JP2010149953A - Member treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a member treatment device capable of uniformly applying treatment, such as heating treatment, to a treatment target member. <P>SOLUTION: A treatment target member GB is carried forward with a target support fork 120 from a target standby position WP to a target treatment position BP, and the target support fork 120 is relatively moved to downwards of a plurality of lengthwise stretching wire rods 101, so that the target treatment member GB is supported by the target treatment position BP using the a plurality of lengthwise stretching wire rods 101 each stretched in the longitudinal directions with a parallel arrangement in the right and left directions. In this state, the target support fork 120, which is located downward than the plurality of lengthwise stretching wire rods 101, is carried backward from the target treatment position BP to the target standby position WP using a fork moving mechanism 122. In this state, the target treatment member GB supported by the target treatment position BP using the plurality of lengthwise stretching wire rods 101 is applied with heating treatment by a panel heater 111. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a member processing apparatus that carries a predetermined process by carrying a flat processing target member into a target processing position from a target standby position behind.

  Conventionally, when a processing target member such as a glass substrate is heat-processed by a heat processing apparatus that is a member processing apparatus, the processing target member is supported by a stationary pin and a movable pin of a lift pin mechanism. In this lift pin mechanism, the movable pin moves in the vertical direction and the horizontal direction.

Therefore, the processing target member is supported by the raised movable pin and moved in the horizontal direction, and the movable pin is lowered and supported by the stationary pin. By repeating this operation, the position where the movable pin and the non-moving pin come into contact with the processing target member is constantly changed, and temperature unevenness of the processing target member due to the pin contact is suppressed (for example, see Patent Documents 1 and 2).
JP-A-10-76211 JP 2006-61755 A

  However, in the above-described member processing apparatus, the processing target member is alternately supported by the movable pin and the non-moving pin of the lift pin mechanism, so that the structure is complicated. In addition, a flat plate-like member to be processed is supported horizontally at a plurality of points by a movable pin and a stationary pin.

  For this reason, stress and heat transfer are concentrated in a dot shape at the support position of the processing target member by the movable pin and the non-moving pin, and it is difficult to perform predetermined processing such as heat treatment and reduced pressure drying uniformly on the processing target member It is.

  This invention is made | formed in view of the above subjects, and provides the member processing apparatus which can perform predetermined processes, such as heat processing and pressure reduction drying, uniformly to a process target member.

  The member processing apparatus of the present invention is a member processing apparatus that carries a predetermined process by carrying a flat processing target member from a target standby position behind to a target processing position, and is arranged in parallel in the left-right direction in the front-rear direction. A plurality of front and rear stretched wires that are each stretched to support the processing target member at the target processing position, and a member processing mechanism that executes a predetermined process on the processing target member supported at the target processing position by the plurality of front and rear stretching wires. And a target support fork that supports the processing target member substantially horizontally with at least a pair of target support claw shaped to pass through the gap between the plurality of stretched front and rear stretched wire members, and the target support fork as a target standby position and target A back-and-forth movement mechanism that moves back and forth to the processing position; and a vertical movement mechanism that relatively moves the target support fork at the target processing position above and below the plurality of front and rear stretched wires.

  Therefore, in the member processing apparatus of the present invention, the processing target member is substantially horizontally set to the target standby position by at least a pair of target support claws of the target support fork having a shape passing through the gap between the plurality of stretched front and rear stretched wire members. To support. The target support fork is advanced from the target standby position to the target processing position by the front-rear moving mechanism in a state where the target support fork is positioned above the front-rear stretched wire by the vertical movement mechanism. In this state, by moving the target support fork relative to the lower side of the plurality of front and rear stretched wires by the vertical movement mechanism, a plurality of front and rear stretched wires that are respectively stretched in the front and rear direction in a parallel arrangement in the left and right directions. The processing target member is supported at the target processing position. In this state, for example, the target support fork positioned below the plurality of front and rear stretched wires by the vertical movement mechanism is retracted from the target processing position to the target standby position by the front and rear movement mechanism. In such a state, predetermined processing is executed by the member processing mechanism on the processing target member supported at the target processing position by the plurality of front and rear stretched wire rods.

