JP2010151745A5 - - Google Patents

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Publication number
JP2010151745A5
JP2010151745A5 JP2008332707A JP2008332707A JP2010151745A5 JP 2010151745 A5 JP2010151745 A5 JP 2010151745A5 JP 2008332707 A JP2008332707 A JP 2008332707A JP 2008332707 A JP2008332707 A JP 2008332707A JP 2010151745 A5 JP2010151745 A5 JP 2010151745A5
Authority
JP
Japan
Prior art keywords
component
direct current
filter unit
sensor according
reception signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008332707A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010151745A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008332707A priority Critical patent/JP2010151745A/ja
Priority claimed from JP2008332707A external-priority patent/JP2010151745A/ja
Priority to DE102009059260A priority patent/DE102009059260B4/de
Priority to US12/646,577 priority patent/US8107088B2/en
Publication of JP2010151745A publication Critical patent/JP2010151745A/ja
Publication of JP2010151745A5 publication Critical patent/JP2010151745A5/ja
Pending legal-status Critical Current

Links

JP2008332707A 2008-12-26 2008-12-26 変位センサ Pending JP2010151745A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008332707A JP2010151745A (ja) 2008-12-26 2008-12-26 変位センサ
DE102009059260A DE102009059260B4 (de) 2008-12-26 2009-12-22 Versetzungssensor
US12/646,577 US8107088B2 (en) 2008-12-26 2009-12-23 Displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008332707A JP2010151745A (ja) 2008-12-26 2008-12-26 変位センサ

Publications (2)

Publication Number Publication Date
JP2010151745A JP2010151745A (ja) 2010-07-08
JP2010151745A5 true JP2010151745A5 (enExample) 2012-01-05

Family

ID=42311491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008332707A Pending JP2010151745A (ja) 2008-12-26 2008-12-26 変位センサ

Country Status (3)

Country Link
US (1) US8107088B2 (enExample)
JP (1) JP2010151745A (enExample)
DE (1) DE102009059260B4 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103134437B (zh) * 2011-11-29 2016-06-15 英业达股份有限公司 测试治具及测试方法
WO2013096660A1 (en) * 2011-12-23 2013-06-27 Rudolph Technologies, Inc. On-axis focus sensor and method
JP5925390B1 (ja) * 2014-12-02 2016-05-25 三菱電機株式会社 変位センサ、変位検出装置及び変位検出方法
CN105066875B (zh) * 2015-07-20 2017-09-15 天津大学 一种具有柔性薄膜微波应变pin二极管阵列的检测器
US10600174B2 (en) * 2015-12-29 2020-03-24 Test Research, Inc. Optical inspection apparatus
KR102618813B1 (ko) 2016-01-27 2023-12-27 삼성전자주식회사 공정 챔버 모니터링 장치
US10574852B2 (en) * 2018-01-12 2020-02-25 Seiko Epson Corporation Imaging optical mechanism, reading module, and image reading apparatus
DE102018126009B4 (de) * 2018-10-19 2022-05-19 Leica Microsystems Cms Gmbh Verfahren und Mikroskop zur Bestimmung der Dicke eines Deck- oder Tragglases
JP6986235B2 (ja) 2018-12-20 2021-12-22 オムロン株式会社 共焦点センサ
CN116689952A (zh) * 2023-06-30 2023-09-05 深圳市圭华智能科技有限公司 用于激光精密加工的同轴对焦系统及安装方法、对焦方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105415A (ja) * 1984-10-29 1986-05-23 Mitsubishi Electric Corp 距離計測装置
JP3300803B2 (ja) * 1993-10-14 2002-07-08 株式会社キーエンス 変位計及び変位測定方法、厚み計
JPH0861939A (ja) * 1994-08-19 1996-03-08 Nikon Corp 基板ホルダの表面状態測定方法及び装置
JP3015912B2 (ja) * 1995-07-13 2000-03-06 横河電機株式会社 共焦点光スキャナ
JPH09127420A (ja) * 1995-11-02 1997-05-16 Takaoka Electric Mfg Co Ltd 共焦点走査顕微鏡の走査装置
JP4115624B2 (ja) * 1999-04-27 2008-07-09 オリンパス株式会社 ３次元形状測定装置
JP2001021330A (ja) * 1999-07-12 2001-01-26 Totsuka Tadao 共焦点装置のスリット円盤、共焦点装置および共焦点装置の画像測定方法
JP2001091844A (ja) * 1999-09-22 2001-04-06 Olympus Optical Co Ltd 共焦点走査型顕微鏡
KR100421427B1 (ko) * 2001-01-11 2004-03-09 한국과학기술원 공초점원리의 단위변위센서를 이용한 초정밀 변위측정기및 다양한 변위측정방법
JP2002213814A (ja) 2001-01-15 2002-07-31 Noritz Corp 風呂システムの制御方法及びこの制御方法を実施する風呂釜装置
JP2003337008A (ja) * 2002-05-21 2003-11-28 Canon Inc 変位計
JP2004286608A (ja) * 2003-03-24 2004-10-14 Olympus Corp 共焦点高さ測定装置
JP2005195539A (ja) * 2004-01-09 2005-07-21 Nikon Corp 光学測定装置
JP4213599B2 (ja) * 2004-01-28 2009-01-21 株式会社東芝 光学式計測方法および装置
JP2007121122A (ja) * 2005-10-28 2007-05-17 Omron Corp 変位センサ

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