JP2010180436A - Particle jet film deposition system for continuous film deposition of foil substrate, and continuous film deposition method of foil substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a particle jet film deposition method and a particle jet film deposition system capable of continuously depositing a film of a solid material on a long sheet-like foil substrate. <P>SOLUTION: The particle jet film deposition system S1 comprises: a jetting device 20 for diffusing solid particles fed to a nozzle 21 into a gas flow inside the nozzle and jetting the solid particles from a jetting port 25; a conveying device 10 for feeding a long sheet-like foil substrate W in front of the nozzle 21 and moving it across a jet area JA; and a back side supporting device 30 which is provided opposite to the jetting port 25 across the foil substrate W to support the back side of the foil substrate W. The solid particles are jetted on the foil substrate which is conveyed by the conveying device 10 with a back side being supported by the back side supporting device 30, and collision-fixed to continuously form the film of the solid material. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a fine particle injection film forming system and a film forming method for forming a continuous film on a long sheet-like foil base material.

  As a film formation method for injecting solid fine particles onto a substrate together with a gas gas flow and causing the solid material film to collide and adhere to the surface of the substrate to form a solid material film, the aerosol deposition (AD) method or powder jet deposition is used. A position (Powder Jet Deposition: PJD) method is known (see, for example, Patent Document 1 and Patent Document 2). In the powder jet deposition method (PJD method), solid fine particles are dispersed in a gas using the ejector effect generated by the airflow flowing inside the nozzle, and a solid-gas mixed phase flow is injected from the nozzle to collide with the object to be processed. A film of a solid material is formed on the surface of the substrate under normal temperature and pressure.

JP 2003-277948 A JP 2006-200033 A

  As described above, the film forming method for causing solid fine particles at room temperature to collide with the base material is not necessarily clarified with respect to the adhering mechanism, but using the collision energy when colliding with the base material of the solid fine particles, It is understood that a physical or chemical bond is created between the solid and the substrate. Therefore, it is necessary to dispose the base material so that the collision energy is not dispersed when the solid fine particles ejected from the nozzle collide with the base material. Conventionally, a fine particle injection film forming system is configured so that a base is fixed to a support base and the base and nozzle are moved relative to each other by moving the support base or nozzle to generate a solid film on the surface of the base. It had been. However, in the configuration in which the substrate is fixed to the support base in this way, a solid material film is continuously formed on a long sheet-like substrate such as a copper foil or a polyimide sheet wound on a roll. There was a problem that it was difficult to do.

  The present invention has been made in view of such problems, and provides a fine particle injection film forming method and a fine particle injection film forming system capable of continuously forming a solid material film on a long sheet-like foil base material. The purpose is to do.

  In order to achieve the above object, a first aspect of the present invention is a fine particle jet film forming system for continuously forming a foil base material. In this fine particle injection film forming system, solid fine particles supplied to a nozzle are dispersed and flowed down in a gas flowing in a flow path provided inside the nozzle, together with gas from an injection port provided at the downstream end of the flow path. Injecting between an injection device for injecting, a conveying device for supplying a long sheet-like foil base material in front of the injection port and moving it across the injection region of the solid fine particles, and a foil base material positioned in front of the injection port A back surface support device that is provided at a position facing the mouth and supports the back surface of the foil base material that is transported by the transport device, and is transported by the transport device to the surface of the foil base material that is supported by the back surface support device. The solid fine particles injected together with the gas from the injection port are collided and fixed, and a film of the solid material is continuously formed on the surface of the foil base at normal temperature and normal pressure.

  The back surface support device includes a base member installed on the base together with the spray device, and a support member (for example, a support member that supports the back surface of the foil base material in the spray region provided to be movable to the base member so as to face the spray port. The support roller 235 and the support belt 335 in the embodiment are provided, and the support member is configured so that a portion (for example, the support portion 235p and the support surface 235s in the embodiment) that contacts and supports the back surface of the foil base is provided by the transport device. It is preferable that the foil base material is moved at the same speed as that of the foil base material to be conveyed, and the foil base material supports the foil base material without causing relative slip in the conveyance direction.

  Or the said back surface support apparatus is equipped with the base member installed in the base with the said injection apparatus, and the support member which is provided in a base member facing the injection port, and supports the back surface of a foil base material in the said injection area | region. The support member has a support surface that contacts and supports the back surface of the foil base material conveyed by the transport device, and sucks the back surface of the foil base material so that the foil base material can slide relative to the support surface without being separated from the support surface. Suction member (for example, the porous member 135b, the exhaust path, and the suction recovery device 70 in the embodiment), and the foil base material transported by the transport device is in contact with and supported by the support surface by the suction device in the ejection region. It is preferable to be configured to be slidably moved.

  In order to achieve the above object, the second aspect of the present invention is provided at the downstream end of the flow path by dispersing the solid fine particles supplied to the nozzle in a gas flowing through the flow path provided in the nozzle. This is a foil base material continuous film forming method in which a solid material film is continuously formed on the surface of a long sheet-like foil base material using an injection device that injects the gas together with the gas from the injection port. The foil base material is supplied to the front of the injection port by the transport device, and the back surface of the foil base material is supported by the back surface support device provided at a position facing the injection port across the foil base material positioned in front of the injection port. In this state, the foil base material is moved across the injection area of the solid fine particles, and solid fine particles are injected together with gas from the injection port onto the surface of the foil base material to be moved in a state where the back surface is supported to be fixed by being collided. The film of the solid material is continuously formed on the surface of the foil base at normal temperature and normal pressure.

  The back support device includes a base member installed on a base together with the spray device, and a support member that is movably provided on the base member so as to face the spray port and supports the back surface of the foil base material in the spray region. (For example, the support roller 235 and the support belt 335 in the embodiment), and the support member conveys a portion that supports the back surface of the foil base material (for example, the support portion 235p and the support surface 235s in the embodiment). It is configured to move at the same speed as the foil base material transported by the apparatus, and to support the foil base material without causing relative sliding in the transport direction between the contact supporting part and the foil base material, and the back surface is A solid material film is continuously formed by the solid fine particles injected from the injection port colliding and fixing on the surface side of the foil base that is moved in a state of being supported without relative slip on the contact supporting part. It is preferable that the formed.

  Or the said back surface support apparatus is equipped with the base member installed in the base with the said injection apparatus, and the support member which is provided in a base member facing the injection port, and supports the back surface of a foil base material in the said injection area | region. The support member has a support surface that contacts and supports the back surface of the foil base material conveyed by the transport device, and sucks the back surface of the foil base material so that the foil base material can slide relative to the support surface without being separated from the support surface. Solid particles injected from the injection port collide and adhere to the surface side of the foil base that is slid and moved in a state where the back surface is sucked and contacted and supported without being separated from the support surface. It is preferable that the solid material film is formed continuously.