  Further, in the member processing apparatus as described above, at least a target support fork is stretched in the left-right direction below the plurality of front-rear stretched wire rods in parallel with each other in the front-rear direction through a gap where the target support fork is movable at the target processing position. A plurality of left and right stretched wire rods may be further included.

  Further, in the member processing apparatus as described above, a front winding mechanism that winds a plurality of front and rear stretched wires at least in front of the target processing position and a plurality of front and rear stretched wires at least behind the target processing position are wound. A rotating back winding mechanism, a front / rear driving mechanism that rotationally drives at least one of the front winding mechanism and the rear winding mechanism to shift the front / rear stretched wire rod back and forth, and a plurality of at least a left side of the target processing position A left winding mechanism that winds left and right stretched wires, a right winding mechanism that winds multiple left and right stretched wires at least to the right of the target processing position, a left winding mechanism, and a right You may have the left-right drive mechanism in which at least one of a winding mechanism is rotationally driven and the left-right stretched wire material changes to the left and right.

  Further, in the member processing apparatus as described above, the rear winding mechanism includes a plurality of large-diameter wire winding pulleys each winding a plurality of front and rear stretched wire rods, and a plurality of wire winding pulleys as an axis. A pulley rotation shaft having a small diameter that is rotatable and arranged in a direction, and the step on the outer peripheral surface of the pulley rotation shaft and the wire winding pulley is larger than the vertical thickness of the target support claw of the target support fork.

  Moreover, in the above-described member processing apparatus, the member processing mechanism may heat-treat the processing target member supported at the target processing position by a plurality of front and rear stretched wire members.

  In the member processing apparatus as described above, the member processing mechanism may dry the processing target member supported at the target processing position by a plurality of front and rear stretched wire rods under reduced pressure.

  The various components of the present invention do not necessarily have to be independent of each other. A plurality of components are formed as a single member, and a single component is formed of a plurality of members. It may be that a certain component is a part of another component, a part of a certain component overlaps with a part of another component, or the like.

  In the member processing apparatus of the present invention, the predetermined processing can be executed by the member processing mechanism on the processing target member supported at the target processing position by the plurality of front and rear stretched wires, so that the predetermined processing such as heat processing and reduced pressure drying is performed. It is possible to uniformly execute the processing target member.

  A first embodiment of the present invention will be described below with reference to the drawings. In this embodiment, as shown in the drawing, the front and rear and left and right directions are also defined in addition to the up and down direction. However, this is provided for the sake of convenience in order to briefly explain the relative relationship between the components. Therefore, the direction at the time of manufacture and use of the product which implements the present invention is not limited.

  The member processing apparatus 100 according to the present embodiment is a so-called pre-baking apparatus, and carries a flat processing target member GB such as a glass substrate used for a liquid crystal panel from the rear target standby position WP to the target processing position BP. A heating process which is a predetermined process is executed.

  Therefore, as shown in FIG. 1, the member processing apparatus 100 includes a plurality of front and rear stretched wires that are stretched in the front-rear direction and arranged in parallel in the left-right direction, and support the processing target member GB at the target processing position BP. 101, a panel heater 111 which is a member processing mechanism for performing a heating process on the processing target member GB supported at the target processing position BP by a plurality of front and rear stretching wires 101, and a plurality of front and rear stretching wires that are stretched A target support fork 120 that supports the processing target member GB substantially horizontally by at least a pair of target support claw 121 shaped to pass through the gap 101, and the target support fork 120 is moved back and forth between the target standby position WP and the target processing position BP. And a vertical movement mechanism for moving the target support fork 120 relative to the upper and lower sides of the plurality of front and rear stretched wire members 101 at least at the target processing position BP. It has a mechanism, a.

  More specifically, in the member processing apparatus 100 of the present embodiment, the above-described back-and-forth moving mechanism and the up-and-down moving mechanism are formed as a fork moving mechanism 122 that moves the target support fork 120 in the front-rear direction and the up-down direction. .

