JP2010166620A5 - - Google Patents
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- Publication number
- JP2010166620A5 JP2010166620A5 JP2010092871A JP2010092871A JP2010166620A5 JP 2010166620 A5 JP2010166620 A5 JP 2010166620A5 JP 2010092871 A JP2010092871 A JP 2010092871A JP 2010092871 A JP2010092871 A JP 2010092871A JP 2010166620 A5 JP2010166620 A5 JP 2010166620A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- covering
- electronic device
- cavity
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010410 layer Substances 0.000 claims 75
- 239000000758 substrate Substances 0.000 claims 14
- 239000011229 interlayer Substances 0.000 claims 13
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 10
- 229910052718 tin Inorganic materials 0.000 claims 10
- 238000005260 corrosion Methods 0.000 claims 8
- 230000007797 corrosion Effects 0.000 claims 8
- 239000011247 coating layer Substances 0.000 claims 6
- 229910018182 Al—Cu Inorganic materials 0.000 claims 5
- 229910052737 gold Inorganic materials 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010092871A JP5408447B2 (ja) | 2010-04-14 | 2010-04-14 | 電子装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010092871A JP5408447B2 (ja) | 2010-04-14 | 2010-04-14 | 電子装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008027304A Division JP5233302B2 (ja) | 2007-03-15 | 2008-02-07 | 電子装置、共振子、及び電子装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010166620A JP2010166620A (ja) | 2010-07-29 |
| JP2010166620A5 true JP2010166620A5 (enrdf_load_stackoverflow) | 2012-04-05 |
| JP5408447B2 JP5408447B2 (ja) | 2014-02-05 |
Family
ID=42582357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010092871A Expired - Fee Related JP5408447B2 (ja) | 2010-04-14 | 2010-04-14 | 電子装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5408447B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5344175B2 (ja) | 2009-12-22 | 2013-11-20 | セイコーエプソン株式会社 | Ｍｅｍｓ発振器及びその製造方法 |
| JP5682361B2 (ja) * | 2011-02-17 | 2015-03-11 | セイコーエプソン株式会社 | 振動デバイス、振動デバイスの製造方法、モーションセンサー、および電子機器 |
| JP2014076527A (ja) | 2012-10-12 | 2014-05-01 | Seiko Epson Corp | Ｍｅｍｓセンサー、および電子機器、ロボット、移動体 |
| JP2014184513A (ja) | 2013-03-22 | 2014-10-02 | Toshiba Corp | 電気部品およびその製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6602791B2 (en) * | 2001-04-27 | 2003-08-05 | Dalsa Semiconductor Inc. | Manufacture of integrated fluidic devices |
| JP4544880B2 (ja) * | 2003-09-25 | 2010-09-15 | 京セラ株式会社 | 微小電気機械式装置の封止方法 |
| JP2006202918A (ja) * | 2005-01-19 | 2006-08-03 | Sony Corp | 機能素子パッケージ体及びその製造方法 |
| JP4501715B2 (ja) * | 2005-02-16 | 2010-07-14 | セイコーエプソン株式会社 | Ｍｅｍｓ素子およびｍｅｍｓ素子の製造方法 |
| JP4724488B2 (ja) * | 2005-02-25 | 2011-07-13 | 日立オートモティブシステムズ株式会社 | 集積化マイクロエレクトロメカニカルシステム |
| JP2007125626A (ja) * | 2005-11-01 | 2007-05-24 | Toshiba Corp | Ｍｅｍｓ素子 |
| JP2007210083A (ja) * | 2006-02-13 | 2007-08-23 | Hitachi Ltd | Ｍｅｍｓ素子及びその製造方法 |
| JP2007216308A (ja) * | 2006-02-14 | 2007-08-30 | Seiko Epson Corp | 電子装置及びその製造方法 |
| JP2008016919A (ja) * | 2006-07-03 | 2008-01-24 | Matsushita Electric Ind Co Ltd | 音響感応装置 |
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2010
- 2010-04-14 JP JP2010092871A patent/JP5408447B2/ja not_active Expired - Fee Related