priority Critical patent/JP2010212544A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method which can manufacture an electronic component efficiently and which can avoid mechanical damage to a component. <P>SOLUTION: The method of manufacturing an electronic component 14 includes a step of forming an electronic component of forming a resin body 12 and an internal electrode 13 on a board 11, a lifting step of lifting the resin body 12 from the board 11 and obtaining an aggregate 15 of the electronic component 14, and a dicing step of dicing the electronic component 14 from the aggregate 15 of the electronic component 14. Adjacent electronic components 14 are arranged in a comma shape different in direction by 90°. The shape of a dummy 18 surrounded by the electric components 14 is an octagon. Thereby, the electric component can be efficiently produced and mechanical damage to the component can be reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、各種電子機器に使用されるインダクタ素子、キャパシタ素子等の電子部品の製造方法に関するものである。   The present invention relates to a method for manufacturing electronic components such as inductor elements and capacitor elements used in various electronic devices.

従来の電子部品の製造方法は、図3に示すごとく、素体1の中にコイル部2を積層形成した集合体(図示していない)を作成した後、ダイシングあるいはバレル等の方法で個片化していた。   As shown in FIG. 3, a conventional method for manufacturing an electronic component is to produce an assembly (not shown) in which a coil portion 2 is laminated in an element body 1 and then to separate pieces by a method such as dicing or barrel. It was converted.

なお、この出願の発明に関連する先行技術文献情報としては、例えば特許文献1が知られている。
特開2008−147538号公報
For example, Patent Document 1 is known as prior art document information related to the invention of this application.
JP 2008-147538 A

しかしながら従来のように、ダイシングにより個片化する場合、電極端子3を切断することが難しく、これを避けるためには周辺部に切断領域を設けて、切断後に切断領域の残りの部分を取り除く必要がある。また、バレルあるいはローラ等によって個片化する場合、分割残りや、バリが残りやすいという課題があり、この分割残りやバリを除去するために、個片化した後に長くバレル研磨を行なうと、素体も削られるという問題を有している。   However, when dividing into individual pieces by dicing as in the prior art, it is difficult to cut the electrode terminals 3, and in order to avoid this, it is necessary to provide a cutting region in the peripheral portion and to remove the remaining portion of the cutting region after cutting There is. In addition, when dividing into individual pieces by a barrel or a roller, there is a problem that division remaining and burrs are likely to remain, and in order to remove the division remaining and burrs, if barrel polishing is performed for a long time after dividing into pieces, There is a problem that the body is also shaved.

本発明は、これらの課題を解決し、ロスが少なく、効率的に製造でき、部品への機械的ダメージも避けることができる製造方法を提供するものである。   The present invention solves these problems, and provides a manufacturing method that can be efficiently manufactured with little loss and that can avoid mechanical damage to parts.

上記目的を達成するために本発明は、第1の電子部品の外部電極部の端面は、隣接する第2の電子部品の樹脂素体部側面に接触させ、第1の電子部品の外部電極部の端部側面は、ダミー部に接触させ、ダミー部は、第1の電子部品と第2の電子部品と第3の電子部品と第4の電子部品とのそれぞれにおける、樹脂素体部側面と外部電極部の端部側面との境界部の樹脂素体部側に接続し、第1の電子部品と第2の電子部品と第3の電子部品と第4の電子部品とを巴状に連続配置して形成したものであり、ダミー部は8角形の形状をしているものである。   In order to achieve the above object, according to the present invention, the end face of the external electrode portion of the first electronic component is brought into contact with the side surface of the resin body portion of the adjacent second electronic component, and the external electrode portion of the first electronic component The side surfaces of the first and second electronic components, the third electronic component, and the fourth electronic component are respectively in contact with the dummy portion. The first electronic component, the second electronic component, the third electronic component, and the fourth electronic component are continuously connected in a bowl shape, connected to the resin body portion side of the boundary with the end side surface of the external electrode portion. The dummy part has an octagonal shape.

本発明によると、ロスが少なく、効率的に製造でき、部品への機械的ダメージも避けることができる。   According to the present invention, there is little loss, it can manufacture efficiently, and mechanical damage to parts can also be avoided.