  In the present invention, the long sheet-like foil base material is moved across the injection region by the conveying device, and the injection device applies the surface of the foil base material that is moved in a state where the back surface side is supported by the back surface support device in the injection region. Solid fine particles are ejected from the ejection port. Therefore, according to the present invention, it is possible to provide a fine particle injection film forming method and a fine particle injection film forming system capable of continuously forming a solid material film on a long sheet-like foil base material.

It is a schematic block diagram of the fine particle injection film-forming system of a 1st structure form. It is a sectional side view of the single pipe type injection device shown as an example of an injection device. It is a sectional side view of the compound pipe type injection device shown as other examples of an injection device. It is the top view of the nozzle seen in the IV-IV arrow direction in FIG. It is a schematic block diagram of the fine particle injection film-forming system of a 2nd structure form. It is a schematic block diagram of the fine particle injection film-forming system of a 3rd structure form. It is a schematic block diagram of the fine particle injection film-forming system of a 4th structure form.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. FIGS. 1, 5, 6 and 7 show a schematic configuration of a fine particle jet film forming system for continuously forming a solid material film on a surface of a foil base material at normal temperature and normal pressure. The fine particle injection film forming system S1 of the first configuration form will be described with reference to FIG.

  The fine particle injection film forming system S1 is roughly divided into a carry-in stage 1 for carrying in a foil base material W, a film forming stage 2 for performing film forming processing (PJD processing) on the foil base material, and a foil base after film forming processing. It comprises a cutting stage 4 for cutting the material and an unloading stage 5 for unloading the cut foil base material. The carry-in stage 1 is provided with a transfer device 10 for supplying a long sheet-like foil base material W to the film formation stage 2 and moving it across the injection region JA of the solid fine particles. 10 is a foil base that is provided at a position facing the injection port 25 with the foil substrate W interposed therebetween, and an injection device 20 that injects solid fine particles from the injection port 25 onto the surface (processed surface) of the foil substrate W conveyed by 10. A back surface support device 30 for supporting the back surface of the material is provided. The cutting stage 4 is provided with a cutting device 40 that cuts the foil base material W that is transported in a state where the film of the solid material has passed through the film forming stage 2 in the width direction orthogonal to the transport direction, Is provided with a carry-out device 50 for carrying out the foil substrate W cut by the cutting device 40. In addition, although description is abbreviate | omitted in FIG. 1, the control apparatus which controls the action | operation of the apparatus (The conveying apparatus 10, the injection apparatus 20, the back surface support apparatus 30, the cutting | disconnection apparatus 40, and the carrying-out apparatus 50) which comprises each stage including a microprocessor. And a fine particle injection film forming system S1 is configured.

  In FIG. 1, as a preferred configuration example of the fine particle injection film forming system, the foil substrate W is moved from the left side to the right side in FIG. Then, a solid film is formed by ejecting solid fine particles upward from the injection port 25 opened at the upper end of the nozzle 21 onto the foil base material W moving above.

  The foil base W is a long sheet-like base material of a thin metal or resin. For example, a copper foil or an aluminum foil having a thickness of about 10 to 100 μm and a width of about 10 to 100 mm is several tens of meters to A roll sheet wound in a roll shape with a length of about 100 meters is used.

  The transfer device 10 is provided with a pulley roller 11 provided on the upstream side (left side in FIG. 1) of the film forming stage 2 and the foil base material W sandwiched on the downstream side (the same right side) of the film forming stage 2. A pair of upper and lower conveying rollers 12 is provided. Both the pulley roller 11 and the transport roller 12 have a cylindrical shape or a columnar shape in which the central axis extends in the width direction (perpendicular to the paper surface) of the foil base material W and the axial length is somewhat larger than the width of the foil base material W. None, it is rotatably arranged on a base BF which is the base of this system. On the outer periphery of the upper and lower transport rollers 12, a pressing surface 12s is formed that sandwiches the front and back surfaces of the foil base W. For example, rubber, resin, or the like is molded on the outer periphery of the metal shaft.

  The upper and lower transport rollers 12 are configured to be switchable between a sandwiching position in which the foil base material W is sandwiched at a predetermined pressure and a release position in which the sandwiching is released, and a roller drive motor whose drive is controlled by a controller is connected. By controlling the rotation of the roller drive motor at the nipping position where the foil base material W is sandwiched between the upper and lower conveying rollers 12, 12, the foil substrate W can be drawn and conveyed at a desired moving speed. Yes. The carry stage 1 is positioned on the upstream side of the pulley roller 11 and rotatably supports a roll on which the foil base material W is wound, and the foil base material W fed out from the roll is not loosened. A tensioner is provided to apply a predetermined tension to the foil base material W positioned on the film forming stage 2 so that the film is supplied to the injection region in a tensioned state.

  Therefore, the foil substrate W is sandwiched between the upper and lower transport rollers 12 and 12 from the roll holder via the pulley roller 11, and the roller drive motor is rotated so that the foil substrate W moves to the right in FIG. Then, the foil substrate W wound around the roll holder is supplied to the front of the spraying device 20 of the film forming stage 2 in a stretched state without being bent, and is moved horizontally across the spraying area JA where the solid fine particles are sprayed. The At this time, by controlling the rotation speed of the roller drive motor, the foil substrate W can be moved at a desired speed (for example, a constant feed speed V shown in the figure). Film formation can be performed continuously at a speed. One of the pair of upper and lower transport rollers 12 and 12 may be a driving roller that is rotated by a roller driving motor, and the other may be a rotatable driven roller (pinch roller). The film deposition stage 2 is provided with an injection device 20, a back surface support device 30, a film thickness detection sensor 38, a suction recovery device 70, and the like.

  The injection device 20 disperses the solid fine particles supplied to the nozzle 21 in a gas flowing through a flow path provided in the nozzle, and causes the solid fine particles to flow down from the injection port 25 provided at the downstream end of the flow path. To do. As such an injection device, for example, an injection device (referred to as a single tube type injection device) disclosed in Japanese Patent Laid-Open No. 2000-94332 related to the present applicant, or Japanese Patent Application Laid-Open No. 2006-224205 related to the present applicant. There is an injection device (referred to as a composite tube type injection device) as disclosed in the above.