  In addition, the member processing apparatus 100 is stretched in the left-right direction in a parallel arrangement in the front-rear direction below the plurality of front-rear stretched wire members 101 through a gap in which at least the target support fork 120 is movable at the target processing position BP. A plurality of left and right stretched wire members 102 are further provided.

  A front winding mechanism 130 that winds a plurality of front and rear stretched wires 101 at least in front of the target processing position BP, and a rear that winds the plurality of front and rear stretched wires 101 in at least the rear of the target processing position BP. A winding mechanism 140, a left winding mechanism 150 that winds a plurality of left and right stretched wires 102 at least to the left of the target processing position BP, and a plurality of left and right stretched wires at least to the right of the target processing position BP And a right-hand winding mechanism 160 that winds the winding 102.

  The rear winding mechanism 140 is a rotation in which a plurality of large-diameter wire winding pulleys 141 individually winding a plurality of front and rear stretched wire members 101 and a plurality of wire winding pulleys 141 are arranged in the axial direction. And a pulley rotation shaft 142 having a small diameter.

  Since this pulley rotation shaft 142 is connected to a servo motor 143 that is a front-rear drive mechanism, the rear winding mechanism 140 is rotationally driven by this servo motor 143. In addition, the level | step difference of the outer peripheral surface of the pulley rotating shaft 142 and the wire winding pulley 141 is larger than the vertical thickness of the object support claw 121 of the object support fork 120.

  Similarly, in the front winding mechanism 130, a plurality of large-diameter wire winding pulleys 131 that individually wind the plurality of front and rear stretched wire members 101 and a plurality of wire winding pulleys 131 are arranged in the axial direction. A pulley rotation shaft 132 having a small diameter that is rotatable, and the pulley rotation shaft 132 is connected to a servo motor 133 that is a front-rear drive mechanism.

  Similarly, the left winding mechanism 150 and the right winding mechanism 160 also include a plurality of wire winding pulleys 151 and 161, pulley rotation shafts 152 and 162, and servo motors 153 and 163 that are left and right drive mechanisms. The left and right stretched wire 102 is shifted left and right.

  The front winding mechanism 130 and the servo motor 133 are mounted on the front base member 134, and the rear winding mechanism 140 and the servo motor 143 are mounted on the rear base member 144.

  The front base member 134 and the rear base member 144 are integrally connected below the panel heater 111 by a first lifting mechanism 171 and supported so as to be movable in the vertical direction.

  Similarly, the left winding mechanism 150 and the servo motor 153 are mounted on the left base member 154, and the right winding mechanism 160 and the servo motor 163 are mounted on the right base member 164.

  The left base member 154 and the right base member 164 are also integrally connected below the panel heater 111 by the second lifting mechanism 172, and are supported so as to be movable in the vertical direction.

  Further, box-shaped antifouling covers 135, 145, 155, and 165 are individually attached to the base members 134, 144, 154, and 164, and the winding mechanisms are respectively attached to the antifouling covers 135, 145, 155, and 165. 130, 140, 150, 160 and servo motors 133, 143, 153, 163 are accommodated. Naturally, the antifouling covers 135, 145, 155 and 165 are formed with small holes through which the plurality of front and rear stretched wire members 101 and the plurality of left and right stretched wire members 102 are individually passed.

  Further, since the target support fork 120 moves backward to place the processing target member GB at the processing target position or to take out the processing target member GB for which the predetermined processing is completed, the antifouling cover 145 includes, for example, As shown in FIG. 3, a relief groove 146 is formed in accordance with the size and arrangement of the target support claw 121.

  Further, as shown in FIG. 4, a suction pump 112 is piped to the antifouling covers 135, 145, 155, 165. In the member processing apparatus 100 according to the present embodiment, the panel heater 111 is attached to the processing apparatus main body (not shown) with respect to the front and rear stretched wire 101 and the left and right stretched wire 102 that are movable in the vertical direction as described above. Fixed immovable.