(実施の形態1)
以下本発明の実施の形態1を用いて、本発明の電子部品の製造方法について図面を参照しながら説明する。
(Embodiment 1)
A method for manufacturing an electronic component according to the present invention will be described below with reference to the drawings, using Embodiment 1 of the present invention.

図1は本発明の実施の形態1における電子部品の製造工程を説明する図であり、図2は電子部品のパターン配置図である。   FIG. 1 is a diagram for explaining an electronic component manufacturing process according to Embodiment 1 of the present invention, and FIG. 2 is a pattern layout diagram of the electronic component.

まず図1(a)のように、表面が酸化されたシリコン基板11の上に感光性樹脂素体部12の層を形成する。これを露光によりパターニングした後に銅をスパッタ、さらにその上に銅メッキ層を形成し、この表面を研削もしくは研磨して平坦化し、この作業を繰り返すことにより、図1(b)のようにシリコン基板11上に樹脂素体部12および内部電極13を有する電子部品14の集合体15を形成する。   First, as shown in FIG. 1A, a layer of a photosensitive resin body portion 12 is formed on a silicon substrate 11 whose surface is oxidized. After this is patterned by exposure, copper is sputtered, a copper plating layer is formed thereon, and the surface is ground or polished to be flattened. By repeating this operation, a silicon substrate is obtained as shown in FIG. An assembly 15 of electronic components 14 having a resin body portion 12 and internal electrodes 13 is formed on 11.

ここで個々の電子部品14は、長手方向約1mm、中央部分の幅約0.6mmのほぼ矩形状であり、長手方向の両端部は外部電極部20となっており、この外部電極部20の幅は約0.5mmと中央部分よりやや狭くなっている。各電子部品14は図2のように、第1の電子部品14aの外部電極部20の端面は、隣接する第2の電子部品14bの樹脂素体部12側面に接触させ、第1の電子部品14aの外部電極部20の端部側面はダミー部18に接触させ、ダミー部18は、第1の電子部品14aと第2の電子部品14bと第3の電子部品14cと第4の電子部品14dとのそれぞれにおける、樹脂素体部12側面と外部電極部20の端部側面との境界部の樹脂素体部12側に接続し、第1の電子部品14aと第2の電子部品14bと第3の電子部品14cと第4の電子部品14dとを巴状に連続配置する構成としている。すなわち各電子部品14は隣り合う電子部品14とはお互いに方向が90°異なる巴状の配置となっており、各電子部品14によって囲まれる部分がダミー部18となっていて、中央部分よりも外部電極部20の幅を狭くすることによって、ダミー部18の形状を8角形としている。   Here, each electronic component 14 has a substantially rectangular shape having a longitudinal direction of about 1 mm and a central portion having a width of about 0.6 mm, and both end portions in the longitudinal direction are external electrode portions 20. The width is about 0.5 mm, which is slightly narrower than the central portion. As shown in FIG. 2, each electronic component 14 has an end face of the external electrode portion 20 of the first electronic component 14a in contact with the side surface of the resin body portion 12 of the adjacent second electronic component 14b. The end portion side surface of the external electrode portion 14a is in contact with the dummy portion 18, and the dummy portion 18 includes the first electronic component 14a, the second electronic component 14b, the third electronic component 14c, and the fourth electronic component 14d. Are connected to the resin body 12 side of the boundary between the side surface of the resin body 12 and the end surface of the external electrode 20, and the first electronic component 14 a, the second electronic component 14 b, and the second The third electronic component 14c and the fourth electronic component 14d are continuously arranged in a bowl shape. That is, each electronic component 14 has a bowl-like arrangement that is 90 ° different from the adjacent electronic component 14, and the portion surrounded by each electronic component 14 is a dummy portion 18, which is more than the central portion. By reducing the width of the external electrode part 20, the shape of the dummy part 18 is an octagon.

次にこれらをフッ化水素酸に浸漬することで、シリコン基板表面の酸化膜が溶解し、図1(c)のように電子部品14の集合体15をシリコン基板11から剥離する。   Next, by immersing them in hydrofluoric acid, the oxide film on the surface of the silicon substrate is dissolved, and the assembly 15 of the electronic components 14 is peeled from the silicon substrate 11 as shown in FIG.