  FIG. 2 schematically shows a configuration of a single-tube type injection device 20A as an example of the injection device 20. This injection device 20A includes a fine particle supply unit 110 for supplying solid fine particles G to the nozzle 21, a gas supply unit 115 for supplying solid fine particle injection gas to the nozzle 21, a gas supply by the gas supply unit 115, and a foil base by a moving unit. An injection control unit 120 that controls the relative movement of the material W is provided. In addition, the nozzle of 20 A of injection apparatuses of this structure form is described as the nozzle 21A, and the nozzle of the injection apparatus 20B described below is described as the nozzle 21B.

  Inside the nozzle 21 </ b> A, a pipe-shaped supply nozzle 22 having an injection port 25 is provided on the left end side in FIG. 2, and a gas supply pipe 116 is connected to the right end side of the supply nozzle 22. A hole 23 through which the solid particles G can pass is formed in the left and right intermediate portions of the supply nozzle 22 so as to pass through the wall surface, and the particle introduction path 112 is provided in the particle supply groove 113 formed around the hole 23. The solid particulates stored in the particulate tank 111 are supplied.

  In such an injection device 20A, when a gas (referred to as supply gas) is supplied from the gas supply unit 115 to the nozzle 21A at a predetermined pressure, the supply gas that has flowed into the supply nozzle 22 from the gas supply pipe 116 passes through the nozzle to the injection port 25. The gas flows down at a high speed, and a negative pressure is generated by the ejector effect in the region where the hole 23 is formed. In addition, since the distal end portion of the gas supply pipe 116 is disposed in the vicinity of the hole 23 and the flow path cross-sectional area is enlarged, turbulent flow is generated in the stepped portion, and the negative pressure near the hole is increased. Therefore, the solid fine particles G located in the fine particle supply groove 113 are supplied into the supply nozzle 22 through the hole 23 so as to be sucked up, and flow down through the supply nozzle while being dispersed by the gas flow of the supply gas flowing through the supply nozzle 22. And it injects from the injection port 25 of a downstream end part.

  The speed of the solid fine particles G at this time is set by controlling the type and pressure of the supply gas supplied to the nozzle 21. When the supply gas is air or nitrogen, the speed is about 50 to 300 m / sec. In other words, the gas is injected at a speed less than the speed of sound. In addition, when performing the injection processing, the nozzle 21 is transported by the transport device 10 and the distance between the passage position (pass line) of the front surface of the foil base material W whose back surface is supported by the back surface support device 30 and the nozzle tip ( The gap is disposed at a machining position where the gap is about 0.5 to 2 mm.

  Next, FIG. 3 schematically shows a configuration of a composite pipe type injection device 20B as another example of the injection device 20. The injection device 20B includes the same fine particle supply unit 110, gas supply unit 115, and injection control unit 120 as the injection device 20A described above, and the configuration of the nozzle 21 is different. In the nozzle 21 </ b> B of the injection device 20 </ b> B, an acceleration nozzle 24 having a diameter larger than that of the supply nozzle 22 and extending in the axial direction is provided on the front end side of the supply nozzle 22 described above, and an injection port 25 is provided at the front end of the acceleration nozzle 24. Is formed. The distal end portion of the supply nozzle 22 and the proximal end portion of the acceleration nozzle 24 are partially overlapped, and an annular acceleration gas jet channel 26 having a narrow width is formed in the overlapping portion. An acceleration gas introduction passage 27 connected to the acceleration gas jet passage 26 is formed at the base end portion of the acceleration nozzle 24, and is connected to the gas supply unit 115 via the acceleration gas supply pipe 117 connected to the acceleration gas introduction passage 27. The

  In such an injection device 20B, when the supply gas is supplied from the gas supply unit 115 to the nozzle 21B as in the above-described injection device 20A, the ejector effect of the gas flow flowing in the supply nozzle 22, the gas supply pipe 116 and the supply nozzle The solid fine particles G located in the fine particle supply groove 113 are sucked into the supply nozzle 22 through the hole portion 23 due to the effect of turbulent flow generated in the stepped portion with respect to 22, and flow down in the supply nozzle while being dispersed by the gas flow. At this time, gas (referred to as acceleration gas) is supplied to the acceleration gas introduction path 27 from the gas supply unit 115 via the acceleration gas supply pipe 117, and the gas of the acceleration gas ejected from the acceleration gas jet flow path 26 at a high speed. A large negative pressure is generated in the outlet region of the supply nozzle 22 by the flow, and a turbulent flow is generated due to a rapid expansion of the cross-sectional area of the flow path. For this reason, the solid fine particles located in the outlet region of the supply nozzle 22 are sucked into the acceleration nozzle by negative pressure, and are entrained in the turbulent flow and dispersed in the acceleration gas, and are accelerated by the jet of the acceleration gas and are accelerated at the downstream end. It is injected from the injection port.

  The speed of the solid fine particles G at this time is set by controlling the type and pressure of the supply gas and the acceleration gas supplied to the nozzle 21B. For example, when the supply gas and the acceleration gas are air or nitrogen, 50 Injected at a speed less than about 300 m / sec. According to such a double nozzle injection device, the injection amount of the solid fine particles is increased by the negative pressure generation effect by the acceleration gas ejected from the acceleration gas jet passage 26 into the acceleration nozzle at a high speed, and the effect of turbulence is also achieved. Thus, the film can be uniformly dispersed in the accelerating gas and the film formation efficiency can be improved.

  In the above, for the sake of simplicity of explanation, the case where the injection port 25 is a single round hole (when the supply nozzle 22 and the acceleration nozzle 24 are a single pipe) has been described, the nozzle 21 (21A, 21B) The spray width is adapted to the film formation width for the foil base material W to be processed. As a configuration example of such a wide nozzle, FIG. 4 shows a plan view of the nozzle 21 viewed in the direction of arrows IV-IV in FIG. As shown in the figure, the nozzle 21 includes a plurality of nozzle structures whose cross-sectional views are shown in FIGS. 2 and 3 arranged in parallel, and jet ports 25 that open upward are arranged in a staggered manner.

  The width in the front-rear direction of the nozzle 21 composed of the plurality of nozzle groups is set in accordance with the width of the foil base material that can be continuously formed in this system, and is matched to the film forming width on the foil base material to be processed. Thus, the supply of the supply gas and the acceleration gas to each nozzle is controlled. For example, in the case where a foil base material W as indicated by a two-dot chain line in FIG. 4 is targeted and film formation is performed on the entire surface of the foil base material W, the upper side of the injection port 25 is placed on the foil base material. The supply gas and the acceleration gas are supplied to each nozzle through which W passes to inject the solid fine particles, and the solid fine particles are supplied without supplying the supply gas and the acceleration gas to the nozzles at the front and rear ends where the foil base material does not exist above the injection port 25. Is stopped. Then, by moving the foil base W in the longitudinal direction by the transport device, the solid fine particles are uniformly sprayed on the entire surface of the foil base W.