  The panel heater 111 heats the processing target member GB supported at the target processing position BP by the plurality of front and rear stretched wire rods 101 and the plurality of left and right stretched wire rods 102 from, for example, 80 to 150 ° C. from below.

  The front / rear stretched wire 101 and the left / right stretched wire 102 are made of, for example, artificial fibers having heat resistance of 200 ° C. or higher, such as meta-aramid fibers and polyimide fibers. For this reason, the front and rear stretched wire rods 101 and the left and right stretched wire rods 102 are made of wires having a sufficiently small cross-sectional area perpendicular to the longitudinal direction, and have a heat capacity sufficiently smaller than that of the processing target member GB in terms of physical properties.

  In the configuration as described above, the member processing apparatus 100 according to the present embodiment carries the heating process by bringing the flat processing target member GB into the target processing position BP from the rear target standby position WP as described above. .

  More specifically, in the member processing apparatus 100 of the present embodiment, as shown in FIG. 2 (a), in the initial state, the front / rear stretched wire 101 is positioned at the uppermost position by the first elevating mechanism 171, and the panel It is separated from the heater 111.

  In addition, the left and right stretched wire 102 is disposed at a position below the upper surface of the pulley rotating shaft 142 of the rear winding mechanism 140 and above the upper surface of the panel heater 111 by the second lifting mechanism 172.

  Then, the processing target member GB is supported substantially horizontally by the fork moving mechanism 122 by the target support fork 120 positioned at the target standby position WP above the front and rear stretched wire 101.

  Next, as shown in FIG. 2 (b), the target support fork 120 is advanced from the target standby position WP to the target processing position BP while being positioned above the front and rear stretched wire 101 by the fork moving mechanism 122. .

  Next, as shown in FIG. 2 (c), the fork moving mechanism 122 moves the target support fork 120 to a position below the plurality of front and rear stretched wire members 101, so that the front and rear directions are arranged in parallel in the left and right directions. The processing target member GB is supported at the target processing position BP by the plurality of stretched front and rear stretched wire members 101.

  As described above, the upper and lower thicknesses of the target support claw 121 of the target support fork 120 are smaller than the level difference between the outer peripheral surfaces of the pulley rotating shaft 142 and the wire rod winding pulley 141. For this reason, the target support fork 120 can support the processing target member GB on the front and rear stretched wire 101 stretched on the wire winding pulley 141 without colliding with the pulley rotation shaft 142.

  In this state, as shown in FIG. 2 (d), the target support fork 120 is positioned below the plurality of front and rear stretched wire members 101 by the fork moving mechanism 122, from the target processing position BP to the target standby position WP. Retreated until.

  Next, as shown in FIG. 2 (e), the front / rear stretched wire 101 is lowered to the position of the left / right stretched wire 102 by the first elevating mechanism 171, whereby the front / rear stretched wire 101 and the left / right stretched wire 102. The processing target member GB is supported.

  Next, as shown in FIG. 2 (f), when the first elevating mechanism 171 and the second elevating mechanism 172 are lowered to a predetermined position, the processing target member GB becomes the front and rear stretched wire 101 and the left and right stretched wire 102. It is arranged in the vicinity of the upper surface of the panel heater 111 in a state where it is supported on the front, rear, left and right.

  In this state, the processing target member GB is heated by the panel heater 111. At this time, the processing target member GB is supported by the plurality of front and rear stretched wire members 101 and the plurality of left and right stretched wire members 102 in the front and rear and left and right directions.

  Since the front and rear stretched wire 101 and the left and right stretched wire 102 have a sufficiently small cross-sectional area and heat capacity as described above, heat conduction is also reduced. For this reason, the deviation of the temperature distribution of the process target member GB heat-processed by the panel heater 111 can be suppressed, and the process target member GB can be heat-processed uniformly.

  Furthermore, since the processing target member GB is supported by the plurality of front and rear stretched wire members 101 and the plurality of left and right stretched wire members 102 in the front and rear and right and left directions, the stress of this support does not concentrate locally. For this reason, the processing target member GB is heat-treated without causing deformation due to stress concentration.