次に図1(d)のように、電子部品14の集合体15をシリコーンからなる支持台16に設置し、この上から厚さ約0.1mmのPET(ポリエチレンテレフタレート)からなる保護シート17で覆い、保護シート17の上からローラ21等で圧力を加えることにより電子部品14を個片化する。   Next, as shown in FIG. 1 (d), the assembly 15 of the electronic components 14 is placed on a support base 16 made of silicone, and a protective sheet 17 made of PET (polyethylene terephthalate) having a thickness of about 0.1 mm is formed thereon. The electronic component 14 is separated into pieces by covering and applying pressure from above the protective sheet 17 with a roller 21 or the like.

ここでこのように圧力を加えることにより個片化できるのは、外部電極部20を構成している銅と樹脂素体部12の結合があまり強くないため、外部から衝撃が加わった時にその界面が分離するためである。そのため個片化される電子部品14の周囲は、お互いに異なる素材(銅と樹脂素体部12)となっている必要がある。この関係を満たすために、ダミー部18の構成は、図2のように卍状のダミー電極19を有するものにしておくことが望ましい。このようにすることにより、電子部品14とダミー部18の分離が容易となる。但し1つの電子部品14の中での銅と樹脂素体部12とはその形状を例えば相手側に食い込むように構成することにより分離しないようにしている。   Here, by applying pressure in this way, it can be separated into pieces because the bond between the copper constituting the external electrode portion 20 and the resin body portion 12 is not so strong, and when the impact is applied from the outside, its interface This is because of separation. Therefore, the periphery of the electronic component 14 to be separated needs to be made of different materials (copper and resin body 12). In order to satisfy this relationship, it is desirable that the configuration of the dummy portion 18 has a bowl-shaped dummy electrode 19 as shown in FIG. By doing so, the electronic component 14 and the dummy portion 18 can be easily separated. However, the copper and the resin body portion 12 in one electronic component 14 are configured not to be separated by, for example, being configured to bite into the other side.

ローラ21により電子部品14の集合体15に圧力を加えていくと、圧力が加わった部分から銅と樹脂素体部12との界面が分離していくが、この分離していく方向が90°変わった場合、その角での分離が完全に行なわれず、これがバリとなる。本発明では、ダミー部18を正方形の4つの角を45°の角度でカットした8角形としているため、分離していく方向は45°変わるだけであり、分離時のバリが発生しにくくなる。   When pressure is applied to the assembly 15 of the electronic components 14 by the roller 21, the interface between the copper and the resin body 12 is separated from the portion where the pressure is applied. The direction of separation is 90 °. If it changes, separation at that corner will not be complete and this will be a burr. In the present invention, since the dummy portion 18 is an octagon in which four corners of a square are cut at an angle of 45 °, the separation direction only changes by 45 °, and burrs are hardly generated during separation.

またダミー部18を正方形にする場合に比べて、面積を大きくすることができるため、電子部品14とダミー部18の分離が行ないやすくなる。   Further, since the area can be increased as compared with the case where the dummy portion 18 is square, the electronic component 14 and the dummy portion 18 can be easily separated.

以上のように、銅と樹脂素体部12との界面が分離しやすくなるということは、例えばローラ21を用いて分離を行なう場合であれば、その圧力、回数を減らすことができ、電子部品14へのダメージを減らすことができ、電子部品14の信頼性を高めることができる。   As described above, the interface between the copper and the resin body portion 12 is easily separated. For example, when separation is performed using the roller 21, the pressure and the number of times can be reduced. 14 can be reduced, and the reliability of the electronic component 14 can be improved.

また、本発明では電子部品14の外形が、中央部分よりも端部の外部電極部20の幅を狭くした形状となる。電子部品14をプリント基板(図示していない)に実装して半田付けを行なう時に、半田が側面の方にも流れるため、隣の部品との距離を確保しておく必要がある。しかしながら本発明では、半田付けする外部電極部20の幅を狭くしているため、中央部分の幅いっぱいまで別の部品を近接させることができ、実装の高密度化を図ることができる。   In the present invention, the outer shape of the electronic component 14 is a shape in which the width of the external electrode portion 20 at the end is narrower than that of the central portion. When the electronic component 14 is mounted on a printed circuit board (not shown) and soldered, the solder also flows toward the side surface, so it is necessary to secure a distance from the adjacent component. However, in the present invention, since the width of the external electrode portion 20 to be soldered is narrowed, another component can be brought close to the full width of the central portion, and the mounting density can be increased.