  The arrangement pattern of the injection ports 25, 25... In the nozzle 21 (the arrangement pitch of the injection ports in each row, the pitch between rows, the offset amount of the injection ports between rows, the number of rows, etc.) is the target film formation. A suitable arrangement pattern can be selected as appropriate in accordance with the contents of processing. Moreover, you may comprise so that the single slit-shaped jet nozzle extended in the width direction may be formed, for example by forming an acceleration nozzle in rectangular duct shape.

  The nozzle 21 is provided with a suction collection device 70 that sucks and collects the solid fine particles that are ejected from the ejection port 25 but drift without being fixed to the foil base material W. The suction recovery device 70 is connected to the suction duct 71 which is opened upward so as to cover the injection region of the solid fine particles around the injection ports 25, 25... A vacuum blower for sucking gas, a fine gas collector for separating and collecting solid fine particles sucked together with supply gas, acceleration gas, and air around the injection region by the vacuum blower, and the like.

  The exhaust amount (exhaust speed) per unit time of the vacuum blower is set to be larger than the injection amount per unit time of the gas injected from the jet outlet 25, for example, the gas supplied from the gas supply unit 115 to the nozzle The operation of the vacuum blower is proportionally controlled so that the exhaust amount of the vacuum blower changes in accordance with the supply amount of the vacuum blower, so that a slight negative pressure is always generated around the injection region. For this reason, solid particulates that have been ejected from the ejection ports 25, 25... To the foil base material but are not fixed to the foil base material W, reflected solid particulate matter, etc. leak out from the periphery of the suction duct 71 to the surroundings. It is sucked and collected without any damage. This makes it possible to collect and reuse solid particulates and reduce film formation costs, as well as various problems associated with floating solid particulates, such as entrainment on transport rollers, adhesion to film thickness detectors, and deterioration of the working environment. The system environment can be maintained well by preventing it in advance.

  Here, by the injection device 20 (20A, 20B) as described above, solid fine particles are injected together with the gas, and the powder jet deposition (PJD) method for forming a film by colliding and fixing to the surface of the film formation target is formed. In the film processing, the injection force of the gas flow injected from the nozzle 21 is extremely strong. Therefore, even if the thin foil sheet-like foil base material W can be transported through the spray region in a tensioned state by the transport device 10, if the thickness is thin, it is likely to be damaged by the spray, and the thickness is Even if it is thick, the foil base material W swings by spraying. Further, in the PJD method, the solid fine particles are fixed to the substrate surface using the collision energy of the solid fine particles. When the foil base material W is oscillated by jetting, the collision energy of the solid fine particles is reduced. Good adhesion cannot be obtained. Therefore, in the fine particle injection film forming system S1, the back surface support device 30 that supports the back surface of the foil base material W that is transported by the transport device 10 is provided at a position facing the injection port 25 across the foil base material W. Yes.

  The back surface support device 30 is provided on the base member 31 so as to face the base member 31 installed on the base BF together with the injection device 20 and the injection port 25 of the injection device 20, and the back surface of the foil base material W in the injection region JA. And a support member 35 that supports the structure. The support member 35 is formed in a band plate shape or block shape having sufficient rigidity capable of receiving the injection force of the injected solid-gas mixed phase flow. On the lower surface of the support member 35, a support surface 35 s is formed which is slightly wider than the injection surface area of the solid fine particles injected from the injection port 25 and colliding with the foil base material and is polished to a predetermined flatness and surface roughness. In this state, the back surface of the foil base material W is relatively contacted and supported by the support surface 35s. The support member 35 is made of a ceramic material such as alumina or silicon nitride, or a metal material such as stainless steel or super steel. Composed.

  In the support member 35, the support surface 35s is the same as the height position of the back surface of the foil base material W when the foil base material W is stretched between the pulley roller 11 and the transport roller 12, or the foil base. Slightly lower than the height position of the back surface of the material W is disposed at such a height position that lightly presses the back surface of the foil base material W, and the foil base material W moved by the transport device 10 is stable without swinging. It is designed to be contacted and supported. In addition, weakly tapered lead-in portions and lead-out portions are formed on the upstream side and the downstream side in the movement direction of the foil base material sandwiching the support surface 35s.

  Therefore, when the foil base material W is rotated between the pulley roller 11 and the transport roller 12 while the foil base material W is stretched and rotated, the foil base material W is moved to the film forming stage 2 from the pulley roller 11 side. The foil substrate W to be moved sequentially moves in the direction of the conveying roller 12 across the jetting area JA, and in the jetting area JA, the relative movement of the back surface of the foil base material W is supported by the support surface 35s of the support member. Is done. Then, solid fine particles are ejected from the ejection port 25 onto the surface of the foil base material W whose back surface is thus supported. Therefore, even when the thickness of the foil base material W is relatively thin, the foil base material is not damaged or rocked by the injection, and the solid fine particles injected from the injection port 25 are not foil base. The solid-state film-forming layer GL is stably formed at the normal temperature and pressure under impact and fixation on the surface of the material W.

  On the right side of the nozzle 21, that is, on the outlet side of the film forming stage 2, the thickness and surface shape (film thickness distribution) of the film forming layer GL of the foil base material on which the film of the solid material is formed through the injection region JA. A film thickness detection sensor 38 that detects in a non-contact manner is provided. As the film thickness detection sensor 38, a sensor having an appropriate form can be used according to the material of the foil base material W and the solid fine particles. For example, the film thickness distribution is optically reflected from the reflected light of the light irradiated on the back surface of the foil base material W. It is possible to use a detection sensor that automatically detects, a capacitance type detection sensor that detects a film thickness distribution from a change in capacitance, and the like.

  The detection signal of the film thickness detection sensor 38 is input to a control device that comprehensively controls the operation of the fine particle injection film formation system S1, and the control device detects the solid material measured in real time by the film thickness detection sensor 38. The operation of each device constituting the system is controlled according to the waviness of the film thickness and the surface shape. Specifically, the target values of film thickness and surface waviness specified in the film forming processing program are compared with the average film thickness and surface waviness calculated based on the film thickness distribution measured by the film thickness detection sensor 38. Then, the supply gas pressure and the acceleration gas pressure of each nozzle constituting the injection device 20 are automatically adjusted.