  When the heating process of the processing target member GB as described above is completed, the processing target member GB subjected to the heating process is moved to the target standby position WP by executing the operations of FIGS. It is carried out.

  At this time, in the member processing apparatus 100 of the present embodiment, the winding mechanisms 130, 140, 150, and 160 are rotationally driven by the servo motors 133, 143, 153, and 163, and the front and rear stretched wire rods positioned at the target processing position BP. 101 and the left and right stretched wire 102 are renewed.

  For this reason, since the processing target member GB is not supported by the front and rear stretched wire rods 101 and the left and right stretched wire rods 102 that have been soiled by the previous heat repair, unnecessary heating unevenness or contamination of the processing target member GB can be prevented. .

  Moreover, in the member processing apparatus 100 of the present embodiment, when the winding mechanisms 130, 140, 150, 160 are rotationally driven by the servo motors 133, 143, 153, 163, the antifouling covers 135, 145 are driven by the suction pump 112. , 155, 165 are aspirated.

  For this reason, even if dust is generated due to the operation of each winding mechanism 130, 140, 150, 160, it is discharged outside the member processing apparatus 100 without entering the target processing position BP. Therefore, it is possible to reliably prevent the processing target member GB from being stained.

  In the member processing apparatus 100 according to the present embodiment, the servo motors 133, 143, 153, and 163 are equipped on all the winding mechanisms 130, 140, 150, and 160 as described above. For this reason, the front and rear stretched wire 101 and the left and right stretched wire 102 can be reliably transitioned, and the tension can be maintained optimally.

  The present invention is not limited to the present embodiment, and various modifications are allowed without departing from the scope of the present invention. For example, in the above embodiment, each time the heating process of the processing target member GB is executed, the winding mechanisms 130, 140, 150, 160 are rotationally driven in a predetermined direction to renew the front and rear stretched wire 101 and the left and right stretched wire 102. Was illustrated.

  However, each time the heat treatment of the processing target member GB is performed, the winding mechanisms 130, 140, 150, and 160 may be rotationally driven in opposite directions to reciprocate the front and rear stretched wire 101 and the left and right stretched wire 102. .

  Also in this case, it is possible to prevent the processing target member GB which is not heated from being supported by the heated front and rear stretched wire 101 and the left and right stretched wire 102. Furthermore, since the front and rear stretched wire 101 and the left and right stretched wire 102 having a predetermined length can be repeatedly used, the running cost of the member processing apparatus 100 can be reduced.

  Note that when the front / rear stretched wire 101 and the left / right stretched wire 102 are reciprocated as described above, for example, a mechanism for removing dust from the moving front / rear stretched wire 101 and the left / right stretched wire 102 is used as an antifouling cover 135, 145. It is preferable to mount on 155, 165, etc. (not shown).

  In the above embodiment, the front, rear, left and right winding mechanisms 130, 140, 150, and 160 are all driven by the servo motors 133, 143, 153, and 163. However, if the front and rear stretched wire 101 and the left and right stretched wire 102 are changed only in a certain direction, one of the front winding mechanism 130 and the rear winding mechanism 140, the left winding mechanism 150, and the right winding mechanism. There may be a rotation drive mechanism such as a servomotor in one of the 160.

  In that case, as shown in FIG. 5, it is preferable to mount a torque clutch 175 such as a one-way clutch in which the tension of the front / rear stretched wire 101 and the left / right stretched wire 102 is constant, as shown in FIG. It is.

  If such a torque clutch 175 is also mounted in a winding mechanism that is rotationally driven, the tension of the wound front and rear stretched wire 101 and the left and right stretched wire 102 can be kept below a certain level to prevent breakage. .

  Furthermore, in order to prevent the processing target member GB that is not heated in the above form from being supported by the heated front / rear stretched wire 101 and the left / right stretched wire 102, the front / rear stretched wire 101 and the left / right stretched wire 102 are prevented. It is exemplified that the wire is wound by the front, rear, left and right winding mechanisms 130, 140, 150, and 160 for transition.