なお、本実施の形態では電子部品14の分離を、ローラ21を用いて行なっているが、この方法に限定されず、バレルやブラスト等の方法を用いても同様の効果が得られる。   In the present embodiment, the electronic component 14 is separated using the roller 21, but the present invention is not limited to this method, and the same effect can be obtained by using a method such as barrel or blasting.

本発明の電子部品の製造方法によると、製造時のロスが少なく、効率的に製造でき、部品への機械的ダメージも避けることができ、コイル部品、キャパシタ部品等の各種電子部品の製造方法に適用できる。   According to the electronic component manufacturing method of the present invention, there is little loss at the time of manufacturing, it can be efficiently manufactured, mechanical damage to the component can be avoided, and the manufacturing method of various electronic components such as coil components and capacitor components can be avoided. Applicable.

本発明の実施の形態1における電子部品の製造工程を説明する図The figure explaining the manufacturing process of the electronic component in Embodiment 1 of this invention 本発明の実施の形態1における電子部品のパターン配置図Pattern arrangement diagram of electronic component in Embodiment 1 of the present invention 従来の電子部品の斜視図Perspective view of conventional electronic components

11 基板
12 樹脂素体部
13 内部電極
14 電子部品
14a 第1の電子部品
14b 第2の電子部品
14c 第3の電子部品
14d 第4の電子部品
15 電子部品の集合体
16 支持台
17 保護シート
18 ダミー部
19 ダミー電極
20 外部電極部
21 ローラ
DESCRIPTION OF SYMBOLS 11 Board | substrate 12 Resin body part 13 Internal electrode 14 Electronic component 14a 1st electronic component 14b 2nd electronic component 14c 3rd electronic component 14d 4th electronic component 15 Assembly of electronic components 16 Support stand 17 Protection sheet 18 Dummy part 19 Dummy electrode 20 External electrode part 21 Roller

Claims (2)

樹脂素体部と内部電極を有する電子部品の製造方法であって、基板上に前記樹脂素体部および前記内部電極を形成する電子部品形成工程と、前記樹脂素体部を前記基板から剥離して電子部品の集合体を得る剥離工程と、前記電子部品の集合体から電子部品を個片化する個片化工程とを備え、前記電子部品形成工程において、第1の電子部品の外部電極部の端面は、隣接する第2の電子部品の樹脂素体部側面に接触させ、前記第1の電子部品の外部電極部の端部側面は、ダミー部に接触させ、前記ダミー部は、前記第1の電子部品と前記第2の電子部品と第3の電子部品と第4の電子部品とのそれぞれにおける、前記樹脂素体部側面と前記外部電極部の端部側面との境界部の前記樹脂素体部側に接続し、前記第1の電子部品と前記第2の電子部品と前記第3の電子部品と前記第4の電子部品とを巴状に連続配置して形成したものであり、前記ダミー部は8角形の形状をしている電子部品の製造方法。 A method of manufacturing an electronic component having a resin body portion and an internal electrode, the electronic component forming step of forming the resin body portion and the internal electrode on a substrate, and peeling the resin body portion from the substrate. A separation step of obtaining an assembly of electronic components and an individualization step of separating the electronic components from the assembly of electronic components, and in the electronic component formation step, external electrode portions of the first electronic component The end surface of the first electronic component is in contact with the side surface of the resin body portion of the adjacent second electronic component, the end surface of the external electrode portion of the first electronic component is in contact with the dummy portion, and the dummy portion is The resin at the boundary between the side surface of the resin body portion and the side surface of the end portion of the external electrode portion in each of the first electronic component, the second electronic component, the third electronic component, and the fourth electronic component The first electronic component and the second electronic part are connected to the element body side. The third is of the electronic component and the fourth electronic component obtained by forming successively arranged in Tomoe shape, the manufacturing method of the electronic component dummy portion which has a octagonal shape and. 前記ダミー部には、卍状の電極が設けられている請求項1記載の電子部品の製造方法。 The method of manufacturing an electronic component according to claim 1, wherein the dummy portion is provided with a bowl-shaped electrode.
JP2009059073A 2009-03-12 2009-03-12 Method of manufacturing electronic component Pending JP2010212544A (en)

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