  For example, when there is a region with a small film thickness in the width direction of the foil base material, at least one of the supply gas and the acceleration gas according to the deviation of the nozzle provided with the injection port 25 at the corresponding position The control device performs feedback control so that the variation in film thickness is within a predetermined range by increasing the pressure and increasing the injection amount of the solid fine particles. Further, for example, when the film thickness is small as a whole in the width direction, the rotation speed of the roller drive motor that rotationally drives the transport roller 12 is changed to the low speed side according to the deviation, and the average film thickness is predetermined. The control device performs feedback control so as to be within the range.

  When the average film thickness or surface waviness detection value of the film formation layer GL measured by the film thickness detection sensor 38 exceeds a predetermined range and the feedback control as described above is executed, the display panel of the operating device or A warning warning is displayed on the revolving light. On the other hand, when the detected value of average film thickness or surface waviness exceeds a preset predetermined allowable range, or when the correction range exceeds a preset predetermined range, the display panel of the operating device or the rotation An alarm is displayed on the lamp, and the conveyance operation of the foil base material by the conveyance device 10 and the injection operation of the solid fine particles by the injection device 20 are stopped. Thereby, the invalid consumption of the foil base material W or the solid fine particles G is suppressed.

  The foil base material on which the film formation layer GL is formed in this manner is sent out from the film formation stage 2 to the cutting stage 4 by the transport device 10. The cutting stage 4 is provided with a cutting device 40 that cuts the long sheet-like foil base material W into a predetermined length according to the product specifications. For example, the cutting device 40 has a shearing mechanism that shears the foil base by moving a shearing blade having a shear angle in the width direction of the foil base up and down, and a disc-shaped cutter blade on the back side of the foil base W. A rotary cutter mechanism that is brought into contact with each other and moved at a high speed in the width direction, or a laser processing machine that moves a laser beam emitting head at a high speed in the width direction above the foil substrate W is used.

  Here, although the conveyance speed of the foil base material moved by the conveyance device 10 changes according to the content of the film forming process by the PJD method, as an example, the surface of the copper foil base material W is a copper thin film. In the film forming process in which the coated silicon fine particles are jetted from one row of nozzles and collide and fixed, the feeding speed (conveying speed) of the foil base material is about several tens of mm / sec or less. Therefore, in such a system targeting relatively low-speed film formation, the moving foil base material can be cut at right angles to the width direction by the shearing mechanism or the rotary cutter mechanism, thereby simplifying and inexpensively. A cutting device can be configured.

  On the other hand, it is possible to further increase the feed rate during the film forming process by sub-arraying the nozzle array or adopting a multi-stage injection configuration. In such a case, an optical axis moving type or fiber transmission type laser in which the laser beam emitting head can be controlled to move in the conveying direction and the width direction of the foil base material above the foil base material W is used. In synchronization with the movement of the foil base material W transported by 10, the emission head can be moved in the transport direction and the width direction to cut the foil base material at right angles to the width direction. By using such a cutting apparatus, it is possible to construct a high-speed fine particle injection film forming system without causing mechanical distortion in the cut portion without contact.

  The unloading stage 5 is provided with an unloading device 50 for unloading the strip-shaped product sheet having the film forming layer GL formed on the film forming stage 2 and cut to a predetermined length by the cutting stage. The carry-out device 50 can be configured by a conveyor mechanism using, for example, a metal belt or a ceramic chain, or a pallet mechanism that moves a pallet according to the length of the product sheet in the carry-out direction. The carry-out device 50 is controlled synchronously with the transfer device 10, and the strip-shaped product sheet on which the film formation layer GL is formed is unloaded.

  In the fine particle injection film forming system S <b> 1 configured as described above, a long sheet-like foil base material W wound around a roll is moved across the injection area JA of the injection device 20 by the conveying device 10, and injection is performed. Solid fine particles on the surface of the foil base W, which is relatively moved in a state where the back surface side is supported by the back surface support device 30 provided at a position facing the mouth 25, together with the gas from the injection port 25 at a speed less than the sound speed of the gas. Are injected and fixed by collision, and a film of solid material is continuously formed on the foil base material at normal temperature and pressure. Therefore, a solid material film can be continuously and stably formed on the long sheet-like foil base material.

  Next, a fine particle injection film forming system S2 having a second configuration capable of continuously forming a solid material film on a long sheet-like foil base material will be described with reference to FIG. The fine particle injection film forming system S2 of this configuration form is different from the fine particle injection film forming system S1 of the first configuration form described above only in the configuration of the back surface support device provided in the film forming stage 2. It is the same. Therefore, the same reference numerals are given to the same parts as those of the fine particle injection film forming system S1, and the duplicate description is omitted, and the back support device 130 having a different configuration will be described in detail.

  The back surface support device 130 is provided on the base member 131 so as to face the injection port 25 of the injection device 20 and the base member 131 installed on the base BF together with the injection device 20, and the back surface of the foil base material W in the injection region JA. And a support member 135 that supports the structure. The support member 135 is a porous body formed by sintering a body member 135a in which an exhaust passage is formed and to which a negative pressure generator or a vacuum pump is connected, and ceramic powder such as alumina and silicon nitride, or metal powder such as stainless steel. It is made of a material (ceramic porous, metal porous) and is composed of a porous member 135b fixed to the body member, and is formed in a block shape having sufficient rigidity capable of receiving the injection force of the injected solid-gas mixed phase flow. The

  The lower surface side of the support member 135 provided with the porous member 135b is wider than the injection surface area of the solid fine particles injected from the injection port 25 and colliding with the foil base material, and the support surface 135s polished to a predetermined flatness is formed. And a means for reducing the friction coefficient, for example, coating with a fluororesin or the like. In the support member 135, the support surface 135 s has substantially the same height as the height position of the back surface of the foil base W when the foil base W is stretched between the pulley roller 11 and the transport roller 12. Arranged in position. When the air inside the exhaust passage is exhausted by a vacuum generator or the like, the air in the vicinity of the support surface is sucked through the fine holes of the porous member 135b, and the foil base material in contact with the support surface 135s is supported with a weak suction force by the support surface 135s. Sucked into.

  Therefore, when the foil base W is moved between the pulley roller 11 and the transport roller 12 while the foil base W is stretched in a stretched state, the foil base W is moved to move the foil base W to the film forming stage 2. W sequentially moves across the jetting area JA in the direction of the conveying roller 12, and in the jetting area JA, the foil base W is sucked by the support surface 135s with a weak suction force, and the back surface is not separated from the support surface 135s. It is slid and moved while being supported by the support member 135. Then, solid fine particles are ejected from the ejection port 25 onto the surface of the foil base material W whose back surface is thus supported. For this reason, the foil base material does not swing due to the injection, and the solid fine particles injected from the injection port 25 collide and adhere to the surface of the foil base material W, so that the film forming layer GL of the solid material at normal temperature and normal pressure. Is stably formed.