  However, when the heat capacity of the front and rear stretched wire 101 and the left and right stretched wire 102 is sufficiently small or when the heat dissipation is sufficient, a mechanism for cooling the front and rear stretched wire 101 and the left and right stretched wire 102 is mounted, etc. Therefore, a member processing apparatus that does not transition the front and rear stretched wire 101 and the left and right stretched wire 102 is not impossible (not shown).

  In the above embodiment, the member processing apparatus 100 is exemplified to have the left and right stretched wire rods 102 as well as the front and rear stretched wire rods 101. However, the member processing device (not shown) that supports the processing target member GB only by the front and rear stretched wire rods 101. ) Is not impossible.

  Furthermore, in the said form, the left-right stretched wire 102 was illustrated being stretched in the left-right direction orthogonal to the front-back stretched wire 101. However, it is not impossible for the left and right stretched wire 102 to be stretched in a direction intersecting with the front and rear stretched wire 101 at a predetermined angle, and a plurality of sets of wires are disposed so as to intersect the front and back stretched wire 101 in a plurality of directions. Is not impossible (not shown).

  In the above embodiment, the target support fork 120 and the front, rear, left and right winding mechanisms 130, 140, 150, and 160 all move up and down. However, if the left and right stretched wire 102 has a sufficiently small heat capacity and sufficiently good heat dissipation, and the left and right stretched wire 102 at the target processing position BP is reliably cooled by renovation by the right and left winding mechanisms 150 and 160. For example, as in the member processing apparatus 200 illustrated in FIG. 6, a necessary function can be realized without moving the left and right winding mechanisms 150 and 160 and the target support fork 120 up and down.

  More specifically, in this member processing apparatus 200, the left and right winding mechanisms 150, 160 are fixed so that the left and right stretched wire 102 is disposed at a predetermined position above the panel heater 111, and the target is further upward. The support fork 120 is supported so as to move only in the front-rear direction.

  As shown in FIG. 6 (a), the first elevating mechanism 171 that is movable in the vertical direction in the initial state places the front / rear stretched wire 101 above the left / right stretched wire 102 and below the target support fork 120. Has been.

  In this state, as shown in FIG. 6B, the target support fork 120 is advanced from the target standby position WP to the target processing position BP. Next, as shown in FIG. 6C, the front / rear stretched wire 101 is moved above the target support fork 120 by the first elevating mechanism 171 to support the processing target member GB.

  In such a state, as shown in FIG. 6D, the target support fork 120 is retracted from the target processing position BP to the target standby position WP. Next, as shown in FIG. 6 (e), the front / rear stretched wire 101 is lowered to the position of the left / right stretched wire 102 by the first elevating mechanism 171, whereby the front / rear stretched wire 101 and the left / right stretched wire 102. The processing target member GB is supported.

  In this state, the processing target member GB is supported in the front / rear / right / left direction by the front / rear stretched wire rod 101 and the left / right stretched wire rod 102 and disposed near the upper surface of the panel heater 111. Is done. In this member processing apparatus 200, the object support fork 120 and the left and right winding mechanisms 150 and 160 do not need to move up and down, and thus the structure and control thereof can be simplified.

  In this member processing apparatus 200, the left and right stretched wire 102 is disposed at a predetermined position above the panel heater 111, but the left and right winding mechanisms 150 and 160 are each time the heating process of the processing target member GB is completed. It is wound and renovated.

  For this reason, it can prevent easily and reliably that the process target member GB to be heat-treated from now on is supported by the high-temperature left and right stretched wire 102. However, if the remaining heat of the left and right stretched wire 102 still becomes a problem, the left and right stretched wire 102 may be moved up and down in the same manner as the member processing apparatus 100 described above.

  Furthermore, in the said form, it illustrated that the front winding mechanism 130 and the back winding mechanism 140 which move the back-and-forth stretched wire 101 back and forth, and the 1st raising / lowering mechanism 171 which moves up and down were formed separately.

  However, like the member processing apparatus 210 illustrated in FIG. 7, the front and rear stretched wire 101 can be moved up and down by the front winding mechanism 211 and the rear winding mechanism 212 that move the front and rear stretched wire 101 back and forth. Is possible.

  More specifically, also in this member processing apparatus 210, the left and right stretched wire 102 is fixed at a predetermined position above the panel heater 111, and further, the target support fork 120 is supported so as to move only in the front-rear direction. Yes.

  In the front winding mechanism 211 and the rear winding mechanism 212, large-diameter wire rod winding pulleys 213 and 214 are eccentrically supported by pulley rotation shafts 132 and 142. As shown in FIG. 7A, in the initial state, the wire winding pulleys 213 and 214 of the front winding mechanism 211 and the rear winding mechanism 212 are positioned below, so that the front and rear stretched wire 101 is left and right. It is disposed at a position above the object support fork 120 above the object 102.

  In this state, as shown in FIG. 7B, the target support fork 120 is advanced from the target standby position WP to the target processing position BP. Next, as shown in FIGS. 7 (c) and 7 (d), the front winding mechanism 211 and the rear winding mechanism 212 are rotationally driven so that the wire winding pulleys 213 and 214 that are eccentric and the front and rear stretched wire rods. 101 is displaced upward and the processing target member GB is supported.

  In this state, as shown in FIG. 7D, the target support fork 120 is retracted from the target processing position BP to the target standby position WP. Next, as shown in FIGS. 7 (e) and 7 (f), the front winding mechanism 211 and the rear winding mechanism 212 are further rotationally driven, so that the eccentric wire rod winding pulleys 213 and 214 and the front and rear stretchers are stretched. The wire 101 is displaced downward, and the processing target member GB is supported together with the left and right stretched wire 102.

  In this state, the processing target member GB is supported in the front / rear / right / left direction by the front / rear stretched wire rod 101 and the left / right stretched wire rod 102 and disposed near the upper surface of the panel heater 111. Is done.

  In this member processing device 210, the front and rear winding mechanisms 211 and 212 can be displaced in the front-rear direction by moving the front-rear stretched wire 101 in the front-rear direction, thereby further simplifying the structure and control. It can be.

  Of course, also in this member processing apparatus 210, since the left and right stretched wire 102 is wound and renewed by the right and left winding mechanisms 150 and 160 every time the heating process of the processing target member GB is completed, the heating process is performed from now on. It is possible to easily and reliably prevent the processing target member GB from being supported by the high-temperature left and right stretched wire 102.

  In the above embodiment, the cross-sectional area and the heat capacity of the front and rear stretched wire 101 and the left and right stretched wire 102 are sufficiently small to reduce heat conduction and the temperature distribution of the processing target member GB to be heat-treated by the panel heater 111. It is exemplified that the deviation of the above is suppressed.

  Of course, the cross-sectional area and heat capacity of the front and rear stretched wire 101 and the left and right stretched wire 102 are the allowable temperature distribution deviation of the processing target member GB, the strength and durability for supporting the processing target member GB, etc. Is appropriately determined.

  Moreover, in the said form, the member processing apparatus 100 illustrated heat-processing the process target member GB from the downward direction with the panel heater 111. However, a member processing apparatus that heats the processing target member GB from below with the panel heater 111 or a member processing apparatus that heats the processing target member GB from above and below with the pair of panel heaters 111 is also possible. (Both not shown).

  Furthermore, in the said form, the prebaking apparatus which heat-processes the process target member GB with the panel heater 111 was illustrated as the member processing apparatus 100. FIG. However, a reduced-pressure drying apparatus for drying the processing target member GB under reduced pressure can be used as a member processing apparatus (not shown).

  Needless to say, the above-described embodiment and a plurality of modifications can be combined within a range in which the contents do not conflict with each other. Further, in the above-described embodiments and modifications, the structure of each part has been specifically described, but the structure and the like can be changed in various ways within a range that satisfies the present invention.