  In the fine particle injection film forming system S <b> 2 configured as described above, the long sheet-like foil base material W wound around the roll is moved across the injection area JA of the injection device 20 by the transport device 10, and the injection port 25. The solid fine particles are jetted together with the gas from the jet port 25 and fixed by collision on the surface of the foil base W that is slid and moved in a state where the back side is supported by the back side support device 130 provided opposite to the side. Therefore, a solid material film can be stably and continuously formed on the long sheet-like foil base W under normal temperature and pressure. Further, in the fine particle injection film forming system S2 of the present configuration, the solid fine particles collide with the surface side of the foil base that is contact-supported without being separated from the support surface by being sucked back, so in the region where the solid fine particles collide. The stability of the foil base material W can be increased, whereby the film formation rate of the solid fine particles in the continuous film formation can be improved.

  Next, a fine particle injection film forming system S3 having a third configuration capable of continuously forming a solid material film on a long sheet-like foil base material will be described with reference to FIG. The fine particle injection film forming system S3 of this configuration form is provided in the film forming stage 2 as compared with the fine particle injection film forming system S1 of the first configuration form and the fine particle injection film forming system S2 of the second configuration form described above. Only the configuration of the back support device is different, and the others are the same. Therefore, the same parts as those of the fine particle spray film forming systems S1 and S2 are denoted by the same reference numerals and redundant description is omitted, and the back support device 230 having a different configuration will be described in detail.

  The back surface support device 230 is provided on the base member 231 so as to face the base member 231 installed on the base BF together with the injection device 20 and the injection port 25 of the injection device 20, and the back surface of the foil base material W in the injection region JA. And a support member 235 for supporting the structure. In the support member 235, a portion that supports and supports the back surface of the foil base material W moves at the same speed V as the foil base material that is transported by the transport device 10, and the contact support portion and the foil base material W are transported in the transport direction. It is configured to support the foil base material W without causing relative slip.

  The support member 235 in the back surface support device 230 has a cylindrical support surface 235 s that supports the back surface of the foil base material W on the outer periphery, and is provided at a position facing the injection port 25. 6, and a support roller that is driven to rotate about a central axis 235 c extending in a direction perpendicular to the paper surface in FIG. 6, and is formed using, for example, a metal material such as stainless steel or a ceramic material such as alumina. The support roller (support member) 235 is in a state in which the support portion 235p at the lower end of the outer periphery facing the injection port 25 and supporting the back surface of the foil substrate W extends the foil substrate W between the pulley roller 11 and the transport roller 12 The height position that is the same as the height position of the back surface of the foil base material W when stretched over or slightly lower than the height position of the back surface of the foil base material W It is arranged. And the rotational speed of the support roller (support member) 235 is set so that the peripheral speed of the support part 235p becomes the same as the moving speed V of the foil base material W conveyed by the conveying apparatus 10.

  Specifically, when the radius of the support roller 235 is R [mm], the rotation speed is N [rad / sec], the radius of the transport roller 12 is r [mm], and the rotation speed is n [rad / sec]. V = n · r = N · R. Here, the radius R of the support roller 235 is defined to be a size that can be regarded as a plane in the width region according to the conveyance direction width of the ejection region JA (the width in the left-right direction along the paper surface in FIG. 6). Then, the rotational speed of the support roller 235 having the defined radius R is controlled so that N = n · r / R. Thereby, the peripheral speed of the support surface 235s on the outer periphery of the support roller becomes the same as the moving speed V of the foil base material W transported by the transport device 10, and in the support portion 235p that contacts and supports the back surface of the foil base material W, The foil substrate W is supported without causing relative slip in the transport direction.

  Therefore, when the foil base material W stretched between the pulley roller 11 and the transport roller 12 is moved by rotating the transport roller 12, the foil base material W introduced into the film forming stage 2 is sequentially It moves across the injection area JA, and in the injection area JA, solid fine particles are injected onto the surface of the foil base W in a state where the back surface is supported by the support portion 235p without relative slip. That is, in the injection area JA, the solid fine particles are injected in a state in which the foil base W is firmly supported in the same manner as the state in which the foil base W is fixedly held by the support member. For this reason, the foil base material W is not damaged or swung by the injection of the solid-gas mixed phase flow, and the solid fine particles injected from the injection port 25 collide and adhere to the surface of the foil base material W. The film-forming layer GL made of a solid material is stably formed under normal temperature and pressure.

  In the fine particle injection film forming system S3 configured as described above, a long sheet-like foil base material W wound around a roll is moved across the injection area JA of the injection device 20 by the transport device 10, and the injection port 25 is provided. The solid fine particles are jetted together with the gas from the jet port 25 and fixed by collision on the surface of the foil base W which is moved in a state where the back side is supported without relative slip by the back side support device 230 provided opposite to. Therefore, a solid material film can be stably and continuously formed on the long sheet-like foil base W under normal temperature and pressure. Further, in the fine particle injection film forming system S3 of this configuration, since the solid fine particles collide with the surface side of the foil base material whose back surface is supported by the support portion 235p without relative slip, the smoothness of the surface of the foil base material W is maintained. However, it is possible to increase the stability of the foil base material W in the solid fine particle collision region to the same level as the fixed holding state while realizing continuous film formation, thereby greatly increasing the film formation rate of the solid fine particles in the continuous film formation. Can be improved.

  Next, a fine particle injection film forming system S4 having a fourth configuration capable of continuously forming a solid material film on a long sheet-like foil base material will be described with reference to FIG. Compared with the fine particle injection film forming systems S1 to S3 of the first to third structural forms described above, the fine particle spray film forming system S4 of this structure form is only the structure of the back surface support device provided in the film forming stage 2. Are different, and the others are the same. Therefore, the same number is attached | subjected to the part similar to microparticle injection film-forming system S1-S3, duplication description is abbreviate | omitted, and the back surface support apparatus 330 from which a structure differs is demonstrated in detail.

  The back surface support device 330 is provided on the base member 331 so as to face the injection port 25 of the injection device 20 and the base member 331 installed on the base BF together with the injection device 20, and the back surface of the foil base material W in the injection region JA. And a support member 335 for supporting the structure. Similarly to the support member 235 in the back surface support device 230 of the third configuration mode, the support member 335 has a portion that contacts and supports the back surface of the foil base material W at the same speed V as the foil base material transported by the transport device 10. The portion that moves and contacts and supports the foil substrate W is configured to support the foil substrate W without causing relative slip in the transport direction.