It is a typical perspective view which shows the internal structure of the member processing apparatus of embodiment of this invention. It is a typical side view which shows the operation | movement process of the internal mechanism of a member processing apparatus. It is a typical perspective view which shows the structure of the principal part of a member processing apparatus. It is a schematic diagram which shows the piping structure of the principal part of a member processing apparatus. It is a vertical side view which shows the internal structure of the principal part of one modification. It is a typical side view which shows the operation | movement process of the internal mechanism of the member processing apparatus of another modification. It is a typical side view which shows the action | operation process of the internal mechanism of the member processing apparatus of another modification.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Member processing apparatus 101 Front and rear tension wire 102 Left and right tension wire 111 Panel heater 112 Suction pump 120 Target support fork 121 Target support claw 122 Fork moving mechanism 130 Front winding mechanism 131 Wire winding pulley 132 Pulley rotating shaft 133 Servo motor 134 Front base members 135, 145, 155, 165 Antifouling cover 140 Rear winding mechanism 141 Wire winding pulley 142 Pulley rotating shaft 143 Servo motor 144 Rear base member 146 Escape groove 150 Left winding mechanism 151, 161 Wire winding Pulleys 152 and 162 Pulley rotation shaft 153 Servo motor 154 Left base member 160 Right winding mechanism 163 Servo motor 164 Right base member 171 First elevating mechanism 172 Second elevating mechanism 175 Torque clutch 200 Member processing device 210 Member processing Device 211 forward winding mechanism 212 backward winding mechanism 213 wire rod wound pulley BP target processing position GB processed member WP target standby position

Claims (6)

A member processing apparatus that carries a predetermined process by carrying a flat processing target member from a target standby position behind to a target processing position,
A plurality of front and rear stretched wires that are stretched in the front-rear direction in parallel arrangement in the left-right direction and support the processing target member at the target processing position;
A member processing mechanism for executing the predetermined processing on the processing target member supported at the target processing position by a plurality of the front and rear stretched wire rods;
A target support fork that supports the processing target member substantially horizontally with at least a pair of target support claws in a shape that passes through the gaps between the plurality of stretched front and rear stretched wire members;
A forward / backward moving mechanism for moving the target support fork back and forth between the target standby position and the target processing position;
A vertical movement mechanism for relatively moving the target support fork at least at the target processing position above and below the plurality of front and rear stretched wire rods;
A member processing apparatus.   A plurality of left and right stretched wires that are respectively stretched in the left and right direction in a parallel arrangement in the front-rear direction below the plurality of front and rear stretched wires through a gap in which at least the target support fork is movable at the target processing position. The member processing apparatus according to claim 1, further comprising: A front winding mechanism that winds a plurality of the front and rear stretched wires in front of at least the target processing position;
A rear winding mechanism that winds the plurality of front and rear stretched wires at least behind the target processing position; and
A front-rear drive mechanism that rotationally drives at least one of the front winding mechanism and the rear winding mechanism to cause the front-rear tension wire to make a front-rear transition;
A left-hand winding mechanism that winds the plurality of left and right stretched wires at least to the left of the target processing position;
A right-hand winding mechanism that winds the plurality of left and right stretched wires at least to the right of the target processing position;
A left-right drive mechanism that rotationally drives at least one of the left-hand winding mechanism and the right-hand winding mechanism to shift the left-right stretched wire to the left and right;
The member processing apparatus according to claim 2. The rear winding mechanism includes a plurality of large-diameter wire winding pulleys that individually wind the plurality of front and rear stretched wire rods, and a plurality of the wire winding pulleys that are arranged in an axial direction. A small-diameter pulley rotation shaft,
4. The member processing apparatus according to claim 2, wherein a step of an outer peripheral surface of the pulley rotation shaft and the wire winding pulley is larger than a vertical thickness of the target support claw of the target support fork.   5. The member processing apparatus according to claim 1, wherein the member processing mechanism heat-treats the processing target member supported at the target processing position by a plurality of the front and rear stretched wire members.   5. The member processing apparatus according to claim 1, wherein the member processing mechanism is configured to dry the processing target member supported at the target processing position by a plurality of the front and rear stretched wire rods under reduced pressure.

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