  The support member 335 in the back surface support device 330 is composed of an endless belt-like support belt that is wound around a drive pulley 336 and a driven pulley 337 provided on the base member 331 and driven to rotate. It is constructed using a thin stainless steel belt that is slightly wider than W. In this back surface support device 330, a support surface 335s that supports the back surface of the foil base material W is formed on the outer peripheral lower surface of a support belt (support member) 335 positioned between the drive pulley 336 and the driven pulley 337, and this support surface 335s. Faces the injection port 25 and is the same as the height position of the back surface of the foil base W when the foil base W is stretched between the pulley roller 11 and the transport roller 12 in the stretched state, or the foil base W It is disposed at such a height position that it is slightly lower than the height position of the back surface of the foil substrate and lightly presses the back surface of the foil base material W.

Then, the driving speed of the support belt 335 between the driving pulley 336 and the driven pulley 337, that is, the moving speed of the support surface 335s is driven so as to be the same as the movement of the foil base material W transported by the transport device 10. The rotational speed of the pulley 336 is set. Accordingly, the foil base material W moves between the driving pulley 336 and the driven pulley 337 together with the support belt 335 while being supported by the support surface 335 s without causing relative sliding in the transport direction.

  Here, on the inner peripheral side of the support belt 335, a back support member 338 is provided that supports the inner peripheral surface of the support belt 335 behind the injection region JA. The back support member 338 is made of, for example, a ceramic material such as alumina or boron nitride, or a metal material such as aluminum alloy or copper alloy. And is fixedly disposed on the base member 331 so as to support the inner peripheral surface of the support belt 335 against a pressing force from below.

  When the foil base material W stretched between the pulley roller 11 and the transport roller 12 is moved by rotating the transport roller 12, the foil base material W introduced into the film forming stage 2 is moved in the transport direction. The surface of the foil base material W is moved across the ejection area JA together with the support belt 335 while being supported on the support surface 335s without relative slip, and the back surface of the foil base material W is firmly supported by the back support member 338 in the ejection area. Solid fine particles are sprayed on the surface. That is, in the injection area JA where the back support member 338 is provided, the solid fine particles are injected in a state in which the foil base W is firmly supported in the same manner as the state in which the foil base W is fixedly held by the support member. For this reason, the foil base material W is not damaged or swung by the injection of the solid-gas mixed phase flow, and the solid fine particles injected from the injection port 25 collide and adhere to the surface of the foil base material W. The film-forming layer GL made of a solid material is stably formed under normal temperature and pressure.

  In the fine particle injection film forming system S4 configured as described above, the long sheet-like foil base material W wound around the roll is moved across the injection area JA of the injection device 20 by the transport device 10 and the injection port 25. The solid fine particles are jetted together with the gas from the jet port 25 and fixed by collision on the surface of the foil base W which is moved in a state where the back side is supported without relative slip by the back side support device 330 provided oppositely. Therefore, a solid material film can be stably and continuously formed on the long sheet-like foil base W under normal temperature and pressure. Further, in the fine particle injection film forming system S4 of this configuration, the solid fine particles collide with the surface side of the foil base material whose back is firmly supported by the back support member 338 and supported relative to the support surface 335s without relative slip. While maintaining the smoothness of the surface of the substrate W, it is possible to increase the stability of the foil substrate W in the collision region of the solid fine particles to the same level as the fixed holding state, thereby continuously forming the film. The film formation rate of the solid fine particles in can be greatly improved.

  The support belt 335 has many fine pinholes, and a drive pulley 336, a driven pulley 337, and a back support member 338 are disposed, and a pulley chamber 339 on the inner circumference side of the belt surrounded by the support belt 335 is provided. It is also a preferable configuration that the foil base W that is evacuated by a vacuum generator or the like and contacts the support surface 335s without relative slip is sucked to the support surface 335s with a weak suction force. According to such a configuration, since the foil base material W is supported in the contact area with the support belt 335 without being separated from the support surface and without sliding relative to the support surface 335, the foil base material W in the solid fine particle collision area is supported. The stability of the film can be further increased, and stable continuous film formation can be realized.

  In the description of the present configuration, a configuration using a thin endless metal belt is illustrated as an example. However, a ceramic chain according to the width of the foil base W or a strip-shaped plate according to the width of the foil base W is used. It is also possible to configure a back support device similar to this configuration form using a connected conveyor (infinite track) or the like.

  As mentioned above, although the typical structural example was demonstrated about the fine particle injection film-forming system S1-S4 of the 1st-4th structure form, this invention is not limited to each illustrated structure form, The configuration of each part can be appropriately changed and applied without departing from the spirit of the invention. For example, in each configuration mode, the foil base W is moved in the horizontal direction and the solid fine particles are ejected upward. However, the foil base W is moved in the vertical direction and the solid fine particles are ejected in the horizontal direction. A form may be sufficient, and the form etc. in which a foil base material is moved to the left-right (front-back) direction along a vertical surface, and a solid fine particle is injected in a horizontal direction may be sufficient.

G Solid particle W Foil substrate S1 Fine particle injection film forming system S2 in the first configuration form Fine particle injection film forming system S3 in the second configuration form Fine particle injection film forming system S4 in the third configuration form Fine particle injection film forming system in the fourth configuration form System BF Base 1 Carry-in stage 2 Film forming stage 4 Cutting stage 5 Carry-out stage 10 Carrying device 12 Carrying roller (12s pressing surface)
20 injection device (20A: single tube type injection device, 20B: composite tube type injection device)
21 nozzles (21A: single pipe type, 21B: composite pipe type)
25 Injection port 38 Film thickness detection sensor 40 Cutting device 50 Unloading device 70 Suction collection device 30, 130, 230, 330 Back surface support device 31, 131, 231, 331 Base member 35, 135, 235, 335 Support member (235: Support Roller, 335: support belt)
35 s, 135 s, 235 s, 335 s Support surface 235 p Support portion 336 Drive pulley 337 Drive pulley 338 Back support member

Claims (16)

An injection device that disperses solid particulates supplied to a nozzle in a gas flowing in a flow path provided inside the nozzle and causes the solid fine particles to flow down and injects the gas together with the gas from an injection port provided at a downstream end of the flow path; ,
A conveying device that feeds a long sheet-like foil base material in front of the injection port and moves across the injection region of the solid fine particles;
A back surface support device that supports the back surface of the foil base material that is provided at a position facing the spray port across the foil base material positioned in front of the spray port;
The solid fine particles ejected together with the gas from the ejection port are caused to collide and adhere to the surface of the foil base material conveyed by the conveying device and supported on the back surface side by the back surface supporting device, and the foil is fixed at normal temperature and normal pressure. A fine particle jet film forming system for continuously forming a foil base material, wherein a film of a solid material is continuously formed on the surface of the base material. The back support device includes a base member installed on a base together with the spray device, and a support that supports the back surface of the foil substrate in the spray region provided to be movable to the base member so as to face the spray port. With members,
In the support member, a portion that supports and supports the back surface of the foil base moves at the same speed as the foil base that is transported by the transport device, and the contact support and the foil base are transported in the transport direction. The fine particle jet film forming system for continuously forming a foil base material according to claim 1, wherein the foil base material is supported without causing relative slippage. The support member has a cylindrical support surface that supports the back surface of the foil base material on the outer periphery, is provided at a position facing the injection port, and is driven to rotate around a central axis extending in the width direction of the foil substrate. Made of support rollers,
The rotational speed of the support roller is set so that the peripheral speed of the portion facing the injection port and supporting the back surface of the foil base material is the same as the moving speed of the foil base material transported by the transport device The fine-particle jet film forming system for continuous film formation of a foil base material according to claim 2. The support member is composed of an endless belt-like support belt that is wound between a drive pulley and a driven pulley provided on the base member and is driven to rotate.
A support surface for supporting the back surface of the foil base material is formed on the outer periphery of the support belt positioned between the drive pulley and the driven pulley, and is disposed at a position facing the injection port.
The rotational speed of the driving pulley is set so that the moving speed of the support belt between the driving pulley and the driven pulley is the same as the moving speed of the foil base material transported by the transport device. The fine particle jet film forming system for forming a foil base material continuously according to claim 2.   5. The fine particle jet film forming system for continuous film formation of a foil base material according to claim 4, wherein a back support member for supporting the support belt is provided behind the jet region on the inner peripheral side of the support belt. . The back surface support device includes a base member installed on a base together with the spray device, and a support member that is provided on the base member so as to face the spray port and supports the back surface of the foil base material in the spray region. Prepared,
The support member has a support surface that contacts and supports the back surface of the foil base material that is transported by the transport device, and the foil base material is slidable relative to the support surface without being separated from the support surface. A suction means for sucking the back surface of
The said foil base material conveyed by the said conveying apparatus was comprised so that sliding movement might be carried out in the state contacted and supported by the said suction surface by the said suction means in the said injection | pouring area | region. Fine film injection film forming system for continuous film formation of foil base.   The fine particle jet film forming system according to claim 6, wherein the supporting member is made of a porous material having a fluororesin processed on the supporting surface.   The injection device has the nozzle disposed so that the injection port opens upward, the solid fine particles are injected upward from the injection port, and the back surface support device is positioned above the nozzle to perform the injection. The fine particle jet film forming system for continuous film formation of a foil base material according to any one of claims 1 to 7, wherein the fine particle spray film forming system is provided facing the mouth.   A suction recovery means for sucking and recovering the solid fine particles that cover the spray region and that are sprayed from the spray port but are not fixed to the foil base material is provided around the spray port. The fine particle injection film forming system according to claim 1. The conveying device has a cylindrical pressing surface pressed against the foil base material on the outer periphery, and is located on the front side and the back side of the foil base material that is located in front of the injection direction in the movement direction of the foil base material. And a conveyance roller that is rotated around a central axis that extends in the width direction of the foil base material.
The front and back surfaces of the foil base material are sandwiched between the pressing surfaces and the transport roller is rotated to move the spray region in a state where the foil base material is extended. The fine particle injection film-forming system of foil base material continuous film formation as described in any one of -9. A film thickness detection sensor that detects the film thickness of the solid material of the foil base material that is transported by the transport device in a state where the film of the solid material is formed on the side of the ejection port and passes through the ejection region. Prepared,
The structure according to any one of claims 1 to 10, wherein the transport speed of the foil base material by the transport device is controlled according to the film thickness of the solid material detected by the film thickness detection sensor. The fine particle jet film-forming system for foil base material continuous film formation according to one item.   In the width direction orthogonal to the conveyance direction of the foil base material, the foil base material transported by the transport device in a state where the film of the solid material is formed on the side of the ejection port and the film of the solid material is formed. The fine particle jet film forming system for foil base material continuous film formation according to any one of claims 1 to 11, further comprising a cutting device for cutting. The cutting device is configured such that a cutting portion that cuts the foil base material is movable in the width direction perpendicular to the transport direction of the foil base material and the movement direction,
The cutting unit is configured to move in the width direction while cutting in the foil base while moving in the transport direction of the foil base in accordance with the movement of the foil base that is transported by the transport device. The fine-particle jet film forming system for continuous film formation of a foil base material according to claim 12. An injection device that disperses solid particulates supplied to a nozzle in a gas flowing in a flow path provided in the nozzle and causes the solid fine particles to flow down and injects the gas together with the gas from an injection port provided in a downstream end of the flow path. Use, a foil base material continuous film forming method for continuously forming a solid material film on the surface of a long sheet-like foil base material,
While supplying the foil base material to the front of the injection port by a transport device,
In the state where the back surface of the foil base material is supported by a back surface support device provided at a position facing the injection port with the foil base material positioned in front of the injection port, Move across the spray area,
The solid fine particles are jetted and collided together with the gas from the jet port on the surface of the foil base that is moved in a state where the back surface is supported,
A method for continuously forming a foil base material, wherein a film of a solid material is continuously formed on the surface of the foil base material at normal temperature and normal pressure. The back support device includes a base member installed on a base together with the spray device, and a support that supports the back surface of the foil substrate in the spray region provided to be movable to the base member so as to face the spray port. With members,
In the support member, a portion that supports and supports the back surface of the foil base moves at the same speed as the foil base that is transported by the transport device, and the contact support and the foil base are transported in the transport direction. Is configured to support the foil substrate without causing relative slippage,
A solid material film is continuously formed by the solid fine particles injected from the injection port colliding and fixing to the front surface side of the foil base that is moved in a state in which the back surface is supported without relative slip on the contact-supporting portion. The foil base material continuous film forming method according to claim 14, wherein the foil base material is formed as described above. The back surface support device includes a base member installed on a base together with the spray device, and a support member that is provided on the base member so as to face the spray port and supports the back surface of the foil base material in the spray region. Prepared,
The support member has a support surface that contacts and supports the back surface of the foil base material that is transported by the transport device, and the foil base material is slidable relative to the support surface without being separated from the support surface. Configured to suck the back of the
The solid fine particles injected from the injection port collide and adhere to the surface side of the foil base that is slid and moved in a state where the back surface is sucked and is not contacted with the support surface without being separated from the support surface. The method for continuously forming a foil base material according to claim 14, wherein the film is continuously formed.

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